Abstract

A method is introduced for predicting control voltages that will generate a prescribed surface shape on a MEMS deformable mirror. The algorithm is based upon an analytical elastic model of the mirror membrane and an empirical electromechanical model of its actuators. It is computationally simple and inherently fast. Shapes at the limit of achievable mirror spatial frequencies with up to 1.5μm amplitudes have been achieved with less than 15nm rms error.

© 2007 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Open-loop shape control for continuous microelectromechanical system deformable mirror

Alioune Diouf, Andrew P. Legendre, Jason B. Stewart, Thomas G. Bifano, and Yang Lu
Appl. Opt. 49(31) G148-G154 (2010)

Fast iterative algorithm (FIA) for controlling MEMS deformable mirrors: principle and laboratory demonstration

Célia Blain, Olivier Guyon, Colin Bradley, and Olivier Lardière
Opt. Express 19(22) 21271-21294 (2011)

Modeling and parameter estimation for point-actuated continuous-facesheet deformable mirrors

Curtis Vogel, Glenn Tyler, Yang Lu, Thomas Bifano, Rodolphe Conan, and Celia Blain
J. Opt. Soc. Am. A 27(11) A56-A63 (2010)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (9)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (7)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription