Abstract

Wavelength conversion is one of the most demanded features in integrated photonics. During the last decade, second harmonic generation (SHG) in III-V semiconductor microdisks has been demonstrated to be an efficient way to achieve such conversion with particularly compact devices. Optimized coupling of both wavelengths to these devices still remains as a challenge. Here we compare three different approaches for vertical coupling between integrated waveguides and a III-V microdisk resonator in which SHG occurs: two well-established schemes and a new one using a single slit waveguide as an evanescent coupler.

© 2020 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

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2019 (3)

X. Lu, G. Moille, Q. Li, D. A. Westly, A. Singh, A. Rao, S.-P. Yu, T. C. Briles, S. B. Papp, and K. Srinivasan, “Efficient telecom-to-visible spectral translation through ultralow power nonlinear nanophotonics,” Nat. Photonics 13(9), 593–601 (2019).
[Crossref]

G. Moille, G. Moille, Q. Li, Q. Li, T. C. Briles, T. C. Briles, S.-P. Yu, S.-P. Yu, T. Drake, T. Drake, X. Lu, X. Lu, A. Rao, A. Rao, D. Westly, S. B. Papp, S. B. Papp, K. Srinivasan, K. Srinivasan, and K. Srinivasan, “Broadband resonator-waveguide coupling for efficient extraction of octave-spanning microcombs,” Opt. Lett. 44(19), 4737–4740 (2019).
[Crossref]

L. Chang, A. Boes, P. Pintus, J. D. Peters, M. Kennedy, X.-W. Guo, N. Volet, S.-P. Yu, S. B. Papp, and J. E. Bowers, “Strong frequency conversion in heterogeneously integrated GaAs resonators,” APL Photonics 4(3), 036103 (2019).
[Crossref]

2018 (3)

2017 (1)

P. Guillemé, Y. Dumeige, J. Stodolna, M. Vallet, T. Rohel, A. Létoublon, C. Cornet, A. Ponchet, O. Durand, and Y. Léger, “Second harmonic generation in gallium phosphide microdisks on silicon: from strict $\bar{4}$4¯ to random quasi-phase matching,” Semicond. Sci. Technol. 32(6), 065004 (2017).
[Crossref]

2016 (4)

D. P. Lake, M. Mitchell, H. Jayakumar, L. F. dos Santos, D. Curic, and P. E. Barclay, “Efficient telecom to visible wavelength conversion in doubly resonant gallium phosphide microdisks,” Appl. Phys. Lett. 108(3), 031109 (2016).
[Crossref]

F. Turri, F. Ramiro-Manzano, I. Carusotto, M. Ghulinyan, G. Pucker, and L. Pavesi, “Wavelength Dependence of a Vertically Coupled Resonator-Waveguide System,” J. Lightwave Technol. 34(23), 5385–5390 (2016).
[Crossref]

P. Guillemé, M. Vallet, J. Stodolna, A. Ponchet, C. Cornet, A. Létoublon, P. Féron, O. Durand, Y. Léger, and Y. Dumeige, “Antiphase domain tailoring for combination of modal and 4¯ -quasi-phase matching in gallium phosphide microdisks,” Opt. Express 24(13), 14608 (2016).
[Crossref]

I. Roland, M. Gromovyi, Y. Zeng, M. El Kurdi, S. Sauvage, C. Brimont, T. Guillet, B. Gayral, F. Semond, J. Y. Duboz, M. de Micheli, X. Checoury, and P. Boucaud, “Phase-matched second harmonic generation with on-chip GaN-on-Si microdisks,” Sci. Rep. 6(1), 34191 (2016).
[Crossref]

2014 (3)

M. Mitchell, A. C. Hryciw, and P. E. Barclay, “Cavity optomechanics in gallium phosphide microdisks,” Appl. Phys. Lett. 104(14), 141104 (2014).
[Crossref]

P. S. Kuo, J. Bravo-Abad, and G. S. Solomon, “Second-harmonic generation using -quasi-phasematching in a GaAs whispering-gallery-mode microcavity,” Nat. Commun. 5(1), 3109 (2014).
[Crossref]

N. Thomas, R. J. Barbour, Y. Song, M. L. Lee, and K.-M. C. Fu, “Waveguide-integrated single-crystalline GaP resonators on diamond,” Opt. Express 22(11), 13555 (2014).
[Crossref]

2011 (1)

N. A. M. Yahya, W. H. Lim, S. W. Phang, H. Ahmad, R. Zakaria, and F. R. M. Adikan, “Curing Methods Yield Multiple Refractive Index of Benzocyclobutene Polymer Film,” Sci. Technol. 5(2), 163–165 (2011).
[Crossref]

2010 (2)

J. S. Levy, A. Gondarenko, M. A. Foster, A. C. Turner-Foster, A. L. Gaeta, and M. Lipson, “CMOS-compatible multiple-wavelength oscillator for on-chip optical interconnects,” Nat. Photonics 4(1), 37–40 (2010).
[Crossref]

C. E. de Nobriga, G. D. Hobbs, W. J. Wadsworth, J. C. Knight, D. V. Skryabin, A. Samarelli, M. Sorel, and R. M. D. L. Rue, “Supermode dispersion and waveguide-to-slot mode transition in arrays of silicon-on-insulator waveguides,” Opt. Lett. 35(23), 3925–3927 (2010).
[Crossref]

2009 (1)

C. Koos, P. Vorreau, T. Vallaitis, P. Dumon, W. Bogaerts, R. Baets, B. Esembeson, I. Biaggio, T. Michinobu, F. Diederich, W. Freude, and J. Leuthold, “All-optical high-speed signal processing with silicon–organic hybrid slot waveguides,” Nat. Photonics 3(4), 216–219 (2009).
[Crossref]

2008 (1)

2006 (1)

Y. Dumeige and P. Féron, “Whispering-gallery-mode analysis of phase-matched doubly resonant second-harmonic generation,” Phys. Rev. A 74(6), 063804 (2006).
[Crossref]

2005 (1)

1999 (1)

1998 (1)

1965 (1)

W. L. Bond, “Measurement of the Refractive Indices of Several Crystals,” J. Appl. Phys. 36(5), 1674–1677 (1965).
[Crossref]

Adikan, F. R. M.

N. A. M. Yahya, W. H. Lim, S. W. Phang, H. Ahmad, R. Zakaria, and F. R. M. Adikan, “Curing Methods Yield Multiple Refractive Index of Benzocyclobutene Polymer Film,” Sci. Technol. 5(2), 163–165 (2011).
[Crossref]

Ahmad, H.

N. A. M. Yahya, W. H. Lim, S. W. Phang, H. Ahmad, R. Zakaria, and F. R. M. Adikan, “Curing Methods Yield Multiple Refractive Index of Benzocyclobutene Polymer Film,” Sci. Technol. 5(2), 163–165 (2011).
[Crossref]

Baehr-Jones, T.

Baets, R.

C. Koos, P. Vorreau, T. Vallaitis, P. Dumon, W. Bogaerts, R. Baets, B. Esembeson, I. Biaggio, T. Michinobu, F. Diederich, W. Freude, and J. Leuthold, “All-optical high-speed signal processing with silicon–organic hybrid slot waveguides,” Nat. Photonics 3(4), 216–219 (2009).
[Crossref]

Barbour, R. J.

Barclay, P. E.

D. P. Lake, M. Mitchell, H. Jayakumar, L. F. dos Santos, D. Curic, and P. E. Barclay, “Efficient telecom to visible wavelength conversion in doubly resonant gallium phosphide microdisks,” Appl. Phys. Lett. 108(3), 031109 (2016).
[Crossref]

M. Mitchell, A. C. Hryciw, and P. E. Barclay, “Cavity optomechanics in gallium phosphide microdisks,” Appl. Phys. Lett. 104(14), 141104 (2014).
[Crossref]

Biaggio, I.

C. Koos, P. Vorreau, T. Vallaitis, P. Dumon, W. Bogaerts, R. Baets, B. Esembeson, I. Biaggio, T. Michinobu, F. Diederich, W. Freude, and J. Leuthold, “All-optical high-speed signal processing with silicon–organic hybrid slot waveguides,” Nat. Photonics 3(4), 216–219 (2009).
[Crossref]

Biasi, S.

S. Biasi, P. Guilleme, A. Volpini, G. Fontana, and L. Pavesi, “Time response of a microring resonator to a rectangular pulse in different coupling regimes,” arXiv:1903.10747 [physics] (2019).

Boes, A.

L. Chang, A. Boes, P. Pintus, J. D. Peters, M. Kennedy, X.-W. Guo, N. Volet, S.-P. Yu, S. B. Papp, and J. E. Bowers, “Strong frequency conversion in heterogeneously integrated GaAs resonators,” APL Photonics 4(3), 036103 (2019).
[Crossref]

Bogaerts, W.

C. Koos, P. Vorreau, T. Vallaitis, P. Dumon, W. Bogaerts, R. Baets, B. Esembeson, I. Biaggio, T. Michinobu, F. Diederich, W. Freude, and J. Leuthold, “All-optical high-speed signal processing with silicon–organic hybrid slot waveguides,” Nat. Photonics 3(4), 216–219 (2009).
[Crossref]

Bond, W. L.

W. L. Bond, “Measurement of the Refractive Indices of Several Crystals,” J. Appl. Phys. 36(5), 1674–1677 (1965).
[Crossref]

Boucaud, P.

I. Roland, M. Gromovyi, Y. Zeng, M. El Kurdi, S. Sauvage, C. Brimont, T. Guillet, B. Gayral, F. Semond, J. Y. Duboz, M. de Micheli, X. Checoury, and P. Boucaud, “Phase-matched second harmonic generation with on-chip GaN-on-Si microdisks,” Sci. Rep. 6(1), 34191 (2016).
[Crossref]

Bowers, J. E.

L. Chang, A. Boes, P. Pintus, J. D. Peters, M. Kennedy, X.-W. Guo, N. Volet, S.-P. Yu, S. B. Papp, and J. E. Bowers, “Strong frequency conversion in heterogeneously integrated GaAs resonators,” APL Photonics 4(3), 036103 (2019).
[Crossref]

Bravo-Abad, J.

P. S. Kuo, J. Bravo-Abad, and G. S. Solomon, “Second-harmonic generation using -quasi-phasematching in a GaAs whispering-gallery-mode microcavity,” Nat. Commun. 5(1), 3109 (2014).
[Crossref]

Briles, T. C.

Brimont, C.

I. Roland, M. Gromovyi, Y. Zeng, M. El Kurdi, S. Sauvage, C. Brimont, T. Guillet, B. Gayral, F. Semond, J. Y. Duboz, M. de Micheli, X. Checoury, and P. Boucaud, “Phase-matched second harmonic generation with on-chip GaN-on-Si microdisks,” Sci. Rep. 6(1), 34191 (2016).
[Crossref]

Bruch, A. W.

A. W. Bruch, X. Liu, X. Guo, J. B. Surya, Z. Gong, L. Zhang, J. Wang, J. Yan, and H. X. Tang, “17 000%/W second-harmonic conversion efficiency in single-crystalline aluminum nitride microresonators,” Appl. Phys. Lett. 113(13), 131102 (2018).
[Crossref]

Carusotto, I.

Chang, L.

L. Chang, A. Boes, P. Pintus, J. D. Peters, M. Kennedy, X.-W. Guo, N. Volet, S.-P. Yu, S. B. Papp, and J. E. Bowers, “Strong frequency conversion in heterogeneously integrated GaAs resonators,” APL Photonics 4(3), 036103 (2019).
[Crossref]

Checoury, X.

I. Roland, M. Gromovyi, Y. Zeng, M. El Kurdi, S. Sauvage, C. Brimont, T. Guillet, B. Gayral, F. Semond, J. Y. Duboz, M. de Micheli, X. Checoury, and P. Boucaud, “Phase-matched second harmonic generation with on-chip GaN-on-Si microdisks,” Sci. Rep. 6(1), 34191 (2016).
[Crossref]

Chin, M. K.

Cornet, C.

