Abstract

Two designs of asymmetrical double split-ring resonators (ADSRRs) with one layer and two reflective symmetric layers are presented, which are composed of Au material on Si substrate. The electromagnetic responses of ADSRRs designs exhibit a single-resonance for g = 0 μm and dual-resonance in the range of g = 2 μm to 10 μm. By changing the gap width of ADSRRs with one layer, the resonant frequencies of two devices are blue-shifted 0.11 THz from 0.67 THz to 0.78 THz at TE mode and blue-shifted 0.07 THz from 0.62 THz to 0.69 THz at TM mode. To improve and perform the active tuning of ADSRRs, two devices are designed to compose of two reflective symmetric layers with a distance between top and bottom ADSRRs. By changing this distance, the tuning range of resonance is enhanced to 0.52 THz. Furthermore, two devices with one layer and two reflective symmetric layers exhibit a switch behavior by changing incident polarization angle. The maximum modulation depth is up to 93%. Therefore, the resonant frequency of devices can be tuned by changing the distance between top and bottom reflective symmetric ADSRRs to be realized as a THz filter and by changing the incident polarization angle to be realized as a THz switch. This study promises applications in THz filters, THz switches, and other controllable metamaterial-based devices.

© 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

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References

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    [Crossref]
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    [Crossref] [PubMed]
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    [Crossref]
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    [Crossref]
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    [Crossref]
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    [Crossref]
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    [Crossref]
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    [Crossref] [PubMed]
  23. C. M. Soukoulis, M. Kafesaki, and E. N. Economou, “Negative-index materials: new frontiers in optics,” Adv. Mater. 18(15), 1941–1952 (2006).
    [Crossref]

2016 (4)

P. Pitchappa, M. Manjappa, C. P. Ho, R. Singh, N. Singh, and C. Lee, “active control of electromagnetically induced transparency analog in terahertz MEMS metamaterial,” Adv. Opt. Mater. 4(4), 541–547 (2016).
[Crossref]

C. H. Kodama and R. A. Coutu, “Tunable split-ring resonators using germanium telluride,” Appl. Phys. Lett. 108(23), 231901 (2016).
[Crossref]

F. Hu, N. Xu, W. Wang, Y. Wang, W. Zhang, J. Han, and W. Zhang, “A dynamically tunable terahertz metamaterial absorber based on an electrostatic MEMS actuator and electrical dipole resonator array,” J. Micromech. Microeng. 26(2), 025006 (2016).
[Crossref]

R. Jiang, Z. R. Wu, Z. Y. Han, and H. S. Jung, “HfO2-based ferroelectric modulator of terahertz waves with graphene metamaterial,” Chin. Phys. B 25(10), 106803 (2016).
[Crossref]

2015 (4)

P. Pitchappa, C. P. Ho, L. Dhakar, and C. Lee, “Microelectromechanically reconfigurable interpixelated metamaterial for independent tuning of multiple resonances at terahertz spectral region,” Optica 2(6), 571–578 (2015).
[Crossref]

Y. Bai, K. Chen, H. Liu, T. Bu, B. Cai, J. Xu, and Y. Zhu, “Optically controllable terahertz modulator based on electromagnetically-induced-transparency-like effect,” Opt. Commun. 353, 83–89 (2015).
[Crossref]

Y. S. Lin, C. Y. Huang, and C. Lee, “Reconfiguration of resonance characteristics for terahertz u-shape metamaterial using MEMS mechanism,” IEEE J. Sel. Top. Quantum Electron. 21, 2700207 (2015).

A. Isozaki, T. Kan, H. Takahashi, K. Matsumoto, and I. Shimoyama, “Out-of-plane actuation with a sub-micron initial gap for reconfigurable terahertz micro-electro-mechanical systems metamaterials,” Opt. Express 23(20), 26243–26251 (2015).
[Crossref] [PubMed]

2014 (4)

C. P. Ho, P. Pitchappa, Y. S. Lin, C. Y. Huang, P. Kropelnicki, and C. Lee, “Electrothermally actuated microelectromechanical systems based omega-ring terahertz metamaterial with polarization dependent characteristics,” Appl. Phys. Lett. 104(16), 161104 (2014).
[Crossref]

M. Zhu, Y. S. Lin, and C. Lee, “Coupling effect combined with incident polarization to modulate double split-ring resonator in terahertz frequency range,” J. Appl. Phys. 116(17), 173106 (2014).
[Crossref]

L. Qi, C. Li, and G. Y. Fang, “Tunable terahertz metamaterial absorbers using active diodes,” Inter. J. Electromagn. Appl. 4(3), 57–60 (2014).

S. Savo, D. Shrekenhamer, and W. J. Padilla, “Liquid crystal metamaterial absorber spatial light modulator for THz applications,” Adv. Opt. Mater. 2(3), 275–279 (2014).
[Crossref]

2013 (3)

J. Li, C. M. Shah, W. Withayachumnankul, B. S.-Y. Ung, A. Mitchell, S. Sriram, M. Bhaskaran, S. Chang, and D. Abbott, “Mechanically tunable terahertz metamaterials,” Appl. Phys. Lett. 102(12), 121101 (2013).
[Crossref]

X. Li, T. Yang, W. Zhu, and X. Li, “Continuously tunable terahertz metamaterial employing a thermal actuator,” Microsyst. Technol. 19(8), 1145–1151 (2013).
[Crossref]

F. Hu, Y. Qian, Z. Li, J. Niu, K. Nie, X. Xiong, W. Zhang, and Z. Peng, “Design of a tunable terahertz narrowband metamaterial absorber based on an electrostatically actuated MEMS cantilever and split ring resonator array,” J. Opt. 15(5), 055101 (2013).
[Crossref]

2012 (1)

2011 (5)

W. M. Zhu, A. Q. Liu, W. Zhang, J. F. Tao, T. Bourouina, J. H. Teng, X. H. Zhang, Q. Y. Wu, H. Tanoto, H. C. Guo, G. Q. Lo, and D. L. Kwong, “Polarization dependent state to polarization independent state change in THz metamaterials,” Appl. Phys. Lett. 99(22), 221102 (2011).
[Crossref]

R. Singh, A. K. Azad, Q. X. Jia, A. J. Taylor, and H. T. Chen, “Thermal tunability in terahertz metamaterials fabricated on strontium titanate single-crystal substrates,” Opt. Lett. 36(7), 1230–1232 (2011).
[Crossref] [PubMed]

M. Choi, S. H. Lee, Y. Kim, S. B. Kang, J. Shin, M. H. Kwak, K.-Y. Kang, Y.-H. Lee, N. Park, and B. Min, “A terahertz metamaterial with unnaturally high refractive index,” Nature 470(7334), 369–373 (2011).
[Crossref] [PubMed]

