Abstract

We show a diffraction-based coupling scheme that allows a micro-resonator to directly manipulate a free-space optical beam at normal incidence. We demonstrate a high-Q micro-gear resonator with a 1.57-um radius whose vertical transmission and reflection change 40% over a wavelength range of only 0.3 nm. Without the need to be attached to a waveguide, a dense 2D array of such resonators can be integrated on a chip for spatial light modulation and parallel bio-sensing.

© 2011 OSA

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    [CrossRef] [PubMed]
  2. Q. Xu, S. Manipatruni, B. Schmidt, J. Shakya, and M. Lipson, “12.5 Gbit/s carrier-injection-based silicon micro-ring silicon modulators,” Opt. Express 15(2), 430–436 (2007).
    [CrossRef] [PubMed]
  3. P. Dong, R. Shafiiha, S. Liao, H. Liang, N.-N. Feng, D. Feng, G. Li, X. Zheng, A. V. Krishnamoorthy, and M. Asghari, “Wavelength-tunable silicon microring modulator,” Opt. Express 18(11), 10941–10946 (2010).
    [CrossRef] [PubMed]
  4. M. S. Rasras, K. Y. Tu, D. M. Gill, Y. K. Chen, A. E. White, S. S. Patel, A. Pomerene, D. Carothers, J. Beattie, M. Beals, J. Michel, and L. C. Kimerling, “Demonstration of a tunable microwave-photonic notch filter using low-loss silicon ring resonators,” J. Lightwave Technol. 27(12), 2105–2110 (2009).
    [CrossRef]
  5. H. Shen, M. H. Khan, L. Fan, L. Zhao, Y. Xuan, J. Ouyang, L. T. Varghese, and M. H. Qi, “Eight-channel reconfigurable microring filters with tunable frequency, extinction ratio and bandwidth,” Opt. Express 18(17), 18067–18076 (2010).
    [CrossRef] [PubMed]
  6. L. Qing, S. Yegnanarayanan, M. Soltani, P. Alipour, and A. Adibi, “A temperature-iInsensitive third-order coupled-resonator filter for on-chip Terabit/s optical interconnects,” IEEE Photon. Technol. Lett. 22(23), 1768–1770 (2010).
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    [CrossRef] [PubMed]
  10. M. Iqbal, M. A. Gleeson, B. Spaugh, F. Tybor, W. G. Gunn, M. Hochberg, T. Baehr-Jones, R. C. Bailey, and L. C. Gunn, “Label-free biosensor arrays based on silicon ring resonators and high-speed optical scanning instrumentation,” IEEE J. Sel. Top. Quantum Electron. 16(3), 654–661 (2010).
    [CrossRef]
  11. K. De Vos, J. Girones, T. Claes, Y. De Koninck, S. Popelka, E. Schacht, R. Baets, and P. Bienstman, “Multiplexed antibody detection with an array of silicon-on-insulator microring resonators,” IEEE Photon. J. 1(4), 225–235 (2009).
    [CrossRef]
  12. J. Ahn, M. Fiorentino, R. G. Beausoleil, N. Binkert, A. Davis, D. Fattal, N. P. Jouppi, M. McLaren, C. M. Santori, R. S. Schreiber, S. M. Spillane, D. Vantrease, and Q. Xu, “Devices and architectures for photonic chip-scale integration,” Appl. Phys., A Mater. Sci. Process. 95(4), 989–997 (2009).
    [CrossRef]
  13. A. Shacham, K. Bergman, and L. P. Carloni, “Photonic networks-on-chip for future generations of chip multiprocessors,” IEEE Trans. Comput. 57(9), 1246–1260 (2008).
    [CrossRef]
  14. A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. Li, I. Shubin, and J. E. Cunningham, “Computer systems based on silicon photonic interconnects,” Proc. IEEE 97(7), 1337–1361 (2009).
    [CrossRef]
  15. M. H. Khan, H. Shen, Y. Xuan, L. Zhao, S. J. Xiao, D. E. Leaird, A. M. Weiner, and M. H. Qi, “Ultrabroad-bandwidth arbitrary radiofrequency waveform generation with a silicon photonic chip-based spectral shaper,” Nat. Photonics 4(2), 117–122 (2010).
    [CrossRef]
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    [CrossRef]
  17. D. Taillaert, P. Bienstman, and R. Baets, “Compact efficient broadband grating coupler for silicon-on-insulator waveguides,” Opt. Lett. 29(23), 2749–2751 (2004).
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  18. A. Yariv, “Coupled-mode theory for guided-wave optics,” IEEE J. Quantum Electron. 9(9), 919–933 (1973).
    [CrossRef]
  19. M. Fujita and T. Baba, “Proposal and finite-difference time-domain simulation of whispering gallery mode microgear cavity,” IEEE J. Quantum Electron. 37(10), 1253–1258 (2001).
    [CrossRef]
  20. B. Redding, S. Y. Shi, T. Creazzo, E. Marchena, and D. W. Prather, “Design and characterization of silicon nanocrystal microgear resonators,” Photonics Nanostruct. Fundam. Appl. 8(3), 177–182 (2010).
    [CrossRef]

