W. G. Knauss, I. Chasiotis, and Y. Huang, "Mechanical measurements at the micron and nanometer scales," Mech. Mater. 35, 217-231 (2003).

[CrossRef]

J. Moreland, "Micromechanical instruments for ferromagnetic measurements," J. Phys. D 36, R39-R51 (2003).

[CrossRef]

K. Yum, Z. Y. Wang, P. A. Suryavanshi, and M. F. Yu, "Experimental validation of theoretical models for the frequency response of atomic force microscope cantilever beams immersed in fluids," J. Appl. Phys. 96, 3933-3938 (2003).

[CrossRef]

C. Rembe and R. S. Muller, "Measurement system for full three-dimensional motion characterization of MEMS," J. Microelectromech. Syst. 11, 479-488 (2002).

[CrossRef]

S. H. Wang, C. J. Tay, C. Quan, and H. M. Shang, "Determination of deflection and Young's modulus of a micro-beam by means of interferometry," Meas. Sci. Technol. 12, 1279-1285 (2001).

[CrossRef]

C. Rembe and E. P. Tibken Bm Hofer, "Analysis of the dynamics in microactuators using high-speed cine photomicrography," J. Microelectromech. Syst. 10, 137-145 (2001).

[CrossRef]

J. H. Zhao, Y. Du, M. Morgen, and P. S. Ho, "Simultaneous measurement of Young's modulus, Poisson ratio, and coefficient of thermal expansion of thin films on substrates," J. Appl. Phys. 87, 1575-1577 (2000).

[CrossRef]

M. Qin and V. M. C. Poon, "Young's modulus measurement of nickel silicide on crystal silicon by a surface profiler," J. Mater. Sci. Lett. 19, 2243-2245 (2000).

[CrossRef]

B. T. Comella and M. R. Scanlon, "The determination of the elastic modulus of microcantilever beam using atomic force microscopy," J. Mater. Sci. 35, 567-572 (2000).

[CrossRef]

M. R. Hart, R. A. Conant, K. Y. Lau, and R. S. Muller, "Stroboscopic interferometer system for dynamic MEMS characterization," J. Microelectromech. Syst. 9, 409-418 (2000).

[CrossRef]

J. W. Chon, P. Mulvaney, and J. E. Sader, "Experimental validation of theoretical models for the frequency response of atomic force microscope cantilever beams immersed in fluids," J. Appl. Phys. 87, 3978-3988 (2000).

[CrossRef]

T. Yi and C. J. Kim, "Measurement of mechanical properties for MEMS materials," Meas. Sci. Technol. 10, 706-716 (1999).

[CrossRef]

N. A. Fawcett, "A novel method for the measurement of Young's modulus for thick-film resistor material by flexural testing of coated beams," Meas. Sci. Technol. 9, 2023-2026 (1998).

[CrossRef]

H. Benaroya, Mechanical Vibration: Analysis, Uncertainties, and Control (Prentice-Hall, 1998).

S. Nakano, R. Maeda, and K. Yamanaka, "Evaluation of the elastic properties of a cantilever using resonant frequencies," Jpn. J. Appl. Phys. 36, 3265-3266 (1997).

[CrossRef]

M. A. Sutton, M. Cheng, W. H. Peters, Y. J. Chao, and S. R. McNeill "Application of an optimized digital correlation method to planar deformation analysis," Image Vision Comput. 4, 143-150 (1986).

[CrossRef]

W. H. Peters, H. Zheng-Hui, M. A. Sutton, and W. F. Ranson, "Two-dimensional fluid velocity measurements by use of digital speckle correlation techniques," Exp. Mech. 24, 117-121 (1984).

[CrossRef]

H. Benaroya, Mechanical Vibration: Analysis, Uncertainties, and Control (Prentice-Hall, 1998).

M. A. Sutton, M. Cheng, W. H. Peters, Y. J. Chao, and S. R. McNeill "Application of an optimized digital correlation method to planar deformation analysis," Image Vision Comput. 4, 143-150 (1986).

[CrossRef]

W. G. Knauss, I. Chasiotis, and Y. Huang, "Mechanical measurements at the micron and nanometer scales," Mech. Mater. 35, 217-231 (2003).

[CrossRef]

M. A. Sutton, M. Cheng, W. H. Peters, Y. J. Chao, and S. R. McNeill "Application of an optimized digital correlation method to planar deformation analysis," Image Vision Comput. 4, 143-150 (1986).

