Abstract

Fresnel zone plates are used for imaging at extreme ultraviolet and soft x-ray wavelengths. Fabricating these zone plates is challenging due to small structure sizes (<150nm) and complex nanostructuring processes. Fabrication techniques such as electron-beam lithography followed by etching and electroplating processes have been developed over the years. We are reporting on the development of a technique incorporating focused gallium ion-beam lithography to fabricate Fresnel zone plates with 120 nm outermost structure size in a process that combines pattern exposure and structure transfer in one single step. The fabricated zone plates were successfully applied in a microscopic setup at λ=13nm wavelength.

© 2012 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Ion beam lithography for Fresnel zone plates in X-ray microscopy

Kahraman Keskinbora, Corinne Grévent, Michael Bechtel, Markus Weigand, Eberhard Goering, Achim Nadzeyka, Lloyd Peto, Stefan Rehbein, Gerd Schneider, Rolf Follath, Joan Vila-Comamala, Hanfei Yan, and Gisela Schütz
Opt. Express 21(10) 11747-11756 (2013)

Demonstration of 12 nm Resolution Fresnel Zone Plate Lens based Soft X-ray Microscopy

Weilun Chao, Jihoon Kim, Senajith Rekawa, Peter Fischer, and Erik H. Anderson
Opt. Express 17(20) 17669-17677 (2009)

Pinhole diffraction holography for fabrication of high-resolution Fresnel Zone Plates

Sankha S. Sarkar, Harun H. Solak, Christian David, and J. Friso van der Veen
Opt. Express 22(2) 1402-1412 (2014)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (3)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription