Abstract

We experimentally demonstrate high optical quality factor silica microdisk resonators on a silicon chip with large wedge angles by reactive ion etching. For 2-μm-thick microresonators, we have achieved wedge angles of 59°, 63°, 70°, and 79° with optical quality factors of 2.4×107, 8.1×106, 5.9×106, and 7.4×106, respectively, from 80μm-diameter microresonators in the 1550 nm wavelength band. Also, for 1-μm-thick microresonators, we have obtained an optical quality factor of 7.3×106 with a wedge angle of 74°.

© 2015 Chinese Laser Press

Full Article  |  PDF Article
OSA Recommended Articles
Visible Kerr comb generation in a high-Q silica microdisk resonator with a large wedge angle

Jiyang Ma, Longfu Xiao, Jiaxin Gu, Hao Li, Xinyu Cheng, Guangqiang He, Xiaoshun Jiang, and Min Xiao
Photon. Res. 7(5) 573-578 (2019)

High-Q lithium niobate microdisk resonators on a chip for efficient electro-optic modulation

Jie Wang, Fang Bo, Shuai Wan, Wuxia Li, Feng Gao, Junjie Li, Guoquan Zhang, and Jingjun Xu
Opt. Express 23(18) 23072-23078 (2015)

Sum-frequency generation in on-chip lithium niobate microdisk resonators

Zhenzhong Hao, Jie Wang, Shuqiong Ma, Wenbo Mao, Fang Bo, Feng Gao, Guoquan Zhang, and Jingjun Xu
Photon. Res. 5(6) 623-628 (2017)

References

  • View by:
  • |
  • |
  • |

  1. K. J. Vahala, “Optical microcavities,” Nature 424, 839–846 (2003).
    [Crossref]
  2. M. Aspelmeyer, T. J. Kippenberg, and F. Marquardt, “Cavity optomechanics,” Rev. Mod. Phys. 86, 1391–1452 (2014).
    [Crossref]
  3. A. Yariv, Y. Xu, R. K. Lee, and A. Scherer, “Coupled-resonator optical waveguide: a proposal and analysis,” Opt. Lett. 24, 711–713 (1999).
    [Crossref]
  4. F. Morichetti, C. Ferrari, A. Canciamilla, and A. Melloni, “The first decade of coupled resonator optical waveguides: bringing slow light to applications,” Laser Photon. Rev. 6, 74–96 (2012).
    [Crossref]
  5. A. Naweed, G. Farca, S. I. Shopova, and A. T. Rosenberger, “Induced transparency and absorption in coupled whispering-gallery microresonators,” Phys. Rev. A 71, 043804 (2005).
    [Crossref]
  6. K. Totsuka, N. Kobayashi, and M. Tomita, “Slow light in coupled-resonator-induced transparency,” Phys. Rev. Lett. 98, 213904 (2007).
    [Crossref]
  7. C. Zheng, X. Jiang, S. Hua, L. Chang, G. Li, H. Fan, and M. Xiao, “Controllable optical analog to electromagnetically induced transparency in coupled high-Q microtoroid cavities,” Opt. Express 20, 18319–18325 (2012).
    [Crossref]
  8. A. Dousse, J. Suffczyński, A. Beveratos, O. Krebs, A. Lemaître, I. Sagnes, J. Bloch, P. Voisin, and P. Senellart, “Ultrabright source of entangled photon pairs,” Nature 466, 217–220 (2010).
    [Crossref]
  9. A. Majumdar, A. Rundquist, M. Bajcsy, V. D. Dasika, S. R. Bank, and J. Vučković, “Design and analysis of photonic crystal coupled cavity arrays for quantum simulation,” Phys. Rev. B 86, 195312 (2012).
    [Crossref]
  10. I. S. Grudinin, H. Lee, O. Painter, and K. J. Vahala, “Phonon laser action in a tunable two-level system,” Phys. Rev. Lett. 104, 083901 (2010).
    [Crossref]
  11. L. Chang, X. Jiang, S. Hua, C. Yang, J. Wen, L. Jiang, G. Li, G. Wang, and M. Xiao, “Parity-time symmetry and variable optical isolation in active-passive-coupled microresonators,” Nat. Photonics 8, 524–529 (2014).
    [Crossref]
  12. B. Peng, S. K. Özdemir, F. Lei, F. Monifi, M. Gianfreda, G. L. Long, S. Fan, F. Nori, C. M. Bender, and L. Yang, “Parity-time-symmetric whispering-gallery microcavities,” Nat. Phys. 10, 394–398 (2014).
    [Crossref]
  13. M. Borselli, T. J. Johnson, and O. Painter, “Beyond the Rayleigh scattering limit in high-Q silicon microdisks: theory and experiment,” Opt. Express 13, 1515–1530 (2005).
    [Crossref]
  14. A. Biberman, M. J. Shaw, E. Timurdogan, J. B. Wright, and M. R. Watts, “Ultralow-loss silicon ring resonators,” Opt. Lett. 37, 4236–4238 (2012).
    [Crossref]
  15. Q. Li, A. A. Eftekhar, M. Sodagar, Z. Xia, A. H. Atabaki, and A. Adibi, “Vertical integration of high-Q silicon nitride microresonators into silicon-on-insulator platform,” Opt. Express 21, 18236–18248 (2013).
    [Crossref]
  16. D. K. Armani, T. J. Kippenberg, S. M. Spillane, and K. J. Vahala, “Ultra-high-Q toroid microcavity on a chip,” Nature 421, 925–928 (2003).
    [Crossref]
  17. J.-B. Jager, V. Calvo, E. Delamadeleine, E. Hadji, P. Noé, T. Ricart, D. Bucci, and A. Morand, “High-Q silica microcavities on a chip: from microtoroid to microsphere,” Appl. Phys. Lett. 99, 181123 (2011).
    [Crossref]
  18. T. J. Kippenberg, J. Kalkman, A. Polman, and K. J. Vahala, “Demonstration of an erbium-doped microdisk laser on a silicon chip,” Phys. Rev. A 74, 051802 (2006).
    [Crossref]
  19. H. Lee, T. Chen, J. Li, K. Yang, S. Jeon, O. Painter, and K. J. Vahala, “Chemically etched ultrahigh-Q wedge-resonator on a silicon chip,” Nat. Photonics 6, 369–373 (2012).
    [Crossref]
  20. C. P. Michael, K. Srinivasan, T. J. Johnson, O. Painter, K. H. Lee, K. Hennessy, H. Kim, and E. Hu, “Wavelength-and material-dependent absorption in GaAs and AlGaAs microcavities,” Appl. Phys. Lett. 90, 051108 (2007).
    [Crossref]
  21. L. Ding, C. Baker, P. Senellart, A. Lemaitre, S. Ducci, G. Leo, and I. Favero, “High frequency GaAs nano-optomechanical disk resonator,” Phys. Rev. Lett. 105, 263903 (2010).
    [Crossref]
  22. P. Rabiei, W. H. Steier, C. Zhang, and L. R. Dalton, “Polymer micro-ring filters and modulators,” J. Lightwave Technol. 20, 1968–1975 (2002).
    [Crossref]
  23. T. Grossmann, M. Hauser, T. Beck, C. Gohn-Kreuz, M. Karl, H. Kalt, C. Vannahme, and T. Mappes, “High-Q conical polymeric microcavities,” Appl. Phys. Lett. 96, 013303 (2010).
    [Crossref]
  24. B. J. M. Hausmann, I. Bulu, V. Venkataraman, P. Deotare, and M. Lončar, “Diamond nonlinear photonics,” Nat. Photonics 8, 369–374 (2014).
    [Crossref]
  25. C. Schmidt, A. Chipouline, T. Käsebier, E.-B. Kley, A. Tünnermann, T. Pertsch, V. Shuvayev, and L. I. Deych, “Observation of optical coupling in microdisk resonators,” Phys. Rev. A 80, 043841 (2009).
    [Crossref]
  26. C. Schmidt, A. Chipouline, T. Käsebier, E.-B. Kley, A. Tünnermann, and T. Pertsch, “Thermal nonlinear effects in hybrid silica/polymer microdisks,” Opt. Lett. 35, 3351–3353 (2010).
    [Crossref]
  27. X. Jiang, Q. Lin, J. Rosenberg, K. Vahala, and O. Painter, “High-Q double-disk microcavities for cavity optomechanics,” Opt. Express 17, 20911–20919 (2009).
    [Crossref]
  28. Q. Lin, J. Rosenberg, X. Jiang, K. J. Vahala, and O. Painter, “Mechanical oscillation and cooling actuated by the optical gradient force,” Phys. Rev. Lett. 103, 103601 (2009).
    [Crossref]
  29. M. Cai, O. Painter, and K. J. Vahala, “Observation of critical coupling in a fiber taper to a silica-microsphere whispering-gallery mode system,” Phys. Rev. Lett. 85, 74–77 (2000).
    [Crossref]
  30. T. J. Kippenberg, S. M. Spillane, and K. J. Vahala, “Modal coupling in traveling-wave resonators,” Opt. Lett. 27, 1669–1671 (2002).
    [Crossref]
  31. T. J. Kippenberg, S. M. Spillane, and K. J. Vahala, “Kerr-nonlinearity optical parametric oscillation in an ultrahigh-Q toroid microcavity,” Phys. Rev. Lett. 93, 083904 (2004).
    [Crossref]
  32. J. Li, H. Lee, K. Y. Yang, and K. J. Vahala, “Sideband spectroscopy and dispersion measurement in microcavities,” Opt. Express 20, 26337–26344 (2012).
    [Crossref]
  33. I. H. Agha, Y. Okawachi, and A. L. Gaeta, “Theoretical and experimental investigation of broadband cascaded four-wave mixing in high-Q microspheres,” Opt. Express 17, 16209–16215 (2009).
    [Crossref]
  34. Y. K. Chembo and N. Yu, “Modal expansion approach to optical-frequency-comb generation with monolithic whispering-gallery-mode resonators,” Phys. Rev. A 82, 033801 (2010).
    [Crossref]
  35. T. Herr, K. Hartinger, J. Riemensberger, C. Y. Wang, E. Gavartin, R. Holzwarth, M. L. Gorodetsky, and T. J. Kippenberg, “Universal formation dynamics and noise of Kerr-frequency combs in microresonators,” Nat. Photonics 6, 480–487 (2012).
    [Crossref]

2014 (4)

M. Aspelmeyer, T. J. Kippenberg, and F. Marquardt, “Cavity optomechanics,” Rev. Mod. Phys. 86, 1391–1452 (2014).
[Crossref]

L. Chang, X. Jiang, S. Hua, C. Yang, J. Wen, L. Jiang, G. Li, G. Wang, and M. Xiao, “Parity-time symmetry and variable optical isolation in active-passive-coupled microresonators,” Nat. Photonics 8, 524–529 (2014).
[Crossref]

B. Peng, S. K. Özdemir, F. Lei, F. Monifi, M. Gianfreda, G. L. Long, S. Fan, F. Nori, C. M. Bender, and L. Yang, “Parity-time-symmetric whispering-gallery microcavities,” Nat. Phys. 10, 394–398 (2014).
[Crossref]

B. J. M. Hausmann, I. Bulu, V. Venkataraman, P. Deotare, and M. Lončar, “Diamond nonlinear photonics,” Nat. Photonics 8, 369–374 (2014).
[Crossref]

2013 (1)

2012 (7)

A. Majumdar, A. Rundquist, M. Bajcsy, V. D. Dasika, S. R. Bank, and J. Vučković, “Design and analysis of photonic crystal coupled cavity arrays for quantum simulation,” Phys. Rev. B 86, 195312 (2012).
[Crossref]

F. Morichetti, C. Ferrari, A. Canciamilla, and A. Melloni, “The first decade of coupled resonator optical waveguides: bringing slow light to applications,” Laser Photon. Rev. 6, 74–96 (2012).
[Crossref]

C. Zheng, X. Jiang, S. Hua, L. Chang, G. Li, H. Fan, and M. Xiao, “Controllable optical analog to electromagnetically induced transparency in coupled high-Q microtoroid cavities,” Opt. Express 20, 18319–18325 (2012).
[Crossref]

A. Biberman, M. J. Shaw, E. Timurdogan, J. B. Wright, and M. R. Watts, “Ultralow-loss silicon ring resonators,” Opt. Lett. 37, 4236–4238 (2012).
[Crossref]

H. Lee, T. Chen, J. Li, K. Yang, S. Jeon, O. Painter, and K. J. Vahala, “Chemically etched ultrahigh-Q wedge-resonator on a silicon chip,” Nat. Photonics 6, 369–373 (2012).
[Crossref]

J. Li, H. Lee, K. Y. Yang, and K. J. Vahala, “Sideband spectroscopy and dispersion measurement in microcavities,” Opt. Express 20, 26337–26344 (2012).
[Crossref]

T. Herr, K. Hartinger, J. Riemensberger, C. Y. Wang, E. Gavartin, R. Holzwarth, M. L. Gorodetsky, and T. J. Kippenberg, “Universal formation dynamics and noise of Kerr-frequency combs in microresonators,” Nat. Photonics 6, 480–487 (2012).
[Crossref]

2011 (1)

J.-B. Jager, V. Calvo, E. Delamadeleine, E. Hadji, P. Noé, T. Ricart, D. Bucci, and A. Morand, “High-Q silica microcavities on a chip: from microtoroid to microsphere,” Appl. Phys. Lett. 99, 181123 (2011).
[Crossref]

2010 (6)

I. S. Grudinin, H. Lee, O. Painter, and K. J. Vahala, “Phonon laser action in a tunable two-level system,” Phys. Rev. Lett. 104, 083901 (2010).
[Crossref]

A. Dousse, J. Suffczyński, A. Beveratos, O. Krebs, A. Lemaître, I. Sagnes, J. Bloch, P. Voisin, and P. Senellart, “Ultrabright source of entangled photon pairs,” Nature 466, 217–220 (2010).
[Crossref]

C. Schmidt, A. Chipouline, T. Käsebier, E.-B. Kley, A. Tünnermann, and T. Pertsch, “Thermal nonlinear effects in hybrid silica/polymer microdisks,” Opt. Lett. 35, 3351–3353 (2010).
[Crossref]

L. Ding, C. Baker, P. Senellart, A. Lemaitre, S. Ducci, G. Leo, and I. Favero, “High frequency GaAs nano-optomechanical disk resonator,” Phys. Rev. Lett. 105, 263903 (2010).
[Crossref]

T. Grossmann, M. Hauser, T. Beck, C. Gohn-Kreuz, M. Karl, H. Kalt, C. Vannahme, and T. Mappes, “High-Q conical polymeric microcavities,” Appl. Phys. Lett. 96, 013303 (2010).
[Crossref]

Y. K. Chembo and N. Yu, “Modal expansion approach to optical-frequency-comb generation with monolithic whispering-gallery-mode resonators,” Phys. Rev. A 82, 033801 (2010).
[Crossref]

2009 (4)

C. Schmidt, A. Chipouline, T. Käsebier, E.-B. Kley, A. Tünnermann, T. Pertsch, V. Shuvayev, and L. I. Deych, “Observation of optical coupling in microdisk resonators,” Phys. Rev. A 80, 043841 (2009).
[Crossref]

X. Jiang, Q. Lin, J. Rosenberg, K. Vahala, and O. Painter, “High-Q double-disk microcavities for cavity optomechanics,” Opt. Express 17, 20911–20919 (2009).
[Crossref]

Q. Lin, J. Rosenberg, X. Jiang, K. J. Vahala, and O. Painter, “Mechanical oscillation and cooling actuated by the optical gradient force,” Phys. Rev. Lett. 103, 103601 (2009).
[Crossref]

I. H. Agha, Y. Okawachi, and A. L. Gaeta, “Theoretical and experimental investigation of broadband cascaded four-wave mixing in high-Q microspheres,” Opt. Express 17, 16209–16215 (2009).
[Crossref]

2007 (2)

C. P. Michael, K. Srinivasan, T. J. Johnson, O. Painter, K. H. Lee, K. Hennessy, H. Kim, and E. Hu, “Wavelength-and material-dependent absorption in GaAs and AlGaAs microcavities,” Appl. Phys. Lett. 90, 051108 (2007).
[Crossref]

K. Totsuka, N. Kobayashi, and M. Tomita, “Slow light in coupled-resonator-induced transparency,” Phys. Rev. Lett. 98, 213904 (2007).
[Crossref]

2006 (1)

T. J. Kippenberg, J. Kalkman, A. Polman, and K. J. Vahala, “Demonstration of an erbium-doped microdisk laser on a silicon chip,” Phys. Rev. A 74, 051802 (2006).
[Crossref]

2005 (2)

M. Borselli, T. J. Johnson, and O. Painter, “Beyond the Rayleigh scattering limit in high-Q silicon microdisks: theory and experiment,” Opt. Express 13, 1515–1530 (2005).
[Crossref]

A. Naweed, G. Farca, S. I. Shopova, and A. T. Rosenberger, “Induced transparency and absorption in coupled whispering-gallery microresonators,” Phys. Rev. A 71, 043804 (2005).
[Crossref]

2004 (1)

T. J. Kippenberg, S. M. Spillane, and K. J. Vahala, “Kerr-nonlinearity optical parametric oscillation in an ultrahigh-Q toroid microcavity,” Phys. Rev. Lett. 93, 083904 (2004).
[Crossref]

2003 (2)

K. J. Vahala, “Optical microcavities,” Nature 424, 839–846 (2003).
[Crossref]

D. K. Armani, T. J. Kippenberg, S. M. Spillane, and K. J. Vahala, “Ultra-high-Q toroid microcavity on a chip,” Nature 421, 925–928 (2003).
[Crossref]

2002 (2)

2000 (1)

M. Cai, O. Painter, and K. J. Vahala, “Observation of critical coupling in a fiber taper to a silica-microsphere whispering-gallery mode system,” Phys. Rev. Lett. 85, 74–77 (2000).
[Crossref]

1999 (1)

Adibi, A.

