Abstract

We present a micro-electro-mechanical systems (MEMS) based Fabry-Perot (FP) sensor along with an optical system-on-a-chip (SOC) interrogator for simultaneous pressure and temperature sensing. The sensor employs a simple structure with an air-backed silicon membrane cross-axially bonded to a 45° polished optical fiber. This structure renders two cascaded FP cavities, enabling simultaneous pressure and temperature sensing in close proximity along the optical axis. The optical SOC consists of a broadband source, a MEMS FP tunable filter, a photodetector, and the supporting circuitry, serving as a miniature spectrometer for retrieving the two FP cavity lengths. Within the measured pressure and temperature ranges, experimental results demonstrate that the sensor exhibits a good linear response to external pressure and temperature changes.

© 2013 OSA

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    [CrossRef] [PubMed]
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2012 (3)

2010 (3)

2009 (3)

K. Bremer, E. Lewis, B. Moss, G. Leen, S. Lochmann, and I. Mueller, “Conception and preliminary evaluation of an optical fibre sensor for simultaneous measurement of pressure and temperature,” J. Phys. Conf. Ser.178, 012016 (2009).
[CrossRef]

W. Wang, N. Wu, Y. Tian, X. Wang, C. Niezrecki, and J. Chen, “Optical pressure/acoustic sensor with precise Fabry-Perot cavity length control using angle polished fiber,” Opt. Express17(19), 16613–16618 (2009).
[CrossRef] [PubMed]

S. H. Aref, M. I. Zibaii, and H. Latifi, “An improved fiber optic pressure and temperature sensor for downhole application,” Meas. Sci. Technol.20(3), 034009 (2009).
[CrossRef]

2008 (3)

S. Nesson, M. Yu, X. Zhang, and A. H. Hsieh, “Miniature fiber optic pressure sensor with composite polymer-metal diaphragm for intradiscal pressure measurements,” J. Biomed. Opt.13(4), 044040 (2008).
[CrossRef] [PubMed]

S. Nesson, M. Yu, X. Zhang, and A. H. Hsieh, “Miniature fiber optic pressure sensor with composite polymer-metal diaphragm for intradiscal pressure measurements,” J. Biomed. Opt.13(4), 044040 (2008).
[CrossRef] [PubMed]

Y. Ge, M. Wang, X. Chen, and H. Rong, “An optical MEMS pressure sensor based on a phase demodulation method,” Sens. Actuators A Phys.143(2), 224–229 (2008).
[CrossRef]

2007 (1)

2006 (1)

2005 (1)

S. J. Choi and P. D. Dapkus, “Tunable narrow linewidth all-buried heterostructure ring resonator filters using vernier effects,” IEEE Photon. Technol. Lett.17(1), 106–108 (2005).
[CrossRef]

2003 (1)

B. Qi, G. R. Pickrell, J. C. Xu, P. Zhang, Y. H. Duan, W. Peng, Z. Y. Huang, W. Huo, H. Xiao, R. G. May, and A. Wang, “Novel data processing techniques for dispersive white light interferometer,” Opt. Eng.42(11), 3165–3171 (2003).
[CrossRef]

2000 (1)

Y. Liu, Z. Guo, Y. Zhang, K. S. Chiang, and X. Dong, “Simultaneous pressure and temperature measurement with polymer-coated fibre Bragg grating,” Electron. Lett.36(6), 564–566 (2000).
[CrossRef]

1996 (1)

R. Legtenberg, A. W. Groeneveld, and M. Elwenspoek, “Comb-drive actuators for large displacements,” J. Micromech. Microeng.6(3), 320–329 (1996).
[CrossRef]

Aref, S. H.

S. H. Aref, M. I. Zibaii, and H. Latifi, “An improved fiber optic pressure and temperature sensor for downhole application,” Meas. Sci. Technol.20(3), 034009 (2009).
[CrossRef]

Asghari, M.

Bae, H.

Beausoleil, R. G.

