Abstract

Most aspheric surfaces have been tested by interferometer with some null correctors. This approach, however, often fails when there are many aspherical terms or test surface is very steep because it is not easy to design the conventional null lens or CGH (Computer Generated Hologram). On the other hand, 3-D profilometer can measure aspheric surfaces without any null correctors; however, it takes some time to measure, which makes it unsuitable for the production line in the factory. In this paper, we apply the Hartmann test to the measurement of steep convex aspheric surfaces of which diameter is about 16 mm. In order to increase the measurement accuracy, we calibrated the test setup using a CGH that simulates the ideal test surface. We demonstrated that the significant amount of error in the test setup could be removed by this calibration process. The test results showed only 2 nm rms WFE (wave front error) difference even though the WFE of test setup was worsened by more than 0.13 μm rms. Since this method makes it possible to measure highly aspheric surface quickly and accurately, it can be used in the production line.

© 2006 Optical Society of America

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  1. D. Malacara, "Null tests using compensators," in Optical shop testing (Wiley, New York, 1992), Ch. 12.
  2. D. Malacara, "Hartmann and other screen tests," in Optical shop testing (Wiley, New York, 1992), Ch. 10.
  3. J. H. Burge, "Fizeau interferometry for large convex surfaces," in Optical manufacturing and testing, V.J.Doherty, and H.P.Stahl, eds., Proc. SPIE 2536, 127-138 (1995).
  4. T. H. Kim, J. Burge, Y. W. Lee, and S.S. Kim, "Null test for highly paraboloidal mirror," Appl. Opt. 43, 3614-3618 (2004).
    [CrossRef]
  5. V. A. Zverev, S. A. Rodionov, M. N. Sokol'skii, and V. V. Usoskin, "Testing of the primary mirror of the LAT (large azimuthal telescope) by the Hartmann method during its manufacture," Sov. J. Opt. Technol. 44, 127-129 (1977).
  6. H.-S. Yang, Y.-W. Lee, J.-B. Song, and I.-W. Lee, "Null Hartmann test for the fabrication of large aspheric surfaces," Opt. Exp., 1839-1847 (2005).
  7. J. Pfund, N. Lindlein, and J. Schwider, "Misalignment effects of the Shack-Hartmann sensor," Appl. Opt. 37, 22-27 (1998).
  8. J. Pfund, N. Lindlein, and J. Schwider, "Nonnull testing of rotationally symmetric aspheres: a systematic error assessment," Appl. Opt. 40, 439-446 (2001).
  9. T. M. Jeong, M. Menon, and G. Yoon, "Measurement of wave-front aberration in soft contact lenses by use of a Shack-Hartmsnn wave-front sensor," Appl. Opt. 44, 4523-4527 (2005).
    [CrossRef]
  10. R. Diaz-Uribe, and M. Campos-Garcia, "Null-screen testing of fast convex aspheric surfaces," Appl. Opt. 39, 2670-2677 (2000).
  11. M. Campos-Garcia, R. Diaz-Uribe, and F. Granados-Agustin, "Testing fast aspheric convex surfaces with a linear array of sources," Appl. Opt. 43, 6255-6264 (2004).
    [CrossRef]
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2005 (1)

2004 (2)

2001 (1)

2000 (1)

1998 (1)

1980 (1)

1977 (1)

V. A. Zverev, S. A. Rodionov, M. N. Sokol'skii, and V. V. Usoskin, "Testing of the primary mirror of the LAT (large azimuthal telescope) by the Hartmann method during its manufacture," Sov. J. Opt. Technol. 44, 127-129 (1977).

Burge, J.

Campos-Garcia, M.

Diaz-Uribe, R.

Granados-Agustin, F.

Jeong, T. M.

Kim, S.S.

Kim, T. H.

Lee, Y. W.

Lindlein, N.

Menon, M.

Pfund, J.

Rodionov, S. A.

V. A. Zverev, S. A. Rodionov, M. N. Sokol'skii, and V. V. Usoskin, "Testing of the primary mirror of the LAT (large azimuthal telescope) by the Hartmann method during its manufacture," Sov. J. Opt. Technol. 44, 127-129 (1977).

Schwider, J.

Sokol'skii, M. N.

V. A. Zverev, S. A. Rodionov, M. N. Sokol'skii, and V. V. Usoskin, "Testing of the primary mirror of the LAT (large azimuthal telescope) by the Hartmann method during its manufacture," Sov. J. Opt. Technol. 44, 127-129 (1977).

Southwell, W. H.

Usoskin, V. V.

V. A. Zverev, S. A. Rodionov, M. N. Sokol'skii, and V. V. Usoskin, "Testing of the primary mirror of the LAT (large azimuthal telescope) by the Hartmann method during its manufacture," Sov. J. Opt. Technol. 44, 127-129 (1977).

Yoon, G.

Zverev, V. A.

V. A. Zverev, S. A. Rodionov, M. N. Sokol'skii, and V. V. Usoskin, "Testing of the primary mirror of the LAT (large azimuthal telescope) by the Hartmann method during its manufacture," Sov. J. Opt. Technol. 44, 127-129 (1977).

Appl. Opt. (6)

J. Opt. Soc. Am. (1)

Sov. J. Opt. Technol. (1)

V. A. Zverev, S. A. Rodionov, M. N. Sokol'skii, and V. V. Usoskin, "Testing of the primary mirror of the LAT (large azimuthal telescope) by the Hartmann method during its manufacture," Sov. J. Opt. Technol. 44, 127-129 (1977).

Other (4)

H.-S. Yang, Y.-W. Lee, J.-B. Song, and I.-W. Lee, "Null Hartmann test for the fabrication of large aspheric surfaces," Opt. Exp., 1839-1847 (2005).

D. Malacara, "Null tests using compensators," in Optical shop testing (Wiley, New York, 1992), Ch. 12.

D. Malacara, "Hartmann and other screen tests," in Optical shop testing (Wiley, New York, 1992), Ch. 10.

J. H. Burge, "Fizeau interferometry for large convex surfaces," in Optical manufacturing and testing, V.J.Doherty, and H.P.Stahl, eds., Proc. SPIE 2536, 127-138 (1995).

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