Abstract

We report a novel high-quality (Q) factor optical resonator using a subwavelength high-contrast grating (HCG) with in-plane resonance and surface-normal emission. We show that the in-plane resonance is manifested is by a sharp, asymmetric lineshape in the surface-normal reflectivity spectrum. The simulated Q factor of the resonator is shown to be as high as 500,000. A HCG-resonator was fabricated with an InGaAs quantum well active region sandwiched in-between AlGaAs layers and a Q factor of >14,000 was inferred from the photoluminescence linewidth of 0.07 nm, which is currently limited by instrumentation. The novel HCG resonator design will serve as a potential platform for many devices including surface emitting lasers, optical filters, and biological or chemical sensors.

© 2008 Optical Society of America

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  1. D. Armani, T. Kippenberg, S. Spillane, and K. Vahala, “Ultra-high-Q toroid microcavity on a chip,” Nature 421, 925–928 (2003).
    [Crossref] [PubMed]
  2. T. Asano, B.-S. Song, Y. Akahane, and S. Noda, “Ultrahigh-Q nanocavities in two-dimensional photonic crystal slabs,” IEEE J. Sel. Top. Quantum Electron. 12, 1121–1134 (2006).
  3. D. Ohnishi, T. Okano, M. Imada, and S. Noda, “Room temperature continuous wave operation of a surface-emitting two-dimensional photonic crystal diode laser,” Opt. Express 12, 1562–1568 (2004).
    [Crossref] [PubMed]
  4. W.-H. Chang, W.-Y. Chen, H.-S. Chang, T.-P. Hsieh, J.-I. Chyi, and T.-M. Hsu, “Efficient single-photon sources based on low-density quantum dots in photonic-crystal nanocavities,” Phys. Rev. Lett. 96, 117401-1-117401-4 (2006).
    [Crossref]
  5. H. Takano, Y. Akahane, T. Asano, and S. Noda, “In-plane-type channel drop filter in a two-dimensional photonic crystal slab,” Appl. Phys. Lett. 84, 2226–2228 (2004).
    [Crossref]
  6. E. Chow, A. Grot, L. Mirkarimi, M. Sigalas, and G. Girolami, “Ultracompact biochemical sensor built with two-dimensional photonic crystal microcavity,” Opt. Lett. 29, 1093–1095 (2004).
    [Crossref] [PubMed]
  7. J. Niehusmann, A. Vörckel, P. H. Bolivar, T. Wahlbrink, W. Henschel, and H. Kurz, “Ultrahigh-quality-factor silicon-on-insulator microring resonator,” Opt. Lett. 29, 2861–2863 (2004).
    [Crossref]
  8. A. Loffler, J. Reithmaier, G. Sek, C. Hofmann, S. Reitzenstein, M. Kamp, and A. Forchel, “Semiconductor quantum dot microcavity pillars with high-quality factors and enlarged dot dimensions,” Appl. Phys. Lett. 86, 111105 (2005).
    [Crossref]
  9. H. A. Haus and Y. Lai, “Narrow-band distributed feedback reflector design,” J. Lightwave Technol. 9, 754–760 (1991).
    [Crossref]
  10. R. Magnusson and S. Wang, “New principle for optical filters,” Appl. Phys. Lett. 61, 1022–1024 (1992).
    [Crossref]
  11. S. Peng and G. M. Morris, “Experimental demonstration of resonant anomalies in diffraction from twodimensional gratings,” Opt. Lett. 21, 549–551 (1996).
    [Crossref] [PubMed]
  12. M. Neviere, R. Petit, and M. Cadilhac, “About the theory of optical crating coupler-waveguide systems,” Opt. Commun. 8, 113–117 (1973).
    [Crossref]
  13. C. F. R. Mateus, M. C. Y. Huang, J. E. Foley, P. R. Beatty, P. Li, B. T. Cunningham, and C. J. Chang-Hasnain, “Compact label-free biosensor using VCSEL-based measurement system,” IEEE Photon. Technol. Lett. 16, 1712 (2004).
    [Crossref]
  14. M. Lu, S. S. Choi, C. J. Wagner, J. G. Eden, and B. T. Cunningham, “Label free biosensor incorporating a replica-molded, vertically emitting distributed feedback laser” Appl. Phys. Lett. 92, 261502 (2008).
    [Crossref]
  15. C. F. R. Mateus, M. C. Y. Huang, D. Yunfei, A. R. Neureuther, and C. J. Chang-Hasnain, “Ultrabroadband mirror using low-index cladded subwavelength grating,” IEEE Photon. Technol. Lett. 16, 518–520 (2004).
    [Crossref]
  16. M. C. Y. Huang, Y. Zhou, and C. J. Chang-Hasnain, “A surface-emitting laser incorporating a high-index-contrast subwavelength grating,” Nat. Photonics 1, 119–122 (2007).
    [Crossref]
  17. L. Ferrier, S. Boutami, F. Mandorlo, X. Letartre, P. Rojo Romeo, P. Viktorovitch, P. Gilet, B. B. Bakir, P. Grosse, J.-M. Fedeli, and A. Chelnokov, “Vertical microcavities based on photonic crystal mirrors for III-V/Si integrated microlasers,” Proc. SPIE. 6989, 69890W (2008).
    [Crossref]
  18. M. C. Y. Huang, Y. Zhou, and C. J. Chang-Hasnain, “A nanoelectromechanical tunable laser,” Nat. Photonics 2, 180–184 (2008).
    [Crossref]
  19. M. G. Moharam and T. K. Gaylord, “Rigorous coupled-wave analysis of planar-grating diffraction,” J. Opt. Soc. Am. 71, 811–818 (1981).
    [Crossref]
  20. S. H. Fan, W. Suh, and J. D. Joannopoulos, “Temporal coupled-mode theory for the Fano resonance in optical resonators,” J. Opt. Soc. Am. A 20, 569–572 (2003).
    [Crossref]
  21. J. P. Kim and A. M. Sarangan, “Temperature-dependent Sellmeier equation for the refractive index of AlxGa1-xAs,” Opt. Lett. 32, 536 (2007).
    [Crossref] [PubMed]

