Abstract

We experimentally demonstrated photonic crystal microcavity based resonant sensors coupled to photonic crystal waveguides in silicon nano-membrane on insulator for chemical and bio-sensing. Linear L-type microcavities are considered. In contrast to cavities with small mode volumes, but low quality factors for bio-sensing, we showed increasing the length of the microcavity enhances the quality factor of the resonance by an order of magnitude and increases the resonance wavelength shift while retaining compact device characteristics. Q~26760 and sensitivity down to 15ng/ml and110pg/mm2 in bio-sensing was experimentally demonstrated on silicon-on-insulator devices.

© 2012 Optical Society of America

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    [CrossRef]

2011

S. Pal, E. Guillermain, R. Sriram, B. L. Miller, and P. M. Fauchet, Biosens. Bioelectron. 26, 4024 (2011).
[CrossRef]

M. G. Scullion, A. Di Falco, and T. F. Krauss, Biosens. Bioelectron. 27, 101 (2011).
[CrossRef]

2010

M. Iqbal, M. A. Gleeson, B. Spaugh, F. Tybor, W. G. Gunn, M. Hochberg, T. Baehr-Jones, R. C. Bailey, and L. C. Gunn, IEEE J. Sel. Top. Quantum Electron. 16, 654 (2010).
[CrossRef]

H. Sipova, S. Zhang, A. M. Dudley, D. Galas, K. Wang, and J. Homola, Anal. Chem. 82, 10110 (2010).
[CrossRef]

C. P. Tan, B. R. Cipriany, D. M. Lin, and H. G. Craighead, Nano Lett. 10, 719 (2010).
[CrossRef]

C. Kang, C. T. Phare, Y. A. Vlasov, S. Assefa, and S. M. Weiss, Opt. Express 18, 27930 (2010).
[CrossRef]

C-Y. Lin, X. Wang, S. Chakravarty, B-S. Lee, W-C. Lai, and R. T. Chen, Appl. Phys. Lett. 97183302 (2010).
[CrossRef]

2009

A. Densmore, M. Vachon, D. X. Xu, S. Janz, R. Ma, Y. H. Li, G. Lopinski, A. Delage, J. Lapointe, C. C. Luebbert, Q. Y. Liu, P. Cheben, and J. H. Schmid, Opt. Lett. 34, 3598 (2009).
[CrossRef]

D. Dorfner, T. Zabel, T. Hurlimann, N. Hauke, L. Frandsen, U. Rant, G. Abstreiter, and J. Finley, Biosens. Bioelectron. 24, 3688 (2009).
[CrossRef]

2007

2005

2003

Y. Akahane, T. Asano, B-S. Song, and S. Noda, Nature 425, 944 (2003).
[CrossRef]

Abstreiter, G.

D. Dorfner, T. Zabel, T. Hurlimann, N. Hauke, L. Frandsen, U. Rant, G. Abstreiter, and J. Finley, Biosens. Bioelectron. 24, 3688 (2009).
[CrossRef]

Akahane, Y.

Y. Akahane, T. Asano, B-S. Song, and S. Noda, Nature 425, 944 (2003).
[CrossRef]

Asano, T.

Y. Akahane, T. Asano, B-S. Song, and S. Noda, Nature 425, 944 (2003).
[CrossRef]

Assefa, S.

Baehr-Jones, T.

M. Iqbal, M. A. Gleeson, B. Spaugh, F. Tybor, W. G. Gunn, M. Hochberg, T. Baehr-Jones, R. C. Bailey, and L. C. Gunn, IEEE J. Sel. Top. Quantum Electron. 16, 654 (2010).
[CrossRef]

Bailey, R. C.

M. Iqbal, M. A. Gleeson, B. Spaugh, F. Tybor, W. G. Gunn, M. Hochberg, T. Baehr-Jones, R. C. Bailey, and L. C. Gunn, IEEE J. Sel. Top. Quantum Electron. 16, 654 (2010).
[CrossRef]

Bhattacharya, P.

Chakrabarti, S.

Chakravarty, S.

C-Y. Lin, X. Wang, S. Chakravarty, B-S. Lee, W-C. Lai, and R. T. Chen, Appl. Phys. Lett. 97183302 (2010).
[CrossRef]

S. Chakravarty, J. Topoľančik, P. Bhattacharya, S. Chakrabarti, Y. Kang, and M. E. Meyerhoff, Opt. Lett. 30, 2578 (2005).
[CrossRef]

Cheben, P.

