I. H. Chowdhury, X. Xu, and A. M. Weiner, “Ultrafast double pulse ablation of fused silica,” Appl. Phys. Lett. 86, 151110 (2005).
[Crossref]
D. Day and M. Gu, “Microchannel fabrication in PMMA based on localized heating by nanojoule high repetition rate femtosecond pulses,” Opt. Express 13, 5939–5946 (2005).
[Crossref]
[PubMed]
S. Sowa, W. Watanabe, T. Tamaki, J. Nishii, and K. Itoh, “Symmetric waveguides in poly(methyl methacrylate) fabricated by femtosecond laser pulses,” Opt. Express 14, 291–297 (2005).
[Crossref]
M. S. Giridhar, K. Seong, A. Shulzgen, P. Khulbe, N. Peyghambarian, and M. Mansuripur, “Femtosecond pulsed laser micromachining of glass substrates with applications to microfluidic devices,” Appl. Opt. 43, 4584–4589 (2004).
[Crossref]
[PubMed]
C. B. Schaffer, A. O. Jamison, and E. Mazur, “Morphology of femtosecond laser-induced structural changes in bulk transparent materials,” Appl. Phys. Lett. 84, 1441–1443 (2004).
[Crossref]
S. K. Sia and G. Whitesides, “Microfluidic devices fabricated in poly(dimethyl siloxane) for biological studies,” Electroph. 24, 3563–3576 (2003).
[Crossref]
D. B. Wolfe, J. B. Ashcom, J. C. Hwang, C. B. Schaffer, E. Mazur, and G. Whitesides, “Customization of poly(dimethyl siloxane) stamps by micromachining using a femtosecond-pulsed laser,” Adv. Mater. 15, 62–65 (2003).
[Crossref]
D. Lim, Y. Kamotani, B. Cho, J. Mazumder, and S. Takayama, “Fabrication of microfluidic mixers and artificial vasculatures using a high-brightness diode-pumped Nd:YAG laser direct write method,” Lab Chip 3, 318–323 (2003).
D. Therriault, S. R. White, and J. A. Lewis, “Cahotic mixing in three-dimensional microlvascular networks fabricated by direct-write assembly,” Nat. Mater. 2, 265–271 (2003).
[Crossref]
[PubMed]
M. Masuda, K. Sugiola, Y. Cheng, N. Aoki, M. Kawachi, K. Shihoyama, K. Toyoda, H. Helvajian, and K. Midorikawa, “3-D microstructuring inside photosensitive glass by femtosecond laser excitation,” Appl. Phys. A 76, 857–860 (2003).
[Crossref]
M. Ventura, M. Straub, and M. Gu, “Void channel microstructures in resin solids as an efficient way to infrared photonic crystals,” Appl. Phys. Lett. 82, 1649–1651 (2003).
[Crossref]
K. Venkatakrishman, B. K. Ngoi, P. Stanley, L. E. Lim, B. Tan, and N. R. Sivakumar, “Laser writing techniques for photomask fabrication using a femtosecond laser,” Appl. Phys. A 74, 493–496 (2002).
[Crossref]
K. Venkatakrishman, P. Stanley, and L. E. Lim, “Femtosecond laser ablation of thin films for the fabrication of binary photomasks,” J. Micromech. Microeng. 12, 775–779 (2002).
[Crossref]
D. Day and M. Gu, “Formation of voids in doped polymethylmethacrylate polymer,” Appl. Phys. Lett. 80, 2404–2406 (2002).
[Crossref]
J. C. McDonald, D. C. Duffy, J. R. Anderson, D. Chiu, H. Wu, O. J. Schueller, and G. Whitesides, “Fabrication of microfluidic systems in poly(dimethyl siloxane),” Electroph. 21, 27–40 (2000).
[Crossref]
D. C. Duffy, O. J. Schueller, S. T. Brittain, and G. Whitesides, “Rapid prototyping of microfluidic switches in poly(dimethyl siloxane) and their acitationby electro-osmotic flow,” J. Micromech. Microeng. 9, 211–217 (1999).
