Abstract

Deterministic techniques enabling the implementation and engineering of bright and coherent solid-state quantum light sources are key for the reliable realization of a next generation of quantum devices. Such a technology, at best, should allow one to significantly scale up the number of implemented devices within a given processing time. In this work, we discuss a possible technology platform for such a scaling procedure, relying on the application of nanoscale quantum dot imaging to the pillar microcavity architecture, which promises to combine very high photon extraction efficiency and indistinguishability. We discuss the alignment technology in detail and present the optical characterization of a selected device which features a strongly Purcell-enhanced emission output. This device, which yields an extraction efficiency of η=(49±4)%, facilitates the emission of photons with (94±2.7)% indistinguishability.

© 2017 Optical Society of America

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    [Crossref]
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    [Crossref]
  25. A. Badolato, K. Hennessy, M. Atatüre, J. Dreiser, E. Hu, P. M. Petroff, and A. Imamoğlu, “Deterministic coupling of single quantum dots to single nanocavity modes,” Science 308, 1158–1161 (2005).
    [Crossref]
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    [Crossref]
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    [Crossref]
  30. J. Liu, M. Davanco, L. Sapienza, K. Konthasinghe, J. D. Song, A. Badolato, and K. Srinivasan, “Cryogenic photoluminescence imaging system for nanoscale positioning of single quantum emitters,” Rev. Sci. Instrum. 88, 023116 (2017).
    [Crossref]
  31. W. L. Barnes, G. Björk, J. M. Gérard, P. Jonsson, J. A. E. Wasey, P. T. Worthing, and V. Zwiller, “Solid-state single photon sources: Light collection strategies,” Eur. Phys. J. D 18, 197–210 (2002).
    [Crossref]
  32. C. Böckler, S. Reitzenstein, C. Kistner, R. Debusmann, A. Löffler, T. Kida, S. Höfling, A. Forchel, L. Grenouillet, J. Claudon, and J. M. Gérard, “Electrically driven high-q quantum dot-micropillar cavities,” Appl. Phys. Lett. 92, 091107 (2008).
    [Crossref]

2017 (1)

J. Liu, M. Davanco, L. Sapienza, K. Konthasinghe, J. D. Song, A. Badolato, and K. Srinivasan, “Cryogenic photoluminescence imaging system for nanoscale positioning of single quantum emitters,” Rev. Sci. Instrum. 88, 023116 (2017).
[Crossref]

2016 (6)

S. Unsleber, Y.-M. He, S. Gerhardt, S. Maier, C.-Y. Lu, J.-W. Pan, N. Gregersen, M. Kamp, C. Schneider, and S. Höfling, “Highly indistinguishable on-demand resonance fluorescence photons from a deterministic quantum dot micropillar device with 74% extraction efficiency,” Opt. Express 24, 8539–8549 (2016).
[Crossref]

C. P. Dietrich, A. Fiore, M. G. Thompson, M. Kamp, M. Kamp, and S. Höfling, “GaAs integrated quantum photonics: towards compact and multi-functional quantum photonic integrated circuits,” Laser Photon. Rev. 10, 870–894 (2016).
[Crossref]

C. Jones, D. Kim, M. T. Rakher, P. G. Kwiat, and T. D. Ladd, “Design and analysis of communication protocols for quantum repeater networks,” New J. Phys. 18, 083015 (2016).
[Crossref]

X. Ding, Y. He, Z. C. Duan, N. Gregersen, M.-C. Chen, S. Unsleber, S. Maier, C. Schneider, M. Kamp, S. Höfling, C.-Y. Lu, and J.-W. Pan, “On-demand single photons with high extraction efficiency and near-unity indistinguishability from a resonantly driven quantum dot in a micropillar,” Phys. Rev. Lett. 116, 020401 (2016).
[Crossref]

N. Somaschi, V. Giesz, L. De Santis, J. C. Loredo, M. P. Almeida, G. Hornecker, S. L. Portalupi, T. Grange, C. Antón, J. Demory, C. Gómez, I. Sagnes, N. D. Lanzillotti-Kimura, A. Lemaítre, A. Auffeves, A. G. White, L. Lanco, and P. Senellart, “Near-optimal single-photon sources in the solid state,” Nat. Photonics 10, 340–345 (2016).
[Crossref]

K. Kuruma, Y. Ota, M. Kakuda, D. Takamiya, S. Iwamoto, and Y. Arakawa, “Position dependent optical coupling between single quantum dots and photonic crystal nanocavities,” Appl. Phys. Lett. 109, 071110 (2016).
[Crossref]

2015 (3)

S. Unsleber, D. P. S. McCutcheon, M. Dambach, M. Ermer, N. Gregersen, S. Höfling, J. Mørk, C. Schneider, and M. Kamp, “Two-photon interference from a quantum dot microcavity: Persistent pure dephasing and suppression of time jitter,” Phys. Rev. B 91, 075413 (2015).
[Crossref]

M. Gschrey, A. Thoma, P. Schnauber, M. Seifried, R. Schmidt, B. Wohlfeil, L. Kruger, J. H. Schulze, T. Heindel, S. Burger, F. Schmidt, A. Strittmatter, S. Rodt, and S. Reitzenstein, “Highly indistinguishable photons from deterministic quantum-dot microlenses utilizing three-dimensional in situ electron-beam lithography,” Nat. Commun. 6, 7662 (2015).
[Crossref]

L. Sapienza, M. Davanco, A. Badolato, and K. Srinivasan, “Nanoscale optical positioning of single quantum dots for bright and pure single-photon emission,” Nat. Commun. 6, 7833 (2015).
[Crossref]

2014 (2)

S. Maier, P. Gold, A. Forchel, N. Gregersen, J. Mørk, S. Höfling, C. Schneider, and M. Kamp, “Bright single photon source based on self-aligned quantum dot-cavity systems,” Opt. Express 22, 8136–8142 (2014).
[Crossref]

M. Arcari, I. Söllner, A. Javadi, S. Lindskov Hansen, S. Mahmoodian, J. Liu, H. Thyrrestrup, E. H. Lee, J. D. Song, S. Stobbe, and P. Lodahl, “Near-unity coupling efficiency of a quantum emitter to a photonic crystal waveguide,” Phys. Rev. Lett. 113, 093603 (2014).
[Crossref]

2013 (5)

O. Gazzano, S. Michaelis de Vasconcellos, C. Arnold, A. Nowak, E. Galopin, I. Sagnes, L. Lanco, A. Lemaître, and P. Senellart, “Bright solid-state sources of indistinguishable single photons,” Nat. Commun. 4, 1425 (2013).
[Crossref]

Y.-M. He, Y. He, Y.-J. Wei, D. Wu, M. Atature, C. Schneider, S. Höfling, M. Kamp, C.-Y. Lu, and J.-W. Pan, “On-demand semiconductor single-photon source with near-unity indistinguishability,” Nat. Nanotechnol. 8, 213–217 (2013).
[Crossref]

J. Nilsson, R. M. Stevenson, K. H. A. Chan, J. Skiba-Szymanska, M. Lucamarini, M. B. Ward, A. J. Bennett, C. L. Salter, I. Farrer, D. A. Ritchie, and A. J. Shields, “Quantum teleportation using a light-emitting diode,” Nat. Photonics 7, 311–315 (2013).
[Crossref]

W. B. Gao, P. Fallahi, E. Togan, A. Delteil, Y. S. Chin, J. Miguel-Sanchez, and A. Imamoğlu, “Quantum teleportation from a propagating photon to a solid-state spin qubit,” Nat. Commun. 4, 2744 (2013).
[Crossref]

T. Kojima, K. Kojima, T. Asano, and S. Noda, “Accurate alignment of a photonic crystal nanocavity with an embedded quantum dot based on optical microscopic photoluminescence imaging,” Appl. Phys. Lett. 102, 011110 (2013).
[Crossref]

2012 (2)

T. B. Hoang, J. Beetz, M. Lermer, L. Midolo, M. Kamp, S. Höfling, and A. Fiore, “Widely tunable, efficient on-chip single photon sources at telecommunication wavelengths,” Opt. Express 20, 21758–21765 (2012).
[Crossref]

M. E. Reimer, G. Bulgarini, N. Akopian, M. Hocevar, M. B. Bavinck, M. A. Verheijen, E. P. A. M. Bakkers, L. P. Kouwenhoven, and V. Zwiller, “Bright single-photon sources in bottom-up tailored nanowires,” Nat. Commun. 3, 737 (2012).
[Crossref]

2010 (3)

J. Heinrich, A. Huggenberger, T. Heindel, S. Reitzenstein, S. Höfling, L. Worschech, and A. Forchel, “Single photon emission from positioned GaAs/AlGaAs photonic nanowires,” Appl. Phys. Lett. 96, 211117 (2010).
[Crossref]

P. Yao, V. S. C. Manga Rao, and S. Hughes, “On-chip single photon sources using planar photonic crystals and single quantum dots,” Laser Photon. Rev. 4, 499–516 (2010).
[Crossref]

J. Claudon, J. Bleuse, N. S. Malik, M. Bazin, P. Jaffrennou, N. Gregersen, C. Sauvan, P. Lalanne, and J.-M. Gerard, “A highly efficient single-photon source based on a quantum dot in a photonic nanowire,” Nat. Photonics 4, 174–177 (2010).
[Crossref]

2009 (2)

S. M. Thon, M. T. Rakher, H. Kim, J. Gudat, W. M. Irvine, P. M. Petroff, and D. Bouwmeester, “Strong coupling through optical positioning of a quantum dot in a photonic crystal cavity,” Appl. Phys. Lett. 94, 111115 (2009).
[Crossref]

C. Schneider, A. Huggenberger, T. Sünner, T. Heindel, M. Strauß, S. Göpfert, P. Weinmann, S. Reitzenstein, L. Worschech, M. Kamp, S. Hofling, and A. Forchel, “Site-controlled In (Ga) As/GaAs quantum dots: Growth, properties and device integration,” Nanotechnology 20, 434021 (2009).
[Crossref]

2008 (2)

A. Dousse, L. Lanco, J. Suffczyński, E. Semenova, A. Miard, A. Lemaître, I. Sagnes, C. Roblin, J. Bloch, and P. Senellart, “Controlled light-matter coupling for a single quantum dot embedded in a pillar microcavity using far-field optical lithography,” Phys. Rev. Lett. 101, 267404 (2008).
[Crossref]

C. Böckler, S. Reitzenstein, C. Kistner, R. Debusmann, A. Löffler, T. Kida, S. Höfling, A. Forchel, L. Grenouillet, J. Claudon, and J. M. Gérard, “Electrically driven high-q quantum dot-micropillar cavities,” Appl. Phys. Lett. 92, 091107 (2008).
[Crossref]

2005 (2)

A. Badolato, K. Hennessy, M. Atatüre, J. Dreiser, E. Hu, P. M. Petroff, and A. Imamoğlu, “Deterministic coupling of single quantum dots to single nanocavity modes,” Science 308, 1158–1161 (2005).
[Crossref]

S. Varoutsis, S. Laurent, P. Kramper, A. Lematre, I. Sagnes, I. Robert-Philip, and I. Abram, “Restoration of photon indistinguishability in the emission of a semiconductor quantum dot,” Phys. Rev. B 72, 041303 (2005).
[Crossref]

2002 (2)

M. Pelton, C. Santori, J. Vucković, B. Zhang, G. S. Solomon, J. Plant, and Y. Yamamoto, “Efficient source of single photons: A single quantum dot in a micropost microcavity,” Phys. Rev. Lett. 89, 233602 (2002).
[Crossref]

W. L. Barnes, G. Björk, J. M. Gérard, P. Jonsson, J. A. E. Wasey, P. T. Worthing, and V. Zwiller, “Solid-state single photon sources: Light collection strategies,” Eur. Phys. J. D 18, 197–210 (2002).
[Crossref]

2001 (1)

E. Moreau, I. Robert, J. M. Gérard, I. Abram, L. Manin, and V. Thierry-Mieg, “Single-mode solid-state single photon source based on isolated quantum dots in pillar microcavities,” Appl. Phys. Lett. 79, 2865–2867 (2001).
[Crossref]

Abram, I.

S. Varoutsis, S. Laurent, P. Kramper, A. Lematre, I. Sagnes, I. Robert-Philip, and I. Abram, “Restoration of photon indistinguishability in the emission of a semiconductor quantum dot,” Phys. Rev. B 72, 041303 (2005).
[Crossref]

E. Moreau, I. Robert, J. M. Gérard, I. Abram, L. Manin, and V. Thierry-Mieg, “Single-mode solid-state single photon source based on isolated quantum dots in pillar microcavities,” Appl. Phys. Lett. 79, 2865–2867 (2001).
[Crossref]

Akopian, N.

M. E. Reimer, G. Bulgarini, N. Akopian, M. Hocevar, M. B. Bavinck, M. A. Verheijen, E. P. A. M. Bakkers, L. P. Kouwenhoven, and V. Zwiller, “Bright single-photon sources in bottom-up tailored nanowires,” Nat. Commun. 3, 737 (2012).
[Crossref]

Almeida, M. P.

N. Somaschi, V. Giesz, L. De Santis, J. C. Loredo, M. P. Almeida, G. Hornecker, S. L. Portalupi, T. Grange, C. Antón, J. Demory, C. Gómez, I. Sagnes, N. D. Lanzillotti-Kimura, A. Lemaítre, A. Auffeves, A. G. White, L. Lanco, and P. Senellart, “Near-optimal single-photon sources in the solid state,” Nat. Photonics 10, 340–345 (2016).
[Crossref]

Antón, C.

N. Somaschi, V. Giesz, L. De Santis, J. C. Loredo, M. P. Almeida, G. Hornecker, S. L. Portalupi, T. Grange, C. Antón, J. Demory, C. Gómez, I. Sagnes, N. D. Lanzillotti-Kimura, A. Lemaítre, A. Auffeves, A. G. White, L. Lanco, and P. Senellart, “Near-optimal single-photon sources in the solid state,” Nat. Photonics 10, 340–345 (2016).
[Crossref]

Arakawa, Y.

K. Kuruma, Y. Ota, M. Kakuda, D. Takamiya, S. Iwamoto, and Y. Arakawa, “Position dependent optical coupling between single quantum dots and photonic crystal nanocavities,” Appl. Phys. Lett. 109, 071110 (2016).
[Crossref]

Arcari, M.

M. Arcari, I. Söllner, A. Javadi, S. Lindskov Hansen, S. Mahmoodian, J. Liu, H. Thyrrestrup, E. H. Lee, J. D. Song, S. Stobbe, and P. Lodahl, “Near-unity coupling efficiency of a quantum emitter to a photonic crystal waveguide,” Phys. Rev. Lett. 113, 093603 (2014).
[Crossref]

Arnold, C.

O. Gazzano, S. Michaelis de Vasconcellos, C. Arnold, A. Nowak, E. Galopin, I. Sagnes, L. Lanco, A. Lemaître, and P. Senellart, “Bright solid-state sources of indistinguishable single photons,” Nat. Commun. 4, 1425 (2013).
[Crossref]

Asano, T.

T. Kojima, K. Kojima, T. Asano, and S. Noda, “Accurate alignment of a photonic crystal nanocavity with an embedded quantum dot based on optical microscopic photoluminescence imaging,” Appl. Phys. Lett. 102, 011110 (2013).
[Crossref]

Atature, M.

Y.-M. He, Y. He, Y.-J. Wei, D. Wu, M. Atature, C. Schneider, S. Höfling, M. Kamp, C.-Y. Lu, and J.-W. Pan, “On-demand semiconductor single-photon source with near-unity indistinguishability,” Nat. Nanotechnol. 8, 213–217 (2013).
[Crossref]

Atatüre, M.

A. Badolato, K. Hennessy, M. Atatüre, J. Dreiser, E. Hu, P. M. Petroff, and A. Imamoğlu, “Deterministic coupling of single quantum dots to single nanocavity modes,” Science 308, 1158–1161 (2005).
[Crossref]

Auffeves, A.

N. Somaschi, V. Giesz, L. De Santis, J. C. Loredo, M. P. Almeida, G. Hornecker, S. L. Portalupi, T. Grange, C. Antón, J. Demory, C. Gómez, I. Sagnes, N. D. Lanzillotti-Kimura, A. Lemaítre, A. Auffeves, A. G. White, L. Lanco, and P. Senellart, “Near-optimal single-photon sources in the solid state,” Nat. Photonics 10, 340–345 (2016).
[Crossref]

Badolato, A.

J. Liu, M. Davanco, L. Sapienza, K. Konthasinghe, J. D. Song, A. Badolato, and K. Srinivasan, “Cryogenic photoluminescence imaging system for nanoscale positioning of single quantum emitters,” Rev. Sci. Instrum. 88, 023116 (2017).
[Crossref]

L. Sapienza, M. Davanco, A. Badolato, and K. Srinivasan, “Nanoscale optical positioning of single quantum dots for bright and pure single-photon emission,” Nat. Commun. 6, 7833 (2015).
[Crossref]

A. Badolato, K. Hennessy, M. Atatüre, J. Dreiser, E. Hu, P. M. Petroff, and A. Imamoğlu, “Deterministic coupling of single quantum dots to single nanocavity modes,” Science 308, 1158–1161 (2005).
[Crossref]

Bakkers, E. P. A. M.

M. E. Reimer, G. Bulgarini, N. Akopian, M. Hocevar, M. B. Bavinck, M. A. Verheijen, E. P. A. M. Bakkers, L. P. Kouwenhoven, and V. Zwiller, “Bright single-photon sources in bottom-up tailored nanowires,” Nat. Commun. 3, 737 (2012).
[Crossref]

Barnes, W. L.

W. L. Barnes, G. Björk, J. M. Gérard, P. Jonsson, J. A. E. Wasey, P. T. Worthing, and V. Zwiller, “Solid-state single photon sources: Light collection strategies,” Eur. Phys. J. D 18, 197–210 (2002).
[Crossref]

Bavinck, M. B.

M. E. Reimer, G. Bulgarini, N. Akopian, M. Hocevar, M. B. Bavinck, M. A. Verheijen, E. P. A. M. Bakkers, L. P. Kouwenhoven, and V. Zwiller, “Bright single-photon sources in bottom-up tailored nanowires,” Nat. Commun. 3, 737 (2012).
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Bazin, M.

J. Claudon, J. Bleuse, N. S. Malik, M. Bazin, P. Jaffrennou, N. Gregersen, C. Sauvan, P. Lalanne, and J.-M. Gerard, “A highly efficient single-photon source based on a quantum dot in a photonic nanowire,” Nat. Photonics 4, 174–177 (2010).
[Crossref]

Beetz, J.

Bennett, A. J.

J. Nilsson, R. M. Stevenson, K. H. A. Chan, J. Skiba-Szymanska, M. Lucamarini, M. B. Ward, A. J. Bennett, C. L. Salter, I. Farrer, D. A. Ritchie, and A. J. Shields, “Quantum teleportation using a light-emitting diode,” Nat. Photonics 7, 311–315 (2013).
[Crossref]

Björk, G.

W. L. Barnes, G. Björk, J. M. Gérard, P. Jonsson, J. A. E. Wasey, P. T. Worthing, and V. Zwiller, “Solid-state single photon sources: Light collection strategies,” Eur. Phys. J. D 18, 197–210 (2002).
[Crossref]

Bleuse, J.

J. Claudon, J. Bleuse, N. S. Malik, M. Bazin, P. Jaffrennou, N. Gregersen, C. Sauvan, P. Lalanne, and J.-M. Gerard, “A highly efficient single-photon source based on a quantum dot in a photonic nanowire,” Nat. Photonics 4, 174–177 (2010).
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Bloch, J.

A. Dousse, L. Lanco, J. Suffczyński, E. Semenova, A. Miard, A. Lemaître, I. Sagnes, C. Roblin, J. Bloch, and P. Senellart, “Controlled light-matter coupling for a single quantum dot embedded in a pillar microcavity using far-field optical lithography,” Phys. Rev. Lett. 101, 267404 (2008).
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Böckler, C.

C. Böckler, S. Reitzenstein, C. Kistner, R. Debusmann, A. Löffler, T. Kida, S. Höfling, A. Forchel, L. Grenouillet, J. Claudon, and J. M. Gérard, “Electrically driven high-q quantum dot-micropillar cavities,” Appl. Phys. Lett. 92, 091107 (2008).
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Bouwmeester, D.

S. M. Thon, M. T. Rakher, H. Kim, J. Gudat, W. M. Irvine, P. M. Petroff, and D. Bouwmeester, “Strong coupling through optical positioning of a quantum dot in a photonic crystal cavity,” Appl. Phys. Lett. 94, 111115 (2009).
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Bulgarini, G.

M. E. Reimer, G. Bulgarini, N. Akopian, M. Hocevar, M. B. Bavinck, M. A. Verheijen, E. P. A. M. Bakkers, L. P. Kouwenhoven, and V. Zwiller, “Bright single-photon sources in bottom-up tailored nanowires,” Nat. Commun. 3, 737 (2012).
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Burger, S.

M. Gschrey, A. Thoma, P. Schnauber, M. Seifried, R. Schmidt, B. Wohlfeil, L. Kruger, J. H. Schulze, T. Heindel, S. Burger, F. Schmidt, A. Strittmatter, S. Rodt, and S. Reitzenstein, “Highly indistinguishable photons from deterministic quantum-dot microlenses utilizing three-dimensional in situ electron-beam lithography,” Nat. Commun. 6, 7662 (2015).
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Chan, K. H. A.

J. Nilsson, R. M. Stevenson, K. H. A. Chan, J. Skiba-Szymanska, M. Lucamarini, M. B. Ward, A. J. Bennett, C. L. Salter, I. Farrer, D. A. Ritchie, and A. J. Shields, “Quantum teleportation using a light-emitting diode,” Nat. Photonics 7, 311–315 (2013).
[Crossref]

Chen, M.-C.

X. Ding, Y. He, Z. C. Duan, N. Gregersen, M.-C. Chen, S. Unsleber, S. Maier, C. Schneider, M. Kamp, S. Höfling, C.-Y. Lu, and J.-W. Pan, “On-demand single photons with high extraction efficiency and near-unity indistinguishability from a resonantly driven quantum dot in a micropillar,” Phys. Rev. Lett. 116, 020401 (2016).
[Crossref]

Chin, Y. S.

W. B. Gao, P. Fallahi, E. Togan, A. Delteil, Y. S. Chin, J. Miguel-Sanchez, and A. Imamoğlu, “Quantum teleportation from a propagating photon to a solid-state spin qubit,” Nat. Commun. 4, 2744 (2013).
[Crossref]

Claudon, J.

J. Claudon, J. Bleuse, N. S. Malik, M. Bazin, P. Jaffrennou, N. Gregersen, C. Sauvan, P. Lalanne, and J.-M. Gerard, “A highly efficient single-photon source based on a quantum dot in a photonic nanowire,” Nat. Photonics 4, 174–177 (2010).
[Crossref]

C. Böckler, S. Reitzenstein, C. Kistner, R. Debusmann, A. Löffler, T. Kida, S. Höfling, A. Forchel, L. Grenouillet, J. Claudon, and J. M. Gérard, “Electrically driven high-q quantum dot-micropillar cavities,” Appl. Phys. Lett. 92, 091107 (2008).
[Crossref]

Dambach, M.

S. Unsleber, D. P. S. McCutcheon, M. Dambach, M. Ermer, N. Gregersen, S. Höfling, J. Mørk, C. Schneider, and M. Kamp, “Two-photon interference from a quantum dot microcavity: Persistent pure dephasing and suppression of time jitter,” Phys. Rev. B 91, 075413 (2015).
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Davanco, M.

J. Liu, M. Davanco, L. Sapienza, K. Konthasinghe, J. D. Song, A. Badolato, and K. Srinivasan, “Cryogenic photoluminescence imaging system for nanoscale positioning of single quantum emitters,” Rev. Sci. Instrum. 88, 023116 (2017).
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L. Sapienza, M. Davanco, A. Badolato, and K. Srinivasan, “Nanoscale optical positioning of single quantum dots for bright and pure single-photon emission,” Nat. Commun. 6, 7833 (2015).
[Crossref]

De Santis, L.

N. Somaschi, V. Giesz, L. De Santis, J. C. Loredo, M. P. Almeida, G. Hornecker, S. L. Portalupi, T. Grange, C. Antón, J. Demory, C. Gómez, I. Sagnes, N. D. Lanzillotti-Kimura, A. Lemaítre, A. Auffeves, A. G. White, L. Lanco, and P. Senellart, “Near-optimal single-photon sources in the solid state,” Nat. Photonics 10, 340–345 (2016).
[Crossref]

Debusmann, R.

C. Böckler, S. Reitzenstein, C. Kistner, R. Debusmann, A. Löffler, T. Kida, S. Höfling, A. Forchel, L. Grenouillet, J. Claudon, and J. M. Gérard, “Electrically driven high-q quantum dot-micropillar cavities,” Appl. Phys. Lett. 92, 091107 (2008).
[Crossref]

Delteil, A.

W. B. Gao, P. Fallahi, E. Togan, A. Delteil, Y. S. Chin, J. Miguel-Sanchez, and A. Imamoğlu, “Quantum teleportation from a propagating photon to a solid-state spin qubit,” Nat. Commun. 4, 2744 (2013).
[Crossref]

Demory, J.

N. Somaschi, V. Giesz, L. De Santis, J. C. Loredo, M. P. Almeida, G. Hornecker, S. L. Portalupi, T. Grange, C. Antón, J. Demory, C. Gómez, I. Sagnes, N. D. Lanzillotti-Kimura, A. Lemaítre, A. Auffeves, A. G. White, L. Lanco, and P. Senellart, “Near-optimal single-photon sources in the solid state,” Nat. Photonics 10, 340–345 (2016).
[Crossref]

Dietrich, C. P.

C. P. Dietrich, A. Fiore, M. G. Thompson, M. Kamp, M. Kamp, and S. Höfling, “GaAs integrated quantum photonics: towards compact and multi-functional quantum photonic integrated circuits,” Laser Photon. Rev. 10, 870–894 (2016).
[Crossref]

Ding, X.

X. Ding, Y. He, Z. C. Duan, N. Gregersen, M.-C. Chen, S. Unsleber, S. Maier, C. Schneider, M. Kamp, S. Höfling, C.-Y. Lu, and J.-W. Pan, “On-demand single photons with high extraction efficiency and near-unity indistinguishability from a resonantly driven quantum dot in a micropillar,” Phys. Rev. Lett. 116, 020401 (2016).
[Crossref]

Dousse, A.

