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Conferences > CLEO_Europe > 2023 > ce_p > ce_p_2
  • Conference on Lasers and Electro-Optics/Europe (CLEO/Europe 2023) and European Quantum Electronics Conference (EQEC 2023)
  • Technical Digest Series (Optica Publishing Group, 2023),
  • paper ce_p_2

Low-temperature and hydrogen-free silicon dioxide cladding for next-generation integrated photonics

Zihan Li, Zheru Qiu, Rui Ning Wang, Marta Divall, and Tobias J. Kippenberg

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Abstract

With the maturing of emerging low-loss integrated photonics platforms such as thin film LiNbO3[1], BaTiO3, GaP and AlGaAs on insulator[2], a low-temperature process for depositing low optical loss cladding material is now of critical importance for waveguide passivation and efficient input coupling via inverse tapers.

© 2023 IEEE

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