Abstract

We have demonstrated near-wavelength resolution microscopy in the extreme ultraviolet. Images of 50nm diameter nanotubes were obtained with a single 1ns duration pulse from a desktop-size 46.9nm laser. We measured the modulation transfer function of the microscope for three different numerical aperture zone plate objectives, demonstrating that 54nm half-period structures can be resolved. The combination of near-wavelength spatial resolution and high temporal resolution opens myriad opportunities in imaging, such as the ability to directly investigate dynamics of nanoscale structures.

© 2008 Optical Society of America

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