Abstract

Circularly polarized light in the vacuum ultraviolet (VUV) region is important for probing the structural and electronic properties of matter. Moreover, a circularly polarized VUV coherent light enables one to observe the dynamics of biomolecules and electron spins in solids. The development of a table-top technology to directly generate circularly polarized VUV coherent light is of great value, owing to the limitation of polarization control elements for the VUV region. However, solid-state nonlinear media for this purpose, which simplifies the setup, have not been presented. Here, we demonstrate a solid-based method for the direct generation of circularly polarized VUV coherent light using third-harmonic generation in a dielectric square lattice photonic crystal nanomembrane (PCN). We found that the waveguide resonance of PCN with fourfold rotational symmetry, irradiated by a circularly polarized fundamental beam, generates circularly polarized third harmonic at 157 nm with sufficient intensity for VUV spectroscopic applications. The presented results suggest the possibility that the PCN can be used as a practical nonlinear medium for circularly polarized coherent VUV generation.

© 2020 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

Full Article  |  PDF Article

References

  • View by:
  • |
  • |
  • |

  1. L. Barron, Molecular Light Scattering and Optical Activity, 2nd ed. (Cambridge University, 2004).
  2. B. Nordén, A. Rodger, and T. Dafforn, Linear Dicrhoism and Circular Dichroism: A Textbook on Polarizaed-Light Spectroscopy (RSC Publishing, 2010).
  3. D. D. Hickstein, F. J. Dollar, P. Grychtol, J. L. Ellis, R. Knut, C. Hernández-García, D. Zusin, C. Gentry, J. M. Shaw, T. Fan, K. M. Dorney, A. Becker, A. Jaroń-Becker, H. C. Kapteyn, M. M. Murnane, and C. G. Durfee, “Non-collinear generation of angularly isolated circularly polarized high harmonics,” Nat. Photonics 9, 743–750 (2015).
    [Crossref]
  4. P.-C. Huang, C. Hernández-García, J.-T. Huang, P.-Y. Huang, C.-H. Lu, L. Rego, D. D. Hickstein, J. L. Ellis, A. Jaron-Becker, A. Becker, S.-D. Yang, C. G. Durfee, L. Plaja, H. C. Kapteyn, M. M. Murnane, A. H. Kung, and M.-C. Chen, “Polarization control of isolated high-harmonic pulses,” Nat. Photonics 12, 349–354 (2018).
    [Crossref]
  5. A. Ferré, C. Handschin, M. Dumergue, F. Burgy, A. Comby, D. Descamps, B. Fabre, G. A. Garcia, R. Géneaux, L. Merceron, E. Mével, L. Nahon, S. Petit, B. Pons, D. Staedter, S. Weber, T. Ruchon, V. Blanchet, and Y. Mairesse, “A table-top ultrashort light source in the extreme ultraviolet for circular dichroism experiments,” Nat. Photonics 9, 93–98 (2015).
    [Crossref]
  6. A. Mándi and T. Kurtán, “Applications of OR/ECD/VCD to the structure elucidation of natural products,” Nat. Prod. Rep. 36, 889–918 (2019).
    [Crossref]
  7. W. C. Johnson, “Circular dichroism spectroscopy and the vacuum ultraviolet region,” Annu. Rev. Phys. Chem. 29, 93–114 (1978).
    [Crossref]
  8. U. J. Meierhenrich, J.-J. Filippi, C. Meinert, J. H. Bredehöft, J. Takahashi, L. Nahon, N. C. Jones, and S. V. Hoffmann, “Circular dichroism of amino acids in the vacuum-ultraviolet region,” Angew. Chem. Int. Ed. 49,7799–7802 (2010).
    [Crossref]
  9. K. Matsuo and K. Gekko, “Vacuum-ultraviolet circular dichroism study of saccharides by synchrotron radiation spectrophotometry,” Carbohy. Res. 339, 591–597 (2004).
    [Crossref]
  10. M. Savoini, P. Biagioni, S. C. J. Meskers, L. Duò, B. Hecht, and M. Finazzi, “Spontaneous formation of left- and right-handed cholesterically ordered domains in an enantiopure chiral polyfluorene film,” J. Phys. Chem. Lett. 2, 1359–1362 (2011).
    [Crossref]
  11. C. Niezborala and F. Hache, “Conformational changes in photoexcited (R)-(+)-1,1’-bi-2-naphthol studied by time-resolved circular dichroism,” J. Am. Chem. Soc. 130, 12783 (2008).
    [Crossref]
  12. M. Oppermann, J. Spekowius, B. Bauer, R. Pfister, M. Chergui, and J. Helbing, “Broad-band ultraviolet CD spectroscopy of ultrafast peptide backbone conformational dynamics,” J. Phys. Chem. Lett. 10, 2700−2705 (2019).
    [Crossref]
  13. F. Auvray, D. Dennetiere, A. Giuliani, F. Jamme, F. Wien, B. Nay, S. Zirah, F. Polack, C. Menneglier, B. Lagarde, J. D. Hirst, and M. Refregiers, “Time resolved transient circular dichroism spectroscopy using synchrotron natural polarization,” Struct. Dyn. 6, 054307 (2019).
    [Crossref]
  14. B. Lv, T. Qian, and H. Ding, “Angle-resolved photoemission spectroscopy and its application to topological materials,” Nat. Rev. Phys. 1, 609–626 (2019).
    [Crossref]
  15. Y. He, I. M. Vishik, M. Yi, S. Yang, Z. Liu, J. J. Lee, S. Chen, S. N. Rebec, D. Leuenberger, A. Zong, C. M. Jefferson, R. G. Moore, P. S. Kirchmann, A. J. Merriam, and Z.-X. Shen, “Invited article: High resolution angle resolved photoemission with tabletop 11 eV laser,” Rev. Sci. Instrum. 87, 011301 (2016).
    [Crossref]
  16. A. Damascelli, Z. Hussain, and Z.-X. Shen, “Angle-resolved photoemission studies of the cuprate superconductors,” Rev. Mod. Phys. 75,473–541 (2003).
    [Crossref]
  17. C. L. Smallwood, R. A. Kaindl, and A. Lanzara, “Ultrafast angle-resolved photoemission spectroscopy of quantum materials,” Euro. Lett. 115, 27001 (2016).
    [Crossref]
  18. T. Kiss, T. Shimojima, K. Ishizaka, A. Chainani, T. Togashi, T. Kanai, X.-Y. Wang, C.-T. Chen, S. Watanabe, and S. Shin, “A versatile system for ultrahigh resolution, low temperature, and polarization dependent laser-angle-resolved photoemission spectroscopy,” Rev. Sci. Instrum. 79, 023106 (2008).
    [Crossref]
  19. Y. H. Wang, D. Hsieh, D. Pilon, L. Fu, D. R. Gardner, Y. S. Lee, and N. Gedik, “Observation of a warped helical spin texture in Bi2Se3 from circular dichroism angle-resolved photoemission spectroscopy,” Phys. Rev. Lett. 107, 207602 (2011).
    [Crossref]
  20. M. D. Neumann, C. Cobet, H. Kaser, M. Kolbe, A. Gottwald, M. Richter, and N. Esser, “A synchrotron-radiation-based variable angle ellipsometer for the visible to vacuum ultraviolet spectral range,” Rev. Sci. Instrum. 85, 055117 (2014).
    [Crossref]
  21. M. Kauranen and A. V. Zayats, “Nonlinear plasmonics,” Nat. Photonics 6, 737–748 (2012).
    [Crossref]
  22. G. Li, S. Zhang, and T. Zentgraf, “Nonlinear photonic metasufraces,” Nat. Rev. Mater. 2, 17010 (2017).
    [Crossref]
  23. H. J. Simon and N. Bloembergen, “Second-harmonic light generation in crystals with natural optical activity,” Phys. Rev. 171, 1104–1114 (1968).
    [Crossref]
  24. K. Konishi, T. Higuchi, J. Li, J. Larsson, S. Ishii, and M. Kuwata-Gonokami, “Polarization-controlled circular second-harmonic generation from metal hole arrays with threefold rotational symmetry,” Phys. Rev. Lett. 112, 135502 (2014).
    [Crossref]
  25. S. Chen, G. Li, F. Zeuner, W. H. Wong, E. Y. B. Pun, T. Zentgraf, K. W. Cheah, and S. Zhang, “Symmetry-selective third-harmonic generation from plasmonic metacrystals,” Phys. Rev. Lett. 113, 033901 (2014).
    [Crossref]
  26. C. Kern, M. Zürch, and C. Spielmann, “Limitations of extreme nonlinear ultrafast nanophotonics,” Nanophotonics 4, 303–323 (2015).
    [Crossref]
  27. S. Jahani and Z. Jacob, “All-dielectric metamaterials,” Nat. Nanotechnol. 11, 23–36 (2016).
    [Crossref]
  28. M. Semmlinger, M. Lun, T. J. Yang, M. Zhang, C. Zhang, W.-Y. Tsai, D. P. Tsai, P. Nordlander, and N. J. Halas, “Vacuum ultraviolet light-generating metasurface,” Nano Lett. 18, 5738–5743 (2018).
    [Crossref]
  29. M. Semmlinger, M. Zhang, M. L. Tseng, T.-T. Huang, J. Yang, D. P. Tsai, P. Nordlander, and N. J. Halas, “Generating third harmonic vacuum ultraviolet light with a TiO2 metasurface,” Nano Lett. 19, 8972–8978 (2019).
    [Crossref]
  30. K. Konishi, D. Akai, Y. Mita, M. Ishida, J. Yumoto, and M. Kuwata-Gonokami, “Tunable third harmonic generation in the vacuum ultraviolet region using dielectric nanomembranes,” APL Photon. 5, 066103 (2020).
    [Crossref]
  31. K.-C. Shen, Y.-T. Huang, T. L. Chung, M. L. Tseng, W.-Y. Tsai, G. Sun, and D. P. Tsai, “Giant efficiency of visible second-harmonic light by an all-dielectric multiple-quantum-well metasurface,” Phys. Rev. Appl. 12, 064056 (2019).
    [Crossref]
  32. B. Liu, B. Sain, B. Reineke, R. Zhao, C. Meier, L. Huang, Y. Jiang, and T. Zentgraf, “Nonlinear wavefront control by geometric-phase dielectric metasurfaces: influence of mode field and rotational symmetry,” Adv. Opt. Mater. 8, 1902050 (2020).
    [Crossref]
  33. P. Butcher and D. Cotter, The Elements of Nonlinear Optics (Cambridge University, 1990).
  34. B. K. Canfield, S. Kujala, K. Jefimovs, Y. Svirko, J. Turunen, and M. Kauranen, “A macroscopic formalism to describe the second-order nonlinear optical response of nanostructures,” J. Opt. A 8, S278–S284 (2006).
    [Crossref]
  35. M. Ishida, I. Katakabe, T. Nakamura, and N. Ohtake, “Epitaxial Al2O3 films on Si by low-pressure chemical vapor deposition,” Appl. Phys. Lett. 52, 1326–1328 (1988).
    [Crossref]
  36. M. Ishida, K. Sawada, S. Yamaguchi, T. Nakamura, and T. Suzuki, “Heteroepitaxial Si/Al2O3/Si structures,” Appl. Phys. Lett. 55, 556–558 (1989).
    [Crossref]
  37. A. Shchepetov, M. Prunnila, F. Alzina, L. Schneider, J. Cuffe, H. Jiang, E. I. Kauppinen, C. M. Sotomayor Torres, and J. Ahopelto, “Ultra-thin free-standing single crystalline silicon membranes with strain control,” Appl. Phys. Lett. 102, 192108 (2013).
    [Crossref]
  38. S. G. Tikhodeev, A. L. Yablonskii, E. A. Muljarov, N. A. Gippius, and T. Ishihara, “Quasiguided modes and optical properties of photonic crystal slabs,” Phys. Rev. B 66, 045102 (2002).
    [Crossref]
  39. C.-T. Chiang, M. Huth, A. Trützschler, M. Kiel, F. Schumann, J. Kirschner, and W. Widdra, “Boosting laboratory photoelectron spectroscopy by megahertz high order harmonics,” New J. Phys. 17, 013035 (2015).
    [Crossref]
  40. A. Mizushima, R. R. Reddy, K. Konishi, T. Ezawa, E. Ota, A. Higo, M. Kuwata-Gonokami, and Y. Mita, “Assessment of annealing treatment for wrinckle-less SiO2 membrane,” 22nd Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP), Virtual Conference, June15–26, (2020).
  41. M. Oppermann, B. Bauer, T. Rossi, F. Zinna, J. Helbing, J. Lacour, and M. Chergui, “Ultrafast broadband circular dichroism in the deep ultraviolet,” Optica 6, 56–60 (2019).
    [Crossref]
  42. C. T. Chen, G. L. Wang, X. Y. Wang, and Z. Y. Xu, “Deep-UV nonlinear optical crystal KBe2BO3F2—discovery, growth, optical properties and applications,” Appl. Phys. B 97, 9–25 (2009).
    [Crossref]
  43. N. Saito, P. Xia, F. Lu, T. Kanai, J. Itatani, and N. Ishii, “Observation of selection rules for circularly polarized fields in high-harmonic generation from a crystalline solid,” Optica 4, 1333–1336 (2017).
    [Crossref]
  44. T. T. Luu, M. Garg, S. Y. Kruchinin, A. Moulet, M. Hassan, and E. Goulielmakis, “Extreme ultraviolet high-harmonic spectroscopy of solids,” Nature 521, 498–502 (2015).
    [Crossref]
  45. Y. Mita, E. Lebrasseur, Y. Okamoto, F. Marty, R. Setoguchi, K. Yamada, I. Mori, S. Morishita, Y. Imai, K. Hosaka, A. Hirakawa, S. Inoue, M. Kubota, and M. Denoual, “Opportunities of CMOS-MEMS integration through LSI foundry and open facility,” Jpn. J. Appl. Phys. 56, 06GA03 (2017).
    [Crossref]
  46. Y. Morimoto and P. Baum, “Diffraction and microscopy with attosecond electron pulse trains,” Nat. Phys. 14, 252–256 (2018).
    [Crossref]

2020 (2)

K. Konishi, D. Akai, Y. Mita, M. Ishida, J. Yumoto, and M. Kuwata-Gonokami, “Tunable third harmonic generation in the vacuum ultraviolet region using dielectric nanomembranes,” APL Photon. 5, 066103 (2020).
[Crossref]

B. Liu, B. Sain, B. Reineke, R. Zhao, C. Meier, L. Huang, Y. Jiang, and T. Zentgraf, “Nonlinear wavefront control by geometric-phase dielectric metasurfaces: influence of mode field and rotational symmetry,” Adv. Opt. Mater. 8, 1902050 (2020).
[Crossref]

2019 (7)

K.-C. Shen, Y.-T. Huang, T. L. Chung, M. L. Tseng, W.-Y. Tsai, G. Sun, and D. P. Tsai, “Giant efficiency of visible second-harmonic light by an all-dielectric multiple-quantum-well metasurface,” Phys. Rev. Appl. 12, 064056 (2019).
[Crossref]

M. Semmlinger, M. Zhang, M. L. Tseng, T.-T. Huang, J. Yang, D. P. Tsai, P. Nordlander, and N. J. Halas, “Generating third harmonic vacuum ultraviolet light with a TiO2 metasurface,” Nano Lett. 19, 8972–8978 (2019).
[Crossref]

A. Mándi and T. Kurtán, “Applications of OR/ECD/VCD to the structure elucidation of natural products,” Nat. Prod. Rep. 36, 889–918 (2019).
[Crossref]

M. Oppermann, J. Spekowius, B. Bauer, R. Pfister, M. Chergui, and J. Helbing, “Broad-band ultraviolet CD spectroscopy of ultrafast peptide backbone conformational dynamics,” J. Phys. Chem. Lett. 10, 2700−2705 (2019).
[Crossref]

F. Auvray, D. Dennetiere, A. Giuliani, F. Jamme, F. Wien, B. Nay, S. Zirah, F. Polack, C. Menneglier, B. Lagarde, J. D. Hirst, and M. Refregiers, “Time resolved transient circular dichroism spectroscopy using synchrotron natural polarization,” Struct. Dyn. 6, 054307 (2019).
[Crossref]

B. Lv, T. Qian, and H. Ding, “Angle-resolved photoemission spectroscopy and its application to topological materials,” Nat. Rev. Phys. 1, 609–626 (2019).
[Crossref]

M. Oppermann, B. Bauer, T. Rossi, F. Zinna, J. Helbing, J. Lacour, and M. Chergui, “Ultrafast broadband circular dichroism in the deep ultraviolet,” Optica 6, 56–60 (2019).
[Crossref]

2018 (3)

Y. Morimoto and P. Baum, “Diffraction and microscopy with attosecond electron pulse trains,” Nat. Phys. 14, 252–256 (2018).
[Crossref]

P.-C. Huang, C. Hernández-García, J.-T. Huang, P.-Y. Huang, C.-H. Lu, L. Rego, D. D. Hickstein, J. L. Ellis, A. Jaron-Becker, A. Becker, S.-D. Yang, C. G. Durfee, L. Plaja, H. C. Kapteyn, M. M. Murnane, A. H. Kung, and M.-C. Chen, “Polarization control of isolated high-harmonic pulses,” Nat. Photonics 12, 349–354 (2018).
[Crossref]

M. Semmlinger, M. Lun, T. J. Yang, M. Zhang, C. Zhang, W.-Y. Tsai, D. P. Tsai, P. Nordlander, and N. J. Halas, “Vacuum ultraviolet light-generating metasurface,” Nano Lett. 18, 5738–5743 (2018).
[Crossref]

2017 (3)

G. Li, S. Zhang, and T. Zentgraf, “Nonlinear photonic metasufraces,” Nat. Rev. Mater. 2, 17010 (2017).
[Crossref]

Y. Mita, E. Lebrasseur, Y. Okamoto, F. Marty, R. Setoguchi, K. Yamada, I. Mori, S. Morishita, Y. Imai, K. Hosaka, A. Hirakawa, S. Inoue, M. Kubota, and M. Denoual, “Opportunities of CMOS-MEMS integration through LSI foundry and open facility,” Jpn. J. Appl. Phys. 56, 06GA03 (2017).
[Crossref]

N. Saito, P. Xia, F. Lu, T. Kanai, J. Itatani, and N. Ishii, “Observation of selection rules for circularly polarized fields in high-harmonic generation from a crystalline solid,” Optica 4, 1333–1336 (2017).
[Crossref]

2016 (3)

S. Jahani and Z. Jacob, “All-dielectric metamaterials,” Nat. Nanotechnol. 11, 23–36 (2016).
[Crossref]

Y. He, I. M. Vishik, M. Yi, S. Yang, Z. Liu, J. J. Lee, S. Chen, S. N. Rebec, D. Leuenberger, A. Zong, C. M. Jefferson, R. G. Moore, P. S. Kirchmann, A. J. Merriam, and Z.-X. Shen, “Invited article: High resolution angle resolved photoemission with tabletop 11 eV laser,” Rev. Sci. Instrum. 87, 011301 (2016).
[Crossref]

C. L. Smallwood, R. A. Kaindl, and A. Lanzara, “Ultrafast angle-resolved photoemission spectroscopy of quantum materials,” Euro. Lett. 115, 27001 (2016).
[Crossref]

2015 (5)

D. D. Hickstein, F. J. Dollar, P. Grychtol, J. L. Ellis, R. Knut, C. Hernández-García, D. Zusin, C. Gentry, J. M. Shaw, T. Fan, K. M. Dorney, A. Becker, A. Jaroń-Becker, H. C. Kapteyn, M. M. Murnane, and C. G. Durfee, “Non-collinear generation of angularly isolated circularly polarized high harmonics,” Nat. Photonics 9, 743–750 (2015).
[Crossref]

A. Ferré, C. Handschin, M. Dumergue, F. Burgy, A. Comby, D. Descamps, B. Fabre, G. A. Garcia, R. Géneaux, L. Merceron, E. Mével, L. Nahon, S. Petit, B. Pons, D. Staedter, S. Weber, T. Ruchon, V. Blanchet, and Y. Mairesse, “A table-top ultrashort light source in the extreme ultraviolet for circular dichroism experiments,” Nat. Photonics 9, 93–98 (2015).
[Crossref]

C. Kern, M. Zürch, and C. Spielmann, “Limitations of extreme nonlinear ultrafast nanophotonics,” Nanophotonics 4, 303–323 (2015).
[Crossref]

T. T. Luu, M. Garg, S. Y. Kruchinin, A. Moulet, M. Hassan, and E. Goulielmakis, “Extreme ultraviolet high-harmonic spectroscopy of solids,” Nature 521, 498–502 (2015).
[Crossref]

C.-T. Chiang, M. Huth, A. Trützschler, M. Kiel, F. Schumann, J. Kirschner, and W. Widdra, “Boosting laboratory photoelectron spectroscopy by megahertz high order harmonics,” New J. Phys. 17, 013035 (2015).
[Crossref]

2014 (3)

K. Konishi, T. Higuchi, J. Li, J. Larsson, S. Ishii, and M. Kuwata-Gonokami, “Polarization-controlled circular second-harmonic generation from metal hole arrays with threefold rotational symmetry,” Phys. Rev. Lett. 112, 135502 (2014).
[Crossref]

S. Chen, G. Li, F. Zeuner, W. H. Wong, E. Y. B. Pun, T. Zentgraf, K. W. Cheah, and S. Zhang, “Symmetry-selective third-harmonic generation from plasmonic metacrystals,” Phys. Rev. Lett. 113, 033901 (2014).
[Crossref]

M. D. Neumann, C. Cobet, H. Kaser, M. Kolbe, A. Gottwald, M. Richter, and N. Esser, “A synchrotron-radiation-based variable angle ellipsometer for the visible to vacuum ultraviolet spectral range,” Rev. Sci. Instrum. 85, 055117 (2014).
[Crossref]

2013 (1)

A. Shchepetov, M. Prunnila, F. Alzina, L. Schneider, J. Cuffe, H. Jiang, E. I. Kauppinen, C. M. Sotomayor Torres, and J. Ahopelto, “Ultra-thin free-standing single crystalline silicon membranes with strain control,” Appl. Phys. Lett. 102, 192108 (2013).
[Crossref]

2012 (1)

M. Kauranen and A. V. Zayats, “Nonlinear plasmonics,” Nat. Photonics 6, 737–748 (2012).
[Crossref]

2011 (2)

M. Savoini, P. Biagioni, S. C. J. Meskers, L. Duò, B. Hecht, and M. Finazzi, “Spontaneous formation of left- and right-handed cholesterically ordered domains in an enantiopure chiral polyfluorene film,” J. Phys. Chem. Lett. 2, 1359–1362 (2011).
[Crossref]

Y. H. Wang, D. Hsieh, D. Pilon, L. Fu, D. R. Gardner, Y. S. Lee, and N. Gedik, “Observation of a warped helical spin texture in Bi2Se3 from circular dichroism angle-resolved photoemission spectroscopy,” Phys. Rev. Lett. 107, 207602 (2011).
[Crossref]

2010 (1)

U. J. Meierhenrich, J.-J. Filippi, C. Meinert, J. H. Bredehöft, J. Takahashi, L. Nahon, N. C. Jones, and S. V. Hoffmann, “Circular dichroism of amino acids in the vacuum-ultraviolet region,” Angew. Chem. Int. Ed. 49,7799–7802 (2010).
[Crossref]

2009 (1)

C. T. Chen, G. L. Wang, X. Y. Wang, and Z. Y. Xu, “Deep-UV nonlinear optical crystal KBe2BO3F2—discovery, growth, optical properties and applications,” Appl. Phys. B 97, 9–25 (2009).
[Crossref]

2008 (2)

C. Niezborala and F. Hache, “Conformational changes in photoexcited (R)-(+)-1,1’-bi-2-naphthol studied by time-resolved circular dichroism,” J. Am. Chem. Soc. 130, 12783 (2008).
[Crossref]

T. Kiss, T. Shimojima, K. Ishizaka, A. Chainani, T. Togashi, T. Kanai, X.-Y. Wang, C.-T. Chen, S. Watanabe, and S. Shin, “A versatile system for ultrahigh resolution, low temperature, and polarization dependent laser-angle-resolved photoemission spectroscopy,” Rev. Sci. Instrum. 79, 023106 (2008).
[Crossref]

2006 (1)

B. K. Canfield, S. Kujala, K. Jefimovs, Y. Svirko, J. Turunen, and M. Kauranen, “A macroscopic formalism to describe the second-order nonlinear optical response of nanostructures,” J. Opt. A 8, S278–S284 (2006).
[Crossref]

2004 (1)

K. Matsuo and K. Gekko, “Vacuum-ultraviolet circular dichroism study of saccharides by synchrotron radiation spectrophotometry,” Carbohy. Res. 339, 591–597 (2004).
[Crossref]

2003 (1)

A. Damascelli, Z. Hussain, and Z.-X. Shen, “Angle-resolved photoemission studies of the cuprate superconductors,” Rev. Mod. Phys. 75,473–541 (2003).
[Crossref]

2002 (1)

S. G. Tikhodeev, A. L. Yablonskii, E. A. Muljarov, N. A. Gippius, and T. Ishihara, “Quasiguided modes and optical properties of photonic crystal slabs,” Phys. Rev. B 66, 045102 (2002).
[Crossref]

1989 (1)

M. Ishida, K. Sawada, S. Yamaguchi, T. Nakamura, and T. Suzuki, “Heteroepitaxial Si/Al2O3/Si structures,” Appl. Phys. Lett. 55, 556–558 (1989).
[Crossref]

1988 (1)

M. Ishida, I. Katakabe, T. Nakamura, and N. Ohtake, “Epitaxial Al2O3 films on Si by low-pressure chemical vapor deposition,” Appl. Phys. Lett. 52, 1326–1328 (1988).
[Crossref]

1978 (1)

W. C. Johnson, “Circular dichroism spectroscopy and the vacuum ultraviolet region,” Annu. Rev. Phys. Chem. 29, 93–114 (1978).
[Crossref]

1968 (1)

H. J. Simon and N. Bloembergen, “Second-harmonic light generation in crystals with natural optical activity,” Phys. Rev. 171, 1104–1114 (1968).
[Crossref]

Ahopelto, J.

A. Shchepetov, M. Prunnila, F. Alzina, L. Schneider, J. Cuffe, H. Jiang, E. I. Kauppinen, C. M. Sotomayor Torres, and J. Ahopelto, “Ultra-thin free-standing single crystalline silicon membranes with strain control,” Appl. Phys. Lett. 102, 192108 (2013).
[Crossref]

Akai, D.

K. Konishi, D. Akai, Y. Mita, M. Ishida, J. Yumoto, and M. Kuwata-Gonokami, “Tunable third harmonic generation in the vacuum ultraviolet region using dielectric nanomembranes,” APL Photon. 5, 066103 (2020).
[Crossref]

Alzina, F.

A. Shchepetov, M. Prunnila, F. Alzina, L. Schneider, J. Cuffe, H. Jiang, E. I. Kauppinen, C. M. Sotomayor Torres, and J. Ahopelto, “Ultra-thin free-standing single crystalline silicon membranes with strain control,” Appl. Phys. Lett. 102, 192108 (2013).
[Crossref]

Auvray, F.

F. Auvray, D. Dennetiere, A. Giuliani, F. Jamme, F. Wien, B. Nay, S. Zirah, F. Polack, C. Menneglier, B. Lagarde, J. D. Hirst, and M. Refregiers, “Time resolved transient circular dichroism spectroscopy using synchrotron natural polarization,” Struct. Dyn. 6, 054307 (2019).
[Crossref]

Barron, L.

L. Barron, Molecular Light Scattering and Optical Activity, 2nd ed. (Cambridge University, 2004).

Bauer, B.

M. Oppermann, J. Spekowius, B. Bauer, R. Pfister, M. Chergui, and J. Helbing, “Broad-band ultraviolet CD spectroscopy of ultrafast peptide backbone conformational dynamics,” J. Phys. Chem. Lett. 10, 2700−2705 (2019).
[Crossref]

M. Oppermann, B. Bauer, T. Rossi, F. Zinna, J. Helbing, J. Lacour, and M. Chergui, “Ultrafast broadband circular dichroism in the deep ultraviolet,” Optica 6, 56–60 (2019).
[Crossref]

Baum, P.

Y. Morimoto and P. Baum, “Diffraction and microscopy with attosecond electron pulse trains,” Nat. Phys. 14, 252–256 (2018).
[Crossref]

Becker, A.

P.-C. Huang, C. Hernández-García, J.-T. Huang, P.-Y. Huang, C.-H. Lu, L. Rego, D. D. Hickstein, J. L. Ellis, A. Jaron-Becker, A. Becker, S.-D. Yang, C. G. Durfee, L. Plaja, H. C. Kapteyn, M. M. Murnane, A. H. Kung, and M.-C. Chen, “Polarization control of isolated high-harmonic pulses,” Nat. Photonics 12, 349–354 (2018).
[Crossref]

D. D. Hickstein, F. J. Dollar, P. Grychtol, J. L. Ellis, R. Knut, C. Hernández-García, D. Zusin, C. Gentry, J. M. Shaw, T. Fan, K. M. Dorney, A. Becker, A. Jaroń-Becker, H. C. Kapteyn, M. M. Murnane, and C. G. Durfee, “Non-collinear generation of angularly isolated circularly polarized high harmonics,” Nat. Photonics 9, 743–750 (2015).
[Crossref]

Biagioni, P.

M. Savoini, P. Biagioni, S. C. J. Meskers, L. Duò, B. Hecht, and M. Finazzi, “Spontaneous formation of left- and right-handed cholesterically ordered domains in an enantiopure chiral polyfluorene film,” J. Phys. Chem. Lett. 2, 1359–1362 (2011).
[Crossref]

Blanchet, V.

A. Ferré, C. Handschin, M. Dumergue, F. Burgy, A. Comby, D. Descamps, B. Fabre, G. A. Garcia, R. Géneaux, L. Merceron, E. Mével, L. Nahon, S. Petit, B. Pons, D. Staedter, S. Weber, T. Ruchon, V. Blanchet, and Y. Mairesse, “A table-top ultrashort light source in the extreme ultraviolet for circular dichroism experiments,” Nat. Photonics 9, 93–98 (2015).
[Crossref]

Bloembergen, N.

H. J. Simon and N. Bloembergen, “Second-harmonic light generation in crystals with natural optical activity,” Phys. Rev. 171, 1104–1114 (1968).
[Crossref]

Bredehöft, J. H.

U. J. Meierhenrich, J.-J. Filippi, C. Meinert, J. H. Bredehöft, J. Takahashi, L. Nahon, N. C. Jones, and S. V. Hoffmann, “Circular dichroism of amino acids in the vacuum-ultraviolet region,” Angew. Chem. Int. Ed. 49,7799–7802 (2010).
[Crossref]

Burgy, F.

A. Ferré, C. Handschin, M. Dumergue, F. Burgy, A. Comby, D. Descamps, B. Fabre, G. A. Garcia, R. Géneaux, L. Merceron, E. Mével, L. Nahon, S. Petit, B. Pons, D. Staedter, S. Weber, T. Ruchon, V. Blanchet, and Y. Mairesse, “A table-top ultrashort light source in the extreme ultraviolet for circular dichroism experiments,” Nat. Photonics 9, 93–98 (2015).
[Crossref]

Butcher, P.

P. Butcher and D. Cotter, The Elements of Nonlinear Optics (Cambridge University, 1990).

Canfield, B. K.

B. K. Canfield, S. Kujala, K. Jefimovs, Y. Svirko, J. Turunen, and M. Kauranen, “A macroscopic formalism to describe the second-order nonlinear optical response of nanostructures,” J. Opt. A 8, S278–S284 (2006).
[Crossref]

Chainani, A.

T. Kiss, T. Shimojima, K. Ishizaka, A. Chainani, T. Togashi, T. Kanai, X.-Y. Wang, C.-T. Chen, S. Watanabe, and S. Shin, “A versatile system for ultrahigh resolution, low temperature, and polarization dependent laser-angle-resolved photoemission spectroscopy,” Rev. Sci. Instrum. 79, 023106 (2008).
[Crossref]

Cheah, K. W.

S. Chen, G. Li, F. Zeuner, W. H. Wong, E. Y. B. Pun, T. Zentgraf, K. W. Cheah, and S. Zhang, “Symmetry-selective third-harmonic generation from plasmonic metacrystals,” Phys. Rev. Lett. 113, 033901 (2014).
[Crossref]

Chen, C. T.

C. T. Chen, G. L. Wang, X. Y. Wang, and Z. Y. Xu, “Deep-UV nonlinear optical crystal KBe2BO3F2—discovery, growth, optical properties and applications,” Appl. Phys. B 97, 9–25 (2009).
[Crossref]

Chen, C.-T.

T. Kiss, T. Shimojima, K. Ishizaka, A. Chainani, T. Togashi, T. Kanai, X.-Y. Wang, C.-T. Chen, S. Watanabe, and S. Shin, “A versatile system for ultrahigh resolution, low temperature, and polarization dependent laser-angle-resolved photoemission spectroscopy,” Rev. Sci. Instrum. 79, 023106 (2008).
[Crossref]

Chen, M.-C.

P.-C. Huang, C. Hernández-García, J.-T. Huang, P.-Y. Huang, C.-H. Lu, L. Rego, D. D. Hickstein, J. L. Ellis, A. Jaron-Becker, A. Becker, S.-D. Yang, C. G. Durfee, L. Plaja, H. C. Kapteyn, M. M. Murnane, A. H. Kung, and M.-C. Chen, “Polarization control of isolated high-harmonic pulses,” Nat. Photonics 12, 349–354 (2018).
[Crossref]

Chen, S.

Y. He, I. M. Vishik, M. Yi, S. Yang, Z. Liu, J. J. Lee, S. Chen, S. N. Rebec, D. Leuenberger, A. Zong, C. M. Jefferson, R. G. Moore, P. S. Kirchmann, A. J. Merriam, and Z.-X. Shen, “Invited article: High resolution angle resolved photoemission with tabletop 11 eV laser,” Rev. Sci. Instrum. 87, 011301 (2016).
[Crossref]

S. Chen, G. Li, F. Zeuner, W. H. Wong, E. Y. B. Pun, T. Zentgraf, K. W. Cheah, and S. Zhang, “Symmetry-selective third-harmonic generation from plasmonic metacrystals,” Phys. Rev. Lett. 113, 033901 (2014).
[Crossref]

Chergui, M.

M. Oppermann, J. Spekowius, B. Bauer, R. Pfister, M. Chergui, and J. Helbing, “Broad-band ultraviolet CD spectroscopy of ultrafast peptide backbone conformational dynamics,” J. Phys. Chem. Lett. 10, 2700−2705 (2019).
[Crossref]

M. Oppermann, B. Bauer, T. Rossi, F. Zinna, J. Helbing, J. Lacour, and M. Chergui, “Ultrafast broadband circular dichroism in the deep ultraviolet,” Optica 6, 56–60 (2019).
[Crossref]

Chiang, C.-T.

C.-T. Chiang, M. Huth, A. Trützschler, M. Kiel, F. Schumann, J. Kirschner, and W. Widdra, “Boosting laboratory photoelectron spectroscopy by megahertz high order harmonics,” New J. Phys. 17, 013035 (2015).
[Crossref]

Chung, T. L.

K.-C. Shen, Y.-T. Huang, T. L. Chung, M. L. Tseng, W.-Y. Tsai, G. Sun, and D. P. Tsai, “Giant efficiency of visible second-harmonic light by an all-dielectric multiple-quantum-well metasurface,” Phys. Rev. Appl. 12, 064056 (2019).
[Crossref]

Cobet, C.

M. D. Neumann, C. Cobet, H. Kaser, M. Kolbe, A. Gottwald, M. Richter, and N. Esser, “A synchrotron-radiation-based variable angle ellipsometer for the visible to vacuum ultraviolet spectral range,” Rev. Sci. Instrum. 85, 055117 (2014).
[Crossref]

Comby, A.

A. Ferré, C. Handschin, M. Dumergue, F. Burgy, A. Comby, D. Descamps, B. Fabre, G. A. Garcia, R. Géneaux, L. Merceron, E. Mével, L. Nahon, S. Petit, B. Pons, D. Staedter, S. Weber, T. Ruchon, V. Blanchet, and Y. Mairesse, “A table-top ultrashort light source in the extreme ultraviolet for circular dichroism experiments,” Nat. Photonics 9, 93–98 (2015).
[Crossref]

Cotter, D.

P. Butcher and D. Cotter, The Elements of Nonlinear Optics (Cambridge University, 1990).

Cuffe, J.

A. Shchepetov, M. Prunnila, F. Alzina, L. Schneider, J. Cuffe, H. Jiang, E. I. Kauppinen, C. M. Sotomayor Torres, and J. Ahopelto, “Ultra-thin free-standing single crystalline silicon membranes with strain control,” Appl. Phys. Lett. 102, 192108 (2013).
[Crossref]

Dafforn, T.

B. Nordén, A. Rodger, and T. Dafforn, Linear Dicrhoism and Circular Dichroism: A Textbook on Polarizaed-Light Spectroscopy (RSC Publishing, 2010).

Damascelli, A.

A. Damascelli, Z. Hussain, and Z.-X. Shen, “Angle-resolved photoemission studies of the cuprate superconductors,” Rev. Mod. Phys. 75,473–541 (2003).
[Crossref]

Dennetiere, D.

F. Auvray, D. Dennetiere, A. Giuliani, F. Jamme, F. Wien, B. Nay, S. Zirah, F. Polack, C. Menneglier, B. Lagarde, J. D. Hirst, and M. Refregiers, “Time resolved transient circular dichroism spectroscopy using synchrotron natural polarization,” Struct. Dyn. 6, 054307 (2019).
[Crossref]

Denoual, M.

Y. Mita, E. Lebrasseur, Y. Okamoto, F. Marty, R. Setoguchi, K. Yamada, I. Mori, S. Morishita, Y. Imai, K. Hosaka, A. Hirakawa, S. Inoue, M. Kubota, and M. Denoual, “Opportunities of CMOS-MEMS integration through LSI foundry and open facility,” Jpn. J. Appl. Phys. 56, 06GA03 (2017).
[Crossref]

Descamps, D.

A. Ferré, C. Handschin, M. Dumergue, F. Burgy, A. Comby, D. Descamps, B. Fabre, G. A. Garcia, R. Géneaux, L. Merceron, E. Mével, L. Nahon, S. Petit, B. Pons, D. Staedter, S. Weber, T. Ruchon, V. Blanchet, and Y. Mairesse, “A table-top ultrashort light source in the extreme ultraviolet for circular dichroism experiments,” Nat. Photonics 9, 93–98 (2015).
[Crossref]

Ding, H.

B. Lv, T. Qian, and H. Ding, “Angle-resolved photoemission spectroscopy and its application to topological materials,” Nat. Rev. Phys. 1, 609–626 (2019).
[Crossref]

Dollar, F. J.

D. D. Hickstein, F. J. Dollar, P. Grychtol, J. L. Ellis, R. Knut, C. Hernández-García, D. Zusin, C. Gentry, J. M. Shaw, T. Fan, K. M. Dorney, A. Becker, A. Jaroń-Becker, H. C. Kapteyn, M. M. Murnane, and C. G. Durfee, “Non-collinear generation of angularly isolated circularly polarized high harmonics,” Nat. Photonics 9, 743–750 (2015).
[Crossref]

Dorney, K. M.

D. D. Hickstein, F. J. Dollar, P. Grychtol, J. L. Ellis, R. Knut, C. Hernández-García, D. Zusin, C. Gentry, J. M. Shaw, T. Fan, K. M. Dorney, A. Becker, A. Jaroń-Becker, H. C. Kapteyn, M. M. Murnane, and C. G. Durfee, “Non-collinear generation of angularly isolated circularly polarized high harmonics,” Nat. Photonics 9, 743–750 (2015).
[Crossref]

Dumergue, M.

A. Ferré, C. Handschin, M. Dumergue, F. Burgy, A. Comby, D. Descamps, B. Fabre, G. A. Garcia, R. Géneaux, L. Merceron, E. Mével, L. Nahon, S. Petit, B. Pons, D. Staedter, S. Weber, T. Ruchon, V. Blanchet, and Y. Mairesse, “A table-top ultrashort light source in the extreme ultraviolet for circular dichroism experiments,” Nat. Photonics 9, 93–98 (2015).
[Crossref]

Duò, L.

M. Savoini, P. Biagioni, S. C. J. Meskers, L. Duò, B. Hecht, and M. Finazzi, “Spontaneous formation of left- and right-handed cholesterically ordered domains in an enantiopure chiral polyfluorene film,” J. Phys. Chem. Lett. 2, 1359–1362 (2011).
[Crossref]

Durfee, C. G.

P.-C. Huang, C. Hernández-García, J.-T. Huang, P.-Y. Huang, C.-H. Lu, L. Rego, D. D. Hickstein, J. L. Ellis, A. Jaron-Becker, A. Becker, S.-D. Yang, C. G. Durfee, L. Plaja, H. C. Kapteyn, M. M. Murnane, A. H. Kung, and M.-C. Chen, “Polarization control of isolated high-harmonic pulses,” Nat. Photonics 12, 349–354 (2018).
[Crossref]

D. D. Hickstein, F. J. Dollar, P. Grychtol, J. L. Ellis, R. Knut, C. Hernández-García, D. Zusin, C. Gentry, J. M. Shaw, T. Fan, K. M. Dorney, A. Becker, A. Jaroń-Becker, H. C. Kapteyn, M. M. Murnane, and C. G. Durfee, “Non-collinear generation of angularly isolated circularly polarized high harmonics,” Nat. Photonics 9, 743–750 (2015).
[Crossref]

Ellis, J. L.

P.-C. Huang, C. Hernández-García, J.-T. Huang, P.-Y. Huang, C.-H. Lu, L. Rego, D. D. Hickstein, J. L. Ellis, A. Jaron-Becker, A. Becker, S.-D. Yang, C. G. Durfee, L. Plaja, H. C. Kapteyn, M. M. Murnane, A. H. Kung, and M.-C. Chen, “Polarization control of isolated high-harmonic pulses,” Nat. Photonics 12, 349–354 (2018).
[Crossref]

D. D. Hickstein, F. J. Dollar, P. Grychtol, J. L. Ellis, R. Knut, C. Hernández-García, D. Zusin, C. Gentry, J. M. Shaw, T. Fan, K. M. Dorney, A. Becker, A. Jaroń-Becker, H. C. Kapteyn, M. M. Murnane, and C. G. Durfee, “Non-collinear generation of angularly isolated circularly polarized high harmonics,” Nat. Photonics 9, 743–750 (2015).
[Crossref]

Esser, N.

M. D. Neumann, C. Cobet, H. Kaser, M. Kolbe, A. Gottwald, M. Richter, and N. Esser, “A synchrotron-radiation-based variable angle ellipsometer for the visible to vacuum ultraviolet spectral range,” Rev. Sci. Instrum. 85, 055117 (2014).
[Crossref]

Ezawa, T.

A. Mizushima, R. R. Reddy, K. Konishi, T. Ezawa, E. Ota, A. Higo, M. Kuwata-Gonokami, and Y. Mita, “Assessment of annealing treatment for wrinckle-less SiO2 membrane,” 22nd Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP), Virtual Conference, June15–26, (2020).

Fabre, B.

A. Ferré, C. Handschin, M. Dumergue, F. Burgy, A. Comby, D. Descamps, B. Fabre, G. A. Garcia, R. Géneaux, L. Merceron, E. Mével, L. Nahon, S. Petit, B. Pons, D. Staedter, S. Weber, T. Ruchon, V. Blanchet, and Y. Mairesse, “A table-top ultrashort light source in the extreme ultraviolet for circular dichroism experiments,” Nat. Photonics 9, 93–98 (2015).
[Crossref]

Fan, T.

D. D. Hickstein, F. J. Dollar, P. Grychtol, J. L. Ellis, R. Knut, C. Hernández-García, D. Zusin, C. Gentry, J. M. Shaw, T. Fan, K. M. Dorney, A. Becker, A. Jaroń-Becker, H. C. Kapteyn, M. M. Murnane, and C. G. Durfee, “Non-collinear generation of angularly isolated circularly polarized high harmonics,” Nat. Photonics 9, 743–750 (2015).
[Crossref]

Ferré, A.

A. Ferré, C. Handschin, M. Dumergue, F. Burgy, A. Comby, D. Descamps, B. Fabre, G. A. Garcia, R. Géneaux, L. Merceron, E. Mével, L. Nahon, S. Petit, B. Pons, D. Staedter, S. Weber, T. Ruchon, V. Blanchet, and Y. Mairesse, “A table-top ultrashort light source in the extreme ultraviolet for circular dichroism experiments,” Nat. Photonics 9, 93–98 (2015).
[Crossref]

Filippi, J.-J.

U. J. Meierhenrich, J.-J. Filippi, C. Meinert, J. H. Bredehöft, J. Takahashi, L. Nahon, N. C. Jones, and S. V. Hoffmann, “Circular dichroism of amino acids in the vacuum-ultraviolet region,” Angew. Chem. Int. Ed. 49,7799–7802 (2010).
[Crossref]

Finazzi, M.

M. Savoini, P. Biagioni, S. C. J. Meskers, L. Duò, B. Hecht, and M. Finazzi, “Spontaneous formation of left- and right-handed cholesterically ordered domains in an enantiopure chiral polyfluorene film,” J. Phys. Chem. Lett. 2, 1359–1362 (2011).
[Crossref]

Fu, L.

Y. H. Wang, D. Hsieh, D. Pilon, L. Fu, D. R. Gardner, Y. S. Lee, and N. Gedik, “Observation of a warped helical spin texture in Bi2Se3 from circular dichroism angle-resolved photoemission spectroscopy,” Phys. Rev. Lett. 107, 207602 (2011).
[Crossref]

Garcia, G. A.

A. Ferré, C. Handschin, M. Dumergue, F. Burgy, A. Comby, D. Descamps, B. Fabre, G. A. Garcia, R. Géneaux, L. Merceron, E. Mével, L. Nahon, S. Petit, B. Pons, D. Staedter, S. Weber, T. Ruchon, V. Blanchet, and Y. Mairesse, “A table-top ultrashort light source in the extreme ultraviolet for circular dichroism experiments,” Nat. Photonics 9, 93–98 (2015).
[Crossref]

Gardner, D. R.

Y. H. Wang, D. Hsieh, D. Pilon, L. Fu, D. R. Gardner, Y. S. Lee, and N. Gedik, “Observation of a warped helical spin texture in Bi2Se3 from circular dichroism angle-resolved photoemission spectroscopy,” Phys. Rev. Lett. 107, 207602 (2011).
[Crossref]

Garg, M.

T. T. Luu, M. Garg, S. Y. Kruchinin, A. Moulet, M. Hassan, and E. Goulielmakis, “Extreme ultraviolet high-harmonic spectroscopy of solids,” Nature 521, 498–502 (2015).
[Crossref]

Gedik, N.

Y. H. Wang, D. Hsieh, D. Pilon, L. Fu, D. R. Gardner, Y. S. Lee, and N. Gedik, “Observation of a warped helical spin texture in Bi2Se3 from circular dichroism angle-resolved photoemission spectroscopy,” Phys. Rev. Lett. 107, 207602 (2011).
[Crossref]

Gekko, K.

K. Matsuo and K. Gekko, “Vacuum-ultraviolet circular dichroism study of saccharides by synchrotron radiation spectrophotometry,” Carbohy. Res. 339, 591–597 (2004).
[Crossref]

Géneaux, R.

A. Ferré, C. Handschin, M. Dumergue, F. Burgy, A. Comby, D. Descamps, B. Fabre, G. A. Garcia, R. Géneaux, L. Merceron, E. Mével, L. Nahon, S. Petit, B. Pons, D. Staedter, S. Weber, T. Ruchon, V. Blanchet, and Y. Mairesse, “A table-top ultrashort light source in the extreme ultraviolet for circular dichroism experiments,” Nat. Photonics 9, 93–98 (2015).
[Crossref]

Gentry, C.

D. D. Hickstein, F. J. Dollar, P. Grychtol, J. L. Ellis, R. Knut, C. Hernández-García, D. Zusin, C. Gentry, J. M. Shaw, T. Fan, K. M. Dorney, A. Becker, A. Jaroń-Becker, H. C. Kapteyn, M. M. Murnane, and C. G. Durfee, “Non-collinear generation of angularly isolated circularly polarized high harmonics,” Nat. Photonics 9, 743–750 (2015).
[Crossref]

Gippius, N. A.

S. G. Tikhodeev, A. L. Yablonskii, E. A. Muljarov, N. A. Gippius, and T. Ishihara, “Quasiguided modes and optical properties of photonic crystal slabs,” Phys. Rev. B 66, 045102 (2002).
[Crossref]

Giuliani, A.

F. Auvray, D. Dennetiere, A. Giuliani, F. Jamme, F. Wien, B. Nay, S. Zirah, F. Polack, C. Menneglier, B. Lagarde, J. D. Hirst, and M. Refregiers, “Time resolved transient circular dichroism spectroscopy using synchrotron natural polarization,” Struct. Dyn. 6, 054307 (2019).
[Crossref]

Gottwald, A.

M. D. Neumann, C. Cobet, H. Kaser, M. Kolbe, A. Gottwald, M. Richter, and N. Esser, “A synchrotron-radiation-based variable angle ellipsometer for the visible to vacuum ultraviolet spectral range,” Rev. Sci. Instrum. 85, 055117 (2014).
[Crossref]

Goulielmakis, E.

T. T. Luu, M. Garg, S. Y. Kruchinin, A. Moulet, M. Hassan, and E. Goulielmakis, “Extreme ultraviolet high-harmonic spectroscopy of solids,” Nature 521, 498–502 (2015).
[Crossref]

Grychtol, P.

D. D. Hickstein, F. J. Dollar, P. Grychtol, J. L. Ellis, R. Knut, C. Hernández-García, D. Zusin, C. Gentry, J. M. Shaw, T. Fan, K. M. Dorney, A. Becker, A. Jaroń-Becker, H. C. Kapteyn, M. M. Murnane, and C. G. Durfee, “Non-collinear generation of angularly isolated circularly polarized high harmonics,” Nat. Photonics 9, 743–750 (2015).
[Crossref]

Hache, F.

C. Niezborala and F. Hache, “Conformational changes in photoexcited (R)-(+)-1,1’-bi-2-naphthol studied by time-resolved circular dichroism,” J. Am. Chem. Soc. 130, 12783 (2008).
[Crossref]

Halas, N. J.

M. Semmlinger, M. Zhang, M. L. Tseng, T.-T. Huang, J. Yang, D. P. Tsai, P. Nordlander, and N. J. Halas, “Generating third harmonic vacuum ultraviolet light with a TiO2 metasurface,” Nano Lett. 19, 8972–8978 (2019).
[Crossref]

M. Semmlinger, M. Lun, T. J. Yang, M. Zhang, C. Zhang, W.-Y. Tsai, D. P. Tsai, P. Nordlander, and N. J. Halas, “Vacuum ultraviolet light-generating metasurface,” Nano Lett. 18, 5738–5743 (2018).
[Crossref]

Handschin, C.

A. Ferré, C. Handschin, M. Dumergue, F. Burgy, A. Comby, D. Descamps, B. Fabre, G. A. Garcia, R. Géneaux, L. Merceron, E. Mével, L. Nahon, S. Petit, B. Pons, D. Staedter, S. Weber, T. Ruchon, V. Blanchet, and Y. Mairesse, “A table-top ultrashort light source in the extreme ultraviolet for circular dichroism experiments,” Nat. Photonics 9, 93–98 (2015).
[Crossref]

Hassan, M.

T. T. Luu, M. Garg, S. Y. Kruchinin, A. Moulet, M. Hassan, and E. Goulielmakis, “Extreme ultraviolet high-harmonic spectroscopy of solids,” Nature 521, 498–502 (2015).
[Crossref]

He, Y.

Y. He, I. M. Vishik, M. Yi, S. Yang, Z. Liu, J. J. Lee, S. Chen, S. N. Rebec, D. Leuenberger, A. Zong, C. M. Jefferson, R. G. Moore, P. S. Kirchmann, A. J. Merriam, and Z.-X. Shen, “Invited article: High resolution angle resolved photoemission with tabletop 11 eV laser,” Rev. Sci. Instrum. 87, 011301 (2016).
[Crossref]

Hecht, B.

M. Savoini, P. Biagioni, S. C. J. Meskers, L. Duò, B. Hecht, and M. Finazzi, “Spontaneous formation of left- and right-handed cholesterically ordered domains in an enantiopure chiral polyfluorene film,” J. Phys. Chem. Lett. 2, 1359–1362 (2011).
[Crossref]

Helbing, J.

M. Oppermann, J. Spekowius, B. Bauer, R. Pfister, M. Chergui, and J. Helbing, “Broad-band ultraviolet CD spectroscopy of ultrafast peptide backbone conformational dynamics,” J. Phys. Chem. Lett. 10, 2700−2705 (2019).
[Crossref]

M. Oppermann, B. Bauer, T. Rossi, F. Zinna, J. Helbing, J. Lacour, and M. Chergui, “Ultrafast broadband circular dichroism in the deep ultraviolet,” Optica 6, 56–60 (2019).
[Crossref]

Hernández-García, C.

P.-C. Huang, C. Hernández-García, J.-T. Huang, P.-Y. Huang, C.-H. Lu, L. Rego, D. D. Hickstein, J. L. Ellis, A. Jaron-Becker, A. Becker, S.-D. Yang, C. G. Durfee, L. Plaja, H. C. Kapteyn, M. M. Murnane, A. H. Kung, and M.-C. Chen, “Polarization control of isolated high-harmonic pulses,” Nat. Photonics 12, 349–354 (2018).
[Crossref]

D. D. Hickstein, F. J. Dollar, P. Grychtol, J. L. Ellis, R. Knut, C. Hernández-García, D. Zusin, C. Gentry, J. M. Shaw, T. Fan, K. M. Dorney, A. Becker, A. Jaroń-Becker, H. C. Kapteyn, M. M. Murnane, and C. G. Durfee, “Non-collinear generation of angularly isolated circularly polarized high harmonics,” Nat. Photonics 9, 743–750 (2015).
[Crossref]

Hickstein, D. D.

P.-C. Huang, C. Hernández-García, J.-T. Huang, P.-Y. Huang, C.-H. Lu, L. Rego, D. D. Hickstein, J. L. Ellis, A. Jaron-Becker, A. Becker, S.-D. Yang, C. G. Durfee, L. Plaja, H. C. Kapteyn, M. M. Murnane, A. H. Kung, and M.-C. Chen, “Polarization control of isolated high-harmonic pulses,” Nat. Photonics 12, 349–354 (2018).
[Crossref]

D. D. Hickstein, F. J. Dollar, P. Grychtol, J. L. Ellis, R. Knut, C. Hernández-García, D. Zusin, C. Gentry, J. M. Shaw, T. Fan, K. M. Dorney, A. Becker, A. Jaroń-Becker, H. C. Kapteyn, M. M. Murnane, and C. G. Durfee, “Non-collinear generation of angularly isolated circularly polarized high harmonics,” Nat. Photonics 9, 743–750 (2015).
[Crossref]

Higo, A.

A. Mizushima, R. R. Reddy, K. Konishi, T. Ezawa, E. Ota, A. Higo, M. Kuwata-Gonokami, and Y. Mita, “Assessment of annealing treatment for wrinckle-less SiO2 membrane,” 22nd Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP), Virtual Conference, June15–26, (2020).

Higuchi, T.

K. Konishi, T. Higuchi, J. Li, J. Larsson, S. Ishii, and M. Kuwata-Gonokami, “Polarization-controlled circular second-harmonic generation from metal hole arrays with threefold rotational symmetry,” Phys. Rev. Lett. 112, 135502 (2014).
[Crossref]

Hirakawa, A.

Y. Mita, E. Lebrasseur, Y. Okamoto, F. Marty, R. Setoguchi, K. Yamada, I. Mori, S. Morishita, Y. Imai, K. Hosaka, A. Hirakawa, S. Inoue, M. Kubota, and M. Denoual, “Opportunities of CMOS-MEMS integration through LSI foundry and open facility,” Jpn. J. Appl. Phys. 56, 06GA03 (2017).
[Crossref]

Hirst, J. D.

F. Auvray, D. Dennetiere, A. Giuliani, F. Jamme, F. Wien, B. Nay, S. Zirah, F. Polack, C. Menneglier, B. Lagarde, J. D. Hirst, and M. Refregiers, “Time resolved transient circular dichroism spectroscopy using synchrotron natural polarization,” Struct. Dyn. 6, 054307 (2019).
[Crossref]

Hoffmann, S. V.

U. J. Meierhenrich, J.-J. Filippi, C. Meinert, J. H. Bredehöft, J. Takahashi, L. Nahon, N. C. Jones, and S. V. Hoffmann, “Circular dichroism of amino acids in the vacuum-ultraviolet region,” Angew. Chem. Int. Ed. 49,7799–7802 (2010).
[Crossref]

Hosaka, K.

Y. Mita, E. Lebrasseur, Y. Okamoto, F. Marty, R. Setoguchi, K. Yamada, I. Mori, S. Morishita, Y. Imai, K. Hosaka, A. Hirakawa, S. Inoue, M. Kubota, and M. Denoual, “Opportunities of CMOS-MEMS integration through LSI foundry and open facility,” Jpn. J. Appl. Phys. 56, 06GA03 (2017).
[Crossref]

Hsieh, D.

Y. H. Wang, D. Hsieh, D. Pilon, L. Fu, D. R. Gardner, Y. S. Lee, and N. Gedik, “Observation of a warped helical spin texture in Bi2Se3 from circular dichroism angle-resolved photoemission spectroscopy,” Phys. Rev. Lett. 107, 207602 (2011).
[Crossref]

Huang, J.-T.

P.-C. Huang, C. Hernández-García, J.-T. Huang, P.-Y. Huang, C.-H. Lu, L. Rego, D. D. Hickstein, J. L. Ellis, A. Jaron-Becker, A. Becker, S.-D. Yang, C. G. Durfee, L. Plaja, H. C. Kapteyn, M. M. Murnane, A. H. Kung, and M.-C. Chen, “Polarization control of isolated high-harmonic pulses,” Nat. Photonics 12, 349–354 (2018).
[Crossref]

Huang, L.

B. Liu, B. Sain, B. Reineke, R. Zhao, C. Meier, L. Huang, Y. Jiang, and T. Zentgraf, “Nonlinear wavefront control by geometric-phase dielectric metasurfaces: influence of mode field and rotational symmetry,” Adv. Opt. Mater. 8, 1902050 (2020).
[Crossref]

Huang, P.-C.

P.-C. Huang, C. Hernández-García, J.-T. Huang, P.-Y. Huang, C.-H. Lu, L. Rego, D. D. Hickstein, J. L. Ellis, A. Jaron-Becker, A. Becker, S.-D. Yang, C. G. Durfee, L. Plaja, H. C. Kapteyn, M. M. Murnane, A. H. Kung, and M.-C. Chen, “Polarization control of isolated high-harmonic pulses,” Nat. Photonics 12, 349–354 (2018).
[Crossref]

Huang, P.-Y.

P.-C. Huang, C. Hernández-García, J.-T. Huang, P.-Y. Huang, C.-H. Lu, L. Rego, D. D. Hickstein, J. L. Ellis, A. Jaron-Becker, A. Becker, S.-D. Yang, C. G. Durfee, L. Plaja, H. C. Kapteyn, M. M. Murnane, A. H. Kung, and M.-C. Chen, “Polarization control of isolated high-harmonic pulses,” Nat. Photonics 12, 349–354 (2018).
[Crossref]

Huang, T.-T.

M. Semmlinger, M. Zhang, M. L. Tseng, T.-T. Huang, J. Yang, D. P. Tsai, P. Nordlander, and N. J. Halas, “Generating third harmonic vacuum ultraviolet light with a TiO2 metasurface,” Nano Lett. 19, 8972–8978 (2019).
[Crossref]

Huang, Y.-T.

K.-C. Shen, Y.-T. Huang, T. L. Chung, M. L. Tseng, W.-Y. Tsai, G. Sun, and D. P. Tsai, “Giant efficiency of visible second-harmonic light by an all-dielectric multiple-quantum-well metasurface,” Phys. Rev. Appl. 12, 064056 (2019).
[Crossref]

Hussain, Z.

A. Damascelli, Z. Hussain, and Z.-X. Shen, “Angle-resolved photoemission studies of the cuprate superconductors,” Rev. Mod. Phys. 75,473–541 (2003).
[Crossref]

Huth, M.

C.-T. Chiang, M. Huth, A. Trützschler, M. Kiel, F. Schumann, J. Kirschner, and W. Widdra, “Boosting laboratory photoelectron spectroscopy by megahertz high order harmonics,” New J. Phys. 17, 013035 (2015).
[Crossref]

Imai, Y.

Y. Mita, E. Lebrasseur, Y. Okamoto, F. Marty, R. Setoguchi, K. Yamada, I. Mori, S. Morishita, Y. Imai, K. Hosaka, A. Hirakawa, S. Inoue, M. Kubota, and M. Denoual, “Opportunities of CMOS-MEMS integration through LSI foundry and open facility,” Jpn. J. Appl. Phys. 56, 06GA03 (2017).
[Crossref]

Inoue, S.

Y. Mita, E. Lebrasseur, Y. Okamoto, F. Marty, R. Setoguchi, K. Yamada, I. Mori, S. Morishita, Y. Imai, K. Hosaka, A. Hirakawa, S. Inoue, M. Kubota, and M. Denoual, “Opportunities of CMOS-MEMS integration through LSI foundry and open facility,” Jpn. J. Appl. Phys. 56, 06GA03 (2017).
[Crossref]

Ishida, M.

K. Konishi, D. Akai, Y. Mita, M. Ishida, J. Yumoto, and M. Kuwata-Gonokami, “Tunable third harmonic generation in the vacuum ultraviolet region using dielectric nanomembranes,” APL Photon. 5, 066103 (2020).
[Crossref]

M. Ishida, K. Sawada, S. Yamaguchi, T. Nakamura, and T. Suzuki, “Heteroepitaxial Si/Al2O3/Si structures,” Appl. Phys. Lett. 55, 556–558 (1989).
[Crossref]

M. Ishida, I. Katakabe, T. Nakamura, and N. Ohtake, “Epitaxial Al2O3 films on Si by low-pressure chemical vapor deposition,” Appl. Phys. Lett. 52, 1326–1328 (1988).
[Crossref]

Ishihara, T.

S. G. Tikhodeev, A. L. Yablonskii, E. A. Muljarov, N. A. Gippius, and T. Ishihara, “Quasiguided modes and optical properties of photonic crystal slabs,” Phys. Rev. B 66, 045102 (2002).
[Crossref]

Ishii, N.

Ishii, S.

K. Konishi, T. Higuchi, J. Li, J. Larsson, S. Ishii, and M. Kuwata-Gonokami, “Polarization-controlled circular second-harmonic generation from metal hole arrays with threefold rotational symmetry,” Phys. Rev. Lett. 112, 135502 (2014).
[Crossref]

Ishizaka, K.

T. Kiss, T. Shimojima, K. Ishizaka, A. Chainani, T. Togashi, T. Kanai, X.-Y. Wang, C.-T. Chen, S. Watanabe, and S. Shin, “A versatile system for ultrahigh resolution, low temperature, and polarization dependent laser-angle-resolved photoemission spectroscopy,” Rev. Sci. Instrum. 79, 023106 (2008).
[Crossref]

Itatani, J.

Jacob, Z.

S. Jahani and Z. Jacob, “All-dielectric metamaterials,” Nat. Nanotechnol. 11, 23–36 (2016).
[Crossref]

Jahani, S.

S. Jahani and Z. Jacob, “All-dielectric metamaterials,” Nat. Nanotechnol. 11, 23–36 (2016).
[Crossref]

Jamme, F.

F. Auvray, D. Dennetiere, A. Giuliani, F. Jamme, F. Wien, B. Nay, S. Zirah, F. Polack, C. Menneglier, B. Lagarde, J. D. Hirst, and M. Refregiers, “Time resolved transient circular dichroism spectroscopy using synchrotron natural polarization,” Struct. Dyn. 6, 054307 (2019).
[Crossref]

Jaron-Becker, A.

P.-C. Huang, C. Hernández-García, J.-T. Huang, P.-Y. Huang, C.-H. Lu, L. Rego, D. D. Hickstein, J. L. Ellis, A. Jaron-Becker, A. Becker, S.-D. Yang, C. G. Durfee, L. Plaja, H. C. Kapteyn, M. M. Murnane, A. H. Kung, and M.-C. Chen, “Polarization control of isolated high-harmonic pulses,” Nat. Photonics 12, 349–354 (2018).
[Crossref]

D. D. Hickstein, F. J. Dollar, P. Grychtol, J. L. Ellis, R. Knut, C. Hernández-García, D. Zusin, C. Gentry, J. M. Shaw, T. Fan, K. M. Dorney, A. Becker, A. Jaroń-Becker, H. C. Kapteyn, M. M. Murnane, and C. G. Durfee, “Non-collinear generation of angularly isolated circularly polarized high harmonics,” Nat. Photonics 9, 743–750 (2015).
[Crossref]

Jefferson, C. M.

Y. He, I. M. Vishik, M. Yi, S. Yang, Z. Liu, J. J. Lee, S. Chen, S. N. Rebec, D. Leuenberger, A. Zong, C. M. Jefferson, R. G. Moore, P. S. Kirchmann, A. J. Merriam, and Z.-X. Shen, “Invited article: High resolution angle resolved photoemission with tabletop 11 eV laser,” Rev. Sci. Instrum. 87, 011301 (2016).
[Crossref]

Jefimovs, K.

B. K. Canfield, S. Kujala, K. Jefimovs, Y. Svirko, J. Turunen, and M. Kauranen, “A macroscopic formalism to describe the second-order nonlinear optical response of nanostructures,” J. Opt. A 8, S278–S284 (2006).
[Crossref]

Jiang, H.

A. Shchepetov, M. Prunnila, F. Alzina, L. Schneider, J. Cuffe, H. Jiang, E. I. Kauppinen, C. M. Sotomayor Torres, and J. Ahopelto, “Ultra-thin free-standing single crystalline silicon membranes with strain control,” Appl. Phys. Lett. 102, 192108 (2013).
[Crossref]

Jiang, Y.

B. Liu, B. Sain, B. Reineke, R. Zhao, C. Meier, L. Huang, Y. Jiang, and T. Zentgraf, “Nonlinear wavefront control by geometric-phase dielectric metasurfaces: influence of mode field and rotational symmetry,” Adv. Opt. Mater. 8, 1902050 (2020).
[Crossref]

Johnson, W. C.

W. C. Johnson, “Circular dichroism spectroscopy and the vacuum ultraviolet region,” Annu. Rev. Phys. Chem. 29, 93–114 (1978).
[Crossref]

Jones, N. C.

U. J. Meierhenrich, J.-J. Filippi, C. Meinert, J. H. Bredehöft, J. Takahashi, L. Nahon, N. C. Jones, and S. V. Hoffmann, “Circular dichroism of amino acids in the vacuum-ultraviolet region,” Angew. Chem. Int. Ed. 49,7799–7802 (2010).
[Crossref]

Kaindl, R. A.

C. L. Smallwood, R. A. Kaindl, and A. Lanzara, “Ultrafast angle-resolved photoemission spectroscopy of quantum materials,” Euro. Lett. 115, 27001 (2016).
[Crossref]

Kanai, T.

N. Saito, P. Xia, F. Lu, T. Kanai, J. Itatani, and N. Ishii, “Observation of selection rules for circularly polarized fields in high-harmonic generation from a crystalline solid,” Optica 4, 1333–1336 (2017).
[Crossref]

T. Kiss, T. Shimojima, K. Ishizaka, A. Chainani, T. Togashi, T. Kanai, X.-Y. Wang, C.-T. Chen, S. Watanabe, and S. Shin, “A versatile system for ultrahigh resolution, low temperature, and polarization dependent laser-angle-resolved photoemission spectroscopy,” Rev. Sci. Instrum. 79, 023106 (2008).
[Crossref]

Kapteyn, H. C.

P.-C. Huang, C. Hernández-García, J.-T. Huang, P.-Y. Huang, C.-H. Lu, L. Rego, D. D. Hickstein, J. L. Ellis, A. Jaron-Becker, A. Becker, S.-D. Yang, C. G. Durfee, L. Plaja, H. C. Kapteyn, M. M. Murnane, A. H. Kung, and M.-C. Chen, “Polarization control of isolated high-harmonic pulses,” Nat. Photonics 12, 349–354 (2018).
[Crossref]

D. D. Hickstein, F. J. Dollar, P. Grychtol, J. L. Ellis, R. Knut, C. Hernández-García, D. Zusin, C. Gentry, J. M. Shaw, T. Fan, K. M. Dorney, A. Becker, A. Jaroń-Becker, H. C. Kapteyn, M. M. Murnane, and C. G. Durfee, “Non-collinear generation of angularly isolated circularly polarized high harmonics,” Nat. Photonics 9, 743–750 (2015).
[Crossref]

Kaser, H.

M. D. Neumann, C. Cobet, H. Kaser, M. Kolbe, A. Gottwald, M. Richter, and N. Esser, “A synchrotron-radiation-based variable angle ellipsometer for the visible to vacuum ultraviolet spectral range,” Rev. Sci. Instrum. 85, 055117 (2014).
[Crossref]

Katakabe, I.

M. Ishida, I. Katakabe, T. Nakamura, and N. Ohtake, “Epitaxial Al2O3 films on Si by low-pressure chemical vapor deposition,” Appl. Phys. Lett. 52, 1326–1328 (1988).
[Crossref]

Kauppinen, E. I.

A. Shchepetov, M. Prunnila, F. Alzina, L. Schneider, J. Cuffe, H. Jiang, E. I. Kauppinen, C. M. Sotomayor Torres, and J. Ahopelto, “Ultra-thin free-standing single crystalline silicon membranes with strain control,” Appl. Phys. Lett. 102, 192108 (2013).
[Crossref]

Kauranen, M.

M. Kauranen and A. V. Zayats, “Nonlinear plasmonics,” Nat. Photonics 6, 737–748 (2012).
[Crossref]

B. K. Canfield, S. Kujala, K. Jefimovs, Y. Svirko, J. Turunen, and M. Kauranen, “A macroscopic formalism to describe the second-order nonlinear optical response of nanostructures,” J. Opt. A 8, S278–S284 (2006).
[Crossref]

Kern, C.

C. Kern, M. Zürch, and C. Spielmann, “Limitations of extreme nonlinear ultrafast nanophotonics,” Nanophotonics 4, 303–323 (2015).
[Crossref]

Kiel, M.

C.-T. Chiang, M. Huth, A. Trützschler, M. Kiel, F. Schumann, J. Kirschner, and W. Widdra, “Boosting laboratory photoelectron spectroscopy by megahertz high order harmonics,” New J. Phys. 17, 013035 (2015).
[Crossref]

Kirchmann, P. S.

Y. He, I. M. Vishik, M. Yi, S. Yang, Z. Liu, J. J. Lee, S. Chen, S. N. Rebec, D. Leuenberger, A. Zong, C. M. Jefferson, R. G. Moore, P. S. Kirchmann, A. J. Merriam, and Z.-X. Shen, “Invited article: High resolution angle resolved photoemission with tabletop 11 eV laser,” Rev. Sci. Instrum. 87, 011301 (2016).
[Crossref]

Kirschner, J.

