Abstract

X-ray full-field microscopy is a promising method for nondestructive observation of opaque materials because it can attain a high resolution and wide field of view without sample scanning. We recently developed hard x-ray objective optics, which are key devices for full-field microscopy, based on total-reflection mirrors with high throughput and achromatic properties. The objective optics consist of two types of advanced Kirkpatrick–Baez mirrors configured as crossed one-dimensional Wolter type I and type III optics. The designed optics possessed magnification factors of 42–45 with a compact camera length of approximately 2 m. The hard x-ray full-field microscope based on this system was tested at the BL29XU beamline at SPring-8. We were able to resolve 100-nm periods (50-nm line widths) of a resolution test chart at a photon energy of 15 keV over 30 h, which demonstrated the remarkable stability of this system. The image quality was preserved over a wide photon energy range from 9 to 15 keV. A periodic dot pattern with dot diameters of 300 nm, formed on a 775-µm-thick Si substrate, was three-dimensionally visualized by computed tomography.

© 2020 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

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2020 (1)

2019 (4)

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2017 (2)

J. Yamada, S. Matsuyama, Y. Sano, and K. Yamauchi, Appl. Opt. 56, 967 (2017).
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S. Matsuyama, S. Yasuda, J. Yamada, H. Okada, Y. Kohmura, M. Yabashi, T. Ishikawa, and K. Yamauchi, Sci. Rep. 7, 46358 (2017).
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2016 (2)

K. Kumagai and A. Kurokawa, Microsc. Microanal. 22, 448 (2016).
[Crossref]

H. Ohashi, Y. Senba, H. Yumoto, T. Koyama, T. Miura, and H. Kishimoto, AIP Conf. Proc. 1741, 040023 (2016).
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2012 (1)

2011 (2)

F. Meirer, J. Cabana, Y. Liu, A. Mehta, J. C. Andrews, and P. Pianetta, J. Synchrotron Rad. 18, 773 (2011).
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K. Yamauchi, H. Mimura, T. Kimura, H. Yumoto, S. Handa, S. Matsuyama, K. Arima, Y. Sano, K. Yamamura, K. Inagaki, H. Nakamori, J. Kim, K. Tamasaku, Y. Nishino, M. Yabashi, and T. Ishikawa, J. Phys. Condens. Matter 23, 394206 (2011).
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2010 (2)

A. Skdinawat and D. Attwood, Nat. Photonics 4, 840 (2010).
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H. N. Chapman and K. A. Nugent, Nat. Photonics 4, 833 (2010).
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2007 (1)

M. Hoshino, T. Ishino, T. Namiki, N. Yamada, N. Watanabe, and S. Aoki, Rev. Sci. Instrum. 78, 073706 (2007).
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2005 (1)

H. Mimura, H. Yumoto, S. Matsuyama, K. Yamamura, Y. Sano, K. Ueno, K. Endo, Y. Mori, M. Yabashi, K. Tamasaku, Y. Nishino, T. Ishikawa, and K. Yamauchi, Rev. Sci. Instrum. 76, 045102 (2005).
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2003 (1)

K. Yamauchi, K. Yamamura, H. Mimura, Y. Sano, A. Saito, K. Ueno, K. Endo, A. Souvorov, M. Yabashi, K. Tamasaku, T. Ishikawa, and Y. Mori, Rev. Sci. Instrum. 74, 2894 (2003).
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2002 (1)

K. Yamauchi, H. Mimura, K. Inagaki, and Y. Mori, Rev. Sci. Instrum. 73, 4028 (2002).
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1997 (1)

R. Sauneuf, J. M. Dalmasso, T. Jalinaud, J. P. LeBreton, D. Schirmann, J. P. Marioge, F. Bridou, G. Tissot, and J. Y. Clotaire, Rev. Sci. Instrum. 68, 3412 (1997).
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1996 (1)

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1995 (1)

1954 (1)

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1952 (1)

H. Wolter, Ann. Phys. 445, 94 (1952).

1950 (1)

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A. Barannikov, M. Polikarpov, P. Ershov, V. Bessonov, K. Abrashitova, I. Snigireva, V. Yunkin, G. Bourenkov, T. Schneider, A. A. Fedyanin, and A. Snigirev, J. Synchrotron Radiat. 26, 714 (2019).
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K. Yamauchi, H. Mimura, T. Kimura, H. Yumoto, S. Handa, S. Matsuyama, K. Arima, Y. Sano, K. Yamamura, K. Inagaki, H. Nakamori, J. Kim, K. Tamasaku, Y. Nishino, M. Yabashi, and T. Ishikawa, J. Phys. Condens. Matter 23, 394206 (2011).
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Artioukov, I. A.

Asadchikov, V. E.

Attwood, D.

A. Skdinawat and D. Attwood, Nat. Photonics 4, 840 (2010).
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Barannikov, A.

A. Barannikov, M. Polikarpov, P. Ershov, V. Bessonov, K. Abrashitova, I. Snigireva, V. Yunkin, G. Bourenkov, T. Schneider, A. A. Fedyanin, and A. Snigirev, J. Synchrotron Radiat. 26, 714 (2019).
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A. Barannikov, M. Polikarpov, P. Ershov, V. Bessonov, K. Abrashitova, I. Snigireva, V. Yunkin, G. Bourenkov, T. Schneider, A. A. Fedyanin, and A. Snigirev, J. Synchrotron Radiat. 26, 714 (2019).
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Bridou, F.

R. Sauneuf, J. M. Dalmasso, T. Jalinaud, J. P. LeBreton, D. Schirmann, J. P. Marioge, F. Bridou, G. Tissot, and J. Y. Clotaire, Rev. Sci. Instrum. 68, 3412 (1997).
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Cabana, J.

F. Meirer, J. Cabana, Y. Liu, A. Mehta, J. C. Andrews, and P. Pianetta, J. Synchrotron Rad. 18, 773 (2011).
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H. N. Chapman and K. A. Nugent, Nat. Photonics 4, 833 (2010).
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R. Sauneuf, J. M. Dalmasso, T. Jalinaud, J. P. LeBreton, D. Schirmann, J. P. Marioge, F. Bridou, G. Tissot, and J. Y. Clotaire, Rev. Sci. Instrum. 68, 3412 (1997).
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Dalmasso, J. M.

R. Sauneuf, J. M. Dalmasso, T. Jalinaud, J. P. LeBreton, D. Schirmann, J. P. Marioge, F. Bridou, G. Tissot, and J. Y. Clotaire, Rev. Sci. Instrum. 68, 3412 (1997).
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Egawa, S.

Endo, K.

H. Mimura, H. Yumoto, S. Matsuyama, K. Yamamura, Y. Sano, K. Ueno, K. Endo, Y. Mori, M. Yabashi, K. Tamasaku, Y. Nishino, T. Ishikawa, and K. Yamauchi, Rev. Sci. Instrum. 76, 045102 (2005).
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Ershov, P.

A. Barannikov, M. Polikarpov, P. Ershov, V. Bessonov, K. Abrashitova, I. Snigireva, V. Yunkin, G. Bourenkov, T. Schneider, A. A. Fedyanin, and A. Snigirev, J. Synchrotron Radiat. 26, 714 (2019).
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Fischer, P.

Handa, S.

K. Yamauchi, H. Mimura, T. Kimura, H. Yumoto, S. Handa, S. Matsuyama, K. Arima, Y. Sano, K. Yamamura, K. Inagaki, H. Nakamori, J. Kim, K. Tamasaku, Y. Nishino, M. Yabashi, and T. Ishikawa, J. Phys. Condens. Matter 23, 394206 (2011).
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Hata, K.

S. Matsuyama, J. Yamada, K. Hata, Y. Kohmura, M. Yabashi, T. Ishikawa, and K. Yamauchi, Microsc. Microanal. 24, 284 (2018).
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Hopkins, H. H.

H. H. Hopkins and P. M. Barham, Proc. Phys. Soc. B 63, 737 (1950).
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Horvath, M.

J. Salplachta, T. Zikmund, M. Horvath, Y. Takeda, K. Omote, L. Pina, and J. Kaiser, in 9th Conference on Industrial Computed Tomography (iCT) (2019).

Hoshino, M.

M. Hoshino, T. Ishino, T. Namiki, N. Yamada, N. Watanabe, and S. Aoki, Rev. Sci. Instrum. 78, 073706 (2007).
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Ikeda, N.

R. Kodama, Y. Katori, T. Iwai, N. Ikeda, Y. Kato, and K. Takeshi, Opt. Lett. 21, 132 (1996).
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Inagaki, K.

K. Yamauchi, H. Mimura, T. Kimura, H. Yumoto, S. Handa, S. Matsuyama, K. Arima, Y. Sano, K. Yamamura, K. Inagaki, H. Nakamori, J. Kim, K. Tamasaku, Y. Nishino, M. Yabashi, and T. Ishikawa, J. Phys. Condens. Matter 23, 394206 (2011).
[Crossref]

K. Yamauchi, H. Mimura, K. Inagaki, and Y. Mori, Rev. Sci. Instrum. 73, 4028 (2002).
[Crossref]

Ishikawa, T.

S. Matsuyama, J. Yamada, Y. Kohmura, M. Yabashi, T. Ishikawa, and K. Yamauchi, Opt. Express 27, 18318 (2019).
[Crossref]

J. Yamada, S. Matsuyama, Y. Sano, Y. Kohmura, M. Yabashi, T. Ishikawa, and K. Yamauchi, Opt. Express 27, 3429 (2019).
[Crossref]

S. Matsuyama, J. Yamada, K. Hata, Y. Kohmura, M. Yabashi, T. Ishikawa, and K. Yamauchi, Microsc. Microanal. 24, 284 (2018).
[Crossref]

S. Matsuyama, S. Yasuda, J. Yamada, H. Okada, Y. Kohmura, M. Yabashi, T. Ishikawa, and K. Yamauchi, Sci. Rep. 7, 46358 (2017).
[Crossref]

K. Yamauchi, H. Mimura, T. Kimura, H. Yumoto, S. Handa, S. Matsuyama, K. Arima, Y. Sano, K. Yamamura, K. Inagaki, H. Nakamori, J. Kim, K. Tamasaku, Y. Nishino, M. Yabashi, and T. Ishikawa, J. Phys. Condens. Matter 23, 394206 (2011).
[Crossref]

H. Mimura, H. Yumoto, S. Matsuyama, K. Yamamura, Y. Sano, K. Ueno, K. Endo, Y. Mori, M. Yabashi, K. Tamasaku, Y. Nishino, T. Ishikawa, and K. Yamauchi, Rev. Sci. Instrum. 76, 045102 (2005).
[Crossref]

K. Yamauchi, K. Yamamura, H. Mimura, Y. Sano, A. Saito, K. Ueno, K. Endo, A. Souvorov, M. Yabashi, K. Tamasaku, T. Ishikawa, and Y. Mori, Rev. Sci. Instrum. 74, 2894 (2003).
[Crossref]

Ishino, T.

