Abstract

We present a method to fabricate high precision 3D micro-optical components in single crystal diamond, and we demonstrate and experimentally characterize Fresnel microlens arrays and blazed diffraction gratings. The fabrication process is based on high-resolution 3D dip-in laser lithography and pattern transfer by chlorine-based reactive ion etching with a low diamond:photoresist selectivity (1:15) to obtain smooth etched surfaces with Ra < 2 nm. The fabricated microlenses have a focal length that deviates by 4% from the target value, while the blazed diffraction gratings have a maximum relative efficiency of 66% in the first order.

© 2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

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    [Crossref]
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    [Crossref]
  22. A. Toros, M. Kiss, T. Graziosi, H. Sattari, P. Gallo, and N. Quack, “Precision micro-mechanical components in single crystal diamond by deep reactive ion etching,” Microsyst. Nanoeng. 4(1), 12 (2018).
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2019 (3)

T.-Y. Huang, R. R. Grote, S. A. Mann, D. A. Hopper, A. L. Exarhos, G. G. Lopez, G. R. Kaighn, E. C. Garnett, and L. C. Bassett, “A monolithic immersion metalens for imaging solid-state quantum emitters,” Nat. Commun. 10(1), 2392 (2019).
[Crossref]

X.-Q. Liu, S.-N. Yang, Y.-L. Sun, L. Yu, B.-F. Bai, Q.-D. Chen, and H.-B. Sun, “Ultra-smooth micro-optical components of various geometries,” Opt. Lett. 44(10), 2454 (2019).
[Crossref]

S. Mi, A. Toros, T. Graziosi, and N. Quack, “Non-contact polishing of single crystal diamond by ion beam etching,” Diamond Relat. Mater. 92, 248–252 (2019).
[Crossref]

2018 (2)

G. Seniutinas, A. Weber, C. Padeste, I. Sakellari, M. Farsari, and C. David, “Beyond 100 nm resolution in 3D laser lithography — Post processing solutions,” Microelectron. Eng. 191, 25–31 (2018).
[Crossref]

A. Toros, M. Kiss, T. Graziosi, H. Sattari, P. Gallo, and N. Quack, “Precision micro-mechanical components in single crystal diamond by deep reactive ion etching,” Microsyst. Nanoeng. 4(1), 12 (2018).
[Crossref]

2017 (3)

2016 (1)

H. Liu, S. Reilly, J. Herrnsdorf, E. Xie, V. G. Savitski, A. J. Kemp, E. Gu, and M. D. Dawson, “Large radius of curvature micro-lenses on single crystal diamond for application in monolithic diamond Raman lasers,” Diamond Relat. Mater. 65, 37–41 (2016).
[Crossref]

2015 (1)

B. Hensen, H. Bernien, A. E. Dréau, A. Reiserer, N. Kalb, M. S. Blok, J. Ruitenberg, R. F. L. Vermeulen, R. N. Schouten, C. Abellán, W. Amaya, V. Pruneri, M. W. Mitchell, M. Markham, D. J. Twitchen, D. Elkouss, S. Wehner, T. H. Taminiau, and R. Hanson, “Loophole-free Bell inequality violation using electron spins separated by 1.3 kilometres,” Nature 526(7575), 682–686 (2015).
[Crossref]

2014 (2)

L. Rondin, J.-P. Tetienne, T. Hingant, J.-F. Roch, P. Maletinsky, and V. Jacques, “Magnetometry with nitrogen-vacancy defects in diamond,” Rep. Prog. Phys. 77(5), 056503 (2014).
[Crossref]

M. Jamali, I. Gerhardt, M. Rezai, K. Frenner, H. Fedder, and J. Wrachtrup, “Microscopic diamond solid-immersion-lenses fabricated around single defect centers by focused ion beam milling,” Rev. Sci. Instrum. 85(12), 123703 (2014).
[Crossref]

2013 (2)

P. Forsberg and M. Karlsson, “Inclined surfaces in diamond: broadband antireflective structures and coupling light through waveguides,” Opt. Express 21(3), 2693–2700 (2013).
[Crossref]

H. Bernien, B. Hensen, W. Pfaff, G. Koolstra, M. S. Blok, L. Robledo, T. H. Taminiau, M. Markham, D. J. Twitchen, L. Childress, and R. Hanson, “Heralded entanglement between solid-state qubits separated by three metres,” Nature 497(7447), 86–90 (2013).
[Crossref]

2011 (1)

C. David, S. Gorelick, S. Rutishauser, J. Krzywinski, J. Vila-Comamala, V. A. Guzenko, O. Bunk, E. Färm, M. Ritala, M. Cammarata, D. M. Fritz, R. Barrett, L. Samoylova, J. Grünert, and H. Sinn, “Nanofocusing of hard X-ray free electron laser pulses using diamond based Fresnel zone plates,” Sci. Rep. 1(1), 57 (2011).
[Crossref]

2010 (1)

C. L. Lee, M. D. Dawson, and E. Gu, “Diamond double-sided micro-lenses and reflection gratings,” Opt. Mater. 32(9), 1123–1129 (2010).
[Crossref]

2008 (1)

G. Balasubramanian, I. Y. Chan, R. Kolesov, M. Al-Hmoud, J. Tisler, C. Shin, C. Kim, A. Wojcik, P. R. Hemmer, A. Krueger, T. Hanke, A. Leitenstorfer, R. Bratschitsch, F. Jelezko, and J. Wrachtrup, “Nanoscale imaging magnetometry with diamond spins under ambient conditions,” Nature 455(7213), 648–651 (2008).
[Crossref]

2007 (1)

C. L. Lee, E. Gu, and M. D. Dawson, “Micro-cylindrical and micro-ring lenses in CVD diamond,” Diamond Relat. Mater. 16(4-7), 944–948 (2007).
[Crossref]

2006 (1)

C. L. Lee, H. W. Choi, E. Gu, M. D. Dawson, and H. Murphy, “Fabrication and characterization of diamond micro-optics,” Diamond Relat. Mater. 15(4-8), 725–728 (2006).
[Crossref]

2001 (1)

Abellán, C.

B. Hensen, H. Bernien, A. E. Dréau, A. Reiserer, N. Kalb, M. S. Blok, J. Ruitenberg, R. F. L. Vermeulen, R. N. Schouten, C. Abellán, W. Amaya, V. Pruneri, M. W. Mitchell, M. Markham, D. J. Twitchen, D. Elkouss, S. Wehner, T. H. Taminiau, and R. Hanson, “Loophole-free Bell inequality violation using electron spins separated by 1.3 kilometres,” Nature 526(7575), 682–686 (2015).
[Crossref]

Al-Hmoud, M.

G. Balasubramanian, I. Y. Chan, R. Kolesov, M. Al-Hmoud, J. Tisler, C. Shin, C. Kim, A. Wojcik, P. R. Hemmer, A. Krueger, T. Hanke, A. Leitenstorfer, R. Bratschitsch, F. Jelezko, and J. Wrachtrup, “Nanoscale imaging magnetometry with diamond spins under ambient conditions,” Nature 455(7213), 648–651 (2008).
[Crossref]

Amaya, W.

B. Hensen, H. Bernien, A. E. Dréau, A. Reiserer, N. Kalb, M. S. Blok, J. Ruitenberg, R. F. L. Vermeulen, R. N. Schouten, C. Abellán, W. Amaya, V. Pruneri, M. W. Mitchell, M. Markham, D. J. Twitchen, D. Elkouss, S. Wehner, T. H. Taminiau, and R. Hanson, “Loophole-free Bell inequality violation using electron spins separated by 1.3 kilometres,” Nature 526(7575), 682–686 (2015).
[Crossref]

Bai, B.-F.

Balasubramanian, G.

G. Balasubramanian, I. Y. Chan, R. Kolesov, M. Al-Hmoud, J. Tisler, C. Shin, C. Kim, A. Wojcik, P. R. Hemmer, A. Krueger, T. Hanke, A. Leitenstorfer, R. Bratschitsch, F. Jelezko, and J. Wrachtrup, “Nanoscale imaging magnetometry with diamond spins under ambient conditions,” Nature 455(7213), 648–651 (2008).
[Crossref]

Barrett, R.

C. David, S. Gorelick, S. Rutishauser, J. Krzywinski, J. Vila-Comamala, V. A. Guzenko, O. Bunk, E. Färm, M. Ritala, M. Cammarata, D. M. Fritz, R. Barrett, L. Samoylova, J. Grünert, and H. Sinn, “Nanofocusing of hard X-ray free electron laser pulses using diamond based Fresnel zone plates,” Sci. Rep. 1(1), 57 (2011).
[Crossref]

Bassett, L. C.

T.-Y. Huang, R. R. Grote, S. A. Mann, D. A. Hopper, A. L. Exarhos, G. G. Lopez, G. R. Kaighn, E. C. Garnett, and L. C. Bassett, “A monolithic immersion metalens for imaging solid-state quantum emitters,” Nat. Commun. 10(1), 2392 (2019).
[Crossref]

Bernien, H.