C.-T. Chiang, M. Huth, A. Trützschler, M. Kiel, F. Schumann, J. Kirschner, and W. Widdra, “Boosting laboratory photoelectron spectroscopy by megahertz high order harmonics,” New J. Phys. 17, 013035 (2015).
[Crossref]

Kiss, T.

T. Kiss, T. Shimojima, K. Ishizaka, A. Chainani, T. Togashi, T. Kanai, X.-Y. Wang, C.-T. Chen, S. Watanabe, and S. Shin, “A versatile system for ultrahigh resolution, low temperature, and polarization dependent laser-angle-resolved photoemission spectroscopy,” Rev. Sci. Instrum. 79, 023106 (2008).
[Crossref]

Knut, R.

D. D. Hickstein, F. J. Dollar, P. Grychtol, J. L. Ellis, R. Knut, C. Hernández-García, D. Zusin, C. Gentry, J. M. Shaw, T. Fan, K. M. Dorney, A. Becker, A. Jaroń-Becker, H. C. Kapteyn, M. M. Murnane, and C. G. Durfee, “Non-collinear generation of angularly isolated circularly polarized high harmonics,” Nat. Photonics 9, 743–750 (2015).
[Crossref]

Kolbe, M.

M. D. Neumann, C. Cobet, H. Kaser, M. Kolbe, A. Gottwald, M. Richter, and N. Esser, “A synchrotron-radiation-based variable angle ellipsometer for the visible to vacuum ultraviolet spectral range,” Rev. Sci. Instrum. 85, 055117 (2014).
[Crossref]

Konishi, K.

K. Konishi, D. Akai, Y. Mita, M. Ishida, J. Yumoto, and M. Kuwata-Gonokami, “Tunable third harmonic generation in the vacuum ultraviolet region using dielectric nanomembranes,” APL Photon. 5, 066103 (2020).
[Crossref]

K. Konishi, T. Higuchi, J. Li, J. Larsson, S. Ishii, and M. Kuwata-Gonokami, “Polarization-controlled circular second-harmonic generation from metal hole arrays with threefold rotational symmetry,” Phys. Rev. Lett. 112, 135502 (2014).
[Crossref]

A. Mizushima, R. R. Reddy, K. Konishi, T. Ezawa, E. Ota, A. Higo, M. Kuwata-Gonokami, and Y. Mita, “Assessment of annealing treatment for wrinckle-less SiO2 membrane,” 22nd Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP), Virtual Conference, June15–26, (2020).

Kruchinin, S. Y.

T. T. Luu, M. Garg, S. Y. Kruchinin, A. Moulet, M. Hassan, and E. Goulielmakis, “Extreme ultraviolet high-harmonic spectroscopy of solids,” Nature 521, 498–502 (2015).
[Crossref]

Kubota, M.

Y. Mita, E. Lebrasseur, Y. Okamoto, F. Marty, R. Setoguchi, K. Yamada, I. Mori, S. Morishita, Y. Imai, K. Hosaka, A. Hirakawa, S. Inoue, M. Kubota, and M. Denoual, “Opportunities of CMOS-MEMS integration through LSI foundry and open facility,” Jpn. J. Appl. Phys. 56, 06GA03 (2017).
[Crossref]

Kujala, S.

B. K. Canfield, S. Kujala, K. Jefimovs, Y. Svirko, J. Turunen, and M. Kauranen, “A macroscopic formalism to describe the second-order nonlinear optical response of nanostructures,” J. Opt. A 8, S278–S284 (2006).
[Crossref]

Kung, A. H.

P.-C. Huang, C. Hernández-García, J.-T. Huang, P.-Y. Huang, C.-H. Lu, L. Rego, D. D. Hickstein, J. L. Ellis, A. Jaron-Becker, A. Becker, S.-D. Yang, C. G. Durfee, L. Plaja, H. C. Kapteyn, M. M. Murnane, A. H. Kung, and M.-C. Chen, “Polarization control of isolated high-harmonic pulses,” Nat. Photonics 12, 349–354 (2018).
[Crossref]

Kurtán, T.

A. Mándi and T. Kurtán, “Applications of OR/ECD/VCD to the structure elucidation of natural products,” Nat. Prod. Rep. 36, 889–918 (2019).
[Crossref]

Kuwata-Gonokami, M.

K. Konishi, D. Akai, Y. Mita, M. Ishida, J. Yumoto, and M. Kuwata-Gonokami, “Tunable third harmonic generation in the vacuum ultraviolet region using dielectric nanomembranes,” APL Photon. 5, 066103 (2020).
[Crossref]

K. Konishi, T. Higuchi, J. Li, J. Larsson, S. Ishii, and M. Kuwata-Gonokami, “Polarization-controlled circular second-harmonic generation from metal hole arrays with threefold rotational symmetry,” Phys. Rev. Lett. 112, 135502 (2014).
[Crossref]

A. Mizushima, R. R. Reddy, K. Konishi, T. Ezawa, E. Ota, A. Higo, M. Kuwata-Gonokami, and Y. Mita, “Assessment of annealing treatment for wrinckle-less SiO2 membrane,” 22nd Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP), Virtual Conference, June15–26, (2020).

Lacour, J.

Lagarde, B.

F. Auvray, D. Dennetiere, A. Giuliani, F. Jamme, F. Wien, B. Nay, S. Zirah, F. Polack, C. Menneglier, B. Lagarde, J. D. Hirst, and M. Refregiers, “Time resolved transient circular dichroism spectroscopy using synchrotron natural polarization,” Struct. Dyn. 6, 054307 (2019).
[Crossref]

Lanzara, A.

C. L. Smallwood, R. A. Kaindl, and A. Lanzara, “Ultrafast angle-resolved photoemission spectroscopy of quantum materials,” Euro. Lett. 115, 27001 (2016).
[Crossref]

Larsson, J.

K. Konishi, T. Higuchi, J. Li, J. Larsson, S. Ishii, and M. Kuwata-Gonokami, “Polarization-controlled circular second-harmonic generation from metal hole arrays with threefold rotational symmetry,” Phys. Rev. Lett. 112, 135502 (2014).
[Crossref]

Lebrasseur, E.

Y. Mita, E. Lebrasseur, Y. Okamoto, F. Marty, R. Setoguchi, K. Yamada, I. Mori, S. Morishita, Y. Imai, K. Hosaka, A. Hirakawa, S. Inoue, M. Kubota, and M. Denoual, “Opportunities of CMOS-MEMS integration through LSI foundry and open facility,” Jpn. J. Appl. Phys. 56, 06GA03 (2017).
[Crossref]

Lee, J. J.

Y. He, I. M. Vishik, M. Yi, S. Yang, Z. Liu, J. J. Lee, S. Chen, S. N. Rebec, D. Leuenberger, A. Zong, C. M. Jefferson, R. G. Moore, P. S. Kirchmann, A. J. Merriam, and Z.-X. Shen, “Invited article: High resolution angle resolved photoemission with tabletop 11 eV laser,” Rev. Sci. Instrum. 87, 011301 (2016).
[Crossref]

Lee, Y. S.

Y. H. Wang, D. Hsieh, D. Pilon, L. Fu, D. R. Gardner, Y. S. Lee, and N. Gedik, “Observation of a warped helical spin texture in Bi2Se3 from circular dichroism angle-resolved photoemission spectroscopy,” Phys. Rev. Lett. 107, 207602 (2011).
[Crossref]

Leuenberger, D.

Y. He, I. M. Vishik, M. Yi, S. Yang, Z. Liu, J. J. Lee, S. Chen, S. N. Rebec, D. Leuenberger, A. Zong, C. M. Jefferson, R. G. Moore, P. S. Kirchmann, A. J. Merriam, and Z.-X. Shen, “Invited article: High resolution angle resolved photoemission with tabletop 11 eV laser,” Rev. Sci. Instrum. 87, 011301 (2016).
[Crossref]

Li, G.

G. Li, S. Zhang, and T. Zentgraf, “Nonlinear photonic metasufraces,” Nat. Rev. Mater. 2, 17010 (2017).
[Crossref]

S. Chen, G. Li, F. Zeuner, W. H. Wong, E. Y. B. Pun, T. Zentgraf, K. W. Cheah, and S. Zhang, “Symmetry-selective third-harmonic generation from plasmonic metacrystals,” Phys. Rev. Lett. 113, 033901 (2014).
[Crossref]

Li, J.

K. Konishi, T. Higuchi, J. Li, J. Larsson, S. Ishii, and M. Kuwata-Gonokami, “Polarization-controlled circular second-harmonic generation from metal hole arrays with threefold rotational symmetry,” Phys. Rev. Lett. 112, 135502 (2014).
[Crossref]

Liu, B.

B. Liu, B. Sain, B. Reineke, R. Zhao, C. Meier, L. Huang, Y. Jiang, and T. Zentgraf, “Nonlinear wavefront control by geometric-phase dielectric metasurfaces: influence of mode field and rotational symmetry,” Adv. Opt. Mater. 8, 1902050 (2020).
[Crossref]

Liu, Z.

Y. He, I. M. Vishik, M. Yi, S. Yang, Z. Liu, J. J. Lee, S. Chen, S. N. Rebec, D. Leuenberger, A. Zong, C. M. Jefferson, R. G. Moore, P. S. Kirchmann, A. J. Merriam, and Z.-X. Shen, “Invited article: High resolution angle resolved photoemission with tabletop 11 eV laser,” Rev. Sci. Instrum. 87, 011301 (2016).
[Crossref]

Lu, C.-H.

P.-C. Huang, C. Hernández-García, J.-T. Huang, P.-Y. Huang, C.-H. Lu, L. Rego, D. D. Hickstein, J. L. Ellis, A. Jaron-Becker, A. Becker, S.-D. Yang, C. G. Durfee, L. Plaja, H. C. Kapteyn, M. M. Murnane, A. H. Kung, and M.-C. Chen, “Polarization control of isolated high-harmonic pulses,” Nat. Photonics 12, 349–354 (2018).
[Crossref]

Lu, F.

Lun, M.

M. Semmlinger, M. Lun, T. J. Yang, M. Zhang, C. Zhang, W.-Y. Tsai, D. P. Tsai, P. Nordlander, and N. J. Halas, “Vacuum ultraviolet light-generating metasurface,” Nano Lett. 18, 5738–5743 (2018).
[Crossref]

Luu, T. T.

T. T. Luu, M. Garg, S. Y. Kruchinin, A. Moulet, M. Hassan, and E. Goulielmakis, “Extreme ultraviolet high-harmonic spectroscopy of solids,” Nature 521, 498–502 (2015).
[Crossref]

Lv, B.

B. Lv, T. Qian, and H. Ding, “Angle-resolved photoemission spectroscopy and its application to topological materials,” Nat. Rev. Phys. 1, 609–626 (2019).
[Crossref]

Mairesse, Y.

A. Ferré, C. Handschin, M. Dumergue, F. Burgy, A. Comby, D. Descamps, B. Fabre, G. A. Garcia, R. Géneaux, L. Merceron, E. Mével, L. Nahon, S. Petit, B. Pons, D. Staedter, S. Weber, T. Ruchon, V. Blanchet, and Y. Mairesse, “A table-top ultrashort light source in the extreme ultraviolet for circular dichroism experiments,” Nat. Photonics 9, 93–98 (2015).
[Crossref]

Mándi, A.

A. Mándi and T. Kurtán, “Applications of OR/ECD/VCD to the structure elucidation of natural products,” Nat. Prod. Rep. 36, 889–918 (2019).
[Crossref]

Marty, F.

Y. Mita, E. Lebrasseur, Y. Okamoto, F. Marty, R. Setoguchi, K. Yamada, I. Mori, S. Morishita, Y. Imai, K. Hosaka, A. Hirakawa, S. Inoue, M. Kubota, and M. Denoual, “Opportunities of CMOS-MEMS integration through LSI foundry and open facility,” Jpn. J. Appl. Phys. 56, 06GA03 (2017).
[Crossref]

Matsuo, K.

K. Matsuo and K. Gekko, “Vacuum-ultraviolet circular dichroism study of saccharides by synchrotron radiation spectrophotometry,” Carbohy. Res. 339, 591–597 (2004).
[Crossref]

Meier, C.

B. Liu, B. Sain, B. Reineke, R. Zhao, C. Meier, L. Huang, Y. Jiang, and T. Zentgraf, “Nonlinear wavefront control by geometric-phase dielectric metasurfaces: influence of mode field and rotational symmetry,” Adv. Opt. Mater. 8, 1902050 (2020).
[Crossref]

Meierhenrich, U. J.

U. J. Meierhenrich, J.-J. Filippi, C. Meinert, J. H. Bredehöft, J. Takahashi, L. Nahon, N. C. Jones, and S. V. Hoffmann, “Circular dichroism of amino acids in the vacuum-ultraviolet region,” Angew. Chem. Int. Ed. 49,7799–7802 (2010).
[Crossref]

Meinert, C.

U. J. Meierhenrich, J.-J. Filippi, C. Meinert, J. H. Bredehöft, J. Takahashi, L. Nahon, N. C. Jones, and S. V. Hoffmann, “Circular dichroism of amino acids in the vacuum-ultraviolet region,” Angew. Chem. Int. Ed. 49,7799–7802 (2010).
[Crossref]

Menneglier, C.

F. Auvray, D. Dennetiere, A. Giuliani, F. Jamme, F. Wien, B. Nay, S. Zirah, F. Polack, C. Menneglier, B. Lagarde, J. D. Hirst, and M. Refregiers, “Time resolved transient circular dichroism spectroscopy using synchrotron natural polarization,” Struct. Dyn. 6, 054307 (2019).
[Crossref]

Merceron, L.

A. Ferré, C. Handschin, M. Dumergue, F. Burgy, A. Comby, D. Descamps, B. Fabre, G. A. Garcia, R. Géneaux, L. Merceron, E. Mével, L. Nahon, S. Petit, B. Pons, D. Staedter, S. Weber, T. Ruchon, V. Blanchet, and Y. Mairesse, “A table-top ultrashort light source in the extreme ultraviolet for circular dichroism experiments,” Nat. Photonics 9, 93–98 (2015).
[Crossref]

Merriam, A. J.

Y. He, I. M. Vishik, M. Yi, S. Yang, Z. Liu, J. J. Lee, S. Chen, S. N. Rebec, D. Leuenberger, A. Zong, C. M. Jefferson, R. G. Moore, P. S. Kirchmann, A. J. Merriam, and Z.-X. Shen, “Invited article: High resolution angle resolved photoemission with tabletop 11 eV laser,” Rev. Sci. Instrum. 87, 011301 (2016).
[Crossref]

Meskers, S. C. J.

M. Savoini, P. Biagioni, S. C. J. Meskers, L. Duò, B. Hecht, and M. Finazzi, “Spontaneous formation of left- and right-handed cholesterically ordered domains in an enantiopure chiral polyfluorene film,” J. Phys. Chem. Lett. 2, 1359–1362 (2011).
[Crossref]

Mével, E.

A. Ferré, C. Handschin, M. Dumergue, F. Burgy, A. Comby, D. Descamps, B. Fabre, G. A. Garcia, R. Géneaux, L. Merceron, E. Mével, L. Nahon, S. Petit, B. Pons, D. Staedter, S. Weber, T. Ruchon, V. Blanchet, and Y. Mairesse, “A table-top ultrashort light source in the extreme ultraviolet for circular dichroism experiments,” Nat. Photonics 9, 93–98 (2015).
[Crossref]

Mita, Y.

K. Konishi, D. Akai, Y. Mita, M. Ishida, J. Yumoto, and M. Kuwata-Gonokami, “Tunable third harmonic generation in the vacuum ultraviolet region using dielectric nanomembranes,” APL Photon. 5, 066103 (2020).
[Crossref]

Y. Mita, E. Lebrasseur, Y. Okamoto, F. Marty, R. Setoguchi, K. Yamada, I. Mori, S. Morishita, Y. Imai, K. Hosaka, A. Hirakawa, S. Inoue, M. Kubota, and M. Denoual, “Opportunities of CMOS-MEMS integration through LSI foundry and open facility,” Jpn. J. Appl. Phys. 56, 06GA03 (2017).
[Crossref]

A. Mizushima, R. R. Reddy, K. Konishi, T. Ezawa, E. Ota, A. Higo, M. Kuwata-Gonokami, and Y. Mita, “Assessment of annealing treatment for wrinckle-less SiO2 membrane,” 22nd Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP), Virtual Conference, June15–26, (2020).

Mizushima, A.

A. Mizushima, R. R. Reddy, K. Konishi, T. Ezawa, E. Ota, A. Higo, M. Kuwata-Gonokami, and Y. Mita, “Assessment of annealing treatment for wrinckle-less SiO2 membrane,” 22nd Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP), Virtual Conference, June15–26, (2020).

Moore, R. G.

Y. He, I. M. Vishik, M. Yi, S. Yang, Z. Liu, J. J. Lee, S. Chen, S. N. Rebec, D. Leuenberger, A. Zong, C. M. Jefferson, R. G. Moore, P. S. Kirchmann, A. J. Merriam, and Z.-X. Shen, “Invited article: High resolution angle resolved photoemission with tabletop 11 eV laser,” Rev. Sci. Instrum. 87, 011301 (2016).
[Crossref]

Mori, I.

Y. Mita, E. Lebrasseur, Y. Okamoto, F. Marty, R. Setoguchi, K. Yamada, I. Mori, S. Morishita, Y. Imai, K. Hosaka, A. Hirakawa, S. Inoue, M. Kubota, and M. Denoual, “Opportunities of CMOS-MEMS integration through LSI foundry and open facility,” Jpn. J. Appl. Phys. 56, 06GA03 (2017).
[Crossref]

Morimoto, Y.

Y. Morimoto and P. Baum, “Diffraction and microscopy with attosecond electron pulse trains,” Nat. Phys. 14, 252–256 (2018).
[Crossref]

Morishita, S.