Chen, R. T.

C-Y. Lin, X. Wang, S. Chakravarty, B-S. Lee, W-C. Lai, and R. T. Chen, Appl. Phys. Lett. 97183302 (2010).
[CrossRef]

Cipriany, B. R.

C. P. Tan, B. R. Cipriany, D. M. Lin, and H. G. Craighead, Nano Lett. 10, 719 (2010).
[CrossRef]

Craighead, H. G.

C. P. Tan, B. R. Cipriany, D. M. Lin, and H. G. Craighead, Nano Lett. 10, 719 (2010).
[CrossRef]

Delage, A.

Densmore, A.

Di Falco, A.

M. G. Scullion, A. Di Falco, and T. F. Krauss, Biosens. Bioelectron. 27, 101 (2011).
[CrossRef]

Dorfner, D.

D. Dorfner, T. Zabel, T. Hurlimann, N. Hauke, L. Frandsen, U. Rant, G. Abstreiter, and J. Finley, Biosens. Bioelectron. 24, 3688 (2009).
[CrossRef]

Dudley, A. M.

H. Sipova, S. Zhang, A. M. Dudley, D. Galas, K. Wang, and J. Homola, Anal. Chem. 82, 10110 (2010).
[CrossRef]

Fauchet, P. M.

S. Pal, E. Guillermain, R. Sriram, B. L. Miller, and P. M. Fauchet, Biosens. Bioelectron. 26, 4024 (2011).
[CrossRef]

M. Lee and P. M. Fauchet, Opt. Express 15, 4530 (2007).
[CrossRef]

Finley, J.

D. Dorfner, T. Zabel, T. Hurlimann, N. Hauke, L. Frandsen, U. Rant, G. Abstreiter, and J. Finley, Biosens. Bioelectron. 24, 3688 (2009).
[CrossRef]

Frandsen, L.

D. Dorfner, T. Zabel, T. Hurlimann, N. Hauke, L. Frandsen, U. Rant, G. Abstreiter, and J. Finley, Biosens. Bioelectron. 24, 3688 (2009).
[CrossRef]

Galas, D.

H. Sipova, S. Zhang, A. M. Dudley, D. Galas, K. Wang, and J. Homola, Anal. Chem. 82, 10110 (2010).
[CrossRef]

Gleeson, M. A.

M. Iqbal, M. A. Gleeson, B. Spaugh, F. Tybor, W. G. Gunn, M. Hochberg, T. Baehr-Jones, R. C. Bailey, and L. C. Gunn, IEEE J. Sel. Top. Quantum Electron. 16, 654 (2010).
[CrossRef]

Guillermain, E.

S. Pal, E. Guillermain, R. Sriram, B. L. Miller, and P. M. Fauchet, Biosens. Bioelectron. 26, 4024 (2011).
[CrossRef]

Gunn, L. C.

M. Iqbal, M. A. Gleeson, B. Spaugh, F. Tybor, W. G. Gunn, M. Hochberg, T. Baehr-Jones, R. C. Bailey, and L. C. Gunn, IEEE J. Sel. Top. Quantum Electron. 16, 654 (2010).
[CrossRef]

Gunn, W. G.

M. Iqbal, M. A. Gleeson, B. Spaugh, F. Tybor, W. G. Gunn, M. Hochberg, T. Baehr-Jones, R. C. Bailey, and L. C. Gunn, IEEE J. Sel. Top. Quantum Electron. 16, 654 (2010).
[CrossRef]

Hauke, N.

D. Dorfner, T. Zabel, T. Hurlimann, N. Hauke, L. Frandsen, U. Rant, G. Abstreiter, and J. Finley, Biosens. Bioelectron. 24, 3688 (2009).
[CrossRef]

Hochberg, M.

M. Iqbal, M. A. Gleeson, B. Spaugh, F. Tybor, W. G. Gunn, M. Hochberg, T. Baehr-Jones, R. C. Bailey, and L. C. Gunn, IEEE J. Sel. Top. Quantum Electron. 16, 654 (2010).
[CrossRef]

Homola, J.

H. Sipova, S. Zhang, A. M. Dudley, D. Galas, K. Wang, and J. Homola, Anal. Chem. 82, 10110 (2010).
[CrossRef]

Hurlimann, T.