Y. H. Fu, A. Q. Liu, W. M. Zhu, X. M. Zhang, D. P. Tsai, J. B. Zhang, T. Mei, J. F. Tao, H. C. Guo, X. H. Zhang, J. H. Teng, N. I. Zheludev, G. Q. Lo, and D. L. Kwong, “A micromachined reconfigurable metamaterial via reconfiguration of asymmetric split-ring resonators,” Adv. Funct. Mater. 21(18), 3589–3594 (2011).
[Crossref]

B. Ozbey and O. Aktas, “Continuously tunable terahertz metamaterial employing magnetically actuated cantilevers,” Opt. Express 19(7), 5741–5752 (2011).
[Crossref] [PubMed]

2006 (2)

C. M. Soukoulis, M. Kafesaki, and E. N. Economou, “Negative-index materials: new frontiers in optics,” Adv. Mater. 18(15), 1941–1952 (2006).
[Crossref]

H. T. Chen, W. J. Padilla, J. M. O. Zide, A. C. Gossard, A. J. Taylor, and R. D. Averitt, “Active terahertz metamaterial devices,” Nature 444(7119), 597–600 (2006).
[Crossref] [PubMed]

Abbott, D.

J. Li, C. M. Shah, W. Withayachumnankul, B. S.-Y. Ung, A. Mitchell, S. Sriram, M. Bhaskaran, S. Chang, and D. Abbott, “Mechanically tunable terahertz metamaterials,” Appl. Phys. Lett. 102(12), 121101 (2013).
[Crossref]

Aktas, O.

Averitt, R. D.

H. T. Chen, W. J. Padilla, J. M. O. Zide, A. C. Gossard, A. J. Taylor, and R. D. Averitt, “Active terahertz metamaterial devices,” Nature 444(7119), 597–600 (2006).
[Crossref] [PubMed]

Azad, A. K.

Bai, Y.

Y. Bai, K. Chen, H. Liu, T. Bu, B. Cai, J. Xu, and Y. Zhu, “Optically controllable terahertz modulator based on electromagnetically-induced-transparency-like effect,” Opt. Commun. 353, 83–89 (2015).
[Crossref]

Bhaskaran, M.

J. Li, C. M. Shah, W. Withayachumnankul, B. S.-Y. Ung, A. Mitchell, S. Sriram, M. Bhaskaran, S. Chang, and D. Abbott, “Mechanically tunable terahertz metamaterials,” Appl. Phys. Lett. 102(12), 121101 (2013).
[Crossref]

Bourouina, T.

W. M. Zhu, A. Q. Liu, W. Zhang, J. F. Tao, T. Bourouina, J. H. Teng, X. H. Zhang, Q. Y. Wu, H. Tanoto, H. C. Guo, G. Q. Lo, and D. L. Kwong, “Polarization dependent state to polarization independent state change in THz metamaterials,” Appl. Phys. Lett. 99(22), 221102 (2011).
[Crossref]

Bu, T.

Y. Bai, K. Chen, H. Liu, T. Bu, B. Cai, J. Xu, and Y. Zhu, “Optically controllable terahertz modulator based on electromagnetically-induced-transparency-like effect,” Opt. Commun. 353, 83–89 (2015).
[Crossref]

Cai, B.

Y. Bai, K. Chen, H. Liu, T. Bu, B. Cai, J. Xu, and Y. Zhu, “Optically controllable terahertz modulator based on electromagnetically-induced-transparency-like effect,” Opt. Commun. 353, 83–89 (2015).
[Crossref]

Chang, S.

J. Li, C. M. Shah, W. Withayachumnankul, B. S.-Y. Ung, A. Mitchell, S. Sriram, M. Bhaskaran, S. Chang, and D. Abbott, “Mechanically tunable terahertz metamaterials,” Appl. Phys. Lett. 102(12), 121101 (2013).
[Crossref]

Chen, H. T.

R. Singh, A. K. Azad, Q. X. Jia, A. J. Taylor, and H. T. Chen, “Thermal tunability in terahertz metamaterials fabricated on strontium titanate single-crystal substrates,” Opt. Lett. 36(7), 1230–1232 (2011).
[Crossref] [PubMed]

H. T. Chen, W. J. Padilla, J. M. O. Zide, A. C. Gossard, A. J. Taylor, and R. D. Averitt, “Active terahertz metamaterial devices,” Nature 444(7119), 597–600 (2006).
[Crossref] [PubMed]

Chen, K.

Y. Bai, K. Chen, H. Liu, T. Bu, B. Cai, J. Xu, and Y. Zhu, “Optically controllable terahertz modulator based on electromagnetically-induced-transparency-like effect,” Opt. Commun. 353, 83–89 (2015).
[Crossref]

Choi, M.

M. Choi, S. H. Lee, Y. Kim, S. B. Kang, J. Shin, M. H. Kwak, K.-Y. Kang, Y.-H. Lee, N. Park, and B. Min, “A terahertz metamaterial with unnaturally high refractive index,” Nature 470(7334), 369–373 (2011).
[Crossref] [PubMed]

Coutu, R. A.

C. H. Kodama and R. A. Coutu, “Tunable split-ring resonators using germanium telluride,” Appl. Phys. Lett. 108(23), 231901 (2016).
[Crossref]

Dhakar, L.

Economou, E. N.

C. M. Soukoulis, M. Kafesaki, and E. N. Economou, “Negative-index materials: new frontiers in optics,” Adv. Mater. 18(15), 1941–1952 (2006).
[Crossref]

Fang, G. Y.

L. Qi, C. Li, and G. Y. Fang, “Tunable terahertz metamaterial absorbers using active diodes,” Inter. J. Electromagn. Appl. 4(3), 57–60 (2014).

Fu, Y. H.

Y. H. Fu, A. Q. Liu, W. M. Zhu, X. M. Zhang, D. P. Tsai, J. B. Zhang, T. Mei, J. F. Tao, H. C. Guo, X. H. Zhang, J. H. Teng, N. I. Zheludev, G. Q. Lo, and D. L. Kwong, “A micromachined reconfigurable metamaterial via reconfiguration of asymmetric split-ring resonators,” Adv. Funct. Mater. 21(18), 3589–3594 (2011).
[Crossref]

Gossard, A. C.

H. T. Chen, W. J. Padilla, J. M. O. Zide, A. C. Gossard, A. J. Taylor, and R. D. Averitt, “Active terahertz metamaterial devices,” Nature 444(7119), 597–600 (2006).
[Crossref] [PubMed]

Guo, H. C.