A. Dousse, L. Lanco, J. Suffczyński, E. Semenova, A. Miard, A. Lemaître, I. Sagnes, C. Roblin, J. Bloch, and P. Senellart, “Controlled light-matter coupling for a single quantum dot embedded in a pillar microcavity using far-field optical lithography,” Phys. Rev. Lett. 101, 267404 (2008).
[Crossref]

Dreiser, J.

A. Badolato, K. Hennessy, M. Atatüre, J. Dreiser, E. Hu, P. M. Petroff, and A. Imamoğlu, “Deterministic coupling of single quantum dots to single nanocavity modes,” Science 308, 1158–1161 (2005).
[Crossref]

Duan, Z. C.

X. Ding, Y. He, Z. C. Duan, N. Gregersen, M.-C. Chen, S. Unsleber, S. Maier, C. Schneider, M. Kamp, S. Höfling, C.-Y. Lu, and J.-W. Pan, “On-demand single photons with high extraction efficiency and near-unity indistinguishability from a resonantly driven quantum dot in a micropillar,” Phys. Rev. Lett. 116, 020401 (2016).
[Crossref]

Ermer, M.

S. Unsleber, D. P. S. McCutcheon, M. Dambach, M. Ermer, N. Gregersen, S. Höfling, J. Mørk, C. Schneider, and M. Kamp, “Two-photon interference from a quantum dot microcavity: Persistent pure dephasing and suppression of time jitter,” Phys. Rev. B 91, 075413 (2015).
[Crossref]

Fallahi, P.

W. B. Gao, P. Fallahi, E. Togan, A. Delteil, Y. S. Chin, J. Miguel-Sanchez, and A. Imamoğlu, “Quantum teleportation from a propagating photon to a solid-state spin qubit,” Nat. Commun. 4, 2744 (2013).
[Crossref]

Farrer, I.

J. Nilsson, R. M. Stevenson, K. H. A. Chan, J. Skiba-Szymanska, M. Lucamarini, M. B. Ward, A. J. Bennett, C. L. Salter, I. Farrer, D. A. Ritchie, and A. J. Shields, “Quantum teleportation using a light-emitting diode,” Nat. Photonics 7, 311–315 (2013).
[Crossref]

Fiore, A.

C. P. Dietrich, A. Fiore, M. G. Thompson, M. Kamp, M. Kamp, and S. Höfling, “GaAs integrated quantum photonics: towards compact and multi-functional quantum photonic integrated circuits,” Laser Photon. Rev. 10, 870–894 (2016).
[Crossref]

T. B. Hoang, J. Beetz, M. Lermer, L. Midolo, M. Kamp, S. Höfling, and A. Fiore, “Widely tunable, efficient on-chip single photon sources at telecommunication wavelengths,” Opt. Express 20, 21758–21765 (2012).
[Crossref]

Forchel, A.

S. Maier, P. Gold, A. Forchel, N. Gregersen, J. Mørk, S. Höfling, C. Schneider, and M. Kamp, “Bright single photon source based on self-aligned quantum dot-cavity systems,” Opt. Express 22, 8136–8142 (2014).
[Crossref]

J. Heinrich, A. Huggenberger, T. Heindel, S. Reitzenstein, S. Höfling, L. Worschech, and A. Forchel, “Single photon emission from positioned GaAs/AlGaAs photonic nanowires,” Appl. Phys. Lett. 96, 211117 (2010).
[Crossref]

C. Schneider, A. Huggenberger, T. Sünner, T. Heindel, M. Strauß, S. Göpfert, P. Weinmann, S. Reitzenstein, L. Worschech, M. Kamp, S. Hofling, and A. Forchel, “Site-controlled In (Ga) As/GaAs quantum dots: Growth, properties and device integration,” Nanotechnology 20, 434021 (2009).
[Crossref]

C. Böckler, S. Reitzenstein, C. Kistner, R. Debusmann, A. Löffler, T. Kida, S. Höfling, A. Forchel, L. Grenouillet, J. Claudon, and J. M. Gérard, “Electrically driven high-q quantum dot-micropillar cavities,” Appl. Phys. Lett. 92, 091107 (2008).
[Crossref]

Galopin, E.

O. Gazzano, S. Michaelis de Vasconcellos, C. Arnold, A. Nowak, E. Galopin, I. Sagnes, L. Lanco, A. Lemaître, and P. Senellart, “Bright solid-state sources of indistinguishable single photons,” Nat. Commun. 4, 1425 (2013).
[Crossref]

Gao, W. B.

W. B. Gao, P. Fallahi, E. Togan, A. Delteil, Y. S. Chin, J. Miguel-Sanchez, and A. Imamoğlu, “Quantum teleportation from a propagating photon to a solid-state spin qubit,” Nat. Commun. 4, 2744 (2013).
[Crossref]

Gazzano, O.

O. Gazzano, S. Michaelis de Vasconcellos, C. Arnold, A. Nowak, E. Galopin, I. Sagnes, L. Lanco, A. Lemaître, and P. Senellart, “Bright solid-state sources of indistinguishable single photons,” Nat. Commun. 4, 1425 (2013).
[Crossref]

Gerard, J.-M.

J. Claudon, J. Bleuse, N. S. Malik, M. Bazin, P. Jaffrennou, N. Gregersen, C. Sauvan, P. Lalanne, and J.-M. Gerard, “A highly efficient single-photon source based on a quantum dot in a photonic nanowire,” Nat. Photonics 4, 174–177 (2010).
[Crossref]

Gérard, J. M.

C. Böckler, S. Reitzenstein, C. Kistner, R. Debusmann, A. Löffler, T. Kida, S. Höfling, A. Forchel, L. Grenouillet, J. Claudon, and J. M. Gérard, “Electrically driven high-q quantum dot-micropillar cavities,” Appl. Phys. Lett. 92, 091107 (2008).
[Crossref]

W. L. Barnes, G. Björk, J. M. Gérard, P. Jonsson, J. A. E. Wasey, P. T. Worthing, and V. Zwiller, “Solid-state single photon sources: Light collection strategies,” Eur. Phys. J. D 18, 197–210 (2002).
[Crossref]

E. Moreau, I. Robert, J. M. Gérard, I. Abram, L. Manin, and V. Thierry-Mieg, “Single-mode solid-state single photon source based on isolated quantum dots in pillar microcavities,” Appl. Phys. Lett. 79, 2865–2867 (2001).
[Crossref]

Gerhardt, S.

Giesz, V.

N. Somaschi, V. Giesz, L. De Santis, J. C. Loredo, M. P. Almeida, G. Hornecker, S. L. Portalupi, T. Grange, C. Antón, J. Demory, C. Gómez, I. Sagnes, N. D. Lanzillotti-Kimura, A. Lemaítre, A. Auffeves, A. G. White, L. Lanco, and P. Senellart, “Near-optimal single-photon sources in the solid state,” Nat. Photonics 10, 340–345 (2016).
[Crossref]

Gold, P.

Gómez, C.

N. Somaschi, V. Giesz, L. De Santis, J. C. Loredo, M. P. Almeida, G. Hornecker, S. L. Portalupi, T. Grange, C. Antón, J. Demory, C. Gómez, I. Sagnes, N. D. Lanzillotti-Kimura, A. Lemaítre, A. Auffeves, A. G. White, L. Lanco, and P. Senellart, “Near-optimal single-photon sources in the solid state,” Nat. Photonics 10, 340–345 (2016).
[Crossref]

Göpfert, S.

C. Schneider, A. Huggenberger, T. Sünner, T. Heindel, M. Strauß, S. Göpfert, P. Weinmann, S. Reitzenstein, L. Worschech, M. Kamp, S. Hofling, and A. Forchel, “Site-controlled In (Ga) As/GaAs quantum dots: Growth, properties and device integration,” Nanotechnology 20, 434021 (2009).
[Crossref]

Grange, T.

N. Somaschi, V. Giesz, L. De Santis, J. C. Loredo, M. P. Almeida, G. Hornecker, S. L. Portalupi, T. Grange, C. Antón, J. Demory, C. Gómez, I. Sagnes, N. D. Lanzillotti-Kimura, A. Lemaítre, A. Auffeves, A. G. White, L. Lanco, and P. Senellart, “Near-optimal single-photon sources in the solid state,” Nat. Photonics 10, 340–345 (2016).
[Crossref]

Gregersen, N.