B. Hensen, H. Bernien, A. E. Dréau, A. Reiserer, N. Kalb, M. S. Blok, J. Ruitenberg, R. F. L. Vermeulen, R. N. Schouten, C. Abellán, W. Amaya, V. Pruneri, M. W. Mitchell, M. Markham, D. J. Twitchen, D. Elkouss, S. Wehner, T. H. Taminiau, and R. Hanson, “Loophole-free Bell inequality violation using electron spins separated by 1.3 kilometres,” Nature 526(7575), 682–686 (2015).
[Crossref]

H. Bernien, B. Hensen, W. Pfaff, G. Koolstra, M. S. Blok, L. Robledo, T. H. Taminiau, M. Markham, D. J. Twitchen, L. Childress, and R. Hanson, “Heralded entanglement between solid-state qubits separated by three metres,” Nature 497(7447), 86–90 (2013).
[Crossref]

Blok, M. S.

B. Hensen, H. Bernien, A. E. Dréau, A. Reiserer, N. Kalb, M. S. Blok, J. Ruitenberg, R. F. L. Vermeulen, R. N. Schouten, C. Abellán, W. Amaya, V. Pruneri, M. W. Mitchell, M. Markham, D. J. Twitchen, D. Elkouss, S. Wehner, T. H. Taminiau, and R. Hanson, “Loophole-free Bell inequality violation using electron spins separated by 1.3 kilometres,” Nature 526(7575), 682–686 (2015).
[Crossref]

H. Bernien, B. Hensen, W. Pfaff, G. Koolstra, M. S. Blok, L. Robledo, T. H. Taminiau, M. Markham, D. J. Twitchen, L. Childress, and R. Hanson, “Heralded entanglement between solid-state qubits separated by three metres,” Nature 497(7447), 86–90 (2013).
[Crossref]

Bratschitsch, R.

G. Balasubramanian, I. Y. Chan, R. Kolesov, M. Al-Hmoud, J. Tisler, C. Shin, C. Kim, A. Wojcik, P. R. Hemmer, A. Krueger, T. Hanke, A. Leitenstorfer, R. Bratschitsch, F. Jelezko, and J. Wrachtrup, “Nanoscale imaging magnetometry with diamond spins under ambient conditions,” Nature 455(7213), 648–651 (2008).
[Crossref]

Brink, D.

C. Holly, M. Traub, D. Hoffmann, C. Widmann, D. Brink, C. Nebel, T. Gotthardt, M. C. Sözbir, and C. Wenzel, “Monocrystalline CVD-diamond optics for high-power laser applications,” in F. Dorsch and S. Kaierle, eds. (2016), p. 974104.

Bu, R.

T.-F. Zhu, J. Fu, F. Lin, M. Zhang, W. Wang, F. Wen, X. Zhang, R. Bu, J. Zhang, J. Zhu, J. Wang, H.-X. Wang, and X. Hou, “Fabrication of diamond microlens arrays for monolithic imaging homogenizer,” Diamond Relat. Mater. 80, 54–58 (2017).
[Crossref]

T.-F. Zhu, J. Fu, W. Wang, F. Wen, J. Zhang, R. Bu, M. Ma, and H.-X. Wang, “Fabrication of diamond microlenses by chemical reflow method,” Opt. Express 25(2), 1185 (2017).
[Crossref]

Bunk, O.

C. David, S. Gorelick, S. Rutishauser, J. Krzywinski, J. Vila-Comamala, V. A. Guzenko, O. Bunk, E. Färm, M. Ritala, M. Cammarata, D. M. Fritz, R. Barrett, L. Samoylova, J. Grünert, and H. Sinn, “Nanofocusing of hard X-ray free electron laser pulses using diamond based Fresnel zone plates,” Sci. Rep. 1(1), 57 (2011).
[Crossref]

Cammarata, M.

C. David, S. Gorelick, S. Rutishauser, J. Krzywinski, J. Vila-Comamala, V. A. Guzenko, O. Bunk, E. Färm, M. Ritala, M. Cammarata, D. M. Fritz, R. Barrett, L. Samoylova, J. Grünert, and H. Sinn, “Nanofocusing of hard X-ray free electron laser pulses using diamond based Fresnel zone plates,” Sci. Rep. 1(1), 57 (2011).
[Crossref]

Chan, I. Y.

G. Balasubramanian, I. Y. Chan, R. Kolesov, M. Al-Hmoud, J. Tisler, C. Shin, C. Kim, A. Wojcik, P. R. Hemmer, A. Krueger, T. Hanke, A. Leitenstorfer, R. Bratschitsch, F. Jelezko, and J. Wrachtrup, “Nanoscale imaging magnetometry with diamond spins under ambient conditions,” Nature 455(7213), 648–651 (2008).
[Crossref]

Chen, Q.-D.

Chen, Y.

Childress, L.

H. Bernien, B. Hensen, W. Pfaff, G. Koolstra, M. S. Blok, L. Robledo, T. H. Taminiau, M. Markham, D. J. Twitchen, L. Childress, and R. Hanson, “Heralded entanglement between solid-state qubits separated by three metres,” Nature 497(7447), 86–90 (2013).
[Crossref]

Choi, H. W.

C. L. Lee, H. W. Choi, E. Gu, M. D. Dawson, and H. Murphy, “Fabrication and characterization of diamond micro-optics,” Diamond Relat. Mater. 15(4-8), 725–728 (2006).
[Crossref]

David, C.

G. Seniutinas, A. Weber, C. Padeste, I. Sakellari, M. Farsari, and C. David, “Beyond 100 nm resolution in 3D laser lithography — Post processing solutions,” Microelectron. Eng. 191, 25–31 (2018).
[Crossref]

C. David, S. Gorelick, S. Rutishauser, J. Krzywinski, J. Vila-Comamala, V. A. Guzenko, O. Bunk, E. Färm, M. Ritala, M. Cammarata, D. M. Fritz, R. Barrett, L. Samoylova, J. Grünert, and H. Sinn, “Nanofocusing of hard X-ray free electron laser pulses using diamond based Fresnel zone plates,” Sci. Rep. 1(1), 57 (2011).
[Crossref]

Dawson, M. D.

H. Liu, S. Reilly, J. Herrnsdorf, E. Xie, V. G. Savitski, A. J. Kemp, E. Gu, and M. D. Dawson, “Large radius of curvature micro-lenses on single crystal diamond for application in monolithic diamond Raman lasers,” Diamond Relat. Mater. 65, 37–41 (2016).
[Crossref]

C. L. Lee, M. D. Dawson, and E. Gu, “Diamond double-sided micro-lenses and reflection gratings,” Opt. Mater. 32(9), 1123–1129 (2010).
[Crossref]

C. L. Lee, E. Gu, and M. D. Dawson, “Micro-cylindrical and micro-ring lenses in CVD diamond,” Diamond Relat. Mater. 16(4-7), 944–948 (2007).
[Crossref]

C. L. Lee, H. W. Choi, E. Gu, M. D. Dawson, and H. Murphy, “Fabrication and characterization of diamond micro-optics,” Diamond Relat. Mater. 15(4-8), 725–728 (2006).
[Crossref]

Dréau, A. E.

B. Hensen, H. Bernien, A. E. Dréau, A. Reiserer, N. Kalb, M. S. Blok, J. Ruitenberg, R. F. L. Vermeulen, R. N. Schouten, C. Abellán, W. Amaya, V. Pruneri, M. W. Mitchell, M. Markham, D. J. Twitchen, D. Elkouss, S. Wehner, T. H. Taminiau, and R. Hanson, “Loophole-free Bell inequality violation using electron spins separated by 1.3 kilometres,” Nature 526(7575), 682–686 (2015).
[Crossref]

Elkouss, D.

B. Hensen, H. Bernien, A. E. Dréau, A. Reiserer, N. Kalb, M. S. Blok, J. Ruitenberg, R. F. L. Vermeulen, R. N. Schouten, C. Abellán, W. Amaya, V. Pruneri, M. W. Mitchell, M. Markham, D. J. Twitchen, D. Elkouss, S. Wehner, T. H. Taminiau, and R. Hanson, “Loophole-free Bell inequality violation using electron spins separated by 1.3 kilometres,” Nature 526(7575), 682–686 (2015).
[Crossref]

Exarhos, A. L.

T.-Y. Huang, R. R. Grote, S. A. Mann, D. A. Hopper, A. L. Exarhos, G. G. Lopez, G. R. Kaighn, E. C. Garnett, and L. C. Bassett, “A monolithic immersion metalens for imaging solid-state quantum emitters,” Nat. Commun. 10(1), 2392 (2019).
[Crossref]

Färm, E.

C. David, S. Gorelick, S. Rutishauser, J. Krzywinski, J. Vila-Comamala, V. A. Guzenko, O. Bunk, E. Färm, M. Ritala, M. Cammarata, D. M. Fritz, R. Barrett, L. Samoylova, J. Grünert, and H. Sinn, “Nanofocusing of hard X-ray free electron laser pulses using diamond based Fresnel zone plates,” Sci. Rep. 1(1), 57 (2011).
[Crossref]

Farsari, M.

G. Seniutinas, A. Weber, C. Padeste, I. Sakellari, M. Farsari, and C. David, “Beyond 100 nm resolution in 3D laser lithography — Post processing solutions,” Microelectron. Eng. 191, 25–31 (2018).
[Crossref]

Fedder, H.

M. Jamali, I. Gerhardt, M. Rezai, K. Frenner, H. Fedder, and J. Wrachtrup, “Microscopic diamond solid-immersion-lenses fabricated around single defect centers by focused ion beam milling,” Rev. Sci. Instrum. 85(12), 123703 (2014).
[Crossref]

Forsberg, P.

Frenner, K.

M. Jamali, I. Gerhardt, M. Rezai, K. Frenner, H. Fedder, and J. Wrachtrup, “Microscopic diamond solid-immersion-lenses fabricated around single defect centers by focused ion beam milling,” Rev. Sci. Instrum. 85(12), 123703 (2014).
[Crossref]

Fritz, D. M.

C. David, S. Gorelick, S. Rutishauser, J. Krzywinski, J. Vila-Comamala, V. A. Guzenko, O. Bunk, E. Färm, M. Ritala, M. Cammarata, D. M. Fritz, R. Barrett, L. Samoylova, J. Grünert, and H. Sinn, “Nanofocusing of hard X-ray free electron laser pulses using diamond based Fresnel zone plates,” Sci. Rep. 1(1), 57 (2011).
[Crossref]

Fu, J.

T.-F. Zhu, J. Fu, F. Lin, M. Zhang, W. Wang, F. Wen, X. Zhang, R. Bu, J. Zhang, J. Zhu, J. Wang, H.-X. Wang, and X. Hou, “Fabrication of diamond microlens arrays for monolithic imaging homogenizer,” Diamond Relat. Mater. 80, 54–58 (2017).
[Crossref]

T.-F. Zhu, J. Fu, W. Wang, F. Wen, J. Zhang, R. Bu, M. Ma, and H.-X. Wang, “Fabrication of diamond microlenses by chemical reflow method,” Opt. Express 25(2), 1185 (2017).
[Crossref]

Gallo, P.

A. Toros, M. Kiss, T. Graziosi, H. Sattari, P. Gallo, and N. Quack, “Precision micro-mechanical components in single crystal diamond by deep reactive ion etching,” Microsyst. Nanoeng. 4(1), 12 (2018).
[Crossref]

Garnett, E. C.

T.-Y. Huang, R. R. Grote, S. A. Mann, D. A. Hopper, A. L. Exarhos, G. G. Lopez, G. R. Kaighn, E. C. Garnett, and L. C. Bassett, “A monolithic immersion metalens for imaging solid-state quantum emitters,” Nat. Commun. 10(1), 2392 (2019).
[Crossref]

Gerhardt, I.

M. Jamali, I. Gerhardt, M. Rezai, K. Frenner, H. Fedder, and J. Wrachtrup, “Microscopic diamond solid-immersion-lenses fabricated around single defect centers by focused ion beam milling,” Rev. Sci. Instrum. 85(12), 123703 (2014).
[Crossref]

Gorelick, S.

C. David, S. Gorelick, S. Rutishauser, J. Krzywinski, J. Vila-Comamala, V. A. Guzenko, O. Bunk, E. Färm, M. Ritala, M. Cammarata, D. M. Fritz, R. Barrett, L. Samoylova, J. Grünert, and H. Sinn, “Nanofocusing of hard X-ray free electron laser pulses using diamond based Fresnel zone plates,” Sci. Rep. 1(1), 57 (2011).
[Crossref]

Gotthardt, T.

C. Holly, M. Traub, D. Hoffmann, C. Widmann, D. Brink, C. Nebel, T. Gotthardt, M. C. Sözbir, and C. Wenzel, “Monocrystalline CVD-diamond optics for high-power laser applications,” in F. Dorsch and S. Kaierle, eds. (2016), p. 974104.

Graziosi, T.

S. Mi, A. Toros, T. Graziosi, and N. Quack, “Non-contact polishing of single crystal diamond by ion beam etching,” Diamond Relat. Mater. 92, 248–252 (2019).
[Crossref]

A. Toros, M. Kiss, T. Graziosi, H. Sattari, P. Gallo, and N. Quack, “Precision micro-mechanical components in single crystal diamond by deep reactive ion etching,” Microsyst. Nanoeng. 4(1), 12 (2018).
[Crossref]

M. Kiss, T. Graziosi, and N. Quack, “Trapezoidal diffraction grating beam splitters in single crystal diamond,” in Components and Packaging for Laser Systems IV, A. L. Glebov and P. O. Leisher, eds. (SPIE, 2018), p. 55.

Grote, R. R.

T.-Y. Huang, R. R. Grote, S. A. Mann, D. A. Hopper, A. L. Exarhos, G. G. Lopez, G. R. Kaighn, E. C. Garnett, and L. C. Bassett, “A monolithic immersion metalens for imaging solid-state quantum emitters,” Nat. Commun. 10(1), 2392 (2019).
[Crossref]

Grünert, J.

C. David, S. Gorelick, S. Rutishauser, J. Krzywinski, J. Vila-Comamala, V. A. Guzenko, O. Bunk, E. Färm, M. Ritala, M. Cammarata, D. M. Fritz, R. Barrett, L. Samoylova, J. Grünert, and H. Sinn, “Nanofocusing of hard X-ray free electron laser pulses using diamond based Fresnel zone plates,” Sci. Rep. 1(1), 57 (2011).
[Crossref]

Gu, E.

H. Liu, S. Reilly, J. Herrnsdorf, E. Xie, V. G. Savitski, A. J. Kemp, E. Gu, and M. D. Dawson, “Large radius of curvature micro-lenses on single crystal diamond for application in monolithic diamond Raman lasers,” Diamond Relat. Mater. 65, 37–41 (2016).
[Crossref]

C. L. Lee, M. D. Dawson, and E. Gu, “Diamond double-sided micro-lenses and reflection gratings,” Opt. Mater. 32(9), 1123–1129 (2010).
[Crossref]

C. L. Lee, E. Gu, and M. D. Dawson, “Micro-cylindrical and micro-ring lenses in CVD diamond,” Diamond Relat. Mater. 16(4-7), 944–948 (2007).
[Crossref]

C. L. Lee, H. W. Choi, E. Gu, M. D. Dawson, and H. Murphy, “Fabrication and characterization of diamond micro-optics,” Diamond Relat. Mater. 15(4-8), 725–728 (2006).
[Crossref]

Guzenko, V. A.

C. David, S. Gorelick, S. Rutishauser, J. Krzywinski, J. Vila-Comamala, V. A. Guzenko, O. Bunk, E. Färm, M. Ritala, M. Cammarata, D. M. Fritz, R. Barrett, L. Samoylova, J. Grünert, and H. Sinn, “Nanofocusing of hard X-ray free electron laser pulses using diamond based Fresnel zone plates,” Sci. Rep. 1(1), 57 (2011).
[Crossref]

Hanke, T.

G. Balasubramanian, I. Y. Chan, R. Kolesov, M. Al-Hmoud, J. Tisler, C. Shin, C. Kim, A. Wojcik, P. R. Hemmer, A. Krueger, T. Hanke, A. Leitenstorfer, R. Bratschitsch, F. Jelezko, and J. Wrachtrup, “Nanoscale imaging magnetometry with diamond spins under ambient conditions,” Nature 455(7213), 648–651 (2008).
[Crossref]

Hanson, R.

B. Hensen, H. Bernien, A. E. Dréau, A. Reiserer, N. Kalb, M. S. Blok, J. Ruitenberg, R. F. L. Vermeulen, R. N. Schouten, C. Abellán, W. Amaya, V. Pruneri, M. W. Mitchell, M. Markham, D. J. Twitchen, D. Elkouss, S. Wehner, T. H. Taminiau, and R. Hanson, “Loophole-free Bell inequality violation using electron spins separated by 1.3 kilometres,” Nature 526(7575), 682–686 (2015).
[Crossref]

H. Bernien, B. Hensen, W. Pfaff, G. Koolstra, M. S. Blok, L. Robledo, T. H. Taminiau, M. Markham, D. J. Twitchen, L. Childress, and R. Hanson, “Heralded entanglement between solid-state qubits separated by three metres,” Nature 497(7447), 86–90 (2013).
[Crossref]

Hemmer, P. R.

G. Balasubramanian, I. Y. Chan, R. Kolesov, M. Al-Hmoud, J. Tisler, C. Shin, C. Kim, A. Wojcik, P. R. Hemmer, A. Krueger, T. Hanke, A. Leitenstorfer, R. Bratschitsch, F. Jelezko, and J. Wrachtrup, “Nanoscale imaging magnetometry with diamond spins under ambient conditions,” Nature 455(7213), 648–651 (2008).
[Crossref]

Hensen, B.

B. Hensen, H. Bernien, A. E. Dréau, A. Reiserer, N. Kalb, M. S. Blok, J. Ruitenberg, R. F. L. Vermeulen, R. N. Schouten, C. Abellán, W. Amaya, V. Pruneri, M. W. Mitchell, M. Markham, D. J. Twitchen, D. Elkouss, S. Wehner, T. H. Taminiau, and R. Hanson, “Loophole-free Bell inequality violation using electron spins separated by 1.3 kilometres,” Nature 526(7575), 682–686 (2015).
[Crossref]

H. Bernien, B. Hensen, W. Pfaff, G. Koolstra, M. S. Blok, L. Robledo, T. H. Taminiau, M. Markham, D. J. Twitchen, L. Childress, and R. Hanson, “Heralded entanglement between solid-state qubits separated by three metres,” Nature 497(7447), 86–90 (2013).
[Crossref]

Herrnsdorf, J.

H. Liu, S. Reilly, J. Herrnsdorf, E. Xie, V. G. Savitski, A. J. Kemp, E. Gu, and M. D. Dawson, “Large radius of curvature micro-lenses on single crystal diamond for application in monolithic diamond Raman lasers,” Diamond Relat. Mater. 65, 37–41 (2016).
[Crossref]

Hingant, T.

L. Rondin, J.-P. Tetienne, T. Hingant, J.-F. Roch, P. Maletinsky, and V. Jacques, “Magnetometry with nitrogen-vacancy defects in diamond,” Rep. Prog. Phys. 77(5), 056503 (2014).
[Crossref]

Hjort, K.

Hoffmann, D.

C. Holly, M. Traub, D. Hoffmann, C. Widmann, D. Brink, C. Nebel, T. Gotthardt, M. C. Sözbir, and C. Wenzel, “Monocrystalline CVD-diamond optics for high-power laser applications,” in F. Dorsch and S. Kaierle, eds. (2016), p. 974104.

Holly, C.

C. Holly, M. Traub, D. Hoffmann, C. Widmann, D. Brink, C. Nebel, T. Gotthardt, M. C. Sözbir, and C. Wenzel, “Monocrystalline CVD-diamond optics for high-power laser applications,” in F. Dorsch and S. Kaierle, eds. (2016), p. 974104.

Hopper, D. A.

T.-Y. Huang, R. R. Grote, S. A. Mann, D. A. Hopper, A. L. Exarhos, G. G. Lopez, G. R. Kaighn, E. C. Garnett, and L. C. Bassett, “A monolithic immersion metalens for imaging solid-state quantum emitters,” Nat. Commun. 10(1), 2392 (2019).
[Crossref]

Hou, X.

T.-F. Zhu, J. Fu, F. Lin, M. Zhang, W. Wang, F. Wen, X. Zhang, R. Bu, J. Zhang, J. Zhu, J. Wang, H.-X. Wang, and X. Hou, “Fabrication of diamond microlens arrays for monolithic imaging homogenizer,” Diamond Relat. Mater. 80, 54–58 (2017).
[Crossref]

Huang, T.-Y.

T.-Y. Huang, R. R. Grote, S. A. Mann, D. A. Hopper, A. L. Exarhos, G. G. Lopez, G. R. Kaighn, E. C. Garnett, and L. C. Bassett, “A monolithic immersion metalens for imaging solid-state quantum emitters,” Nat. Commun. 10(1), 2392 (2019).
[Crossref]

Hugonin, J. P.

J. P. Hugonin and P. Lalanne, “Reticolo software for grating analysis,” Institut d’Optique, Orsay, France (2005).

Jacques, V.

L. Rondin, J.-P. Tetienne, T. Hingant, J.-F. Roch, P. Maletinsky, and V. Jacques, “Magnetometry with nitrogen-vacancy defects in diamond,” Rep. Prog. Phys. 77(5), 056503 (2014).
[Crossref]

Jamali, M.

M. Jamali, I. Gerhardt, M. Rezai, K. Frenner, H. Fedder, and J. Wrachtrup, “Microscopic diamond solid-immersion-lenses fabricated around single defect centers by focused ion beam milling,” Rev. Sci. Instrum. 85(12), 123703 (2014).
[Crossref]

Jelezko, F.

G. Balasubramanian, I. Y. Chan, R. Kolesov, M. Al-Hmoud, J. Tisler, C. Shin, C. Kim, A. Wojcik, P. R. Hemmer, A. Krueger, T. Hanke, A. Leitenstorfer, R. Bratschitsch, F. Jelezko, and J. Wrachtrup, “Nanoscale imaging magnetometry with diamond spins under ambient conditions,” Nature 455(7213), 648–651 (2008).
[Crossref]

Kaighn, G. R.

T.-Y. Huang, R. R. Grote, S. A. Mann, D. A. Hopper, A. L. Exarhos, G. G. Lopez, G. R. Kaighn, E. C. Garnett, and L. C. Bassett, “A monolithic immersion metalens for imaging solid-state quantum emitters,” Nat. Commun. 10(1), 2392 (2019).
[Crossref]

Kalb, N.

B. Hensen, H. Bernien, A. E. Dréau, A. Reiserer, N. Kalb, M. S. Blok, J. Ruitenberg, R. F. L. Vermeulen, R. N. Schouten, C. Abellán, W. Amaya, V. Pruneri, M. W. Mitchell, M. Markham, D. J. Twitchen, D. Elkouss, S. Wehner, T. H. Taminiau, and R. Hanson, “Loophole-free Bell inequality violation using electron spins separated by 1.3 kilometres,” Nature 526(7575), 682–686 (2015).
[Crossref]

Karlsson, M.

Kemp, A. J.

H. Liu, S. Reilly, J. Herrnsdorf, E. Xie, V. G. Savitski, A. J. Kemp, E. Gu, and M. D. Dawson, “Large radius of curvature micro-lenses on single crystal diamond for application in monolithic diamond Raman lasers,” Diamond Relat. Mater. 65, 37–41 (2016).
[Crossref]

Kim, C.

G. Balasubramanian, I. Y. Chan, R. Kolesov, M. Al-Hmoud, J. Tisler, C. Shin, C. Kim, A. Wojcik, P. R. Hemmer, A. Krueger, T. Hanke, A. Leitenstorfer, R. Bratschitsch, F. Jelezko, and J. Wrachtrup, “Nanoscale imaging magnetometry with diamond spins under ambient conditions,” Nature 455(7213), 648–651 (2008).
[Crossref]

Kiss, M.

A. Toros, M. Kiss, T. Graziosi, H. Sattari, P. Gallo, and N. Quack, “Precision micro-mechanical components in single crystal diamond by deep reactive ion etching,” Microsyst. Nanoeng. 4(1), 12 (2018).
[Crossref]

M. Kiss, T. Graziosi, and N. Quack, “Trapezoidal diffraction grating beam splitters in single crystal diamond,” in Components and Packaging for Laser Systems IV, A. L. Glebov and P. O. Leisher, eds. (SPIE, 2018), p. 55.

Kolesov, R.

G. Balasubramanian, I. Y. Chan, R. Kolesov, M. Al-Hmoud, J. Tisler, C. Shin, C. Kim, A. Wojcik, P. R. Hemmer, A. Krueger, T. Hanke, A. Leitenstorfer, R. Bratschitsch, F. Jelezko, and J. Wrachtrup, “Nanoscale imaging magnetometry with diamond spins under ambient conditions,” Nature 455(7213), 648–651 (2008).
[Crossref]

Koolstra, G.

H. Bernien, B. Hensen, W. Pfaff, G. Koolstra, M. S. Blok, L. Robledo, T. H. Taminiau, M. Markham, D. J. Twitchen, L. Childress, and R. Hanson, “Heralded entanglement between solid-state qubits separated by three metres,” Nature 497(7447), 86–90 (2013).
[Crossref]

Krueger, A.

G. Balasubramanian, I. Y. Chan, R. Kolesov, M. Al-Hmoud, J. Tisler, C. Shin, C. Kim, A. Wojcik, P. R. Hemmer, A. Krueger, T. Hanke, A. Leitenstorfer, R. Bratschitsch, F. Jelezko, and J. Wrachtrup, “Nanoscale imaging magnetometry with diamond spins under ambient conditions,” Nature 455(7213), 648–651 (2008).
[Crossref]

Krzywinski, J.

C. David, S. Gorelick, S. Rutishauser, J. Krzywinski, J. Vila-Comamala, V. A. Guzenko, O. Bunk, E. Färm, M. Ritala, M. Cammarata, D. M. Fritz, R. Barrett, L. Samoylova, J. Grünert, and H. Sinn, “Nanofocusing of hard X-ray free electron laser pulses using diamond based Fresnel zone plates,” Sci. Rep. 1(1), 57 (2011).
[Crossref]

Lalanne, P.