Bienstman, P.

Bogaerts, W.

Bremer, K.

K. Bremer, E. Lewis, B. Moss, G. Leen, S. Lochmann, and I. Mueller, “Conception and preliminary evaluation of an optical fibre sensor for simultaneous measurement of pressure and temperature,” J. Phys. Conf. Ser.178, 012016 (2009).
[CrossRef]

Bryden, K. M.

C. Pang, M. Yu, X. M. Zhang, K. Gupta, and K. M. Bryden, “Multifunctional optical MEMS sensor platform with heterogeneous fiber optic Fabry–Pérot sensors for wireless sensor networks,” Sens. Actuators A Phys.188, 471–480 (2012).
[CrossRef]

Chen, J.

Chen, X.

Y. Ge, M. Wang, X. Chen, and H. Rong, “An optical MEMS pressure sensor based on a phase demodulation method,” Sens. Actuators A Phys.143(2), 224–229 (2008).
[CrossRef]

Chiang, K. S.

Y. Liu, Z. Guo, Y. Zhang, K. S. Chiang, and X. Dong, “Simultaneous pressure and temperature measurement with polymer-coated fibre Bragg grating,” Electron. Lett.36(6), 564–566 (2000).
[CrossRef]

Choi, S. J.

S. J. Choi and P. D. Dapkus, “Tunable narrow linewidth all-buried heterostructure ring resonator filters using vernier effects,” IEEE Photon. Technol. Lett.17(1), 106–108 (2005).
[CrossRef]

Claes, T.

Cooper, K. L.

Dapkus, P. D.

S. J. Choi and P. D. Dapkus, “Tunable narrow linewidth all-buried heterostructure ring resonator filters using vernier effects,” IEEE Photon. Technol. Lett.17(1), 106–108 (2005).
[CrossRef]

Dong, P.

Dong, X.

Y. Liu, Z. Guo, Y. Zhang, K. S. Chiang, and X. Dong, “Simultaneous pressure and temperature measurement with polymer-coated fibre Bragg grating,” Electron. Lett.36(6), 564–566 (2000).
[CrossRef]

Donlagic, D.

Duan, Y. H.

B. Qi, G. R. Pickrell, J. C. Xu, P. Zhang, Y. H. Duan, W. Peng, Z. Y. Huang, W. Huo, H. Xiao, R. G. May, and A. Wang, “Novel data processing techniques for dispersive white light interferometer,” Opt. Eng.42(11), 3165–3171 (2003).
[CrossRef]

Elwenspoek, M.

R. Legtenberg, A. W. Groeneveld, and M. Elwenspoek, “Comb-drive actuators for large displacements,” J. Micromech. Microeng.6(3), 320–329 (1996).
[CrossRef]

Esashi, M.

K. Totsu, Y. Haga, T. Matsunaga, and M. Esashi, “125 μm diameter fiber-optic pressure sensor system using spectrometer-based white light interferometry with high-speed wavelength tracking,” in 3rd IEEE EMBS Spec. Top. Conf. on Microtech. in Med. and Bio. (2005), pp. 170–173.

Feng, D.

Feng, N. N.

Ge, Y.

Y. Ge, M. Wang, X. Chen, and H. Rong, “An optical MEMS pressure sensor based on a phase demodulation method,” Sens. Actuators A Phys.143(2), 224–229 (2008).
[CrossRef]

Groeneveld, A. W.

R. Legtenberg, A. W. Groeneveld, and M. Elwenspoek, “Comb-drive actuators for large displacements,” J. Micromech. Microeng.6(3), 320–329 (1996).
[CrossRef]

Guo, Z.

Y. Liu, Z. Guo, Y. Zhang, K. S. Chiang, and X. Dong, “Simultaneous pressure and temperature measurement with polymer-coated fibre Bragg grating,” Electron. Lett.36(6), 564–566 (2000).
[CrossRef]

Gupta, K.