S. Unsleber, Y.-M. He, S. Gerhardt, S. Maier, C.-Y. Lu, J.-W. Pan, N. Gregersen, M. Kamp, C. Schneider, and S. Höfling, “Highly indistinguishable on-demand resonance fluorescence photons from a deterministic quantum dot micropillar device with 74% extraction efficiency,” Opt. Express 24, 8539–8549 (2016).
[Crossref]

X. Ding, Y. He, Z. C. Duan, N. Gregersen, M.-C. Chen, S. Unsleber, S. Maier, C. Schneider, M. Kamp, S. Höfling, C.-Y. Lu, and J.-W. Pan, “On-demand single photons with high extraction efficiency and near-unity indistinguishability from a resonantly driven quantum dot in a micropillar,” Phys. Rev. Lett. 116, 020401 (2016).
[Crossref]

S. Unsleber, D. P. S. McCutcheon, M. Dambach, M. Ermer, N. Gregersen, S. Höfling, J. Mørk, C. Schneider, and M. Kamp, “Two-photon interference from a quantum dot microcavity: Persistent pure dephasing and suppression of time jitter,” Phys. Rev. B 91, 075413 (2015).
[Crossref]

S. Maier, P. Gold, A. Forchel, N. Gregersen, J. Mørk, S. Höfling, C. Schneider, and M. Kamp, “Bright single photon source based on self-aligned quantum dot-cavity systems,” Opt. Express 22, 8136–8142 (2014).
[Crossref]

J. Claudon, J. Bleuse, N. S. Malik, M. Bazin, P. Jaffrennou, N. Gregersen, C. Sauvan, P. Lalanne, and J.-M. Gerard, “A highly efficient single-photon source based on a quantum dot in a photonic nanowire,” Nat. Photonics 4, 174–177 (2010).
[Crossref]

Grenouillet, L.

C. Böckler, S. Reitzenstein, C. Kistner, R. Debusmann, A. Löffler, T. Kida, S. Höfling, A. Forchel, L. Grenouillet, J. Claudon, and J. M. Gérard, “Electrically driven high-q quantum dot-micropillar cavities,” Appl. Phys. Lett. 92, 091107 (2008).
[Crossref]

Gschrey, M.

M. Gschrey, A. Thoma, P. Schnauber, M. Seifried, R. Schmidt, B. Wohlfeil, L. Kruger, J. H. Schulze, T. Heindel, S. Burger, F. Schmidt, A. Strittmatter, S. Rodt, and S. Reitzenstein, “Highly indistinguishable photons from deterministic quantum-dot microlenses utilizing three-dimensional in situ electron-beam lithography,” Nat. Commun. 6, 7662 (2015).
[Crossref]

Gudat, J.

S. M. Thon, M. T. Rakher, H. Kim, J. Gudat, W. M. Irvine, P. M. Petroff, and D. Bouwmeester, “Strong coupling through optical positioning of a quantum dot in a photonic crystal cavity,” Appl. Phys. Lett. 94, 111115 (2009).
[Crossref]

He, Y.

X. Ding, Y. He, Z. C. Duan, N. Gregersen, M.-C. Chen, S. Unsleber, S. Maier, C. Schneider, M. Kamp, S. Höfling, C.-Y. Lu, and J.-W. Pan, “On-demand single photons with high extraction efficiency and near-unity indistinguishability from a resonantly driven quantum dot in a micropillar,” Phys. Rev. Lett. 116, 020401 (2016).
[Crossref]

Y.-M. He, Y. He, Y.-J. Wei, D. Wu, M. Atature, C. Schneider, S. Höfling, M. Kamp, C.-Y. Lu, and J.-W. Pan, “On-demand semiconductor single-photon source with near-unity indistinguishability,” Nat. Nanotechnol. 8, 213–217 (2013).
[Crossref]

He, Y.-M.

S. Unsleber, Y.-M. He, S. Gerhardt, S. Maier, C.-Y. Lu, J.-W. Pan, N. Gregersen, M. Kamp, C. Schneider, and S. Höfling, “Highly indistinguishable on-demand resonance fluorescence photons from a deterministic quantum dot micropillar device with 74% extraction efficiency,” Opt. Express 24, 8539–8549 (2016).
[Crossref]

Y.-M. He, Y. He, Y.-J. Wei, D. Wu, M. Atature, C. Schneider, S. Höfling, M. Kamp, C.-Y. Lu, and J.-W. Pan, “On-demand semiconductor single-photon source with near-unity indistinguishability,” Nat. Nanotechnol. 8, 213–217 (2013).
[Crossref]

Heindel, T.

M. Gschrey, A. Thoma, P. Schnauber, M. Seifried, R. Schmidt, B. Wohlfeil, L. Kruger, J. H. Schulze, T. Heindel, S. Burger, F. Schmidt, A. Strittmatter, S. Rodt, and S. Reitzenstein, “Highly indistinguishable photons from deterministic quantum-dot microlenses utilizing three-dimensional in situ electron-beam lithography,” Nat. Commun. 6, 7662 (2015).
[Crossref]

J. Heinrich, A. Huggenberger, T. Heindel, S. Reitzenstein, S. Höfling, L. Worschech, and A. Forchel, “Single photon emission from positioned GaAs/AlGaAs photonic nanowires,” Appl. Phys. Lett. 96, 211117 (2010).
[Crossref]

C. Schneider, A. Huggenberger, T. Sünner, T. Heindel, M. Strauß, S. Göpfert, P. Weinmann, S. Reitzenstein, L. Worschech, M. Kamp, S. Hofling, and A. Forchel, “Site-controlled In (Ga) As/GaAs quantum dots: Growth, properties and device integration,” Nanotechnology 20, 434021 (2009).
[Crossref]

Heinrich, J.

J. Heinrich, A. Huggenberger, T. Heindel, S. Reitzenstein, S. Höfling, L. Worschech, and A. Forchel, “Single photon emission from positioned GaAs/AlGaAs photonic nanowires,” Appl. Phys. Lett. 96, 211117 (2010).
[Crossref]

Hennessy, K.

A. Badolato, K. Hennessy, M. Atatüre, J. Dreiser, E. Hu, P. M. Petroff, and A. Imamoğlu, “Deterministic coupling of single quantum dots to single nanocavity modes,” Science 308, 1158–1161 (2005).
[Crossref]

Hoang, T. B.

Hocevar, M.

M. E. Reimer, G. Bulgarini, N. Akopian, M. Hocevar, M. B. Bavinck, M. A. Verheijen, E. P. A. M. Bakkers, L. P. Kouwenhoven, and V. Zwiller, “Bright single-photon sources in bottom-up tailored nanowires,” Nat. Commun. 3, 737 (2012).
[Crossref]

Hofling, S.

C. Schneider, A. Huggenberger, T. Sünner, T. Heindel, M. Strauß, S. Göpfert, P. Weinmann, S. Reitzenstein, L. Worschech, M. Kamp, S. Hofling, and A. Forchel, “Site-controlled In (Ga) As/GaAs quantum dots: Growth, properties and device integration,” Nanotechnology 20, 434021 (2009).
[Crossref]

Höfling, S.

X. Ding, Y. He, Z. C. Duan, N. Gregersen, M.-C. Chen, S. Unsleber, S. Maier, C. Schneider, M. Kamp, S. Höfling, C.-Y. Lu, and J.-W. Pan, “On-demand single photons with high extraction efficiency and near-unity indistinguishability from a resonantly driven quantum dot in a micropillar,” Phys. Rev. Lett. 116, 020401 (2016).
[Crossref]

C. P. Dietrich, A. Fiore, M. G. Thompson, M. Kamp, M. Kamp, and S. Höfling, “GaAs integrated quantum photonics: towards compact and multi-functional quantum photonic integrated circuits,” Laser Photon. Rev. 10, 870–894 (2016).
[Crossref]

S. Unsleber, Y.-M. He, S. Gerhardt, S. Maier, C.-Y. Lu, J.-W. Pan, N. Gregersen, M. Kamp, C. Schneider, and S. Höfling, “Highly indistinguishable on-demand resonance fluorescence photons from a deterministic quantum dot micropillar device with 74% extraction efficiency,” Opt. Express 24, 8539–8549 (2016).
[Crossref]

S. Unsleber, D. P. S. McCutcheon, M. Dambach, M. Ermer, N. Gregersen, S. Höfling, J. Mørk, C. Schneider, and M. Kamp, “Two-photon interference from a quantum dot microcavity: Persistent pure dephasing and suppression of time jitter,” Phys. Rev. B 91, 075413 (2015).
[Crossref]

S. Maier, P. Gold, A. Forchel, N. Gregersen, J. Mørk, S. Höfling, C. Schneider, and M. Kamp, “Bright single photon source based on self-aligned quantum dot-cavity systems,” Opt. Express 22, 8136–8142 (2014).
[Crossref]

Y.-M. He, Y. He, Y.-J. Wei, D. Wu, M. Atature, C. Schneider, S. Höfling, M. Kamp, C.-Y. Lu, and J.-W. Pan, “On-demand semiconductor single-photon source with near-unity indistinguishability,” Nat. Nanotechnol. 8, 213–217 (2013).
[Crossref]

T. B. Hoang, J. Beetz, M. Lermer, L. Midolo, M. Kamp, S. Höfling, and A. Fiore, “Widely tunable, efficient on-chip single photon sources at telecommunication wavelengths,” Opt. Express 20, 21758–21765 (2012).
[Crossref]

J. Heinrich, A. Huggenberger, T. Heindel, S. Reitzenstein, S. Höfling, L. Worschech, and A. Forchel, “Single photon emission from positioned GaAs/AlGaAs photonic nanowires,” Appl. Phys. Lett. 96, 211117 (2010).
[Crossref]

C. Böckler, S. Reitzenstein, C. Kistner, R. Debusmann, A. Löffler, T. Kida, S. Höfling, A. Forchel, L. Grenouillet, J. Claudon, and J. M. Gérard, “Electrically driven high-q quantum dot-micropillar cavities,” Appl. Phys. Lett. 92, 091107 (2008).
[Crossref]

Hornecker, G.