2008 (3)

M. Lu, S. S. Choi, C. J. Wagner, J. G. Eden, and B. T. Cunningham, “Label free biosensor incorporating a replica-molded, vertically emitting distributed feedback laser” Appl. Phys. Lett. 92, 261502 (2008).
[Crossref]

L. Ferrier, S. Boutami, F. Mandorlo, X. Letartre, P. Rojo Romeo, P. Viktorovitch, P. Gilet, B. B. Bakir, P. Grosse, J.-M. Fedeli, and A. Chelnokov, “Vertical microcavities based on photonic crystal mirrors for III-V/Si integrated microlasers,” Proc. SPIE. 6989, 69890W (2008).
[Crossref]

M. C. Y. Huang, Y. Zhou, and C. J. Chang-Hasnain, “A nanoelectromechanical tunable laser,” Nat. Photonics 2, 180–184 (2008).
[Crossref]

2007 (2)

J. P. Kim and A. M. Sarangan, “Temperature-dependent Sellmeier equation for the refractive index of AlxGa1-xAs,” Opt. Lett. 32, 536 (2007).
[Crossref] [PubMed]

M. C. Y. Huang, Y. Zhou, and C. J. Chang-Hasnain, “A surface-emitting laser incorporating a high-index-contrast subwavelength grating,” Nat. Photonics 1, 119–122 (2007).
[Crossref]

2006 (2)

W.-H. Chang, W.-Y. Chen, H.-S. Chang, T.-P. Hsieh, J.-I. Chyi, and T.-M. Hsu, “Efficient single-photon sources based on low-density quantum dots in photonic-crystal nanocavities,” Phys. Rev. Lett. 96, 117401-1-117401-4 (2006).
[Crossref]

T. Asano, B.-S. Song, Y. Akahane, and S. Noda, “Ultrahigh-Q nanocavities in two-dimensional photonic crystal slabs,” IEEE J. Sel. Top. Quantum Electron. 12, 1121–1134 (2006).

2005 (1)

A. Loffler, J. Reithmaier, G. Sek, C. Hofmann, S. Reitzenstein, M. Kamp, and A. Forchel, “Semiconductor quantum dot microcavity pillars with high-quality factors and enlarged dot dimensions,” Appl. Phys. Lett. 86, 111105 (2005).
[Crossref]

2004 (6)

D. Ohnishi, T. Okano, M. Imada, and S. Noda, “Room temperature continuous wave operation of a surface-emitting two-dimensional photonic crystal diode laser,” Opt. Express 12, 1562–1568 (2004).
[Crossref] [PubMed]

H. Takano, Y. Akahane, T. Asano, and S. Noda, “In-plane-type channel drop filter in a two-dimensional photonic crystal slab,” Appl. Phys. Lett. 84, 2226–2228 (2004).
[Crossref]

E. Chow, A. Grot, L. Mirkarimi, M. Sigalas, and G. Girolami, “Ultracompact biochemical sensor built with two-dimensional photonic crystal microcavity,” Opt. Lett. 29, 1093–1095 (2004).
[Crossref] [PubMed]

J. Niehusmann, A. Vörckel, P. H. Bolivar, T. Wahlbrink, W. Henschel, and H. Kurz, “Ultrahigh-quality-factor silicon-on-insulator microring resonator,” Opt. Lett. 29, 2861–2863 (2004).
[Crossref]

C. F. R. Mateus, M. C. Y. Huang, J. E. Foley, P. R. Beatty, P. Li, B. T. Cunningham, and C. J. Chang-Hasnain, “Compact label-free biosensor using VCSEL-based measurement system,” IEEE Photon. Technol. Lett. 16, 1712 (2004).
[Crossref]

C. F. R. Mateus, M. C. Y. Huang, D. Yunfei, A. R. Neureuther, and C. J. Chang-Hasnain, “Ultrabroadband mirror using low-index cladded subwavelength grating,” IEEE Photon. Technol. Lett. 16, 518–520 (2004).
[Crossref]

2003 (2)

D. Armani, T. Kippenberg, S. Spillane, and K. Vahala, “Ultra-high-Q toroid microcavity on a chip,” Nature 421, 925–928 (2003).
[Crossref] [PubMed]

S. H. Fan, W. Suh, and J. D. Joannopoulos, “Temporal coupled-mode theory for the Fano resonance in optical resonators,” J. Opt. Soc. Am. A 20, 569–572 (2003).
[Crossref]

1996 (1)

1992 (1)

R. Magnusson and S. Wang, “New principle for optical filters,” Appl. Phys. Lett. 61, 1022–1024 (1992).
[Crossref]

1991 (1)

H. A. Haus and Y. Lai, “Narrow-band distributed feedback reflector design,” J. Lightwave Technol. 9, 754–760 (1991).
[Crossref]

1981 (1)

1973 (1)

M. Neviere, R. Petit, and M. Cadilhac, “About the theory of optical crating coupler-waveguide systems,” Opt. Commun. 8, 113–117 (1973).
[Crossref]

Akahane, Y.

T. Asano, B.-S. Song, Y. Akahane, and S. Noda, “Ultrahigh-Q nanocavities in two-dimensional photonic crystal slabs,” IEEE J. Sel. Top. Quantum Electron. 12, 1121–1134 (2006).

H. Takano, Y. Akahane, T. Asano, and S. Noda, “In-plane-type channel drop filter in a two-dimensional photonic crystal slab,” Appl. Phys. Lett. 84, 2226–2228 (2004).
[Crossref]

Armani, D.

D. Armani, T. Kippenberg, S. Spillane, and K. Vahala, “Ultra-high-Q toroid microcavity on a chip,” Nature 421, 925–928 (2003).
[Crossref] [PubMed]

Asano, T.

T. Asano, B.-S. Song, Y. Akahane, and S. Noda, “Ultrahigh-Q nanocavities in two-dimensional photonic crystal slabs,” IEEE J. Sel. Top. Quantum Electron. 12, 1121–1134 (2006).

H. Takano, Y. Akahane, T. Asano, and S. Noda, “In-plane-type channel drop filter in a two-dimensional photonic crystal slab,” Appl. Phys. Lett. 84, 2226–2228 (2004).
[Crossref]

Bakir, B. B.

L. Ferrier, S. Boutami, F. Mandorlo, X. Letartre, P. Rojo Romeo, P. Viktorovitch, P. Gilet, B. B. Bakir, P. Grosse, J.-M. Fedeli, and A. Chelnokov, “Vertical microcavities based on photonic crystal mirrors for III-V/Si integrated microlasers,” Proc. SPIE. 6989, 69890W (2008).
[Crossref]

Beatty, P. R.

C. F. R. Mateus, M. C. Y. Huang, J. E. Foley, P. R. Beatty, P. Li, B. T. Cunningham, and C. J. Chang-Hasnain, “Compact label-free biosensor using VCSEL-based measurement system,” IEEE Photon. Technol. Lett. 16, 1712 (2004).
[Crossref]

Bolivar, P. H.

Boutami, S.

L. Ferrier, S. Boutami, F. Mandorlo, X. Letartre, P. Rojo Romeo, P. Viktorovitch, P. Gilet, B. B. Bakir, P. Grosse, J.-M. Fedeli, and A. Chelnokov, “Vertical microcavities based on photonic crystal mirrors for III-V/Si integrated microlasers,” Proc. SPIE. 6989, 69890W (2008).
[Crossref]

Cadilhac, M.

M. Neviere, R. Petit, and M. Cadilhac, “About the theory of optical crating coupler-waveguide systems,” Opt. Commun. 8, 113–117 (1973).
[Crossref]

Chang, H.-S.

