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Conferences > CLEO_SI > 2023 > SF3J > SF3J.8

Large scale Si3N4 Integrated Circuit for High-resolution Interferometric imaging

Yichi Zhang, Rijuta Ravichandran, Yujia Zhang, and S.J. Ben Yoo

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Abstract

We design, fabricate and characterize a 4-layer 110mm×44mm Si3N4 PIC with long routing waveguides and arrayed waveguides gratings based on a wafer-scale integration process for a high-resolution interferometric imager with 1200nm~1600nm bandwidth.

© 2023 The Author(s)

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