Abstract

A two-dimensional superlattice metallic photonic crystal (PhC) and its fabrication by nanoimprint lithography on tantalum substrates are presented. The superior tailoring capacity of the superlattice PhC geometry is used to achieve spectrally selective solar absorption optimized for high-temperature and high-efficiency solar-energy-conversion applications. The scalable fabrication route by nanoimprint lithography allows for a high-throughput and high-resolution replication of this complex pattern over large areas. Despite the high fill factor, the pattern of polygonal cavities is accurately replicated into a resist that hardens under ultraviolet radiation over an area of 10mm2. In this way, cavities of 905 nm and 340 nm width are achieved with a period of 1 μm. After pattern transfer into tantalum via a deep reactive ion-etching process, the achieved cavities are 2.2 μm deep, separated by 85–95 nm wide ridges with vertical sidewalls. The room-temperature reflectance spectra of the fabricated samples show excellent agreement with simulated results, with a high spectral absorptance approaching blackbody absorption in the range from 300 to 1900 nm and a steep cutoff. The calculated solar absorptivity of this superlattice PhC is 96% and its thermal transfer efficiency is 82.8% at an operating temperature of 1500 K and an irradiance of 1000kW/m2.

© 2015 Optical Society of America

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2014 (3)

A. Lenert, D. M. Bierman, Y. Nam, W. R. Chan, I. Celanovic, M. Soljačić, and E. N. Wang, Nat. Nanotechnol. 9, 126 (2014).
[Crossref]

V. Rinnerbauer, A. Lenert, D. M. Bierman, Y. X. Yeng, W. R. Chan, R. D. Geil, J. J. Senkevich, J. D. Joannopoulos, E. N. Wang, M. Soljačić, and I. Celanovic, Adv. Energy Mater. 4, 1400334 (2014).
[Crossref]

V. Rinnerbauer, Y. Shen, J. Joannopoulos, M. Soljačić, F. Schäffler, and I. Celanovic, Opt. Express 22, A1895 (2014).
[Crossref]

2013 (4)

V. Rinnerbauer, Y. X. Yeng, W. R. Chan, J. J. Senkevich, J. D. Joannopoulos, M. Soljačić, and I. Celanovic, Opt. Express 21, 11482 (2013).
[Crossref]

A. Datas and C. Algora, Prog. Photovolt. Res. Appl. 21, 1040 (2013).

V. Rinnerbauer, S. Ndao, Y. X. Yeng, R. D. Geil, J. J. Senkevich, K. F. Jensen, J. D. Joannopoulos, M. Soljačić, and I. Celanovic, J. Vac. Sci. Technol. B 31, 011802 (2013).
[Crossref]

V. Stelmakh, V. Rinnerbauer, R. D. Geil, P. R. Aimone, J. J. Senkevich, J. D. Joannopoulos, M. Soljačić, and I. Celanovic, Appl. Phys. Lett. 103, 123903 (2013).
[Crossref]

2012 (3)

A. Datas and C. Algora, Prog. Photovolt. Res. Appl. 21, 1099 (2012).

Y. X. Yeng, M. Ghebrebrhan, P. Bermel, W. R. Chan, J. D. Joannopoulos, M. Soljačić, and I. Celanovic, Prog. Natl. Acad. Sci. USA 109, 2280 (2012).
[Crossref]

V. Liu and S. Fan, Comput. Phys. Commun. 183, 2233 (2012).
[Crossref]

2011 (3)

P. Nagpal, D. P. Josephson, N. R. Denny, J. DeWilde, D. J. Norris, and A. Stein, J. Mater. Chem. 21, 10836 (2011).
[Crossref]

K. A. Arpin, M. D. Losego, and P. Braun, Chem. Mater. 23, 4783 (2011).
[Crossref]

M. Araghchini, Y. X. Yeng, N. Jovanovic, P. Bermel, L. A. Kolodziejski, M. Soljačić, I. Celanovic, and J. D. Joannopoulos, J. Vac. Sci. Technol. B 29, 061402 (2011).
[Crossref]

2010 (2)

2009 (1)

2008 (4)