J. P. Hugonin and P. Lalanne, “Reticolo software for grating analysis,” Institut d’Optique, Orsay, France (2005).

Lee, C. L.

C. L. Lee, M. D. Dawson, and E. Gu, “Diamond double-sided micro-lenses and reflection gratings,” Opt. Mater. 32(9), 1123–1129 (2010).
[Crossref]

C. L. Lee, E. Gu, and M. D. Dawson, “Micro-cylindrical and micro-ring lenses in CVD diamond,” Diamond Relat. Mater. 16(4-7), 944–948 (2007).
[Crossref]

C. L. Lee, H. W. Choi, E. Gu, M. D. Dawson, and H. Murphy, “Fabrication and characterization of diamond micro-optics,” Diamond Relat. Mater. 15(4-8), 725–728 (2006).
[Crossref]

Leitenstorfer, A.

G. Balasubramanian, I. Y. Chan, R. Kolesov, M. Al-Hmoud, J. Tisler, C. Shin, C. Kim, A. Wojcik, P. R. Hemmer, A. Krueger, T. Hanke, A. Leitenstorfer, R. Bratschitsch, F. Jelezko, and J. Wrachtrup, “Nanoscale imaging magnetometry with diamond spins under ambient conditions,” Nature 455(7213), 648–651 (2008).
[Crossref]

Li, Y.

Lin, F.

T.-F. Zhu, J. Fu, F. Lin, M. Zhang, W. Wang, F. Wen, X. Zhang, R. Bu, J. Zhang, J. Zhu, J. Wang, H.-X. Wang, and X. Hou, “Fabrication of diamond microlens arrays for monolithic imaging homogenizer,” Diamond Relat. Mater. 80, 54–58 (2017).
[Crossref]

Liu, H.

H. Liu, S. Reilly, J. Herrnsdorf, E. Xie, V. G. Savitski, A. J. Kemp, E. Gu, and M. D. Dawson, “Large radius of curvature micro-lenses on single crystal diamond for application in monolithic diamond Raman lasers,” Diamond Relat. Mater. 65, 37–41 (2016).
[Crossref]

Liu, L.

Liu, X.-Q.

Lopez, G. G.

T.-Y. Huang, R. R. Grote, S. A. Mann, D. A. Hopper, A. L. Exarhos, G. G. Lopez, G. R. Kaighn, E. C. Garnett, and L. C. Bassett, “A monolithic immersion metalens for imaging solid-state quantum emitters,” Nat. Commun. 10(1), 2392 (2019).
[Crossref]

Ma, M.

Maletinsky, P.

L. Rondin, J.-P. Tetienne, T. Hingant, J.-F. Roch, P. Maletinsky, and V. Jacques, “Magnetometry with nitrogen-vacancy defects in diamond,” Rep. Prog. Phys. 77(5), 056503 (2014).
[Crossref]

Mann, S. A.

T.-Y. Huang, R. R. Grote, S. A. Mann, D. A. Hopper, A. L. Exarhos, G. G. Lopez, G. R. Kaighn, E. C. Garnett, and L. C. Bassett, “A monolithic immersion metalens for imaging solid-state quantum emitters,” Nat. Commun. 10(1), 2392 (2019).
[Crossref]

Markham, M.

B. Hensen, H. Bernien, A. E. Dréau, A. Reiserer, N. Kalb, M. S. Blok, J. Ruitenberg, R. F. L. Vermeulen, R. N. Schouten, C. Abellán, W. Amaya, V. Pruneri, M. W. Mitchell, M. Markham, D. J. Twitchen, D. Elkouss, S. Wehner, T. H. Taminiau, and R. Hanson, “Loophole-free Bell inequality violation using electron spins separated by 1.3 kilometres,” Nature 526(7575), 682–686 (2015).
[Crossref]

H. Bernien, B. Hensen, W. Pfaff, G. Koolstra, M. S. Blok, L. Robledo, T. H. Taminiau, M. Markham, D. J. Twitchen, L. Childress, and R. Hanson, “Heralded entanglement between solid-state qubits separated by three metres,” Nature 497(7447), 86–90 (2013).
[Crossref]

Mi, S.

S. Mi, A. Toros, T. Graziosi, and N. Quack, “Non-contact polishing of single crystal diamond by ion beam etching,” Diamond Relat. Mater. 92, 248–252 (2019).
[Crossref]

Mitchell, M. W.

B. Hensen, H. Bernien, A. E. Dréau, A. Reiserer, N. Kalb, M. S. Blok, J. Ruitenberg, R. F. L. Vermeulen, R. N. Schouten, C. Abellán, W. Amaya, V. Pruneri, M. W. Mitchell, M. Markham, D. J. Twitchen, D. Elkouss, S. Wehner, T. H. Taminiau, and R. Hanson, “Loophole-free Bell inequality violation using electron spins separated by 1.3 kilometres,” Nature 526(7575), 682–686 (2015).
[Crossref]

Murphy, H.

C. L. Lee, H. W. Choi, E. Gu, M. D. Dawson, and H. Murphy, “Fabrication and characterization of diamond micro-optics,” Diamond Relat. Mater. 15(4-8), 725–728 (2006).
[Crossref]

Nebel, C.

C. Holly, M. Traub, D. Hoffmann, C. Widmann, D. Brink, C. Nebel, T. Gotthardt, M. C. Sözbir, and C. Wenzel, “Monocrystalline CVD-diamond optics for high-power laser applications,” in F. Dorsch and S. Kaierle, eds. (2016), p. 974104.

Nikolajeff, F.

Padeste, C.

G. Seniutinas, A. Weber, C. Padeste, I. Sakellari, M. Farsari, and C. David, “Beyond 100 nm resolution in 3D laser lithography — Post processing solutions,” Microelectron. Eng. 191, 25–31 (2018).
[Crossref]

Pfaff, W.

H. Bernien, B. Hensen, W. Pfaff, G. Koolstra, M. S. Blok, L. Robledo, T. H. Taminiau, M. Markham, D. J. Twitchen, L. Childress, and R. Hanson, “Heralded entanglement between solid-state qubits separated by three metres,” Nature 497(7447), 86–90 (2013).
[Crossref]

Pruneri, V.

B. Hensen, H. Bernien, A. E. Dréau, A. Reiserer, N. Kalb, M. S. Blok, J. Ruitenberg, R. F. L. Vermeulen, R. N. Schouten, C. Abellán, W. Amaya, V. Pruneri, M. W. Mitchell, M. Markham, D. J. Twitchen, D. Elkouss, S. Wehner, T. H. Taminiau, and R. Hanson, “Loophole-free Bell inequality violation using electron spins separated by 1.3 kilometres,” Nature 526(7575), 682–686 (2015).
[Crossref]

Quack, N.

S. Mi, A. Toros, T. Graziosi, and N. Quack, “Non-contact polishing of single crystal diamond by ion beam etching,” Diamond Relat. Mater. 92, 248–252 (2019).
[Crossref]

A. Toros, M. Kiss, T. Graziosi, H. Sattari, P. Gallo, and N. Quack, “Precision micro-mechanical components in single crystal diamond by deep reactive ion etching,” Microsyst. Nanoeng. 4(1), 12 (2018).
[Crossref]

M. Kiss, T. Graziosi, and N. Quack, “Trapezoidal diffraction grating beam splitters in single crystal diamond,” in Components and Packaging for Laser Systems IV, A. L. Glebov and P. O. Leisher, eds. (SPIE, 2018), p. 55.

Reilly, S.

H. Liu, S. Reilly, J. Herrnsdorf, E. Xie, V. G. Savitski, A. J. Kemp, E. Gu, and M. D. Dawson, “Large radius of curvature micro-lenses on single crystal diamond for application in monolithic diamond Raman lasers,” Diamond Relat. Mater. 65, 37–41 (2016).
[Crossref]

Reiserer, A.

B. Hensen, H. Bernien, A. E. Dréau, A. Reiserer, N. Kalb, M. S. Blok, J. Ruitenberg, R. F. L. Vermeulen, R. N. Schouten, C. Abellán, W. Amaya, V. Pruneri, M. W. Mitchell, M. Markham, D. J. Twitchen, D. Elkouss, S. Wehner, T. H. Taminiau, and R. Hanson, “Loophole-free Bell inequality violation using electron spins separated by 1.3 kilometres,” Nature 526(7575), 682–686 (2015).
[Crossref]

Rezai, M.

M. Jamali, I. Gerhardt, M. Rezai, K. Frenner, H. Fedder, and J. Wrachtrup, “Microscopic diamond solid-immersion-lenses fabricated around single defect centers by focused ion beam milling,” Rev. Sci. Instrum. 85(12), 123703 (2014).
[Crossref]

Ritala, M.

