Abstract

We have developed a tomographic diffractive microscope in reflection, which permits observation of sample surfaces with an improved lateral resolution, compared to a conventional holographic microscope. From the same set of data, high-precision measurements can be performed on the shape of the reflective surface by reconstructing the phase of the diffracted field. Doing so allows for several advantages compared to classical holographic interferometric measurements: improvement in lateral resolution, easier phase unwrapping, reduction of the coherent noise, combined with the high-longitudinal precision provided by interferometric phase measurements. We demonstrate these capabilities by imaging various test samples.

© 2014 Optical Society of America

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2013 (2)

2012 (1)

2011 (2)

S. Arhab, G. Soriano, K. Belkebir, A. Sentenac, and H. Giovannini, “Full wave optical profilometry,” J. Opt. Soc. Am. A 28, 576–580 (2011).
[CrossRef]

S. Vertu, J. Flügge, J.-J. Delaunay, and O. Haeberlé, “Improved and isotropic resolution in tomographic diffractive microscopy combining sample and illumination rotation,” Central Eur. J. Phys. 9, 969–974 (2011).
[CrossRef]

2010 (4)

M. Sarmis, B. Simon, M. Debailleul, B. Colicchio, V. Georges, J.-J. Delaunay, and O. Haeberlé, “High resolution reflection tomographic diffractive microscopy,” J. Mod. Opt. 57, 740–745 (2010).
[CrossRef]

B. Simon, M. Debailleul, A. Beghin, Y. Tourneur, and O. Haeberlé, “High resolution tomographic diffractive microscopy of biological samples,” J. Biophotonics 3, 462–467 (2010).
[CrossRef]

J. Bühl, H. Babovsky, A. Kiessling, and R. Kowarschik, “Digital synthesis of multiple off-axis holograms with overlapping Fourier spectra,” Opt. Commun. 283, 3631–3638 (2010).
[CrossRef]

L. Rong, W. Xiao, F. Pan, S. Liu, and R. Li, “Speckle noise reduction in digital holography by use of multiple polarization holograms,” Chin. Opt. Lett. 8, 653–655 (2010).
[CrossRef]

2009 (5)

2008 (7)

J. Kühn, F. Charrière, T. Colomb, E. Cuche, F. Montfort, Y. Emery, P. Marquet, and C. Depeursinge, “Axial sub-nanometer accuracy in digital holographic microscopy,” Meas. Sci. Technol. 19, 074007 (2008).
[CrossRef]

M. Debailleul, B. Simon, V. Georges, O. Haeberlé, and V. Lauer, “Holographic microscopy and diffractive microtomography of transparent samples,” Meas. Sci. Technol. 19, 074009 (2008).
[CrossRef]

B. Simon, M. Debailleul, V. Georges, V. Lauer, and O. Haeberlé, “Tomographic diffractive microscopy of transparent samples,” Eur. Phys. J. Appl. Phys. 44, 29–35 (2008).
[CrossRef]

B. Kemper and G. von Bally, “Digital holographic microscopy for live cell applications and technical inspection,” Appl. Opt. 47, A52–A61 (2008).
[CrossRef]

M. Paturzo, F. Merola, S. Grilli, S. De Nicola, A. Finizio, and P. Ferraro, “Super-resolution in digital holography by a two-dimensional dynamic phase grating,” Opt. Express 16, 17107–17118 (2008).
[CrossRef]

P. Langehanenberg, B. Kemper, D. Dirksen, and G. Von Bally, “Autofocusing in digital holographic phase contrast microscopy on pure phase objects for live cell imaging,” Appl. Opt. 47, D176–D182 (2008).
[CrossRef]

X. Kang, “An effective method for reducing speckle noise in digital holography,” Chin. Opt. Lett. 6, 100–103 (2008).
[CrossRef]

2007 (2)

2006 (7)

2003 (1)

2002 (3)

J. H. Massig, “Digital off-axis holography with a synthetic aperture,” Opt. Lett. 27, 2179–2181 (2002).
[CrossRef]

C. Liu, Z. Liu, F. Bo, Y. Wang, and J. Zhu, “Super-resolution digital holographic imaging method,” Appl. Phys. Lett. 81, 3143–3145 (2002).
[CrossRef]

V. Lauer, “New approach to optical diffraction tomography yielding a vector equation of diffraction tomography and a novel tomographic microscope,” J. Microsc. 205, 165–176 (2002).
[CrossRef]

2000 (1)

1999 (1)

1987 (1)

Alexandrov, S. A.

T. R. Hillman, T. Gutzler, S. A. Alexandrov, and D. D. Sampson, “High-resolution, wide-field object reconstruction with synthetic aperture Fourier holographic optical microscopy,” Opt. Express 17, 7873–7892 (2009).
[CrossRef]

S. A. Alexandrov, T. R. Hillman, T. Gutzler, and D. D. Sampson, “Synthetic aperture Fourier holographic optical microscopy,” Phys. Rev. Lett. 97, 168102 (2006).
[CrossRef]

Arhab, S.

Aspert, N.

Asundi, A.

W. Qu, C. Choo, V. Singh, Y. Yingjie, and A. Asundi, “Quasi-physical phase compensation in digital holographic microscopy,” J. Opt. Soc. Am. 26, 2005–2011 (2009).
[CrossRef]

Babovsky, H.

J. Bühl, H. Babovsky, A. Kiessling, and R. Kowarschik, “Digital synthesis of multiple off-axis holograms with overlapping Fourier spectra,” Opt. Commun. 283, 3631–3638 (2010).
[CrossRef]

Badizadegan, K.

Y. Sung, W. Choi, C. Fang-Yen, K. Badizadegan, R. R. Dasari, and M. S. Feld, “Optical diffraction tomography for high resolution live cell imaging,” in Novel Techniques in Microscopy (Optical Society of America, 2009).

Bailleul, J.

H. Liu, J. Bailleul, B. Simon, M. Debailleul, P. Henry, M.-J. Pac, and O. Haeberé, “Tomographic diffractive microscopy and multiview profilometry,” in Focus on Microcopy (Maastricht UMC+, 2013), p. 155, http://www.focusonmicroscopy.org/2013/index.html .

Beghin, A.

B. Simon, M. Debailleul, A. Beghin, Y. Tourneur, and O. Haeberlé, “High resolution tomographic diffractive microscopy of biological samples,” J. Biophotonics 3, 462–467 (2010).
[CrossRef]

Belkebir, K.

Bingham, P. R.

Bo, F.

C. Liu, Z. Liu, F. Bo, Y. Wang, and J. Zhu, “Super-resolution digital holographic imaging method,” Appl. Phys. Lett. 81, 3143–3145 (2002).
[CrossRef]

Bon, P.

Boss, D.

Y. Cotte, F. Toy, P. Jourdain, N. Pavillon, D. Boss, P. Magistretti, P. Marquet, and C. Depeursinge, “Marker-free phase nanoscopy,” Nat. Photonics 7, 113–117 (2013).
[CrossRef]

Brueck, S.

Bühl, J.

J. Bühl, H. Babovsky, A. Kiessling, and R. Kowarschik, “Digital synthesis of multiple off-axis holograms with overlapping Fourier spectra,” Opt. Commun. 283, 3631–3638 (2010).
[CrossRef]

Callens, N.

Charrière, F.

Chaumet, P. C.

G. Maire, Y. Ruan, T. Zhang, P. C. Chaumet, H. Giovannini, D. Sentenac, A. Talneau, K. Belkebir, and A. Sentenac, “High-resolution tomographic diffractive microscopy in reflection configuration,” J. Opt. Soc. Am. A 30, 2133–2139 (2013).
[CrossRef]

G. Maire, F. Drsek, J. Girard, H. Giovannini, A. Talneau, D. Konan, K. Belkebir, P. C. Chaumet, and A. Sentenac, “Experimental demonstration of quantitative imaging beyond Abbe’s limit with optical diffraction tomography,” Phys. Rev. Lett. 102, 213905 (2009).
[CrossRef]

Chen, X.

Choi, W.

Y. Sung, W. Choi, C. Fang-Yen, K. Badizadegan, R. R. Dasari, and M. S. Feld, “Optical diffraction tomography for high resolution live cell imaging,” in Novel Techniques in Microscopy (Optical Society of America, 2009).

Choo, C.

W. Qu, C. Choo, V. Singh, Y. Yingjie, and A. Asundi, “Quasi-physical phase compensation in digital holographic microscopy,” J. Opt. Soc. Am. 26, 2005–2011 (2009).
[CrossRef]

Colicchio, B.

M. Sarmis, B. Simon, M. Debailleul, B. Colicchio, V. Georges, J.-J. Delaunay, and O. Haeberlé, “High resolution reflection tomographic diffractive microscopy,” J. Mod. Opt. 57, 740–745 (2010).
[CrossRef]

Colomb, T.

Coppola, G.

Cotte, Y.

Y. Cotte, F. Toy, P. Jourdain, N. Pavillon, D. Boss, P. Magistretti, P. Marquet, and C. Depeursinge, “Marker-free phase nanoscopy,” Nat. Photonics 7, 113–117 (2013).
[CrossRef]

Creath, K.

Cuche, E.

Dainty, J.

G. Parry and J. Dainty, “Laser speckle and related phenomena,” in Topics in Applied Physics Series (Springer, 1984), Vol. 9.

Dasari, R. R.

Y. Sung, W. Choi, C. Fang-Yen, K. Badizadegan, R. R. Dasari, and M. S. Feld, “Optical diffraction tomography for high resolution live cell imaging,” in Novel Techniques in Microscopy (Optical Society of America, 2009).

De Nicola, S.

Debailleul, M.

M. Sarmis, B. Simon, M. Debailleul, B. Colicchio, V. Georges, J.-J. Delaunay, and O. Haeberlé, “High resolution reflection tomographic diffractive microscopy,” J. Mod. Opt. 57, 740–745 (2010).
[CrossRef]

B. Simon, M. Debailleul, A. Beghin, Y. Tourneur, and O. Haeberlé, “High resolution tomographic diffractive microscopy of biological samples,” J. Biophotonics 3, 462–467 (2010).
[CrossRef]

M. Debailleul, V. Georges, B. Simon, R. Morin, and O. Haeberlé, “High-resolution three-dimensional tomographic diffractive microscopy of transparent inorganic and biological samples,” Opt. Lett. 34, 79–81 (2009).
[CrossRef]

M. Debailleul, B. Simon, V. Georges, O. Haeberlé, and V. Lauer, “Holographic microscopy and diffractive microtomography of transparent samples,” Meas. Sci. Technol. 19, 074009 (2008).
[CrossRef]

B. Simon, M. Debailleul, V. Georges, V. Lauer, and O. Haeberlé, “Tomographic diffractive microscopy of transparent samples,” Eur. Phys. J. Appl. Phys. 44, 29–35 (2008).
[CrossRef]

H. Liu, J. Bailleul, B. Simon, M. Debailleul, P. Henry, M.-J. Pac, and O. Haeberé, “Tomographic diffractive microscopy and multiview profilometry,” in Focus on Microcopy (Maastricht UMC+, 2013), p. 155, http://www.focusonmicroscopy.org/2013/index.html .

Delaunay, J.-J.

S. Vertu, J. Flügge, J.-J. Delaunay, and O. Haeberlé, “Improved and isotropic resolution in tomographic diffractive microscopy combining sample and illumination rotation,” Central Eur. J. Phys. 9, 969–974 (2011).
[CrossRef]

M. Sarmis, B. Simon, M. Debailleul, B. Colicchio, V. Georges, J.-J. Delaunay, and O. Haeberlé, “High resolution reflection tomographic diffractive microscopy,” J. Mod. Opt. 57, 740–745 (2010).
[CrossRef]

Depeursinge, C.

Dirksen, D.

Drsek, F.

G. Maire, F. Drsek, J. Girard, H. Giovannini, A. Talneau, D. Konan, K. Belkebir, P. C. Chaumet, and A. Sentenac, “Experimental demonstration of quantitative imaging beyond Abbe’s limit with optical diffraction tomography,” Phys. Rev. Lett. 102, 213905 (2009).
[CrossRef]

Duan, Z.

Dubois, F.

Emery, Y.

J. Kühn, F. Charrière, T. Colomb, E. Cuche, F. Montfort, Y. Emery, P. Marquet, and C. Depeursinge, “Axial sub-nanometer accuracy in digital holographic microscopy,” Meas. Sci. Technol. 19, 074007 (2008).
[CrossRef]

Fang-Yen, C.

