Abstract

In this Letter, we introduce an algorithm that overcomes limitations in shape measurement by holographic microscopic methods in cases of micro-optical elements with high NA, such as microlenses. The presented algorithm provides a simple method for shape reconstruction from interferometrically measured phase. The algorithm is based on the analysis of local ray transition through the measured object. We develop algorithms for holographic configurations working in transmission and reflection. The accuracy of the developed algorithms is proved by experiments and extensive simulations. We present an experiment in a holographic Mach–Zehnder configuration where we have measured and successfully reconstructed the height distribution of spherical and cylindrical microlenses with NA up to 0.3.

© 2011 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Absolute shape measurement of high NA focusing microobjects in digital holographic microscope with arbitrary spherical wave illumination

Tomasz Kozacki, Kamil Liżewski, and Julianna Kostencka
Opt. Express 22(14) 16991-17005 (2014)

Accurate shape measurement of focusing microstructures in Fourier digital holographic microscopy

Marta Mikuła, Tomasz Kozacki, Michał Józwik, and Julianna Kostencka
Appl. Opt. 57(1) A197-A204 (2018)

High-precision topography measurement through accurate in-focus plane detection with hybrid digital holographic microscope and white light interferometer module

Kamil Liżewski, Sławomir Tomczewski, Tomasz Kozacki, and Julianna Kostencka
Appl. Opt. 53(11) 2446-2454 (2014)

More Recommended Articles

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (8)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (6)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription