Abstract

Gallium arsenide and related compound semiconductors lie at the heart of optoelectronics and integrated laser technologies. Shaped at the micro- and nanoscale, they allow strong interaction with quantum dots and quantum wells, and promise stunning optically active devices. However, gallium arsenide optical structures presently exhibit lower performance than their passive counterparts based on silicon, notably in nanophotonics, where the surface plays a chief role. Here, we report on advanced surface control of miniature gallium arsenide optical resonators using two distinct techniques that produce permanent results. One extends the lifetime of free carriers and enhances luminescence, while the other strongly reduces surface absorption and enables ultra-low optical dissipation devices. With such surface control, the quality factor of wavelength-sized optical disk resonators is observed to rise up to 6×106 at the telecom wavelength, greatly surpassing previous realizations and opening new prospects for gallium arsenide nanophotonics.

© 2017 Optical Society of America

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2015 (4)

D. T. Nguyen, W. Hease, C. Baker, E. Gil-Santos, P. Senellart, A. Lemaître, S. Ducci, G. Leo, and I. Favero, New J. Phys. 17, 023016 (2015).
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J. Tatebayashi, S. Kako, J. Ho, Y. Ota, S. Iwamoto, and Y. Arakawa, Nat. Photonics 9, 501 (2015).
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2014 (4)

2013 (3)

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[Crossref]

P. S. Kuo, J. Bravo-Abad, and G. S. Solomon, Nat. Commun. 5, 3109 (2013).

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2012 (2)

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2011 (6)

Y. Taguchi, Y. Takahashi, Y. Sato, T. Asano, and S. Noda, Opt. Express 19, 11916 (2011).
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M. Bamba, A. Imamoğlu, I. Carusotto, and C. Ciuti, Phys. Rev. A 83, 021802(R) (2011).
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2010 (4)

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L. Ding, C. Baker, P. Senellart, A. Lemaître, S. Ducci, G. Leo, and I. Favero, Phys. Rev. Lett. 105, 263903 (2010).
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2008 (5)

S. Combrie, A. De Rossi, Q. V. Tran, and H. Benisty, Opt. Lett. 33, 1908 (2008).
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D. Bajoni, P. Senellart, E. Wertz, I. Sagnes, A. Miard, A. Lemaître, and J. Bloch, Phys. Rev. Lett. 100, 47401 (2008).
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A. Andronico, I. Favero, and G. Leo, Opt. Lett. 33, 2026 (2008).
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A. Andronico, X. Caillet, I. Favero, S. Ducci, V. Berger, and G. Leo, J. Eur. Opt. Soc. 3, 08030 (2008).

2007 (5)

V. L. Berkovits, D. Paget, A. N. Karpenko, V. P. Ulin, and O. E. Tereshchenko, Appl. Phys. Lett. 90, 022104 (2007).
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K. Srinivasan and O. Painter, Nature 450, 862 (2007).
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S. Reitzenstein, C. Hofmann, A. Gorbunov, M. Strauss, S. H. Kwon, C. Schneider, A. Löffler, S. Höfling, M. Kamp, and A. Forchel, App. Phys. Lett. 90, 251109 (2007).
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M. Borselli, T. J. Johnson, C. P. Michael, M. D. Henry, and O. Painter, Appl. Phys. Lett. 91, 131117 (2007).
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2006 (2)

M. Borselli, T. J. Johnson, and O. Painter, Appl. Phys. Lett. 88, 131114 (2006).
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A. Amo, M. D. Martín, L. Viña, A. I. Toropov, and K. S. Zhuravlev, Phys. Rev. B 73, 035205 (2006).
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2005 (2)

K. Srinivasan, M. Borselli, T. J. Johnson, P. E. Barclay, O. Painter, A. Stintz, and S. Krishna, Appl. Phys. Lett. 86, 151106 (2005).
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E. Peter, P. Senellart, D. Martrou, A. Lemaître, J. Hours, J. M. Gérard, and J. Bloch, Phys. Rev. Lett. 95, 067401 (2005).
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2003 (1)

S. M. Spillane, T. J. Kippenberg, O. J. Painter, and K. J. Vahala, Phys. Rev. Lett. 91, 043902 (2003).
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1994 (1)

U. Mohideen, W. S. Hobson, S. J. Pearton, F. Ren, and R. E. Slusher, Appl. Phys. Lett. 64, 1911 (1994).
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1991 (1)

R. Eccleston, R. Strobel, W. W. Rühle, J. Kuhl, B. F. Feuerbacher, and K. Ploog, Phys. Rev. B 44, 1395 (1991).
[Crossref]

Alasaarela, T.

Albert, F.

F. Albert, T. Braun, T. Heidel, C. Schneider, S. Reitzenstein, S. Höfling, L. Worschech, and A. Forchel, Appl. Phys. Lett. 97, 101108 (2010).
[Crossref]

Alloatti, L.

Amo, A.

A. Amo, M. D. Martín, L. Viña, A. I. Toropov, and K. S. Zhuravlev, Phys. Rev. B 73, 035205 (2006).
[Crossref]

Andronico, A.

S. Mariani, A. Andronico, A. Lemaître, I. Favero, S. Ducci, and G. Leo, Opt. Lett. 39, 3062 (2014).
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A. Andronico, I. Favero, and G. Leo, Opt. Lett. 33, 2026 (2008).
[Crossref]

A. Andronico, X. Caillet, I. Favero, S. Ducci, V. Berger, and G. Leo, J. Eur. Opt. Soc. 3, 08030 (2008).

J. C. L. Ding, C. Baker, A. Andronico, D. Parrain, P. Senellart, A. Lemaître, S. Ducci, G. Leo, and I. Favero, Handbook of Optical Microcavities (PanStanford, 2014).

Arakawa, Y.

J. Tatebayashi, S. Kako, J. Ho, Y. Ota, S. Iwamoto, and Y. Arakawa, Nat. Photonics 9, 501 (2015).
[Crossref]

A. Tandaechanurat, S. Ishida, D. Guimard, M. Nomura, S. Iwamoto, and Y. Arakawa, Nat. Photonics 5, 91 (2010).
[Crossref]

Arnold, C.

C. Arnold, V. Loo, A. Lemaître, I. Sagnes, O. Krebs, P. Voisin, P. Senellart, and L. Lanco, Appl. Phys. Lett. 100, 111111 (2012).
[Crossref]

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[Crossref]

Asano, T.

Baets, R.

Bajoni, D.

D. Bajoni, P. Senellart, E. Wertz, I. Sagnes, A. Miard, A. Lemaître, and J. Bloch, Phys. Rev. Lett. 100, 47401 (2008).
[Crossref]

Baker, C.

D. Parrain, C. Baker, G. Wang, B. Guha, E. Gil-Santos, A. Lemaître, P. Senellart, G. Leo, S. Ducci, and I. Favero, Opt. Express 23, 19656 (2015).
[Crossref]

D. T. Nguyen, W. Hease, C. Baker, E. Gil-Santos, P. Senellart, A. Lemaître, S. Ducci, G. Leo, and I. Favero, New J. Phys. 17, 023016 (2015).
[Crossref]

D. T. Nguyen, C. Baker, W. Hease, S. Sejil, P. Senellart, A. Lemaître, S. Ducci, G. Leo, and I. Favero, Appl. Phys. Lett. 103, 241112 (2013).
[Crossref]

L. Ding, C. Baker, P. Senellart, A. Lemaître, S. Ducci, G. Leo, and I. Favero, Phys. Rev. Lett. 105, 263903 (2010).
[Crossref]

J. C. L. Ding, C. Baker, A. Andronico, D. Parrain, P. Senellart, A. Lemaître, S. Ducci, G. Leo, and I. Favero, Handbook of Optical Microcavities (PanStanford, 2014).

Bamba, M.

M. Bamba, A. Imamoğlu, I. Carusotto, and C. Ciuti, Phys. Rev. A 83, 021802(R) (2011).
[Crossref]

Barclay, P. E.

K. Srinivasan, M. Borselli, T. J. Johnson, P. E. Barclay, O. Painter, A. Stintz, and S. Krishna, Appl. Phys. Lett. 86, 151106 (2005).
[Crossref]

Benisty, H.

Berger, V.

A. Andronico, X. Caillet, I. Favero, S. Ducci, V. Berger, and G. Leo, J. Eur. Opt. Soc. 3, 08030 (2008).

Berkovits, V. L.

V. L. Berkovits, D. Paget, A. N. Karpenko, V. P. Ulin, and O. E. Tereshchenko, Appl. Phys. Lett. 90, 022104 (2007).
[Crossref]

Bloch, J.