Agha, I. H.

Armani, D. K.

D. K. Armani, T. J. Kippenberg, S. M. Spillane, and K. J. Vahala, “Ultra-high-Q toroid microcavity on a chip,” Nature 421, 925–928 (2003).
[Crossref]

Aspelmeyer, M.

M. Aspelmeyer, T. J. Kippenberg, and F. Marquardt, “Cavity optomechanics,” Rev. Mod. Phys. 86, 1391–1452 (2014).
[Crossref]

Atabaki, A. H.

Bajcsy, M.

A. Majumdar, A. Rundquist, M. Bajcsy, V. D. Dasika, S. R. Bank, and J. Vučković, “Design and analysis of photonic crystal coupled cavity arrays for quantum simulation,” Phys. Rev. B 86, 195312 (2012).
[Crossref]

Baker, C.

L. Ding, C. Baker, P. Senellart, A. Lemaitre, S. Ducci, G. Leo, and I. Favero, “High frequency GaAs nano-optomechanical disk resonator,” Phys. Rev. Lett. 105, 263903 (2010).
[Crossref]

Bank, S. R.

A. Majumdar, A. Rundquist, M. Bajcsy, V. D. Dasika, S. R. Bank, and J. Vučković, “Design and analysis of photonic crystal coupled cavity arrays for quantum simulation,” Phys. Rev. B 86, 195312 (2012).
[Crossref]

Beck, T.

T. Grossmann, M. Hauser, T. Beck, C. Gohn-Kreuz, M. Karl, H. Kalt, C. Vannahme, and T. Mappes, “High-Q conical polymeric microcavities,” Appl. Phys. Lett. 96, 013303 (2010).
[Crossref]

Bender, C. M.

B. Peng, S. K. Özdemir, F. Lei, F. Monifi, M. Gianfreda, G. L. Long, S. Fan, F. Nori, C. M. Bender, and L. Yang, “Parity-time-symmetric whispering-gallery microcavities,” Nat. Phys. 10, 394–398 (2014).
[Crossref]

Beveratos, A.

A. Dousse, J. Suffczyński, A. Beveratos, O. Krebs, A. Lemaître, I. Sagnes, J. Bloch, P. Voisin, and P. Senellart, “Ultrabright source of entangled photon pairs,” Nature 466, 217–220 (2010).
[Crossref]

Biberman, A.

Bloch, J.

A. Dousse, J. Suffczyński, A. Beveratos, O. Krebs, A. Lemaître, I. Sagnes, J. Bloch, P. Voisin, and P. Senellart, “Ultrabright source of entangled photon pairs,” Nature 466, 217–220 (2010).
[Crossref]

Borselli, M.

Bucci, D.

J.-B. Jager, V. Calvo, E. Delamadeleine, E. Hadji, P. Noé, T. Ricart, D. Bucci, and A. Morand, “High-Q silica microcavities on a chip: from microtoroid to microsphere,” Appl. Phys. Lett. 99, 181123 (2011).
[Crossref]

Bulu, I.

B. J. M. Hausmann, I. Bulu, V. Venkataraman, P. Deotare, and M. Lončar, “Diamond nonlinear photonics,” Nat. Photonics 8, 369–374 (2014).
[Crossref]

Cai, M.

M. Cai, O. Painter, and K. J. Vahala, “Observation of critical coupling in a fiber taper to a silica-microsphere whispering-gallery mode system,” Phys. Rev. Lett. 85, 74–77 (2000).
[Crossref]

Calvo, V.

J.-B. Jager, V. Calvo, E. Delamadeleine, E. Hadji, P. Noé, T. Ricart, D. Bucci, and A. Morand, “High-Q silica microcavities on a chip: from microtoroid to microsphere,” Appl. Phys. Lett. 99, 181123 (2011).
[Crossref]

Canciamilla, A.

F. Morichetti, C. Ferrari, A. Canciamilla, and A. Melloni, “The first decade of coupled resonator optical waveguides: bringing slow light to applications,” Laser Photon. Rev. 6, 74–96 (2012).
[Crossref]

Chang, L.

L. Chang, X. Jiang, S. Hua, C. Yang, J. Wen, L. Jiang, G. Li, G. Wang, and M. Xiao, “Parity-time symmetry and variable optical isolation in active-passive-coupled microresonators,” Nat. Photonics 8, 524–529 (2014).
[Crossref]

C. Zheng, X. Jiang, S. Hua, L. Chang, G. Li, H. Fan, and M. Xiao, “Controllable optical analog to electromagnetically induced transparency in coupled high-Q microtoroid cavities,” Opt. Express 20, 18319–18325 (2012).
[Crossref]

Chembo, Y. K.

Y. K. Chembo and N. Yu, “Modal expansion approach to optical-frequency-comb generation with monolithic whispering-gallery-mode resonators,” Phys. Rev. A 82, 033801 (2010).
[Crossref]

Chen, T.

H. Lee, T. Chen, J. Li, K. Yang, S. Jeon, O. Painter, and K. J. Vahala, “Chemically etched ultrahigh-Q wedge-resonator on a silicon chip,” Nat. Photonics 6, 369–373 (2012).
[Crossref]

Chipouline, A.

C. Schmidt, A. Chipouline, T. Käsebier, E.-B. Kley, A. Tünnermann, and T. Pertsch, “Thermal nonlinear effects in hybrid silica/polymer microdisks,” Opt. Lett. 35, 3351–3353 (2010).
[Crossref]

C. Schmidt, A. Chipouline, T. Käsebier, E.-B. Kley, A. Tünnermann, T. Pertsch, V. Shuvayev, and L. I. Deych, “Observation of optical coupling in microdisk resonators,” Phys. Rev. A 80, 043841 (2009).
[Crossref]

Dalton, L. R.

Dasika, V. D.

A. Majumdar, A. Rundquist, M. Bajcsy, V. D. Dasika, S. R. Bank, and J. Vučković, “Design and analysis of photonic crystal coupled cavity arrays for quantum simulation,” Phys. Rev. B 86, 195312 (2012).
[Crossref]

Delamadeleine, E.

J.-B. Jager, V. Calvo, E. Delamadeleine, E. Hadji, P. Noé, T. Ricart, D. Bucci, and A. Morand, “High-Q silica microcavities on a chip: from microtoroid to microsphere,” Appl. Phys. Lett. 99, 181123 (2011).
[Crossref]

Deotare, P.

B. J. M. Hausmann, I. Bulu, V. Venkataraman, P. Deotare, and M. Lončar, “Diamond nonlinear photonics,” Nat. Photonics 8, 369–374 (2014).
[Crossref]

Deych, L. I.

C. Schmidt, A. Chipouline, T. Käsebier, E.-B. Kley, A. Tünnermann, T. Pertsch, V. Shuvayev, and L. I. Deych, “Observation of optical coupling in microdisk resonators,” Phys. Rev. A 80, 043841 (2009).
[Crossref]

Ding, L.

L. Ding, C. Baker, P. Senellart, A. Lemaitre, S. Ducci, G. Leo, and I. Favero, “High frequency GaAs nano-optomechanical disk resonator,” Phys. Rev. Lett. 105, 263903 (2010).
[Crossref]

Dousse, A.

A. Dousse, J. Suffczyński, A. Beveratos, O. Krebs, A. Lemaître, I. Sagnes, J. Bloch, P. Voisin, and P. Senellart, “Ultrabright source of entangled photon pairs,” Nature 466, 217–220 (2010).
[Crossref]

Ducci, S.

L. Ding, C. Baker, P. Senellart, A. Lemaitre, S. Ducci, G. Leo, and I. Favero, “High frequency GaAs nano-optomechanical disk resonator,” Phys. Rev. Lett. 105, 263903 (2010).
[Crossref]

Eftekhar, A. A.

Fan, H.

Fan, S.

B. Peng, S. K. Özdemir, F. Lei, F. Monifi, M. Gianfreda, G. L. Long, S. Fan, F. Nori, C. M. Bender, and L. Yang, “Parity-time-symmetric whispering-gallery microcavities,” Nat. Phys. 10, 394–398 (2014).
[Crossref]

Farca, G.

A. Naweed, G. Farca, S. I. Shopova, and A. T. Rosenberger, “Induced transparency and absorption in coupled whispering-gallery microresonators,” Phys. Rev. A 71, 043804 (2005).
[Crossref]

Favero, I.

L. Ding, C. Baker, P. Senellart, A. Lemaitre, S. Ducci, G. Leo, and I. Favero, “High frequency GaAs nano-optomechanical disk resonator,” Phys. Rev. Lett. 105, 263903 (2010).
[Crossref]

Ferrari, C.

F. Morichetti, C. Ferrari, A. Canciamilla, and A. Melloni, “The first decade of coupled resonator optical waveguides: bringing slow light to applications,” Laser Photon. Rev. 6, 74–96 (2012).
[Crossref]

Gaeta, A. L.

Gavartin, E.

T. Herr, K. Hartinger, J. Riemensberger, C. Y. Wang, E. Gavartin, R. Holzwarth, M. L. Gorodetsky, and T. J. Kippenberg, “Universal formation dynamics and noise of Kerr-frequency combs in microresonators,” Nat. Photonics 6, 480–487 (2012).
[Crossref]

Gianfreda, M.

B. Peng, S. K. Özdemir, F. Lei, F. Monifi, M. Gianfreda, G. L. Long, S. Fan, F. Nori, C. M. Bender, and L. Yang, “Parity-time-symmetric whispering-gallery microcavities,” Nat. Phys. 10, 394–398 (2014).
[Crossref]

Gohn-Kreuz, C.

T. Grossmann, M. Hauser, T. Beck, C. Gohn-Kreuz, M. Karl, H. Kalt, C. Vannahme, and T. Mappes, “High-Q conical polymeric microcavities,” Appl. Phys. Lett. 96, 013303 (2010).
[Crossref]

Gorodetsky, M. L.

T. Herr, K. Hartinger, J. Riemensberger, C. Y. Wang, E. Gavartin, R. Holzwarth, M. L. Gorodetsky, and T. J. Kippenberg, “Universal formation dynamics and noise of Kerr-frequency combs in microresonators,” Nat. Photonics 6, 480–487 (2012).
[Crossref]

Grossmann, T.

T. Grossmann, M. Hauser, T. Beck, C. Gohn-Kreuz, M. Karl, H. Kalt, C. Vannahme, and T. Mappes, “High-Q conical polymeric microcavities,” Appl. Phys. Lett. 96, 013303 (2010).
[Crossref]

Grudinin, I. S.

I. S. Grudinin, H. Lee, O. Painter, and K. J. Vahala, “Phonon laser action in a tunable two-level system,” Phys. Rev. Lett. 104, 083901 (2010).
[Crossref]

Hadji, E.

J.-B. Jager, V. Calvo, E. Delamadeleine, E. Hadji, P. Noé, T. Ricart, D. Bucci, and A. Morand, “High-Q silica microcavities on a chip: from microtoroid to microsphere,” Appl. Phys. Lett. 99, 181123 (2011).
[Crossref]

Hartinger, K.

T. Herr, K. Hartinger, J. Riemensberger, C. Y. Wang, E. Gavartin, R. Holzwarth, M. L. Gorodetsky, and T. J. Kippenberg, “Universal formation dynamics and noise of Kerr-frequency combs in microresonators,” Nat. Photonics 6, 480–487 (2012).
[Crossref]

Hauser, M.

T. Grossmann, M. Hauser, T. Beck, C. Gohn-Kreuz, M. Karl, H. Kalt, C. Vannahme, and T. Mappes, “High-Q conical polymeric microcavities,” Appl. Phys. Lett. 96, 013303 (2010).
[Crossref]

Hausmann, B. J. M.

B. J. M. Hausmann, I. Bulu, V. Venkataraman, P. Deotare, and M. Lončar, “Diamond nonlinear photonics,” Nat. Photonics 8, 369–374 (2014).
[Crossref]

Hennessy, K.

C. P. Michael, K. Srinivasan, T. J. Johnson, O. Painter, K. H. Lee, K. Hennessy, H. Kim, and E. Hu, “Wavelength-and material-dependent absorption in GaAs and AlGaAs microcavities,” Appl. Phys. Lett. 90, 051108 (2007).
[Crossref]

Herr, T.

T. Herr, K. Hartinger, J. Riemensberger, C. Y. Wang, E. Gavartin, R. Holzwarth, M. L. Gorodetsky, and T. J. Kippenberg, “Universal formation dynamics and noise of Kerr-frequency combs in microresonators,” Nat. Photonics 6, 480–487 (2012).
[Crossref]

Holzwarth, R.

T. Herr, K. Hartinger, J. Riemensberger, C. Y. Wang, E. Gavartin, R. Holzwarth, M. L. Gorodetsky, and T. J. Kippenberg, “Universal formation dynamics and noise of Kerr-frequency combs in microresonators,” Nat. Photonics 6, 480–487 (2012).
[Crossref]

Hu, E.

C. P. Michael, K. Srinivasan, T. J. Johnson, O. Painter, K. H. Lee, K. Hennessy, H. Kim, and E. Hu, “Wavelength-and material-dependent absorption in GaAs and AlGaAs microcavities,” Appl. Phys. Lett. 90, 051108 (2007).
[Crossref]

Hua, S.

L. Chang, X. Jiang, S. Hua, C. Yang, J. Wen, L. Jiang, G. Li, G. Wang, and M. Xiao, “Parity-time symmetry and variable optical isolation in active-passive-coupled microresonators,” Nat. Photonics 8, 524–529 (2014).
[Crossref]

C. Zheng, X. Jiang, S. Hua, L. Chang, G. Li, H. Fan, and M. Xiao, “Controllable optical analog to electromagnetically induced transparency in coupled high-Q microtoroid cavities,” Opt. Express 20, 18319–18325 (2012).
[Crossref]

Jager, J.-B.

J.-B. Jager, V. Calvo, E. Delamadeleine, E. Hadji, P. Noé, T. Ricart, D. Bucci, and A. Morand, “High-Q silica microcavities on a chip: from microtoroid to microsphere,” Appl. Phys. Lett. 99, 181123 (2011).
[Crossref]

Jeon, S.

H. Lee, T. Chen, J. Li, K. Yang, S. Jeon, O. Painter, and K. J. Vahala, “Chemically etched ultrahigh-Q wedge-resonator on a silicon chip,” Nat. Photonics 6, 369–373 (2012).
[Crossref]

Jiang, L.

L. Chang, X. Jiang, S. Hua, C. Yang, J. Wen, L. Jiang, G. Li, G. Wang, and M. Xiao, “Parity-time symmetry and variable optical isolation in active-passive-coupled microresonators,” Nat. Photonics 8, 524–529 (2014).
[Crossref]

Jiang, X.

L. Chang, X. Jiang, S. Hua, C. Yang, J. Wen, L. Jiang, G. Li, G. Wang, and M. Xiao, “Parity-time symmetry and variable optical isolation in active-passive-coupled microresonators,” Nat. Photonics 8, 524–529 (2014).
[Crossref]

C. Zheng, X. Jiang, S. Hua, L. Chang, G. Li, H. Fan, and M. Xiao, “Controllable optical analog to electromagnetically induced transparency in coupled high-Q microtoroid cavities,” Opt. Express 20, 18319–18325 (2012).
[Crossref]

X. Jiang, Q. Lin, J. Rosenberg, K. Vahala, and O. Painter, “High-Q double-disk microcavities for cavity optomechanics,” Opt. Express 17, 20911–20919 (2009).
[Crossref]

Q. Lin, J. Rosenberg, X. Jiang, K. J. Vahala, and O. Painter, “Mechanical oscillation and cooling actuated by the optical gradient force,” Phys. Rev. Lett. 103, 103601 (2009).
[Crossref]

Johnson, T. J.

C. P. Michael, K. Srinivasan, T. J. Johnson, O. Painter, K. H. Lee, K. Hennessy, H. Kim, and E. Hu, “Wavelength-and material-dependent absorption in GaAs and AlGaAs microcavities,” Appl. Phys. Lett. 90, 051108 (2007).
[Crossref]

M. Borselli, T. J. Johnson, and O. Painter, “Beyond the Rayleigh scattering limit in high-Q silicon microdisks: theory and experiment,” Opt. Express 13, 1515–1530 (2005).
[Crossref]

Kalkman, J.

T. J. Kippenberg, J. Kalkman, A. Polman, and K. J. Vahala, “Demonstration of an erbium-doped microdisk laser on a silicon chip,” Phys. Rev. A 74, 051802 (2006).
[Crossref]

Kalt, H.

T. Grossmann, M. Hauser, T. Beck, C. Gohn-Kreuz, M. Karl, H. Kalt, C. Vannahme, and T. Mappes, “High-Q conical polymeric microcavities,” Appl. Phys. Lett. 96, 013303 (2010).
[Crossref]

Karl, M.

T. Grossmann, M. Hauser, T. Beck, C. Gohn-Kreuz, M. Karl, H. Kalt, C. Vannahme, and T. Mappes, “High-Q conical polymeric microcavities,” Appl. Phys. Lett. 96, 013303 (2010).
[Crossref]

Käsebier, T.

C. Schmidt, A. Chipouline, T. Käsebier, E.-B. Kley, A. Tünnermann, and T. Pertsch, “Thermal nonlinear effects in hybrid silica/polymer microdisks,” Opt. Lett. 35, 3351–3353 (2010).
[Crossref]

C. Schmidt, A. Chipouline, T. Käsebier, E.-B. Kley, A. Tünnermann, T. Pertsch, V. Shuvayev, and L. I. Deych, “Observation of optical coupling in microdisk resonators,” Phys. Rev. A 80, 043841 (2009).
[Crossref]

Kim, H.

C. P. Michael, K. Srinivasan, T. J. Johnson, O. Painter, K. H. Lee, K. Hennessy, H. Kim, and E. Hu, “Wavelength-and material-dependent absorption in GaAs and AlGaAs microcavities,” Appl. Phys. Lett. 90, 051108 (2007).
[Crossref]

Kippenberg, T. J.

M. Aspelmeyer, T. J. Kippenberg, and F. Marquardt, “Cavity optomechanics,” Rev. Mod. Phys. 86, 1391–1452 (2014).
[Crossref]

T. Herr, K. Hartinger, J. Riemensberger, C. Y. Wang, E. Gavartin, R. Holzwarth, M. L. Gorodetsky, and T. J. Kippenberg, “Universal formation dynamics and noise of Kerr-frequency combs in microresonators,” Nat. Photonics 6, 480–487 (2012).
[Crossref]

T. J. Kippenberg, J. Kalkman, A. Polman, and K. J. Vahala, “Demonstration of an erbium-doped microdisk laser on a silicon chip,” Phys. Rev. A 74, 051802 (2006).
[Crossref]

T. J. Kippenberg, S. M. Spillane, and K. J. Vahala, “Kerr-nonlinearity optical parametric oscillation in an ultrahigh-Q toroid microcavity,” Phys. Rev. Lett. 93, 083904 (2004).
[Crossref]

D. K. Armani, T. J. Kippenberg, S. M. Spillane, and K. J. Vahala, “Ultra-high-Q toroid microcavity on a chip,” Nature 421, 925–928 (2003).
[Crossref]

T. J. Kippenberg, S. M. Spillane, and K. J. Vahala, “Modal coupling in traveling-wave resonators,” Opt. Lett. 27, 1669–1671 (2002).
[Crossref]

Kley, E.-B.

C. Schmidt, A. Chipouline, T. Käsebier, E.-B. Kley, A. Tünnermann, and T. Pertsch, “Thermal nonlinear effects in hybrid silica/polymer microdisks,” Opt. Lett. 35, 3351–3353 (2010).
[Crossref]

C. Schmidt, A. Chipouline, T. Käsebier, E.-B. Kley, A. Tünnermann, T. Pertsch, V. Shuvayev, and L. I. Deych, “Observation of optical coupling in microdisk resonators,” Phys. Rev. A 80, 043841 (2009).
[Crossref]

Kobayashi, N.

K. Totsuka, N. Kobayashi, and M. Tomita, “Slow light in coupled-resonator-induced transparency,” Phys. Rev. Lett. 98, 213904 (2007).
[Crossref]

Krebs, O.

A. Dousse, J. Suffczyński, A. Beveratos, O. Krebs, A. Lemaître, I. Sagnes, J. Bloch, P. Voisin, and P. Senellart, “Ultrabright source of entangled photon pairs,” Nature 466, 217–220 (2010).
[Crossref]

Lee, H.

J. Li, H. Lee, K. Y. Yang, and K. J. Vahala, “Sideband spectroscopy and dispersion measurement in microcavities,” Opt. Express 20, 26337–26344 (2012).
[Crossref]

H. Lee, T. Chen, J. Li, K. Yang, S. Jeon, O. Painter, and K. J. Vahala, “Chemically etched ultrahigh-Q wedge-resonator on a silicon chip,” Nat. Photonics 6, 369–373 (2012).
[Crossref]

I. S. Grudinin, H. Lee, O. Painter, and K. J. Vahala, “Phonon laser action in a tunable two-level system,” Phys. Rev. Lett. 104, 083901 (2010).
[Crossref]

Lee, K. H.

C. P. Michael, K. Srinivasan, T. J. Johnson, O. Painter, K. H. Lee, K. Hennessy, H. Kim, and E. Hu, “Wavelength-and material-dependent absorption in GaAs and AlGaAs microcavities,” Appl. Phys. Lett. 90, 051108 (2007).
[Crossref]

Lee, R. K.

Lei, F.

B. Peng, S. K. Özdemir, F. Lei, F. Monifi, M. Gianfreda, G. L. Long, S. Fan, F. Nori, C. M. Bender, and L. Yang, “Parity-time-symmetric whispering-gallery microcavities,” Nat. Phys. 10, 394–398 (2014).
[Crossref]

Lemaitre, A.

L. Ding, C. Baker, P. Senellart, A. Lemaitre, S. Ducci, G. Leo, and I. Favero, “High frequency GaAs nano-optomechanical disk resonator,” Phys. Rev. Lett. 105, 263903 (2010).
[Crossref]

Lemaître, A.

A. Dousse, J. Suffczyński, A. Beveratos, O. Krebs, A. Lemaître, I. Sagnes, J. Bloch, P. Voisin, and P. Senellart, “Ultrabright source of entangled photon pairs,” Nature 466, 217–220 (2010).
[Crossref]

Leo, G.

L. Ding, C. Baker, P. Senellart, A. Lemaitre, S. Ducci, G. Leo, and I. Favero, “High frequency GaAs nano-optomechanical disk resonator,” Phys. Rev. Lett. 105, 263903 (2010).
[Crossref]

Li, G.

L. Chang, X. Jiang, S. Hua, C. Yang, J. Wen, L. Jiang, G. Li, G. Wang, and M. Xiao, “Parity-time symmetry and variable optical isolation in active-passive-coupled microresonators,” Nat. Photonics 8, 524–529 (2014).
[Crossref]

C. Zheng, X. Jiang, S. Hua, L. Chang, G. Li, H. Fan, and M. Xiao, “Controllable optical analog to electromagnetically induced transparency in coupled high-Q microtoroid cavities,” Opt. Express 20, 18319–18325 (2012).
[Crossref]

Li, J.

J. Li, H. Lee, K. Y. Yang, and K. J. Vahala, “Sideband spectroscopy and dispersion measurement in microcavities,” Opt. Express 20, 26337–26344 (2012).
[Crossref]

H. Lee, T. Chen, J. Li, K. Yang, S. Jeon, O. Painter, and K. J. Vahala, “Chemically etched ultrahigh-Q wedge-resonator on a silicon chip,” Nat. Photonics 6, 369–373 (2012).
[Crossref]

Li, Q.

Lin, Q.

X. Jiang, Q. Lin, J. Rosenberg, K. Vahala, and O. Painter, “High-Q double-disk microcavities for cavity optomechanics,” Opt. Express 17, 20911–20919 (2009).
[Crossref]

Q. Lin, J. Rosenberg, X. Jiang, K. J. Vahala, and O. Painter, “Mechanical oscillation and cooling actuated by the optical gradient force,” Phys. Rev. Lett. 103, 103601 (2009).
[Crossref]

Loncar, M.

B. J. M. Hausmann, I. Bulu, V. Venkataraman, P. Deotare, and M. Lončar, “Diamond nonlinear photonics,” Nat. Photonics 8, 369–374 (2014).
[Crossref]

Long, G. L.

B. Peng, S. K. Özdemir, F. Lei, F. Monifi, M. Gianfreda, G. L. Long, S. Fan, F. Nori, C. M. Bender, and L. Yang, “Parity-time-symmetric whispering-gallery microcavities,” Nat. Phys. 10, 394–398 (2014).
[Crossref]

Majumdar, A.

A. Majumdar, A. Rundquist, M. Bajcsy, V. D. Dasika, S. R. Bank, and J. Vučković, “Design and analysis of photonic crystal coupled cavity arrays for quantum simulation,” Phys. Rev. B 86, 195312 (2012).
[Crossref]

Mappes, T.

