Abstract

We demonstrate a novel ${\rm III} {\text -} {\rm V}/{\rm Si}/{{\rm Si}_3}{{\rm N}_4}$ structure to enable efficient electrically pumped lasing in a fully integrated ${{\rm Si}_3}{{\rm N}_4}$ based external cavity for the first time. The laser shows superior temperature stability and low phase noise.

© 2020 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

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References

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  1. A. L. Gaeta, M. Lipson, and T. J. Kippenberg, Nat. Photonics 13, 158 (2019).
    [Crossref]
  2. D. J. Blumenthal, R. Heideman, D. Geuzebroek, A. Leinse, and C. Roeloffzen, Proc. IEEE 106, 2209 (2018).
    [Crossref]
  3. Y. Fan, R. M. Oldenbeuving, C. G. Roeloffzen, M. Hoekman, D. Geskus, R. G. Heideman, and K.-J. Boller, Conference on Lasers and Electro-Optics (OSA, 2017), p. JTh5C.9.
  4. B. Stern, X. Ji, A. Dutt, and M. Lipson, Opt. Lett. 42, 4541 (2017).
    [Crossref]
  5. C. Xiang, P. A. Morton, and J. E. Bowers, Opt. Lett. 44, 3825 (2019).
    [Crossref]
  6. M. A. Tran, D. Huang, and J. E. Bowers, APL Photon. 4, 111101 (2019).
    [Crossref]
  7. J. F. Bauters, M. J. R. Heck, D. D. John, J. S. Barton, C. M. Bruinink, A. Leinse, R. G. Heideman, D. J. Blumenthal, and J. E. Bowers, Opt. Express 19, 24090 (2011).
    [Crossref]
  8. P. A. Morton and M. Morton, J. Lightwave Technol. 36, 5048 (2018).
    [Crossref]

2019 (3)

A. L. Gaeta, M. Lipson, and T. J. Kippenberg, Nat. Photonics 13, 158 (2019).
[Crossref]

M. A. Tran, D. Huang, and J. E. Bowers, APL Photon. 4, 111101 (2019).
[Crossref]

C. Xiang, P. A. Morton, and J. E. Bowers, Opt. Lett. 44, 3825 (2019).
[Crossref]

2018 (2)

P. A. Morton and M. Morton, J. Lightwave Technol. 36, 5048 (2018).
[Crossref]

D. J. Blumenthal, R. Heideman, D. Geuzebroek, A. Leinse, and C. Roeloffzen, Proc. IEEE 106, 2209 (2018).
[Crossref]

2017 (1)

2011 (1)

Barton, J. S.

Bauters, J. F.

Blumenthal, D. J.

Boller, K.-J.

Y. Fan, R. M. Oldenbeuving, C. G. Roeloffzen, M. Hoekman, D. Geskus, R. G. Heideman, and K.-J. Boller, Conference on Lasers and Electro-Optics (OSA, 2017), p. JTh5C.9.

Bowers, J. E.

Bruinink, C. M.

Dutt, A.

Fan, Y.

Y. Fan, R. M. Oldenbeuving, C. G. Roeloffzen, M. Hoekman, D. Geskus, R. G. Heideman, and K.-J. Boller, Conference on Lasers and Electro-Optics (OSA, 2017), p. JTh5C.9.

Gaeta, A. L.

A. L. Gaeta, M. Lipson, and T. J. Kippenberg, Nat. Photonics 13, 158 (2019).
[Crossref]

Geskus, D.

Y. Fan, R. M. Oldenbeuving, C. G. Roeloffzen, M. Hoekman, D. Geskus, R. G. Heideman, and K.-J. Boller, Conference on Lasers and Electro-Optics (OSA, 2017), p. JTh5C.9.

Geuzebroek, D.

D. J. Blumenthal, R. Heideman, D. Geuzebroek, A. Leinse, and C. Roeloffzen, Proc. IEEE 106, 2209 (2018).
[Crossref]

Heck, M. J. R.

Heideman, R.

D. J. Blumenthal, R. Heideman, D. Geuzebroek, A. Leinse, and C. Roeloffzen, Proc. IEEE 106, 2209 (2018).
[Crossref]

Heideman, R. G.