Y. Mita, E. Lebrasseur, Y. Okamoto, F. Marty, R. Setoguchi, K. Yamada, I. Mori, S. Morishita, Y. Imai, K. Hosaka, A. Hirakawa, S. Inoue, M. Kubota, and M. Denoual, “Opportunities of CMOS-MEMS integration through LSI foundry and open facility,” Jpn. J. Appl. Phys. 56, 06GA03 (2017).
[Crossref]

Moulet, A.

T. T. Luu, M. Garg, S. Y. Kruchinin, A. Moulet, M. Hassan, and E. Goulielmakis, “Extreme ultraviolet high-harmonic spectroscopy of solids,” Nature 521, 498–502 (2015).
[Crossref]

Muljarov, E. A.

S. G. Tikhodeev, A. L. Yablonskii, E. A. Muljarov, N. A. Gippius, and T. Ishihara, “Quasiguided modes and optical properties of photonic crystal slabs,” Phys. Rev. B 66, 045102 (2002).
[Crossref]

Murnane, M. M.

P.-C. Huang, C. Hernández-García, J.-T. Huang, P.-Y. Huang, C.-H. Lu, L. Rego, D. D. Hickstein, J. L. Ellis, A. Jaron-Becker, A. Becker, S.-D. Yang, C. G. Durfee, L. Plaja, H. C. Kapteyn, M. M. Murnane, A. H. Kung, and M.-C. Chen, “Polarization control of isolated high-harmonic pulses,” Nat. Photonics 12, 349–354 (2018).
[Crossref]

D. D. Hickstein, F. J. Dollar, P. Grychtol, J. L. Ellis, R. Knut, C. Hernández-García, D. Zusin, C. Gentry, J. M. Shaw, T. Fan, K. M. Dorney, A. Becker, A. Jaroń-Becker, H. C. Kapteyn, M. M. Murnane, and C. G. Durfee, “Non-collinear generation of angularly isolated circularly polarized high harmonics,” Nat. Photonics 9, 743–750 (2015).
[Crossref]

Nahon, L.

A. Ferré, C. Handschin, M. Dumergue, F. Burgy, A. Comby, D. Descamps, B. Fabre, G. A. Garcia, R. Géneaux, L. Merceron, E. Mével, L. Nahon, S. Petit, B. Pons, D. Staedter, S. Weber, T. Ruchon, V. Blanchet, and Y. Mairesse, “A table-top ultrashort light source in the extreme ultraviolet for circular dichroism experiments,” Nat. Photonics 9, 93–98 (2015).
[Crossref]

U. J. Meierhenrich, J.-J. Filippi, C. Meinert, J. H. Bredehöft, J. Takahashi, L. Nahon, N. C. Jones, and S. V. Hoffmann, “Circular dichroism of amino acids in the vacuum-ultraviolet region,” Angew. Chem. Int. Ed. 49,7799–7802 (2010).
[Crossref]

Nakamura, T.

M. Ishida, K. Sawada, S. Yamaguchi, T. Nakamura, and T. Suzuki, “Heteroepitaxial Si/Al2O3/Si structures,” Appl. Phys. Lett. 55, 556–558 (1989).
[Crossref]

M. Ishida, I. Katakabe, T. Nakamura, and N. Ohtake, “Epitaxial Al2O3 films on Si by low-pressure chemical vapor deposition,” Appl. Phys. Lett. 52, 1326–1328 (1988).
[Crossref]

Nay, B.

F. Auvray, D. Dennetiere, A. Giuliani, F. Jamme, F. Wien, B. Nay, S. Zirah, F. Polack, C. Menneglier, B. Lagarde, J. D. Hirst, and M. Refregiers, “Time resolved transient circular dichroism spectroscopy using synchrotron natural polarization,” Struct. Dyn. 6, 054307 (2019).
[Crossref]

Neumann, M. D.

M. D. Neumann, C. Cobet, H. Kaser, M. Kolbe, A. Gottwald, M. Richter, and N. Esser, “A synchrotron-radiation-based variable angle ellipsometer for the visible to vacuum ultraviolet spectral range,” Rev. Sci. Instrum. 85, 055117 (2014).
[Crossref]

Niezborala, C.

C. Niezborala and F. Hache, “Conformational changes in photoexcited (R)-(+)-1,1’-bi-2-naphthol studied by time-resolved circular dichroism,” J. Am. Chem. Soc. 130, 12783 (2008).
[Crossref]

Nordén, B.

B. Nordén, A. Rodger, and T. Dafforn, Linear Dicrhoism and Circular Dichroism: A Textbook on Polarizaed-Light Spectroscopy (RSC Publishing, 2010).

Nordlander, P.

M. Semmlinger, M. Zhang, M. L. Tseng, T.-T. Huang, J. Yang, D. P. Tsai, P. Nordlander, and N. J. Halas, “Generating third harmonic vacuum ultraviolet light with a TiO2 metasurface,” Nano Lett. 19, 8972–8978 (2019).
[Crossref]

M. Semmlinger, M. Lun, T. J. Yang, M. Zhang, C. Zhang, W.-Y. Tsai, D. P. Tsai, P. Nordlander, and N. J. Halas, “Vacuum ultraviolet light-generating metasurface,” Nano Lett. 18, 5738–5743 (2018).
[Crossref]

Ohtake, N.

M. Ishida, I. Katakabe, T. Nakamura, and N. Ohtake, “Epitaxial Al2O3 films on Si by low-pressure chemical vapor deposition,” Appl. Phys. Lett. 52, 1326–1328 (1988).
[Crossref]

Okamoto, Y.

Y. Mita, E. Lebrasseur, Y. Okamoto, F. Marty, R. Setoguchi, K. Yamada, I. Mori, S. Morishita, Y. Imai, K. Hosaka, A. Hirakawa, S. Inoue, M. Kubota, and M. Denoual, “Opportunities of CMOS-MEMS integration through LSI foundry and open facility,” Jpn. J. Appl. Phys. 56, 06GA03 (2017).
[Crossref]

Oppermann, M.

M. Oppermann, J. Spekowius, B. Bauer, R. Pfister, M. Chergui, and J. Helbing, “Broad-band ultraviolet CD spectroscopy of ultrafast peptide backbone conformational dynamics,” J. Phys. Chem. Lett. 10, 2700−2705 (2019).
[Crossref]

M. Oppermann, B. Bauer, T. Rossi, F. Zinna, J. Helbing, J. Lacour, and M. Chergui, “Ultrafast broadband circular dichroism in the deep ultraviolet,” Optica 6, 56–60 (2019).
[Crossref]

Ota, E.

A. Mizushima, R. R. Reddy, K. Konishi, T. Ezawa, E. Ota, A. Higo, M. Kuwata-Gonokami, and Y. Mita, “Assessment of annealing treatment for wrinckle-less SiO2 membrane,” 22nd Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP), Virtual Conference, June15–26, (2020).

Petit, S.

A. Ferré, C. Handschin, M. Dumergue, F. Burgy, A. Comby, D. Descamps, B. Fabre, G. A. Garcia, R. Géneaux, L. Merceron, E. Mével, L. Nahon, S. Petit, B. Pons, D. Staedter, S. Weber, T. Ruchon, V. Blanchet, and Y. Mairesse, “A table-top ultrashort light source in the extreme ultraviolet for circular dichroism experiments,” Nat. Photonics 9, 93–98 (2015).
[Crossref]

Pfister, R.

M. Oppermann, J. Spekowius, B. Bauer, R. Pfister, M. Chergui, and J. Helbing, “Broad-band ultraviolet CD spectroscopy of ultrafast peptide backbone conformational dynamics,” J. Phys. Chem. Lett. 10, 2700−2705 (2019).
[Crossref]

Pilon, D.

Y. H. Wang, D. Hsieh, D. Pilon, L. Fu, D. R. Gardner, Y. S. Lee, and N. Gedik, “Observation of a warped helical spin texture in Bi2Se3 from circular dichroism angle-resolved photoemission spectroscopy,” Phys. Rev. Lett. 107, 207602 (2011).
[Crossref]

Plaja, L.

P.-C. Huang, C. Hernández-García, J.-T. Huang, P.-Y. Huang, C.-H. Lu, L. Rego, D. D. Hickstein, J. L. Ellis, A. Jaron-Becker, A. Becker, S.-D. Yang, C. G. Durfee, L. Plaja, H. C. Kapteyn, M. M. Murnane, A. H. Kung, and M.-C. Chen, “Polarization control of isolated high-harmonic pulses,” Nat. Photonics 12, 349–354 (2018).
[Crossref]

Polack, F.

F. Auvray, D. Dennetiere, A. Giuliani, F. Jamme, F. Wien, B. Nay, S. Zirah, F. Polack, C. Menneglier, B. Lagarde, J. D. Hirst, and M. Refregiers, “Time resolved transient circular dichroism spectroscopy using synchrotron natural polarization,” Struct. Dyn. 6, 054307 (2019).
[Crossref]

Pons, B.

A. Ferré, C. Handschin, M. Dumergue, F. Burgy, A. Comby, D. Descamps, B. Fabre, G. A. Garcia, R. Géneaux, L. Merceron, E. Mével, L. Nahon, S. Petit, B. Pons, D. Staedter, S. Weber, T. Ruchon, V. Blanchet, and Y. Mairesse, “A table-top ultrashort light source in the extreme ultraviolet for circular dichroism experiments,” Nat. Photonics 9, 93–98 (2015).
[Crossref]

Prunnila, M.

A. Shchepetov, M. Prunnila, F. Alzina, L. Schneider, J. Cuffe, H. Jiang, E. I. Kauppinen, C. M. Sotomayor Torres, and J. Ahopelto, “Ultra-thin free-standing single crystalline silicon membranes with strain control,” Appl. Phys. Lett. 102, 192108 (2013).
[Crossref]

Pun, E. Y. B.

S. Chen, G. Li, F. Zeuner, W. H. Wong, E. Y. B. Pun, T. Zentgraf, K. W. Cheah, and S. Zhang, “Symmetry-selective third-harmonic generation from plasmonic metacrystals,” Phys. Rev. Lett. 113, 033901 (2014).
[Crossref]

Qian, T.

B. Lv, T. Qian, and H. Ding, “Angle-resolved photoemission spectroscopy and its application to topological materials,” Nat. Rev. Phys. 1, 609–626 (2019).
[Crossref]

Rebec, S. N.

Y. He, I. M. Vishik, M. Yi, S. Yang, Z. Liu, J. J. Lee, S. Chen, S. N. Rebec, D. Leuenberger, A. Zong, C. M. Jefferson, R. G. Moore, P. S. Kirchmann, A. J. Merriam, and Z.-X. Shen, “Invited article: High resolution angle resolved photoemission with tabletop 11 eV laser,” Rev. Sci. Instrum. 87, 011301 (2016).
[Crossref]

Reddy, R. R.

A. Mizushima, R. R. Reddy, K. Konishi, T. Ezawa, E. Ota, A. Higo, M. Kuwata-Gonokami, and Y. Mita, “Assessment of annealing treatment for wrinckle-less SiO2 membrane,” 22nd Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP), Virtual Conference, June15–26, (2020).

Refregiers, M.

F. Auvray, D. Dennetiere, A. Giuliani, F. Jamme, F. Wien, B. Nay, S. Zirah, F. Polack, C. Menneglier, B. Lagarde, J. D. Hirst, and M. Refregiers, “Time resolved transient circular dichroism spectroscopy using synchrotron natural polarization,” Struct. Dyn. 6, 054307 (2019).
[Crossref]

Rego, L.

P.-C. Huang, C. Hernández-García, J.-T. Huang, P.-Y. Huang, C.-H. Lu, L. Rego, D. D. Hickstein, J. L. Ellis, A. Jaron-Becker, A. Becker, S.-D. Yang, C. G. Durfee, L. Plaja, H. C. Kapteyn, M. M. Murnane, A. H. Kung, and M.-C. Chen, “Polarization control of isolated high-harmonic pulses,” Nat. Photonics 12, 349–354 (2018).
[Crossref]

Reineke, B.

B. Liu, B. Sain, B. Reineke, R. Zhao, C. Meier, L. Huang, Y. Jiang, and T. Zentgraf, “Nonlinear wavefront control by geometric-phase dielectric metasurfaces: influence of mode field and rotational symmetry,” Adv. Opt. Mater. 8, 1902050 (2020).
[Crossref]

Richter, M.

M. D. Neumann, C. Cobet, H. Kaser, M. Kolbe, A. Gottwald, M. Richter, and N. Esser, “A synchrotron-radiation-based variable angle ellipsometer for the visible to vacuum ultraviolet spectral range,” Rev. Sci. Instrum. 85, 055117 (2014).
[Crossref]

Rodger, A.

B. Nordén, A. Rodger, and T. Dafforn, Linear Dicrhoism and Circular Dichroism: A Textbook on Polarizaed-Light Spectroscopy (RSC Publishing, 2010).

Rossi, T.

Ruchon, T.

A. Ferré, C. Handschin, M. Dumergue, F. Burgy, A. Comby, D. Descamps, B. Fabre, G. A. Garcia, R. Géneaux, L. Merceron, E. Mével, L. Nahon, S. Petit, B. Pons, D. Staedter, S. Weber, T. Ruchon, V. Blanchet, and Y. Mairesse, “A table-top ultrashort light source in the extreme ultraviolet for circular dichroism experiments,” Nat. Photonics 9, 93–98 (2015).
[Crossref]

Sain, B.

B. Liu, B. Sain, B. Reineke, R. Zhao, C. Meier, L. Huang, Y. Jiang, and T. Zentgraf, “Nonlinear wavefront control by geometric-phase dielectric metasurfaces: influence of mode field and rotational symmetry,” Adv. Opt. Mater. 8, 1902050 (2020).
[Crossref]

Saito, N.

Savoini, M.

M. Savoini, P. Biagioni, S. C. J. Meskers, L. Duò, B. Hecht, and M. Finazzi, “Spontaneous formation of left- and right-handed cholesterically ordered domains in an enantiopure chiral polyfluorene film,” J. Phys. Chem. Lett. 2, 1359–1362 (2011).
[Crossref]

Sawada, K.

M. Ishida, K. Sawada, S. Yamaguchi, T. Nakamura, and T. Suzuki, “Heteroepitaxial Si/Al2O3/Si structures,” Appl. Phys. Lett. 55, 556–558 (1989).
[Crossref]

Schneider, L.

A. Shchepetov, M. Prunnila, F. Alzina, L. Schneider, J. Cuffe, H. Jiang, E. I. Kauppinen, C. M. Sotomayor Torres, and J. Ahopelto, “Ultra-thin free-standing single crystalline silicon membranes with strain control,” Appl. Phys. Lett. 102, 192108 (2013).
[Crossref]

Schumann, F.

C.-T. Chiang, M. Huth, A. Trützschler, M. Kiel, F. Schumann, J. Kirschner, and W. Widdra, “Boosting laboratory photoelectron spectroscopy by megahertz high order harmonics,” New J. Phys. 17, 013035 (2015).
[Crossref]

Semmlinger, M.

M. Semmlinger, M. Zhang, M. L. Tseng, T.-T. Huang, J. Yang, D. P. Tsai, P. Nordlander, and N. J. Halas, “Generating third harmonic vacuum ultraviolet light with a TiO2 metasurface,” Nano Lett. 19, 8972–8978 (2019).
[Crossref]

M. Semmlinger, M. Lun, T. J. Yang, M. Zhang, C. Zhang, W.-Y. Tsai, D. P. Tsai, P. Nordlander, and N. J. Halas, “Vacuum ultraviolet light-generating metasurface,” Nano Lett. 18, 5738–5743 (2018).
[Crossref]

Setoguchi, R.

Y. Mita, E. Lebrasseur, Y. Okamoto, F. Marty, R. Setoguchi, K. Yamada, I. Mori, S. Morishita, Y. Imai, K. Hosaka, A. Hirakawa, S. Inoue, M. Kubota, and M. Denoual, “Opportunities of CMOS-MEMS integration through LSI foundry and open facility,” Jpn. J. Appl. Phys. 56, 06GA03 (2017).
[Crossref]

Shaw, J. M.

D. D. Hickstein, F. J. Dollar, P. Grychtol, J. L. Ellis, R. Knut, C. Hernández-García, D. Zusin, C. Gentry, J. M. Shaw, T. Fan, K. M. Dorney, A. Becker, A. Jaroń-Becker, H. C. Kapteyn, M. M. Murnane, and C. G. Durfee, “Non-collinear generation of angularly isolated circularly polarized high harmonics,” Nat. Photonics 9, 743–750 (2015).
[Crossref]

Shchepetov, A.

A. Shchepetov, M. Prunnila, F. Alzina, L. Schneider, J. Cuffe, H. Jiang, E. I. Kauppinen, C. M. Sotomayor Torres, and J. Ahopelto, “Ultra-thin free-standing single crystalline silicon membranes with strain control,” Appl. Phys. Lett. 102, 192108 (2013).
[Crossref]

Shen, K.-C.

K.-C. Shen, Y.-T. Huang, T. L. Chung, M. L. Tseng, W.-Y. Tsai, G. Sun, and D. P. Tsai, “Giant efficiency of visible second-harmonic light by an all-dielectric multiple-quantum-well metasurface,” Phys. Rev. Appl. 12, 064056 (2019).
[Crossref]

Shen, Z.-X.

Y. He, I. M. Vishik, M. Yi, S. Yang, Z. Liu, J. J. Lee, S. Chen, S. N. Rebec, D. Leuenberger, A. Zong, C. M. Jefferson, R. G. Moore, P. S. Kirchmann, A. J. Merriam, and Z.-X. Shen, “Invited article: High resolution angle resolved photoemission with tabletop 11 eV laser,” Rev. Sci. Instrum. 87, 011301 (2016).
[Crossref]

A. Damascelli, Z. Hussain, and Z.-X. Shen, “Angle-resolved photoemission studies of the cuprate superconductors,” Rev. Mod. Phys. 75,473–541 (2003).
[Crossref]

Shimojima, T.