D. Bajoni, P. Senellart, E. Wertz, I. Sagnes, A. Miard, A. Lemaître, and J. Bloch, Phys. Rev. Lett. 100, 47401 (2008).
[Crossref]

E. Peter, P. Senellart, D. Martrou, A. Lemaître, J. Hours, J. M. Gérard, and J. Bloch, Phys. Rev. Lett. 95, 067401 (2005).
[Crossref]

Børkje, K.

A. Nunnenkamp, K. Børkje, and S. M. Girvin, Phys. Rev. Lett. 107, 063602 (2011).
[Crossref]

Borselli, M.

M. Borselli, T. J. Johnson, C. P. Michael, M. D. Henry, and O. Painter, Appl. Phys. Lett. 91, 131117 (2007).
[Crossref]

M. Borselli, T. J. Johnson, and O. Painter, Appl. Phys. Lett. 88, 131114 (2006).
[Crossref]

K. Srinivasan, M. Borselli, T. J. Johnson, P. E. Barclay, O. Painter, A. Stintz, and S. Krishna, Appl. Phys. Lett. 86, 151106 (2005).
[Crossref]

Braun, T.

F. Albert, T. Braun, T. Heidel, C. Schneider, S. Reitzenstein, S. Höfling, L. Worschech, and A. Forchel, Appl. Phys. Lett. 97, 101108 (2010).
[Crossref]

Bravo-Abad, J.

P. S. Kuo, J. Bravo-Abad, and G. S. Solomon, Nat. Commun. 5, 3109 (2013).

Caillet, X.

A. Andronico, X. Caillet, I. Favero, S. Ducci, V. Berger, and G. Leo, J. Eur. Opt. Soc. 3, 08030 (2008).

Carusotto, I.

M. Bamba, A. Imamoğlu, I. Carusotto, and C. Ciuti, Phys. Rev. A 83, 021802(R) (2011).
[Crossref]

Ciuti, C.

J. Restrepo, C. Ciuti, and I. Favero, Phys. Rev. Lett. 112, 013601 (2014).
[Crossref]

M. Bamba, A. Imamoğlu, I. Carusotto, and C. Ciuti, Phys. Rev. A 83, 021802(R) (2011).
[Crossref]

Combrie, S.

Combrié, S.

G. Moille, S. Combrié, L. Morgenroth, G. Lehoucq, F. Neuilly, B. Hu, D. Decoster, and A. de Rossi, Laser Photon. Rev. 10, 409 (2016).
[Crossref]

de Rossi, A.

G. Moille, S. Combrié, L. Morgenroth, G. Lehoucq, F. Neuilly, B. Hu, D. Decoster, and A. de Rossi, Laser Photon. Rev. 10, 409 (2016).
[Crossref]

S. Combrie, A. De Rossi, Q. V. Tran, and H. Benisty, Opt. Lett. 33, 1908 (2008).
[Crossref]

Decoster, D.

G. Moille, S. Combrié, L. Morgenroth, G. Lehoucq, F. Neuilly, B. Hu, D. Decoster, and A. de Rossi, Laser Photon. Rev. 10, 409 (2016).
[Crossref]

Ding, J. C. L.

J. C. L. Ding, C. Baker, A. Andronico, D. Parrain, P. Senellart, A. Lemaître, S. Ducci, G. Leo, and I. Favero, Handbook of Optical Microcavities (PanStanford, 2014).

Ding, L.

L. Ding, C. Baker, P. Senellart, A. Lemaître, S. Ducci, G. Leo, and I. Favero, Phys. Rev. Lett. 105, 263903 (2010).
[Crossref]

L. Ding, P. Senellart, A. Lemaître, S. Ducci, G. Leo, and I. Favero, Proc. SPIE 7712, 771211 (2010).
[Crossref]

Ducci, S.