C. Pang, M. Yu, X. M. Zhang, K. Gupta, and K. M. Bryden, “Multifunctional optical MEMS sensor platform with heterogeneous fiber optic Fabry–Pérot sensors for wireless sensor networks,” Sens. Actuators A Phys.188, 471–480 (2012).
[CrossRef]

Haga, Y.

K. Totsu, Y. Haga, T. Matsunaga, and M. Esashi, “125 μm diameter fiber-optic pressure sensor system using spectrometer-based white light interferometry with high-speed wavelength tracking,” in 3rd IEEE EMBS Spec. Top. Conf. on Microtech. in Med. and Bio. (2005), pp. 170–173.

Hsieh, A. H.

S. Nesson, M. Yu, X. Zhang, and A. H. Hsieh, “Miniature fiber optic pressure sensor with composite polymer-metal diaphragm for intradiscal pressure measurements,” J. Biomed. Opt.13(4), 044040 (2008).
[CrossRef] [PubMed]

S. Nesson, M. Yu, X. Zhang, and A. H. Hsieh, “Miniature fiber optic pressure sensor with composite polymer-metal diaphragm for intradiscal pressure measurements,” J. Biomed. Opt.13(4), 044040 (2008).
[CrossRef] [PubMed]

Huang, Z. Y.

B. Qi, G. R. Pickrell, J. C. Xu, P. Zhang, Y. H. Duan, W. Peng, Z. Y. Huang, W. Huo, H. Xiao, R. G. May, and A. Wang, “Novel data processing techniques for dispersive white light interferometer,” Opt. Eng.42(11), 3165–3171 (2003).
[CrossRef]

Huo, W.

B. Qi, G. R. Pickrell, J. C. Xu, P. Zhang, Y. H. Duan, W. Peng, Z. Y. Huang, W. Huo, H. Xiao, R. G. May, and A. Wang, “Novel data processing techniques for dispersive white light interferometer,” Opt. Eng.42(11), 3165–3171 (2003).
[CrossRef]

Krishnamoorthy, A. V.

Latifi, H.

S. H. Aref, M. I. Zibaii, and H. Latifi, “An improved fiber optic pressure and temperature sensor for downhole application,” Meas. Sci. Technol.20(3), 034009 (2009).
[CrossRef]

Leen, G.

K. Bremer, E. Lewis, B. Moss, G. Leen, S. Lochmann, and I. Mueller, “Conception and preliminary evaluation of an optical fibre sensor for simultaneous measurement of pressure and temperature,” J. Phys. Conf. Ser.178, 012016 (2009).
[CrossRef]

Legtenberg, R.

R. Legtenberg, A. W. Groeneveld, and M. Elwenspoek, “Comb-drive actuators for large displacements,” J. Micromech. Microeng.6(3), 320–329 (1996).
[CrossRef]

Lewis, E.

K. Bremer, E. Lewis, B. Moss, G. Leen, S. Lochmann, and I. Mueller, “Conception and preliminary evaluation of an optical fibre sensor for simultaneous measurement of pressure and temperature,” J. Phys. Conf. Ser.178, 012016 (2009).
[CrossRef]

Li, G.

Li, X.

Li, Y.

Liang, H.

Liang, R.

Liao, S.

Liu, D.

Liu, H.

Liu, Y.

Y. Liu, Z. Guo, Y. Zhang, K. S. Chiang, and X. Dong, “Simultaneous pressure and temperature measurement with polymer-coated fibre Bragg grating,” Electron. Lett.36(6), 564–566 (2000).
[CrossRef]

Lochmann, S.

K. Bremer, E. Lewis, B. Moss, G. Leen, S. Lochmann, and I. Mueller, “Conception and preliminary evaluation of an optical fibre sensor for simultaneous measurement of pressure and temperature,” J. Phys. Conf. Ser.178, 012016 (2009).
[CrossRef]

Matsunaga, T.