T. Grossmann, M. Hauser, T. Beck, C. Gohn-Kreuz, M. Karl, H. Kalt, C. Vannahme, and T. Mappes, “High-Q conical polymeric microcavities,” Appl. Phys. Lett. 96, 013303 (2010).
[Crossref]

Marquardt, F.

M. Aspelmeyer, T. J. Kippenberg, and F. Marquardt, “Cavity optomechanics,” Rev. Mod. Phys. 86, 1391–1452 (2014).
[Crossref]

Melloni, A.

F. Morichetti, C. Ferrari, A. Canciamilla, and A. Melloni, “The first decade of coupled resonator optical waveguides: bringing slow light to applications,” Laser Photon. Rev. 6, 74–96 (2012).
[Crossref]

Michael, C. P.

C. P. Michael, K. Srinivasan, T. J. Johnson, O. Painter, K. H. Lee, K. Hennessy, H. Kim, and E. Hu, “Wavelength-and material-dependent absorption in GaAs and AlGaAs microcavities,” Appl. Phys. Lett. 90, 051108 (2007).
[Crossref]

Monifi, F.

B. Peng, S. K. Özdemir, F. Lei, F. Monifi, M. Gianfreda, G. L. Long, S. Fan, F. Nori, C. M. Bender, and L. Yang, “Parity-time-symmetric whispering-gallery microcavities,” Nat. Phys. 10, 394–398 (2014).
[Crossref]

Morand, A.

J.-B. Jager, V. Calvo, E. Delamadeleine, E. Hadji, P. Noé, T. Ricart, D. Bucci, and A. Morand, “High-Q silica microcavities on a chip: from microtoroid to microsphere,” Appl. Phys. Lett. 99, 181123 (2011).
[Crossref]

Morichetti, F.

F. Morichetti, C. Ferrari, A. Canciamilla, and A. Melloni, “The first decade of coupled resonator optical waveguides: bringing slow light to applications,” Laser Photon. Rev. 6, 74–96 (2012).
[Crossref]

Naweed, A.

A. Naweed, G. Farca, S. I. Shopova, and A. T. Rosenberger, “Induced transparency and absorption in coupled whispering-gallery microresonators,” Phys. Rev. A 71, 043804 (2005).
[Crossref]

Noé, P.

J.-B. Jager, V. Calvo, E. Delamadeleine, E. Hadji, P. Noé, T. Ricart, D. Bucci, and A. Morand, “High-Q silica microcavities on a chip: from microtoroid to microsphere,” Appl. Phys. Lett. 99, 181123 (2011).
[Crossref]

Nori, F.

B. Peng, S. K. Özdemir, F. Lei, F. Monifi, M. Gianfreda, G. L. Long, S. Fan, F. Nori, C. M. Bender, and L. Yang, “Parity-time-symmetric whispering-gallery microcavities,” Nat. Phys. 10, 394–398 (2014).
[Crossref]

Okawachi, Y.

Özdemir, S. K.

B. Peng, S. K. Özdemir, F. Lei, F. Monifi, M. Gianfreda, G. L. Long, S. Fan, F. Nori, C. M. Bender, and L. Yang, “Parity-time-symmetric whispering-gallery microcavities,” Nat. Phys. 10, 394–398 (2014).
[Crossref]

Painter, O.

H. Lee, T. Chen, J. Li, K. Yang, S. Jeon, O. Painter, and K. J. Vahala, “Chemically etched ultrahigh-Q wedge-resonator on a silicon chip,” Nat. Photonics 6, 369–373 (2012).
[Crossref]

I. S. Grudinin, H. Lee, O. Painter, and K. J. Vahala, “Phonon laser action in a tunable two-level system,” Phys. Rev. Lett. 104, 083901 (2010).
[Crossref]

X. Jiang, Q. Lin, J. Rosenberg, K. Vahala, and O. Painter, “High-Q double-disk microcavities for cavity optomechanics,” Opt. Express 17, 20911–20919 (2009).
[Crossref]

Q. Lin, J. Rosenberg, X. Jiang, K. J. Vahala, and O. Painter, “Mechanical oscillation and cooling actuated by the optical gradient force,” Phys. Rev. Lett. 103, 103601 (2009).
[Crossref]

C. P. Michael, K. Srinivasan, T. J. Johnson, O. Painter, K. H. Lee, K. Hennessy, H. Kim, and E. Hu, “Wavelength-and material-dependent absorption in GaAs and AlGaAs microcavities,” Appl. Phys. Lett. 90, 051108 (2007).
[Crossref]

M. Borselli, T. J. Johnson, and O. Painter, “Beyond the Rayleigh scattering limit in high-Q silicon microdisks: theory and experiment,” Opt. Express 13, 1515–1530 (2005).
[Crossref]

M. Cai, O. Painter, and K. J. Vahala, “Observation of critical coupling in a fiber taper to a silica-microsphere whispering-gallery mode system,” Phys. Rev. Lett. 85, 74–77 (2000).
[Crossref]

Peng, B.

B. Peng, S. K. Özdemir, F. Lei, F. Monifi, M. Gianfreda, G. L. Long, S. Fan, F. Nori, C. M. Bender, and L. Yang, “Parity-time-symmetric whispering-gallery microcavities,” Nat. Phys. 10, 394–398 (2014).
[Crossref]

Pertsch, T.

C. Schmidt, A. Chipouline, T. Käsebier, E.-B. Kley, A. Tünnermann, and T. Pertsch, “Thermal nonlinear effects in hybrid silica/polymer microdisks,” Opt. Lett. 35, 3351–3353 (2010).
[Crossref]

C. Schmidt, A. Chipouline, T. Käsebier, E.-B. Kley, A. Tünnermann, T. Pertsch, V. Shuvayev, and L. I. Deych, “Observation of optical coupling in microdisk resonators,” Phys. Rev. A 80, 043841 (2009).
[Crossref]

Polman, A.

T. J. Kippenberg, J. Kalkman, A. Polman, and K. J. Vahala, “Demonstration of an erbium-doped microdisk laser on a silicon chip,” Phys. Rev. A 74, 051802 (2006).
[Crossref]

Rabiei, P.

Ricart, T.

J.-B. Jager, V. Calvo, E. Delamadeleine, E. Hadji, P. Noé, T. Ricart, D. Bucci, and A. Morand, “High-Q silica microcavities on a chip: from microtoroid to microsphere,” Appl. Phys. Lett. 99, 181123 (2011).
[Crossref]

Riemensberger, J.

T. Herr, K. Hartinger, J. Riemensberger, C. Y. Wang, E. Gavartin, R. Holzwarth, M. L. Gorodetsky, and T. J. Kippenberg, “Universal formation dynamics and noise of Kerr-frequency combs in microresonators,” Nat. Photonics 6, 480–487 (2012).
[Crossref]

Rosenberg, J.

X. Jiang, Q. Lin, J. Rosenberg, K. Vahala, and O. Painter, “High-Q double-disk microcavities for cavity optomechanics,” Opt. Express 17, 20911–20919 (2009).
[Crossref]

Q. Lin, J. Rosenberg, X. Jiang, K. J. Vahala, and O. Painter, “Mechanical oscillation and cooling actuated by the optical gradient force,” Phys. Rev. Lett. 103, 103601 (2009).
[Crossref]

Rosenberger, A. T.

A. Naweed, G. Farca, S. I. Shopova, and A. T. Rosenberger, “Induced transparency and absorption in coupled whispering-gallery microresonators,” Phys. Rev. A 71, 043804 (2005).
[Crossref]

Rundquist, A.

A. Majumdar, A. Rundquist, M. Bajcsy, V. D. Dasika, S. R. Bank, and J. Vučković, “Design and analysis of photonic crystal coupled cavity arrays for quantum simulation,” Phys. Rev. B 86, 195312 (2012).
[Crossref]

Sagnes, I.

A. Dousse, J. Suffczyński, A. Beveratos, O. Krebs, A. Lemaître, I. Sagnes, J. Bloch, P. Voisin, and P. Senellart, “Ultrabright source of entangled photon pairs,” Nature 466, 217–220 (2010).
[Crossref]

Scherer, A.

Schmidt, C.

C. Schmidt, A. Chipouline, T. Käsebier, E.-B. Kley, A. Tünnermann, and T. Pertsch, “Thermal nonlinear effects in hybrid silica/polymer microdisks,” Opt. Lett. 35, 3351–3353 (2010).
[Crossref]

C. Schmidt, A. Chipouline, T. Käsebier, E.-B. Kley, A. Tünnermann, T. Pertsch, V. Shuvayev, and L. I. Deych, “Observation of optical coupling in microdisk resonators,” Phys. Rev. A 80, 043841 (2009).
[Crossref]

Senellart, P.