C. David, S. Gorelick, S. Rutishauser, J. Krzywinski, J. Vila-Comamala, V. A. Guzenko, O. Bunk, E. Färm, M. Ritala, M. Cammarata, D. M. Fritz, R. Barrett, L. Samoylova, J. Grünert, and H. Sinn, “Nanofocusing of hard X-ray free electron laser pulses using diamond based Fresnel zone plates,” Sci. Rep. 1(1), 57 (2011).
[Crossref]

Robledo, L.

H. Bernien, B. Hensen, W. Pfaff, G. Koolstra, M. S. Blok, L. Robledo, T. H. Taminiau, M. Markham, D. J. Twitchen, L. Childress, and R. Hanson, “Heralded entanglement between solid-state qubits separated by three metres,” Nature 497(7447), 86–90 (2013).
[Crossref]

Roch, J.-F.

L. Rondin, J.-P. Tetienne, T. Hingant, J.-F. Roch, P. Maletinsky, and V. Jacques, “Magnetometry with nitrogen-vacancy defects in diamond,” Rep. Prog. Phys. 77(5), 056503 (2014).
[Crossref]

Rondin, L.

L. Rondin, J.-P. Tetienne, T. Hingant, J.-F. Roch, P. Maletinsky, and V. Jacques, “Magnetometry with nitrogen-vacancy defects in diamond,” Rep. Prog. Phys. 77(5), 056503 (2014).
[Crossref]

Ruitenberg, J.

B. Hensen, H. Bernien, A. E. Dréau, A. Reiserer, N. Kalb, M. S. Blok, J. Ruitenberg, R. F. L. Vermeulen, R. N. Schouten, C. Abellán, W. Amaya, V. Pruneri, M. W. Mitchell, M. Markham, D. J. Twitchen, D. Elkouss, S. Wehner, T. H. Taminiau, and R. Hanson, “Loophole-free Bell inequality violation using electron spins separated by 1.3 kilometres,” Nature 526(7575), 682–686 (2015).
[Crossref]

Rutishauser, S.

C. David, S. Gorelick, S. Rutishauser, J. Krzywinski, J. Vila-Comamala, V. A. Guzenko, O. Bunk, E. Färm, M. Ritala, M. Cammarata, D. M. Fritz, R. Barrett, L. Samoylova, J. Grünert, and H. Sinn, “Nanofocusing of hard X-ray free electron laser pulses using diamond based Fresnel zone plates,” Sci. Rep. 1(1), 57 (2011).
[Crossref]

Sakellari, I.

G. Seniutinas, A. Weber, C. Padeste, I. Sakellari, M. Farsari, and C. David, “Beyond 100 nm resolution in 3D laser lithography — Post processing solutions,” Microelectron. Eng. 191, 25–31 (2018).
[Crossref]

Samoylova, L.

C. David, S. Gorelick, S. Rutishauser, J. Krzywinski, J. Vila-Comamala, V. A. Guzenko, O. Bunk, E. Färm, M. Ritala, M. Cammarata, D. M. Fritz, R. Barrett, L. Samoylova, J. Grünert, and H. Sinn, “Nanofocusing of hard X-ray free electron laser pulses using diamond based Fresnel zone plates,” Sci. Rep. 1(1), 57 (2011).
[Crossref]

Sattari, H.

A. Toros, M. Kiss, T. Graziosi, H. Sattari, P. Gallo, and N. Quack, “Precision micro-mechanical components in single crystal diamond by deep reactive ion etching,” Microsyst. Nanoeng. 4(1), 12 (2018).
[Crossref]

Savitski, V. G.

H. Liu, S. Reilly, J. Herrnsdorf, E. Xie, V. G. Savitski, A. J. Kemp, E. Gu, and M. D. Dawson, “Large radius of curvature micro-lenses on single crystal diamond for application in monolithic diamond Raman lasers,” Diamond Relat. Mater. 65, 37–41 (2016).
[Crossref]

Schouten, R. N.

B. Hensen, H. Bernien, A. E. Dréau, A. Reiserer, N. Kalb, M. S. Blok, J. Ruitenberg, R. F. L. Vermeulen, R. N. Schouten, C. Abellán, W. Amaya, V. Pruneri, M. W. Mitchell, M. Markham, D. J. Twitchen, D. Elkouss, S. Wehner, T. H. Taminiau, and R. Hanson, “Loophole-free Bell inequality violation using electron spins separated by 1.3 kilometres,” Nature 526(7575), 682–686 (2015).
[Crossref]

Seniutinas, G.

G. Seniutinas, A. Weber, C. Padeste, I. Sakellari, M. Farsari, and C. David, “Beyond 100 nm resolution in 3D laser lithography — Post processing solutions,” Microelectron. Eng. 191, 25–31 (2018).
[Crossref]

Shin, C.

G. Balasubramanian, I. Y. Chan, R. Kolesov, M. Al-Hmoud, J. Tisler, C. Shin, C. Kim, A. Wojcik, P. R. Hemmer, A. Krueger, T. Hanke, A. Leitenstorfer, R. Bratschitsch, F. Jelezko, and J. Wrachtrup, “Nanoscale imaging magnetometry with diamond spins under ambient conditions,” Nature 455(7213), 648–651 (2008).
[Crossref]

Sinn, H.

C. David, S. Gorelick, S. Rutishauser, J. Krzywinski, J. Vila-Comamala, V. A. Guzenko, O. Bunk, E. Färm, M. Ritala, M. Cammarata, D. M. Fritz, R. Barrett, L. Samoylova, J. Grünert, and H. Sinn, “Nanofocusing of hard X-ray free electron laser pulses using diamond based Fresnel zone plates,” Sci. Rep. 1(1), 57 (2011).
[Crossref]

Sözbir, M. C.

C. Holly, M. Traub, D. Hoffmann, C. Widmann, D. Brink, C. Nebel, T. Gotthardt, M. C. Sözbir, and C. Wenzel, “Monocrystalline CVD-diamond optics for high-power laser applications,” in F. Dorsch and S. Kaierle, eds. (2016), p. 974104.

Sun, H.-B.

Sun, Y.-L.

Taminiau, T. H.

B. Hensen, H. Bernien, A. E. Dréau, A. Reiserer, N. Kalb, M. S. Blok, J. Ruitenberg, R. F. L. Vermeulen, R. N. Schouten, C. Abellán, W. Amaya, V. Pruneri, M. W. Mitchell, M. Markham, D. J. Twitchen, D. Elkouss, S. Wehner, T. H. Taminiau, and R. Hanson, “Loophole-free Bell inequality violation using electron spins separated by 1.3 kilometres,” Nature 526(7575), 682–686 (2015).
[Crossref]

H. Bernien, B. Hensen, W. Pfaff, G. Koolstra, M. S. Blok, L. Robledo, T. H. Taminiau, M. Markham, D. J. Twitchen, L. Childress, and R. Hanson, “Heralded entanglement between solid-state qubits separated by three metres,” Nature 497(7447), 86–90 (2013).
[Crossref]

Tetienne, J.-P.

L. Rondin, J.-P. Tetienne, T. Hingant, J.-F. Roch, P. Maletinsky, and V. Jacques, “Magnetometry with nitrogen-vacancy defects in diamond,” Rep. Prog. Phys. 77(5), 056503 (2014).
[Crossref]

Tisler, J.

G. Balasubramanian, I. Y. Chan, R. Kolesov, M. Al-Hmoud, J. Tisler, C. Shin, C. Kim, A. Wojcik, P. R. Hemmer, A. Krueger, T. Hanke, A. Leitenstorfer, R. Bratschitsch, F. Jelezko, and J. Wrachtrup, “Nanoscale imaging magnetometry with diamond spins under ambient conditions,” Nature 455(7213), 648–651 (2008).
[Crossref]

Toros, A.

S. Mi, A. Toros, T. Graziosi, and N. Quack, “Non-contact polishing of single crystal diamond by ion beam etching,” Diamond Relat. Mater. 92, 248–252 (2019).
[Crossref]

A. Toros, M. Kiss, T. Graziosi, H. Sattari, P. Gallo, and N. Quack, “Precision micro-mechanical components in single crystal diamond by deep reactive ion etching,” Microsyst. Nanoeng. 4(1), 12 (2018).
[Crossref]

Traub, M.

C. Holly, M. Traub, D. Hoffmann, C. Widmann, D. Brink, C. Nebel, T. Gotthardt, M. C. Sözbir, and C. Wenzel, “Monocrystalline CVD-diamond optics for high-power laser applications,” in F. Dorsch and S. Kaierle, eds. (2016), p. 974104.

Twitchen, D. J.

B. Hensen, H. Bernien, A. E. Dréau, A. Reiserer, N. Kalb, M. S. Blok, J. Ruitenberg, R. F. L. Vermeulen, R. N. Schouten, C. Abellán, W. Amaya, V. Pruneri, M. W. Mitchell, M. Markham, D. J. Twitchen, D. Elkouss, S. Wehner, T. H. Taminiau, and R. Hanson, “Loophole-free Bell inequality violation using electron spins separated by 1.3 kilometres,” Nature 526(7575), 682–686 (2015).
[Crossref]

H. Bernien, B. Hensen, W. Pfaff, G. Koolstra, M. S. Blok, L. Robledo, T. H. Taminiau, M. Markham, D. J. Twitchen, L. Childress, and R. Hanson, “Heralded entanglement between solid-state qubits separated by three metres,” Nature 497(7447), 86–90 (2013).
[Crossref]

Vermeulen, R. F. L.