D. T. Nguyen, W. Hease, C. Baker, E. Gil-Santos, P. Senellart, A. Lemaître, S. Ducci, G. Leo, and I. Favero, New J. Phys. 17, 023016 (2015).
[Crossref]

D. Parrain, C. Baker, G. Wang, B. Guha, E. Gil-Santos, A. Lemaître, P. Senellart, G. Leo, S. Ducci, and I. Favero, Opt. Express 23, 19656 (2015).
[Crossref]

S. Mariani, A. Andronico, A. Lemaître, I. Favero, S. Ducci, and G. Leo, Opt. Lett. 39, 3062 (2014).
[Crossref]

D. T. Nguyen, C. Baker, W. Hease, S. Sejil, P. Senellart, A. Lemaître, S. Ducci, G. Leo, and I. Favero, Appl. Phys. Lett. 103, 241112 (2013).
[Crossref]

L. Ding, P. Senellart, A. Lemaître, S. Ducci, G. Leo, and I. Favero, Proc. SPIE 7712, 771211 (2010).
[Crossref]

L. Ding, C. Baker, P. Senellart, A. Lemaître, S. Ducci, G. Leo, and I. Favero, Phys. Rev. Lett. 105, 263903 (2010).
[Crossref]

A. Andronico, X. Caillet, I. Favero, S. Ducci, V. Berger, and G. Leo, J. Eur. Opt. Soc. 3, 08030 (2008).

J. C. L. Ding, C. Baker, A. Andronico, D. Parrain, P. Senellart, A. Lemaître, S. Ducci, G. Leo, and I. Favero, Handbook of Optical Microcavities (PanStanford, 2014).

Eccleston, R.

R. Eccleston, R. Strobel, W. W. Rühle, J. Kuhl, B. F. Feuerbacher, and K. Ploog, Phys. Rev. B 44, 1395 (1991).
[Crossref]

Ellis, B.

B. Ellis, M. A. Mayer, G. Shambat, T. Sarmiento, J. Harris, E. E. Haller, and J. Vučković, Nat. Photonics 5, 297 (2011).
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B. Ellis, M. A. Mayer, G. Shambat, T. Sarmiento, J. Harris, E. E. Haller, and J. Vučković, Nat. Photonics 5, 297 (2011).
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Supplementary Material (1)

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Figures (5)

Fig. 1.
Fig. 1. Wet nitridation of GaAs disk resonators. (a) Electron micrograph of a GaAs disk sitting atop an AlGaAs pedestal. (b) Picture of the intra-gap states formed at the resonator’s surface, with arbitrary pinning of the Fermi level EF set on purpose for illustration. (c) Nitridation process: the surface reconstruction layer (SRL) is replaced by a monolayer of nitrogen atoms. (d) Room-temperature, time-resolved photoluminescence of a GaAs disk before and after nitridation. The decay is fitted by the sum of three exponentials. The intermediate decay, between vertical dashed lines, consistently slows down with nitridation.
Fig. 2.
Fig. 2. Effect of ALD surface treatment on the optical spectrum of a GaAs disk resonator. After removal of the surface reconstruction layer (SRL) and 20 nm alumina deposition in this example, WGM resonances are redshifted and narrowed, and new thin resonances appear with low contrast. The disk thickness (radius) is 200 nm (4.5 μm). All WGMs are TE polarized and identified in Supplement 1.
Fig. 3.
Fig. 3. Reduction of optical absorption by ALD passivation. (a) Selected WGM resonance (TE p=5) of a 4.5 μm radius GaAs disk, measured at low optical power before ALD, with FWHM of 84 pm. (b) Same resonance after ALD, with FWHM of 36 pm. The deposition is of 20 nm of alumina, which redshifted the resonance. This disk did not experience ammonia dip prior to ALD. (c, d) show another WGM resonance (TE p=3) on another disk of radius 3.4 μm, showing thermo-optical shift of (c) 1.914 nm before and (d) 261 pm after ALD with 30 nm of alumina. The blueshift is attributed to a combination of hydrogen plasma and ammonia dip prior to ALD (see Supplement 1).
Fig. 4.
Fig. 4. Modal dependence of the Q enhancement obtained by ALD. The enhancement of the loaded Ql is measured at constant contrast of the optical resonance as a function of the WGM radial number p and for two distinct wafers A (black) and B (red). All measured disks have same radius (thickness) of 4.5 μm (200 nm). All modes are TE, and typically show Qs in the 104to105 range (under-coupled). The ALD layer thickness is between 5 and 30 nm (see Supplement 1).
Fig. 5.
Fig. 5. GaAs disk WGM with a Q of 6×106. (a) Under-coupled optical spectrum of an ultra-high Q TE WGM (p=1) measured on a disk of radius (thickness) 4.5 μm (200 nm) treated by ALD. (b) Line width and resonant transmission of the WGM resonance as function of the fiber–resonator gap distance, showing intrinsic Q of 6×106.

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