Abstract

Terahertz diffractive optic elements have been fabricated in polypropylene by imprinting with a silicon master. A silicon master is created with eight phase levels for high diffraction efficiency and etched using inductively coupled plasma reactive ion etching. This technique enables the rapid replication of complex optical structures in a high transmission material. Excellent replication of multilevel high efficiency Fresnel lenses is shown. The resulting lenses were tested with a 2THz quantum cascade laser. The signal strength at the focus was 70 times the base signal strength.

© 2007 Optical Society of America

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Y. C. Shen, T. Lo, P. F. Taday, B. E. Cole, W. R. Tribe, and M. C. Kemp, Appl. Phys. Lett. 86, 241116 (2005).
[CrossRef]

J. Fitzgerald, B. E. Cole, and P. F. Taday, J. Pharm. Sci. 94, 177 (2005).
[CrossRef] [PubMed]

2004 (2)

V. P. Wallace, R. M. Woodward, A. J. Fitzgerald, E. Pickwell, R. J. Pye, and D. D. Amone, Br. J. Dermatol. 151, 424 (2004).
[CrossRef] [PubMed]

E. D. Walsby, S. D. Durbin, D. R. S. Cumming, and R. J. Blaikie, Curr. Appl. Phys. 4, 102 (2004).
[CrossRef]

2003 (2)

M. C. Kemp, P. F. Taday, B. E. Cole, J. A. Cluff, A. J. Fitzgerald, and W. R. Tribe, Proc. SPIE 5070, 44 (2003).
[CrossRef]

J. Flores-Mijangos and V. Beltrán-López, Appl. Opt. 42, 592 (2003).
[CrossRef] [PubMed]

2002 (1)

E. D. Walsby, S. Wang, J. Xu, T. Yuan, R. J. Blaikie, S. Durbin, X.-C. Zhang, and D. R. S. Cumming, J. Vac. Sci. Technol. B 20, 2867 (2002).
[CrossRef]

2000 (1)

H. Becker and C. Gärtner, Electrophoresis 21, 12 (2000).
[CrossRef] [PubMed]

1996 (1)

Alton, J.

Amone, D. D.

V. P. Wallace, R. M. Woodward, A. J. Fitzgerald, E. Pickwell, R. J. Pye, and D. D. Amone, Br. J. Dermatol. 151, 424 (2004).
[CrossRef] [PubMed]

Arieli, Y.

Barbieri, S.

Becker, H.

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[CrossRef] [PubMed]

Beere, H. E.

Beltrán-López, V.

Blaikie, R. J.

E. D. Walsby, S. D. Durbin, D. R. S. Cumming, and R. J. Blaikie, Curr. Appl. Phys. 4, 102 (2004).
[CrossRef]

E. D. Walsby, S. Wang, J. Xu, T. Yuan, R. J. Blaikie, S. Durbin, X.-C. Zhang, and D. R. S. Cumming, J. Vac. Sci. Technol. B 20, 2867 (2002).
[CrossRef]

Cluff, J. A.

M. C. Kemp, P. F. Taday, B. E. Cole, J. A. Cluff, A. J. Fitzgerald, and W. R. Tribe, Proc. SPIE 5070, 44 (2003).
[CrossRef]

Cole, B. E.

J. Fitzgerald, B. E. Cole, and P. F. Taday, J. Pharm. Sci. 94, 177 (2005).
[CrossRef] [PubMed]

Y. C. Shen, T. Lo, P. F. Taday, B. E. Cole, W. R. Tribe, and M. C. Kemp, Appl. Phys. Lett. 86, 241116 (2005).
[CrossRef]

M. C. Kemp, P. F. Taday, B. E. Cole, J. A. Cluff, A. J. Fitzgerald, and W. R. Tribe, Proc. SPIE 5070, 44 (2003).
[CrossRef]

Cumming, D. R. S.

E. D. Walsby, S. D. Durbin, D. R. S. Cumming, and R. J. Blaikie, Curr. Appl. Phys. 4, 102 (2004).
[CrossRef]

E. D. Walsby, S. Wang, J. Xu, T. Yuan, R. J. Blaikie, S. Durbin, X.-C. Zhang, and D. R. S. Cumming, J. Vac. Sci. Technol. B 20, 2867 (2002).
[CrossRef]

Durbin, S.

