Abstract

Radio-frequency communication systems have long used bulk- and surface-acoustic-wave devices supporting ultrasonic mechanical waves to manipulate and sense signals. These devices have greatly improved our ability to process microwaves by interfacing them to orders-of-magnitude slower and lower-loss mechanical fields. In parallel, long-distance communications have been dominated by low-loss infrared optical photons. As electrical signal processing and transmission approach physical limits imposed by energy dissipation, optical links are now being actively considered for mobile and cloud technologies. Thus there is a strong driver for wavelength-scale mechanical wave or “phononic” circuitry fabricated by scalable semiconductor processes. With the advent of these circuits, new micro- and nanostructures that combine electrical, optical, and mechanical elements have emerged. In these devices, such as optomechanical waveguides and resonators, optical photons and gigahertz phonons are ideally matched to one another, as both have wavelengths on the order of micrometers. The development of phononic circuits has thus emerged as a vibrant field of research pursued for optical signal processing and sensing applications as well as emerging quantum technologies. In this review, we discuss the key physics and figures of merit underpinning this field. We also summarize the state of the art in nanoscale electro- and optomechanical systems with a focus on scalable platforms such as silicon. Finally, we give perspectives on what these new systems may bring and what challenges they face in the coming years. In particular, we believe hybrid electro- and optomechanical devices incorporating highly coherent and compact mechanical elements on a chip have significant untapped potential for electro-optic modulation, quantum microwave-to-optical photon conversion, sensing, and microwave signal processing.

© 2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

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Corrections

19 February 2019: A correction was made to the funding section.


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2019 (2)

2018 (41)

Y. Liu, A. Choudhary, D. Marpaung, and B. J. Eggleton, “Chip-based Brillouin processing for phase control of RF signals,” IEEE J. Quantum Electron. 54, 1–13 (2018).
[Crossref]

J. J. Viennot, X. Ma, and K. W. Lehnert, “Phonon-number-sensitive electromechanics,” Phys. Rev. Lett. 121, 183601 (2018).
[Crossref]

E. J. Davis, Z. Wang, A. H. Safavi-Naeini, and M. H. Schleier-Smith, “Painting nonclassical states of spin or motion with shaped single photons,” Phys. Rev. Lett. 121, 123602 (2018).
[Crossref]

L. Fan, C.-L. Zou, R. Cheng, X. Guo, X. Han, Z. Gong, S. Wang, and H. X. Tang, “Superconducting cavity electro-optics: a platform for coherent photon conversion between superconducting and photonic circuits,” Sci. Adv. 4, eaar4994 (2018).
[Crossref]

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R. Van Laer, B. Kuyken, D. Van Thourhout, and R. Baets, “Interaction between light and highly confined hypersound in a silicon photonic nanowire,” Nat. Photonics 9, 199–203 (2015).
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C. Sun, M. T. Wade, Y. Lee, J. S. Orcutt, L. Alloatti, M. S. Georgas, A. S. Waterman, J. M. Shainline, R. R. Avizienis, S. Lin, B. R. Moss, R. Kumar, F. Pavanello, A. H. Atabaki, H. M. Cook, A. J. Ou, J. C. Leu, Y.-H. Chen, K. Asanović, R. J. Ram, M. A. Popović, and V. M. Stojanović, “Single-chip microprocessor that communicates directly using light,” Nature 528, 534–538 (2015).
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S. M. Meenehan, J. D. Cohen, G. S. MacCabe, F. Marsili, M. D. Shaw, and O. Painter, “Pulsed excitation dynamics of an optomechanical crystal resonator near its quantum ground state of motion,” Phys. Rev. X 5, 041002 (2015).
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A. G. Krause, J. T. Hill, M. Ludwig, A. H. Safavi-Naeini, J. Chan, F. Marquardt, and O. Painter, “Nonlinear radiation pressure dynamics in an optomechanical crystal,” Phys. Rev. Lett. 115, 1–5 (2015).
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C. Wolff, M. J. Steel, B. J. Eggleton, and C. G. Poulton, “Stimulated Brillouin scattering in integrated photonic waveguides: forces, scattering mechanisms and coupled mode analysis,” Phys. Rev. A 92, 013836 (2015).
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C. Errando-Herranz, F. Niklaus, G. Stemme, and K. B. Gylfason, “Low-power microelectromechanically tunable silicon photonic ring resonator add-drop filter,” Opt. Lett. 40, 3556–3559 (2015).
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A. Pitanti, J. M. Fink, A. H. Safavi-Naeini, J. T. Hill, C. U. Lei, A. Tredicucci, and O. Painter, “Strong opto-electro-mechanical coupling in a silicon photonic crystal cavity,” Opt. Express 23, 3196–3208 (2015).
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E. Gil-Santos, C. Baker, D. T. Nguyen, W. Hease, C. Gomez, A. Lemaître, S. Ducci, G. Leo, and I. Favero, “High-frequency nano-optomechanical disk resonators in liquids,” Nat. Nanotechnol. 10, 810–816 (2015).
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E. E. Wollman, C. U. Lei, A. J. Weinstein, J. Suh, A. Kronwald, F. Marquardt, A. Clerk, and K. C. Schwab, “Quantum squeezing of motion in a mechanical resonator,” Science 349, 952–955 (2015).
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J.-M. Pirkkalainen, E. Damskägg, M. Brandt, F. Massel, and M. A. Sillanpää, “Squeezing of quantum noise of motion in a micromechanical resonator,” Phys. Rev. Lett. 115, 243601 (2015).
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C. Wolff, M. J. Steel, B. J. Eggleton, and C. G. Poulton, “Acoustic build-up in on-chip stimulated Brillouin scattering,” Sci. Rep. 5, 13656 (2015).
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D. Marpaung, B. Morrison, M. Pagani, R. Pant, D. Choi, B. Davies, S. Madden, and B. Eggleton, “Low-power, chip-based stimulated Brillouin scattering microwave photonic filter with ultrahigh selectivity,” Optica 2, 76–83 (2015).
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A. Casas-Bedoya, B. Morrison, M. Pagani, D. Marpaung, and B. J. Eggleton, “Tunable narrowband microwave photonic filter created by stimulated Brillouin scattering from a silicon nanowire,” Opt. Lett. 40, 4154–4157 (2015).
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H. Shin, J. A. Cox, R. Jarecki, A. Starbuck, Z. Wang, and P. T. Rakich, “Control of coherent information via on-chip photonic-phononic emitter-receivers,” Nat. Commun. 6, 6427 (2015).
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F. Lecocq, J. D. Teufel, J. Aumentado, and R. W. Simmonds, “Resolving the vacuum fluctuations of an optomechanical system using an artificial atom,” Nat. Phys. 11, 635–639 (2015).
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R. Riedinger, S. Hong, R. A. Norte, J. A. Slater, J. Shang, A. G. Krause, V. Anant, M. Aspelmeyer, and S. Gröblacher, “Non-classical correlations between single photons and phonons from a mechanical oscillator,” Nature 530, 1–12 (2015).
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2014 (21)