W.-H. Chang, W.-Y. Chen, H.-S. Chang, T.-P. Hsieh, J.-I. Chyi, and T.-M. Hsu, “Efficient single-photon sources based on low-density quantum dots in photonic-crystal nanocavities,” Phys. Rev. Lett. 96, 117401-1-117401-4 (2006).
[Crossref]

Chang, W.-H.

W.-H. Chang, W.-Y. Chen, H.-S. Chang, T.-P. Hsieh, J.-I. Chyi, and T.-M. Hsu, “Efficient single-photon sources based on low-density quantum dots in photonic-crystal nanocavities,” Phys. Rev. Lett. 96, 117401-1-117401-4 (2006).
[Crossref]

Chang-Hasnain, C. J.

M. C. Y. Huang, Y. Zhou, and C. J. Chang-Hasnain, “A nanoelectromechanical tunable laser,” Nat. Photonics 2, 180–184 (2008).
[Crossref]

M. C. Y. Huang, Y. Zhou, and C. J. Chang-Hasnain, “A surface-emitting laser incorporating a high-index-contrast subwavelength grating,” Nat. Photonics 1, 119–122 (2007).
[Crossref]

C. F. R. Mateus, M. C. Y. Huang, D. Yunfei, A. R. Neureuther, and C. J. Chang-Hasnain, “Ultrabroadband mirror using low-index cladded subwavelength grating,” IEEE Photon. Technol. Lett. 16, 518–520 (2004).
[Crossref]

C. F. R. Mateus, M. C. Y. Huang, J. E. Foley, P. R. Beatty, P. Li, B. T. Cunningham, and C. J. Chang-Hasnain, “Compact label-free biosensor using VCSEL-based measurement system,” IEEE Photon. Technol. Lett. 16, 1712 (2004).
[Crossref]

Chelnokov, A.

L. Ferrier, S. Boutami, F. Mandorlo, X. Letartre, P. Rojo Romeo, P. Viktorovitch, P. Gilet, B. B. Bakir, P. Grosse, J.-M. Fedeli, and A. Chelnokov, “Vertical microcavities based on photonic crystal mirrors for III-V/Si integrated microlasers,” Proc. SPIE. 6989, 69890W (2008).
[Crossref]

Chen, W.-Y.

W.-H. Chang, W.-Y. Chen, H.-S. Chang, T.-P. Hsieh, J.-I. Chyi, and T.-M. Hsu, “Efficient single-photon sources based on low-density quantum dots in photonic-crystal nanocavities,” Phys. Rev. Lett. 96, 117401-1-117401-4 (2006).
[Crossref]

Choi, S. S.

M. Lu, S. S. Choi, C. J. Wagner, J. G. Eden, and B. T. Cunningham, “Label free biosensor incorporating a replica-molded, vertically emitting distributed feedback laser” Appl. Phys. Lett. 92, 261502 (2008).
[Crossref]

Chow, E.

Chyi, J.-I.

W.-H. Chang, W.-Y. Chen, H.-S. Chang, T.-P. Hsieh, J.-I. Chyi, and T.-M. Hsu, “Efficient single-photon sources based on low-density quantum dots in photonic-crystal nanocavities,” Phys. Rev. Lett. 96, 117401-1-117401-4 (2006).
[Crossref]

Cunningham, B. T.

M. Lu, S. S. Choi, C. J. Wagner, J. G. Eden, and B. T. Cunningham, “Label free biosensor incorporating a replica-molded, vertically emitting distributed feedback laser” Appl. Phys. Lett. 92, 261502 (2008).
[Crossref]

C. F. R. Mateus, M. C. Y. Huang, J. E. Foley, P. R. Beatty, P. Li, B. T. Cunningham, and C. J. Chang-Hasnain, “Compact label-free biosensor using VCSEL-based measurement system,” IEEE Photon. Technol. Lett. 16, 1712 (2004).
[Crossref]

Eden, J. G.

M. Lu, S. S. Choi, C. J. Wagner, J. G. Eden, and B. T. Cunningham, “Label free biosensor incorporating a replica-molded, vertically emitting distributed feedback laser” Appl. Phys. Lett. 92, 261502 (2008).
[Crossref]

Fan, S. H.

Fedeli, J.-M.

L. Ferrier, S. Boutami, F. Mandorlo, X. Letartre, P. Rojo Romeo, P. Viktorovitch, P. Gilet, B. B. Bakir, P. Grosse, J.-M. Fedeli, and A. Chelnokov, “Vertical microcavities based on photonic crystal mirrors for III-V/Si integrated microlasers,” Proc. SPIE. 6989, 69890W (2008).
[Crossref]

Ferrier, L.