[CrossRef]

J. W. Chon, P. Mulvaney, and J. E. Sader, "Experimental validation of theoretical models for the frequency response of atomic force microscope cantilever beams immersed in fluids," J. Appl. Phys. 87, 3978-3988 (2000).

[CrossRef]

B. T. Comella and M. R. Scanlon, "The determination of the elastic modulus of microcantilever beam using atomic force microscopy," J. Mater. Sci. 35, 567-572 (2000).

[CrossRef]

M. R. Hart, R. A. Conant, K. Y. Lau, and R. S. Muller, "Stroboscopic interferometer system for dynamic MEMS characterization," J. Microelectromech. Syst. 9, 409-418 (2000).

[CrossRef]

J. H. Zhao, Y. Du, M. Morgen, and P. S. Ho, "Simultaneous measurement of Young's modulus, Poisson ratio, and coefficient of thermal expansion of thin films on substrates," J. Appl. Phys. 87, 1575-1577 (2000).

[CrossRef]

N. A. Fawcett, "A novel method for the measurement of Young's modulus for thick-film resistor material by flexural testing of coated beams," Meas. Sci. Technol. 9, 2023-2026 (1998).

[CrossRef]

M. R. Hart, R. A. Conant, K. Y. Lau, and R. S. Muller, "Stroboscopic interferometer system for dynamic MEMS characterization," J. Microelectromech. Syst. 9, 409-418 (2000).

[CrossRef]

J. H. Zhao, Y. Du, M. Morgen, and P. S. Ho, "Simultaneous measurement of Young's modulus, Poisson ratio, and coefficient of thermal expansion of thin films on substrates," J. Appl. Phys. 87, 1575-1577 (2000).

[CrossRef]

W. G. Knauss, I. Chasiotis, and Y. Huang, "Mechanical measurements at the micron and nanometer scales," Mech. Mater. 35, 217-231 (2003).

[CrossRef]

T. Yi and C. J. Kim, "Measurement of mechanical properties for MEMS materials," Meas. Sci. Technol. 10, 706-716 (1999).

[CrossRef]

W. G. Knauss, I. Chasiotis, and Y. Huang, "Mechanical measurements at the micron and nanometer scales," Mech. Mater. 35, 217-231 (2003).

[CrossRef]

M. R. Hart, R. A. Conant, K. Y. Lau, and R. S. Muller, "Stroboscopic interferometer system for dynamic MEMS characterization," J. Microelectromech. Syst. 9, 409-418 (2000).

[CrossRef]

S. Nakano, R. Maeda, and K. Yamanaka, "Evaluation of the elastic properties of a cantilever using resonant frequencies," Jpn. J. Appl. Phys. 36, 3265-3266 (1997).

[CrossRef]

M. A. Sutton, M. Cheng, W. H. Peters, Y. J. Chao, and S. R. McNeill "Application of an optimized digital correlation method to planar deformation analysis," Image Vision Comput. 4, 143-150 (1986).

[CrossRef]

J. Moreland, "Micromechanical instruments for ferromagnetic measurements," J. Phys. D 36, R39-R51 (2003).

[CrossRef]

J. H. Zhao, Y. Du, M. Morgen, and P. S. Ho, "Simultaneous measurement of Young's modulus, Poisson ratio, and coefficient of thermal expansion of thin films on substrates," J. Appl. Phys. 87, 1575-1577 (2000).

[CrossRef]

C. Rembe and R. S. Muller, "Measurement system for full three-dimensional motion characterization of MEMS," J. Microelectromech. Syst. 11, 479-488 (2002).

[CrossRef]

M. R. Hart, R. A. Conant, K. Y. Lau, and R. S. Muller, "Stroboscopic interferometer system for dynamic MEMS characterization," J. Microelectromech. Syst. 9, 409-418 (2000).

[CrossRef]

J. W. Chon, P. Mulvaney, and J. E. Sader, "Experimental validation of theoretical models for the frequency response of atomic force microscope cantilever beams immersed in fluids," J. Appl. Phys. 87, 3978-3988 (2000).

[CrossRef]

S. Nakano, R. Maeda, and K. Yamanaka, "Evaluation of the elastic properties of a cantilever using resonant frequencies," Jpn. J. Appl. Phys. 36, 3265-3266 (1997).

[CrossRef]

M. A. Sutton, M. Cheng, W. H. Peters, Y. J. Chao, and S. R. McNeill "Application of an optimized digital correlation method to planar deformation analysis," Image Vision Comput. 4, 143-150 (1986).