A. Dousse, J. Suffczyński, A. Beveratos, O. Krebs, A. Lemaître, I. Sagnes, J. Bloch, P. Voisin, and P. Senellart, “Ultrabright source of entangled photon pairs,” Nature 466, 217–220 (2010).
[Crossref]

L. Ding, C. Baker, P. Senellart, A. Lemaitre, S. Ducci, G. Leo, and I. Favero, “High frequency GaAs nano-optomechanical disk resonator,” Phys. Rev. Lett. 105, 263903 (2010).
[Crossref]

Shaw, M. J.

Shopova, S. I.

A. Naweed, G. Farca, S. I. Shopova, and A. T. Rosenberger, “Induced transparency and absorption in coupled whispering-gallery microresonators,” Phys. Rev. A 71, 043804 (2005).
[Crossref]

Shuvayev, V.

C. Schmidt, A. Chipouline, T. Käsebier, E.-B. Kley, A. Tünnermann, T. Pertsch, V. Shuvayev, and L. I. Deych, “Observation of optical coupling in microdisk resonators,” Phys. Rev. A 80, 043841 (2009).
[Crossref]

Sodagar, M.

Spillane, S. M.

T. J. Kippenberg, S. M. Spillane, and K. J. Vahala, “Kerr-nonlinearity optical parametric oscillation in an ultrahigh-Q toroid microcavity,” Phys. Rev. Lett. 93, 083904 (2004).
[Crossref]

D. K. Armani, T. J. Kippenberg, S. M. Spillane, and K. J. Vahala, “Ultra-high-Q toroid microcavity on a chip,” Nature 421, 925–928 (2003).
[Crossref]

T. J. Kippenberg, S. M. Spillane, and K. J. Vahala, “Modal coupling in traveling-wave resonators,” Opt. Lett. 27, 1669–1671 (2002).
[Crossref]

Srinivasan, K.

C. P. Michael, K. Srinivasan, T. J. Johnson, O. Painter, K. H. Lee, K. Hennessy, H. Kim, and E. Hu, “Wavelength-and material-dependent absorption in GaAs and AlGaAs microcavities,” Appl. Phys. Lett. 90, 051108 (2007).
[Crossref]

Steier, W. H.

Suffczynski, J.

A. Dousse, J. Suffczyński, A. Beveratos, O. Krebs, A. Lemaître, I. Sagnes, J. Bloch, P. Voisin, and P. Senellart, “Ultrabright source of entangled photon pairs,” Nature 466, 217–220 (2010).
[Crossref]

Timurdogan, E.

Tomita, M.

K. Totsuka, N. Kobayashi, and M. Tomita, “Slow light in coupled-resonator-induced transparency,” Phys. Rev. Lett. 98, 213904 (2007).
[Crossref]

Totsuka, K.

K. Totsuka, N. Kobayashi, and M. Tomita, “Slow light in coupled-resonator-induced transparency,” Phys. Rev. Lett. 98, 213904 (2007).
[Crossref]

Tünnermann, A.

C. Schmidt, A. Chipouline, T. Käsebier, E.-B. Kley, A. Tünnermann, and T. Pertsch, “Thermal nonlinear effects in hybrid silica/polymer microdisks,” Opt. Lett. 35, 3351–3353 (2010).
[Crossref]

C. Schmidt, A. Chipouline, T. Käsebier, E.-B. Kley, A. Tünnermann, T. Pertsch, V. Shuvayev, and L. I. Deych, “Observation of optical coupling in microdisk resonators,” Phys. Rev. A 80, 043841 (2009).
[Crossref]

Vahala, K.

Vahala, K. J.

H. Lee, T. Chen, J. Li, K. Yang, S. Jeon, O. Painter, and K. J. Vahala, “Chemically etched ultrahigh-Q wedge-resonator on a silicon chip,” Nat. Photonics 6, 369–373 (2012).
[Crossref]

J. Li, H. Lee, K. Y. Yang, and K. J. Vahala, “Sideband spectroscopy and dispersion measurement in microcavities,” Opt. Express 20, 26337–26344 (2012).
[Crossref]

I. S. Grudinin, H. Lee, O. Painter, and K. J. Vahala, “Phonon laser action in a tunable two-level system,” Phys. Rev. Lett. 104, 083901 (2010).
[Crossref]

Q. Lin, J. Rosenberg, X. Jiang, K. J. Vahala, and O. Painter, “Mechanical oscillation and cooling actuated by the optical gradient force,” Phys. Rev. Lett. 103, 103601 (2009).
[Crossref]

T. J. Kippenberg, J. Kalkman, A. Polman, and K. J. Vahala, “Demonstration of an erbium-doped microdisk laser on a silicon chip,” Phys. Rev. A 74, 051802 (2006).
[Crossref]

T. J. Kippenberg, S. M. Spillane, and K. J. Vahala, “Kerr-nonlinearity optical parametric oscillation in an ultrahigh-Q toroid microcavity,” Phys. Rev. Lett. 93, 083904 (2004).
[Crossref]

D. K. Armani, T. J. Kippenberg, S. M. Spillane, and K. J. Vahala, “Ultra-high-Q toroid microcavity on a chip,” Nature 421, 925–928 (2003).
[Crossref]

K. J. Vahala, “Optical microcavities,” Nature 424, 839–846 (2003).
[Crossref]

T. J. Kippenberg, S. M. Spillane, and K. J. Vahala, “Modal coupling in traveling-wave resonators,” Opt. Lett. 27, 1669–1671 (2002).
[Crossref]

M. Cai, O. Painter, and K. J. Vahala, “Observation of critical coupling in a fiber taper to a silica-microsphere whispering-gallery mode system,” Phys. Rev. Lett. 85, 74–77 (2000).
[Crossref]

Vannahme, C.

T. Grossmann, M. Hauser, T. Beck, C. Gohn-Kreuz, M. Karl, H. Kalt, C. Vannahme, and T. Mappes, “High-Q conical polymeric microcavities,” Appl. Phys. Lett. 96, 013303 (2010).
[Crossref]

Venkataraman, V.

B. J. M. Hausmann, I. Bulu, V. Venkataraman, P. Deotare, and M. Lončar, “Diamond nonlinear photonics,” Nat. Photonics 8, 369–374 (2014).
[Crossref]

Voisin, P.

A. Dousse, J. Suffczyński, A. Beveratos, O. Krebs, A. Lemaître, I. Sagnes, J. Bloch, P. Voisin, and P. Senellart, “Ultrabright source of entangled photon pairs,” Nature 466, 217–220 (2010).
[Crossref]

Vuckovic, J.

A. Majumdar, A. Rundquist, M. Bajcsy, V. D. Dasika, S. R. Bank, and J. Vučković, “Design and analysis of photonic crystal coupled cavity arrays for quantum simulation,” Phys. Rev. B 86, 195312 (2012).
[Crossref]

Wang, C. Y.

T. Herr, K. Hartinger, J. Riemensberger, C. Y. Wang, E. Gavartin, R. Holzwarth, M. L. Gorodetsky, and T. J. Kippenberg, “Universal formation dynamics and noise of Kerr-frequency combs in microresonators,” Nat. Photonics 6, 480–487 (2012).
[Crossref]

Wang, G.

L. Chang, X. Jiang, S. Hua, C. Yang, J. Wen, L. Jiang, G. Li, G. Wang, and M. Xiao, “Parity-time symmetry and variable optical isolation in active-passive-coupled microresonators,” Nat. Photonics 8, 524–529 (2014).
[Crossref]

Watts, M. R.

Wen, J.

L. Chang, X. Jiang, S. Hua, C. Yang, J. Wen, L. Jiang, G. Li, G. Wang, and M. Xiao, “Parity-time symmetry and variable optical isolation in active-passive-coupled microresonators,” Nat. Photonics 8, 524–529 (2014).
[Crossref]

Wright, J. B.

Xia, Z.

Xiao, M.

L. Chang, X. Jiang, S. Hua, C. Yang, J. Wen, L. Jiang, G. Li, G. Wang, and M. Xiao, “Parity-time symmetry and variable optical isolation in active-passive-coupled microresonators,” Nat. Photonics 8, 524–529 (2014).
[Crossref]

C. Zheng, X. Jiang, S. Hua, L. Chang, G. Li, H. Fan, and M. Xiao, “Controllable optical analog to electromagnetically induced transparency in coupled high-Q microtoroid cavities,” Opt. Express 20, 18319–18325 (2012).
[Crossref]

Xu, Y.

Yang, C.

L. Chang, X. Jiang, S. Hua, C. Yang, J. Wen, L. Jiang, G. Li, G. Wang, and M. Xiao, “Parity-time symmetry and variable optical isolation in active-passive-coupled microresonators,” Nat. Photonics 8, 524–529 (2014).
[Crossref]

Yang, K.

