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Conferences > CLEO_SI > 2023 > STh3H > STh3H.4

Toward hybrid integration of exotic materials in an electronic-photonic CMOS platform via substrate removal

Deniz Onural, Hayk Gevorgyan, Carsten Eschenbaum, Christian Koos, and Miloš Popovič

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Abstract

We demonstrate direct access to the silicon device layer of a monolithic CMOS electronics-photonics platform with a full-digital back-end-metal stack, in post-fabrication at die level, allowing the integration of functional materials (e.g. into slot waveguides).

© 2023 The Author(s)

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