H. Schift, J. Vac. Sci. Technol. B 26, 458 (2008).
[Crossref]

I. Bergmair, M. Mühlberger, M. Gusenbauer, R. Schöftner, and K. Hingerl, Microelectron. Eng. 85, 822 (2008).
[Crossref]

I. Celanovic, N. Jovanovic, and J. Kassakian, Appl. Phys. Lett. 92, 193101 (2008).
[Crossref]

E. Rephaeli and S. Fan, Appl. Phys. Lett. 92, 211107 (2008).
[Crossref]

2003 (3)

C. Schlemmer, J. Aschaber, V. Boerner, and J. Luther, AIP Conf. Proc. 653, 164 (2003).
[Crossref]

H. Sai, Y. Kanamori, and H. Yugami, Appl. Phys. Lett. 82, 1685 (2003).
[Crossref]

N.-P. Harder and P. Würfel, Semicond. Sci. Technol. 18, S151 (2003).
[Crossref]

2002 (1)

J. G. Fleming, S. Y. Lin, I. El-Kady, R. Biswas, and K. M. Ho, Nature 417, 52 (2002).
[Crossref]

2000 (1)

A. Heinzel, V. Boerner, A. Gombert, B. Bläsi, V. Wittwer, and J. Luther, J. Mod. Opt. 47, 2399 (2000).
[Crossref]

1996 (1)

J. Haisma, M. Verheijen, K. van den Heuvel, and J. van den Berg, J. Vac. Sci. Technol. B 14, 4124 (1996).
[Crossref]

1995 (1)

S. Y. Chou, P. R. Krauss, and P. J. Renstrom, Appl. Phys. Lett. 67, 3114 (1995).
[Crossref]

1979 (1)

R. M. Swanson, Proc. IEEE 67, 446 (1979).

Aimone, P. R.

V. Stelmakh, V. Rinnerbauer, R. D. Geil, P. R. Aimone, J. J. Senkevich, J. D. Joannopoulos, M. Soljačić, and I. Celanovic, Appl. Phys. Lett. 103, 123903 (2013).
[Crossref]

Algora, C.

A. Datas and C. Algora, Prog. Photovolt. Res. Appl. 21, 1040 (2013).

A. Datas and C. Algora, Prog. Photovolt. Res. Appl. 21, 1099 (2012).

Araghchini, M.

M. Araghchini, Y. X. Yeng, N. Jovanovic, P. Bermel, L. A. Kolodziejski, M. Soljačić, I. Celanovic, and J. D. Joannopoulos, J. Vac. Sci. Technol. B 29, 061402 (2011).
[Crossref]

P. Bermel, M. Ghebrebrhan, W. Chan, Y. X. Yeng, M. Araghchini, R. Hamam, C. H. Marton, K. F. Jensen, M. Soljačić, J. D. Joannopoulos, S. G. Johnson, and I. Celanovic, Opt. Express 18, A314 (2010).
[Crossref]

Arpin, K. A.

K. A. Arpin, M. D. Losego, and P. Braun, Chem. Mater. 23, 4783 (2011).
[Crossref]

Aschaber, J.

C. Schlemmer, J. Aschaber, V. Boerner, and J. Luther, AIP Conf. Proc. 653, 164 (2003).
[Crossref]

Bergmair, I.

I. Bergmair, M. Mühlberger, M. Gusenbauer, R. Schöftner, and K. Hingerl, Microelectron. Eng. 85, 822 (2008).
[Crossref]

Bermel, P.

Y. X. Yeng, M. Ghebrebrhan, P. Bermel, W. R. Chan, J. D. Joannopoulos, M. Soljačić, and I. Celanovic, Prog. Natl. Acad. Sci. USA 109, 2280 (2012).
[Crossref]

M. Araghchini, Y. X. Yeng, N. Jovanovic, P. Bermel, L. A. Kolodziejski, M. Soljačić, I. Celanovic, and J. D. Joannopoulos, J. Vac. Sci. Technol. B 29, 061402 (2011).
[Crossref]

P. Bermel, M. Ghebrebrhan, W. Chan, Y. X. Yeng, M. Araghchini, R. Hamam, C. H. Marton, K. F. Jensen, M. Soljačić, J. D. Joannopoulos, S. G. Johnson, and I. Celanovic, Opt. Express 18, A314 (2010).
[Crossref]

A. F. Oskooi, D. Roundy, M. Ibanescu, P. Bermel, J. D. Joannopoulos, and S. G. Johnson, Comput. Phys. Commun. 181, 687 (2010).

Bierman, D. M.