K. Totsu, Y. Haga, T. Matsunaga, and M. Esashi, “125 μm diameter fiber-optic pressure sensor system using spectrometer-based white light interferometry with high-speed wavelength tracking,” in 3rd IEEE EMBS Spec. Top. Conf. on Microtech. in Med. and Bio. (2005), pp. 170–173.

May, R. G.

B. Qi, G. R. Pickrell, J. C. Xu, P. Zhang, Y. H. Duan, W. Peng, Z. Y. Huang, W. Huo, H. Xiao, R. G. May, and A. Wang, “Novel data processing techniques for dispersive white light interferometer,” Opt. Eng.42(11), 3165–3171 (2003).
[CrossRef]

Moss, B.

K. Bremer, E. Lewis, B. Moss, G. Leen, S. Lochmann, and I. Mueller, “Conception and preliminary evaluation of an optical fibre sensor for simultaneous measurement of pressure and temperature,” J. Phys. Conf. Ser.178, 012016 (2009).
[CrossRef]

Mueller, I.

K. Bremer, E. Lewis, B. Moss, G. Leen, S. Lochmann, and I. Mueller, “Conception and preliminary evaluation of an optical fibre sensor for simultaneous measurement of pressure and temperature,” J. Phys. Conf. Ser.178, 012016 (2009).
[CrossRef]

Nesson, S.

S. Nesson, M. Yu, X. Zhang, and A. H. Hsieh, “Miniature fiber optic pressure sensor with composite polymer-metal diaphragm for intradiscal pressure measurements,” J. Biomed. Opt.13(4), 044040 (2008).
[CrossRef] [PubMed]

S. Nesson, M. Yu, X. Zhang, and A. H. Hsieh, “Miniature fiber optic pressure sensor with composite polymer-metal diaphragm for intradiscal pressure measurements,” J. Biomed. Opt.13(4), 044040 (2008).
[CrossRef] [PubMed]

Niezrecki, C.

Pang, C.

C. Pang, M. Yu, X. M. Zhang, K. Gupta, and K. M. Bryden, “Multifunctional optical MEMS sensor platform with heterogeneous fiber optic Fabry–Pérot sensors for wireless sensor networks,” Sens. Actuators A Phys.188, 471–480 (2012).
[CrossRef]

Peng, W.

B. Qi, G. R. Pickrell, J. C. Xu, P. Zhang, Y. H. Duan, W. Peng, Z. Y. Huang, W. Huo, H. Xiao, R. G. May, and A. Wang, “Novel data processing techniques for dispersive white light interferometer,” Opt. Eng.42(11), 3165–3171 (2003).
[CrossRef]

Pevec, S.

Pickrell, G. R.

B. Qi, G. R. Pickrell, J. C. Xu, P. Zhang, Y. H. Duan, W. Peng, Z. Y. Huang, W. Huo, H. Xiao, R. G. May, and A. Wang, “Novel data processing techniques for dispersive white light interferometer,” Opt. Eng.42(11), 3165–3171 (2003).
[CrossRef]

Qi, B.

B. Qi, G. R. Pickrell, J. C. Xu, P. Zhang, Y. H. Duan, W. Peng, Z. Y. Huang, W. Huo, H. Xiao, R. G. May, and A. Wang, “Novel data processing techniques for dispersive white light interferometer,” Opt. Eng.42(11), 3165–3171 (2003).
[CrossRef]

Rong, H.

Y. Ge, M. Wang, X. Chen, and H. Rong, “An optical MEMS pressure sensor based on a phase demodulation method,” Sens. Actuators A Phys.143(2), 224–229 (2008).
[CrossRef]

Shafiiha, R.

Shum, P. P.

Song, M.

Sun, Q.

Tian, Y.

Totsu, K.

K. Totsu, Y. Haga, T. Matsunaga, and M. Esashi, “125 μm diameter fiber-optic pressure sensor system using spectrometer-based white light interferometry with high-speed wavelength tracking,” in 3rd IEEE EMBS Spec. Top. Conf. on Microtech. in Med. and Bio. (2005), pp. 170–173.