B. Hensen, H. Bernien, A. E. Dréau, A. Reiserer, N. Kalb, M. S. Blok, J. Ruitenberg, R. F. L. Vermeulen, R. N. Schouten, C. Abellán, W. Amaya, V. Pruneri, M. W. Mitchell, M. Markham, D. J. Twitchen, D. Elkouss, S. Wehner, T. H. Taminiau, and R. Hanson, “Loophole-free Bell inequality violation using electron spins separated by 1.3 kilometres,” Nature 526(7575), 682–686 (2015).
[Crossref]

Vila-Comamala, J.

C. David, S. Gorelick, S. Rutishauser, J. Krzywinski, J. Vila-Comamala, V. A. Guzenko, O. Bunk, E. Färm, M. Ritala, M. Cammarata, D. M. Fritz, R. Barrett, L. Samoylova, J. Grünert, and H. Sinn, “Nanofocusing of hard X-ray free electron laser pulses using diamond based Fresnel zone plates,” Sci. Rep. 1(1), 57 (2011).
[Crossref]

Wang, H.-X.

T.-F. Zhu, J. Fu, F. Lin, M. Zhang, W. Wang, F. Wen, X. Zhang, R. Bu, J. Zhang, J. Zhu, J. Wang, H.-X. Wang, and X. Hou, “Fabrication of diamond microlens arrays for monolithic imaging homogenizer,” Diamond Relat. Mater. 80, 54–58 (2017).
[Crossref]

T.-F. Zhu, J. Fu, W. Wang, F. Wen, J. Zhang, R. Bu, M. Ma, and H.-X. Wang, “Fabrication of diamond microlenses by chemical reflow method,” Opt. Express 25(2), 1185 (2017).
[Crossref]

Wang, J.

T.-F. Zhu, J. Fu, F. Lin, M. Zhang, W. Wang, F. Wen, X. Zhang, R. Bu, J. Zhang, J. Zhu, J. Wang, H.-X. Wang, and X. Hou, “Fabrication of diamond microlens arrays for monolithic imaging homogenizer,” Diamond Relat. Mater. 80, 54–58 (2017).
[Crossref]

Wang, W.

T.-F. Zhu, J. Fu, F. Lin, M. Zhang, W. Wang, F. Wen, X. Zhang, R. Bu, J. Zhang, J. Zhu, J. Wang, H.-X. Wang, and X. Hou, “Fabrication of diamond microlens arrays for monolithic imaging homogenizer,” Diamond Relat. Mater. 80, 54–58 (2017).
[Crossref]

T.-F. Zhu, J. Fu, W. Wang, F. Wen, J. Zhang, R. Bu, M. Ma, and H.-X. Wang, “Fabrication of diamond microlenses by chemical reflow method,” Opt. Express 25(2), 1185 (2017).
[Crossref]

Weber, A.

G. Seniutinas, A. Weber, C. Padeste, I. Sakellari, M. Farsari, and C. David, “Beyond 100 nm resolution in 3D laser lithography — Post processing solutions,” Microelectron. Eng. 191, 25–31 (2018).
[Crossref]

Wehner, S.

B. Hensen, H. Bernien, A. E. Dréau, A. Reiserer, N. Kalb, M. S. Blok, J. Ruitenberg, R. F. L. Vermeulen, R. N. Schouten, C. Abellán, W. Amaya, V. Pruneri, M. W. Mitchell, M. Markham, D. J. Twitchen, D. Elkouss, S. Wehner, T. H. Taminiau, and R. Hanson, “Loophole-free Bell inequality violation using electron spins separated by 1.3 kilometres,” Nature 526(7575), 682–686 (2015).
[Crossref]

Wen, F.

T.-F. Zhu, J. Fu, F. Lin, M. Zhang, W. Wang, F. Wen, X. Zhang, R. Bu, J. Zhang, J. Zhu, J. Wang, H.-X. Wang, and X. Hou, “Fabrication of diamond microlens arrays for monolithic imaging homogenizer,” Diamond Relat. Mater. 80, 54–58 (2017).
[Crossref]

T.-F. Zhu, J. Fu, W. Wang, F. Wen, J. Zhang, R. Bu, M. Ma, and H.-X. Wang, “Fabrication of diamond microlenses by chemical reflow method,” Opt. Express 25(2), 1185 (2017).
[Crossref]

Wenzel, C.

C. Holly, M. Traub, D. Hoffmann, C. Widmann, D. Brink, C. Nebel, T. Gotthardt, M. C. Sözbir, and C. Wenzel, “Monocrystalline CVD-diamond optics for high-power laser applications,” in F. Dorsch and S. Kaierle, eds. (2016), p. 974104.

Widmann, C.

C. Holly, M. Traub, D. Hoffmann, C. Widmann, D. Brink, C. Nebel, T. Gotthardt, M. C. Sözbir, and C. Wenzel, “Monocrystalline CVD-diamond optics for high-power laser applications,” in F. Dorsch and S. Kaierle, eds. (2016), p. 974104.

Wojcik, A.

G. Balasubramanian, I. Y. Chan, R. Kolesov, M. Al-Hmoud, J. Tisler, C. Shin, C. Kim, A. Wojcik, P. R. Hemmer, A. Krueger, T. Hanke, A. Leitenstorfer, R. Bratschitsch, F. Jelezko, and J. Wrachtrup, “Nanoscale imaging magnetometry with diamond spins under ambient conditions,” Nature 455(7213), 648–651 (2008).
[Crossref]

Wrachtrup, J.

M. Jamali, I. Gerhardt, M. Rezai, K. Frenner, H. Fedder, and J. Wrachtrup, “Microscopic diamond solid-immersion-lenses fabricated around single defect centers by focused ion beam milling,” Rev. Sci. Instrum. 85(12), 123703 (2014).
[Crossref]

G. Balasubramanian, I. Y. Chan, R. Kolesov, M. Al-Hmoud, J. Tisler, C. Shin, C. Kim, A. Wojcik, P. R. Hemmer, A. Krueger, T. Hanke, A. Leitenstorfer, R. Bratschitsch, F. Jelezko, and J. Wrachtrup, “Nanoscale imaging magnetometry with diamond spins under ambient conditions,” Nature 455(7213), 648–651 (2008).
[Crossref]

Xie, E.

H. Liu, S. Reilly, J. Herrnsdorf, E. Xie, V. G. Savitski, A. J. Kemp, E. Gu, and M. D. Dawson, “Large radius of curvature micro-lenses on single crystal diamond for application in monolithic diamond Raman lasers,” Diamond Relat. Mater. 65, 37–41 (2016).
[Crossref]

Yang, C.

Yang, S.-N.

Yu, L.

Yu, S.

Zhang, J.

T.-F. Zhu, J. Fu, W. Wang, F. Wen, J. Zhang, R. Bu, M. Ma, and H.-X. Wang, “Fabrication of diamond microlenses by chemical reflow method,” Opt. Express 25(2), 1185 (2017).
[Crossref]

T.-F. Zhu, J. Fu, F. Lin, M. Zhang, W. Wang, F. Wen, X. Zhang, R. Bu, J. Zhang, J. Zhu, J. Wang, H.-X. Wang, and X. Hou, “Fabrication of diamond microlens arrays for monolithic imaging homogenizer,” Diamond Relat. Mater. 80, 54–58 (2017).
[Crossref]

Zhang, M.

T.-F. Zhu, J. Fu, F. Lin, M. Zhang, W. Wang, F. Wen, X. Zhang, R. Bu, J. Zhang, J. Zhu, J. Wang, H.-X. Wang, and X. Hou, “Fabrication of diamond microlens arrays for monolithic imaging homogenizer,” Diamond Relat. Mater. 80, 54–58 (2017).
[Crossref]

Zhang, X.

T.-F. Zhu, J. Fu, F. Lin, M. Zhang, W. Wang, F. Wen, X. Zhang, R. Bu, J. Zhang, J. Zhu, J. Wang, H.-X. Wang, and X. Hou, “Fabrication of diamond microlens arrays for monolithic imaging homogenizer,” Diamond Relat. Mater. 80, 54–58 (2017).
[Crossref]

Zhang, Y.

Zhu, J.

T.-F. Zhu, J. Fu, F. Lin, M. Zhang, W. Wang, F. Wen, X. Zhang, R. Bu, J. Zhang, J. Zhu, J. Wang, H.-X. Wang, and X. Hou, “Fabrication of diamond microlens arrays for monolithic imaging homogenizer,” Diamond Relat. Mater. 80, 54–58 (2017).
[Crossref]

Zhu, T.-F.

