Abstract

Off-axis polarized monopole illumination is applied to a hyper-numerical-aperture (NA) (NA>1) microscopic system. Illumination artifacts due to vector effects are observed, which are asymmetric and depend on illumination conditions. A model based on rigorous coupled wave theory is used to simulate image profiles for dielectric, semiconductor, and metal gratings with different monopole locations and polarization states. A solid immersion lens microscope is used to image different types of samples including MoSi photomask, patterned silicon wafer, and chrome photomask. The experimental images are in good agreement with simulation results.

© 2010 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
High-numerical-aperture image simulation using Babinet’s principle

Seung-Hune Yang, Tom Milster, Jong Rak Park, and Jun Zhang
J. Opt. Soc. Am. A 27(5) 1012-1023 (2010)

Aberration measurement of photolithographic lenses by use of hybrid diffractive photomasks

Jinwon Sung, Mahesh Pitchumani, and Eric G. Johnson
Appl. Opt. 42(11) 1987-1995 (2003)

A complete and computationally efficient numerical model of aplanatic solid immersion lens scanning microscope

Rui Chen, Krishna Agarwal, Colin J. R. Sheppard, Jacob C. H. Phang, and Xudong Chen
Opt. Express 21(12) 14316-14330 (2013)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (19)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (3)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription