Abstract

This paper describes a polarized-light imaging interferometer to measure the rotation field of reflecting surfaces. This setup is based on a homemade prism featuring a birefringence gradient. The arrangement is presented before focusing on the homemade prism and its manufacturing process. The dependence of the measured optical phase on the rotation of the surface is derived, thus highlighting the key parameters driving the sensitivity. The system’s capabilities are illustrated by imaging the rotation field at the surface of a tip-loaded polymer specimen.

© 2013 Optical Society of America

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    [CrossRef]
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    [CrossRef]
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    [CrossRef]
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  5. P. Vairac and B. Cretin, “Electromechanical resonator in scanning microdeformation microscopy: theory and experiment,” Surf. Interface Anal. 27, 588–591 (1999).
    [CrossRef]
  6. P. Vairac, S. Ballandras, and B. Cretin, “Finite element analysis of the behavior of the scanning microdeformation microscope,” IEEE Trans. Ultrason. Ferroelectr. Freq. Control 48, 895–899 (2001).
    [CrossRef]
  7. J. Le Rouzic, P. Delobelle, P. Vairac, and B. Cretin, “Comparison of three different scales techniques for the dynamic mechanical characterization of two polymers (PDMS and SU8),” Eur. Phys. J. Appl. Phys. 48, 11201 (2009).
    [CrossRef]
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    [CrossRef]
  9. R. Feng and R. J. Farris, “The characterization of thermal and elastic constants for an epoxy photoresist SU8 coating,” J. Mater. Sci. 37, 033509 (2002).
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    [CrossRef]
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    [CrossRef]
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    [CrossRef]
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    [CrossRef]
  20. W. Gao, P. S. Huang, T. Yamada, and S. Kiyono, “A compact and sensitive two-dimensional angle probe for flatness measurement of large silicon wafers,” Precis. Eng. 26, 396–404 (2002).
    [CrossRef]
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    [CrossRef]
  22. Y. Surrel, N. Fournier, M. Grédiac, and P.-A. Paris, “Phase-stepped deflectometry applied to shape measurement of bent plates,” Exp. Mech. 39, 66–70 (1999).
    [CrossRef]
  23. J.-R. Lee, J. Molimard, A. Vautrin, and Y. Surrel, “Digital phase-shifting grating shearography for experimental analysis of fabric composites under tension,” Compos. Part A Appl. Sci. Manufact. 35, 849–859 (2004).
    [CrossRef]
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    [CrossRef]

2012 (2)

J. Le Rouzic, P. Delobelle, B. Cretin, P. Vairac, and F. Amiot, “Simultaneous measurement of Young’s modulus and Poisson’s ratio at microscale with two-modes scanning microdeformation microscopy,” Mater. Lett. 68, 370–373 (2012).
[CrossRef]

M. Xiao, S. Jujo, S. Takahashi, and K. Takamasu, “Nanometer profile measurement of large aspheric optical surface by scanning deflectometry with rotatable devices—Uncertainty propagation analysis and experiments,” Precis. Eng. 36, 91–96 (2012).
[CrossRef]

2011 (1)

A. Boisen, S. Dohn, S. S. Keller, S. Schmid, and M. Tenje, “Cantilever-like micromechanical sensors,” Rep. Prog. Phys. 74, 036101 (2011).
[CrossRef]

2009 (1)

J. Le Rouzic, P. Delobelle, P. Vairac, and B. Cretin, “Comparison of three different scales techniques for the dynamic mechanical characterization of two polymers (PDMS and SU8),” Eur. Phys. J. Appl. Phys. 48, 11201 (2009).
[CrossRef]

2007 (1)

D. C. Hurley and J. A. Turner, “Measurement of Poisson’s ratio with contact-resonance atomic force microscopy,” J. Appl. Phys. 102, 033509 (2007).
[CrossRef]

2006 (1)

2004 (1)

J.-R. Lee, J. Molimard, A. Vautrin, and Y. Surrel, “Digital phase-shifting grating shearography for experimental analysis of fabric composites under tension,” Compos. Part A Appl. Sci. Manufact. 35, 849–859 (2004).
[CrossRef]

2002 (2)

R. Feng and R. J. Farris, “The characterization of thermal and elastic constants for an epoxy photoresist SU8 coating,” J. Mater. Sci. 37, 033509 (2002).