2010

M. Iqbal, M. A. Gleeson, B. Spaugh, F. Tybor, W. G. Gunn, M. Hochberg, T. Baehr-Jones, R. C. Bailey, and L. C. Gunn, “Label-free biosensor arrays based on silicon ring resonators and high-speed optical scanning instrumentation,” IEEE J. Sel. Top. Quantum Electron. 16(3), 654–661 (2010).
[CrossRef]

L. Qing, S. Yegnanarayanan, M. Soltani, P. Alipour, and A. Adibi, “A temperature-iInsensitive third-order coupled-resonator filter for on-chip Terabit/s optical interconnects,” IEEE Photon. Technol. Lett. 22(23), 1768–1770 (2010).
[CrossRef]

M. H. Khan, H. Shen, Y. Xuan, L. Zhao, S. J. Xiao, D. E. Leaird, A. M. Weiner, and M. H. Qi, “Ultrabroad-bandwidth arbitrary radiofrequency waveform generation with a silicon photonic chip-based spectral shaper,” Nat. Photonics 4(2), 117–122 (2010).
[CrossRef]

B. Redding, S. Y. Shi, T. Creazzo, E. Marchena, and D. W. Prather, “Design and characterization of silicon nanocrystal microgear resonators,” Photonics Nanostruct. Fundam. Appl. 8(3), 177–182 (2010).
[CrossRef]

P. Dong, R. Shafiiha, S. Liao, H. Liang, N.-N. Feng, D. Feng, G. Li, X. Zheng, A. V. Krishnamoorthy, and M. Asghari, “Wavelength-tunable silicon microring modulator,” Opt. Express 18(11), 10941–10946 (2010).
[CrossRef] [PubMed]

H. Shen, M. H. Khan, L. Fan, L. Zhao, Y. Xuan, J. Ouyang, L. T. Varghese, and M. H. Qi, “Eight-channel reconfigurable microring filters with tunable frequency, extinction ratio and bandwidth,” Opt. Express 18(17), 18067–18076 (2010).
[CrossRef] [PubMed]

2009

N. Savage, “Digital spatial light modulators,” Nat. Photonics 3(3), 170–172 (2009).
[CrossRef]

M. S. Rasras, K. Y. Tu, D. M. Gill, Y. K. Chen, A. E. White, S. S. Patel, A. Pomerene, D. Carothers, J. Beattie, M. Beals, J. Michel, and L. C. Kimerling, “Demonstration of a tunable microwave-photonic notch filter using low-loss silicon ring resonators,” J. Lightwave Technol. 27(12), 2105–2110 (2009).
[CrossRef]

A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. Li, I. Shubin, and J. E. Cunningham, “Computer systems based on silicon photonic interconnects,” Proc. IEEE 97(7), 1337–1361 (2009).
[CrossRef]

K. De Vos, J. Girones, T. Claes, Y. De Koninck, S. Popelka, E. Schacht, R. Baets, and P. Bienstman, “Multiplexed antibody detection with an array of silicon-on-insulator microring resonators,” IEEE Photon. J. 1(4), 225–235 (2009).
[CrossRef]

J. Ahn, M. Fiorentino, R. G. Beausoleil, N. Binkert, A. Davis, D. Fattal, N. P. Jouppi, M. McLaren, C. M. Santori, R. S. Schreiber, S. M. Spillane, D. Vantrease, and Q. Xu, “Devices and architectures for photonic chip-scale integration,” Appl. Phys., A Mater. Sci. Process. 95(4), 989–997 (2009).
[CrossRef]

