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Conferences > CLEO_SI > 2023 > STh3R > STh3R.2

Zero-Change CMOS Nanophotonics: Converting Foundry Semiconductor Chips to Plasmonic Electro-optic Modulators

Mohamed ElKabbash, Isaac Harris, Sivan Trajtenberg-Mills, Saumil Bandyopadhyay, Xibi Chen, Mohamed I. Ibrahim, Ruonan Han, and Dirk Englund

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Abstract

We create nanophotonic devices using CMOS foundry processes where the top metal layers exhibit a plasmonic resonance. By integrating liquid crystals and applying a bias, we measure a 20 nm resonance shift at ~700 nm.

© 2023 The Author(s)

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