Wang, A.

X. Wang, J. Xu, Y. Zhu, K. L. Cooper, and A. Wang, “All-fused-silica miniature optical fiber tip pressure sensor,” Opt. Lett.31(7), 885–887 (2006).
[CrossRef] [PubMed]

B. Qi, G. R. Pickrell, J. C. Xu, P. Zhang, Y. H. Duan, W. Peng, Z. Y. Huang, W. Huo, H. Xiao, R. G. May, and A. Wang, “Novel data processing techniques for dispersive white light interferometer,” Opt. Eng.42(11), 3165–3171 (2003).
[CrossRef]

Wang, M.

Y. Ge, M. Wang, X. Chen, and H. Rong, “An optical MEMS pressure sensor based on a phase demodulation method,” Sens. Actuators A Phys.143(2), 224–229 (2008).
[CrossRef]

Wang, W.

Wang, X.

Willner, A. E.

Wo, J.

Wu, N.

Xiao, H.

B. Qi, G. R. Pickrell, J. C. Xu, P. Zhang, Y. H. Duan, W. Peng, Z. Y. Huang, W. Huo, H. Xiao, R. G. May, and A. Wang, “Novel data processing techniques for dispersive white light interferometer,” Opt. Eng.42(11), 3165–3171 (2003).
[CrossRef]

Xu, J.

Xu, J. C.

B. Qi, G. R. Pickrell, J. C. Xu, P. Zhang, Y. H. Duan, W. Peng, Z. Y. Huang, W. Huo, H. Xiao, R. G. May, and A. Wang, “Novel data processing techniques for dispersive white light interferometer,” Opt. Eng.42(11), 3165–3171 (2003).
[CrossRef]

Yang, J. Y.

Yu, M.

C. Pang, M. Yu, X. M. Zhang, K. Gupta, and K. M. Bryden, “Multifunctional optical MEMS sensor platform with heterogeneous fiber optic Fabry–Pérot sensors for wireless sensor networks,” Sens. Actuators A Phys.188, 471–480 (2012).
[CrossRef]

H. Bae, X. M. Zhang, H. Liu, and M. Yu, “Miniature surface-mountable Fabry–Perot pressure sensor constructed with a 45° angled fiber,” Opt. Lett.35(10), 1701–1703 (2010).
[CrossRef] [PubMed]

S. Nesson, M. Yu, X. Zhang, and A. H. Hsieh, “Miniature fiber optic pressure sensor with composite polymer-metal diaphragm for intradiscal pressure measurements,” J. Biomed. Opt.13(4), 044040 (2008).
[CrossRef] [PubMed]

S. Nesson, M. Yu, X. Zhang, and A. H. Hsieh, “Miniature fiber optic pressure sensor with composite polymer-metal diaphragm for intradiscal pressure measurements,” J. Biomed. Opt.13(4), 044040 (2008).
[CrossRef] [PubMed]

Zhang, B.

Zhang, J.

Zhang, L.

Zhang, P.

B. Qi, G. R. Pickrell, J. C. Xu, P. Zhang, Y. H. Duan, W. Peng, Z. Y. Huang, W. Huo, H. Xiao, R. G. May, and A. Wang, “Novel data processing techniques for dispersive white light interferometer,” Opt. Eng.42(11), 3165–3171 (2003).
[CrossRef]

Zhang, X.

S. Nesson, M. Yu, X. Zhang, and A. H. Hsieh, “Miniature fiber optic pressure sensor with composite polymer-metal diaphragm for intradiscal pressure measurements,” J. Biomed. Opt.13(4), 044040 (2008).
[CrossRef] [PubMed]

S. Nesson, M. Yu, X. Zhang, and A. H. Hsieh, “Miniature fiber optic pressure sensor with composite polymer-metal diaphragm for intradiscal pressure measurements,” J. Biomed. Opt.13(4), 044040 (2008).
[CrossRef] [PubMed]

Zhang, X. M.

