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Submicrometer infrared surface imaging using a scanning-probe microscope and an optical parametric oscillator laser

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Abstract

Submicrometer IR surface imaging was performed with a resolution better than the diffraction limit. The apparatus was based on an IR optical parametric oscillator laser and a commercial atomic force microscope and used, as the detection mechanism, induced resonant oscillations in an atomic force microscopy (AFM) cantilever. For the first time to our knowledge this was achieved with top-down illumination and a benchtop IR source, thus extending the range of potential applications of this technique. IR absorption and AFM topography images of polystyrene beads were recorded simultaneously with an image resolution of 200nm.

© 2009 Optical Society of America

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