P. Guillemé, Y. Dumeige, J. Stodolna, M. Vallet, T. Rohel, A. Létoublon, C. Cornet, A. Ponchet, O. Durand, and Y. Léger, “Second harmonic generation in gallium phosphide microdisks on silicon: from strict $\bar{4}$4¯ to random quasi-phase matching,” Semicond. Sci. Technol. 32(6), 065004 (2017).
[Crossref]

P. Guillemé, M. Vallet, J. Stodolna, A. Ponchet, C. Cornet, A. Létoublon, P. Féron, O. Durand, Y. Léger, and Y. Dumeige, “Antiphase domain tailoring for combination of modal and 4¯ -quasi-phase matching in gallium phosphide microdisks,” Opt. Express 24(13), 14608 (2016).
[Crossref]

Curic, D.

D. P. Lake, M. Mitchell, H. Jayakumar, L. F. dos Santos, D. Curic, and P. E. Barclay, “Efficient telecom to visible wavelength conversion in doubly resonant gallium phosphide microdisks,” Appl. Phys. Lett. 108(3), 031109 (2016).
[Crossref]

Dalibard, J.

Dalton, L.

de Micheli, M.

I. Roland, M. Gromovyi, Y. Zeng, M. El Kurdi, S. Sauvage, C. Brimont, T. Guillet, B. Gayral, F. Semond, J. Y. Duboz, M. de Micheli, X. Checoury, and P. Boucaud, “Phase-matched second harmonic generation with on-chip GaN-on-Si microdisks,” Sci. Rep. 6(1), 34191 (2016).
[Crossref]

de Nobriga, C. E.

Diederich, F.

C. Koos, P. Vorreau, T. Vallaitis, P. Dumon, W. Bogaerts, R. Baets, B. Esembeson, I. Biaggio, T. Michinobu, F. Diederich, W. Freude, and J. Leuthold, “All-optical high-speed signal processing with silicon–organic hybrid slot waveguides,” Nat. Photonics 3(4), 216–219 (2009).
[Crossref]

dos Santos, L. F.

D. P. Lake, M. Mitchell, H. Jayakumar, L. F. dos Santos, D. Curic, and P. E. Barclay, “Efficient telecom to visible wavelength conversion in doubly resonant gallium phosphide microdisks,” Appl. Phys. Lett. 108(3), 031109 (2016).
[Crossref]

Drake, T.

Duboz, J. Y.

I. Roland, M. Gromovyi, Y. Zeng, M. El Kurdi, S. Sauvage, C. Brimont, T. Guillet, B. Gayral, F. Semond, J. Y. Duboz, M. de Micheli, X. Checoury, and P. Boucaud, “Phase-matched second harmonic generation with on-chip GaN-on-Si microdisks,” Sci. Rep. 6(1), 34191 (2016).
[Crossref]

Dumeige, Y.

P. Guillemé, Y. Dumeige, J. Stodolna, M. Vallet, T. Rohel, A. Létoublon, C. Cornet, A. Ponchet, O. Durand, and Y. Léger, “Second harmonic generation in gallium phosphide microdisks on silicon: from strict $\bar{4}$4¯ to random quasi-phase matching,” Semicond. Sci. Technol. 32(6), 065004 (2017).
[Crossref]

P. Guillemé, M. Vallet, J. Stodolna, A. Ponchet, C. Cornet, A. Létoublon, P. Féron, O. Durand, Y. Léger, and Y. Dumeige, “Antiphase domain tailoring for combination of modal and 4¯ -quasi-phase matching in gallium phosphide microdisks,” Opt. Express 24(13), 14608 (2016).
[Crossref]

Y. Dumeige and P. Féron, “Whispering-gallery-mode analysis of phase-matched doubly resonant second-harmonic generation,” Phys. Rev. A 74(6), 063804 (2006).
[Crossref]

Dumon, P.

C. Koos, P. Vorreau, T. Vallaitis, P. Dumon, W. Bogaerts, R. Baets, B. Esembeson, I. Biaggio, T. Michinobu, F. Diederich, W. Freude, and J. Leuthold, “All-optical high-speed signal processing with silicon–organic hybrid slot waveguides,” Nat. Photonics 3(4), 216–219 (2009).
[Crossref]

Durand, O.

P. Guillemé, Y. Dumeige, J. Stodolna, M. Vallet, T. Rohel, A. Létoublon, C. Cornet, A. Ponchet, O. Durand, and Y. Léger, “Second harmonic generation in gallium phosphide microdisks on silicon: from strict $\bar{4}$4¯ to random quasi-phase matching,” Semicond. Sci. Technol. 32(6), 065004 (2017).
[Crossref]

P. Guillemé, M. Vallet, J. Stodolna, A. Ponchet, C. Cornet, A. Létoublon, P. Féron, O. Durand, Y. Léger, and Y. Dumeige, “Antiphase domain tailoring for combination of modal and 4¯ -quasi-phase matching in gallium phosphide microdisks,” Opt. Express 24(13), 14608 (2016).
[Crossref]

El Kurdi, M.

I. Roland, M. Gromovyi, Y. Zeng, M. El Kurdi, S. Sauvage, C. Brimont, T. Guillet, B. Gayral, F. Semond, J. Y. Duboz, M. de Micheli, X. Checoury, and P. Boucaud, “Phase-matched second harmonic generation with on-chip GaN-on-Si microdisks,” Sci. Rep. 6(1), 34191 (2016).
[Crossref]

Esembeson, B.

C. Koos, P. Vorreau, T. Vallaitis, P. Dumon, W. Bogaerts, R. Baets, B. Esembeson, I. Biaggio, T. Michinobu, F. Diederich, W. Freude, and J. Leuthold, “All-optical high-speed signal processing with silicon–organic hybrid slot waveguides,” Nat. Photonics 3(4), 216–219 (2009).
[Crossref]

Féron, P.

Fontana, G.

S. Biasi, P. Guilleme, A. Volpini, G. Fontana, and L. Pavesi, “Time response of a microring resonator to a rectangular pulse in different coupling regimes,” arXiv:1903.10747 [physics] (2019).

Foster, M. A.

J. S. Levy, A. Gondarenko, M. A. Foster, A. C. Turner-Foster, A. L. Gaeta, and M. Lipson, “CMOS-compatible multiple-wavelength oscillator for on-chip optical interconnects,” Nat. Photonics 4(1), 37–40 (2010).
[Crossref]

Freude, W.

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L. Chang, A. Boes, P. Pintus, J. D. Peters, M. Kennedy, X.-W. Guo, N. Volet, S.-P. Yu, S. B. Papp, and J. E. Bowers, “Strong frequency conversion in heterogeneously integrated GaAs resonators,” APL Photonics 4(3), 036103 (2019).
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[Crossref]

P. Guillemé, M. Vallet, J. Stodolna, A. Ponchet, C. Cornet, A. Létoublon, P. Féron, O. Durand, Y. Léger, and Y. Dumeige, “Antiphase domain tailoring for combination of modal and 4¯ -quasi-phase matching in gallium phosphide microdisks,” Opt. Express 24(13), 14608 (2016).
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Ramiro-Manzano, F.

Rao, A.

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P. Guillemé, Y. Dumeige, J. Stodolna, M. Vallet, T. Rohel, A. Létoublon, C. Cornet, A. Ponchet, O. Durand, and Y. Léger, “Second harmonic generation in gallium phosphide microdisks on silicon: from strict $\bar{4}$4¯ to random quasi-phase matching,” Semicond. Sci. Technol. 32(6), 065004 (2017).
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Surya, J. B.

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J. B. Surya, X. Guo, C.-L. Zou, and H. X. Tang, “Control of second-harmonic generation in doubly resonant aluminum nitride microrings to address a rubidium two-photon clock transition,” Opt. Lett. 43(11), 2696–2699 (2018).
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A. W. Bruch, X. Liu, X. Guo, J. B. Surya, Z. Gong, L. Zhang, J. Wang, J. Yan, and H. X. Tang, “17 000%/W second-harmonic conversion efficiency in single-crystalline aluminum nitride microresonators,” Appl. Phys. Lett. 113(13), 131102 (2018).
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Vallaitis, T.