[CrossRef]

W. H. Peters, H. Zheng-Hui, M. A. Sutton, and W. F. Ranson, "Two-dimensional fluid velocity measurements by use of digital speckle correlation techniques," Exp. Mech. 24, 117-121 (1984).

[CrossRef]

M. Qin and V. M. C. Poon, "Young's modulus measurement of nickel silicide on crystal silicon by a surface profiler," J. Mater. Sci. Lett. 19, 2243-2245 (2000).

[CrossRef]

M. Qin and V. M. C. Poon, "Young's modulus measurement of nickel silicide on crystal silicon by a surface profiler," J. Mater. Sci. Lett. 19, 2243-2245 (2000).

[CrossRef]

S. H. Wang, C. J. Tay, C. Quan, and H. M. Shang, "Determination of deflection and Young's modulus of a micro-beam by means of interferometry," Meas. Sci. Technol. 12, 1279-1285 (2001).

[CrossRef]

W. H. Peters, H. Zheng-Hui, M. A. Sutton, and W. F. Ranson, "Two-dimensional fluid velocity measurements by use of digital speckle correlation techniques," Exp. Mech. 24, 117-121 (1984).

[CrossRef]

C. Rembe and R. S. Muller, "Measurement system for full three-dimensional motion characterization of MEMS," J. Microelectromech. Syst. 11, 479-488 (2002).

[CrossRef]

C. Rembe and E. P. Tibken Bm Hofer, "Analysis of the dynamics in microactuators using high-speed cine photomicrography," J. Microelectromech. Syst. 10, 137-145 (2001).

[CrossRef]

J. W. Chon, P. Mulvaney, and J. E. Sader, "Experimental validation of theoretical models for the frequency response of atomic force microscope cantilever beams immersed in fluids," J. Appl. Phys. 87, 3978-3988 (2000).

[CrossRef]

B. T. Comella and M. R. Scanlon, "The determination of the elastic modulus of microcantilever beam using atomic force microscopy," J. Mater. Sci. 35, 567-572 (2000).

[CrossRef]

S. H. Wang, C. J. Tay, C. Quan, and H. M. Shang, "Determination of deflection and Young's modulus of a micro-beam by means of interferometry," Meas. Sci. Technol. 12, 1279-1285 (2001).

[CrossRef]

K. Yum, Z. Y. Wang, P. A. Suryavanshi, and M. F. Yu, "Experimental validation of theoretical models for the frequency response of atomic force microscope cantilever beams immersed in fluids," J. Appl. Phys. 96, 3933-3938 (2003).

[CrossRef]

M. A. Sutton, M. Cheng, W. H. Peters, Y. J. Chao, and S. R. McNeill "Application of an optimized digital correlation method to planar deformation analysis," Image Vision Comput. 4, 143-150 (1986).

[CrossRef]

W. H. Peters, H. Zheng-Hui, M. A. Sutton, and W. F. Ranson, "Two-dimensional fluid velocity measurements by use of digital speckle correlation techniques," Exp. Mech. 24, 117-121 (1984).

[CrossRef]

S. H. Wang, C. J. Tay, C. Quan, and H. M. Shang, "Determination of deflection and Young's modulus of a micro-beam by means of interferometry," Meas. Sci. Technol. 12, 1279-1285 (2001).

[CrossRef]

C. Rembe and E. P. Tibken Bm Hofer, "Analysis of the dynamics in microactuators using high-speed cine photomicrography," J. Microelectromech. Syst. 10, 137-145 (2001).

[CrossRef]

S. H. Wang, C. J. Tay, C. Quan, and H. M. Shang, "Determination of deflection and Young's modulus of a micro-beam by means of interferometry," Meas. Sci. Technol. 12, 1279-1285 (2001).

[CrossRef]

K. Yum, Z. Y. Wang, P. A. Suryavanshi, and M. F. Yu, "Experimental validation of theoretical models for the frequency response of atomic force microscope cantilever beams immersed in fluids," J. Appl. Phys. 96, 3933-3938 (2003).

[CrossRef]

S. Nakano, R. Maeda, and K. Yamanaka, "Evaluation of the elastic properties of a cantilever using resonant frequencies," Jpn. J. Appl. Phys. 36, 3265-3266 (1997).

[CrossRef]

T. Yi and C. J. Kim, "Measurement of mechanical properties for MEMS materials," Meas. Sci. Technol. 10, 706-716 (1999).

[CrossRef]

K. Yum, Z. Y. Wang, P. A. Suryavanshi, and M. F. Yu, "Experimental validation of theoretical models for the frequency response of atomic force microscope cantilever beams immersed in fluids," J. Appl. Phys. 96, 3933-3938 (2003).