L. Ferrier, S. Boutami, F. Mandorlo, X. Letartre, P. Rojo Romeo, P. Viktorovitch, P. Gilet, B. B. Bakir, P. Grosse, J.-M. Fedeli, and A. Chelnokov, “Vertical microcavities based on photonic crystal mirrors for III-V/Si integrated microlasers,” Proc. SPIE. 6989, 69890W (2008).
[Crossref]

Foley, J. E.

C. F. R. Mateus, M. C. Y. Huang, J. E. Foley, P. R. Beatty, P. Li, B. T. Cunningham, and C. J. Chang-Hasnain, “Compact label-free biosensor using VCSEL-based measurement system,” IEEE Photon. Technol. Lett. 16, 1712 (2004).
[Crossref]

Forchel, A.

A. Loffler, J. Reithmaier, G. Sek, C. Hofmann, S. Reitzenstein, M. Kamp, and A. Forchel, “Semiconductor quantum dot microcavity pillars with high-quality factors and enlarged dot dimensions,” Appl. Phys. Lett. 86, 111105 (2005).
[Crossref]

Gaylord, T. K.

Gilet, P.

L. Ferrier, S. Boutami, F. Mandorlo, X. Letartre, P. Rojo Romeo, P. Viktorovitch, P. Gilet, B. B. Bakir, P. Grosse, J.-M. Fedeli, and A. Chelnokov, “Vertical microcavities based on photonic crystal mirrors for III-V/Si integrated microlasers,” Proc. SPIE. 6989, 69890W (2008).
[Crossref]

Girolami, G.

Grosse, P.

L. Ferrier, S. Boutami, F. Mandorlo, X. Letartre, P. Rojo Romeo, P. Viktorovitch, P. Gilet, B. B. Bakir, P. Grosse, J.-M. Fedeli, and A. Chelnokov, “Vertical microcavities based on photonic crystal mirrors for III-V/Si integrated microlasers,” Proc. SPIE. 6989, 69890W (2008).
[Crossref]

Grot, A.

Haus, H. A.

H. A. Haus and Y. Lai, “Narrow-band distributed feedback reflector design,” J. Lightwave Technol. 9, 754–760 (1991).
[Crossref]

Henschel, W.

Hofmann, C.

A. Loffler, J. Reithmaier, G. Sek, C. Hofmann, S. Reitzenstein, M. Kamp, and A. Forchel, “Semiconductor quantum dot microcavity pillars with high-quality factors and enlarged dot dimensions,” Appl. Phys. Lett. 86, 111105 (2005).
[Crossref]

Hsieh, T.-P.

W.-H. Chang, W.-Y. Chen, H.-S. Chang, T.-P. Hsieh, J.-I. Chyi, and T.-M. Hsu, “Efficient single-photon sources based on low-density quantum dots in photonic-crystal nanocavities,” Phys. Rev. Lett. 96, 117401-1-117401-4 (2006).
[Crossref]

Hsu, T.-M.

W.-H. Chang, W.-Y. Chen, H.-S. Chang, T.-P. Hsieh, J.-I. Chyi, and T.-M. Hsu, “Efficient single-photon sources based on low-density quantum dots in photonic-crystal nanocavities,” Phys. Rev. Lett. 96, 117401-1-117401-4 (2006).
[Crossref]

Huang, M. C. Y.

M. C. Y. Huang, Y. Zhou, and C. J. Chang-Hasnain, “A nanoelectromechanical tunable laser,” Nat. Photonics 2, 180–184 (2008).
[Crossref]

M. C. Y. Huang, Y. Zhou, and C. J. Chang-Hasnain, “A surface-emitting laser incorporating a high-index-contrast subwavelength grating,” Nat. Photonics 1, 119–122 (2007).
[Crossref]

C. F. R. Mateus, M. C. Y. Huang, D. Yunfei, A. R. Neureuther, and C. J. Chang-Hasnain, “Ultrabroadband mirror using low-index cladded subwavelength grating,” IEEE Photon. Technol. Lett. 16, 518–520 (2004).
[Crossref]

C. F. R. Mateus, M. C. Y. Huang, J. E. Foley, P. R. Beatty, P. Li, B. T. Cunningham, and C. J. Chang-Hasnain, “Compact label-free biosensor using VCSEL-based measurement system,” IEEE Photon. Technol. Lett. 16, 1712 (2004).
[Crossref]

Imada, M.

Joannopoulos, J. D.

Kamp, M.