N. Somaschi, V. Giesz, L. De Santis, J. C. Loredo, M. P. Almeida, G. Hornecker, S. L. Portalupi, T. Grange, C. Antón, J. Demory, C. Gómez, I. Sagnes, N. D. Lanzillotti-Kimura, A. Lemaítre, A. Auffeves, A. G. White, L. Lanco, and P. Senellart, “Near-optimal single-photon sources in the solid state,” Nat. Photonics 10, 340–345 (2016).
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M. Gschrey, A. Thoma, P. Schnauber, M. Seifried, R. Schmidt, B. Wohlfeil, L. Kruger, J. H. Schulze, T. Heindel, S. Burger, F. Schmidt, A. Strittmatter, S. Rodt, and S. Reitzenstein, “Highly indistinguishable photons from deterministic quantum-dot microlenses utilizing three-dimensional in situ electron-beam lithography,” Nat. Commun. 6, 7662 (2015).
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J. Heinrich, A. Huggenberger, T. Heindel, S. Reitzenstein, S. Höfling, L. Worschech, and A. Forchel, “Single photon emission from positioned GaAs/AlGaAs photonic nanowires,” Appl. Phys. Lett. 96, 211117 (2010).
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C. Schneider, A. Huggenberger, T. Sünner, T. Heindel, M. Strauß, S. Göpfert, P. Weinmann, S. Reitzenstein, L. Worschech, M. Kamp, S. Hofling, and A. Forchel, “Site-controlled In (Ga) As/GaAs quantum dots: Growth, properties and device integration,” Nanotechnology 20, 434021 (2009).
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C. Böckler, S. Reitzenstein, C. Kistner, R. Debusmann, A. Löffler, T. Kida, S. Höfling, A. Forchel, L. Grenouillet, J. Claudon, and J. M. Gérard, “Electrically driven high-q quantum dot-micropillar cavities,” Appl. Phys. Lett. 92, 091107 (2008).
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S. Varoutsis, S. Laurent, P. Kramper, A. Lematre, I. Sagnes, I. Robert-Philip, and I. Abram, “Restoration of photon indistinguishability in the emission of a semiconductor quantum dot,” Phys. Rev. B 72, 041303 (2005).
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A. Dousse, L. Lanco, J. Suffczyński, E. Semenova, A. Miard, A. Lemaître, I. Sagnes, C. Roblin, J. Bloch, and P. Senellart, “Controlled light-matter coupling for a single quantum dot embedded in a pillar microcavity using far-field optical lithography,” Phys. Rev. Lett. 101, 267404 (2008).
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M. Gschrey, A. Thoma, P. Schnauber, M. Seifried, R. Schmidt, B. Wohlfeil, L. Kruger, J. H. Schulze, T. Heindel, S. Burger, F. Schmidt, A. Strittmatter, S. Rodt, and S. Reitzenstein, “Highly indistinguishable photons from deterministic quantum-dot microlenses utilizing three-dimensional in situ electron-beam lithography,” Nat. Commun. 6, 7662 (2015).
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N. Somaschi, V. Giesz, L. De Santis, J. C. Loredo, M. P. Almeida, G. Hornecker, S. L. Portalupi, T. Grange, C. Antón, J. Demory, C. Gómez, I. Sagnes, N. D. Lanzillotti-Kimura, A. Lemaítre, A. Auffeves, A. G. White, L. Lanco, and P. Senellart, “Near-optimal single-photon sources in the solid state,” Nat. Photonics 10, 340–345 (2016).
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O. Gazzano, S. Michaelis de Vasconcellos, C. Arnold, A. Nowak, E. Galopin, I. Sagnes, L. Lanco, A. Lemaître, and P. Senellart, “Bright solid-state sources of indistinguishable single photons,” Nat. Commun. 4, 1425 (2013).
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A. Dousse, L. Lanco, J. Suffczyński, E. Semenova, A. Miard, A. Lemaître, I. Sagnes, C. Roblin, J. Bloch, and P. Senellart, “Controlled light-matter coupling for a single quantum dot embedded in a pillar microcavity using far-field optical lithography,” Phys. Rev. Lett. 101, 267404 (2008).
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S. Varoutsis, S. Laurent, P. Kramper, A. Lematre, I. Sagnes, I. Robert-Philip, and I. Abram, “Restoration of photon indistinguishability in the emission of a semiconductor quantum dot,” Phys. Rev. B 72, 041303 (2005).
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J. Nilsson, R. M. Stevenson, K. H. A. Chan, J. Skiba-Szymanska, M. Lucamarini, M. B. Ward, A. J. Bennett, C. L. Salter, I. Farrer, D. A. Ritchie, and A. J. Shields, “Quantum teleportation using a light-emitting diode,” Nat. Photonics 7, 311–315 (2013).
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M. Pelton, C. Santori, J. Vucković, B. Zhang, G. S. Solomon, J. Plant, and Y. Yamamoto, “Efficient source of single photons: A single quantum dot in a micropost microcavity,” Phys. Rev. Lett. 89, 233602 (2002).
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J. Liu, M. Davanco, L. Sapienza, K. Konthasinghe, J. D. Song, A. Badolato, and K. Srinivasan, “Cryogenic photoluminescence imaging system for nanoscale positioning of single quantum emitters,” Rev. Sci. Instrum. 88, 023116 (2017).
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L. Sapienza, M. Davanco, A. Badolato, and K. Srinivasan, “Nanoscale optical positioning of single quantum dots for bright and pure single-photon emission,” Nat. Commun. 6, 7833 (2015).
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M. Gschrey, A. Thoma, P. Schnauber, M. Seifried, R. Schmidt, B. Wohlfeil, L. Kruger, J. H. Schulze, T. Heindel, S. Burger, F. Schmidt, A. Strittmatter, S. Rodt, and S. Reitzenstein, “Highly indistinguishable photons from deterministic quantum-dot microlenses utilizing three-dimensional in situ electron-beam lithography,” Nat. Commun. 6, 7662 (2015).
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M. Gschrey, A. Thoma, P. Schnauber, M. Seifried, R. Schmidt, B. Wohlfeil, L. Kruger, J. H. Schulze, T. Heindel, S. Burger, F. Schmidt, A. Strittmatter, S. Rodt, and S. Reitzenstein, “Highly indistinguishable photons from deterministic quantum-dot microlenses utilizing three-dimensional in situ electron-beam lithography,” Nat. Commun. 6, 7662 (2015).
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M. Gschrey, A. Thoma, P. Schnauber, M. Seifried, R. Schmidt, B. Wohlfeil, L. Kruger, J. H. Schulze, T. Heindel, S. Burger, F. Schmidt, A. Strittmatter, S. Rodt, and S. Reitzenstein, “Highly indistinguishable photons from deterministic quantum-dot microlenses utilizing three-dimensional in situ electron-beam lithography,” Nat. Commun. 6, 7662 (2015).
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X. Ding, Y. He, Z. C. Duan, N. Gregersen, M.-C. Chen, S. Unsleber, S. Maier, C. Schneider, M. Kamp, S. Höfling, C.-Y. Lu, and J.-W. Pan, “On-demand single photons with high extraction efficiency and near-unity indistinguishability from a resonantly driven quantum dot in a micropillar,” Phys. Rev. Lett. 116, 020401 (2016).
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S. Unsleber, Y.-M. He, S. Gerhardt, S. Maier, C.-Y. Lu, J.-W. Pan, N. Gregersen, M. Kamp, C. Schneider, and S. Höfling, “Highly indistinguishable on-demand resonance fluorescence photons from a deterministic quantum dot micropillar device with 74% extraction efficiency,” Opt. Express 24, 8539–8549 (2016).
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S. Unsleber, D. P. S. McCutcheon, M. Dambach, M. Ermer, N. Gregersen, S. Höfling, J. Mørk, C. Schneider, and M. Kamp, “Two-photon interference from a quantum dot microcavity: Persistent pure dephasing and suppression of time jitter,” Phys. Rev. B 91, 075413 (2015).
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S. Maier, P. Gold, A. Forchel, N. Gregersen, J. Mørk, S. Höfling, C. Schneider, and M. Kamp, “Bright single photon source based on self-aligned quantum dot-cavity systems,” Opt. Express 22, 8136–8142 (2014).
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Y.-M. He, Y. He, Y.-J. Wei, D. Wu, M. Atature, C. Schneider, S. Höfling, M. Kamp, C.-Y. Lu, and J.-W. Pan, “On-demand semiconductor single-photon source with near-unity indistinguishability,” Nat. Nanotechnol. 8, 213–217 (2013).
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C. Schneider, A. Huggenberger, T. Sünner, T. Heindel, M. Strauß, S. Göpfert, P. Weinmann, S. Reitzenstein, L. Worschech, M. Kamp, S. Hofling, and A. Forchel, “Site-controlled In (Ga) As/GaAs quantum dots: Growth, properties and device integration,” Nanotechnology 20, 434021 (2009).
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M. Gschrey, A. Thoma, P. Schnauber, M. Seifried, R. Schmidt, B. Wohlfeil, L. Kruger, J. H. Schulze, T. Heindel, S. Burger, F. Schmidt, A. Strittmatter, S. Rodt, and S. Reitzenstein, “Highly indistinguishable photons from deterministic quantum-dot microlenses utilizing three-dimensional in situ electron-beam lithography,” Nat. Commun. 6, 7662 (2015).
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M. Gschrey, A. Thoma, P. Schnauber, M. Seifried, R. Schmidt, B. Wohlfeil, L. Kruger, J. H. Schulze, T. Heindel, S. Burger, F. Schmidt, A. Strittmatter, S. Rodt, and S. Reitzenstein, “Highly indistinguishable photons from deterministic quantum-dot microlenses utilizing three-dimensional in situ electron-beam lithography,” Nat. Commun. 6, 7662 (2015).
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A. Dousse, L. Lanco, J. Suffczyński, E. Semenova, A. Miard, A. Lemaître, I. Sagnes, C. Roblin, J. Bloch, and P. Senellart, “Controlled light-matter coupling for a single quantum dot embedded in a pillar microcavity using far-field optical lithography,” Phys. Rev. Lett. 101, 267404 (2008).
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N. Somaschi, V. Giesz, L. De Santis, J. C. Loredo, M. P. Almeida, G. Hornecker, S. L. Portalupi, T. Grange, C. Antón, J. Demory, C. Gómez, I. Sagnes, N. D. Lanzillotti-Kimura, A. Lemaítre, A. Auffeves, A. G. White, L. Lanco, and P. Senellart, “Near-optimal single-photon sources in the solid state,” Nat. Photonics 10, 340–345 (2016).
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O. Gazzano, S. Michaelis de Vasconcellos, C. Arnold, A. Nowak, E. Galopin, I. Sagnes, L. Lanco, A. Lemaître, and P. Senellart, “Bright solid-state sources of indistinguishable single photons,” Nat. Commun. 4, 1425 (2013).
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A. Dousse, L. Lanco, J. Suffczyński, E. Semenova, A. Miard, A. Lemaître, I. Sagnes, C. Roblin, J. Bloch, and P. Senellart, “Controlled light-matter coupling for a single quantum dot embedded in a pillar microcavity using far-field optical lithography,” Phys. Rev. Lett. 101, 267404 (2008).
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J. Nilsson, R. M. Stevenson, K. H. A. Chan, J. Skiba-Szymanska, M. Lucamarini, M. B. Ward, A. J. Bennett, C. L. Salter, I. Farrer, D. A. Ritchie, and A. J. Shields, “Quantum teleportation using a light-emitting diode,” Nat. Photonics 7, 311–315 (2013).
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M. Pelton, C. Santori, J. Vucković, B. Zhang, G. S. Solomon, J. Plant, and Y. Yamamoto, “Efficient source of single photons: A single quantum dot in a micropost microcavity,” Phys. Rev. Lett. 89, 233602 (2002).
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N. Somaschi, V. Giesz, L. De Santis, J. C. Loredo, M. P. Almeida, G. Hornecker, S. L. Portalupi, T. Grange, C. Antón, J. Demory, C. Gómez, I. Sagnes, N. D. Lanzillotti-Kimura, A. Lemaítre, A. Auffeves, A. G. White, L. Lanco, and P. Senellart, “Near-optimal single-photon sources in the solid state,” Nat. Photonics 10, 340–345 (2016).
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J. Liu, M. Davanco, L. Sapienza, K. Konthasinghe, J. D. Song, A. Badolato, and K. Srinivasan, “Cryogenic photoluminescence imaging system for nanoscale positioning of single quantum emitters,” Rev. Sci. Instrum. 88, 023116 (2017).
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M. Arcari, I. Söllner, A. Javadi, S. Lindskov Hansen, S. Mahmoodian, J. Liu, H. Thyrrestrup, E. H. Lee, J. D. Song, S. Stobbe, and P. Lodahl, “Near-unity coupling efficiency of a quantum emitter to a photonic crystal waveguide,” Phys. Rev. Lett. 113, 093603 (2014).
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J. Liu, M. Davanco, L. Sapienza, K. Konthasinghe, J. D. Song, A. Badolato, and K. Srinivasan, “Cryogenic photoluminescence imaging system for nanoscale positioning of single quantum emitters,” Rev. Sci. Instrum. 88, 023116 (2017).
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L. Sapienza, M. Davanco, A. Badolato, and K. Srinivasan, “Nanoscale optical positioning of single quantum dots for bright and pure single-photon emission,” Nat. Commun. 6, 7833 (2015).
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J. Nilsson, R. M. Stevenson, K. H. A. Chan, J. Skiba-Szymanska, M. Lucamarini, M. B. Ward, A. J. Bennett, C. L. Salter, I. Farrer, D. A. Ritchie, and A. J. Shields, “Quantum teleportation using a light-emitting diode,” Nat. Photonics 7, 311–315 (2013).
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M. Arcari, I. Söllner, A. Javadi, S. Lindskov Hansen, S. Mahmoodian, J. Liu, H. Thyrrestrup, E. H. Lee, J. D. Song, S. Stobbe, and P. Lodahl, “Near-unity coupling efficiency of a quantum emitter to a photonic crystal waveguide,” Phys. Rev. Lett. 113, 093603 (2014).
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C. Schneider, A. Huggenberger, T. Sünner, T. Heindel, M. Strauß, S. Göpfert, P. Weinmann, S. Reitzenstein, L. Worschech, M. Kamp, S. Hofling, and A. Forchel, “Site-controlled In (Ga) As/GaAs quantum dots: Growth, properties and device integration,” Nanotechnology 20, 434021 (2009).
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M. Gschrey, A. Thoma, P. Schnauber, M. Seifried, R. Schmidt, B. Wohlfeil, L. Kruger, J. H. Schulze, T. Heindel, S. Burger, F. Schmidt, A. Strittmatter, S. Rodt, and S. Reitzenstein, “Highly indistinguishable photons from deterministic quantum-dot microlenses utilizing three-dimensional in situ electron-beam lithography,” Nat. Commun. 6, 7662 (2015).
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A. Dousse, L. Lanco, J. Suffczyński, E. Semenova, A. Miard, A. Lemaître, I. Sagnes, C. Roblin, J. Bloch, and P. Senellart, “Controlled light-matter coupling for a single quantum dot embedded in a pillar microcavity using far-field optical lithography,” Phys. Rev. Lett. 101, 267404 (2008).
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C. Schneider, A. Huggenberger, T. Sünner, T. Heindel, M. Strauß, S. Göpfert, P. Weinmann, S. Reitzenstein, L. Worschech, M. Kamp, S. Hofling, and A. Forchel, “Site-controlled In (Ga) As/GaAs quantum dots: Growth, properties and device integration,” Nanotechnology 20, 434021 (2009).
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M. Gschrey, A. Thoma, P. Schnauber, M. Seifried, R. Schmidt, B. Wohlfeil, L. Kruger, J. H. Schulze, T. Heindel, S. Burger, F. Schmidt, A. Strittmatter, S. Rodt, and S. Reitzenstein, “Highly indistinguishable photons from deterministic quantum-dot microlenses utilizing three-dimensional in situ electron-beam lithography,” Nat. Commun. 6, 7662 (2015).
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C. P. Dietrich, A. Fiore, M. G. Thompson, M. Kamp, M. Kamp, and S. Höfling, “GaAs integrated quantum photonics: towards compact and multi-functional quantum photonic integrated circuits,” Laser Photon. Rev. 10, 870–894 (2016).
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S. M. Thon, M. T. Rakher, H. Kim, J. Gudat, W. M. Irvine, P. M. Petroff, and D. Bouwmeester, “Strong coupling through optical positioning of a quantum dot in a photonic crystal cavity,” Appl. Phys. Lett. 94, 111115 (2009).
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M. Arcari, I. Söllner, A. Javadi, S. Lindskov Hansen, S. Mahmoodian, J. Liu, H. Thyrrestrup, E. H. Lee, J. D. Song, S. Stobbe, and P. Lodahl, “Near-unity coupling efficiency of a quantum emitter to a photonic crystal waveguide,” Phys. Rev. Lett. 113, 093603 (2014).
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W. B. Gao, P. Fallahi, E. Togan, A. Delteil, Y. S. Chin, J. Miguel-Sanchez, and A. Imamoğlu, “Quantum teleportation from a propagating photon to a solid-state spin qubit,” Nat. Commun. 4, 2744 (2013).
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S. Unsleber, Y.-M. He, S. Gerhardt, S. Maier, C.-Y. Lu, J.-W. Pan, N. Gregersen, M. Kamp, C. Schneider, and S. Höfling, “Highly indistinguishable on-demand resonance fluorescence photons from a deterministic quantum dot micropillar device with 74% extraction efficiency,” Opt. Express 24, 8539–8549 (2016).
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X. Ding, Y. He, Z. C. Duan, N. Gregersen, M.-C. Chen, S. Unsleber, S. Maier, C. Schneider, M. Kamp, S. Höfling, C.-Y. Lu, and J.-W. Pan, “On-demand single photons with high extraction efficiency and near-unity indistinguishability from a resonantly driven quantum dot in a micropillar,” Phys. Rev. Lett. 116, 020401 (2016).
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S. Unsleber, D. P. S. McCutcheon, M. Dambach, M. Ermer, N. Gregersen, S. Höfling, J. Mørk, C. Schneider, and M. Kamp, “Two-photon interference from a quantum dot microcavity: Persistent pure dephasing and suppression of time jitter,” Phys. Rev. B 91, 075413 (2015).
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S. Varoutsis, S. Laurent, P. Kramper, A. Lematre, I. Sagnes, I. Robert-Philip, and I. Abram, “Restoration of photon indistinguishability in the emission of a semiconductor quantum dot,” Phys. Rev. B 72, 041303 (2005).
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M. E. Reimer, G. Bulgarini, N. Akopian, M. Hocevar, M. B. Bavinck, M. A. Verheijen, E. P. A. M. Bakkers, L. P. Kouwenhoven, and V. Zwiller, “Bright single-photon sources in bottom-up tailored nanowires,” Nat. Commun. 3, 737 (2012).
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M. Pelton, C. Santori, J. Vucković, B. Zhang, G. S. Solomon, J. Plant, and Y. Yamamoto, “Efficient source of single photons: A single quantum dot in a micropost microcavity,” Phys. Rev. Lett. 89, 233602 (2002).
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J. Nilsson, R. M. Stevenson, K. H. A. Chan, J. Skiba-Szymanska, M. Lucamarini, M. B. Ward, A. J. Bennett, C. L. Salter, I. Farrer, D. A. Ritchie, and A. J. Shields, “Quantum teleportation using a light-emitting diode,” Nat. Photonics 7, 311–315 (2013).
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W. L. Barnes, G. Björk, J. M. Gérard, P. Jonsson, J. A. E. Wasey, P. T. Worthing, and V. Zwiller, “Solid-state single photon sources: Light collection strategies,” Eur. Phys. J. D 18, 197–210 (2002).
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Y.-M. He, Y. He, Y.-J. Wei, D. Wu, M. Atature, C. Schneider, S. Höfling, M. Kamp, C.-Y. Lu, and J.-W. Pan, “On-demand semiconductor single-photon source with near-unity indistinguishability,” Nat. Nanotechnol. 8, 213–217 (2013).
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C. Schneider, A. Huggenberger, T. Sünner, T. Heindel, M. Strauß, S. Göpfert, P. Weinmann, S. Reitzenstein, L. Worschech, M. Kamp, S. Hofling, and A. Forchel, “Site-controlled In (Ga) As/GaAs quantum dots: Growth, properties and device integration,” Nanotechnology 20, 434021 (2009).
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N. Somaschi, V. Giesz, L. De Santis, J. C. Loredo, M. P. Almeida, G. Hornecker, S. L. Portalupi, T. Grange, C. Antón, J. Demory, C. Gómez, I. Sagnes, N. D. Lanzillotti-Kimura, A. Lemaítre, A. Auffeves, A. G. White, L. Lanco, and P. Senellart, “Near-optimal single-photon sources in the solid state,” Nat. Photonics 10, 340–345 (2016).
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M. Gschrey, A. Thoma, P. Schnauber, M. Seifried, R. Schmidt, B. Wohlfeil, L. Kruger, J. H. Schulze, T. Heindel, S. Burger, F. Schmidt, A. Strittmatter, S. Rodt, and S. Reitzenstein, “Highly indistinguishable photons from deterministic quantum-dot microlenses utilizing three-dimensional in situ electron-beam lithography,” Nat. Commun. 6, 7662 (2015).
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C. Schneider, A. Huggenberger, T. Sünner, T. Heindel, M. Strauß, S. Göpfert, P. Weinmann, S. Reitzenstein, L. Worschech, M. Kamp, S. Hofling, and A. Forchel, “Site-controlled In (Ga) As/GaAs quantum dots: Growth, properties and device integration,” Nanotechnology 20, 434021 (2009).
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W. L. Barnes, G. Björk, J. M. Gérard, P. Jonsson, J. A. E. Wasey, P. T. Worthing, and V. Zwiller, “Solid-state single photon sources: Light collection strategies,” Eur. Phys. J. D 18, 197–210 (2002).
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Y.-M. He, Y. He, Y.-J. Wei, D. Wu, M. Atature, C. Schneider, S. Höfling, M. Kamp, C.-Y. Lu, and J.-W. Pan, “On-demand semiconductor single-photon source with near-unity indistinguishability,” Nat. Nanotechnol. 8, 213–217 (2013).
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M. Pelton, C. Santori, J. Vucković, B. Zhang, G. S. Solomon, J. Plant, and Y. Yamamoto, “Efficient source of single photons: A single quantum dot in a micropost microcavity,” Phys. Rev. Lett. 89, 233602 (2002).
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Supplementary Material (1)