Y. H. Fu, A. Q. Liu, W. M. Zhu, X. M. Zhang, D. P. Tsai, J. B. Zhang, T. Mei, J. F. Tao, H. C. Guo, X. H. Zhang, J. H. Teng, N. I. Zheludev, G. Q. Lo, and D. L. Kwong, “A micromachined reconfigurable metamaterial via reconfiguration of asymmetric split-ring resonators,” Adv. Funct. Mater. 21(18), 3589–3594 (2011).
[Crossref]

W. M. Zhu, A. Q. Liu, W. Zhang, J. F. Tao, T. Bourouina, J. H. Teng, X. H. Zhang, Q. Y. Wu, H. Tanoto, H. C. Guo, G. Q. Lo, and D. L. Kwong, “Polarization dependent state to polarization independent state change in THz metamaterials,” Appl. Phys. Lett. 99(22), 221102 (2011).
[Crossref]

Han, J.

F. Hu, N. Xu, W. Wang, Y. Wang, W. Zhang, J. Han, and W. Zhang, “A dynamically tunable terahertz metamaterial absorber based on an electrostatic MEMS actuator and electrical dipole resonator array,” J. Micromech. Microeng. 26(2), 025006 (2016).
[Crossref]

Han, Z. Y.

R. Jiang, Z. R. Wu, Z. Y. Han, and H. S. Jung, “HfO2-based ferroelectric modulator of terahertz waves with graphene metamaterial,” Chin. Phys. B 25(10), 106803 (2016).
[Crossref]

Ho, C. P.

P. Pitchappa, M. Manjappa, C. P. Ho, R. Singh, N. Singh, and C. Lee, “active control of electromagnetically induced transparency analog in terahertz MEMS metamaterial,” Adv. Opt. Mater. 4(4), 541–547 (2016).
[Crossref]

P. Pitchappa, C. P. Ho, L. Dhakar, and C. Lee, “Microelectromechanically reconfigurable interpixelated metamaterial for independent tuning of multiple resonances at terahertz spectral region,” Optica 2(6), 571–578 (2015).
[Crossref]

C. P. Ho, P. Pitchappa, Y. S. Lin, C. Y. Huang, P. Kropelnicki, and C. Lee, “Electrothermally actuated microelectromechanical systems based omega-ring terahertz metamaterial with polarization dependent characteristics,” Appl. Phys. Lett. 104(16), 161104 (2014).
[Crossref]

Hu, F.

F. Hu, N. Xu, W. Wang, Y. Wang, W. Zhang, J. Han, and W. Zhang, “A dynamically tunable terahertz metamaterial absorber based on an electrostatic MEMS actuator and electrical dipole resonator array,” J. Micromech. Microeng. 26(2), 025006 (2016).
[Crossref]

F. Hu, Y. Qian, Z. Li, J. Niu, K. Nie, X. Xiong, W. Zhang, and Z. Peng, “Design of a tunable terahertz narrowband metamaterial absorber based on an electrostatically actuated MEMS cantilever and split ring resonator array,” J. Opt. 15(5), 055101 (2013).
[Crossref]

Huang, C. Y.

Y. S. Lin, C. Y. Huang, and C. Lee, “Reconfiguration of resonance characteristics for terahertz u-shape metamaterial using MEMS mechanism,” IEEE J. Sel. Top. Quantum Electron. 21, 2700207 (2015).

C. P. Ho, P. Pitchappa, Y. S. Lin, C. Y. Huang, P. Kropelnicki, and C. Lee, “Electrothermally actuated microelectromechanical systems based omega-ring terahertz metamaterial with polarization dependent characteristics,” Appl. Phys. Lett. 104(16), 161104 (2014).
[Crossref]

Isozaki, A.

Jena, D.

Jia, Q. X.

Jiang, R.

R. Jiang, Z. R. Wu, Z. Y. Han, and H. S. Jung, “HfO2-based ferroelectric modulator of terahertz waves with graphene metamaterial,” Chin. Phys. B 25(10), 106803 (2016).
[Crossref]

Jung, H. S.

R. Jiang, Z. R. Wu, Z. Y. Han, and H. S. Jung, “HfO2-based ferroelectric modulator of terahertz waves with graphene metamaterial,” Chin. Phys. B 25(10), 106803 (2016).
[Crossref]

Kafesaki, M.

C. M. Soukoulis, M. Kafesaki, and E. N. Economou, “Negative-index materials: new frontiers in optics,” Adv. Mater. 18(15), 1941–1952 (2006).
[Crossref]

Kan, T.

Kang, K.-Y.

M. Choi, S. H. Lee, Y. Kim, S. B. Kang, J. Shin, M. H. Kwak, K.-Y. Kang, Y.-H. Lee, N. Park, and B. Min, “A terahertz metamaterial with unnaturally high refractive index,” Nature 470(7334), 369–373 (2011).
[Crossref] [PubMed]

Kang, S. B.

M. Choi, S. H. Lee, Y. Kim, S. B. Kang, J. Shin, M. H. Kwak, K.-Y. Kang, Y.-H. Lee, N. Park, and B. Min, “A terahertz metamaterial with unnaturally high refractive index,” Nature 470(7334), 369–373 (2011).
[Crossref] [PubMed]

Kim, Y.

M. Choi, S. H. Lee, Y. Kim, S. B. Kang, J. Shin, M. H. Kwak, K.-Y. Kang, Y.-H. Lee, N. Park, and B. Min, “A terahertz metamaterial with unnaturally high refractive index,” Nature 470(7334), 369–373 (2011).
[Crossref] [PubMed]

Kodama, C. H.

C. H. Kodama and R. A. Coutu, “Tunable split-ring resonators using germanium telluride,” Appl. Phys. Lett. 108(23), 231901 (2016).
[Crossref]

Kropelnicki, P.

C. P. Ho, P. Pitchappa, Y. S. Lin, C. Y. Huang, P. Kropelnicki, and C. Lee, “Electrothermally actuated microelectromechanical systems based omega-ring terahertz metamaterial with polarization dependent characteristics,” Appl. Phys. Lett. 104(16), 161104 (2014).
[Crossref]

Kwak, M. H.

M. Choi, S. H. Lee, Y. Kim, S. B. Kang, J. Shin, M. H. Kwak, K.-Y. Kang, Y.-H. Lee, N. Park, and B. Min, “A terahertz metamaterial with unnaturally high refractive index,” Nature 470(7334), 369–373 (2011).
[Crossref] [PubMed]

Kwong, D. L.