A. Loffler, J. Reithmaier, G. Sek, C. Hofmann, S. Reitzenstein, M. Kamp, and A. Forchel, “Semiconductor quantum dot microcavity pillars with high-quality factors and enlarged dot dimensions,” Appl. Phys. Lett. 86, 111105 (2005).
[Crossref]

Kim, J. P.

Kippenberg, T.

D. Armani, T. Kippenberg, S. Spillane, and K. Vahala, “Ultra-high-Q toroid microcavity on a chip,” Nature 421, 925–928 (2003).
[Crossref] [PubMed]

Kurz, H.

Lai, Y.

H. A. Haus and Y. Lai, “Narrow-band distributed feedback reflector design,” J. Lightwave Technol. 9, 754–760 (1991).
[Crossref]

Letartre, X.

L. Ferrier, S. Boutami, F. Mandorlo, X. Letartre, P. Rojo Romeo, P. Viktorovitch, P. Gilet, B. B. Bakir, P. Grosse, J.-M. Fedeli, and A. Chelnokov, “Vertical microcavities based on photonic crystal mirrors for III-V/Si integrated microlasers,” Proc. SPIE. 6989, 69890W (2008).
[Crossref]

Li, P.

C. F. R. Mateus, M. C. Y. Huang, J. E. Foley, P. R. Beatty, P. Li, B. T. Cunningham, and C. J. Chang-Hasnain, “Compact label-free biosensor using VCSEL-based measurement system,” IEEE Photon. Technol. Lett. 16, 1712 (2004).
[Crossref]

Loffler, A.

A. Loffler, J. Reithmaier, G. Sek, C. Hofmann, S. Reitzenstein, M. Kamp, and A. Forchel, “Semiconductor quantum dot microcavity pillars with high-quality factors and enlarged dot dimensions,” Appl. Phys. Lett. 86, 111105 (2005).
[Crossref]

Lu, M.

M. Lu, S. S. Choi, C. J. Wagner, J. G. Eden, and B. T. Cunningham, “Label free biosensor incorporating a replica-molded, vertically emitting distributed feedback laser” Appl. Phys. Lett. 92, 261502 (2008).
[Crossref]

Magnusson, R.

R. Magnusson and S. Wang, “New principle for optical filters,” Appl. Phys. Lett. 61, 1022–1024 (1992).
[Crossref]

Mandorlo, F.

L. Ferrier, S. Boutami, F. Mandorlo, X. Letartre, P. Rojo Romeo, P. Viktorovitch, P. Gilet, B. B. Bakir, P. Grosse, J.-M. Fedeli, and A. Chelnokov, “Vertical microcavities based on photonic crystal mirrors for III-V/Si integrated microlasers,” Proc. SPIE. 6989, 69890W (2008).
[Crossref]

Mateus, C. F. R.

C. F. R. Mateus, M. C. Y. Huang, D. Yunfei, A. R. Neureuther, and C. J. Chang-Hasnain, “Ultrabroadband mirror using low-index cladded subwavelength grating,” IEEE Photon. Technol. Lett. 16, 518–520 (2004).
[Crossref]

C. F. R. Mateus, M. C. Y. Huang, J. E. Foley, P. R. Beatty, P. Li, B. T. Cunningham, and C. J. Chang-Hasnain, “Compact label-free biosensor using VCSEL-based measurement system,” IEEE Photon. Technol. Lett. 16, 1712 (2004).
[Crossref]

Mirkarimi, L.

Moharam, M. G.

Morris, G. M.

Neureuther, A. R.

C. F. R. Mateus, M. C. Y. Huang, D. Yunfei, A. R. Neureuther, and C. J. Chang-Hasnain, “Ultrabroadband mirror using low-index cladded subwavelength grating,” IEEE Photon. Technol. Lett. 16, 518–520 (2004).
[Crossref]

Neviere, M.

M. Neviere, R. Petit, and M. Cadilhac, “About the theory of optical crating coupler-waveguide systems,” Opt. Commun. 8, 113–117 (1973).
[Crossref]

Niehusmann, J.

Noda, S.

T. Asano, B.-S. Song, Y. Akahane, and S. Noda, “Ultrahigh-Q nanocavities in two-dimensional photonic crystal slabs,” IEEE J. Sel. Top. Quantum Electron. 12, 1121–1134 (2006).

H. Takano, Y. Akahane, T. Asano, and S. Noda, “In-plane-type channel drop filter in a two-dimensional photonic crystal slab,” Appl. Phys. Lett. 84, 2226–2228 (2004).
[Crossref]

D. Ohnishi, T. Okano, M. Imada, and S. Noda, “Room temperature continuous wave operation of a surface-emitting two-dimensional photonic crystal diode laser,” Opt. Express 12, 1562–1568 (2004).
[Crossref] [PubMed]

Ohnishi, D.