M. Hoshino, T. Ishino, T. Namiki, N. Yamada, N. Watanabe, and S. Aoki, Rev. Sci. Instrum. 78, 073706 (2007).
[Crossref]

Iwai, T.

R. Kodama, Y. Katori, T. Iwai, N. Ikeda, Y. Kato, and K. Takeshi, Opt. Lett. 21, 132 (1996).
[Crossref]

Iwasaki, A.

Jalinaud, T.

R. Sauneuf, J. M. Dalmasso, T. Jalinaud, J. P. LeBreton, D. Schirmann, J. P. Marioge, F. Bridou, G. Tissot, and J. Y. Clotaire, Rev. Sci. Instrum. 68, 3412 (1997).
[Crossref]

Kaiser, J.

J. Salplachta, T. Zikmund, M. Horvath, Y. Takeda, K. Omote, L. Pina, and J. Kaiser, in 9th Conference on Industrial Computed Tomography (iCT) (2019).

Kas’yanov, Y. S.

Kato, Y.

R. Kodama, Y. Katori, T. Iwai, N. Ikeda, Y. Kato, and K. Takeshi, Opt. Lett. 21, 132 (1996).
[Crossref]

Katori, Y.

R. Kodama, Y. Katori, T. Iwai, N. Ikeda, Y. Kato, and K. Takeshi, Opt. Lett. 21, 132 (1996).
[Crossref]

Kim, J.

K. Yamauchi, H. Mimura, T. Kimura, H. Yumoto, S. Handa, S. Matsuyama, K. Arima, Y. Sano, K. Yamamura, K. Inagaki, H. Nakamori, J. Kim, K. Tamasaku, Y. Nishino, M. Yabashi, and T. Ishikawa, J. Phys. Condens. Matter 23, 394206 (2011).
[Crossref]

Kimura, T.

K. Yamauchi, H. Mimura, T. Kimura, H. Yumoto, S. Handa, S. Matsuyama, K. Arima, Y. Sano, K. Yamamura, K. Inagaki, H. Nakamori, J. Kim, K. Tamasaku, Y. Nishino, M. Yabashi, and T. Ishikawa, J. Phys. Condens. Matter 23, 394206 (2011).
[Crossref]

Kishimoto, H.

H. Ohashi, Y. Senba, H. Yumoto, T. Koyama, T. Miura, and H. Kishimoto, AIP Conf. Proc. 1741, 040023 (2016).
[Crossref]

Kodama, R.

R. Kodama, Y. Katori, T. Iwai, N. Ikeda, Y. Kato, and K. Takeshi, Opt. Lett. 21, 132 (1996).
[Crossref]

Kohmura, Y.

J. Yamada, S. Matsuyama, Y. Sano, Y. Kohmura, M. Yabashi, T. Ishikawa, and K. Yamauchi, Opt. Express 27, 3429 (2019).
[Crossref]

S. Matsuyama, J. Yamada, Y. Kohmura, M. Yabashi, T. Ishikawa, and K. Yamauchi, Opt. Express 27, 18318 (2019).
[Crossref]

S. Matsuyama, J. Yamada, K. Hata, Y. Kohmura, M. Yabashi, T. Ishikawa, and K. Yamauchi, Microsc. Microanal. 24, 284 (2018).
[Crossref]

S. Matsuyama, S. Yasuda, J. Yamada, H. Okada, Y. Kohmura, M. Yabashi, T. Ishikawa, and K. Yamauchi, Sci. Rep. 7, 46358 (2017).
[Crossref]

Kondratenko, V. V.

Koyama, T.

H. Ohashi, Y. Senba, H. Yumoto, T. Koyama, T. Miura, and H. Kishimoto, AIP Conf. Proc. 1741, 040023 (2016).
[Crossref]

Kumagai, K.

K. Kumagai and A. Kurokawa, Microsc. Microanal. 22, 448 (2016).
[Crossref]

Kume, T.

Kurokawa, A.

K. Kumagai and A. Kurokawa, Microsc. Microanal. 22, 448 (2016).
[Crossref]

LeBreton, J. P.

R. Sauneuf, J. M. Dalmasso, T. Jalinaud, J. P. LeBreton, D. Schirmann, J. P. Marioge, F. Bridou, G. Tissot, and J. Y. Clotaire, Rev. Sci. Instrum. 68, 3412 (1997).
[Crossref]

Liu, Y.

F. Meirer, J. Cabana, Y. Liu, A. Mehta, J. C. Andrews, and P. Pianetta, J. Synchrotron Rad. 18, 773 (2011).
[Crossref]

Marioge, J. P.

R. Sauneuf, J. M. Dalmasso, T. Jalinaud, J. P. LeBreton, D. Schirmann, J. P. Marioge, F. Bridou, G. Tissot, and J. Y. Clotaire, Rev. Sci. Instrum. 68, 3412 (1997).
[Crossref]

Mathiesen, R.

Matsuyama, S.

J. Yamada, S. Matsuyama, Y. Sano, Y. Kohmura, M. Yabashi, T. Ishikawa, and K. Yamauchi, Opt. Express 27, 3429 (2019).
[Crossref]

S. Matsuyama, J. Yamada, Y. Kohmura, M. Yabashi, T. Ishikawa, and K. Yamauchi, Opt. Express 27, 18318 (2019).
[Crossref]

S. Matsuyama, J. Yamada, K. Hata, Y. Kohmura, M. Yabashi, T. Ishikawa, and K. Yamauchi, Microsc. Microanal. 24, 284 (2018).
[Crossref]

J. Yamada, S. Matsuyama, Y. Sano, and K. Yamauchi, Appl. Opt. 56, 967 (2017).
[Crossref]

S. Matsuyama, S. Yasuda, J. Yamada, H. Okada, Y. Kohmura, M. Yabashi, T. Ishikawa, and K. Yamauchi, Sci. Rep. 7, 46358 (2017).
[Crossref]

K. Yamauchi, H. Mimura, T. Kimura, H. Yumoto, S. Handa, S. Matsuyama, K. Arima, Y. Sano, K. Yamamura, K. Inagaki, H. Nakamori, J. Kim, K. Tamasaku, Y. Nishino, M. Yabashi, and T. Ishikawa, J. Phys. Condens. Matter 23, 394206 (2011).
[Crossref]

H. Mimura, H. Yumoto, S. Matsuyama, K. Yamamura, Y. Sano, K. Ueno, K. Endo, Y. Mori, M. Yabashi, K. Tamasaku, Y. Nishino, T. Ishikawa, and K. Yamauchi, Rev. Sci. Instrum. 76, 045102 (2005).
[Crossref]

Mehta, A.

F. Meirer, J. Cabana, Y. Liu, A. Mehta, J. C. Andrews, and P. Pianetta, J. Synchrotron Rad. 18, 773 (2011).
[Crossref]

Meirer, F.

F. Meirer, J. Cabana, Y. Liu, A. Mehta, J. C. Andrews, and P. Pianetta, J. Synchrotron Rad. 18, 773 (2011).
[Crossref]

Mimura, H.

S. Egawa, H. Motoyama, A. Iwasaki, G. Yamaguchi, T. Kume, K. Yamanouchi, and H. Mimura, Opt. Lett. 45, 515 (2020).
[Crossref]

K. Yamauchi, H. Mimura, T. Kimura, H. Yumoto, S. Handa, S. Matsuyama, K. Arima, Y. Sano, K. Yamamura, K. Inagaki, H. Nakamori, J. Kim, K. Tamasaku, Y. Nishino, M. Yabashi, and T. Ishikawa, J. Phys. Condens. Matter 23, 394206 (2011).
[Crossref]

H. Mimura, H. Yumoto, S. Matsuyama, K. Yamamura, Y. Sano, K. Ueno, K. Endo, Y. Mori, M. Yabashi, K. Tamasaku, Y. Nishino, T. Ishikawa, and K. Yamauchi, Rev. Sci. Instrum. 76, 045102 (2005).
[Crossref]

K. Yamauchi, K. Yamamura, H. Mimura, Y. Sano, A. Saito, K. Ueno, K. Endo, A. Souvorov, M. Yabashi, K. Tamasaku, T. Ishikawa, and Y. Mori, Rev. Sci. Instrum. 74, 2894 (2003).
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K. Yamauchi, H. Mimura, K. Inagaki, and Y. Mori, Rev. Sci. Instrum. 73, 4028 (2002).
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H. Ohashi, Y. Senba, H. Yumoto, T. Koyama, T. Miura, and H. Kishimoto, AIP Conf. Proc. 1741, 040023 (2016).
[Crossref]

Mori, Y.

H. Mimura, H. Yumoto, S. Matsuyama, K. Yamamura, Y. Sano, K. Ueno, K. Endo, Y. Mori, M. Yabashi, K. Tamasaku, Y. Nishino, T. Ishikawa, and K. Yamauchi, Rev. Sci. Instrum. 76, 045102 (2005).
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K. Yamauchi, K. Yamamura, H. Mimura, Y. Sano, A. Saito, K. Ueno, K. Endo, A. Souvorov, M. Yabashi, K. Tamasaku, T. Ishikawa, and Y. Mori, Rev. Sci. Instrum. 74, 2894 (2003).
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K. Yamauchi, H. Mimura, K. Inagaki, and Y. Mori, Rev. Sci. Instrum. 73, 4028 (2002).
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Nakamori, H.

K. Yamauchi, H. Mimura, T. Kimura, H. Yumoto, S. Handa, S. Matsuyama, K. Arima, Y. Sano, K. Yamamura, K. Inagaki, H. Nakamori, J. Kim, K. Tamasaku, Y. Nishino, M. Yabashi, and T. Ishikawa, J. Phys. Condens. Matter 23, 394206 (2011).
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M. Hoshino, T. Ishino, T. Namiki, N. Yamada, N. Watanabe, and S. Aoki, Rev. Sci. Instrum. 78, 073706 (2007).
[Crossref]

Naulleau, P.

Nishino, Y.

K. Yamauchi, H. Mimura, T. Kimura, H. Yumoto, S. Handa, S. Matsuyama, K. Arima, Y. Sano, K. Yamamura, K. Inagaki, H. Nakamori, J. Kim, K. Tamasaku, Y. Nishino, M. Yabashi, and T. Ishikawa, J. Phys. Condens. Matter 23, 394206 (2011).
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H. Mimura, H. Yumoto, S. Matsuyama, K. Yamamura, Y. Sano, K. Ueno, K. Endo, Y. Mori, M. Yabashi, K. Tamasaku, Y. Nishino, T. Ishikawa, and K. Yamauchi, Rev. Sci. Instrum. 76, 045102 (2005).
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H. N. Chapman and K. A. Nugent, Nat. Photonics 4, 833 (2010).
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H. Ohashi, Y. Senba, H. Yumoto, T. Koyama, T. Miura, and H. Kishimoto, AIP Conf. Proc. 1741, 040023 (2016).
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S. Matsuyama, S. Yasuda, J. Yamada, H. Okada, Y. Kohmura, M. Yabashi, T. Ishikawa, and K. Yamauchi, Sci. Rep. 7, 46358 (2017).
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J. Salplachta, T. Zikmund, M. Horvath, Y. Takeda, K. Omote, L. Pina, and J. Kaiser, in 9th Conference on Industrial Computed Tomography (iCT) (2019).