Y. Sung, W. Choi, C. Fang-Yen, K. Badizadegan, R. R. Dasari, and M. S. Feld, “Optical diffraction tomography for high resolution live cell imaging,” in Novel Techniques in Microscopy (Optical Society of America, 2009).

Feld, M. S.

Y. Sung, W. Choi, C. Fang-Yen, K. Badizadegan, R. R. Dasari, and M. S. Feld, “Optical diffraction tomography for high resolution live cell imaging,” in Novel Techniques in Microscopy (Optical Society of America, 2009).

Ferraro, P.

Finizio, A.

Flügge, J.

S. Vertu, J. Flügge, J.-J. Delaunay, and O. Haeberlé, “Improved and isotropic resolution in tomographic diffractive microscopy combining sample and illumination rotation,” Central Eur. J. Phys. 9, 969–974 (2011).
[CrossRef]

García, J.

García-Martínez, P.

Georges, V.

M. Sarmis, B. Simon, M. Debailleul, B. Colicchio, V. Georges, J.-J. Delaunay, and O. Haeberlé, “High resolution reflection tomographic diffractive microscopy,” J. Mod. Opt. 57, 740–745 (2010).
[CrossRef]

M. Debailleul, V. Georges, B. Simon, R. Morin, and O. Haeberlé, “High-resolution three-dimensional tomographic diffractive microscopy of transparent inorganic and biological samples,” Opt. Lett. 34, 79–81 (2009).
[CrossRef]

B. Simon, M. Debailleul, V. Georges, V. Lauer, and O. Haeberlé, “Tomographic diffractive microscopy of transparent samples,” Eur. Phys. J. Appl. Phys. 44, 29–35 (2008).
[CrossRef]

M. Debailleul, B. Simon, V. Georges, O. Haeberlé, and V. Lauer, “Holographic microscopy and diffractive microtomography of transparent samples,” Meas. Sci. Technol. 19, 074009 (2008).
[CrossRef]

Giovannini, H.

Girard, J.

G. Maire, F. Drsek, J. Girard, H. Giovannini, A. Talneau, D. Konan, K. Belkebir, P. C. Chaumet, and A. Sentenac, “Experimental demonstration of quantitative imaging beyond Abbe’s limit with optical diffraction tomography,” Phys. Rev. Lett. 102, 213905 (2009).
[CrossRef]

Goodman, J.

J. Goodman, Introduction to Fourier Optics (McGraw-Hill, 2008).

Gorski, W.

Grilli, S.

Gutzler, T.

T. R. Hillman, T. Gutzler, S. A. Alexandrov, and D. D. Sampson, “High-resolution, wide-field object reconstruction with synthetic aperture Fourier holographic optical microscopy,” Opt. Express 17, 7873–7892 (2009).
[CrossRef]

S. A. Alexandrov, T. R. Hillman, T. Gutzler, and D. D. Sampson, “Synthetic aperture Fourier holographic optical microscopy,” Phys. Rev. Lett. 97, 168102 (2006).
[CrossRef]

Haeberé, O.

H. Liu, J. Bailleul, B. Simon, M. Debailleul, P. Henry, M.-J. Pac, and O. Haeberé, “Tomographic diffractive microscopy and multiview profilometry,” in Focus on Microcopy (Maastricht UMC+, 2013), p. 155, http://www.focusonmicroscopy.org/2013/index.html .

Haeberlé, O.

S. Vertu, J. Flügge, J.-J. Delaunay, and O. Haeberlé, “Improved and isotropic resolution in tomographic diffractive microscopy combining sample and illumination rotation,” Central Eur. J. Phys. 9, 969–974 (2011).
[CrossRef]

B. Simon, M. Debailleul, A. Beghin, Y. Tourneur, and O. Haeberlé, “High resolution tomographic diffractive microscopy of biological samples,” J. Biophotonics 3, 462–467 (2010).
[CrossRef]

M. Sarmis, B. Simon, M. Debailleul, B. Colicchio, V. Georges, J.-J. Delaunay, and O. Haeberlé, “High resolution reflection tomographic diffractive microscopy,” J. Mod. Opt. 57, 740–745 (2010).
[CrossRef]