D. Dorfner, T. Zabel, T. Hurlimann, N. Hauke, L. Frandsen, U. Rant, G. Abstreiter, and J. Finley, Biosens. Bioelectron. 24, 3688 (2009).
[CrossRef]

Iqbal, M.

M. Iqbal, M. A. Gleeson, B. Spaugh, F. Tybor, W. G. Gunn, M. Hochberg, T. Baehr-Jones, R. C. Bailey, and L. C. Gunn, IEEE J. Sel. Top. Quantum Electron. 16, 654 (2010).
[CrossRef]

Janz, S.

Kang, C.

Kang, Y.

Krauss, T. F.

M. G. Scullion, A. Di Falco, and T. F. Krauss, Biosens. Bioelectron. 27, 101 (2011).
[CrossRef]

Lai, W-C.

C-Y. Lin, X. Wang, S. Chakravarty, B-S. Lee, W-C. Lai, and R. T. Chen, Appl. Phys. Lett. 97183302 (2010).
[CrossRef]

Lapointe, J.

Lee, B-S.

C-Y. Lin, X. Wang, S. Chakravarty, B-S. Lee, W-C. Lai, and R. T. Chen, Appl. Phys. Lett. 97183302 (2010).
[CrossRef]

Lee, M.

Li, Y. H.

Lin, C-Y.

C-Y. Lin, X. Wang, S. Chakravarty, B-S. Lee, W-C. Lai, and R. T. Chen, Appl. Phys. Lett. 97183302 (2010).
[CrossRef]

Lin, D. M.

C. P. Tan, B. R. Cipriany, D. M. Lin, and H. G. Craighead, Nano Lett. 10, 719 (2010).
[CrossRef]

Liu, Q. Y.

Lopinski, G.

Luebbert, C. C.

Ma, R.

Meyerhoff, M. E.

Miller, B. L.

S. Pal, E. Guillermain, R. Sriram, B. L. Miller, and P. M. Fauchet, Biosens. Bioelectron. 26, 4024 (2011).
[CrossRef]

Noda, S.

Y. Akahane, T. Asano, B-S. Song, and S. Noda, Nature 425, 944 (2003).
[CrossRef]

Pal, S.

S. Pal, E. Guillermain, R. Sriram, B. L. Miller, and P. M. Fauchet, Biosens. Bioelectron. 26, 4024 (2011).
[CrossRef]

Phare, C. T.

Rant, U.

D. Dorfner, T. Zabel, T. Hurlimann, N. Hauke, L. Frandsen, U. Rant, G. Abstreiter, and J. Finley, Biosens. Bioelectron. 24, 3688 (2009).
[CrossRef]

Schmid, J. H.

Scullion, M. G.

M. G. Scullion, A. Di Falco, and T. F. Krauss, Biosens. Bioelectron. 27, 101 (2011).
[CrossRef]

Sipova, H.

H. Sipova, S. Zhang, A. M. Dudley, D. Galas, K. Wang, and J. Homola, Anal. Chem. 82, 10110 (2010).
[CrossRef]

Song, B-S.

Y. Akahane, T. Asano, B-S. Song, and S. Noda, Nature 425, 944 (2003).
[CrossRef]

Spaugh, B.

M. Iqbal, M. A. Gleeson, B. Spaugh, F. Tybor, W. G. Gunn, M. Hochberg, T. Baehr-Jones, R. C. Bailey, and L. C. Gunn, IEEE J. Sel. Top. Quantum Electron. 16, 654 (2010).
[CrossRef]

Sriram, R.

S. Pal, E. Guillermain, R. Sriram, B. L. Miller, and P. M. Fauchet, Biosens. Bioelectron. 26, 4024 (2011).
[CrossRef]

Tan, C. P.

C. P. Tan, B. R. Cipriany, D. M. Lin, and H. G. Craighead, Nano Lett. 10, 719 (2010).
[CrossRef]

Topolancik, J.

Tybor, F.

M. Iqbal, M. A. Gleeson, B. Spaugh, F. Tybor, W. G. Gunn, M. Hochberg, T. Baehr-Jones, R. C. Bailey, and L. C. Gunn, IEEE J. Sel. Top. Quantum Electron. 16, 654 (2010).
[CrossRef]

Vachon, M.