2008

A. Shacham, K. Bergman, and L. P. Carloni, “Photonic networks-on-chip for future generations of chip multiprocessors,” IEEE Trans. Comput. 57(9), 1246–1260 (2008).
[CrossRef]

2007

2005

Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, “Micrometre-scale silicon electro-optic modulator,” Nature 435(7040), 325–327 (2005).
[CrossRef] [PubMed]

2004

2001

M. Fujita and T. Baba, “Proposal and finite-difference time-domain simulation of whispering gallery mode microgear cavity,” IEEE J. Quantum Electron. 37(10), 1253–1258 (2001).
[CrossRef]

1973

A. Yariv, “Coupled-mode theory for guided-wave optics,” IEEE J. Quantum Electron. 9(9), 919–933 (1973).
[CrossRef]

Adibi, A.

L. Qing, S. Yegnanarayanan, M. Soltani, P. Alipour, and A. Adibi, “A temperature-iInsensitive third-order coupled-resonator filter for on-chip Terabit/s optical interconnects,” IEEE Photon. Technol. Lett. 22(23), 1768–1770 (2010).
[CrossRef]

Ahn, J.

J. Ahn, M. Fiorentino, R. G. Beausoleil, N. Binkert, A. Davis, D. Fattal, N. P. Jouppi, M. McLaren, C. M. Santori, R. S. Schreiber, S. M. Spillane, D. Vantrease, and Q. Xu, “Devices and architectures for photonic chip-scale integration,” Appl. Phys., A Mater. Sci. Process. 95(4), 989–997 (2009).
[CrossRef]

Alipour, P.

L. Qing, S. Yegnanarayanan, M. Soltani, P. Alipour, and A. Adibi, “A temperature-iInsensitive third-order coupled-resonator filter for on-chip Terabit/s optical interconnects,” IEEE Photon. Technol. Lett. 22(23), 1768–1770 (2010).
[CrossRef]

Asghari, M.

Baba, T.

M. Fujita and T. Baba, “Proposal and finite-difference time-domain simulation of whispering gallery mode microgear cavity,” IEEE J. Quantum Electron. 37(10), 1253–1258 (2001).
[CrossRef]

Baehr-Jones, T.

M. Iqbal, M. A. Gleeson, B. Spaugh, F. Tybor, W. G. Gunn, M. Hochberg, T. Baehr-Jones, R. C. Bailey, and L. C. Gunn, “Label-free biosensor arrays based on silicon ring resonators and high-speed optical scanning instrumentation,” IEEE J. Sel. Top. Quantum Electron. 16(3), 654–661 (2010).
[CrossRef]

Baets, R.

Bailey, R. C.

M. Iqbal, M. A. Gleeson, B. Spaugh, F. Tybor, W. G. Gunn, M. Hochberg, T. Baehr-Jones, R. C. Bailey, and L. C. Gunn, “Label-free biosensor arrays based on silicon ring resonators and high-speed optical scanning instrumentation,” IEEE J. Sel. Top. Quantum Electron. 16(3), 654–661 (2010).
[CrossRef]

Bartolozzi, I.

Beals, M.

Beattie, J.

Beausoleil, R. G.

J. Ahn, M. Fiorentino, R. G. Beausoleil, N. Binkert, A. Davis, D. Fattal, N. P. Jouppi, M. McLaren, C. M. Santori, R. S. Schreiber, S. M. Spillane, D. Vantrease, and Q. Xu, “Devices and architectures for photonic chip-scale integration,” Appl. Phys., A Mater. Sci. Process. 95(4), 989–997 (2009).
[CrossRef]

Bergman, K.

A. Shacham, K. Bergman, and L. P. Carloni, “Photonic networks-on-chip for future generations of chip multiprocessors,” IEEE Trans. Comput. 57(9), 1246–1260 (2008).
[CrossRef]

Bienstman, P.

Binkert, N.

J. Ahn, M. Fiorentino, R. G. Beausoleil, N. Binkert, A. Davis, D. Fattal, N. P. Jouppi, M. McLaren, C. M. Santori, R. S. Schreiber, S. M. Spillane, D. Vantrease, and Q. Xu, “Devices and architectures for photonic chip-scale integration,” Appl. Phys., A Mater. Sci. Process. 95(4), 989–997 (2009).
[CrossRef]

Carloni, L. P.

A. Shacham, K. Bergman, and L. P. Carloni, “Photonic networks-on-chip for future generations of chip multiprocessors,” IEEE Trans. Comput. 57(9), 1246–1260 (2008).
[CrossRef]

Carothers, D.

Chen, Y. K.

Claes, T.

K. De Vos, J. Girones, T. Claes, Y. De Koninck, S. Popelka, E. Schacht, R. Baets, and P. Bienstman, “Multiplexed antibody detection with an array of silicon-on-insulator microring resonators,” IEEE Photon. J. 1(4), 225–235 (2009).
[CrossRef]

Creazzo, T.

B. Redding, S. Y. Shi, T. Creazzo, E. Marchena, and D. W. Prather, “Design and characterization of silicon nanocrystal microgear resonators,” Photonics Nanostruct. Fundam. Appl. 8(3), 177–182 (2010).
[CrossRef]

Cunningham, J. E.

A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. Li, I. Shubin, and J. E. Cunningham, “Computer systems based on silicon photonic interconnects,” Proc. IEEE 97(7), 1337–1361 (2009).
[CrossRef]

Davis, A.

J. Ahn, M. Fiorentino, R. G. Beausoleil, N. Binkert, A. Davis, D. Fattal, N. P. Jouppi, M. McLaren, C. M. Santori, R. S. Schreiber, S. M. Spillane, D. Vantrease, and Q. Xu, “Devices and architectures for photonic chip-scale integration,” Appl. Phys., A Mater. Sci. Process. 95(4), 989–997 (2009).
[CrossRef]

De Koninck, Y.

K. De Vos, J. Girones, T. Claes, Y. De Koninck, S. Popelka, E. Schacht, R. Baets, and P. Bienstman, “Multiplexed antibody detection with an array of silicon-on-insulator microring resonators,” IEEE Photon. J. 1(4), 225–235 (2009).
[CrossRef]

De Vos, K.

K. De Vos, J. Girones, T. Claes, Y. De Koninck, S. Popelka, E. Schacht, R. Baets, and P. Bienstman, “Multiplexed antibody detection with an array of silicon-on-insulator microring resonators,” IEEE Photon. J. 1(4), 225–235 (2009).
[CrossRef]

K. De Vos, I. Bartolozzi, E. Schacht, P. Bienstman, and R. Baets, “Silicon-on-Insulator microring resonator for sensitive and label-free biosensing,” Opt. Express 15(12), 7610–7615 (2007).
[CrossRef] [PubMed]

Dong, P.

Fan, L.

Fattal, D.

J. Ahn, M. Fiorentino, R. G. Beausoleil, N. Binkert, A. Davis, D. Fattal, N. P. Jouppi, M. McLaren, C. M. Santori, R. S. Schreiber, S. M. Spillane, D. Vantrease, and Q. Xu, “Devices and architectures for photonic chip-scale integration,” Appl. Phys., A Mater. Sci. Process. 95(4), 989–997 (2009).
[CrossRef]

Feng, D.

Feng, N.-N.

Fiorentino, M.

J. Ahn, M. Fiorentino, R. G. Beausoleil, N. Binkert, A. Davis, D. Fattal, N. P. Jouppi, M. McLaren, C. M. Santori, R. S. Schreiber, S. M. Spillane, D. Vantrease, and Q. Xu, “Devices and architectures for photonic chip-scale integration,” Appl. Phys., A Mater. Sci. Process. 95(4), 989–997 (2009).
[CrossRef]

Fujita, M.

M. Fujita and T. Baba, “Proposal and finite-difference time-domain simulation of whispering gallery mode microgear cavity,” IEEE J. Quantum Electron. 37(10), 1253–1258 (2001).
[CrossRef]

Gill, D. M.

Girones, J.

K. De Vos, J. Girones, T. Claes, Y. De Koninck, S. Popelka, E. Schacht, R. Baets, and P. Bienstman, “Multiplexed antibody detection with an array of silicon-on-insulator microring resonators,” IEEE Photon. J. 1(4), 225–235 (2009).
[CrossRef]

Gleeson, M. A.