M. Debailleul, V. Georges, B. Simon, R. Morin, and O. Haeberlé, “High-resolution three-dimensional tomographic diffractive microscopy of transparent inorganic and biological samples,” Opt. Lett. 34, 79–81 (2009).
[CrossRef]

M. Debailleul, B. Simon, V. Georges, O. Haeberlé, and V. Lauer, “Holographic microscopy and diffractive microtomography of transparent samples,” Meas. Sci. Technol. 19, 074009 (2008).
[CrossRef]

B. Simon, M. Debailleul, V. Georges, V. Lauer, and O. Haeberlé, “Tomographic diffractive microscopy of transparent samples,” Eur. Phys. J. Appl. Phys. 44, 29–35 (2008).
[CrossRef]

Henry, P.

H. Liu, J. Bailleul, B. Simon, M. Debailleul, P. Henry, M.-J. Pac, and O. Haeberé, “Tomographic diffractive microscopy and multiview profilometry,” in Focus on Microcopy (Maastricht UMC+, 2013), p. 155, http://www.focusonmicroscopy.org/2013/index.html .

Hillman, T. R.

T. R. Hillman, T. Gutzler, S. A. Alexandrov, and D. D. Sampson, “High-resolution, wide-field object reconstruction with synthetic aperture Fourier holographic optical microscopy,” Opt. Express 17, 7873–7892 (2009).
[CrossRef]

S. A. Alexandrov, T. R. Hillman, T. Gutzler, and D. D. Sampson, “Synthetic aperture Fourier holographic optical microscopy,” Phys. Rev. Lett. 97, 168102 (2006).
[CrossRef]

Jang, J.

Jeong, J.

Jourdain, P.

Y. Cotte, F. Toy, P. Jourdain, N. Pavillon, D. Boss, P. Magistretti, P. Marquet, and C. Depeursinge, “Marker-free phase nanoscopy,” Nat. Photonics 7, 113–117 (2013).
[CrossRef]

Kang, X.

Kemper, B.

Kiessling, A.

J. Bühl, H. Babovsky, A. Kiessling, and R. Kowarschik, “Digital synthesis of multiple off-axis holograms with overlapping Fourier spectra,” Opt. Commun. 283, 3631–3638 (2010).
[CrossRef]

Kim, M. W.

Kim, Y.

Konan, D.

G. Maire, F. Drsek, J. Girard, H. Giovannini, A. Talneau, D. Konan, K. Belkebir, P. C. Chaumet, and A. Sentenac, “Experimental demonstration of quantitative imaging beyond Abbe’s limit with optical diffraction tomography,” Phys. Rev. Lett. 102, 213905 (2009).
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J. Kühn, F. Charrière, T. Colomb, E. Cuche, F. Montfort, Y. Emery, P. Marquet, and C. Depeursinge, “Axial sub-nanometer accuracy in digital holographic microscopy,” Meas. Sci. Technol. 19, 074007 (2008).
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Lauer, V.

B. Simon, M. Debailleul, V. Georges, V. Lauer, and O. Haeberlé, “Tomographic diffractive microscopy of transparent samples,” Eur. Phys. J. Appl. Phys. 44, 29–35 (2008).
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H. Liu, J. Bailleul, B. Simon, M. Debailleul, P. Henry, M.-J. Pac, and O. Haeberé, “Tomographic diffractive microscopy and multiview profilometry,” in Focus on Microcopy (Maastricht UMC+, 2013), p. 155, http://www.focusonmicroscopy.org/2013/index.html .

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C. Liu, Z. Liu, F. Bo, Y. Wang, and J. Zhu, “Super-resolution digital holographic imaging method,” Appl. Phys. Lett. 81, 3143–3145 (2002).
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Y. Cotte, F. Toy, P. Jourdain, N. Pavillon, D. Boss, P. Magistretti, P. Marquet, and C. Depeursinge, “Marker-free phase nanoscopy,” Nat. Photonics 7, 113–117 (2013).
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G. Maire, Y. Ruan, T. Zhang, P. C. Chaumet, H. Giovannini, D. Sentenac, A. Talneau, K. Belkebir, and A. Sentenac, “High-resolution tomographic diffractive microscopy in reflection configuration,” J. Opt. Soc. Am. A 30, 2133–2139 (2013).
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G. Maire, F. Drsek, J. Girard, H. Giovannini, A. Talneau, D. Konan, K. Belkebir, P. C. Chaumet, and A. Sentenac, “Experimental demonstration of quantitative imaging beyond Abbe’s limit with optical diffraction tomography,” Phys. Rev. Lett. 102, 213905 (2009).
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H. Liu, J. Bailleul, B. Simon, M. Debailleul, P. Henry, M.-J. Pac, and O. Haeberé, “Tomographic diffractive microscopy and multiview profilometry,” in Focus on Microcopy (Maastricht UMC+, 2013), p. 155, http://www.focusonmicroscopy.org/2013/index.html .

