Abstract

We propose and demonstrate a fiber-tip sensor based on an ultra-thin silver diaphragm for highly sensitive and high frequency ultrasonic detection. The diaphragm is prepared by the vacuum thermal deposition method and then transferred to the fiber tip. The sensor demonstrated in this letter has a 300 nm thick diaphragm with an inner diameter of 75 μm, leading to a static pressure sensitivity of 1.6nm/kPa and a resonant frequency of 1.44 MHz. This sensor has potential applications in many fields such as structural health monitoring and medical ultrasonography.

© 2012 Optical Society of America

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References

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2012 (1)

2010 (2)

L. H. Chen, C. C. Chan, W. Yuan, S. K. Goh, and J. Sun, Sens. Actuators A 163, 42 (2010).
[CrossRef]

W. H. Wang, N. Wu, Y. Tian, C. Niezrecki, and X. W. Wang, Opt. Express 18, 9006 (2010).
[CrossRef]

2006 (1)

2005 (3)

Chan, C. C.

L. H. Chen, C. C. Chan, W. Yuan, S. K. Goh, and J. Sun, Sens. Actuators A 163, 42 (2010).
[CrossRef]

Chen, L. H.

L. H. Chen, C. C. Chan, W. Yuan, S. K. Goh, and J. Sun, Sens. Actuators A 163, 42 (2010).
[CrossRef]

Cibula, E.

Cooper, K. L.

Donlagic, D.

Giovanni, M. D.

M. D. Giovanni, Flat and Corrugated Diaphragm Design Handbook (Marcel Dekker, 1982).

Goh, S. K.

L. H. Chen, C. C. Chan, W. Yuan, S. K. Goh, and J. Sun, Sens. Actuators A 163, 42 (2010).
[CrossRef]

Lu, L.

Lu, W. W.

Niezrecki, C.

Ren, D. X.

Shi, X. L.

Sun, J.

L. H. Chen, C. C. Chan, W. Yuan, S. K. Goh, and J. Sun, Sens. Actuators A 163, 42 (2010).
[CrossRef]

Tian, Y.

Wang, A. B.

Wang, W. H.

Wang, X. W.

Wu, N.

Xu, F.

Xu, J. C.

Yu, B. L.

Yuan, W.

L. H. Chen, C. C. Chan, W. Yuan, S. K. Goh, and J. Sun, Sens. Actuators A 163, 42 (2010).
[CrossRef]

Zhu, Y. Z.

Appl. Opt. (1)

IEEE Photon. Technol. Lett. (1)

Y. Z. Zhu and A. B. Wang, IEEE Photon. Technol. Lett. 17, 447 (2005).
[CrossRef]

Opt. Express (1)

Opt. Lett. (3)

Sens. Actuators A (1)

L. H. Chen, C. C. Chan, W. Yuan, S. K. Goh, and J. Sun, Sens. Actuators A 163, 42 (2010).
[CrossRef]

Other (1)

M. D. Giovanni, Flat and Corrugated Diaphragm Design Handbook (Marcel Dekker, 1982).

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Figures (5)

Fig. 1.
Fig. 1.

Sensor fabrication process (a)–(d), silver thin film deposited on a glass substrate (e), and an optical microscope picture (f) of a typical sensor fabricated.

Fig. 2.
Fig. 2.

Reflection spectrum of a fiber-tip sensor.

Fig. 3.
Fig. 3.

Static pressure test of the fiber-tip sensor: (a) Reflection spectrum at different pressure levels; (b) spectral position of the fringe valley versus differential pressure.

Fig. 4.
Fig. 4.

Setup for frequency response test of the fiber-tip sensor. PD, photodetector; Amp., amplifier.

Fig. 5.
Fig. 5.

Frequency response test of the sensor: (a) ultrasonic impulse signal measured by a 5-MHz PZT; (b) response of the fiber-tip sensor to the ultrasonic impulse in (a); (c) Fourier transform of the impulse response shown in (b).

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