C. Pang, M. Yu, X. M. Zhang, K. Gupta, and K. M. Bryden, “Multifunctional optical MEMS sensor platform with heterogeneous fiber optic Fabry–Pérot sensors for wireless sensor networks,” Sens. Actuators A Phys.188, 471–480 (2012).
[CrossRef]

H. Bae, X. M. Zhang, H. Liu, and M. Yu, “Miniature surface-mountable Fabry–Perot pressure sensor constructed with a 45° angled fiber,” Opt. Lett.35(10), 1701–1703 (2010).
[CrossRef] [PubMed]

Zhang, Y.

Y. Liu, Z. Guo, Y. Zhang, K. S. Chiang, and X. Dong, “Simultaneous pressure and temperature measurement with polymer-coated fibre Bragg grating,” Electron. Lett.36(6), 564–566 (2000).
[CrossRef]

Zheng, X.

Zhu, Y.

Zibaii, M. I.

S. H. Aref, M. I. Zibaii, and H. Latifi, “An improved fiber optic pressure and temperature sensor for downhole application,” Meas. Sci. Technol.20(3), 034009 (2009).
[CrossRef]

Appl. Opt. (1)

Electron. Lett. (1)

Y. Liu, Z. Guo, Y. Zhang, K. S. Chiang, and X. Dong, “Simultaneous pressure and temperature measurement with polymer-coated fibre Bragg grating,” Electron. Lett.36(6), 564–566 (2000).
[CrossRef]

IEEE Photon. Technol. Lett. (1)

S. J. Choi and P. D. Dapkus, “Tunable narrow linewidth all-buried heterostructure ring resonator filters using vernier effects,” IEEE Photon. Technol. Lett.17(1), 106–108 (2005).
[CrossRef]

J. Biomed. Opt. (2)

S. Nesson, M. Yu, X. Zhang, and A. H. Hsieh, “Miniature fiber optic pressure sensor with composite polymer-metal diaphragm for intradiscal pressure measurements,” J. Biomed. Opt.13(4), 044040 (2008).
[CrossRef] [PubMed]

S. Nesson, M. Yu, X. Zhang, and A. H. Hsieh, “Miniature fiber optic pressure sensor with composite polymer-metal diaphragm for intradiscal pressure measurements,” J. Biomed. Opt.13(4), 044040 (2008).
[CrossRef] [PubMed]

J. Micromech. Microeng. (1)

R. Legtenberg, A. W. Groeneveld, and M. Elwenspoek, “Comb-drive actuators for large displacements,” J. Micromech. Microeng.6(3), 320–329 (1996).
[CrossRef]

J. Phys. Conf. Ser. (1)

K. Bremer, E. Lewis, B. Moss, G. Leen, S. Lochmann, and I. Mueller, “Conception and preliminary evaluation of an optical fibre sensor for simultaneous measurement of pressure and temperature,” J. Phys. Conf. Ser.178, 012016 (2009).
[CrossRef]

Meas. Sci. Technol. (1)

S. H. Aref, M. I. Zibaii, and H. Latifi, “An improved fiber optic pressure and temperature sensor for downhole application,” Meas. Sci. Technol.20(3), 034009 (2009).
[CrossRef]

Opt. Eng. (1)

B. Qi, G. R. Pickrell, J. C. Xu, P. Zhang, Y. H. Duan, W. Peng, Z. Y. Huang, W. Huo, H. Xiao, R. G. May, and A. Wang, “Novel data processing techniques for dispersive white light interferometer,” Opt. Eng.42(11), 3165–3171 (2003).
[CrossRef]

Opt. Express (5)

Opt. Lett. (2)

Sens. Actuators A Phys. (2)