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L. G. Paratt, Phys. Rev. 95, 359 (1954).
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F. Meirer, J. Cabana, Y. Liu, A. Mehta, J. C. Andrews, and P. Pianetta, J. Synchrotron Rad. 18, 773 (2011).
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J. Salplachta, T. Zikmund, M. Horvath, Y. Takeda, K. Omote, L. Pina, and J. Kaiser, in 9th Conference on Industrial Computed Tomography (iCT) (2019).

Polikarpov, M.

A. Barannikov, M. Polikarpov, P. Ershov, V. Bessonov, K. Abrashitova, I. Snigireva, V. Yunkin, G. Bourenkov, T. Schneider, A. A. Fedyanin, and A. Snigirev, J. Synchrotron Radiat. 26, 714 (2019).
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Rekawa, S.

Saito, A.

K. Yamauchi, K. Yamamura, H. Mimura, Y. Sano, A. Saito, K. Ueno, K. Endo, A. Souvorov, M. Yabashi, K. Tamasaku, T. Ishikawa, and Y. Mori, Rev. Sci. Instrum. 74, 2894 (2003).
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J. Salplachta, T. Zikmund, M. Horvath, Y. Takeda, K. Omote, L. Pina, and J. Kaiser, in 9th Conference on Industrial Computed Tomography (iCT) (2019).

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J. Yamada, S. Matsuyama, Y. Sano, Y. Kohmura, M. Yabashi, T. Ishikawa, and K. Yamauchi, Opt. Express 27, 3429 (2019).
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J. Yamada, S. Matsuyama, Y. Sano, and K. Yamauchi, Appl. Opt. 56, 967 (2017).
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K. Yamauchi, H. Mimura, T. Kimura, H. Yumoto, S. Handa, S. Matsuyama, K. Arima, Y. Sano, K. Yamamura, K. Inagaki, H. Nakamori, J. Kim, K. Tamasaku, Y. Nishino, M. Yabashi, and T. Ishikawa, J. Phys. Condens. Matter 23, 394206 (2011).
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H. Mimura, H. Yumoto, S. Matsuyama, K. Yamamura, Y. Sano, K. Ueno, K. Endo, Y. Mori, M. Yabashi, K. Tamasaku, Y. Nishino, T. Ishikawa, and K. Yamauchi, Rev. Sci. Instrum. 76, 045102 (2005).
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K. Yamauchi, K. Yamamura, H. Mimura, Y. Sano, A. Saito, K. Ueno, K. Endo, A. Souvorov, M. Yabashi, K. Tamasaku, T. Ishikawa, and Y. Mori, Rev. Sci. Instrum. 74, 2894 (2003).
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R. Sauneuf, J. M. Dalmasso, T. Jalinaud, J. P. LeBreton, D. Schirmann, J. P. Marioge, F. Bridou, G. Tissot, and J. Y. Clotaire, Rev. Sci. Instrum. 68, 3412 (1997).
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R. Sauneuf, J. M. Dalmasso, T. Jalinaud, J. P. LeBreton, D. Schirmann, J. P. Marioge, F. Bridou, G. Tissot, and J. Y. Clotaire, Rev. Sci. Instrum. 68, 3412 (1997).
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Schneider, T.

A. Barannikov, M. Polikarpov, P. Ershov, V. Bessonov, K. Abrashitova, I. Snigireva, V. Yunkin, G. Bourenkov, T. Schneider, A. A. Fedyanin, and A. Snigirev, J. Synchrotron Radiat. 26, 714 (2019).
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H. Ohashi, Y. Senba, H. Yumoto, T. Koyama, T. Miura, and H. Kishimoto, AIP Conf. Proc. 1741, 040023 (2016).
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Serov, R. V.

Skdinawat, A.

A. Skdinawat and D. Attwood, Nat. Photonics 4, 840 (2010).
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A. Barannikov, M. Polikarpov, P. Ershov, V. Bessonov, K. Abrashitova, I. Snigireva, V. Yunkin, G. Bourenkov, T. Schneider, A. A. Fedyanin, and A. Snigirev, J. Synchrotron Radiat. 26, 714 (2019).
[Crossref]

Snigireva, I.

A. Barannikov, M. Polikarpov, P. Ershov, V. Bessonov, K. Abrashitova, I. Snigireva, V. Yunkin, G. Bourenkov, T. Schneider, A. A. Fedyanin, and A. Snigirev, J. Synchrotron Radiat. 26, 714 (2019).
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Souvorov, A.

K. Yamauchi, K. Yamamura, H. Mimura, Y. Sano, A. Saito, K. Ueno, K. Endo, A. Souvorov, M. Yabashi, K. Tamasaku, T. Ishikawa, and Y. Mori, Rev. Sci. Instrum. 74, 2894 (2003).
[Crossref]

Takeda, Y.

J. Salplachta, T. Zikmund, M. Horvath, Y. Takeda, K. Omote, L. Pina, and J. Kaiser, in 9th Conference on Industrial Computed Tomography (iCT) (2019).