T. Kiss, T. Shimojima, K. Ishizaka, A. Chainani, T. Togashi, T. Kanai, X.-Y. Wang, C.-T. Chen, S. Watanabe, and S. Shin, “A versatile system for ultrahigh resolution, low temperature, and polarization dependent laser-angle-resolved photoemission spectroscopy,” Rev. Sci. Instrum. 79, 023106 (2008).
[Crossref]

Shin, S.

T. Kiss, T. Shimojima, K. Ishizaka, A. Chainani, T. Togashi, T. Kanai, X.-Y. Wang, C.-T. Chen, S. Watanabe, and S. Shin, “A versatile system for ultrahigh resolution, low temperature, and polarization dependent laser-angle-resolved photoemission spectroscopy,” Rev. Sci. Instrum. 79, 023106 (2008).
[Crossref]

Simon, H. J.

H. J. Simon and N. Bloembergen, “Second-harmonic light generation in crystals with natural optical activity,” Phys. Rev. 171, 1104–1114 (1968).
[Crossref]

Smallwood, C. L.

C. L. Smallwood, R. A. Kaindl, and A. Lanzara, “Ultrafast angle-resolved photoemission spectroscopy of quantum materials,” Euro. Lett. 115, 27001 (2016).
[Crossref]

Sotomayor Torres, C. M.

A. Shchepetov, M. Prunnila, F. Alzina, L. Schneider, J. Cuffe, H. Jiang, E. I. Kauppinen, C. M. Sotomayor Torres, and J. Ahopelto, “Ultra-thin free-standing single crystalline silicon membranes with strain control,” Appl. Phys. Lett. 102, 192108 (2013).
[Crossref]

Spekowius, J.

M. Oppermann, J. Spekowius, B. Bauer, R. Pfister, M. Chergui, and J. Helbing, “Broad-band ultraviolet CD spectroscopy of ultrafast peptide backbone conformational dynamics,” J. Phys. Chem. Lett. 10, 2700−2705 (2019).
[Crossref]

Spielmann, C.

C. Kern, M. Zürch, and C. Spielmann, “Limitations of extreme nonlinear ultrafast nanophotonics,” Nanophotonics 4, 303–323 (2015).
[Crossref]

Staedter, D.

A. Ferré, C. Handschin, M. Dumergue, F. Burgy, A. Comby, D. Descamps, B. Fabre, G. A. Garcia, R. Géneaux, L. Merceron, E. Mével, L. Nahon, S. Petit, B. Pons, D. Staedter, S. Weber, T. Ruchon, V. Blanchet, and Y. Mairesse, “A table-top ultrashort light source in the extreme ultraviolet for circular dichroism experiments,” Nat. Photonics 9, 93–98 (2015).
[Crossref]

Sun, G.

K.-C. Shen, Y.-T. Huang, T. L. Chung, M. L. Tseng, W.-Y. Tsai, G. Sun, and D. P. Tsai, “Giant efficiency of visible second-harmonic light by an all-dielectric multiple-quantum-well metasurface,” Phys. Rev. Appl. 12, 064056 (2019).
[Crossref]

Suzuki, T.

M. Ishida, K. Sawada, S. Yamaguchi, T. Nakamura, and T. Suzuki, “Heteroepitaxial Si/Al2O3/Si structures,” Appl. Phys. Lett. 55, 556–558 (1989).
[Crossref]

Svirko, Y.

B. K. Canfield, S. Kujala, K. Jefimovs, Y. Svirko, J. Turunen, and M. Kauranen, “A macroscopic formalism to describe the second-order nonlinear optical response of nanostructures,” J. Opt. A 8, S278–S284 (2006).
[Crossref]

Takahashi, J.

U. J. Meierhenrich, J.-J. Filippi, C. Meinert, J. H. Bredehöft, J. Takahashi, L. Nahon, N. C. Jones, and S. V. Hoffmann, “Circular dichroism of amino acids in the vacuum-ultraviolet region,” Angew. Chem. Int. Ed. 49,7799–7802 (2010).
[Crossref]

Tikhodeev, S. G.

S. G. Tikhodeev, A. L. Yablonskii, E. A. Muljarov, N. A. Gippius, and T. Ishihara, “Quasiguided modes and optical properties of photonic crystal slabs,” Phys. Rev. B 66, 045102 (2002).
[Crossref]

Togashi, T.

T. Kiss, T. Shimojima, K. Ishizaka, A. Chainani, T. Togashi, T. Kanai, X.-Y. Wang, C.-T. Chen, S. Watanabe, and S. Shin, “A versatile system for ultrahigh resolution, low temperature, and polarization dependent laser-angle-resolved photoemission spectroscopy,” Rev. Sci. Instrum. 79, 023106 (2008).
[Crossref]

Trützschler, A.

C.-T. Chiang, M. Huth, A. Trützschler, M. Kiel, F. Schumann, J. Kirschner, and W. Widdra, “Boosting laboratory photoelectron spectroscopy by megahertz high order harmonics,” New J. Phys. 17, 013035 (2015).
[Crossref]

Tsai, D. P.

K.-C. Shen, Y.-T. Huang, T. L. Chung, M. L. Tseng, W.-Y. Tsai, G. Sun, and D. P. Tsai, “Giant efficiency of visible second-harmonic light by an all-dielectric multiple-quantum-well metasurface,” Phys. Rev. Appl. 12, 064056 (2019).
[Crossref]

M. Semmlinger, M. Zhang, M. L. Tseng, T.-T. Huang, J. Yang, D. P. Tsai, P. Nordlander, and N. J. Halas, “Generating third harmonic vacuum ultraviolet light with a TiO2 metasurface,” Nano Lett. 19, 8972–8978 (2019).
[Crossref]

M. Semmlinger, M. Lun, T. J. Yang, M. Zhang, C. Zhang, W.-Y. Tsai, D. P. Tsai, P. Nordlander, and N. J. Halas, “Vacuum ultraviolet light-generating metasurface,” Nano Lett. 18, 5738–5743 (2018).
[Crossref]

Tsai, W.-Y.

K.-C. Shen, Y.-T. Huang, T. L. Chung, M. L. Tseng, W.-Y. Tsai, G. Sun, and D. P. Tsai, “Giant efficiency of visible second-harmonic light by an all-dielectric multiple-quantum-well metasurface,” Phys. Rev. Appl. 12, 064056 (2019).
[Crossref]

M. Semmlinger, M. Lun, T. J. Yang, M. Zhang, C. Zhang, W.-Y. Tsai, D. P. Tsai, P. Nordlander, and N. J. Halas, “Vacuum ultraviolet light-generating metasurface,” Nano Lett. 18, 5738–5743 (2018).
[Crossref]

Tseng, M. L.

K.-C. Shen, Y.-T. Huang, T. L. Chung, M. L. Tseng, W.-Y. Tsai, G. Sun, and D. P. Tsai, “Giant efficiency of visible second-harmonic light by an all-dielectric multiple-quantum-well metasurface,” Phys. Rev. Appl. 12, 064056 (2019).
[Crossref]

M. Semmlinger, M. Zhang, M. L. Tseng, T.-T. Huang, J. Yang, D. P. Tsai, P. Nordlander, and N. J. Halas, “Generating third harmonic vacuum ultraviolet light with a TiO2 metasurface,” Nano Lett. 19, 8972–8978 (2019).
[Crossref]

Turunen, J.

B. K. Canfield, S. Kujala, K. Jefimovs, Y. Svirko, J. Turunen, and M. Kauranen, “A macroscopic formalism to describe the second-order nonlinear optical response of nanostructures,” J. Opt. A 8, S278–S284 (2006).
[Crossref]

Vishik, I. M.

Y. He, I. M. Vishik, M. Yi, S. Yang, Z. Liu, J. J. Lee, S. Chen, S. N. Rebec, D. Leuenberger, A. Zong, C. M. Jefferson, R. G. Moore, P. S. Kirchmann, A. J. Merriam, and Z.-X. Shen, “Invited article: High resolution angle resolved photoemission with tabletop 11 eV laser,” Rev. Sci. Instrum. 87, 011301 (2016).
[Crossref]

Wang, G. L.

C. T. Chen, G. L. Wang, X. Y. Wang, and Z. Y. Xu, “Deep-UV nonlinear optical crystal KBe2BO3F2—discovery, growth, optical properties and applications,” Appl. Phys. B 97, 9–25 (2009).
[Crossref]

Wang, X. Y.

C. T. Chen, G. L. Wang, X. Y. Wang, and Z. Y. Xu, “Deep-UV nonlinear optical crystal KBe2BO3F2—discovery, growth, optical properties and applications,” Appl. Phys. B 97, 9–25 (2009).
[Crossref]

Wang, X.-Y.

T. Kiss, T. Shimojima, K. Ishizaka, A. Chainani, T. Togashi, T. Kanai, X.-Y. Wang, C.-T. Chen, S. Watanabe, and S. Shin, “A versatile system for ultrahigh resolution, low temperature, and polarization dependent laser-angle-resolved photoemission spectroscopy,” Rev. Sci. Instrum. 79, 023106 (2008).
[Crossref]

Wang, Y. H.

Y. H. Wang, D. Hsieh, D. Pilon, L. Fu, D. R. Gardner, Y. S. Lee, and N. Gedik, “Observation of a warped helical spin texture in Bi2Se3 from circular dichroism angle-resolved photoemission spectroscopy,” Phys. Rev. Lett. 107, 207602 (2011).
[Crossref]

Watanabe, S.

T. Kiss, T. Shimojima, K. Ishizaka, A. Chainani, T. Togashi, T. Kanai, X.-Y. Wang, C.-T. Chen, S. Watanabe, and S. Shin, “A versatile system for ultrahigh resolution, low temperature, and polarization dependent laser-angle-resolved photoemission spectroscopy,” Rev. Sci. Instrum. 79, 023106 (2008).
[Crossref]

Weber, S.

A. Ferré, C. Handschin, M. Dumergue, F. Burgy, A. Comby, D. Descamps, B. Fabre, G. A. Garcia, R. Géneaux, L. Merceron, E. Mével, L. Nahon, S. Petit, B. Pons, D. Staedter, S. Weber, T. Ruchon, V. Blanchet, and Y. Mairesse, “A table-top ultrashort light source in the extreme ultraviolet for circular dichroism experiments,” Nat. Photonics 9, 93–98 (2015).
[Crossref]

Widdra, W.

C.-T. Chiang, M. Huth, A. Trützschler, M. Kiel, F. Schumann, J. Kirschner, and W. Widdra, “Boosting laboratory photoelectron spectroscopy by megahertz high order harmonics,” New J. Phys. 17, 013035 (2015).
[Crossref]

Wien, F.

F. Auvray, D. Dennetiere, A. Giuliani, F. Jamme, F. Wien, B. Nay, S. Zirah, F. Polack, C. Menneglier, B. Lagarde, J. D. Hirst, and M. Refregiers, “Time resolved transient circular dichroism spectroscopy using synchrotron natural polarization,” Struct. Dyn. 6, 054307 (2019).
[Crossref]

Wong, W. H.

S. Chen, G. Li, F. Zeuner, W. H. Wong, E. Y. B. Pun, T. Zentgraf, K. W. Cheah, and S. Zhang, “Symmetry-selective third-harmonic generation from plasmonic metacrystals,” Phys. Rev. Lett. 113, 033901 (2014).
[Crossref]

Xia, P.

Xu, Z. Y.

C. T. Chen, G. L. Wang, X. Y. Wang, and Z. Y. Xu, “Deep-UV nonlinear optical crystal KBe2BO3F2—discovery, growth, optical properties and applications,” Appl. Phys. B 97, 9–25 (2009).
[Crossref]

Yablonskii, A. L.

S. G. Tikhodeev, A. L. Yablonskii, E. A. Muljarov, N. A. Gippius, and T. Ishihara, “Quasiguided modes and optical properties of photonic crystal slabs,” Phys. Rev. B 66, 045102 (2002).
[Crossref]

Yamada, K.

Y. Mita, E. Lebrasseur, Y. Okamoto, F. Marty, R. Setoguchi, K. Yamada, I. Mori, S. Morishita, Y. Imai, K. Hosaka, A. Hirakawa, S. Inoue, M. Kubota, and M. Denoual, “Opportunities of CMOS-MEMS integration through LSI foundry and open facility,” Jpn. J. Appl. Phys. 56, 06GA03 (2017).
[Crossref]

Yamaguchi, S.

M. Ishida, K. Sawada, S. Yamaguchi, T. Nakamura, and T. Suzuki, “Heteroepitaxial Si/Al2O3/Si structures,” Appl. Phys. Lett. 55, 556–558 (1989).
[Crossref]

Yang, J.

M. Semmlinger, M. Zhang, M. L. Tseng, T.-T. Huang, J. Yang, D. P. Tsai, P. Nordlander, and N. J. Halas, “Generating third harmonic vacuum ultraviolet light with a TiO2 metasurface,” Nano Lett. 19, 8972–8978 (2019).
[Crossref]

Yang, S.

Y. He, I. M. Vishik, M. Yi, S. Yang, Z. Liu, J. J. Lee, S. Chen, S. N. Rebec, D. Leuenberger, A. Zong, C. M. Jefferson, R. G. Moore, P. S. Kirchmann, A. J. Merriam, and Z.-X. Shen, “Invited article: High resolution angle resolved photoemission with tabletop 11 eV laser,” Rev. Sci. Instrum. 87, 011301 (2016).
[Crossref]

Yang, S.-D.

P.-C. Huang, C. Hernández-García, J.-T. Huang, P.-Y. Huang, C.-H. Lu, L. Rego, D. D. Hickstein, J. L. Ellis, A. Jaron-Becker, A. Becker, S.-D. Yang, C. G. Durfee, L. Plaja, H. C. Kapteyn, M. M. Murnane, A. H. Kung, and M.-C. Chen, “Polarization control of isolated high-harmonic pulses,” Nat. Photonics 12, 349–354 (2018).
[Crossref]

Yang, T. J.

M. Semmlinger, M. Lun, T. J. Yang, M. Zhang, C. Zhang, W.-Y. Tsai, D. P. Tsai, P. Nordlander, and N. J. Halas, “Vacuum ultraviolet light-generating metasurface,” Nano Lett. 18, 5738–5743 (2018).
[Crossref]

Yi, M.

Y. He, I. M. Vishik, M. Yi, S. Yang, Z. Liu, J. J. Lee, S. Chen, S. N. Rebec, D. Leuenberger, A. Zong, C. M. Jefferson, R. G. Moore, P. S. Kirchmann, A. J. Merriam, and Z.-X. Shen, “Invited article: High resolution angle resolved photoemission with tabletop 11 eV laser,” Rev. Sci. Instrum. 87, 011301 (2016).
[Crossref]

Yumoto, J.

K. Konishi, D. Akai, Y. Mita, M. Ishida, J. Yumoto, and M. Kuwata-Gonokami, “Tunable third harmonic generation in the vacuum ultraviolet region using dielectric nanomembranes,” APL Photon. 5, 066103 (2020).
[Crossref]

Zayats, A. V.

M. Kauranen and A. V. Zayats, “Nonlinear plasmonics,” Nat. Photonics 6, 737–748 (2012).
[Crossref]

Zentgraf, T.

B. Liu, B. Sain, B. Reineke, R. Zhao, C. Meier, L. Huang, Y. Jiang, and T. Zentgraf, “Nonlinear wavefront control by geometric-phase dielectric metasurfaces: influence of mode field and rotational symmetry,” Adv. Opt. Mater. 8, 1902050 (2020).
[Crossref]

G. Li, S. Zhang, and T. Zentgraf, “Nonlinear photonic metasufraces,” Nat. Rev. Mater. 2, 17010 (2017).
[Crossref]

S. Chen, G. Li, F. Zeuner, W. H. Wong, E. Y. B. Pun, T. Zentgraf, K. W. Cheah, and S. Zhang, “Symmetry-selective third-harmonic generation from plasmonic metacrystals,” Phys. Rev. Lett. 113, 033901 (2014).
[Crossref]

Zeuner, F.

S. Chen, G. Li, F. Zeuner, W. H. Wong, E. Y. B. Pun, T. Zentgraf, K. W. Cheah, and S. Zhang, “Symmetry-selective third-harmonic generation from plasmonic metacrystals,” Phys. Rev. Lett. 113, 033901 (2014).
[Crossref]

Zhang, C.

M. Semmlinger, M. Lun, T. J. Yang, M. Zhang, C. Zhang, W.-Y. Tsai, D. P. Tsai, P. Nordlander, and N. J. Halas, “Vacuum ultraviolet light-generating metasurface,” Nano Lett. 18, 5738–5743 (2018).
[Crossref]

Zhang, M.

M. Semmlinger, M. Zhang, M. L. Tseng, T.-T. Huang, J. Yang, D. P. Tsai, P. Nordlander, and N. J. Halas, “Generating third harmonic vacuum ultraviolet light with a TiO2 metasurface,” Nano Lett. 19, 8972–8978 (2019).
[Crossref]

M. Semmlinger, M. Lun, T. J. Yang, M. Zhang, C. Zhang, W.-Y. Tsai, D. P. Tsai, P. Nordlander, and N. J. Halas, “Vacuum ultraviolet light-generating metasurface,” Nano Lett. 18, 5738–5743 (2018).
[Crossref]

Zhang, S.

G. Li, S. Zhang, and T. Zentgraf, “Nonlinear photonic metasufraces,” Nat. Rev. Mater. 2, 17010 (2017).
[Crossref]

S. Chen, G. Li, F. Zeuner, W. H. Wong, E. Y. B. Pun, T. Zentgraf, K. W. Cheah, and S. Zhang, “Symmetry-selective third-harmonic generation from plasmonic metacrystals,” Phys. Rev. Lett. 113, 033901 (2014).
[Crossref]

Zhao, R.

B. Liu, B. Sain, B. Reineke, R. Zhao, C. Meier, L. Huang, Y. Jiang, and T. Zentgraf, “Nonlinear wavefront control by geometric-phase dielectric metasurfaces: influence of mode field and rotational symmetry,” Adv. Opt. Mater. 8, 1902050 (2020).
[Crossref]

Zinna, F.