[Crossref]
D. C. Duffy, J. C. McDonald, O. J. Schueller, and G. Whitesides, “Rapid prototyping of microfluidic systems in poly(dimethyl siloxane),” Anal. Chem. 70, 4974–4984 (1998).
[Crossref]
[PubMed]
J. C. McDonald, D. C. Duffy, J. R. Anderson, D. Chiu, H. Wu, O. J. Schueller, and G. Whitesides, “Fabrication of microfluidic systems in poly(dimethyl siloxane),” Electroph. 21, 27–40 (2000).
[Crossref]
M. Masuda, K. Sugiola, Y. Cheng, N. Aoki, M. Kawachi, K. Shihoyama, K. Toyoda, H. Helvajian, and K. Midorikawa, “3-D microstructuring inside photosensitive glass by femtosecond laser excitation,” Appl. Phys. A 76, 857–860 (2003).
[Crossref]
D. B. Wolfe, J. B. Ashcom, J. C. Hwang, C. B. Schaffer, E. Mazur, and G. Whitesides, “Customization of poly(dimethyl siloxane) stamps by micromachining using a femtosecond-pulsed laser,” Adv. Mater. 15, 62–65 (2003).
[Crossref]
D. C. Duffy, O. J. Schueller, S. T. Brittain, and G. Whitesides, “Rapid prototyping of microfluidic switches in poly(dimethyl siloxane) and their acitationby electro-osmotic flow,” J. Micromech. Microeng. 9, 211–217 (1999).
[Crossref]
M. Masuda, K. Sugiola, Y. Cheng, N. Aoki, M. Kawachi, K. Shihoyama, K. Toyoda, H. Helvajian, and K. Midorikawa, “3-D microstructuring inside photosensitive glass by femtosecond laser excitation,” Appl. Phys. A 76, 857–860 (2003).
[Crossref]
J. C. McDonald, D. C. Duffy, J. R. Anderson, D. Chiu, H. Wu, O. J. Schueller, and G. Whitesides, “Fabrication of microfluidic systems in poly(dimethyl siloxane),” Electroph. 21, 27–40 (2000).
[Crossref]
D. Lim, Y. Kamotani, B. Cho, J. Mazumder, and S. Takayama, “Fabrication of microfluidic mixers and artificial vasculatures using a high-brightness diode-pumped Nd:YAG laser direct write method,” Lab Chip 3, 318–323 (2003).
I. H. Chowdhury, X. Xu, and A. M. Weiner, “Ultrafast double pulse ablation of fused silica,” Appl. Phys. Lett. 86, 151110 (2005).
[Crossref]
J. C. McDonald, D. C. Duffy, J. R. Anderson, D. Chiu, H. Wu, O. J. Schueller, and G. Whitesides, “Fabrication of microfluidic systems in poly(dimethyl siloxane),” Electroph. 21, 27–40 (2000).
[Crossref]
D. C. Duffy, O. J. Schueller, S. T. Brittain, and G. Whitesides, “Rapid prototyping of microfluidic switches in poly(dimethyl siloxane) and their acitationby electro-osmotic flow,” J. Micromech. Microeng. 9, 211–217 (1999).
[Crossref]
D. C. Duffy, J. C. McDonald, O. J. Schueller, and G. Whitesides, “Rapid prototyping of microfluidic systems in poly(dimethyl siloxane),” Anal. Chem. 70, 4974–4984 (1998).
[Crossref]
[PubMed]
D. Day and M. Gu, “Microchannel fabrication in PMMA based on localized heating by nanojoule high repetition rate femtosecond pulses,” Opt. Express 13, 5939–5946 (2005).
[Crossref]
[PubMed]
M. Ventura, M. Straub, and M. Gu, “Void channel microstructures in resin solids as an efficient way to infrared photonic crystals,” Appl. Phys. Lett. 82, 1649–1651 (2003).