E. D. Walsby, S. Wang, J. Xu, T. Yuan, R. J. Blaikie, S. Durbin, X.-C. Zhang, and D. R. S. Cumming, J. Vac. Sci. Technol. B 20, 2867 (2002).
[CrossRef]

Durbin, S. D.

E. D. Walsby, S. D. Durbin, D. R. S. Cumming, and R. J. Blaikie, Curr. Appl. Phys. 4, 102 (2004).
[CrossRef]

Eisenberg, N.

Fitzgerald, A. J.

V. P. Wallace, R. M. Woodward, A. J. Fitzgerald, E. Pickwell, R. J. Pye, and D. D. Amone, Br. J. Dermatol. 151, 424 (2004).
[CrossRef] [PubMed]

M. C. Kemp, P. F. Taday, B. E. Cole, J. A. Cluff, A. J. Fitzgerald, and W. R. Tribe, Proc. SPIE 5070, 44 (2003).
[CrossRef]

Fitzgerald, J.

J. Fitzgerald, B. E. Cole, and P. F. Taday, J. Pharm. Sci. 94, 177 (2005).
[CrossRef] [PubMed]

Flores-Mijangos, J.

Gärtner, C.

H. Becker and C. Gärtner, Electrophoresis 21, 12 (2000).
[CrossRef] [PubMed]

Houghton, M.

Kemp, M. C.

Y. C. Shen, T. Lo, P. F. Taday, B. E. Cole, W. R. Tribe, and M. C. Kemp, Appl. Phys. Lett. 86, 241116 (2005).
[CrossRef]

M. C. Kemp, P. F. Taday, B. E. Cole, J. A. Cluff, A. J. Fitzgerald, and W. R. Tribe, Proc. SPIE 5070, 44 (2003).
[CrossRef]

Lewis, A.

Lo, T.

Y. C. Shen, T. Lo, P. F. Taday, B. E. Cole, W. R. Tribe, and M. C. Kemp, Appl. Phys. Lett. 86, 241116 (2005).
[CrossRef]

Noach, S.

Pickwell, E.

V. P. Wallace, R. M. Woodward, A. J. Fitzgerald, E. Pickwell, R. J. Pye, and D. D. Amone, Br. J. Dermatol. 151, 424 (2004).
[CrossRef] [PubMed]

Pye, R. J.

V. P. Wallace, R. M. Woodward, A. J. Fitzgerald, E. Pickwell, R. J. Pye, and D. D. Amone, Br. J. Dermatol. 151, 424 (2004).
[CrossRef] [PubMed]

Ritchie, D. A.

Shen, Y. C.

Y. C. Shen, T. Lo, P. F. Taday, B. E. Cole, W. R. Tribe, and M. C. Kemp, Appl. Phys. Lett. 86, 241116 (2005).
[CrossRef]

Sirtori, C.

Taday, P. F.

Y. C. Shen, T. Lo, P. F. Taday, B. E. Cole, W. R. Tribe, and M. C. Kemp, Appl. Phys. Lett. 86, 241116 (2005).
[CrossRef]

J. Fitzgerald, B. E. Cole, and P. F. Taday, J. Pharm. Sci. 94, 177 (2005).
[CrossRef] [PubMed]

M. C. Kemp, P. F. Taday, B. E. Cole, J. A. Cluff, A. J. Fitzgerald, and W. R. Tribe, Proc. SPIE 5070, 44 (2003).
[CrossRef]

Tribe, W. R.

Y. C. Shen, T. Lo, P. F. Taday, B. E. Cole, W. R. Tribe, and M. C. Kemp, Appl. Phys. Lett. 86, 241116 (2005).
[CrossRef]

M. C. Kemp, P. F. Taday, B. E. Cole, J. A. Cluff, A. J. Fitzgerald, and W. R. Tribe, Proc. SPIE 5070, 44 (2003).
[CrossRef]

Wallace, V. P.