Zirah, S.

F. Auvray, D. Dennetiere, A. Giuliani, F. Jamme, F. Wien, B. Nay, S. Zirah, F. Polack, C. Menneglier, B. Lagarde, J. D. Hirst, and M. Refregiers, “Time resolved transient circular dichroism spectroscopy using synchrotron natural polarization,” Struct. Dyn. 6, 054307 (2019).
[Crossref]

Zong, A.

Y. He, I. M. Vishik, M. Yi, S. Yang, Z. Liu, J. J. Lee, S. Chen, S. N. Rebec, D. Leuenberger, A. Zong, C. M. Jefferson, R. G. Moore, P. S. Kirchmann, A. J. Merriam, and Z.-X. Shen, “Invited article: High resolution angle resolved photoemission with tabletop 11 eV laser,” Rev. Sci. Instrum. 87, 011301 (2016).
[Crossref]

Zürch, M.

C. Kern, M. Zürch, and C. Spielmann, “Limitations of extreme nonlinear ultrafast nanophotonics,” Nanophotonics 4, 303–323 (2015).
[Crossref]

Zusin, D.

D. D. Hickstein, F. J. Dollar, P. Grychtol, J. L. Ellis, R. Knut, C. Hernández-García, D. Zusin, C. Gentry, J. M. Shaw, T. Fan, K. M. Dorney, A. Becker, A. Jaroń-Becker, H. C. Kapteyn, M. M. Murnane, and C. G. Durfee, “Non-collinear generation of angularly isolated circularly polarized high harmonics,” Nat. Photonics 9, 743–750 (2015).
[Crossref]

Adv. Opt. Mater. (1)

B. Liu, B. Sain, B. Reineke, R. Zhao, C. Meier, L. Huang, Y. Jiang, and T. Zentgraf, “Nonlinear wavefront control by geometric-phase dielectric metasurfaces: influence of mode field and rotational symmetry,” Adv. Opt. Mater. 8, 1902050 (2020).
[Crossref]

Angew. Chem. Int. Ed. (1)

U. J. Meierhenrich, J.-J. Filippi, C. Meinert, J. H. Bredehöft, J. Takahashi, L. Nahon, N. C. Jones, and S. V. Hoffmann, “Circular dichroism of amino acids in the vacuum-ultraviolet region,” Angew. Chem. Int. Ed. 49,7799–7802 (2010).
[Crossref]

Annu. Rev. Phys. Chem. (1)

W. C. Johnson, “Circular dichroism spectroscopy and the vacuum ultraviolet region,” Annu. Rev. Phys. Chem. 29, 93–114 (1978).
[Crossref]

APL Photon. (1)

K. Konishi, D. Akai, Y. Mita, M. Ishida, J. Yumoto, and M. Kuwata-Gonokami, “Tunable third harmonic generation in the vacuum ultraviolet region using dielectric nanomembranes,” APL Photon. 5, 066103 (2020).
[Crossref]

Appl. Phys. B (1)

C. T. Chen, G. L. Wang, X. Y. Wang, and Z. Y. Xu, “Deep-UV nonlinear optical crystal KBe2BO3F2—discovery, growth, optical properties and applications,” Appl. Phys. B 97, 9–25 (2009).
[Crossref]

Appl. Phys. Lett. (3)

M. Ishida, I. Katakabe, T. Nakamura, and N. Ohtake, “Epitaxial Al2O3 films on Si by low-pressure chemical vapor deposition,” Appl. Phys. Lett. 52, 1326–1328 (1988).
[Crossref]

M. Ishida, K. Sawada, S. Yamaguchi, T. Nakamura, and T. Suzuki, “Heteroepitaxial Si/Al2O3/Si structures,” Appl. Phys. Lett. 55, 556–558 (1989).
[Crossref]

A. Shchepetov, M. Prunnila, F. Alzina, L. Schneider, J. Cuffe, H. Jiang, E. I. Kauppinen, C. M. Sotomayor Torres, and J. Ahopelto, “Ultra-thin free-standing single crystalline silicon membranes with strain control,” Appl. Phys. Lett. 102, 192108 (2013).
[Crossref]

Carbohy. Res. (1)

K. Matsuo and K. Gekko, “Vacuum-ultraviolet circular dichroism study of saccharides by synchrotron radiation spectrophotometry,” Carbohy. Res. 339, 591–597 (2004).
[Crossref]

Euro. Lett. (1)

C. L. Smallwood, R. A. Kaindl, and A. Lanzara, “Ultrafast angle-resolved photoemission spectroscopy of quantum materials,” Euro. Lett. 115, 27001 (2016).
[Crossref]

J. Am. Chem. Soc. (1)

C. Niezborala and F. Hache, “Conformational changes in photoexcited (R)-(+)-1,1’-bi-2-naphthol studied by time-resolved circular dichroism,” J. Am. Chem. Soc. 130, 12783 (2008).
[Crossref]

J. Opt. A (1)

B. K. Canfield, S. Kujala, K. Jefimovs, Y. Svirko, J. Turunen, and M. Kauranen, “A macroscopic formalism to describe the second-order nonlinear optical response of nanostructures,” J. Opt. A 8, S278–S284 (2006).
[Crossref]

J. Phys. Chem. Lett. (2)

M. Oppermann, J. Spekowius, B. Bauer, R. Pfister, M. Chergui, and J. Helbing, “Broad-band ultraviolet CD spectroscopy of ultrafast peptide backbone conformational dynamics,” J. Phys. Chem. Lett. 10, 2700−2705 (2019).
[Crossref]

M. Savoini, P. Biagioni, S. C. J. Meskers, L. Duò, B. Hecht, and M. Finazzi, “Spontaneous formation of left- and right-handed cholesterically ordered domains in an enantiopure chiral polyfluorene film,” J. Phys. Chem. Lett. 2, 1359–1362 (2011).
[Crossref]

Jpn. J. Appl. Phys. (1)

Y. Mita, E. Lebrasseur, Y. Okamoto, F. Marty, R. Setoguchi, K. Yamada, I. Mori, S. Morishita, Y. Imai, K. Hosaka, A. Hirakawa, S. Inoue, M. Kubota, and M. Denoual, “Opportunities of CMOS-MEMS integration through LSI foundry and open facility,” Jpn. J. Appl. Phys. 56, 06GA03 (2017).
[Crossref]

Nano Lett. (2)

M. Semmlinger, M. Lun, T. J. Yang, M. Zhang, C. Zhang, W.-Y. Tsai, D. P. Tsai, P. Nordlander, and N. J. Halas, “Vacuum ultraviolet light-generating metasurface,” Nano Lett. 18, 5738–5743 (2018).
[Crossref]

M. Semmlinger, M. Zhang, M. L. Tseng, T.-T. Huang, J. Yang, D. P. Tsai, P. Nordlander, and N. J. Halas, “Generating third harmonic vacuum ultraviolet light with a TiO2 metasurface,” Nano Lett. 19, 8972–8978 (2019).
[Crossref]

Nanophotonics (1)

C. Kern, M. Zürch, and C. Spielmann, “Limitations of extreme nonlinear ultrafast nanophotonics,” Nanophotonics 4, 303–323 (2015).
[Crossref]

Nat. Nanotechnol. (1)

S. Jahani and Z. Jacob, “All-dielectric metamaterials,” Nat. Nanotechnol. 11, 23–36 (2016).
[Crossref]

Nat. Photonics (4)

M. Kauranen and A. V. Zayats, “Nonlinear plasmonics,” Nat. Photonics 6, 737–748 (2012).
[Crossref]

D. D. Hickstein, F. J. Dollar, P. Grychtol, J. L. Ellis, R. Knut, C. Hernández-García, D. Zusin, C. Gentry, J. M. Shaw, T. Fan, K. M. Dorney, A. Becker, A. Jaroń-Becker, H. C. Kapteyn, M. M. Murnane, and C. G. Durfee, “Non-collinear generation of angularly isolated circularly polarized high harmonics,” Nat. Photonics 9, 743–750 (2015).
[Crossref]

P.-C. Huang, C. Hernández-García, J.-T. Huang, P.-Y. Huang, C.-H. Lu, L. Rego, D. D. Hickstein, J. L. Ellis, A. Jaron-Becker, A. Becker, S.-D. Yang, C. G. Durfee, L. Plaja, H. C. Kapteyn, M. M. Murnane, A. H. Kung, and M.-C. Chen, “Polarization control of isolated high-harmonic pulses,” Nat. Photonics 12, 349–354 (2018).
[Crossref]

A. Ferré, C. Handschin, M. Dumergue, F. Burgy, A. Comby, D. Descamps, B. Fabre, G. A. Garcia, R. Géneaux, L. Merceron, E. Mével, L. Nahon, S. Petit, B. Pons, D. Staedter, S. Weber, T. Ruchon, V. Blanchet, and Y. Mairesse, “A table-top ultrashort light source in the extreme ultraviolet for circular dichroism experiments,” Nat. Photonics 9, 93–98 (2015).
[Crossref]

Nat. Phys. (1)

Y. Morimoto and P. Baum, “Diffraction and microscopy with attosecond electron pulse trains,” Nat. Phys. 14, 252–256 (2018).
[Crossref]

Nat. Prod. Rep. (1)

A. Mándi and T. Kurtán, “Applications of OR/ECD/VCD to the structure elucidation of natural products,” Nat. Prod. Rep. 36, 889–918 (2019).
[Crossref]

Nat. Rev. Mater. (1)

G. Li, S. Zhang, and T. Zentgraf, “Nonlinear photonic metasufraces,” Nat. Rev. Mater. 2, 17010 (2017).
[Crossref]

Nat. Rev. Phys. (1)

B. Lv, T. Qian, and H. Ding, “Angle-resolved photoemission spectroscopy and its application to topological materials,” Nat. Rev. Phys. 1, 609–626 (2019).
[Crossref]

Nature (1)

T. T. Luu, M. Garg, S. Y. Kruchinin, A. Moulet, M. Hassan, and E. Goulielmakis, “Extreme ultraviolet high-harmonic spectroscopy of solids,” Nature 521, 498–502 (2015).
[Crossref]

New J. Phys. (1)

C.-T. Chiang, M. Huth, A. Trützschler, M. Kiel, F. Schumann, J. Kirschner, and W. Widdra, “Boosting laboratory photoelectron spectroscopy by megahertz high order harmonics,” New J. Phys. 17, 013035 (2015).
[Crossref]

Optica (2)

Phys. Rev. (1)

H. J. Simon and N. Bloembergen, “Second-harmonic light generation in crystals with natural optical activity,” Phys. Rev. 171, 1104–1114 (1968).
[Crossref]

Phys. Rev. Appl. (1)

K.-C. Shen, Y.-T. Huang, T. L. Chung, M. L. Tseng, W.-Y. Tsai, G. Sun, and D. P. Tsai, “Giant efficiency of visible second-harmonic light by an all-dielectric multiple-quantum-well metasurface,” Phys. Rev. Appl. 12, 064056 (2019).
[Crossref]

Phys. Rev. B (1)

S. G. Tikhodeev, A. L. Yablonskii, E. A. Muljarov, N. A. Gippius, and T. Ishihara, “Quasiguided modes and optical properties of photonic crystal slabs,” Phys. Rev. B 66, 045102 (2002).
[Crossref]

Phys. Rev. Lett. (3)

K. Konishi, T. Higuchi, J. Li, J. Larsson, S. Ishii, and M. Kuwata-Gonokami, “Polarization-controlled circular second-harmonic generation from metal hole arrays with threefold rotational symmetry,” Phys. Rev. Lett. 112, 135502 (2014).
[Crossref]

S. Chen, G. Li, F. Zeuner, W. H. Wong, E. Y. B. Pun, T. Zentgraf, K. W. Cheah, and S. Zhang, “Symmetry-selective third-harmonic generation from plasmonic metacrystals,” Phys. Rev. Lett. 113, 033901 (2014).
[Crossref]

Y. H. Wang, D. Hsieh, D. Pilon, L. Fu, D. R. Gardner, Y. S. Lee, and N. Gedik, “Observation of a warped helical spin texture in Bi2Se3 from circular dichroism angle-resolved photoemission spectroscopy,” Phys. Rev. Lett. 107, 207602 (2011).
[Crossref]

Rev. Mod. Phys. (1)

A. Damascelli, Z. Hussain, and Z.-X. Shen, “Angle-resolved photoemission studies of the cuprate superconductors,” Rev. Mod. Phys. 75,473–541 (2003).
[Crossref]

Rev. Sci. Instrum. (3)

T. Kiss, T. Shimojima, K. Ishizaka, A. Chainani, T. Togashi, T. Kanai, X.-Y. Wang, C.-T. Chen, S. Watanabe, and S. Shin, “A versatile system for ultrahigh resolution, low temperature, and polarization dependent laser-angle-resolved photoemission spectroscopy,” Rev. Sci. Instrum. 79, 023106 (2008).
[Crossref]

Y. He, I. M. Vishik, M. Yi, S. Yang, Z. Liu, J. J. Lee, S. Chen, S. N. Rebec, D. Leuenberger, A. Zong, C. M. Jefferson, R. G. Moore, P. S. Kirchmann, A. J. Merriam, and Z.-X. Shen, “Invited article: High resolution angle resolved photoemission with tabletop 11 eV laser,” Rev. Sci. Instrum. 87, 011301 (2016).
[Crossref]

M. D. Neumann, C. Cobet, H. Kaser, M. Kolbe, A. Gottwald, M. Richter, and N. Esser, “A synchrotron-radiation-based variable angle ellipsometer for the visible to vacuum ultraviolet spectral range,” Rev. Sci. Instrum. 85, 055117 (2014).
[Crossref]

Struct. Dyn. (1)

F. Auvray, D. Dennetiere, A. Giuliani, F. Jamme, F. Wien, B. Nay, S. Zirah, F. Polack, C. Menneglier, B. Lagarde, J. D. Hirst, and M. Refregiers, “Time resolved transient circular dichroism spectroscopy using synchrotron natural polarization,” Struct. Dyn. 6, 054307 (2019).
[Crossref]

Other (4)

L. Barron, Molecular Light Scattering and Optical Activity, 2nd ed. (Cambridge University, 2004).

B. Nordén, A. Rodger, and T. Dafforn, Linear Dicrhoism and Circular Dichroism: A Textbook on Polarizaed-Light Spectroscopy (RSC Publishing, 2010).

A. Mizushima, R. R. Reddy, K. Konishi, T. Ezawa, E. Ota, A. Higo, M. Kuwata-Gonokami, and Y. Mita, “Assessment of annealing treatment for wrinckle-less SiO2 membrane,” 22nd Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP), Virtual Conference, June15–26, (2020).

P. Butcher and D. Cotter, The Elements of Nonlinear Optics (Cambridge University, 1990).

Supplementary Material (1)

NameDescription
» Supplement 1       expanded descriptions or methods

Cited By

OSA participates in Crossref's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Figures (4)

Fig. 1.
Fig. 1. PCN and transmission spectra. (a) Scheme of the circularly polarized VUV THG using a PCN; (b) scheme of the $\gamma \text{-} {\text{Al}_2}{\text{O}_3}$ PCN; (c) optical microscope image of the PCN (length of scale bar = 100 µm); (d) scanning electron microscope image of the 600-nm period PCN (length of scale bar = 1 µm); (e) transmission spectra of the PCNs with 600 (red) and 500 nm (blue, shifted by ${-}{0.1}$ for clarity) periods. The transmittance spectrum of the unstructured nanomembrane is also shown (black). The orange dotted line indicates a wavelength of 470 nm. (f) Comparison between experimental (red) and calculated (blue) transmission spectra of the 600-nm period PCN; (g) simulated electric field intensity distribution inside the PCNs with 600 nm (left) and 500 nm (right) periods excited at a wavelength of 470 nm at normal incidence.
Fig. 2.
Fig. 2. Polarization dependence of VUV THG from PCNs. Excitation polarization dependence of the THG spectra from (a) unstructured nanomembrane, (b) 500-nm period PCN, and (c) 600-nm period PCN: RCP (blue) and LCP (red) excitation; linearly polarized excitation (black). Circularly polarized components of VUV THG from the PCN excited by (d) RCP and (e) LCP beams. Orange (green) is the LCP (RCP) component of THG.
Fig. 3.
Fig. 3. Numerical simulation of VUV THG from the 600-nm period (PCN). (a)–(b) Electric field intensity distribution of the fundamental beam in the PCN; (c)–(d) local ellipticity distribution of the fundamental beam in the PCN. Contours correspond to ${-}{0.6}$ (black) and ${+}{0.6}$ (blue) rad. (e)–(f) Third-order nonlinear polarization intensity distribution in the PCN. (a), (c), and (e) are excited at 484 nm (620 THz), and (b), (d), and (f) are excited at 500 nm (600 THz). Because there is no medium in the hole of the photonic crystal, the magnitude of the third-order nonlinear polarization is set to zero there. (g) Calculated transmittance, THG intensity, and ellipticity angle; (h) dependence of the calculated THG intensity and ellipticity angle spectra on the anisotropy of the periodicity of holes in the PCN; (i) calculated spectra of LCP and RCP components of the THG when the period in the horizontal direction is 610 nm and the fundamental frequency is 617 THz (486 nm). The values of the linewidth were set to those obtained from the experimental results in Fig. 2(e).
Fig. 4.
Fig. 4. Dependence of the VUV THG intensity on the excitation power. The PCN (red) and the unstructured nanomembrane (blue) are excited by a 470 nm linearly polarized fundamental beam. The solid line indicates cubic dependency.

Equations (3)

Equations on this page are rendered with MathJax. Learn more.

E ± ( 3 ω ) = α [ E ± ( ω ) ] 2 E ( ω ) + β [ E ( ω ) ] 3 ,
P ( r , 3 ω ) = A ( E ( r , ω ) E ( r , ω ) ) E ( r , ω ) ,
| P ( r , 3 ω ) | = A 2 | E ( r , ω ) | 3 cos 2 2 η ( r , ω ) ,