[Crossref]
D. Day and M. Gu, “Formation of voids in doped polymethylmethacrylate polymer,” Appl. Phys. Lett. 80, 2404–2406 (2002).
[Crossref]
M. Masuda, K. Sugiola, Y. Cheng, N. Aoki, M. Kawachi, K. Shihoyama, K. Toyoda, H. Helvajian, and K. Midorikawa, “3-D microstructuring inside photosensitive glass by femtosecond laser excitation,” Appl. Phys. A 76, 857–860 (2003).
[Crossref]
D. B. Wolfe, J. B. Ashcom, J. C. Hwang, C. B. Schaffer, E. Mazur, and G. Whitesides, “Customization of poly(dimethyl siloxane) stamps by micromachining using a femtosecond-pulsed laser,” Adv. Mater. 15, 62–65 (2003).
[Crossref]
S. Sowa, W. Watanabe, T. Tamaki, J. Nishii, and K. Itoh, “Symmetric waveguides in poly(methyl methacrylate) fabricated by femtosecond laser pulses,” Opt. Express 14, 291–297 (2005).
[Crossref]
Y. Li, K. Itoh, W. Watanabe, K. Yamada, D. Kuroda, J. Nishii, and Y. Jiang, “Three-dimensional hole drilling of silica glass from the rear surface with femtosecond laser pulses,” Opt. Lett. 26, 1912–1914 (2001).
[Crossref]
C. B. Schaffer, A. O. Jamison, and E. Mazur, “Morphology of femtosecond laser-induced structural changes in bulk transparent materials,” Appl. Phys. Lett. 84, 1441–1443 (2004).
[Crossref]
D. Lim, Y. Kamotani, B. Cho, J. Mazumder, and S. Takayama, “Fabrication of microfluidic mixers and artificial vasculatures using a high-brightness diode-pumped Nd:YAG laser direct write method,” Lab Chip 3, 318–323 (2003).
M. Masuda, K. Sugiola, Y. Cheng, N. Aoki, M. Kawachi, K. Shihoyama, K. Toyoda, H. Helvajian, and K. Midorikawa, “3-D microstructuring inside photosensitive glass by femtosecond laser excitation,” Appl. Phys. A 76, 857–860 (2003).
[Crossref]
D. Therriault, S. R. White, and J. A. Lewis, “Cahotic mixing in three-dimensional microlvascular networks fabricated by direct-write assembly,” Nat. Mater. 2, 265–271 (2003).
[Crossref]
[PubMed]
D. Lim, Y. Kamotani, B. Cho, J. Mazumder, and S. Takayama, “Fabrication of microfluidic mixers and artificial vasculatures using a high-brightness diode-pumped Nd:YAG laser direct write method,” Lab Chip 3, 318–323 (2003).
K. Venkatakrishman, P. Stanley, and L. E. Lim, “Femtosecond laser ablation of thin films for the fabrication of binary photomasks,” J. Micromech. Microeng. 12, 775–779 (2002).
[Crossref]
K. Venkatakrishman, B. K. Ngoi, P. Stanley, L. E. Lim, B. Tan, and N. R. Sivakumar, “Laser writing techniques for photomask fabrication using a femtosecond laser,” Appl. Phys. A 74, 493–496 (2002).
[Crossref]
M. J. Madou, Fundamentals of microfabrication: The science of miniaturisation, 2nd ed., (CRC Press, Boca Raton, 2002).
M. Masuda, K. Sugiola, Y. Cheng, N. Aoki, M. Kawachi, K. Shihoyama, K. Toyoda, H. Helvajian, and K. Midorikawa, “3-D microstructuring inside photosensitive glass by femtosecond laser excitation,” Appl. Phys. A 76, 857–860 (2003).
[Crossref]
D. Lim, Y. Kamotani, B. Cho, J. Mazumder, and S. Takayama, “Fabrication of microfluidic mixers and artificial vasculatures using a high-brightness diode-pumped Nd:YAG laser direct write method,” Lab Chip 3, 318–323 (2003).