Y. H. Fu, A. Q. Liu, W. M. Zhu, X. M. Zhang, D. P. Tsai, J. B. Zhang, T. Mei, J. F. Tao, H. C. Guo, X. H. Zhang, J. H. Teng, N. I. Zheludev, G. Q. Lo, and D. L. Kwong, “A micromachined reconfigurable metamaterial via reconfiguration of asymmetric split-ring resonators,” Adv. Funct. Mater. 21(18), 3589–3594 (2011).
[Crossref]

W. M. Zhu, A. Q. Liu, W. Zhang, J. F. Tao, T. Bourouina, J. H. Teng, X. H. Zhang, Q. Y. Wu, H. Tanoto, H. C. Guo, G. Q. Lo, and D. L. Kwong, “Polarization dependent state to polarization independent state change in THz metamaterials,” Appl. Phys. Lett. 99(22), 221102 (2011).
[Crossref]

Lee, C.

P. Pitchappa, M. Manjappa, C. P. Ho, R. Singh, N. Singh, and C. Lee, “active control of electromagnetically induced transparency analog in terahertz MEMS metamaterial,” Adv. Opt. Mater. 4(4), 541–547 (2016).
[Crossref]

Y. S. Lin, C. Y. Huang, and C. Lee, “Reconfiguration of resonance characteristics for terahertz u-shape metamaterial using MEMS mechanism,” IEEE J. Sel. Top. Quantum Electron. 21, 2700207 (2015).

P. Pitchappa, C. P. Ho, L. Dhakar, and C. Lee, “Microelectromechanically reconfigurable interpixelated metamaterial for independent tuning of multiple resonances at terahertz spectral region,” Optica 2(6), 571–578 (2015).
[Crossref]

M. Zhu, Y. S. Lin, and C. Lee, “Coupling effect combined with incident polarization to modulate double split-ring resonator in terahertz frequency range,” J. Appl. Phys. 116(17), 173106 (2014).
[Crossref]

C. P. Ho, P. Pitchappa, Y. S. Lin, C. Y. Huang, P. Kropelnicki, and C. Lee, “Electrothermally actuated microelectromechanical systems based omega-ring terahertz metamaterial with polarization dependent characteristics,” Appl. Phys. Lett. 104(16), 161104 (2014).
[Crossref]

Lee, S. H.

M. Choi, S. H. Lee, Y. Kim, S. B. Kang, J. Shin, M. H. Kwak, K.-Y. Kang, Y.-H. Lee, N. Park, and B. Min, “A terahertz metamaterial with unnaturally high refractive index,” Nature 470(7334), 369–373 (2011).
[Crossref] [PubMed]

Lee, Y.-H.

M. Choi, S. H. Lee, Y. Kim, S. B. Kang, J. Shin, M. H. Kwak, K.-Y. Kang, Y.-H. Lee, N. Park, and B. Min, “A terahertz metamaterial with unnaturally high refractive index,” Nature 470(7334), 369–373 (2011).
[Crossref] [PubMed]

Li, C.

L. Qi, C. Li, and G. Y. Fang, “Tunable terahertz metamaterial absorbers using active diodes,” Inter. J. Electromagn. Appl. 4(3), 57–60 (2014).

Li, J.

J. Li, C. M. Shah, W. Withayachumnankul, B. S.-Y. Ung, A. Mitchell, S. Sriram, M. Bhaskaran, S. Chang, and D. Abbott, “Mechanically tunable terahertz metamaterials,” Appl. Phys. Lett. 102(12), 121101 (2013).
[Crossref]

Li, X.

X. Li, T. Yang, W. Zhu, and X. Li, “Continuously tunable terahertz metamaterial employing a thermal actuator,” Microsyst. Technol. 19(8), 1145–1151 (2013).
[Crossref]

X. Li, T. Yang, W. Zhu, and X. Li, “Continuously tunable terahertz metamaterial employing a thermal actuator,” Microsyst. Technol. 19(8), 1145–1151 (2013).
[Crossref]

Li, Z.

F. Hu, Y. Qian, Z. Li, J. Niu, K. Nie, X. Xiong, W. Zhang, and Z. Peng, “Design of a tunable terahertz narrowband metamaterial absorber based on an electrostatically actuated MEMS cantilever and split ring resonator array,” J. Opt. 15(5), 055101 (2013).
[Crossref]

Lin, Y. S.

Y. S. Lin, C. Y. Huang, and C. Lee, “Reconfiguration of resonance characteristics for terahertz u-shape metamaterial using MEMS mechanism,” IEEE J. Sel. Top. Quantum Electron. 21, 2700207 (2015).

M. Zhu, Y. S. Lin, and C. Lee, “Coupling effect combined with incident polarization to modulate double split-ring resonator in terahertz frequency range,” J. Appl. Phys. 116(17), 173106 (2014).
[Crossref]

C. P. Ho, P. Pitchappa, Y. S. Lin, C. Y. Huang, P. Kropelnicki, and C. Lee, “Electrothermally actuated microelectromechanical systems based omega-ring terahertz metamaterial with polarization dependent characteristics,” Appl. Phys. Lett. 104(16), 161104 (2014).
[Crossref]

Liu, A. Q.

W. M. Zhu, A. Q. Liu, W. Zhang, J. F. Tao, T. Bourouina, J. H. Teng, X. H. Zhang, Q. Y. Wu, H. Tanoto, H. C. Guo, G. Q. Lo, and D. L. Kwong, “Polarization dependent state to polarization independent state change in THz metamaterials,” Appl. Phys. Lett. 99(22), 221102 (2011).
[Crossref]

Y. H. Fu, A. Q. Liu, W. M. Zhu, X. M. Zhang, D. P. Tsai, J. B. Zhang, T. Mei, J. F. Tao, H. C. Guo, X. H. Zhang, J. H. Teng, N. I. Zheludev, G. Q. Lo, and D. L. Kwong, “A micromachined reconfigurable metamaterial via reconfiguration of asymmetric split-ring resonators,” Adv. Funct. Mater. 21(18), 3589–3594 (2011).
[Crossref]

Liu, H.

Y. Bai, K. Chen, H. Liu, T. Bu, B. Cai, J. Xu, and Y. Zhu, “Optically controllable terahertz modulator based on electromagnetically-induced-transparency-like effect,” Opt. Commun. 353, 83–89 (2015).
[Crossref]

Liu, L.

Lo, G. Q.

Y. H. Fu, A. Q. Liu, W. M. Zhu, X. M. Zhang, D. P. Tsai, J. B. Zhang, T. Mei, J. F. Tao, H. C. Guo, X. H. Zhang, J. H. Teng, N. I. Zheludev, G. Q. Lo, and D. L. Kwong, “A micromachined reconfigurable metamaterial via reconfiguration of asymmetric split-ring resonators,” Adv. Funct. Mater. 21(18), 3589–3594 (2011).
[Crossref]

W. M. Zhu, A. Q. Liu, W. Zhang, J. F. Tao, T. Bourouina, J. H. Teng, X. H. Zhang, Q. Y. Wu, H. Tanoto, H. C. Guo, G. Q. Lo, and D. L. Kwong, “Polarization dependent state to polarization independent state change in THz metamaterials,” Appl. Phys. Lett. 99(22), 221102 (2011).
[Crossref]

Manjappa, M.

P. Pitchappa, M. Manjappa, C. P. Ho, R. Singh, N. Singh, and C. Lee, “active control of electromagnetically induced transparency analog in terahertz MEMS metamaterial,” Adv. Opt. Mater. 4(4), 541–547 (2016).
[Crossref]

Matsumoto, K.

Mei, T.

Y. H. Fu, A. Q. Liu, W. M. Zhu, X. M. Zhang, D. P. Tsai, J. B. Zhang, T. Mei, J. F. Tao, H. C. Guo, X. H. Zhang, J. H. Teng, N. I. Zheludev, G. Q. Lo, and D. L. Kwong, “A micromachined reconfigurable metamaterial via reconfiguration of asymmetric split-ring resonators,” Adv. Funct. Mater. 21(18), 3589–3594 (2011).
[Crossref]

Min, B.

M. Choi, S. H. Lee, Y. Kim, S. B. Kang, J. Shin, M. H. Kwak, K.-Y. Kang, Y.-H. Lee, N. Park, and B. Min, “A terahertz metamaterial with unnaturally high refractive index,” Nature 470(7334), 369–373 (2011).
[Crossref] [PubMed]

Mitchell, A.

J. Li, C. M. Shah, W. Withayachumnankul, B. S.-Y. Ung, A. Mitchell, S. Sriram, M. Bhaskaran, S. Chang, and D. Abbott, “Mechanically tunable terahertz metamaterials,” Appl. Phys. Lett. 102(12), 121101 (2013).
[Crossref]

Nie, K.

F. Hu, Y. Qian, Z. Li, J. Niu, K. Nie, X. Xiong, W. Zhang, and Z. Peng, “Design of a tunable terahertz narrowband metamaterial absorber based on an electrostatically actuated MEMS cantilever and split ring resonator array,” J. Opt. 15(5), 055101 (2013).
[Crossref]

Niu, J.

F. Hu, Y. Qian, Z. Li, J. Niu, K. Nie, X. Xiong, W. Zhang, and Z. Peng, “Design of a tunable terahertz narrowband metamaterial absorber based on an electrostatically actuated MEMS cantilever and split ring resonator array,” J. Opt. 15(5), 055101 (2013).
[Crossref]

Ozbey, B.

Padilla, W. J.

S. Savo, D. Shrekenhamer, and W. J. Padilla, “Liquid crystal metamaterial absorber spatial light modulator for THz applications,” Adv. Opt. Mater. 2(3), 275–279 (2014).
[Crossref]

H. T. Chen, W. J. Padilla, J. M. O. Zide, A. C. Gossard, A. J. Taylor, and R. D. Averitt, “Active terahertz metamaterial devices,” Nature 444(7119), 597–600 (2006).
[Crossref] [PubMed]

Park, N.

M. Choi, S. H. Lee, Y. Kim, S. B. Kang, J. Shin, M. H. Kwak, K.-Y. Kang, Y.-H. Lee, N. Park, and B. Min, “A terahertz metamaterial with unnaturally high refractive index,” Nature 470(7334), 369–373 (2011).
[Crossref] [PubMed]

Peng, Z.

F. Hu, Y. Qian, Z. Li, J. Niu, K. Nie, X. Xiong, W. Zhang, and Z. Peng, “Design of a tunable terahertz narrowband metamaterial absorber based on an electrostatically actuated MEMS cantilever and split ring resonator array,” J. Opt. 15(5), 055101 (2013).
[Crossref]

Pitchappa, P.

P. Pitchappa, M. Manjappa, C. P. Ho, R. Singh, N. Singh, and C. Lee, “active control of electromagnetically induced transparency analog in terahertz MEMS metamaterial,” Adv. Opt. Mater. 4(4), 541–547 (2016).
[Crossref]

P. Pitchappa, C. P. Ho, L. Dhakar, and C. Lee, “Microelectromechanically reconfigurable interpixelated metamaterial for independent tuning of multiple resonances at terahertz spectral region,” Optica 2(6), 571–578 (2015).
[Crossref]

C. P. Ho, P. Pitchappa, Y. S. Lin, C. Y. Huang, P. Kropelnicki, and C. Lee, “Electrothermally actuated microelectromechanical systems based omega-ring terahertz metamaterial with polarization dependent characteristics,” Appl. Phys. Lett. 104(16), 161104 (2014).
[Crossref]

Qi, L.

L. Qi, C. Li, and G. Y. Fang, “Tunable terahertz metamaterial absorbers using active diodes,” Inter. J. Electromagn. Appl. 4(3), 57–60 (2014).

Qian, Y.

F. Hu, Y. Qian, Z. Li, J. Niu, K. Nie, X. Xiong, W. Zhang, and Z. Peng, “Design of a tunable terahertz narrowband metamaterial absorber based on an electrostatically actuated MEMS cantilever and split ring resonator array,” J. Opt. 15(5), 055101 (2013).
[Crossref]

Savo, S.

S. Savo, D. Shrekenhamer, and W. J. Padilla, “Liquid crystal metamaterial absorber spatial light modulator for THz applications,” Adv. Opt. Mater. 2(3), 275–279 (2014).
[Crossref]

Sensale-Rodriguez, B.

Shah, C. M.

J. Li, C. M. Shah, W. Withayachumnankul, B. S.-Y. Ung, A. Mitchell, S. Sriram, M. Bhaskaran, S. Chang, and D. Abbott, “Mechanically tunable terahertz metamaterials,” Appl. Phys. Lett. 102(12), 121101 (2013).
[Crossref]

Shimoyama, I.

Shin, J.

M. Choi, S. H. Lee, Y. Kim, S. B. Kang, J. Shin, M. H. Kwak, K.-Y. Kang, Y.-H. Lee, N. Park, and B. Min, “A terahertz metamaterial with unnaturally high refractive index,” Nature 470(7334), 369–373 (2011).
[Crossref] [PubMed]

Shrekenhamer, D.

S. Savo, D. Shrekenhamer, and W. J. Padilla, “Liquid crystal metamaterial absorber spatial light modulator for THz applications,” Adv. Opt. Mater. 2(3), 275–279 (2014).
[Crossref]

Singh, N.

P. Pitchappa, M. Manjappa, C. P. Ho, R. Singh, N. Singh, and C. Lee, “active control of electromagnetically induced transparency analog in terahertz MEMS metamaterial,” Adv. Opt. Mater. 4(4), 541–547 (2016).
[Crossref]

Singh, R.

P. Pitchappa, M. Manjappa, C. P. Ho, R. Singh, N. Singh, and C. Lee, “active control of electromagnetically induced transparency analog in terahertz MEMS metamaterial,” Adv. Opt. Mater. 4(4), 541–547 (2016).
[Crossref]

R. Singh, A. K. Azad, Q. X. Jia, A. J. Taylor, and H. T. Chen, “Thermal tunability in terahertz metamaterials fabricated on strontium titanate single-crystal substrates,” Opt. Lett. 36(7), 1230–1232 (2011).
[Crossref] [PubMed]

Soukoulis, C. M.

C. M. Soukoulis, M. Kafesaki, and E. N. Economou, “Negative-index materials: new frontiers in optics,” Adv. Mater. 18(15), 1941–1952 (2006).
[Crossref]

Sriram, S.

J. Li, C. M. Shah, W. Withayachumnankul, B. S.-Y. Ung, A. Mitchell, S. Sriram, M. Bhaskaran, S. Chang, and D. Abbott, “Mechanically tunable terahertz metamaterials,” Appl. Phys. Lett. 102(12), 121101 (2013).
[Crossref]

Takahashi, H.

Tanoto, H.

W. M. Zhu, A. Q. Liu, W. Zhang, J. F. Tao, T. Bourouina, J. H. Teng, X. H. Zhang, Q. Y. Wu, H. Tanoto, H. C. Guo, G. Q. Lo, and D. L. Kwong, “Polarization dependent state to polarization independent state change in THz metamaterials,” Appl. Phys. Lett. 99(22), 221102 (2011).
[Crossref]

Tao, J. F.

W. M. Zhu, A. Q. Liu, W. Zhang, J. F. Tao, T. Bourouina, J. H. Teng, X. H. Zhang, Q. Y. Wu, H. Tanoto, H. C. Guo, G. Q. Lo, and D. L. Kwong, “Polarization dependent state to polarization independent state change in THz metamaterials,” Appl. Phys. Lett. 99(22), 221102 (2011).
[Crossref]

Y. H. Fu, A. Q. Liu, W. M. Zhu, X. M. Zhang, D. P. Tsai, J. B. Zhang, T. Mei, J. F. Tao, H. C. Guo, X. H. Zhang, J. H. Teng, N. I. Zheludev, G. Q. Lo, and D. L. Kwong, “A micromachined reconfigurable metamaterial via reconfiguration of asymmetric split-ring resonators,” Adv. Funct. Mater. 21(18), 3589–3594 (2011).
[Crossref]

Taylor, A. J.

R. Singh, A. K. Azad, Q. X. Jia, A. J. Taylor, and H. T. Chen, “Thermal tunability in terahertz metamaterials fabricated on strontium titanate single-crystal substrates,” Opt. Lett. 36(7), 1230–1232 (2011).
[Crossref] [PubMed]

H. T. Chen, W. J. Padilla, J. M. O. Zide, A. C. Gossard, A. J. Taylor, and R. D. Averitt, “Active terahertz metamaterial devices,” Nature 444(7119), 597–600 (2006).
[Crossref] [PubMed]

Teng, J. H.

Y. H. Fu, A. Q. Liu, W. M. Zhu, X. M. Zhang, D. P. Tsai, J. B. Zhang, T. Mei, J. F. Tao, H. C. Guo, X. H. Zhang, J. H. Teng, N. I. Zheludev, G. Q. Lo, and D. L. Kwong, “A micromachined reconfigurable metamaterial via reconfiguration of asymmetric split-ring resonators,” Adv. Funct. Mater. 21(18), 3589–3594 (2011).
[Crossref]

W. M. Zhu, A. Q. Liu, W. Zhang, J. F. Tao, T. Bourouina, J. H. Teng, X. H. Zhang, Q. Y. Wu, H. Tanoto, H. C. Guo, G. Q. Lo, and D. L. Kwong, “Polarization dependent state to polarization independent state change in THz metamaterials,” Appl. Phys. Lett. 99(22), 221102 (2011).
[Crossref]

Tsai, D. P.

Y. H. Fu, A. Q. Liu, W. M. Zhu, X. M. Zhang, D. P. Tsai, J. B. Zhang, T. Mei, J. F. Tao, H. C. Guo, X. H. Zhang, J. H. Teng, N. I. Zheludev, G. Q. Lo, and D. L. Kwong, “A micromachined reconfigurable metamaterial via reconfiguration of asymmetric split-ring resonators,” Adv. Funct. Mater. 21(18), 3589–3594 (2011).
[Crossref]

Ung, B. S.-Y.

J. Li, C. M. Shah, W. Withayachumnankul, B. S.-Y. Ung, A. Mitchell, S. Sriram, M. Bhaskaran, S. Chang, and D. Abbott, “Mechanically tunable terahertz metamaterials,” Appl. Phys. Lett. 102(12), 121101 (2013).
[Crossref]

Wang, W.

F. Hu, N. Xu, W. Wang, Y. Wang, W. Zhang, J. Han, and W. Zhang, “A dynamically tunable terahertz metamaterial absorber based on an electrostatic MEMS actuator and electrical dipole resonator array,” J. Micromech. Microeng. 26(2), 025006 (2016).
[Crossref]

Wang, Y.

F. Hu, N. Xu, W. Wang, Y. Wang, W. Zhang, J. Han, and W. Zhang, “A dynamically tunable terahertz metamaterial absorber based on an electrostatic MEMS actuator and electrical dipole resonator array,” J. Micromech. Microeng. 26(2), 025006 (2016).
[Crossref]

Withayachumnankul, W.

J. Li, C. M. Shah, W. Withayachumnankul, B. S.-Y. Ung, A. Mitchell, S. Sriram, M. Bhaskaran, S. Chang, and D. Abbott, “Mechanically tunable terahertz metamaterials,” Appl. Phys. Lett. 102(12), 121101 (2013).
[Crossref]

Wu, Q. Y.

W. M. Zhu, A. Q. Liu, W. Zhang, J. F. Tao, T. Bourouina, J. H. Teng, X. H. Zhang, Q. Y. Wu, H. Tanoto, H. C. Guo, G. Q. Lo, and D. L. Kwong, “Polarization dependent state to polarization independent state change in THz metamaterials,” Appl. Phys. Lett. 99(22), 221102 (2011).
[Crossref]

Wu, Z. R.

R. Jiang, Z. R. Wu, Z. Y. Han, and H. S. Jung, “HfO2-based ferroelectric modulator of terahertz waves with graphene metamaterial,” Chin. Phys. B 25(10), 106803 (2016).
[Crossref]

Xing, H. G.

Xiong, X.

F. Hu, Y. Qian, Z. Li, J. Niu, K. Nie, X. Xiong, W. Zhang, and Z. Peng, “Design of a tunable terahertz narrowband metamaterial absorber based on an electrostatically actuated MEMS cantilever and split ring resonator array,” J. Opt. 15(5), 055101 (2013).
[Crossref]

Xu, J.

