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Broadband Polarization Beam Splitter Rotator Using Only Silicon Nitride

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Abstract

We designed and fabricated a CMOS-compatible polarization beam splitter and rotator purely in Si3N4, achieving experimentally an insertion loss of ~1.5dB and a polarization extinction ratio greater than 15dB from 1280 to 1320nm.

© 2024 The Author(s)

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