Vlasov, Y. A.

Vuckovic, J.

Waks, E.

Wang, K.

H. Sipova, S. Zhang, A. M. Dudley, D. Galas, K. Wang, and J. Homola, Anal. Chem. 82, 10110 (2010).
[CrossRef]

Wang, X.

C-Y. Lin, X. Wang, S. Chakravarty, B-S. Lee, W-C. Lai, and R. T. Chen, Appl. Phys. Lett. 97183302 (2010).
[CrossRef]

Weiss, S. M.

Xu, D. X.

Zabel, T.

D. Dorfner, T. Zabel, T. Hurlimann, N. Hauke, L. Frandsen, U. Rant, G. Abstreiter, and J. Finley, Biosens. Bioelectron. 24, 3688 (2009).
[CrossRef]

Zhang, S.

H. Sipova, S. Zhang, A. M. Dudley, D. Galas, K. Wang, and J. Homola, Anal. Chem. 82, 10110 (2010).
[CrossRef]

Anal. Chem.

H. Sipova, S. Zhang, A. M. Dudley, D. Galas, K. Wang, and J. Homola, Anal. Chem. 82, 10110 (2010).
[CrossRef]

Appl. Phys. Lett.

C-Y. Lin, X. Wang, S. Chakravarty, B-S. Lee, W-C. Lai, and R. T. Chen, Appl. Phys. Lett. 97183302 (2010).
[CrossRef]

Biosens. Bioelectron.

S. Pal, E. Guillermain, R. Sriram, B. L. Miller, and P. M. Fauchet, Biosens. Bioelectron. 26, 4024 (2011).
[CrossRef]

M. G. Scullion, A. Di Falco, and T. F. Krauss, Biosens. Bioelectron. 27, 101 (2011).
[CrossRef]

D. Dorfner, T. Zabel, T. Hurlimann, N. Hauke, L. Frandsen, U. Rant, G. Abstreiter, and J. Finley, Biosens. Bioelectron. 24, 3688 (2009).
[CrossRef]

IEEE J. Sel. Top. Quantum Electron.

M. Iqbal, M. A. Gleeson, B. Spaugh, F. Tybor, W. G. Gunn, M. Hochberg, T. Baehr-Jones, R. C. Bailey, and L. C. Gunn, IEEE J. Sel. Top. Quantum Electron. 16, 654 (2010).
[CrossRef]

Nano Lett.

C. P. Tan, B. R. Cipriany, D. M. Lin, and H. G. Craighead, Nano Lett. 10, 719 (2010).
[CrossRef]

Nature

Y. Akahane, T. Asano, B-S. Song, and S. Noda, Nature 425, 944 (2003).
[CrossRef]

Opt. Express

Opt. Lett.

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Figures (4)

Fig. 1.
Fig. 1.

(a) Device schematic. (b) Inkjet printed biomolecules on PC devices showing spacing between printed spots (scale bar is 10 μm). (c) Dispersion diagram of W1 PCW in water. The W1 guided mode is shown together with frequencies of resonant modes for L3, L7 and L13 PC microcavities by dashed lines. Respective mode profiles are shown in insets.

Fig. 2.
Fig. 2.

Experimental W1 PCW transmission spectrum in water with coupled (a) L3 (b) L7 and (c) L13 microcavities. Experimental spectra showing shift of resonance mode closest to the band edge in (a), (b) and (c) in (d), (e), and (f) respectively in water (black) versus IPA (blue). Inset (e) magnifies the wavelength range.

Fig. 3.
Fig. 3.

Plots showing trends in L3, L7 and L13 PC microcavities for resonant mode (a) quality factor in water (open circle) (b) quality factor in IPA (open square) (c) approximate mode offset from the transmission band edge (filled square, left offset axis) and (d) wavelength shift from water to IPA (filled triangle, left axis).

Fig. 4.
Fig. 4.

(a) Resonance wavelength of L3 PC microcavity at different steps in the binding sequence. The resonant wavelength shift of interest is denoted by Δλ. (b) Resonance shift of L3 (filled circles) and L7 PC microcavities (open circles) with probe antibody binding. Dashed line indicates the detection limit. Inset shows peak wavelength shift on binding. (inset) Normalized intensity data showing shift in L7 microcavity resonance from black to red curve upon addition of 0.1 nM probe antibodies.

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