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Figures (5)

Fig. 1.
Fig. 1.

(a) Schematic of the photoluminescence imaging setup used for determining QD locations en route to deterministic micropillar single-photon source fabrication. Illumination of the alignment marks is done by a 730 nm LED, while the removal of the unwanted light entering the EMCCD camera is done through two notch filters (NFs) that block wavelengths between 810 and 880 nm and a long-pass filter (LPF) that removes wavelengths below 700 nm. (b) Image acquired using the original photoluminescence imaging setup configuration described in Refs. [14,30], in which the illumination LED is at 940 nm. (c) Image acquired using the modified setup depicted in (a). (d) Horizontal line cut through the image from (b), along the dashed red line. While the contrast between the QD emission and background level is high (central peak), the alignment mark contrast is limited. (e) Horizontal line cut through the image from (c), along the dashed red line. The modified imaging setup yields good contrast between the QD emission and background level as well as between the alignment marks and background signal level. The alignment mark separation is 52 μm in (b)–(e).

Fig. 2.
Fig. 2.

(a) Photoluminescence image for QD position extraction. The four alignment mark centers (center-to-center separation of 52 μm in both the horizontal and vertical directions) and the center of the field are denoted by the red crosses and star, respectively. (b) Processed image in which individual QDs are identified and numbered. (c) Photoluminescence image of a micropillar with a single QD in the center, produced by the QD positioning technique and subsequent fabrication using aligned e-beam lithography. (d) Spectra of QD 9 before (above) and after (below) fabrication of the micropillar.

Fig. 3.
Fig. 3.

(a) Temperature-dependent spectra of a micropillar with a diameter of d 2    μm under above bandgap excitation. A strong enhancement of the emission at spectral resonance due to the Purcell effect is observed. (b) Time-resolved measurements on and near resonance, revealing a dramatic reduction of the radiative lifetime. (c) A fit to the QD lifetime as a function of QD-cavity detuning yields a Purcell factor of F P = 7.8 ± 1.5 . The error bars in the lifetime data are determined from fitting a mono-exponential decay to the time-resolved measurement and are one standard deviation value. The uncertainty in the Purcell factor represents one standard deviation value and is estimated from a least squares fit to the data (solid red line in (c)) according to Eq. (1) in the main text.

Fig. 4.
Fig. 4.

(a) Measured count rate on the spectrometer versus the pulse area of the driving laser field for spectral resonance between the QD and cavity mode. (b) Second-order autocorrelation histogram for pulsed resonant excitation with a π -pulse. We extract a g ( 2 ) -value as low as g ( 2 ) ( 0 ) = 0.015 ± 0.009 .

Fig. 5.
Fig. 5.

(a) Unbalanced Mach–Zehnder interferometers with a path difference of 12.2 ns, used in characterizing the indistinguishability of single photons emitted by the QD-micropillar source. (b) Histogram of two-photon interference with the 12.2 ns delay time. Photons with parallel polarization are prepared here. The histogram was fitted by a sum of 7 two-sided exponential functions, each convoluted with a Gaussian distribution. (c) Extracted photon indistinguishability as a function of the pump power. An obvious power-related interference visibility decrease is revealed. (d) Measurement of the emission linewidth when the QD is on resonance with the micropillar mode and under continuous-wave, resonant laser excitation. A linewidth of 473    MHz ± 3.0    MHz is extracted from a Lorentzian fit to the data.

Equations (1)

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τ ( Δ ) = F P , Max. ( F P , Max. * δ + 1 ) * * ϵ 0 * V m 2 * Q * μ 12 2 ,

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