M. Iqbal, M. A. Gleeson, B. Spaugh, F. Tybor, W. G. Gunn, M. Hochberg, T. Baehr-Jones, R. C. Bailey, and L. C. Gunn, “Label-free biosensor arrays based on silicon ring resonators and high-speed optical scanning instrumentation,” IEEE J. Sel. Top. Quantum Electron. 16(3), 654–661 (2010).
[CrossRef]

Gunn, L. C.

M. Iqbal, M. A. Gleeson, B. Spaugh, F. Tybor, W. G. Gunn, M. Hochberg, T. Baehr-Jones, R. C. Bailey, and L. C. Gunn, “Label-free biosensor arrays based on silicon ring resonators and high-speed optical scanning instrumentation,” IEEE J. Sel. Top. Quantum Electron. 16(3), 654–661 (2010).
[CrossRef]

Gunn, W. G.

M. Iqbal, M. A. Gleeson, B. Spaugh, F. Tybor, W. G. Gunn, M. Hochberg, T. Baehr-Jones, R. C. Bailey, and L. C. Gunn, “Label-free biosensor arrays based on silicon ring resonators and high-speed optical scanning instrumentation,” IEEE J. Sel. Top. Quantum Electron. 16(3), 654–661 (2010).
[CrossRef]

Ho, R.

A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. Li, I. Shubin, and J. E. Cunningham, “Computer systems based on silicon photonic interconnects,” Proc. IEEE 97(7), 1337–1361 (2009).
[CrossRef]

Hochberg, M.

M. Iqbal, M. A. Gleeson, B. Spaugh, F. Tybor, W. G. Gunn, M. Hochberg, T. Baehr-Jones, R. C. Bailey, and L. C. Gunn, “Label-free biosensor arrays based on silicon ring resonators and high-speed optical scanning instrumentation,” IEEE J. Sel. Top. Quantum Electron. 16(3), 654–661 (2010).
[CrossRef]

Iqbal, M.

M. Iqbal, M. A. Gleeson, B. Spaugh, F. Tybor, W. G. Gunn, M. Hochberg, T. Baehr-Jones, R. C. Bailey, and L. C. Gunn, “Label-free biosensor arrays based on silicon ring resonators and high-speed optical scanning instrumentation,” IEEE J. Sel. Top. Quantum Electron. 16(3), 654–661 (2010).
[CrossRef]

Jouppi, N. P.

J. Ahn, M. Fiorentino, R. G. Beausoleil, N. Binkert, A. Davis, D. Fattal, N. P. Jouppi, M. McLaren, C. M. Santori, R. S. Schreiber, S. M. Spillane, D. Vantrease, and Q. Xu, “Devices and architectures for photonic chip-scale integration,” Appl. Phys., A Mater. Sci. Process. 95(4), 989–997 (2009).
[CrossRef]

Khan, M. H.

M. H. Khan, H. Shen, Y. Xuan, L. Zhao, S. J. Xiao, D. E. Leaird, A. M. Weiner, and M. H. Qi, “Ultrabroad-bandwidth arbitrary radiofrequency waveform generation with a silicon photonic chip-based spectral shaper,” Nat. Photonics 4(2), 117–122 (2010).
[CrossRef]

H. Shen, M. H. Khan, L. Fan, L. Zhao, Y. Xuan, J. Ouyang, L. T. Varghese, and M. H. Qi, “Eight-channel reconfigurable microring filters with tunable frequency, extinction ratio and bandwidth,” Opt. Express 18(17), 18067–18076 (2010).
[CrossRef] [PubMed]

Kimerling, L. C.

Koka, P.

A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. Li, I. Shubin, and J. E. Cunningham, “Computer systems based on silicon photonic interconnects,” Proc. IEEE 97(7), 1337–1361 (2009).
[CrossRef]

Krishnamoorthy, A. V.

P. Dong, R. Shafiiha, S. Liao, H. Liang, N.-N. Feng, D. Feng, G. Li, X. Zheng, A. V. Krishnamoorthy, and M. Asghari, “Wavelength-tunable silicon microring modulator,” Opt. Express 18(11), 10941–10946 (2010).
[CrossRef] [PubMed]

A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. Li, I. Shubin, and J. E. Cunningham, “Computer systems based on silicon photonic interconnects,” Proc. IEEE 97(7), 1337–1361 (2009).
[CrossRef]

Leaird, D. E.