Y. Bai, K. Chen, H. Liu, T. Bu, B. Cai, J. Xu, and Y. Zhu, “Optically controllable terahertz modulator based on electromagnetically-induced-transparency-like effect,” Opt. Commun. 353, 83–89 (2015).
[Crossref]

Xu, N.

F. Hu, N. Xu, W. Wang, Y. Wang, W. Zhang, J. Han, and W. Zhang, “A dynamically tunable terahertz metamaterial absorber based on an electrostatic MEMS actuator and electrical dipole resonator array,” J. Micromech. Microeng. 26(2), 025006 (2016).
[Crossref]

Yan, R.

Yang, T.

X. Li, T. Yang, W. Zhu, and X. Li, “Continuously tunable terahertz metamaterial employing a thermal actuator,” Microsyst. Technol. 19(8), 1145–1151 (2013).
[Crossref]

Zhang, J. B.

Y. H. Fu, A. Q. Liu, W. M. Zhu, X. M. Zhang, D. P. Tsai, J. B. Zhang, T. Mei, J. F. Tao, H. C. Guo, X. H. Zhang, J. H. Teng, N. I. Zheludev, G. Q. Lo, and D. L. Kwong, “A micromachined reconfigurable metamaterial via reconfiguration of asymmetric split-ring resonators,” Adv. Funct. Mater. 21(18), 3589–3594 (2011).
[Crossref]

Zhang, W.

F. Hu, N. Xu, W. Wang, Y. Wang, W. Zhang, J. Han, and W. Zhang, “A dynamically tunable terahertz metamaterial absorber based on an electrostatic MEMS actuator and electrical dipole resonator array,” J. Micromech. Microeng. 26(2), 025006 (2016).
[Crossref]

F. Hu, N. Xu, W. Wang, Y. Wang, W. Zhang, J. Han, and W. Zhang, “A dynamically tunable terahertz metamaterial absorber based on an electrostatic MEMS actuator and electrical dipole resonator array,” J. Micromech. Microeng. 26(2), 025006 (2016).
[Crossref]

F. Hu, Y. Qian, Z. Li, J. Niu, K. Nie, X. Xiong, W. Zhang, and Z. Peng, “Design of a tunable terahertz narrowband metamaterial absorber based on an electrostatically actuated MEMS cantilever and split ring resonator array,” J. Opt. 15(5), 055101 (2013).
[Crossref]

W. M. Zhu, A. Q. Liu, W. Zhang, J. F. Tao, T. Bourouina, J. H. Teng, X. H. Zhang, Q. Y. Wu, H. Tanoto, H. C. Guo, G. Q. Lo, and D. L. Kwong, “Polarization dependent state to polarization independent state change in THz metamaterials,” Appl. Phys. Lett. 99(22), 221102 (2011).
[Crossref]

Zhang, X. H.

W. M. Zhu, A. Q. Liu, W. Zhang, J. F. Tao, T. Bourouina, J. H. Teng, X. H. Zhang, Q. Y. Wu, H. Tanoto, H. C. Guo, G. Q. Lo, and D. L. Kwong, “Polarization dependent state to polarization independent state change in THz metamaterials,” Appl. Phys. Lett. 99(22), 221102 (2011).
[Crossref]

Y. H. Fu, A. Q. Liu, W. M. Zhu, X. M. Zhang, D. P. Tsai, J. B. Zhang, T. Mei, J. F. Tao, H. C. Guo, X. H. Zhang, J. H. Teng, N. I. Zheludev, G. Q. Lo, and D. L. Kwong, “A micromachined reconfigurable metamaterial via reconfiguration of asymmetric split-ring resonators,” Adv. Funct. Mater. 21(18), 3589–3594 (2011).
[Crossref]

Zhang, X. M.

Y. H. Fu, A. Q. Liu, W. M. Zhu, X. M. Zhang, D. P. Tsai, J. B. Zhang, T. Mei, J. F. Tao, H. C. Guo, X. H. Zhang, J. H. Teng, N. I. Zheludev, G. Q. Lo, and D. L. Kwong, “A micromachined reconfigurable metamaterial via reconfiguration of asymmetric split-ring resonators,” Adv. Funct. Mater. 21(18), 3589–3594 (2011).
[Crossref]

Zheludev, N. I.

Y. H. Fu, A. Q. Liu, W. M. Zhu, X. M. Zhang, D. P. Tsai, J. B. Zhang, T. Mei, J. F. Tao, H. C. Guo, X. H. Zhang, J. H. Teng, N. I. Zheludev, G. Q. Lo, and D. L. Kwong, “A micromachined reconfigurable metamaterial via reconfiguration of asymmetric split-ring resonators,” Adv. Funct. Mater. 21(18), 3589–3594 (2011).
[Crossref]

Zhu, M.

M. Zhu, Y. S. Lin, and C. Lee, “Coupling effect combined with incident polarization to modulate double split-ring resonator in terahertz frequency range,” J. Appl. Phys. 116(17), 173106 (2014).
[Crossref]

Zhu, W.

X. Li, T. Yang, W. Zhu, and X. Li, “Continuously tunable terahertz metamaterial employing a thermal actuator,” Microsyst. Technol. 19(8), 1145–1151 (2013).
[Crossref]

Zhu, W. M.

Y. H. Fu, A. Q. Liu, W. M. Zhu, X. M. Zhang, D. P. Tsai, J. B. Zhang, T. Mei, J. F. Tao, H. C. Guo, X. H. Zhang, J. H. Teng, N. I. Zheludev, G. Q. Lo, and D. L. Kwong, “A micromachined reconfigurable metamaterial via reconfiguration of asymmetric split-ring resonators,” Adv. Funct. Mater. 21(18), 3589–3594 (2011).
[Crossref]

W. M. Zhu, A. Q. Liu, W. Zhang, J. F. Tao, T. Bourouina, J. H. Teng, X. H. Zhang, Q. Y. Wu, H. Tanoto, H. C. Guo, G. Q. Lo, and D. L. Kwong, “Polarization dependent state to polarization independent state change in THz metamaterials,” Appl. Phys. Lett. 99(22), 221102 (2011).
[Crossref]

Zhu, Y.

Y. Bai, K. Chen, H. Liu, T. Bu, B. Cai, J. Xu, and Y. Zhu, “Optically controllable terahertz modulator based on electromagnetically-induced-transparency-like effect,” Opt. Commun. 353, 83–89 (2015).
[Crossref]

Zide, J. M. O.