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Parry, G.

G. Parry and J. Dainty, “Laser speckle and related phenomena,” in Topics in Applied Physics Series (Springer, 1984), Vol. 9.

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Pavillon, N.

Y. Cotte, F. Toy, P. Jourdain, N. Pavillon, D. Boss, P. Magistretti, P. Marquet, and C. Depeursinge, “Marker-free phase nanoscopy,” Nat. Photonics 7, 113–117 (2013).
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W. Qu, C. Choo, V. Singh, Y. Yingjie, and A. Asundi, “Quasi-physical phase compensation in digital holographic microscopy,” J. Opt. Soc. Am. 26, 2005–2011 (2009).
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M. Sarmis, B. Simon, M. Debailleul, B. Colicchio, V. Georges, J.-J. Delaunay, and O. Haeberlé, “High resolution reflection tomographic diffractive microscopy,” J. Mod. Opt. 57, 740–745 (2010).
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Schockaert, C.

Sentenac, A.

Sentenac, D.

Simon, B.

M. Sarmis, B. Simon, M. Debailleul, B. Colicchio, V. Georges, J.-J. Delaunay, and O. Haeberlé, “High resolution reflection tomographic diffractive microscopy,” J. Mod. Opt. 57, 740–745 (2010).
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B. Simon, M. Debailleul, A. Beghin, Y. Tourneur, and O. Haeberlé, “High resolution tomographic diffractive microscopy of biological samples,” J. Biophotonics 3, 462–467 (2010).
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M. Debailleul, V. Georges, B. Simon, R. Morin, and O. Haeberlé, “High-resolution three-dimensional tomographic diffractive microscopy of transparent inorganic and biological samples,” Opt. Lett. 34, 79–81 (2009).
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M. Debailleul, B. Simon, V. Georges, O. Haeberlé, and V. Lauer, “Holographic microscopy and diffractive microtomography of transparent samples,” Meas. Sci. Technol. 19, 074009 (2008).
[CrossRef]

B. Simon, M. Debailleul, V. Georges, V. Lauer, and O. Haeberlé, “Tomographic diffractive microscopy of transparent samples,” Eur. Phys. J. Appl. Phys. 44, 29–35 (2008).
[CrossRef]

H. Liu, J. Bailleul, B. Simon, M. Debailleul, P. Henry, M.-J. Pac, and O. Haeberé, “Tomographic diffractive microscopy and multiview profilometry,” in Focus on Microcopy (Maastricht UMC+, 2013), p. 155, http://www.focusonmicroscopy.org/2013/index.html .

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W. Qu, C. Choo, V. Singh, Y. Yingjie, and A. Asundi, “Quasi-physical phase compensation in digital holographic microscopy,” J. Opt. Soc. Am. 26, 2005–2011 (2009).
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Y. Sung, W. Choi, C. Fang-Yen, K. Badizadegan, R. R. Dasari, and M. S. Feld, “Optical diffraction tomography for high resolution live cell imaging,” in Novel Techniques in Microscopy (Optical Society of America, 2009).

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G. Maire, Y. Ruan, T. Zhang, P. C. Chaumet, H. Giovannini, D. Sentenac, A. Talneau, K. Belkebir, and A. Sentenac, “High-resolution tomographic diffractive microscopy in reflection configuration,” J. Opt. Soc. Am. A 30, 2133–2139 (2013).
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Y. Cotte, F. Toy, P. Jourdain, N. Pavillon, D. Boss, P. Magistretti, P. Marquet, and C. Depeursinge, “Marker-free phase nanoscopy,” Nat. Photonics 7, 113–117 (2013).
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S. Vertu, J. Flügge, J.-J. Delaunay, and O. Haeberlé, “Improved and isotropic resolution in tomographic diffractive microscopy combining sample and illumination rotation,” Central Eur. J. Phys. 9, 969–974 (2011).
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C. Liu, Z. Liu, F. Bo, Y. Wang, and J. Zhu, “Super-resolution digital holographic imaging method,” Appl. Phys. Lett. 81, 3143–3145 (2002).
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Yingjie, Y.