W. Gao, P. S. Huang, T. Yamada, and S. Kiyono, “A compact and sensitive two-dimensional angle probe for flatness measurement of large silicon wafers,” Precis. Eng. 26, 396–404 (2002).
[CrossRef]

2001 (3)

C. J. Tay, C. Quan, S. H. Wang, and H. M. Shang, “Determination of a micromirror angular rotation using laser interferometric method,” Opt. Commun. 195, 71–77 (2001).
[CrossRef]

M. J. Bamber, K. E. Cooke, A. B. Mann, and B. Derby, “Accurate determination of Young’s modulus and Poisson’s ratio of thin films by a combination of acoustic microscopy and nanoindentation,” Thin Solid Films 398–399, 299–305 (2001).
[CrossRef]

P. Vairac, S. Ballandras, and B. Cretin, “Finite element analysis of the behavior of the scanning microdeformation microscope,” IEEE Trans. Ultrason. Ferroelectr. Freq. Control 48, 895–899 (2001).
[CrossRef]

2000 (2)

U. Rabe, S. Amelio, E. Kester, V. Scherer, S. Hirsekorn, and W. Arnold, “Quantitative determination of contact stiffness using atomic force acoustic microscopy,” Ultrasonics 38, 430–437 (2000).
[CrossRef]

A. Dubois, J. Selb, L. Vabre, and A. C. Boccara, “Phase measurements with wide-aperture interferometers,” Appl. Opt. 39, 2326–2331 (2000).
[CrossRef]

1999 (2)

P. Vairac and B. Cretin, “Electromechanical resonator in scanning microdeformation microscopy: theory and experiment,” Surf. Interface Anal. 27, 588–591 (1999).
[CrossRef]

Y. Surrel, N. Fournier, M. Grédiac, and P.-A. Paris, “Phase-stepped deflectometry applied to shape measurement of bent plates,” Exp. Mech. 39, 66–70 (1999).
[CrossRef]

1998 (1)

B. Cretin and P. Vairac, “Measurement of cantilever vibrations with a new heterodyne laser probe—application to scanning microdeformation microscopy,” Appl. Phys. A. 66, S235–S238 (1998).

1993 (1)

B. Cretin and F. Sthal, “Scanning microdeformation microscopy,” Appl. Phys. Lett. 62, 829–831 (1993).
[CrossRef]

1992 (1)

W. C. Oliver and G. M. Pharr, “An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments,” J. Mater. Res. 7, 1564–1583 (1992).
[CrossRef]

1988 (1)

1974 (1)

1970 (1)

Amelio, S.

U. Rabe, S. Amelio, E. Kester, V. Scherer, S. Hirsekorn, and W. Arnold, “Quantitative determination of contact stiffness using atomic force acoustic microscopy,” Ultrasonics 38, 430–437 (2000).
[CrossRef]

Amiot, F.

J. Le Rouzic, P. Delobelle, B. Cretin, P. Vairac, and F. Amiot, “Simultaneous measurement of Young’s modulus and Poisson’s ratio at microscale with two-modes scanning microdeformation microscopy,” Mater. Lett. 68, 370–373 (2012).
[CrossRef]

F. Amiot and J. P. Roger, “Nomarski imaging interferometry to measure the displacement field of micro-electro-mechanical systems,” Appl. Opt. 45, 7800–7810 (2006).
[CrossRef]

Arnold, W.

U. Rabe, S. Amelio, E. Kester, V. Scherer, S. Hirsekorn, and W. Arnold, “Quantitative determination of contact stiffness using atomic force acoustic microscopy,” Ultrasonics 38, 430–437 (2000).
[CrossRef]

Ballandras, S.

P. Vairac, S. Ballandras, and B. Cretin, “Finite element analysis of the behavior of the scanning microdeformation microscope,” IEEE Trans. Ultrason. Ferroelectr. Freq. Control 48, 895–899 (2001).
[CrossRef]

Bamber, M. J.

M. J. Bamber, K. E. Cooke, A. B. Mann, and B. Derby, “Accurate determination of Young’s modulus and Poisson’s ratio of thin films by a combination of acoustic microscopy and nanoindentation,” Thin Solid Films 398–399, 299–305 (2001).
[CrossRef]

Bhatia, A. B.

M. Born, E. Wolf, and A. B. Bhatia, “Geometrical theory of optical imaging,” in Principles of Optics: Electromagnetic Theory of Propagation, Interference and Diffraction of Light (Cambridge University, 1959), pp. 133–202.

Boccara, A. C.

Boisen, A.

A. Boisen, S. Dohn, S. S. Keller, S. Schmid, and M. Tenje, “Cantilever-like micromechanical sensors,” Rep. Prog. Phys. 74, 036101 (2011).
[CrossRef]

Born, M.

M. Born, E. Wolf, and A. B. Bhatia, “Geometrical theory of optical imaging,” in Principles of Optics: Electromagnetic Theory of Propagation, Interference and Diffraction of Light (Cambridge University, 1959), pp. 133–202.

Boussinesq, M. J.

M. J. Boussinesq, “Valeurs des déplacements, des déformations et de pressions intérieures, quand les potentiels se réduisent à un seul de leurs éléments,” in Application des potentiels à l’étude de l’équilibre et du mouvement des solides élastiques (Gauthier-Villars, 1885), pp. 81–108 (in French).

Chapman, G. D.

Cooke, K. E.

M. J. Bamber, K. E. Cooke, A. B. Mann, and B. Derby, “Accurate determination of Young’s modulus and Poisson’s ratio of thin films by a combination of acoustic microscopy and nanoindentation,” Thin Solid Films 398–399, 299–305 (2001).
[CrossRef]

Cretin, B.

J. Le Rouzic, P. Delobelle, B. Cretin, P. Vairac, and F. Amiot, “Simultaneous measurement of Young’s modulus and Poisson’s ratio at microscale with two-modes scanning microdeformation microscopy,” Mater. Lett. 68, 370–373 (2012).
[CrossRef]

J. Le Rouzic, P. Delobelle, P. Vairac, and B. Cretin, “Comparison of three different scales techniques for the dynamic mechanical characterization of two polymers (PDMS and SU8),” Eur. Phys. J. Appl. Phys. 48, 11201 (2009).
[CrossRef]

P. Vairac, S. Ballandras, and B. Cretin, “Finite element analysis of the behavior of the scanning microdeformation microscope,” IEEE Trans. Ultrason. Ferroelectr. Freq. Control 48, 895–899 (2001).
[CrossRef]

P. Vairac and B. Cretin, “Electromechanical resonator in scanning microdeformation microscopy: theory and experiment,” Surf. Interface Anal. 27, 588–591 (1999).
[CrossRef]

B. Cretin and P. Vairac, “Measurement of cantilever vibrations with a new heterodyne laser probe—application to scanning microdeformation microscopy,” Appl. Phys. A. 66, S235–S238 (1998).

B. Cretin and F. Sthal, “Scanning microdeformation microscopy,” Appl. Phys. Lett. 62, 829–831 (1993).
[CrossRef]

Delobelle, P.

J. Le Rouzic, P. Delobelle, B. Cretin, P. Vairac, and F. Amiot, “Simultaneous measurement of Young’s modulus and Poisson’s ratio at microscale with two-modes scanning microdeformation microscopy,” Mater. Lett. 68, 370–373 (2012).
[CrossRef]

J. Le Rouzic, P. Delobelle, P. Vairac, and B. Cretin, “Comparison of three different scales techniques for the dynamic mechanical characterization of two polymers (PDMS and SU8),” Eur. Phys. J. Appl. Phys. 48, 11201 (2009).
[CrossRef]

Derby, B.

M. J. Bamber, K. E. Cooke, A. B. Mann, and B. Derby, “Accurate determination of Young’s modulus and Poisson’s ratio of thin films by a combination of acoustic microscopy and nanoindentation,” Thin Solid Films 398–399, 299–305 (2001).
[CrossRef]

Dohn, S.

A. Boisen, S. Dohn, S. S. Keller, S. Schmid, and M. Tenje, “Cantilever-like micromechanical sensors,” Rep. Prog. Phys. 74, 036101 (2011).
[CrossRef]

Dubois, A.

Farris, R. J.

R. Feng and R. J. Farris, “The characterization of thermal and elastic constants for an epoxy photoresist SU8 coating,” J. Mater. Sci. 37, 033509 (2002).

Feng, R.

R. Feng and R. J. Farris, “The characterization of thermal and elastic constants for an epoxy photoresist SU8 coating,” J. Mater. Sci. 37, 033509 (2002).

Fournier, N.

Y. Surrel, N. Fournier, M. Grédiac, and P.-A. Paris, “Phase-stepped deflectometry applied to shape measurement of bent plates,” Exp. Mech. 39, 66–70 (1999).
[CrossRef]

Françon, M.

M. Françon and S. Mallick, “Compensated polarization interferometers for the observation of phase objects,” in Polarization Interferometers: Applications in Microscopy and Macroscopy (Wiley-Interscience, 1971), pp. 55–67.

Gao, W.

W. Gao, P. S. Huang, T. Yamada, and S. Kiyono, “A compact and sensitive two-dimensional angle probe for flatness measurement of large silicon wafers,” Precis. Eng. 26, 396–404 (2002).
[CrossRef]

Grédiac, M.

Y. Surrel, N. Fournier, M. Grédiac, and P.-A. Paris, “Phase-stepped deflectometry applied to shape measurement of bent plates,” Exp. Mech. 39, 66–70 (1999).
[CrossRef]

Harris, O.

Hirsekorn, S.

U. Rabe, S. Amelio, E. Kester, V. Scherer, S. Hirsekorn, and W. Arnold, “Quantitative determination of contact stiffness using atomic force acoustic microscopy,” Ultrasonics 38, 430–437 (2000).
[CrossRef]

Huang, P. S.

W. Gao, P. S. Huang, T. Yamada, and S. Kiyono, “A compact and sensitive two-dimensional angle probe for flatness measurement of large silicon wafers,” Precis. Eng. 26, 396–404 (2002).
[CrossRef]

Hurley, D. C.

D. C. Hurley and J. A. Turner, “Measurement of Poisson’s ratio with contact-resonance atomic force microscopy,” J. Appl. Phys. 102, 033509 (2007).
[CrossRef]

Jujo, S.

M. Xiao, S. Jujo, S. Takahashi, and K. Takamasu, “Nanometer profile measurement of large aspheric optical surface by scanning deflectometry with rotatable devices—Uncertainty propagation analysis and experiments,” Precis. Eng. 36, 91–96 (2012).
[CrossRef]

Keller, S. S.

A. Boisen, S. Dohn, S. S. Keller, S. Schmid, and M. Tenje, “Cantilever-like micromechanical sensors,” Rep. Prog. Phys. 74, 036101 (2011).
[CrossRef]

Kester, E.

U. Rabe, S. Amelio, E. Kester, V. Scherer, S. Hirsekorn, and W. Arnold, “Quantitative determination of contact stiffness using atomic force acoustic microscopy,” Ultrasonics 38, 430–437 (2000).
[CrossRef]

Kiyono, S.

W. Gao, P. S. Huang, T. Yamada, and S. Kiyono, “A compact and sensitive two-dimensional angle probe for flatness measurement of large silicon wafers,” Precis. Eng. 26, 396–404 (2002).
[CrossRef]

Le Rouzic, J.

J. Le Rouzic, P. Delobelle, B. Cretin, P. Vairac, and F. Amiot, “Simultaneous measurement of Young’s modulus and Poisson’s ratio at microscale with two-modes scanning microdeformation microscopy,” Mater. Lett. 68, 370–373 (2012).
[CrossRef]

J. Le Rouzic, P. Delobelle, P. Vairac, and B. Cretin, “Comparison of three different scales techniques for the dynamic mechanical characterization of two polymers (PDMS and SU8),” Eur. Phys. J. Appl. Phys. 48, 11201 (2009).
[CrossRef]

Lee, J.-R.

J.-R. Lee, J. Molimard, A. Vautrin, and Y. Surrel, “Digital phase-shifting grating shearography for experimental analysis of fabric composites under tension,” Compos. Part A Appl. Sci. Manufact. 35, 849–859 (2004).
[CrossRef]

Malacara, D.

Mallick, S.

M. Françon and S. Mallick, “Compensated polarization interferometers for the observation of phase objects,” in Polarization Interferometers: Applications in Microscopy and Macroscopy (Wiley-Interscience, 1971), pp. 55–67.

Mann, A. B.

M. J. Bamber, K. E. Cooke, A. B. Mann, and B. Derby, “Accurate determination of Young’s modulus and Poisson’s ratio of thin films by a combination of acoustic microscopy and nanoindentation,” Thin Solid Films 398–399, 299–305 (2001).
[CrossRef]

Molimard, J.

J.-R. Lee, J. Molimard, A. Vautrin, and Y. Surrel, “Digital phase-shifting grating shearography for experimental analysis of fabric composites under tension,” Compos. Part A Appl. Sci. Manufact. 35, 849–859 (2004).
[CrossRef]

Oliver, W. C.

W. C. Oliver and G. M. Pharr, “An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments,” J. Mater. Res. 7, 1564–1583 (1992).
[CrossRef]

Paris, P.-A.

Y. Surrel, N. Fournier, M. Grédiac, and P.-A. Paris, “Phase-stepped deflectometry applied to shape measurement of bent plates,” Exp. Mech. 39, 66–70 (1999).
[CrossRef]

Pharr, G. M.

W. C. Oliver and G. M. Pharr, “An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments,” J. Mater. Res. 7, 1564–1583 (1992).
[CrossRef]

Quan, C.

C. J. Tay, C. Quan, S. H. Wang, and H. M. Shang, “Determination of a micromirror angular rotation using laser interferometric method,” Opt. Commun. 195, 71–77 (2001).
[CrossRef]

Rabe, U.

U. Rabe, S. Amelio, E. Kester, V. Scherer, S. Hirsekorn, and W. Arnold, “Quantitative determination of contact stiffness using atomic force acoustic microscopy,” Ultrasonics 38, 430–437 (2000).
[CrossRef]

Roger, J. P.

Scherer, V.

U. Rabe, S. Amelio, E. Kester, V. Scherer, S. Hirsekorn, and W. Arnold, “Quantitative determination of contact stiffness using atomic force acoustic microscopy,” Ultrasonics 38, 430–437 (2000).
[CrossRef]

Schmid, S.

A. Boisen, S. Dohn, S. S. Keller, S. Schmid, and M. Tenje, “Cantilever-like micromechanical sensors,” Rep. Prog. Phys. 74, 036101 (2011).
[CrossRef]

Selb, J.

Shang, H. M.

C. J. Tay, C. Quan, S. H. Wang, and H. M. Shang, “Determination of a micromirror angular rotation using laser interferometric method,” Opt. Commun. 195, 71–77 (2001).
[CrossRef]

Shi, P.

Sthal, F.

B. Cretin and F. Sthal, “Scanning microdeformation microscopy,” Appl. Phys. Lett. 62, 829–831 (1993).
[CrossRef]

Stijns, E.

Surrel, Y.

J.-R. Lee, J. Molimard, A. Vautrin, and Y. Surrel, “Digital phase-shifting grating shearography for experimental analysis of fabric composites under tension,” Compos. Part A Appl. Sci. Manufact. 35, 849–859 (2004).
[CrossRef]

Y. Surrel, N. Fournier, M. Grédiac, and P.-A. Paris, “Phase-stepped deflectometry applied to shape measurement of bent plates,” Exp. Mech. 39, 66–70 (1999).
[CrossRef]

Takahashi, S.

M. Xiao, S. Jujo, S. Takahashi, and K. Takamasu, “Nanometer profile measurement of large aspheric optical surface by scanning deflectometry with rotatable devices—Uncertainty propagation analysis and experiments,” Precis. Eng. 36, 91–96 (2012).
[CrossRef]

Takamasu, K.

M. Xiao, S. Jujo, S. Takahashi, and K. Takamasu, “Nanometer profile measurement of large aspheric optical surface by scanning deflectometry with rotatable devices—Uncertainty propagation analysis and experiments,” Precis. Eng. 36, 91–96 (2012).
[CrossRef]

Tay, C. J.

C. J. Tay, C. Quan, S. H. Wang, and H. M. Shang, “Determination of a micromirror angular rotation using laser interferometric method,” Opt. Commun. 195, 71–77 (2001).
[CrossRef]

Tenje, M.

A. Boisen, S. Dohn, S. S. Keller, S. Schmid, and M. Tenje, “Cantilever-like micromechanical sensors,” Rep. Prog. Phys. 74, 036101 (2011).
[CrossRef]

Turner, J. A.

D. C. Hurley and J. A. Turner, “Measurement of Poisson’s ratio with contact-resonance atomic force microscopy,” J. Appl. Phys. 102, 033509 (2007).
[CrossRef]

Vabre, L.

Vairac, P.

J. Le Rouzic, P. Delobelle, B. Cretin, P. Vairac, and F. Amiot, “Simultaneous measurement of Young’s modulus and Poisson’s ratio at microscale with two-modes scanning microdeformation microscopy,” Mater. Lett. 68, 370–373 (2012).
[CrossRef]

J. Le Rouzic, P. Delobelle, P. Vairac, and B. Cretin, “Comparison of three different scales techniques for the dynamic mechanical characterization of two polymers (PDMS and SU8),” Eur. Phys. J. Appl. Phys. 48, 11201 (2009).
[CrossRef]

P. Vairac, S. Ballandras, and B. Cretin, “Finite element analysis of the behavior of the scanning microdeformation microscope,” IEEE Trans. Ultrason. Ferroelectr. Freq. Control 48, 895–899 (2001).
[CrossRef]

P. Vairac and B. Cretin, “Electromechanical resonator in scanning microdeformation microscopy: theory and experiment,” Surf. Interface Anal. 27, 588–591 (1999).
[CrossRef]

B. Cretin and P. Vairac, “Measurement of cantilever vibrations with a new heterodyne laser probe—application to scanning microdeformation microscopy,” Appl. Phys. A. 66, S235–S238 (1998).

Vautrin, A.

J.-R. Lee, J. Molimard, A. Vautrin, and Y. Surrel, “Digital phase-shifting grating shearography for experimental analysis of fabric composites under tension,” Compos. Part A Appl. Sci. Manufact. 35, 849–859 (2004).
[CrossRef]

Wang, S. H.

C. J. Tay, C. Quan, S. H. Wang, and H. M. Shang, “Determination of a micromirror angular rotation using laser interferometric method,” Opt. Commun. 195, 71–77 (2001).
[CrossRef]

Wolf, E.

M. Born, E. Wolf, and A. B. Bhatia, “Geometrical theory of optical imaging,” in Principles of Optics: Electromagnetic Theory of Propagation, Interference and Diffraction of Light (Cambridge University, 1959), pp. 133–202.

Xiao, M.

M. Xiao, S. Jujo, S. Takahashi, and K. Takamasu, “Nanometer profile measurement of large aspheric optical surface by scanning deflectometry with rotatable devices—Uncertainty propagation analysis and experiments,” Precis. Eng. 36, 91–96 (2012).
[CrossRef]

Yamada, T.

W. Gao, P. S. Huang, T. Yamada, and S. Kiyono, “A compact and sensitive two-dimensional angle probe for flatness measurement of large silicon wafers,” Precis. Eng. 26, 396–404 (2002).
[CrossRef]

Appl. Opt. (5)

Appl. Phys. A. (1)

B. Cretin and P. Vairac, “Measurement of cantilever vibrations with a new heterodyne laser probe—application to scanning microdeformation microscopy,” Appl. Phys. A. 66, S235–S238 (1998).

Appl. Phys. Lett. (1)

B. Cretin and F. Sthal, “Scanning microdeformation microscopy,” Appl. Phys. Lett. 62, 829–831 (1993).
[CrossRef]

Compos. Part A Appl. Sci. Manufact. (1)

J.-R. Lee, J. Molimard, A. Vautrin, and Y. Surrel, “Digital phase-shifting grating shearography for experimental analysis of fabric composites under tension,” Compos. Part A Appl. Sci. Manufact. 35, 849–859 (2004).
[CrossRef]

Eur. Phys. J. Appl. Phys. (1)

J. Le Rouzic, P. Delobelle, P. Vairac, and B. Cretin, “Comparison of three different scales techniques for the dynamic mechanical characterization of two polymers (PDMS and SU8),” Eur. Phys. J. Appl. Phys. 48, 11201 (2009).
[CrossRef]

Exp. Mech. (1)

Y. Surrel, N. Fournier, M. Grédiac, and P.-A. Paris, “Phase-stepped deflectometry applied to shape measurement of bent plates,” Exp. Mech. 39, 66–70 (1999).
[CrossRef]

IEEE Trans. Ultrason. Ferroelectr. Freq. Control (1)

P. Vairac, S. Ballandras, and B. Cretin, “Finite element analysis of the behavior of the scanning microdeformation microscope,” IEEE Trans. Ultrason. Ferroelectr. Freq. Control 48, 895–899 (2001).
[CrossRef]

J. Appl. Phys. (1)

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