T.-F. Zhu, J. Fu, F. Lin, M. Zhang, W. Wang, F. Wen, X. Zhang, R. Bu, J. Zhang, J. Zhu, J. Wang, H.-X. Wang, and X. Hou, “Fabrication of diamond microlens arrays for monolithic imaging homogenizer,” Diamond Relat. Mater. 80, 54–58 (2017).
[Crossref]

T.-F. Zhu, J. Fu, W. Wang, F. Wen, J. Zhang, R. Bu, M. Ma, and H.-X. Wang, “Fabrication of diamond microlenses by chemical reflow method,” Opt. Express 25(2), 1185 (2017).
[Crossref]

Diamond Relat. Mater. (5)

H. Liu, S. Reilly, J. Herrnsdorf, E. Xie, V. G. Savitski, A. J. Kemp, E. Gu, and M. D. Dawson, “Large radius of curvature micro-lenses on single crystal diamond for application in monolithic diamond Raman lasers,” Diamond Relat. Mater. 65, 37–41 (2016).
[Crossref]

C. L. Lee, H. W. Choi, E. Gu, M. D. Dawson, and H. Murphy, “Fabrication and characterization of diamond micro-optics,” Diamond Relat. Mater. 15(4-8), 725–728 (2006).
[Crossref]

T.-F. Zhu, J. Fu, F. Lin, M. Zhang, W. Wang, F. Wen, X. Zhang, R. Bu, J. Zhang, J. Zhu, J. Wang, H.-X. Wang, and X. Hou, “Fabrication of diamond microlens arrays for monolithic imaging homogenizer,” Diamond Relat. Mater. 80, 54–58 (2017).
[Crossref]

C. L. Lee, E. Gu, and M. D. Dawson, “Micro-cylindrical and micro-ring lenses in CVD diamond,” Diamond Relat. Mater. 16(4-7), 944–948 (2007).
[Crossref]

S. Mi, A. Toros, T. Graziosi, and N. Quack, “Non-contact polishing of single crystal diamond by ion beam etching,” Diamond Relat. Mater. 92, 248–252 (2019).
[Crossref]

Microelectron. Eng. (1)

G. Seniutinas, A. Weber, C. Padeste, I. Sakellari, M. Farsari, and C. David, “Beyond 100 nm resolution in 3D laser lithography — Post processing solutions,” Microelectron. Eng. 191, 25–31 (2018).
[Crossref]

Microsyst. Nanoeng. (1)

A. Toros, M. Kiss, T. Graziosi, H. Sattari, P. Gallo, and N. Quack, “Precision micro-mechanical components in single crystal diamond by deep reactive ion etching,” Microsyst. Nanoeng. 4(1), 12 (2018).
[Crossref]

Nat. Commun. (1)

T.-Y. Huang, R. R. Grote, S. A. Mann, D. A. Hopper, A. L. Exarhos, G. G. Lopez, G. R. Kaighn, E. C. Garnett, and L. C. Bassett, “A monolithic immersion metalens for imaging solid-state quantum emitters,” Nat. Commun. 10(1), 2392 (2019).
[Crossref]

Nature (3)

H. Bernien, B. Hensen, W. Pfaff, G. Koolstra, M. S. Blok, L. Robledo, T. H. Taminiau, M. Markham, D. J. Twitchen, L. Childress, and R. Hanson, “Heralded entanglement between solid-state qubits separated by three metres,” Nature 497(7447), 86–90 (2013).
[Crossref]

B. Hensen, H. Bernien, A. E. Dréau, A. Reiserer, N. Kalb, M. S. Blok, J. Ruitenberg, R. F. L. Vermeulen, R. N. Schouten, C. Abellán, W. Amaya, V. Pruneri, M. W. Mitchell, M. Markham, D. J. Twitchen, D. Elkouss, S. Wehner, T. H. Taminiau, and R. Hanson, “Loophole-free Bell inequality violation using electron spins separated by 1.3 kilometres,” Nature 526(7575), 682–686 (2015).
[Crossref]

G. Balasubramanian, I. Y. Chan, R. Kolesov, M. Al-Hmoud, J. Tisler, C. Shin, C. Kim, A. Wojcik, P. R. Hemmer, A. Krueger, T. Hanke, A. Leitenstorfer, R. Bratschitsch, F. Jelezko, and J. Wrachtrup, “Nanoscale imaging magnetometry with diamond spins under ambient conditions,” Nature 455(7213), 648–651 (2008).
[Crossref]

Opt. Express (3)

Opt. Lett. (2)

Opt. Mater. (1)

C. L. Lee, M. D. Dawson, and E. Gu, “Diamond double-sided micro-lenses and reflection gratings,” Opt. Mater. 32(9), 1123–1129 (2010).
[Crossref]

Rep. Prog. Phys. (1)

L. Rondin, J.-P. Tetienne, T. Hingant, J.-F. Roch, P. Maletinsky, and V. Jacques, “Magnetometry with nitrogen-vacancy defects in diamond,” Rep. Prog. Phys. 77(5), 056503 (2014).
[Crossref]

Rev. Sci. Instrum. (1)

M. Jamali, I. Gerhardt, M. Rezai, K. Frenner, H. Fedder, and J. Wrachtrup, “Microscopic diamond solid-immersion-lenses fabricated around single defect centers by focused ion beam milling,” Rev. Sci. Instrum. 85(12), 123703 (2014).
[Crossref]

Sci. Rep. (1)

C. David, S. Gorelick, S. Rutishauser, J. Krzywinski, J. Vila-Comamala, V. A. Guzenko, O. Bunk, E. Färm, M. Ritala, M. Cammarata, D. M. Fritz, R. Barrett, L. Samoylova, J. Grünert, and H. Sinn, “Nanofocusing of hard X-ray free electron laser pulses using diamond based Fresnel zone plates,” Sci. Rep. 1(1), 57 (2011).
[Crossref]

Other (3)

C. Holly, M. Traub, D. Hoffmann, C. Widmann, D. Brink, C. Nebel, T. Gotthardt, M. C. Sözbir, and C. Wenzel, “Monocrystalline CVD-diamond optics for high-power laser applications,” in F. Dorsch and S. Kaierle, eds. (2016), p. 974104.

M. Kiss, T. Graziosi, and N. Quack, “Trapezoidal diffraction grating beam splitters in single crystal diamond,” in Components and Packaging for Laser Systems IV, A. L. Glebov and P. O. Leisher, eds. (SPIE, 2018), p. 55.

J. P. Hugonin and P. Lalanne, “Reticolo software for grating analysis,” Institut d’Optique, Orsay, France (2005).

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Figures (7)

Fig. 1.
Fig. 1. Typical process flows for fabricating (a) Microlenses using photoresist reflow and pattern transfer by dry etching, and (b) Diffraction gratings using a hard mask to increase the selectivity of the etch process to allow high aspect ratio structures.
Fig. 2.
Fig. 2. Setup for the exposure using high resolution 3D dip-in laser lithography mode with the Nanoscribe Photonic GT. The single crystal diamond is attached in a recess etched in a silicon wafer, in order to avoid physical contact between the objective and the diamond.
Fig. 3.
Fig. 3. (a-d) Blazed diffraction gratings and Fresnel microlenses patterned in IP-Dip photoresist on single crystal diamond surface by 3D Laser lithography. The layer-by-layer 3D printing process results in a visible staircase. (e-f) Structures obtained after the diamond etching step. The staircase is noticeably reduced due to the low selectivity (1:15) of the etching process.
Fig. 4.
Fig. 4. (a) AFM measurements of the diamond blazed diffraction gratings and of (b) the diamond Fresnel microlenses. (c) Detail of a 5 µm x 5 µm area for roughness measurement. The surface shown has a roughness of 1.45 nm (Ra) and 1.76 nm (Rms)
Fig. 5.
Fig. 5. Profiles of (a) the blazed diffraction gratings and of (b) the Fresnel microlenses measured with AFM and compared to the designed profile. The two structures exhibit a very high accuracy in period as compared to the target dimensions (2% deviation), while the height deviates by as high as 30% from the target height due to photoresist erosion during the etching.
Fig. 6.
Fig. 6. Setups for measuring (a) the blazed diffraction gratings relative efficiency and (b) the Fresnel microlenses focal lengths. The relative efficiency was measured by dividing the power diffracted in a given order by the sum of the powers diffracted in the orders from -4 to + 4. The microlenses focal length is directly given by the stage displacement when focusing first on the lenses and then on the focal point of the lenses.
Fig. 7.
Fig. 7. Measured and simulated relative diffraction efficiency of the blazed diffraction gratings. The gratings show a measured maximum relative efficiency of 66% in the first diffraction order. While the measurements closely match the simulated values, we attribute the discrepancies (and notably the higher measured than simulated values in some orders) to the difference between the gratings profile used in the simulation (i.e. a software repetition of a randomly chosen, single AFM measured period of the grating) and the actual gratings profile that slightly fluctuates from one period to another and that can be of overall better optical quality than the single grating period used for the simulation.