[CrossRef]

K. Yum, Z. Y. Wang, P. A. Suryavanshi, and M. F. Yu, "Experimental validation of theoretical models for the frequency response of atomic force microscope cantilever beams immersed in fluids," J. Appl. Phys. 96, 3933-3938 (2003).

[CrossRef]

J. H. Zhao, Y. Du, M. Morgen, and P. S. Ho, "Simultaneous measurement of Young's modulus, Poisson ratio, and coefficient of thermal expansion of thin films on substrates," J. Appl. Phys. 87, 1575-1577 (2000).

[CrossRef]

W. H. Peters, H. Zheng-Hui, M. A. Sutton, and W. F. Ranson, "Two-dimensional fluid velocity measurements by use of digital speckle correlation techniques," Exp. Mech. 24, 117-121 (1984).

[CrossRef]

W. H. Peters, H. Zheng-Hui, M. A. Sutton, and W. F. Ranson, "Two-dimensional fluid velocity measurements by use of digital speckle correlation techniques," Exp. Mech. 24, 117-121 (1984).

[CrossRef]

M. A. Sutton, M. Cheng, W. H. Peters, Y. J. Chao, and S. R. McNeill "Application of an optimized digital correlation method to planar deformation analysis," Image Vision Comput. 4, 143-150 (1986).

[CrossRef]

K. Yum, Z. Y. Wang, P. A. Suryavanshi, and M. F. Yu, "Experimental validation of theoretical models for the frequency response of atomic force microscope cantilever beams immersed in fluids," J. Appl. Phys. 96, 3933-3938 (2003).

[CrossRef]

J. W. Chon, P. Mulvaney, and J. E. Sader, "Experimental validation of theoretical models for the frequency response of atomic force microscope cantilever beams immersed in fluids," J. Appl. Phys. 87, 3978-3988 (2000).

[CrossRef]

J. H. Zhao, Y. Du, M. Morgen, and P. S. Ho, "Simultaneous measurement of Young's modulus, Poisson ratio, and coefficient of thermal expansion of thin films on substrates," J. Appl. Phys. 87, 1575-1577 (2000).

[CrossRef]

B. T. Comella and M. R. Scanlon, "The determination of the elastic modulus of microcantilever beam using atomic force microscopy," J. Mater. Sci. 35, 567-572 (2000).

[CrossRef]

M. Qin and V. M. C. Poon, "Young's modulus measurement of nickel silicide on crystal silicon by a surface profiler," J. Mater. Sci. Lett. 19, 2243-2245 (2000).

[CrossRef]

C. Rembe and E. P. Tibken Bm Hofer, "Analysis of the dynamics in microactuators using high-speed cine photomicrography," J. Microelectromech. Syst. 10, 137-145 (2001).

[CrossRef]

C. Rembe and R. S. Muller, "Measurement system for full three-dimensional motion characterization of MEMS," J. Microelectromech. Syst. 11, 479-488 (2002).

[CrossRef]

M. R. Hart, R. A. Conant, K. Y. Lau, and R. S. Muller, "Stroboscopic interferometer system for dynamic MEMS characterization," J. Microelectromech. Syst. 9, 409-418 (2000).

[CrossRef]

J. Moreland, "Micromechanical instruments for ferromagnetic measurements," J. Phys. D 36, R39-R51 (2003).

[CrossRef]

S. Nakano, R. Maeda, and K. Yamanaka, "Evaluation of the elastic properties of a cantilever using resonant frequencies," Jpn. J. Appl. Phys. 36, 3265-3266 (1997).

[CrossRef]

T. Yi and C. J. Kim, "Measurement of mechanical properties for MEMS materials," Meas. Sci. Technol. 10, 706-716 (1999).

[CrossRef]

S. H. Wang, C. J. Tay, C. Quan, and H. M. Shang, "Determination of deflection and Young's modulus of a micro-beam by means of interferometry," Meas. Sci. Technol. 12, 1279-1285 (2001).

[CrossRef]

N. A. Fawcett, "A novel method for the measurement of Young's modulus for thick-film resistor material by flexural testing of coated beams," Meas. Sci. Technol. 9, 2023-2026 (1998).

[CrossRef]

W. G. Knauss, I. Chasiotis, and Y. Huang, "Mechanical measurements at the micron and nanometer scales," Mech. Mater. 35, 217-231 (2003).

[CrossRef]

H. Benaroya, Mechanical Vibration: Analysis, Uncertainties, and Control (Prentice-Hall, 1998).