Narrowband SiC∕Tb and Si∕Tb multilayers are fabricated with as much as a normal-incidence reflectance near a wavelength and spectral bandpass (FWHM) values of 9.4 and , respectively. The structural properties of the films are investigated using extreme ultraviolet and x-ray reflectometry and transmission electron microscopy. Thermal stability is investigated in films annealed to as high as . Because of their superior thermal stability, relatively high reflectance, and narrower spectral bandpass, Si∕Tb multilayers are identified as optimal candidates for solar physics imaging applications, where the peak response can be tuned to important emission lines such as O v near and Mg x near . We describe our experimental procedures and results, discuss the implications of our findings, and outline prospects for improved performance.
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