C. B. Schaffer, A. O. Jamison, and E. Mazur, “Morphology of femtosecond laser-induced structural changes in bulk transparent materials,” Appl. Phys. Lett. 84, 1441–1443 (2004).
[Crossref]
D. B. Wolfe, J. B. Ashcom, J. C. Hwang, C. B. Schaffer, E. Mazur, and G. Whitesides, “Customization of poly(dimethyl siloxane) stamps by micromachining using a femtosecond-pulsed laser,” Adv. Mater. 15, 62–65 (2003).
[Crossref]
E. N. Glezer, M. Milosavljevic, L. Huang, R. J. Finlay, T. H. Her, J. P. Callan, and E. Mazur, “Three-dimensional optical storage inside transparent materials,” Opt. Lett. 21, 2023–2025 (1996).
[Crossref]
[PubMed]
J. C. McDonald, D. C. Duffy, J. R. Anderson, D. Chiu, H. Wu, O. J. Schueller, and G. Whitesides, “Fabrication of microfluidic systems in poly(dimethyl siloxane),” Electroph. 21, 27–40 (2000).
[Crossref]
D. C. Duffy, J. C. McDonald, O. J. Schueller, and G. Whitesides, “Rapid prototyping of microfluidic systems in poly(dimethyl siloxane),” Anal. Chem. 70, 4974–4984 (1998).
[Crossref]
[PubMed]
M. Masuda, K. Sugiola, Y. Cheng, N. Aoki, M. Kawachi, K. Shihoyama, K. Toyoda, H. Helvajian, and K. Midorikawa, “3-D microstructuring inside photosensitive glass by femtosecond laser excitation,” Appl. Phys. A 76, 857–860 (2003).
[Crossref]
K. Venkatakrishman, B. K. Ngoi, P. Stanley, L. E. Lim, B. Tan, and N. R. Sivakumar, “Laser writing techniques for photomask fabrication using a femtosecond laser,” Appl. Phys. A 74, 493–496 (2002).
[Crossref]
S. Sowa, W. Watanabe, T. Tamaki, J. Nishii, and K. Itoh, “Symmetric waveguides in poly(methyl methacrylate) fabricated by femtosecond laser pulses,” Opt. Express 14, 291–297 (2005).
[Crossref]
Y. Li, K. Itoh, W. Watanabe, K. Yamada, D. Kuroda, J. Nishii, and Y. Jiang, “Three-dimensional hole drilling of silica glass from the rear surface with femtosecond laser pulses,” Opt. Lett. 26, 1912–1914 (2001).
[Crossref]
S. Rizvi, Handbook of photomask manufacturing technology, (CRC Press, Boca Raton, 2005).
[Crossref]
S. Saliterman, Fundamentals of BioMEMS and Medical Microdevices, (SPIE Press, Bellingham, 2006).
C. B. Schaffer, A. O. Jamison, and E. Mazur, “Morphology of femtosecond laser-induced structural changes in bulk transparent materials,” Appl. Phys. Lett. 84, 1441–1443 (2004).
[Crossref]
D. B. Wolfe, J. B. Ashcom, J. C. Hwang, C. B. Schaffer, E. Mazur, and G. Whitesides, “Customization of poly(dimethyl siloxane) stamps by micromachining using a femtosecond-pulsed laser,” Adv. Mater. 15, 62–65 (2003).
[Crossref]
J. C. McDonald, D. C. Duffy, J. R. Anderson, D. Chiu, H. Wu, O. J. Schueller, and G. Whitesides, “Fabrication of microfluidic systems in poly(dimethyl siloxane),” Electroph. 21, 27–40 (2000).
[Crossref]
D. C. Duffy, O. J. Schueller, S. T. Brittain, and G. Whitesides, “Rapid prototyping of microfluidic switches in poly(dimethyl siloxane) and their acitationby electro-osmotic flow,” J. Micromech. Microeng. 9, 211–217 (1999).
[Crossref]
D. C. Duffy, J. C. McDonald, O. J. Schueller, and G. Whitesides, “Rapid prototyping of microfluidic systems in poly(dimethyl siloxane),” Anal. Chem. 70, 4974–4984 (1998).