Okano, T.

Peng, S.

Petit, R.

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[Crossref]

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A. Loffler, J. Reithmaier, G. Sek, C. Hofmann, S. Reitzenstein, M. Kamp, and A. Forchel, “Semiconductor quantum dot microcavity pillars with high-quality factors and enlarged dot dimensions,” Appl. Phys. Lett. 86, 111105 (2005).
[Crossref]

Reitzenstein, S.

A. Loffler, J. Reithmaier, G. Sek, C. Hofmann, S. Reitzenstein, M. Kamp, and A. Forchel, “Semiconductor quantum dot microcavity pillars with high-quality factors and enlarged dot dimensions,” Appl. Phys. Lett. 86, 111105 (2005).
[Crossref]

Rojo Romeo, P.

L. Ferrier, S. Boutami, F. Mandorlo, X. Letartre, P. Rojo Romeo, P. Viktorovitch, P. Gilet, B. B. Bakir, P. Grosse, J.-M. Fedeli, and A. Chelnokov, “Vertical microcavities based on photonic crystal mirrors for III-V/Si integrated microlasers,” Proc. SPIE. 6989, 69890W (2008).
[Crossref]

Sarangan, A. M.

Sek, G.

A. Loffler, J. Reithmaier, G. Sek, C. Hofmann, S. Reitzenstein, M. Kamp, and A. Forchel, “Semiconductor quantum dot microcavity pillars with high-quality factors and enlarged dot dimensions,” Appl. Phys. Lett. 86, 111105 (2005).
[Crossref]

Sigalas, M.

Song, B.-S.

T. Asano, B.-S. Song, Y. Akahane, and S. Noda, “Ultrahigh-Q nanocavities in two-dimensional photonic crystal slabs,” IEEE J. Sel. Top. Quantum Electron. 12, 1121–1134 (2006).

Spillane, S.

D. Armani, T. Kippenberg, S. Spillane, and K. Vahala, “Ultra-high-Q toroid microcavity on a chip,” Nature 421, 925–928 (2003).
[Crossref] [PubMed]

Suh, W.

Takano, H.

H. Takano, Y. Akahane, T. Asano, and S. Noda, “In-plane-type channel drop filter in a two-dimensional photonic crystal slab,” Appl. Phys. Lett. 84, 2226–2228 (2004).
[Crossref]

Vahala, K.

D. Armani, T. Kippenberg, S. Spillane, and K. Vahala, “Ultra-high-Q toroid microcavity on a chip,” Nature 421, 925–928 (2003).
[Crossref] [PubMed]

Viktorovitch, P.

L. Ferrier, S. Boutami, F. Mandorlo, X. Letartre, P. Rojo Romeo, P. Viktorovitch, P. Gilet, B. B. Bakir, P. Grosse, J.-M. Fedeli, and A. Chelnokov, “Vertical microcavities based on photonic crystal mirrors for III-V/Si integrated microlasers,” Proc. SPIE. 6989, 69890W (2008).
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M. C. Y. Huang, Y. Zhou, and C. J. Chang-Hasnain, “A nanoelectromechanical tunable laser,” Nat. Photonics 2, 180–184 (2008).
[Crossref]

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[Crossref]

Appl. Phys. Lett. (4)

H. Takano, Y. Akahane, T. Asano, and S. Noda, “In-plane-type channel drop filter in a two-dimensional photonic crystal slab,” Appl. Phys. Lett. 84, 2226–2228 (2004).
[Crossref]

A. Loffler, J. Reithmaier, G. Sek, C. Hofmann, S. Reitzenstein, M. Kamp, and A. Forchel, “Semiconductor quantum dot microcavity pillars with high-quality factors and enlarged dot dimensions,” Appl. Phys. Lett. 86, 111105 (2005).
[Crossref]

R. Magnusson and S. Wang, “New principle for optical filters,” Appl. Phys. Lett. 61, 1022–1024 (1992).
[Crossref]

M. Lu, S. S. Choi, C. J. Wagner, J. G. Eden, and B. T. Cunningham, “Label free biosensor incorporating a replica-molded, vertically emitting distributed feedback laser” Appl. Phys. Lett. 92, 261502 (2008).
[Crossref]

IEEE J. Sel. Top. Quantum Electron. (1)

T. Asano, B.-S. Song, Y. Akahane, and S. Noda, “Ultrahigh-Q nanocavities in two-dimensional photonic crystal slabs,” IEEE J. Sel. Top. Quantum Electron. 12, 1121–1134 (2006).

