Abstract

Soft-x-ray digital in-line microscopic holography is achieved using a fully coherent high-order harmonic source emitting at 32nm. Combination of commercial-grade soft-x-ray optics and a back-illuminated CCD detector allows a compact and versatile holographic setup. Different experimental geometries have been tested by imaging calibrated 50nm tips and 1μm wires. Spatial resolution of 800nm is measured with magnifications ranging from 30 to 110 and a numerical aperture around 0.01. Finally, the potentiality of three-dimensional numerical reconstruction from a single hologram acquisition is shown experimentally.

© 2006 Optical Society of America

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