M. H. Khan, H. Shen, Y. Xuan, L. Zhao, S. J. Xiao, D. E. Leaird, A. M. Weiner, and M. H. Qi, “Ultrabroad-bandwidth arbitrary radiofrequency waveform generation with a silicon photonic chip-based spectral shaper,” Nat. Photonics 4(2), 117–122 (2010).
[CrossRef]

Lexau, J.

A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. Li, I. Shubin, and J. E. Cunningham, “Computer systems based on silicon photonic interconnects,” Proc. IEEE 97(7), 1337–1361 (2009).
[CrossRef]

Li, G.

P. Dong, R. Shafiiha, S. Liao, H. Liang, N.-N. Feng, D. Feng, G. Li, X. Zheng, A. V. Krishnamoorthy, and M. Asghari, “Wavelength-tunable silicon microring modulator,” Opt. Express 18(11), 10941–10946 (2010).
[CrossRef] [PubMed]

A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. Li, I. Shubin, and J. E. Cunningham, “Computer systems based on silicon photonic interconnects,” Proc. IEEE 97(7), 1337–1361 (2009).
[CrossRef]

Liang, H.

Liao, S.

Lipson, M.

Q. Xu, P. Dong, and M. Lipson, “Breaking the delay-bandwidth limit in a photonic structure,” Nat. Phys. 3(6), 406–410 (2007).
[CrossRef]

Q. Xu, S. Manipatruni, B. Schmidt, J. Shakya, and M. Lipson, “12.5 Gbit/s carrier-injection-based silicon micro-ring silicon modulators,” Opt. Express 15(2), 430–436 (2007).
[CrossRef] [PubMed]

Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, “Micrometre-scale silicon electro-optic modulator,” Nature 435(7040), 325–327 (2005).
[CrossRef] [PubMed]

Manipatruni, S.

Marchena, E.

B. Redding, S. Y. Shi, T. Creazzo, E. Marchena, and D. W. Prather, “Design and characterization of silicon nanocrystal microgear resonators,” Photonics Nanostruct. Fundam. Appl. 8(3), 177–182 (2010).
[CrossRef]

McLaren, M.

J. Ahn, M. Fiorentino, R. G. Beausoleil, N. Binkert, A. Davis, D. Fattal, N. P. Jouppi, M. McLaren, C. M. Santori, R. S. Schreiber, S. M. Spillane, D. Vantrease, and Q. Xu, “Devices and architectures for photonic chip-scale integration,” Appl. Phys., A Mater. Sci. Process. 95(4), 989–997 (2009).
[CrossRef]

Michel, J.

Ouyang, J.

Patel, S. S.

Pomerene, A.

Popelka, S.

K. De Vos, J. Girones, T. Claes, Y. De Koninck, S. Popelka, E. Schacht, R. Baets, and P. Bienstman, “Multiplexed antibody detection with an array of silicon-on-insulator microring resonators,” IEEE Photon. J. 1(4), 225–235 (2009).
[CrossRef]

Pradhan, S.

Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, “Micrometre-scale silicon electro-optic modulator,” Nature 435(7040), 325–327 (2005).
[CrossRef] [PubMed]

Prather, D. W.

B. Redding, S. Y. Shi, T. Creazzo, E. Marchena, and D. W. Prather, “Design and characterization of silicon nanocrystal microgear resonators,” Photonics Nanostruct. Fundam. Appl. 8(3), 177–182 (2010).
[CrossRef]

Qi, M. H.

H. Shen, M. H. Khan, L. Fan, L. Zhao, Y. Xuan, J. Ouyang, L. T. Varghese, and M. H. Qi, “Eight-channel reconfigurable microring filters with tunable frequency, extinction ratio and bandwidth,” Opt. Express 18(17), 18067–18076 (2010).
[CrossRef] [PubMed]

M. H. Khan, H. Shen, Y. Xuan, L. Zhao, S. J. Xiao, D. E. Leaird, A. M. Weiner, and M. H. Qi, “Ultrabroad-bandwidth arbitrary radiofrequency waveform generation with a silicon photonic chip-based spectral shaper,” Nat. Photonics 4(2), 117–122 (2010).
[CrossRef]

Qing, L.