C. Pang, M. Yu, X. M. Zhang, K. Gupta, and K. M. Bryden, “Multifunctional optical MEMS sensor platform with heterogeneous fiber optic Fabry–Pérot sensors for wireless sensor networks,” Sens. Actuators A Phys.188, 471–480 (2012).
[CrossRef]

Y. Ge, M. Wang, X. Chen, and H. Rong, “An optical MEMS pressure sensor based on a phase demodulation method,” Sens. Actuators A Phys.143(2), 224–229 (2008).
[CrossRef]

Other (3)

C. Pang, M. Yu, X. M. Zhang, A. K. Gupta, and K. M. Bryden, “Multifunctional optical MEMS sensor platform for wireless optical sensor networks,” in The 16th Int. Conf. on Solid-State Sens., Actuators and Microsys. (Transducers’11) (2011).
[CrossRef]

K. Totsu, Y. Haga, T. Matsunaga, and M. Esashi, “125 μm diameter fiber-optic pressure sensor system using spectrometer-based white light interferometry with high-speed wavelength tracking,” in 3rd IEEE EMBS Spec. Top. Conf. on Microtech. in Med. and Bio. (2005), pp. 170–173.

V. L. Streeter and E. B. Wylie, Fluid Mechanics, 8th ed. (McGraw Hill, 1985), pp. 351–353.

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Figures (8)

Fig. 1
Fig. 1

Schematic of FP pressure-temperature sensor with an optical SOC for spectrum domain interrogation: (a) optical SOC, (b) FP pressure-temperature sensor with dual cavities, and (c) spectrum domain signal processing for resolving the two cavity lengths.

Fig. 2
Fig. 2

Schematic of fabrication process for the sensor structure: (a) thermal oxidation of the upper wafer, (b) RIE on the back side of SiO2, (c) etching Si by KOH, (d) RIE on the front side of SiO2, (e) DRIE of Si to form the membrane, (f) thermal oxidation of the lower wafer, (g) RIE on the front side of SiO2, (h) DRIE of Si to form a groove to hold the fiber, and (i) removing SiO2 and performing the Si-Si bonding.

Fig. 3
Fig. 3

The fabricated pressure-temperature sensor: (a) Scanning Electron Microscopy (SEM) image of the membrane, (b) SEM image of the groove on the sidewall for inserting the fiber, and (c) photograph of the sensor bonded with an optical fiber.

Fig. 4
Fig. 4

Images of the optical SOC: (a) photograph of a fully integrated optical SOC, (b) SEM image of fiber coupled SLED light source, (c) SEM image of MEMS tunable FP filter, and (d) SEM image of fiber coupled photodiode.

Fig. 5
Fig. 5

(a) Sweeping wavelength as a function of square of the voltage applied to the MEMS tunable filter. (b) Reflection spectrum of the sensor obtained by using optical SOC. Note that in the signal, the DC component is removed. (c) FFT result of the sensor’s reflection spectrum.

Fig. 6
Fig. 6

Experimental arrangement for sensor calibration.

Fig. 7
Fig. 7

Pressure calibration results obtained with the pressure-temperature sensor integrated with the optical SOC at the room temperature: (a) air cavity length versus pressure and (b) silicon cavity length versus pressure.

Fig. 8
Fig. 8

Temperature calibration results obtained with the pressure-temperature sensor integrated with the optical SOC at the room pressure: (a) air cavity length versus temperature and (b) silicon cavity length versus temperature.

Tables (1)

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Table 1 Comparison between the Predicted Changes and Reference Valuesa

Equations (3)

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[ ΔOP D air ΔOP D silicon ]=[ A B C D ][ ΔP ΔT ]=S[ ΔP ΔT ],
[ P T ]=[ A' B' C' D' ]{ [ OP D air OP D silicon ][ OP D air0 OP D silicon0 ] }+[ P 0 T 0 ],
[ P T ]=[ 1.04 1.30 17.83 1.39 ]{ [ OP D air OP D silicon ][ 134.06 610.56 ] }+[ 14.68 26.1 ].

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