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K. Yamauchi, H. Mimura, T. Kimura, H. Yumoto, S. Handa, S. Matsuyama, K. Arima, Y. Sano, K. Yamamura, K. Inagaki, H. Nakamori, J. Kim, K. Tamasaku, Y. Nishino, M. Yabashi, and T. Ishikawa, J. Phys. Condens. Matter 23, 394206 (2011).
[Crossref]

H. Mimura, H. Yumoto, S. Matsuyama, K. Yamamura, Y. Sano, K. Ueno, K. Endo, Y. Mori, M. Yabashi, K. Tamasaku, Y. Nishino, T. Ishikawa, and K. Yamauchi, Rev. Sci. Instrum. 76, 045102 (2005).
[Crossref]

K. Yamauchi, K. Yamamura, H. Mimura, Y. Sano, A. Saito, K. Ueno, K. Endo, A. Souvorov, M. Yabashi, K. Tamasaku, T. Ishikawa, and Y. Mori, Rev. Sci. Instrum. 74, 2894 (2003).
[Crossref]

Tissot, G.

R. Sauneuf, J. M. Dalmasso, T. Jalinaud, J. P. LeBreton, D. Schirmann, J. P. Marioge, F. Bridou, G. Tissot, and J. Y. Clotaire, Rev. Sci. Instrum. 68, 3412 (1997).
[Crossref]

Tyliszczak, T.

Ueno, K.

H. Mimura, H. Yumoto, S. Matsuyama, K. Yamamura, Y. Sano, K. Ueno, K. Endo, Y. Mori, M. Yabashi, K. Tamasaku, Y. Nishino, T. Ishikawa, and K. Yamauchi, Rev. Sci. Instrum. 76, 045102 (2005).
[Crossref]

K. Yamauchi, K. Yamamura, H. Mimura, Y. Sano, A. Saito, K. Ueno, K. Endo, A. Souvorov, M. Yabashi, K. Tamasaku, T. Ishikawa, and Y. Mori, Rev. Sci. Instrum. 74, 2894 (2003).
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Vinogradov, A. V.

Watanabe, N.

M. Hoshino, T. Ishino, T. Namiki, N. Yamada, N. Watanabe, and S. Aoki, Rev. Sci. Instrum. 78, 073706 (2007).
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Wolf, E.

M. Born and E. Wolf, Principles of Optics, 7th ed. (Cambridge University, 2001).

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H. Wolter, Ann. Phys. 445, 94 (1952).

Yabashi, M.

S. Matsuyama, J. Yamada, Y. Kohmura, M. Yabashi, T. Ishikawa, and K. Yamauchi, Opt. Express 27, 18318 (2019).
[Crossref]

J. Yamada, S. Matsuyama, Y. Sano, Y. Kohmura, M. Yabashi, T. Ishikawa, and K. Yamauchi, Opt. Express 27, 3429 (2019).
[Crossref]

S. Matsuyama, J. Yamada, K. Hata, Y. Kohmura, M. Yabashi, T. Ishikawa, and K. Yamauchi, Microsc. Microanal. 24, 284 (2018).
[Crossref]

S. Matsuyama, S. Yasuda, J. Yamada, H. Okada, Y. Kohmura, M. Yabashi, T. Ishikawa, and K. Yamauchi, Sci. Rep. 7, 46358 (2017).
[Crossref]

K. Yamauchi, H. Mimura, T. Kimura, H. Yumoto, S. Handa, S. Matsuyama, K. Arima, Y. Sano, K. Yamamura, K. Inagaki, H. Nakamori, J. Kim, K. Tamasaku, Y. Nishino, M. Yabashi, and T. Ishikawa, J. Phys. Condens. Matter 23, 394206 (2011).
[Crossref]

H. Mimura, H. Yumoto, S. Matsuyama, K. Yamamura, Y. Sano, K. Ueno, K. Endo, Y. Mori, M. Yabashi, K. Tamasaku, Y. Nishino, T. Ishikawa, and K. Yamauchi, Rev. Sci. Instrum. 76, 045102 (2005).
[Crossref]

K. Yamauchi, K. Yamamura, H. Mimura, Y. Sano, A. Saito, K. Ueno, K. Endo, A. Souvorov, M. Yabashi, K. Tamasaku, T. Ishikawa, and Y. Mori, Rev. Sci. Instrum. 74, 2894 (2003).
[Crossref]

Yamada, J.

S. Matsuyama, J. Yamada, Y. Kohmura, M. Yabashi, T. Ishikawa, and K. Yamauchi, Opt. Express 27, 18318 (2019).
[Crossref]

J. Yamada, S. Matsuyama, Y. Sano, Y. Kohmura, M. Yabashi, T. Ishikawa, and K. Yamauchi, Opt. Express 27, 3429 (2019).
[Crossref]

S. Matsuyama, J. Yamada, K. Hata, Y. Kohmura, M. Yabashi, T. Ishikawa, and K. Yamauchi, Microsc. Microanal. 24, 284 (2018).
[Crossref]

J. Yamada, S. Matsuyama, Y. Sano, and K. Yamauchi, Appl. Opt. 56, 967 (2017).
[Crossref]

S. Matsuyama, S. Yasuda, J. Yamada, H. Okada, Y. Kohmura, M. Yabashi, T. Ishikawa, and K. Yamauchi, Sci. Rep. 7, 46358 (2017).
[Crossref]

Yamada, N.

M. Hoshino, T. Ishino, T. Namiki, N. Yamada, N. Watanabe, and S. Aoki, Rev. Sci. Instrum. 78, 073706 (2007).
[Crossref]

Yamaguchi, G.

Yamamura, K.