IEEE Photon. Technol. Lett. (2)

C. F. R. Mateus, M. C. Y. Huang, D. Yunfei, A. R. Neureuther, and C. J. Chang-Hasnain, “Ultrabroadband mirror using low-index cladded subwavelength grating,” IEEE Photon. Technol. Lett. 16, 518–520 (2004).
[Crossref]

C. F. R. Mateus, M. C. Y. Huang, J. E. Foley, P. R. Beatty, P. Li, B. T. Cunningham, and C. J. Chang-Hasnain, “Compact label-free biosensor using VCSEL-based measurement system,” IEEE Photon. Technol. Lett. 16, 1712 (2004).
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J. Opt. Soc. Am. (1)

J. Opt. Soc. Am. A (1)

Nat. Photonics (2)

M. C. Y. Huang, Y. Zhou, and C. J. Chang-Hasnain, “A nanoelectromechanical tunable laser,” Nat. Photonics 2, 180–184 (2008).
[Crossref]

M. C. Y. Huang, Y. Zhou, and C. J. Chang-Hasnain, “A surface-emitting laser incorporating a high-index-contrast subwavelength grating,” Nat. Photonics 1, 119–122 (2007).
[Crossref]

Nature (1)

D. Armani, T. Kippenberg, S. Spillane, and K. Vahala, “Ultra-high-Q toroid microcavity on a chip,” Nature 421, 925–928 (2003).
[Crossref] [PubMed]

Opt. Commun. (1)

M. Neviere, R. Petit, and M. Cadilhac, “About the theory of optical crating coupler-waveguide systems,” Opt. Commun. 8, 113–117 (1973).
[Crossref]

Opt. Express (1)

Opt. Lett. (4)

Phys. Rev. Lett. (1)

W.-H. Chang, W.-Y. Chen, H.-S. Chang, T.-P. Hsieh, J.-I. Chyi, and T.-M. Hsu, “Efficient single-photon sources based on low-density quantum dots in photonic-crystal nanocavities,” Phys. Rev. Lett. 96, 117401-1-117401-4 (2006).
[Crossref]

Proc. SPIE. (1)

L. Ferrier, S. Boutami, F. Mandorlo, X. Letartre, P. Rojo Romeo, P. Viktorovitch, P. Gilet, B. B. Bakir, P. Grosse, J.-M. Fedeli, and A. Chelnokov, “Vertical microcavities based on photonic crystal mirrors for III-V/Si integrated microlasers,” Proc. SPIE. 6989, 69890W (2008).
[Crossref]

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Figures (6)

Fig. 1.
Fig. 1.

(a). Schematic of a HCG structure (b). Simulated reflectivity spectrum of HCG grating using RCWA shown in blue circles. Red curve is the fitted Fano resonance line shape. Q factor is ~500,000

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Fig. 2.
Fig. 2.

(a). Schematic of HCG high-Q resonator. (b) Schematic of middle HCG grating with three In0.2Ga0.8As quantum wells embedded inside grating layer. (c) Schematic of side mix-DBR grating mirror which is a combination of 1st-order and 3rd-order DBR gratings.

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Fig. 3.
Fig. 3.

(a). Simulated electric field intensity profile in the HCG resonator. Color is labeled in log scale. Q is estimated to be 500,000. (b) Normalized electrical field decay as a function of time in the HCG resonator for different number of HCG periods (3 periods, 5 periods, 7 periods and 15 periods). Q is estimated to be 900, 4000, 17000 and 500000 respectively.

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Fig. 4.
Fig. 4.

(a). Simulation results for a HCG biosensor. The resonant wavelength red shift when biomolecule layers with different thicknesses are deposited onto the HCG structure. (b). Simulation results for HCG resonant wavelength and Q factor as a function of temperature. Resonant wavelength only shifts 0.5 Å/K and the Q factor of the HCG cavity remains almost constant when temperature is changed from 0 °C to 100 °C.

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Fig. 5.
Fig. 5.

SEM image of fabricated HCG high-Q resonator.

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Fig. 6.
Fig. 6.

(a). Emission spectrum of HCG resonator (in red) and emission spectrum in the area without grating (in blue). The inset shows a zoomed-in picture of the HCG emission spectrum. The FWHM of the HCG resonator emission peak is ~0.07nm and Q is ~14000. (b) Emission spectra of HCG resonator under 10µW, 100µW, 300µW optical pumping, respectively.

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Equations (1)

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R = r 2 ( ω − ω 0 ) 2 + t 2 ( 1 / τ ) 2 − 2 r t ( ω − ω 0 ) ( 1 / τ ) ( ω − ω 0 ) 2 + ( 1 / τ ) 2

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