[Crossref]
[PubMed]
M. Masuda, K. Sugiola, Y. Cheng, N. Aoki, M. Kawachi, K. Shihoyama, K. Toyoda, H. Helvajian, and K. Midorikawa, “3-D microstructuring inside photosensitive glass by femtosecond laser excitation,” Appl. Phys. A 76, 857–860 (2003).
[Crossref]
S. K. Sia and G. Whitesides, “Microfluidic devices fabricated in poly(dimethyl siloxane) for biological studies,” Electroph. 24, 3563–3576 (2003).
[Crossref]
K. Venkatakrishman, B. K. Ngoi, P. Stanley, L. E. Lim, B. Tan, and N. R. Sivakumar, “Laser writing techniques for photomask fabrication using a femtosecond laser,” Appl. Phys. A 74, 493–496 (2002).
[Crossref]
K. Venkatakrishman, P. Stanley, and L. E. Lim, “Femtosecond laser ablation of thin films for the fabrication of binary photomasks,” J. Micromech. Microeng. 12, 775–779 (2002).
[Crossref]
K. Venkatakrishman, B. K. Ngoi, P. Stanley, L. E. Lim, B. Tan, and N. R. Sivakumar, “Laser writing techniques for photomask fabrication using a femtosecond laser,” Appl. Phys. A 74, 493–496 (2002).
[Crossref]
M. Ventura, M. Straub, and M. Gu, “Void channel microstructures in resin solids as an efficient way to infrared photonic crystals,” Appl. Phys. Lett. 82, 1649–1651 (2003).
[Crossref]
M. Masuda, K. Sugiola, Y. Cheng, N. Aoki, M. Kawachi, K. Shihoyama, K. Toyoda, H. Helvajian, and K. Midorikawa, “3-D microstructuring inside photosensitive glass by femtosecond laser excitation,” Appl. Phys. A 76, 857–860 (2003).
[Crossref]
D. Lim, Y. Kamotani, B. Cho, J. Mazumder, and S. Takayama, “Fabrication of microfluidic mixers and artificial vasculatures using a high-brightness diode-pumped Nd:YAG laser direct write method,” Lab Chip 3, 318–323 (2003).
K. Venkatakrishman, B. K. Ngoi, P. Stanley, L. E. Lim, B. Tan, and N. R. Sivakumar, “Laser writing techniques for photomask fabrication using a femtosecond laser,” Appl. Phys. A 74, 493–496 (2002).
[Crossref]
D. Therriault, S. R. White, and J. A. Lewis, “Cahotic mixing in three-dimensional microlvascular networks fabricated by direct-write assembly,” Nat. Mater. 2, 265–271 (2003).
[Crossref]
[PubMed]
M. Masuda, K. Sugiola, Y. Cheng, N. Aoki, M. Kawachi, K. Shihoyama, K. Toyoda, H. Helvajian, and K. Midorikawa, “3-D microstructuring inside photosensitive glass by femtosecond laser excitation,” Appl. Phys. A 76, 857–860 (2003).
[Crossref]
K. Venkatakrishman, B. K. Ngoi, P. Stanley, L. E. Lim, B. Tan, and N. R. Sivakumar, “Laser writing techniques for photomask fabrication using a femtosecond laser,” Appl. Phys. A 74, 493–496 (2002).
[Crossref]
K. Venkatakrishman, P. Stanley, and L. E. Lim, “Femtosecond laser ablation of thin films for the fabrication of binary photomasks,” J. Micromech. Microeng. 12, 775–779 (2002).
[Crossref]
M. Ventura, M. Straub, and M. Gu, “Void channel microstructures in resin solids as an efficient way to infrared photonic crystals,” Appl. Phys. Lett. 82, 1649–1651 (2003).
[Crossref]
S. Sowa, W. Watanabe, T. Tamaki, J. Nishii, and K. Itoh, “Symmetric waveguides in poly(methyl methacrylate) fabricated by femtosecond laser pulses,” Opt. Express 14, 291–297 (2005).