K. Yamauchi, H. Mimura, T. Kimura, H. Yumoto, S. Handa, S. Matsuyama, K. Arima, Y. Sano, K. Yamamura, K. Inagaki, H. Nakamori, J. Kim, K. Tamasaku, Y. Nishino, M. Yabashi, and T. Ishikawa, J. Phys. Condens. Matter 23, 394206 (2011).
[Crossref]

H. Mimura, H. Yumoto, S. Matsuyama, K. Yamamura, Y. Sano, K. Ueno, K. Endo, Y. Mori, M. Yabashi, K. Tamasaku, Y. Nishino, T. Ishikawa, and K. Yamauchi, Rev. Sci. Instrum. 76, 045102 (2005).
[Crossref]

K. Yamauchi, K. Yamamura, H. Mimura, Y. Sano, A. Saito, K. Ueno, K. Endo, A. Souvorov, M. Yabashi, K. Tamasaku, T. Ishikawa, and Y. Mori, Rev. Sci. Instrum. 74, 2894 (2003).
[Crossref]

Yamanouchi, K.

Yamauchi, K.

S. Matsuyama, J. Yamada, Y. Kohmura, M. Yabashi, T. Ishikawa, and K. Yamauchi, Opt. Express 27, 18318 (2019).
[Crossref]

J. Yamada, S. Matsuyama, Y. Sano, Y. Kohmura, M. Yabashi, T. Ishikawa, and K. Yamauchi, Opt. Express 27, 3429 (2019).
[Crossref]

S. Matsuyama, J. Yamada, K. Hata, Y. Kohmura, M. Yabashi, T. Ishikawa, and K. Yamauchi, Microsc. Microanal. 24, 284 (2018).
[Crossref]

J. Yamada, S. Matsuyama, Y. Sano, and K. Yamauchi, Appl. Opt. 56, 967 (2017).
[Crossref]

S. Matsuyama, S. Yasuda, J. Yamada, H. Okada, Y. Kohmura, M. Yabashi, T. Ishikawa, and K. Yamauchi, Sci. Rep. 7, 46358 (2017).
[Crossref]

K. Yamauchi, H. Mimura, T. Kimura, H. Yumoto, S. Handa, S. Matsuyama, K. Arima, Y. Sano, K. Yamamura, K. Inagaki, H. Nakamori, J. Kim, K. Tamasaku, Y. Nishino, M. Yabashi, and T. Ishikawa, J. Phys. Condens. Matter 23, 394206 (2011).
[Crossref]

H. Mimura, H. Yumoto, S. Matsuyama, K. Yamamura, Y. Sano, K. Ueno, K. Endo, Y. Mori, M. Yabashi, K. Tamasaku, Y. Nishino, T. Ishikawa, and K. Yamauchi, Rev. Sci. Instrum. 76, 045102 (2005).
[Crossref]

K. Yamauchi, K. Yamamura, H. Mimura, Y. Sano, A. Saito, K. Ueno, K. Endo, A. Souvorov, M. Yabashi, K. Tamasaku, T. Ishikawa, and Y. Mori, Rev. Sci. Instrum. 74, 2894 (2003).
[Crossref]

K. Yamauchi, H. Mimura, K. Inagaki, and Y. Mori, Rev. Sci. Instrum. 73, 4028 (2002).
[Crossref]

Yasuda, S.

S. Matsuyama, S. Yasuda, J. Yamada, H. Okada, Y. Kohmura, M. Yabashi, T. Ishikawa, and K. Yamauchi, Sci. Rep. 7, 46358 (2017).
[Crossref]

Yulin, S. A.

Yumoto, H.

H. Ohashi, Y. Senba, H. Yumoto, T. Koyama, T. Miura, and H. Kishimoto, AIP Conf. Proc. 1741, 040023 (2016).
[Crossref]

K. Yamauchi, H. Mimura, T. Kimura, H. Yumoto, S. Handa, S. Matsuyama, K. Arima, Y. Sano, K. Yamamura, K. Inagaki, H. Nakamori, J. Kim, K. Tamasaku, Y. Nishino, M. Yabashi, and T. Ishikawa, J. Phys. Condens. Matter 23, 394206 (2011).
[Crossref]

H. Mimura, H. Yumoto, S. Matsuyama, K. Yamamura, Y. Sano, K. Ueno, K. Endo, Y. Mori, M. Yabashi, K. Tamasaku, Y. Nishino, T. Ishikawa, and K. Yamauchi, Rev. Sci. Instrum. 76, 045102 (2005).
[Crossref]

Yunkin, V.

A. Barannikov, M. Polikarpov, P. Ershov, V. Bessonov, K. Abrashitova, I. Snigireva, V. Yunkin, G. Bourenkov, T. Schneider, A. A. Fedyanin, and A. Snigirev, J. Synchrotron Radiat. 26, 714 (2019).
[Crossref]

Zikmund, T.

J. Salplachta, T. Zikmund, M. Horvath, Y. Takeda, K. Omote, L. Pina, and J. Kaiser, in 9th Conference on Industrial Computed Tomography (iCT) (2019).

AIP Conf. Proc. (1)

H. Ohashi, Y. Senba, H. Yumoto, T. Koyama, T. Miura, and H. Kishimoto, AIP Conf. Proc. 1741, 040023 (2016).
[Crossref]

Ann. Phys. (1)

H. Wolter, Ann. Phys. 445, 94 (1952).

Appl. Opt. (1)

J. Phys. Condens. Matter (1)

K. Yamauchi, H. Mimura, T. Kimura, H. Yumoto, S. Handa, S. Matsuyama, K. Arima, Y. Sano, K. Yamamura, K. Inagaki, H. Nakamori, J. Kim, K. Tamasaku, Y. Nishino, M. Yabashi, and T. Ishikawa, J. Phys. Condens. Matter 23, 394206 (2011).
[Crossref]

J. Synchrotron Rad. (1)

F. Meirer, J. Cabana, Y. Liu, A. Mehta, J. C. Andrews, and P. Pianetta, J. Synchrotron Rad. 18, 773 (2011).
[Crossref]

J. Synchrotron Radiat. (1)

A. Barannikov, M. Polikarpov, P. Ershov, V. Bessonov, K. Abrashitova, I. Snigireva, V. Yunkin, G. Bourenkov, T. Schneider, A. A. Fedyanin, and A. Snigirev, J. Synchrotron Radiat. 26, 714 (2019).
[Crossref]

Microsc. Microanal. (2)

K. Kumagai and A. Kurokawa, Microsc. Microanal. 22, 448 (2016).
[Crossref]

S. Matsuyama, J. Yamada, K. Hata, Y. Kohmura, M. Yabashi, T. Ishikawa, and K. Yamauchi, Microsc. Microanal. 24, 284 (2018).
[Crossref]

Nat. Photonics (2)

A. Skdinawat and D. Attwood, Nat. Photonics 4, 840 (2010).
[Crossref]

H. N. Chapman and K. A. Nugent, Nat. Photonics 4, 833 (2010).
[Crossref]

Opt. Express (4)

Opt. Lett. (3)

Phys. Rev. (1)

L. G. Paratt, Phys. Rev. 95, 359 (1954).
[Crossref]

Proc. Phys. Soc. B (1)

H. H. Hopkins and P. M. Barham, Proc. Phys. Soc. B 63, 737 (1950).
[Crossref]

Rev. Sci. Instrum. (5)

R. Sauneuf, J. M. Dalmasso, T. Jalinaud, J. P. LeBreton, D. Schirmann, J. P. Marioge, F. Bridou, G. Tissot, and J. Y. Clotaire, Rev. Sci. Instrum. 68, 3412 (1997).
[Crossref]

M. Hoshino, T. Ishino, T. Namiki, N. Yamada, N. Watanabe, and S. Aoki, Rev. Sci. Instrum. 78, 073706 (2007).
[Crossref]

K. Yamauchi, H. Mimura, K. Inagaki, and Y. Mori, Rev. Sci. Instrum. 73, 4028 (2002).
[Crossref]

K. Yamauchi, K. Yamamura, H. Mimura, Y. Sano, A. Saito, K. Ueno, K. Endo, A. Souvorov, M. Yabashi, K. Tamasaku, T. Ishikawa, and Y. Mori, Rev. Sci. Instrum. 74, 2894 (2003).
[Crossref]

H. Mimura, H. Yumoto, S. Matsuyama, K. Yamamura, Y. Sano, K. Ueno, K. Endo, Y. Mori, M. Yabashi, K. Tamasaku, Y. Nishino, T. Ishikawa, and K. Yamauchi, Rev. Sci. Instrum. 76, 045102 (2005).
[Crossref]

Sci. Rep. (1)

S. Matsuyama, S. Yasuda, J. Yamada, H. Okada, Y. Kohmura, M. Yabashi, T. Ishikawa, and K. Yamauchi, Sci. Rep. 7, 46358 (2017).
[Crossref]

Other (2)

J. Salplachta, T. Zikmund, M. Horvath, Y. Takeda, K. Omote, L. Pina, and J. Kaiser, in 9th Conference on Industrial Computed Tomography (iCT) (2019).

M. Born and E. Wolf, Principles of Optics, 7th ed. (Cambridge University, 2001).

Supplementary Material (1)

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» Supplement 1       Supplemental document for providing additional information

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Figures (4)

Fig. 1.
Fig. 1. (a) Arrangement of the objective mirrors combining AKB-I and AKB-III optics. The “ell.” (“hyp.”) is an abbreviation of “ellipse” (“hyperbola”). (b) Cross sections of (a).
Fig. 2.
Fig. 2. (a) Photograph of the developed objective mirrors. (b) Schematic drawing of the experimental setup.
Fig. 3.
Fig. 3. (a) X-ray images of the Siemens star obtained after the first tuning of mirrors and after 33.5 h. The exposures were for 30 s with a 0.25-mm Si attenuator whose transmittance was 57% at 15 keV. The minimum line width denotes 50 nm. (b) Results of the PSA. The “Ratio (V)” [“Ratio (H)”] in the graph means ratio between the “Vertical” (“Horizontal”) and the “Empty (V)” [“Empty (H)”]. The black dashed line indicates ratio of 1.0. The red and blue dashed lines indicate vertical and horizontal cutoff frequencies, corresponding to full periods of 71 and 87 nm, respectively. (c) Photon energy dependence between 9 and 15 keV. The exposures are for 30 s using a 0.25-mm Si attenuator for all images. The expected resolutions for 15, 12, and 9 keV are 67.8, 84.7, and 113.0 nm, respectively. The bars denote 2 µm.
Fig. 4.
Fig. 4. (a) Images of dot patterns on a 775-µm Si substrate with rotation angles of 0° (left) and 59.85° (right) at an x-ray energy of 15 keV. The exposures are for 10 s. (b) In-plane sliced (left) and vertically sliced (right) images of the CT reconstruction. The bars denote 2 µm.

Tables (1)

Tables Icon

Table 1. Design Parameters for the Objective Mirror

Metrics