V. P. Wallace, R. M. Woodward, A. J. Fitzgerald, E. Pickwell, R. J. Pye, and D. D. Amone, Br. J. Dermatol. 151, 424 (2004).
[CrossRef] [PubMed]

Walsby, E. D.

E. D. Walsby, S. D. Durbin, D. R. S. Cumming, and R. J. Blaikie, Curr. Appl. Phys. 4, 102 (2004).
[CrossRef]

E. D. Walsby, S. Wang, J. Xu, T. Yuan, R. J. Blaikie, S. Durbin, X.-C. Zhang, and D. R. S. Cumming, J. Vac. Sci. Technol. B 20, 2867 (2002).
[CrossRef]

Wang, S.

E. D. Walsby, S. Wang, J. Xu, T. Yuan, R. J. Blaikie, S. Durbin, X.-C. Zhang, and D. R. S. Cumming, J. Vac. Sci. Technol. B 20, 2867 (2002).
[CrossRef]

Woodward, R. M.

V. P. Wallace, R. M. Woodward, A. J. Fitzgerald, E. Pickwell, R. J. Pye, and D. D. Amone, Br. J. Dermatol. 151, 424 (2004).
[CrossRef] [PubMed]

Worral, C.

Xu, J.

E. D. Walsby, S. Wang, J. Xu, T. Yuan, R. J. Blaikie, S. Durbin, X.-C. Zhang, and D. R. S. Cumming, J. Vac. Sci. Technol. B 20, 2867 (2002).
[CrossRef]

Yuan, T.

E. D. Walsby, S. Wang, J. Xu, T. Yuan, R. J. Blaikie, S. Durbin, X.-C. Zhang, and D. R. S. Cumming, J. Vac. Sci. Technol. B 20, 2867 (2002).
[CrossRef]

Zhang, X.-C.

E. D. Walsby, S. Wang, J. Xu, T. Yuan, R. J. Blaikie, S. Durbin, X.-C. Zhang, and D. R. S. Cumming, J. Vac. Sci. Technol. B 20, 2867 (2002).
[CrossRef]

Appl. Opt. (2)

Appl. Phys. Lett. (1)

Y. C. Shen, T. Lo, P. F. Taday, B. E. Cole, W. R. Tribe, and M. C. Kemp, Appl. Phys. Lett. 86, 241116 (2005).
[CrossRef]

Br. J. Dermatol. (1)

V. P. Wallace, R. M. Woodward, A. J. Fitzgerald, E. Pickwell, R. J. Pye, and D. D. Amone, Br. J. Dermatol. 151, 424 (2004).
[CrossRef] [PubMed]

Curr. Appl. Phys. (1)

E. D. Walsby, S. D. Durbin, D. R. S. Cumming, and R. J. Blaikie, Curr. Appl. Phys. 4, 102 (2004).
[CrossRef]

Electrophoresis (1)

H. Becker and C. Gärtner, Electrophoresis 21, 12 (2000).
[CrossRef] [PubMed]

J. Pharm. Sci. (1)

J. Fitzgerald, B. E. Cole, and P. F. Taday, J. Pharm. Sci. 94, 177 (2005).
[CrossRef] [PubMed]

J. Vac. Sci. Technol. B (1)

E. D. Walsby, S. Wang, J. Xu, T. Yuan, R. J. Blaikie, S. Durbin, X.-C. Zhang, and D. R. S. Cumming, J. Vac. Sci. Technol. B 20, 2867 (2002).
[CrossRef]

Opt. Express (1)

Proc. SPIE (1)

M. C. Kemp, P. F. Taday, B. E. Cole, J. A. Cluff, A. J. Fitzgerald, and W. R. Tribe, Proc. SPIE 5070, 44 (2003).
[CrossRef]

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Figures (4)

Fig. 1
Fig. 1

Five main deposition and etching stages in order (A)–(E).

Fig. 2
Fig. 2

Imprinted polypropylene lens.

Fig. 3
Fig. 3

Schematic of the experimental setup used to test the lens.

Fig. 4
Fig. 4

Beam-waist profiles with and without lens present and inset showing scan of beam intensity on the x , z plane.

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