[Crossref]
Y. Li, K. Itoh, W. Watanabe, K. Yamada, D. Kuroda, J. Nishii, and Y. Jiang, “Three-dimensional hole drilling of silica glass from the rear surface with femtosecond laser pulses,” Opt. Lett. 26, 1912–1914 (2001).
[Crossref]
I. H. Chowdhury, X. Xu, and A. M. Weiner, “Ultrafast double pulse ablation of fused silica,” Appl. Phys. Lett. 86, 151110 (2005).
[Crossref]
D. Therriault, S. R. White, and J. A. Lewis, “Cahotic mixing in three-dimensional microlvascular networks fabricated by direct-write assembly,” Nat. Mater. 2, 265–271 (2003).
[Crossref]
[PubMed]
S. K. Sia and G. Whitesides, “Microfluidic devices fabricated in poly(dimethyl siloxane) for biological studies,” Electroph. 24, 3563–3576 (2003).
[Crossref]
D. B. Wolfe, J. B. Ashcom, J. C. Hwang, C. B. Schaffer, E. Mazur, and G. Whitesides, “Customization of poly(dimethyl siloxane) stamps by micromachining using a femtosecond-pulsed laser,” Adv. Mater. 15, 62–65 (2003).
[Crossref]
J. C. McDonald, D. C. Duffy, J. R. Anderson, D. Chiu, H. Wu, O. J. Schueller, and G. Whitesides, “Fabrication of microfluidic systems in poly(dimethyl siloxane),” Electroph. 21, 27–40 (2000).
[Crossref]
D. C. Duffy, O. J. Schueller, S. T. Brittain, and G. Whitesides, “Rapid prototyping of microfluidic switches in poly(dimethyl siloxane) and their acitationby electro-osmotic flow,” J. Micromech. Microeng. 9, 211–217 (1999).
[Crossref]
D. C. Duffy, J. C. McDonald, O. J. Schueller, and G. Whitesides, “Rapid prototyping of microfluidic systems in poly(dimethyl siloxane),” Anal. Chem. 70, 4974–4984 (1998).
[Crossref]
[PubMed]
D. B. Wolfe, J. B. Ashcom, J. C. Hwang, C. B. Schaffer, E. Mazur, and G. Whitesides, “Customization of poly(dimethyl siloxane) stamps by micromachining using a femtosecond-pulsed laser,” Adv. Mater. 15, 62–65 (2003).
[Crossref]
J. C. McDonald, D. C. Duffy, J. R. Anderson, D. Chiu, H. Wu, O. J. Schueller, and G. Whitesides, “Fabrication of microfluidic systems in poly(dimethyl siloxane),” Electroph. 21, 27–40 (2000).
[Crossref]
I. H. Chowdhury, X. Xu, and A. M. Weiner, “Ultrafast double pulse ablation of fused silica,” Appl. Phys. Lett. 86, 151110 (2005).
[Crossref]
D. B. Wolfe, J. B. Ashcom, J. C. Hwang, C. B. Schaffer, E. Mazur, and G. Whitesides, “Customization of poly(dimethyl siloxane) stamps by micromachining using a femtosecond-pulsed laser,” Adv. Mater. 15, 62–65 (2003).
[Crossref]
D. C. Duffy, J. C. McDonald, O. J. Schueller, and G. Whitesides, “Rapid prototyping of microfluidic systems in poly(dimethyl siloxane),” Anal. Chem. 70, 4974–4984 (1998).
[Crossref]
[PubMed]
M. Masuda, K. Sugiola, Y. Cheng, N. Aoki, M. Kawachi, K. Shihoyama, K. Toyoda, H. Helvajian, and K. Midorikawa, “3-D microstructuring inside photosensitive glass by femtosecond laser excitation,” Appl. Phys. A 76, 857–860 (2003).
