The application of a single cube beam splitter (SCBS) microscope to micro-optics characterization is presented. The SCBS in the optical path, with a small angle between the optical axis and its central semireflecting layer, not only gives off-axis digital holograms but also provides dual-channel imaging. It is a unique and easy way to perform uniformity inspection across the entire microlens array. Experimental results on physical spherical phase compensation, single lens characterization, dual-channel imaging, and uniformity inspection are provided to demonstrate the unique properties of SCBS microscopy.
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