W. Qu, C. Choo, V. Singh, Y. Yingjie, and A. Asundi, “Quasi-physical phase compensation in digital holographic microscopy,” J. Opt. Soc. Am. 26, 2005–2011 (2009).
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C. Liu, Z. Liu, F. Bo, Y. Wang, and J. Zhu, “Super-resolution digital holographic imaging method,” Appl. Phys. Lett. 81, 3143–3145 (2002).
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[CrossRef]

F. Charrière, T. Colomb, F. Montfort, E. Cuche, P. Marquet, and C. Depeursinge, “Shot-noise influence on the reconstructed phase image signal-to-noise ratio in digital holographic microscopy,” Appl. Opt. 45, 7667–7673 (2006).
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K. Creath, “Step height measurement using two-wavelength phase-shifting interferometry,” Appl. Opt. 26, 2810–2816 (1987).
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Appl. Phys. Lett. (1)

C. Liu, Z. Liu, F. Bo, Y. Wang, and J. Zhu, “Super-resolution digital holographic imaging method,” Appl. Phys. Lett. 81, 3143–3145 (2002).
[CrossRef]

Central Eur. J. Phys. (1)

S. Vertu, J. Flügge, J.-J. Delaunay, and O. Haeberlé, “Improved and isotropic resolution in tomographic diffractive microscopy combining sample and illumination rotation,” Central Eur. J. Phys. 9, 969–974 (2011).
[CrossRef]

Chin. Opt. Lett. (2)

Eur. Phys. J. Appl. Phys. (1)

B. Simon, M. Debailleul, V. Georges, V. Lauer, and O. Haeberlé, “Tomographic diffractive microscopy of transparent samples,” Eur. Phys. J. Appl. Phys. 44, 29–35 (2008).
[CrossRef]

J. Biophotonics (1)

B. Simon, M. Debailleul, A. Beghin, Y. Tourneur, and O. Haeberlé, “High resolution tomographic diffractive microscopy of biological samples,” J. Biophotonics 3, 462–467 (2010).
[CrossRef]

J. Microsc. (1)

V. Lauer, “New approach to optical diffraction tomography yielding a vector equation of diffraction tomography and a novel tomographic microscope,” J. Microsc. 205, 165–176 (2002).
[CrossRef]

J. Mod. Opt. (1)

M. Sarmis, B. Simon, M. Debailleul, B. Colicchio, V. Georges, J.-J. Delaunay, and O. Haeberlé, “High resolution reflection tomographic diffractive microscopy,” J. Mod. Opt. 57, 740–745 (2010).
[CrossRef]

J. Opt. Soc. Am. (1)

W. Qu, C. Choo, V. Singh, Y. Yingjie, and A. Asundi, “Quasi-physical phase compensation in digital holographic microscopy,” J. Opt. Soc. Am. 26, 2005–2011 (2009).
[CrossRef]

J. Opt. Soc. Am. A (3)

Meas. Sci. Technol. (2)

M. Debailleul, B. Simon, V. Georges, O. Haeberlé, and V. Lauer, “Holographic microscopy and diffractive microtomography of transparent samples,” Meas. Sci. Technol. 19, 074009 (2008).
[CrossRef]

J. Kühn, F. Charrière, T. Colomb, E. Cuche, F. Montfort, Y. Emery, P. Marquet, and C. Depeursinge, “Axial sub-nanometer accuracy in digital holographic microscopy,” Meas. Sci. Technol. 19, 074007 (2008).
[CrossRef]

Nat. Photonics (1)

Y. Cotte, F. Toy, P. Jourdain, N. Pavillon, D. Boss, P. Magistretti, P. Marquet, and C. Depeursinge, “Marker-free phase nanoscopy,” Nat. Photonics 7, 113–117 (2013).
[CrossRef]