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P. Guillemé, M. Vallet, J. Stodolna, A. Ponchet, C. Cornet, A. Létoublon, P. Féron, O. Durand, Y. Léger, and Y. Dumeige, “Antiphase domain tailoring for combination of modal and 4¯ -quasi-phase matching in gallium phosphide microdisks,” Opt. Express 24(13), 14608 (2016).
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N. A. M. Yahya, W. H. Lim, S. W. Phang, H. Ahmad, R. Zakaria, and F. R. M. Adikan, “Curing Methods Yield Multiple Refractive Index of Benzocyclobutene Polymer Film,” Sci. Technol. 5(2), 163–165 (2011).
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APL Photonics (1)

L. Chang, A. Boes, P. Pintus, J. D. Peters, M. Kennedy, X.-W. Guo, N. Volet, S.-P. Yu, S. B. Papp, and J. E. Bowers, “Strong frequency conversion in heterogeneously integrated GaAs resonators,” APL Photonics 4(3), 036103 (2019).
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Appl. Phys. Lett. (3)

D. P. Lake, M. Mitchell, H. Jayakumar, L. F. dos Santos, D. Curic, and P. E. Barclay, “Efficient telecom to visible wavelength conversion in doubly resonant gallium phosphide microdisks,” Appl. Phys. Lett. 108(3), 031109 (2016).
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P. S. Kuo, J. Bravo-Abad, and G. S. Solomon, “Second-harmonic generation using -quasi-phasematching in a GaAs whispering-gallery-mode microcavity,” Nat. Commun. 5(1), 3109 (2014).
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Nat. Photonics (3)

C. Koos, P. Vorreau, T. Vallaitis, P. Dumon, W. Bogaerts, R. Baets, B. Esembeson, I. Biaggio, T. Michinobu, F. Diederich, W. Freude, and J. Leuthold, “All-optical high-speed signal processing with silicon–organic hybrid slot waveguides,” Nat. Photonics 3(4), 216–219 (2009).
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Sci. Technol. (1)

N. A. M. Yahya, W. H. Lim, S. W. Phang, H. Ahmad, R. Zakaria, and F. R. M. Adikan, “Curing Methods Yield Multiple Refractive Index of Benzocyclobutene Polymer Film,” Sci. Technol. 5(2), 163–165 (2011).
[Crossref]

Semicond. Sci. Technol. (1)

P. Guillemé, Y. Dumeige, J. Stodolna, M. Vallet, T. Rohel, A. Létoublon, C. Cornet, A. Ponchet, O. Durand, and Y. Léger, “Second harmonic generation in gallium phosphide microdisks on silicon: from strict $\bar{4}$4¯ to random quasi-phase matching,” Semicond. Sci. Technol. 32(6), 065004 (2017).
[Crossref]

Other (3)

P. Guillemé, “Génération de seconde harmonique dans les microdisques de phosphure de gallium intégrés sur silicium,” PhD, INSA Rennes (2016).

T. J. A. Kippenberg, “Nonlinear Optics in Ultra-high Q Whispering-Gallery Optical Microcavities,” phd, California Institute of Technology (2004).

S. Biasi, P. Guilleme, A. Volpini, G. Fontana, and L. Pavesi, “Time response of a microring resonator to a rectangular pulse in different coupling regimes,” arXiv:1903.10747 [physics] (2019).

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Figures (3)

Fig. 1.
Fig. 1. (a, b, c) Schematic representation of the three models studied, all-pass, slit and add-drop configurations. (d) 3D model of the integrated system studied and modal profiles of the selected TE (top) and TM (bottom) selected symmetric supermodes of the slit waveguide. (e) Color plot of the coupling Q factor versus propagation constant mismatch and evanescent coupling coefficient κ between guide mode and WGM. Also indicated the intrinsic Q factor of the chosen disk at both frequencies and the κ range of the geometries simulated.
Fig. 2.
Fig. 2. Dispersion curves for the different configurations for both modes. TE (solid line) and TM (dashed line) between 0.9 and 2.1 µm. Black markers show the chosen WGMs for SHG
Fig. 3.
Fig. 3. Transmission spectra in all configurations for fundamental (left) and second harmonic (right) wavelengths. Legend shows the ratio between loaded and intrinsic quality factors, which is 50% at critical coupling.

Tables (2)

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Table 1. Geometrical parameters of the different configurations for the β matching condition

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Table 2. Absolute efficiencies calculated for the schemas for 1mW of pump.

Equations (1)

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d d z ( A B ) = ( 0 i κ exp ( i Δ β z ) i κ exp ( i Δ β z ) 0 ) ( A B )

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