Abstract
We propose a novel technique for simultaneous measurement of layer thicknesses and refractive indices of multiple layers. It is based on a combination of a confocal microscope and low-coherence interferometry. We derived an expression for the geometrical thickness and the refractive index of each layer from both tracing of a marginal ray accepted by a microscope objective and optical path matching conditions. Experimental verification of this method is illustrated by several samples that have a maximum of 13 layers. The geometrical thicknesses and refractive indices thus derived agreed well with those measured by a micrometer or cited from the literature.
© 1996 Optical Society of America
Full Article | PDF ArticleMore Like This
Yuuki Watanabe and Ichirou Yamaguchi
Appl. Opt. 41(22) 4497-4502 (2002)
Seokhan Kim, Jihoon Na, Myoung Jin Kim, and Byeong Ha Lee
Opt. Express 16(8) 5516-5526 (2008)
David J. Bang, Yudeuk Kim, Yoohan Kim, Myung-Jik Kim, and Kyong Hon Kim
Appl. Opt. 57(16) 4428-4433 (2018)