H. T. Chen, W. J. Padilla, J. M. O. Zide, A. C. Gossard, A. J. Taylor, and R. D. Averitt, “Active terahertz metamaterial devices,” Nature 444(7119), 597–600 (2006).
[Crossref] [PubMed]

Adv. Funct. Mater. (1)

Y. H. Fu, A. Q. Liu, W. M. Zhu, X. M. Zhang, D. P. Tsai, J. B. Zhang, T. Mei, J. F. Tao, H. C. Guo, X. H. Zhang, J. H. Teng, N. I. Zheludev, G. Q. Lo, and D. L. Kwong, “A micromachined reconfigurable metamaterial via reconfiguration of asymmetric split-ring resonators,” Adv. Funct. Mater. 21(18), 3589–3594 (2011).
[Crossref]

Adv. Mater. (1)

C. M. Soukoulis, M. Kafesaki, and E. N. Economou, “Negative-index materials: new frontiers in optics,” Adv. Mater. 18(15), 1941–1952 (2006).
[Crossref]

Adv. Opt. Mater. (2)

S. Savo, D. Shrekenhamer, and W. J. Padilla, “Liquid crystal metamaterial absorber spatial light modulator for THz applications,” Adv. Opt. Mater. 2(3), 275–279 (2014).
[Crossref]

P. Pitchappa, M. Manjappa, C. P. Ho, R. Singh, N. Singh, and C. Lee, “active control of electromagnetically induced transparency analog in terahertz MEMS metamaterial,” Adv. Opt. Mater. 4(4), 541–547 (2016).
[Crossref]

Appl. Phys. Lett. (4)

C. P. Ho, P. Pitchappa, Y. S. Lin, C. Y. Huang, P. Kropelnicki, and C. Lee, “Electrothermally actuated microelectromechanical systems based omega-ring terahertz metamaterial with polarization dependent characteristics,” Appl. Phys. Lett. 104(16), 161104 (2014).
[Crossref]

W. M. Zhu, A. Q. Liu, W. Zhang, J. F. Tao, T. Bourouina, J. H. Teng, X. H. Zhang, Q. Y. Wu, H. Tanoto, H. C. Guo, G. Q. Lo, and D. L. Kwong, “Polarization dependent state to polarization independent state change in THz metamaterials,” Appl. Phys. Lett. 99(22), 221102 (2011).
[Crossref]

C. H. Kodama and R. A. Coutu, “Tunable split-ring resonators using germanium telluride,” Appl. Phys. Lett. 108(23), 231901 (2016).
[Crossref]

J. Li, C. M. Shah, W. Withayachumnankul, B. S.-Y. Ung, A. Mitchell, S. Sriram, M. Bhaskaran, S. Chang, and D. Abbott, “Mechanically tunable terahertz metamaterials,” Appl. Phys. Lett. 102(12), 121101 (2013).
[Crossref]

Chin. Phys. B (1)

R. Jiang, Z. R. Wu, Z. Y. Han, and H. S. Jung, “HfO2-based ferroelectric modulator of terahertz waves with graphene metamaterial,” Chin. Phys. B 25(10), 106803 (2016).
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IEEE J. Sel. Top. Quantum Electron. (1)

Y. S. Lin, C. Y. Huang, and C. Lee, “Reconfiguration of resonance characteristics for terahertz u-shape metamaterial using MEMS mechanism,” IEEE J. Sel. Top. Quantum Electron. 21, 2700207 (2015).

Inter. J. Electromagn. Appl. (1)

L. Qi, C. Li, and G. Y. Fang, “Tunable terahertz metamaterial absorbers using active diodes,” Inter. J. Electromagn. Appl. 4(3), 57–60 (2014).

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M. Zhu, Y. S. Lin, and C. Lee, “Coupling effect combined with incident polarization to modulate double split-ring resonator in terahertz frequency range,” J. Appl. Phys. 116(17), 173106 (2014).
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F. Hu, N. Xu, W. Wang, Y. Wang, W. Zhang, J. Han, and W. Zhang, “A dynamically tunable terahertz metamaterial absorber based on an electrostatic MEMS actuator and electrical dipole resonator array,” J. Micromech. Microeng. 26(2), 025006 (2016).
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F. Hu, Y. Qian, Z. Li, J. Niu, K. Nie, X. Xiong, W. Zhang, and Z. Peng, “Design of a tunable terahertz narrowband metamaterial absorber based on an electrostatically actuated MEMS cantilever and split ring resonator array,” J. Opt. 15(5), 055101 (2013).
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Y. Bai, K. Chen, H. Liu, T. Bu, B. Cai, J. Xu, and Y. Zhu, “Optically controllable terahertz modulator based on electromagnetically-induced-transparency-like effect,” Opt. Commun. 353, 83–89 (2015).
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Opt. Express (3)

Opt. Lett. (1)

Optica (1)

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Figures (7)

Fig. 1
Fig. 1 Schematic drawings of ADSRRs for (a) Design_1, (b) Design_2, respectively. All geometrical dimensions of ADSRRs are kept at 300 nm in thickness, a = 40 μm, b = 75 μm, and w = 5 μm.
Fig. 2
Fig. 2 Transmission spectra of (a) Design_1, (b) Design_2 at TE mode. Inserted images of (a) and (b) are E-field and H-field distributions at 0.67 THz and 0.45 THz resonances for Design_1 and Design_2, respectively. (c) and (d) are the corresponding relationships of resonance and the length of gap of (a) and (b), respectively.
Fig. 3
Fig. 3 Transmission spectra of (a) Design_1, (b) Design_2 at TM mode. Inserted images of (a) and (b) are E-field and H-field distributions at 0.50 THz and 0.65 THz resonances for Design_1 and Design_2, respectively. (c) is the corresponding relationship of resonance and the length of gap of (b).
Fig. 4
Fig. 4 Transmission spectra of (a) Design_1, (b) Design_2 at different polarization angles. Inserted images of (a) and (b) are E-field and H-field distributions at polarization angle of 30° for Design_1 and Design_2, respectively.
Fig. 5
Fig. 5 Transmission spectra of (a) Design_1 and (b) Design_2 with two reflective symmetric layers by changing distance between layers. (c) is the corresponding relationship of resonance and distance between layers of (a) and (b), respectively.
Fig. 6
Fig. 6 Transmission spectra of (a) Design_1 and (b) Design_2 with two reflective symmetric layers at different polarization angle. The distance (d) between top and bottom ADSRRs is kept at 1 μm.
Fig. 7
Fig. 7 The relationship of switch ratio and polarization angle for (a) Design_1 and (b) Design_2 with one layer (green curves) and two reflective symmetric layers (orange curves), while the black curves are the average values of green and orange curves.

Equations (3)

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ε(ω)=1 F ω pe 2 ω 2 ω LCe 2
μ(ω)=1 F ω pm 2 ω 2 ω LCm 2
ω LC = 1 LC =( c 0 l ε C ) g w

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