J. F. Bauters, M. J. R. Heck, D. D. John, J. S. Barton, C. M. Bruinink, A. Leinse, R. G. Heideman, D. J. Blumenthal, and J. E. Bowers, Opt. Express 19, 24090 (2011).
[Crossref]

Y. Fan, R. M. Oldenbeuving, C. G. Roeloffzen, M. Hoekman, D. Geskus, R. G. Heideman, and K.-J. Boller, Conference on Lasers and Electro-Optics (OSA, 2017), p. JTh5C.9.

Hoekman, M.

Y. Fan, R. M. Oldenbeuving, C. G. Roeloffzen, M. Hoekman, D. Geskus, R. G. Heideman, and K.-J. Boller, Conference on Lasers and Electro-Optics (OSA, 2017), p. JTh5C.9.

Huang, D.

M. A. Tran, D. Huang, and J. E. Bowers, APL Photon. 4, 111101 (2019).
[Crossref]

Ji, X.

John, D. D.

Kippenberg, T. J.

A. L. Gaeta, M. Lipson, and T. J. Kippenberg, Nat. Photonics 13, 158 (2019).
[Crossref]

Leinse, A.

Lipson, M.

A. L. Gaeta, M. Lipson, and T. J. Kippenberg, Nat. Photonics 13, 158 (2019).
[Crossref]

B. Stern, X. Ji, A. Dutt, and M. Lipson, Opt. Lett. 42, 4541 (2017).
[Crossref]

Morton, M.

Morton, P. A.

Oldenbeuving, R. M.

Y. Fan, R. M. Oldenbeuving, C. G. Roeloffzen, M. Hoekman, D. Geskus, R. G. Heideman, and K.-J. Boller, Conference on Lasers and Electro-Optics (OSA, 2017), p. JTh5C.9.

Roeloffzen, C.

D. J. Blumenthal, R. Heideman, D. Geuzebroek, A. Leinse, and C. Roeloffzen, Proc. IEEE 106, 2209 (2018).
[Crossref]

Roeloffzen, C. G.

Y. Fan, R. M. Oldenbeuving, C. G. Roeloffzen, M. Hoekman, D. Geskus, R. G. Heideman, and K.-J. Boller, Conference on Lasers and Electro-Optics (OSA, 2017), p. JTh5C.9.

Stern, B.

Tran, M. A.

M. A. Tran, D. Huang, and J. E. Bowers, APL Photon. 4, 111101 (2019).
[Crossref]

Xiang, C.

APL Photon. (1)

M. A. Tran, D. Huang, and J. E. Bowers, APL Photon. 4, 111101 (2019).
[Crossref]

J. Lightwave Technol. (1)

Nat. Photonics (1)

A. L. Gaeta, M. Lipson, and T. J. Kippenberg, Nat. Photonics 13, 158 (2019).
[Crossref]

Opt. Express (1)

Opt. Lett. (2)

Proc. IEEE (1)

D. J. Blumenthal, R. Heideman, D. Geuzebroek, A. Leinse, and C. Roeloffzen, Proc. IEEE 106, 2209 (2018).
[Crossref]

Other (1)

Y. Fan, R. M. Oldenbeuving, C. G. Roeloffzen, M. Hoekman, D. Geskus, R. G. Heideman, and K.-J. Boller, Conference on Lasers and Electro-Optics (OSA, 2017), p. JTh5C.9.

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Figures (2)

Fig. 1.
Fig. 1. Schematics of (a) multilayer heterogeneous integration, (b) ${\rm III} {\text -} {\rm V}/{\rm Si}/{{\rm Si}_3}{{\rm N}_4}$ laser (c) ${{\rm Si}_3}{{\rm N}_4}$ spiral DBR followed by a ${{\rm Si}_3}{{\rm N}_4}$ waveguide terminator, (d) ${\rm Si} {\text -} {{\rm Si}_3}{{\rm N}_4}$ taper. (e): SEM image of fabricated laser.
Fig. 2.
Fig. 2. (a) LIV characteristics and corresponding peak lasing wavelength. (b) Laser power and peak lasing wavelength hysteresis dependence on the phase current. (c) Single-mode optical spectrum with gain current of 160 mA, inset shows measured normalized reflection spectra of the ${{\rm Si}_3}{{\rm N}_4}$ spiral grating. (d) Lasing wavelength dependence on stage temperature. (e) Laser frequency noise.