Opt. Commun. (1)

J. Bühl, H. Babovsky, A. Kiessling, and R. Kowarschik, “Digital synthesis of multiple off-axis holograms with overlapping Fourier spectra,” Opt. Commun. 283, 3631–3638 (2010).
[CrossRef]

Opt. Express (6)

Opt. Lett. (6)

Phys. Rev. Lett. (2)

S. A. Alexandrov, T. R. Hillman, T. Gutzler, and D. D. Sampson, “Synthetic aperture Fourier holographic optical microscopy,” Phys. Rev. Lett. 97, 168102 (2006).
[CrossRef]

G. Maire, F. Drsek, J. Girard, H. Giovannini, A. Talneau, D. Konan, K. Belkebir, P. C. Chaumet, and A. Sentenac, “Experimental demonstration of quantitative imaging beyond Abbe’s limit with optical diffraction tomography,” Phys. Rev. Lett. 102, 213905 (2009).
[CrossRef]

Other (7)

“White paper blu-ray disctm format 3rd edition, 2012,” http://blu-raydisc.com/ .

“Refractive index database 2013” http://refractiveindex.info .

D. Malacara, Optical Shop Testing (Wiley, 2007) Vol. 59.

G. Parry and J. Dainty, “Laser speckle and related phenomena,” in Topics in Applied Physics Series (Springer, 1984), Vol. 9.

J. Goodman, Introduction to Fourier Optics (McGraw-Hill, 2008).

Y. Sung, W. Choi, C. Fang-Yen, K. Badizadegan, R. R. Dasari, and M. S. Feld, “Optical diffraction tomography for high resolution live cell imaging,” in Novel Techniques in Microscopy (Optical Society of America, 2009).

H. Liu, J. Bailleul, B. Simon, M. Debailleul, P. Henry, M.-J. Pac, and O. Haeberé, “Tomographic diffractive microscopy and multiview profilometry,” in Focus on Microcopy (Maastricht UMC+, 2013), p. 155, http://www.focusonmicroscopy.org/2013/index.html .

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Figures (10)

Fig. 1.
Fig. 1.

2D synthesis process for amplitude imaging. H, hologram; E, complex optical field; S, spectrum in original support Γ. S^, normalized spectrum in synthesized support Γ. M, redundancy map used to average the merged data; i, index of the illumination angle.

Fig. 2.
Fig. 2.

Spectrum modulus of a CD reconstructed with (a) one illumination (Γ support). (b) Eight illuminations with bandpass enlargement and (c) 100 illuminations with noise averaging (Γ support).

Fig. 3.
Fig. 3.

Experimental setup in reflection mode. BS, beam splitter; EOM, electro-optic modulator; OF, optical fiber; M1, M2, mirror; FD, field diaphragm.

Fig. 4.
Fig. 4.

Notations and coordinate system. In this work, the angular scanning is performed at a fixed polar angle so that kiz remains constant.

Fig. 5.
Fig. 5.

Process for automatic aberration removal.

Fig. 6.
Fig. 6.

Imaging of a CD surface. (a) Original image, (b) binary object mask, (c) computed correction map, and (d) final corrected phase image.

Fig. 7.
Fig. 7.

Evolution of the speckle contrast with the number of illuminations in TDM.

Fig. 8.
Fig. 8.

VLSI test pattern of 100 nm height imaged with circular scanning (|kiz|=constant, θ=40°).

Fig. 9.
Fig. 9.

Measurements of the VLSI target step height. Blue-dashed curve: the unwrapping process failed and the height measurement is underestimated. Red curve: correct value estimated by double measurement.

Fig. 10.
Fig. 10.

(a) 2D amplitude imaging of a Blu-ray disc observed with tomographic diffractive microscopy, (b) enlarged view of (a), and (c) AFM topographic image of the same disc at same scale as (b).

Equations (5)

Equations on this page are rendered with MathJax. Learn more.

h(x,y)=λ4π(ϕ(x,y)+ϕr(k)),
kix=|k⃗i|cosφsinθ,
kiy=|k⃗i|sinφsinθ,
kiz=(ki2kix2kiy2)0.5=|k⃗i|cosθ,
h(x,y)=λ4πcosθϕ(x,y),

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