Abstract
This work discusses the experimental determination of the optical constants (refractive index) of DC-magnetron-sputtered boron carbide films in the photon energy range. Transmittance measurements of three boron carbide films with thicknesses of 54.2, 79.0, and were performed for this purpose. These are believed to be the first published experimental data for the refractive index of boron carbide films in the photon energy range above and for the near-edge x-ray absorption fine structure regions around the boron K (), carbon K (), and oxygen K () absorption edges. The density, composition, surface chemistry, and morphology of the films were also investigated using Rutherford backscattering, x-ray photoelectron spectroscopy, atomic force microscopy, scanning electron microscopy, and extreme ultraviolet reflectance measurements.
© 2008 Optical Society of America
Full Article | PDF ArticleMore Like This
S. Massahi, F. E. Christensen, D. D. M. Ferreira, S. Svendsen, P. L. Henriksen, L. M. Vu, N. C. Gellert, A. S. Jegers, B. Shortt, M. Bavdaz, I. Ferreira, M. Collon, B. Landgraf, D. Girou, A. Sokolov, and W. Schoenberger
Appl. Opt. 59(34) 10902-10911 (2020)
Dmitriy Ksenzov, Tobias Panzner, Christoph Schlemper, Christian Morawe, and Ullrich Pietsch
Appl. Opt. 48(35) 6684-6691 (2009)
Mónica Fernández-Perea, Juan I. Larruquert, José A. Aznárez, José A. Méndez, Manuela Vidal-Dasilva, Eric Gullikson, Andy Aquila, Regina Soufli, and J. L. G. Fierro
J. Opt. Soc. Am. A 24(12) 3800-3807 (2007)