[Crossref]
K. Venkatakrishman, B. K. Ngoi, P. Stanley, L. E. Lim, B. Tan, and N. R. Sivakumar, “Laser writing techniques for photomask fabrication using a femtosecond laser,” Appl. Phys. A 74, 493–496 (2002).
[Crossref]
M. Ventura, M. Straub, and M. Gu, “Void channel microstructures in resin solids as an efficient way to infrared photonic crystals,” Appl. Phys. Lett. 82, 1649–1651 (2003).
[Crossref]
I. H. Chowdhury, X. Xu, and A. M. Weiner, “Ultrafast double pulse ablation of fused silica,” Appl. Phys. Lett. 86, 151110 (2005).
[Crossref]
C. B. Schaffer, A. O. Jamison, and E. Mazur, “Morphology of femtosecond laser-induced structural changes in bulk transparent materials,” Appl. Phys. Lett. 84, 1441–1443 (2004).
[Crossref]
D. Day and M. Gu, “Formation of voids in doped polymethylmethacrylate polymer,” Appl. Phys. Lett. 80, 2404–2406 (2002).
[Crossref]
J. C. McDonald, D. C. Duffy, J. R. Anderson, D. Chiu, H. Wu, O. J. Schueller, and G. Whitesides, “Fabrication of microfluidic systems in poly(dimethyl siloxane),” Electroph. 21, 27–40 (2000).
[Crossref]
S. K. Sia and G. Whitesides, “Microfluidic devices fabricated in poly(dimethyl siloxane) for biological studies,” Electroph. 24, 3563–3576 (2003).
[Crossref]
D. C. Duffy, O. J. Schueller, S. T. Brittain, and G. Whitesides, “Rapid prototyping of microfluidic switches in poly(dimethyl siloxane) and their acitationby electro-osmotic flow,” J. Micromech. Microeng. 9, 211–217 (1999).
[Crossref]
K. Venkatakrishman, P. Stanley, and L. E. Lim, “Femtosecond laser ablation of thin films for the fabrication of binary photomasks,” J. Micromech. Microeng. 12, 775–779 (2002).
[Crossref]
D. Therriault, S. R. White, and J. A. Lewis, “Cahotic mixing in three-dimensional microlvascular networks fabricated by direct-write assembly,” Nat. Mater. 2, 265–271 (2003).
[Crossref]
[PubMed]
D. Day and M. Gu, “Microchannel fabrication in PMMA based on localized heating by nanojoule high repetition rate femtosecond pulses,” Opt. Express 13, 5939–5946 (2005).
[Crossref]
[PubMed]
S. Sowa, W. Watanabe, T. Tamaki, J. Nishii, and K. Itoh, “Symmetric waveguides in poly(methyl methacrylate) fabricated by femtosecond laser pulses,” Opt. Express 14, 291–297 (2005).
[Crossref]
E. N. Glezer, M. Milosavljevic, L. Huang, R. J. Finlay, T. H. Her, J. P. Callan, and E. Mazur, “Three-dimensional optical storage inside transparent materials,” Opt. Lett. 21, 2023–2025 (1996).
[Crossref]
[PubMed]
Y. Li, K. Itoh, W. Watanabe, K. Yamada, D. Kuroda, J. Nishii, and Y. Jiang, “Three-dimensional hole drilling of silica glass from the rear surface with femtosecond laser pulses,” Opt. Lett. 26, 1912–1914 (2001).
[Crossref]
D. Lim, Y. Kamotani, B. Cho, J. Mazumder, and S. Takayama, “Fabrication of microfluidic mixers and artificial vasculatures using a high-brightness diode-pumped Nd:YAG laser direct write method,” Lab Chip 3, 318–323 (2003).
M. J. Madou, Fundamentals of microfabrication: The science of miniaturisation, 2nd ed., (CRC Press, Boca Raton, 2002).
S. Rizvi, Handbook of photomask manufacturing technology, (CRC Press, Boca Raton, 2005).
[Crossref]
S. Saliterman, Fundamentals of BioMEMS and Medical Microdevices, (SPIE Press, Bellingham, 2006).