L. Qing, S. Yegnanarayanan, M. Soltani, P. Alipour, and A. Adibi, “A temperature-iInsensitive third-order coupled-resonator filter for on-chip Terabit/s optical interconnects,” IEEE Photon. Technol. Lett. 22(23), 1768–1770 (2010).
[CrossRef]

Rasras, M. S.

Redding, B.

B. Redding, S. Y. Shi, T. Creazzo, E. Marchena, and D. W. Prather, “Design and characterization of silicon nanocrystal microgear resonators,” Photonics Nanostruct. Fundam. Appl. 8(3), 177–182 (2010).
[CrossRef]

Santori, C. M.

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IEEE Photon. Technol. Lett.

L. Qing, S. Yegnanarayanan, M. Soltani, P. Alipour, and A. Adibi, “A temperature-iInsensitive third-order coupled-resonator filter for on-chip Terabit/s optical interconnects,” IEEE Photon. Technol. Lett. 22(23), 1768–1770 (2010).
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Nat. Photonics

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Photonics Nanostruct. Fundam. Appl.

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A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. Li, I. Shubin, and J. E. Cunningham, “Computer systems based on silicon photonic interconnects,” Proc. IEEE 97(7), 1337–1361 (2009).
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Figures (4)

Fig. 1
Fig. 1

Top-view diagrams to illustrate the principle of operation of the micro-gear resonators. The white arrows show the directions of the perturbation polarization. (a) The transverse field of a TE mode of a silicon strip waveguide and the perturbation polarization induced by a grating shown by the black lines. (b) The transverse (radial) electric field component Er of the 14th longitudinal (azimuthal) mode of a micro-ring resonator and the perturbation polarization induced by a 14-period grating. (c) Simulated Ex distribution when a micro-gear resonator is excited by a x-polarized normal-incidence Gaussian beam with a beam radius of 1.75um and a peak amplitude of 1. The gratings are illustrated by the black lines in the figure, where their widths are exaggerated for better visibility. The inner grating has 13 periods and the outer grating has 15 periods. (d) Simulated Ey distribution when the micro-gear resonator in (c) is illuminated by a y-polarized Gaussian beam with the same size and amplitude as that in (c).

Fig. 2
Fig. 2

The scanning electron microscopic (SEM) pictures of the fabricated micro-gear resonators. (a) The SEM picture of a waveguide-coupled micro-gear resonator with a 100-nm-wide inner grating and a 10-nm-wide outer grating. (b) The SEM picture of a stand-alone micro-gear resonator with a 400-nm-wide inner grating and an 80-nm-wide outer grating.

Fig. 3
Fig. 3

(a) Measured waveguide transmission spectrum and top radiation spectrum of a waveguide-coupled micro-gear resonator. The top radiation spectrum is normalized to the optical power coupled into the resonator from the waveguide. The spectra show the resonances from the 14th longitudinal mode at 1535 nm and the 13th longitudinal mode at 1610 nm. The insets are the images of top radiation at these two resonant modes. (b) The zoom-in spectra of the transmission (black line) and the x-polarized (red line) and y-polarized (purple line) top radiation of the device in (a). (c) The transmission (black line) and the x-polarized (red line) and y-polarized (purple line) top radiation of a micro-ring resonator with no gratings.

Fig. 4
Fig. 4

Normal-incidence transmission and reflection spectra of stand-alone micro-gear resonators. (a) The red and brown lines are measured x-polarized and y-polarized transmission spectra. The blue and black lines are measured x-polarized and y-polarized reflection spectra. (b) The spectra with the same definitions as those in (a) obtained from a 3D FDTD simulation. (c) The measured transmission (red) and reflection (blue) spectra around the 13th longitudinal mode of the resonator. (d) Normalized x-polarized transmission spectra of stand-alone resonators with gratings of different sizes. Each spectrum is normalized to its off-resonance transmission. Green line: micro-ring with no grating. Black line: micro-gear with a 50-nm inner grating and a 5-nm outer grating. Red line: micro-gear with the default dimensions. Blue line: micro-gear with a 200-nm inner grating and a 20-nm outer grating.

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