M. V. Gustafsson, T. Aref, A. F. Kockum, M. K. Ekstrom, G. Johansson, and P. Delsing, “Propagating phonons coupled to an artificial atom,” Science 346, 207–211 (2014).
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B. Morrison, D. Marpaung, R. Pant, E. Li, D.-Y. Choi, S. Madden, B. Luther-Davies, and B. J. Eggleton, “Tunable microwave photonic notch filter using on-chip stimulated Brillouin scattering,” Opt. Commun. 313, 85–89 (2014).
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T. Bagci, A. Simonsen, S. Schmid, L. G. Villanueva, E. Zeuthen, J. Appel, J. M. Taylor, A. Sørensen, K. Usami, A. Schliesser, and E. S. Polzik, “Optical detection of radio waves through a nanomechanical transducer,” Nature 507, 81–85 (2014).
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R. W. Andrews, R. W. Peterson, T. P. Purdy, K. Cicak, R. W. Simmonds, C. A. Regal, and K. W. Lehnert, “Bidirectional and efficient conversion between microwave and optical light,” Nat. Phys. 10, 321–326 (2014).
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R. Barends, J. Kelly, A. Megrant, A. Veitia, D. Sank, E. Jeffrey, T. C. White, J. Mutus, A. G. Fowler, B. Campbell, Y. Chen, Z. Chen, B. Chiaro, A. Dunsworth, C. Neill, P. O’Malley, P. Roushan, A. Vainsencher, J. Wenner, A. N. Korotkov, A. N. Cleland, and J. M. Martinis, “Superconducting quantum circuits at the surface code threshold for fault tolerance,” Nature 508, 500–503 (2014).
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R. Pant, D. Marpaung, I. V. Kabakova, B. Morrison, C. G. Poulton, and B. J. Eggleton, “On-chip stimulated Brillouin scattering for microwave signal processing and generation,” Laser Photon. Rev. 8, 653–666 (2014).
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A. J. Weinstein, C. U. Lei, E. E. Wollman, J. Suh, A. Metelmann, A. A. Clerk, and K. C. Schwab, “Observation and interpretation of motional sideband asymmetry in a quantum electromechanical device,” Phys. Rev. X 4, 041003 (2014).
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R. Van Laer, B. Kuyken, D. Van Thourhout, and R. Baets, “Analysis of enhanced stimulated Brillouin scattering in silicon slot waveguides,” Opt. Lett. 39, 1242–1245 (2014).
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C. Baker, W. Hease, D.-T. Nguyen, A. Andronico, S. Ducci, G. Leo, and I. Favero, “Photoelastic coupling in gallium arsenide optomechanical disk resonators,” Opt. Express 22, 14072–14086 (2014).
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D. Melati, A. Melloni, F. Morichetti, D. Elettronica, I. Bioingegneria, and P. Milano, “Real photonic waveguides: guiding light through imperfections,” Adv. Opt. Photon. 6, 156–224 (2014).
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2013 (28)

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C. Xiong, L. Fan, X. Sun, and H. X. Tang, “Cavity piezooptomechanics: piezoelectrically excited, optically transduced optomechanical resonators,” Appl. Phys. Lett. 102, 1–5 (2013).
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C. Xiong, L. Fan, X. Sun, and H. X. Tang, “Cavity piezooptomechanics: piezoelectrically excited, optically transduced optomechanical resonators,” Appl. Phys. Lett. 102, 021110 (2013).
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2012 (27)

A. Byrnes, R. Pant, E. Li, D.-Y. Choi, C. G. Poulton, S. Fan, S. Madden, B. Luther-Davies, and B. J. Eggleton, “Photonic chip based tunable and reconfigurable narrowband microwave photonic filter using stimulated Brillouin scattering,” Opt. Express 20, 18836–18845 (2012).
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J. Li, H. Lee, T. Chen, and K. J. Vahala, “Characterization of a high coherence, Brillouin microcavity laser on silicon,” Opt. Express 20, 20170–20180 (2012).
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W. C. Jiang, X. Lu, J. Zhang, and Q. Lin, “High-frequency silicon optomechanical oscillator with an ultralow threshold,” Opt. Express 20, 15991–15996 (2012).
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J. Chan, T. Alegre, A. H. Safavi-Naeini, J. Hill, A. Krause, S. Gröblacher, M. Aspelmeyer, and O. Painter, “Laser cooling of a nanomechanical oscillator into its quantum ground state,” Nature 478, 89–92 (2011).
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