H. Lee, T. Chen, J. Li, K. Yang, S. Jeon, O. Painter, and K. J. Vahala, “Chemically etched ultrahigh-Q wedge-resonator on a silicon chip,” Nat. Photonics 6, 369–373 (2012).
[Crossref]

Yang, K. Y.

Yang, L.

B. Peng, S. K. Özdemir, F. Lei, F. Monifi, M. Gianfreda, G. L. Long, S. Fan, F. Nori, C. M. Bender, and L. Yang, “Parity-time-symmetric whispering-gallery microcavities,” Nat. Phys. 10, 394–398 (2014).
[Crossref]

Yariv, A.

Yu, N.

Y. K. Chembo and N. Yu, “Modal expansion approach to optical-frequency-comb generation with monolithic whispering-gallery-mode resonators,” Phys. Rev. A 82, 033801 (2010).
[Crossref]

Zhang, C.

Zheng, C.

Appl. Phys. Lett. (3)

J.-B. Jager, V. Calvo, E. Delamadeleine, E. Hadji, P. Noé, T. Ricart, D. Bucci, and A. Morand, “High-Q silica microcavities on a chip: from microtoroid to microsphere,” Appl. Phys. Lett. 99, 181123 (2011).
[Crossref]

C. P. Michael, K. Srinivasan, T. J. Johnson, O. Painter, K. H. Lee, K. Hennessy, H. Kim, and E. Hu, “Wavelength-and material-dependent absorption in GaAs and AlGaAs microcavities,” Appl. Phys. Lett. 90, 051108 (2007).
[Crossref]

T. Grossmann, M. Hauser, T. Beck, C. Gohn-Kreuz, M. Karl, H. Kalt, C. Vannahme, and T. Mappes, “High-Q conical polymeric microcavities,” Appl. Phys. Lett. 96, 013303 (2010).
[Crossref]

J. Lightwave Technol. (1)

Laser Photon. Rev. (1)

F. Morichetti, C. Ferrari, A. Canciamilla, and A. Melloni, “The first decade of coupled resonator optical waveguides: bringing slow light to applications,” Laser Photon. Rev. 6, 74–96 (2012).
[Crossref]

Nat. Photonics (4)

L. Chang, X. Jiang, S. Hua, C. Yang, J. Wen, L. Jiang, G. Li, G. Wang, and M. Xiao, “Parity-time symmetry and variable optical isolation in active-passive-coupled microresonators,” Nat. Photonics 8, 524–529 (2014).
[Crossref]

H. Lee, T. Chen, J. Li, K. Yang, S. Jeon, O. Painter, and K. J. Vahala, “Chemically etched ultrahigh-Q wedge-resonator on a silicon chip,” Nat. Photonics 6, 369–373 (2012).
[Crossref]

B. J. M. Hausmann, I. Bulu, V. Venkataraman, P. Deotare, and M. Lončar, “Diamond nonlinear photonics,” Nat. Photonics 8, 369–374 (2014).
[Crossref]

T. Herr, K. Hartinger, J. Riemensberger, C. Y. Wang, E. Gavartin, R. Holzwarth, M. L. Gorodetsky, and T. J. Kippenberg, “Universal formation dynamics and noise of Kerr-frequency combs in microresonators,” Nat. Photonics 6, 480–487 (2012).
[Crossref]

Nat. Phys. (1)

B. Peng, S. K. Özdemir, F. Lei, F. Monifi, M. Gianfreda, G. L. Long, S. Fan, F. Nori, C. M. Bender, and L. Yang, “Parity-time-symmetric whispering-gallery microcavities,” Nat. Phys. 10, 394–398 (2014).
[Crossref]

Nature (3)

D. K. Armani, T. J. Kippenberg, S. M. Spillane, and K. J. Vahala, “Ultra-high-Q toroid microcavity on a chip,” Nature 421, 925–928 (2003).
[Crossref]

K. J. Vahala, “Optical microcavities,” Nature 424, 839–846 (2003).
[Crossref]

A. Dousse, J. Suffczyński, A. Beveratos, O. Krebs, A. Lemaître, I. Sagnes, J. Bloch, P. Voisin, and P. Senellart, “Ultrabright source of entangled photon pairs,” Nature 466, 217–220 (2010).
[Crossref]

Opt. Express (6)

Opt. Lett. (4)

Phys. Rev. A (4)

A. Naweed, G. Farca, S. I. Shopova, and A. T. Rosenberger, “Induced transparency and absorption in coupled whispering-gallery microresonators,” Phys. Rev. A 71, 043804 (2005).
[Crossref]

T. J. Kippenberg, J. Kalkman, A. Polman, and K. J. Vahala, “Demonstration of an erbium-doped microdisk laser on a silicon chip,” Phys. Rev. A 74, 051802 (2006).
[Crossref]

Y. K. Chembo and N. Yu, “Modal expansion approach to optical-frequency-comb generation with monolithic whispering-gallery-mode resonators,” Phys. Rev. A 82, 033801 (2010).
[Crossref]

C. Schmidt, A. Chipouline, T. Käsebier, E.-B. Kley, A. Tünnermann, T. Pertsch, V. Shuvayev, and L. I. Deych, “Observation of optical coupling in microdisk resonators,” Phys. Rev. A 80, 043841 (2009).
[Crossref]

Phys. Rev. B (1)

A. Majumdar, A. Rundquist, M. Bajcsy, V. D. Dasika, S. R. Bank, and J. Vučković, “Design and analysis of photonic crystal coupled cavity arrays for quantum simulation,” Phys. Rev. B 86, 195312 (2012).
[Crossref]

Phys. Rev. Lett. (6)

I. S. Grudinin, H. Lee, O. Painter, and K. J. Vahala, “Phonon laser action in a tunable two-level system,” Phys. Rev. Lett. 104, 083901 (2010).
[Crossref]

K. Totsuka, N. Kobayashi, and M. Tomita, “Slow light in coupled-resonator-induced transparency,” Phys. Rev. Lett. 98, 213904 (2007).
[Crossref]

Q. Lin, J. Rosenberg, X. Jiang, K. J. Vahala, and O. Painter, “Mechanical oscillation and cooling actuated by the optical gradient force,” Phys. Rev. Lett. 103, 103601 (2009).
[Crossref]

M. Cai, O. Painter, and K. J. Vahala, “Observation of critical coupling in a fiber taper to a silica-microsphere whispering-gallery mode system,” Phys. Rev. Lett. 85, 74–77 (2000).
[Crossref]

L. Ding, C. Baker, P. Senellart, A. Lemaitre, S. Ducci, G. Leo, and I. Favero, “High frequency GaAs nano-optomechanical disk resonator,” Phys. Rev. Lett. 105, 263903 (2010).
[Crossref]

T. J. Kippenberg, S. M. Spillane, and K. J. Vahala, “Kerr-nonlinearity optical parametric oscillation in an ultrahigh-Q toroid microcavity,” Phys. Rev. Lett. 93, 083904 (2004).
[Crossref]

Rev. Mod. Phys. (1)

M. Aspelmeyer, T. J. Kippenberg, and F. Marquardt, “Cavity optomechanics,” Rev. Mod. Phys. 86, 1391–1452 (2014).
[Crossref]

Cited By

OSA participates in Crossref's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Figures (5)

Fig. 1.
Fig. 1. Fabrication process of the silica microdisk resonator. (a) Photolithography to pattern the photoresist onto a silicon oxide layer. (b) Reactive ion etching to transfer the pattern of the photoresist into the silicon oxide layer. (c) Remove the residual photoresist using photoresist remover and H 2 SO 4 / H 2 O 2 solution. (d) Undercut the silica microdisk resonator using XeF 2 dry etching to form a silicon pillar.
Fig. 2.
Fig. 2. (a) Side-view SEM image of a silica microdisk resonator with a wedge angle of 59°. (b)–(e) Close-view SEM images of the silica microdisk resonators with wedge angles of 59°, 63°, 70°, and 79°, respectively. The diameter and the thickness of the microdisk resonators are 80 and 2 μm, respectively.
Fig. 3.
Fig. 3. (a) Normalized transmission spectrum of a fundamental TE-like mode from a 2-μm-thick silica microdisk resonator with the wedge angle of 59°. (b) Detailed scan spectrum of the high- Q cavity mode at the wavelength of 1550.4 nm .
Fig. 4.
Fig. 4. Experimentally realized quality factors of the silica microdisk resonators with different wedge angles. The diameter and the thickness of the microdisk resonators are kept to 80 and 2 μm, respectively.
Fig. 5.
Fig. 5. Simulated group velocity dispersion as a function of wavelength for the fundamental TE-like mode of the silica microdisk resonators with wedge angles of 30°, 59°, and 79°. The diameter and the thickness of the microdisk resonators are kept to 80 and 2 μm, respectively.

Metrics