A. Lenert, D. M. Bierman, Y. Nam, W. R. Chan, I. Celanovic, M. Soljačić, and E. N. Wang, Nat. Nanotechnol. 9, 126 (2014).
[Crossref]

V. Rinnerbauer, A. Lenert, D. M. Bierman, Y. X. Yeng, W. R. Chan, R. D. Geil, J. J. Senkevich, J. D. Joannopoulos, E. N. Wang, M. Soljačić, and I. Celanovic, Adv. Energy Mater. 4, 1400334 (2014).
[Crossref]

Biswas, R.

J. G. Fleming, S. Y. Lin, I. El-Kady, R. Biswas, and K. M. Ho, Nature 417, 52 (2002).
[Crossref]

Bläsi, B.

A. Heinzel, V. Boerner, A. Gombert, B. Bläsi, V. Wittwer, and J. Luther, J. Mod. Opt. 47, 2399 (2000).
[Crossref]

Boerner, V.

C. Schlemmer, J. Aschaber, V. Boerner, and J. Luther, AIP Conf. Proc. 653, 164 (2003).
[Crossref]

A. Heinzel, V. Boerner, A. Gombert, B. Bläsi, V. Wittwer, and J. Luther, J. Mod. Opt. 47, 2399 (2000).
[Crossref]

Braun, P.

K. A. Arpin, M. D. Losego, and P. Braun, Chem. Mater. 23, 4783 (2011).
[Crossref]

Celanovic, I.

A. Lenert, D. M. Bierman, Y. Nam, W. R. Chan, I. Celanovic, M. Soljačić, and E. N. Wang, Nat. Nanotechnol. 9, 126 (2014).
[Crossref]

V. Rinnerbauer, A. Lenert, D. M. Bierman, Y. X. Yeng, W. R. Chan, R. D. Geil, J. J. Senkevich, J. D. Joannopoulos, E. N. Wang, M. Soljačić, and I. Celanovic, Adv. Energy Mater. 4, 1400334 (2014).
[Crossref]

V. Rinnerbauer, Y. Shen, J. Joannopoulos, M. Soljačić, F. Schäffler, and I. Celanovic, Opt. Express 22, A1895 (2014).
[Crossref]

V. Rinnerbauer, Y. X. Yeng, W. R. Chan, J. J. Senkevich, J. D. Joannopoulos, M. Soljačić, and I. Celanovic, Opt. Express 21, 11482 (2013).
[Crossref]

V. Stelmakh, V. Rinnerbauer, R. D. Geil, P. R. Aimone, J. J. Senkevich, J. D. Joannopoulos, M. Soljačić, and I. Celanovic, Appl. Phys. Lett. 103, 123903 (2013).
[Crossref]

V. Rinnerbauer, S. Ndao, Y. X. Yeng, R. D. Geil, J. J. Senkevich, K. F. Jensen, J. D. Joannopoulos, M. Soljačić, and I. Celanovic, J. Vac. Sci. Technol. B 31, 011802 (2013).
[Crossref]

Y. X. Yeng, M. Ghebrebrhan, P. Bermel, W. R. Chan, J. D. Joannopoulos, M. Soljačić, and I. Celanovic, Prog. Natl. Acad. Sci. USA 109, 2280 (2012).
[Crossref]

M. Araghchini, Y. X. Yeng, N. Jovanovic, P. Bermel, L. A. Kolodziejski, M. Soljačić, I. Celanovic, and J. D. Joannopoulos, J. Vac. Sci. Technol. B 29, 061402 (2011).
[Crossref]

P. Bermel, M. Ghebrebrhan, W. Chan, Y. X. Yeng, M. Araghchini, R. Hamam, C. H. Marton, K. F. Jensen, M. Soljačić, J. D. Joannopoulos, S. G. Johnson, and I. Celanovic, Opt. Express 18, A314 (2010).
[Crossref]

I. Celanovic, N. Jovanovic, and J. Kassakian, Appl. Phys. Lett. 92, 193101 (2008).
[Crossref]

Chan, W.

Chan, W. R.

A. Lenert, D. M. Bierman, Y. Nam, W. R. Chan, I. Celanovic, M. Soljačić, and E. N. Wang, Nat. Nanotechnol. 9, 126 (2014).
[Crossref]

V. Rinnerbauer, A. Lenert, D. M. Bierman, Y. X. Yeng, W. R. Chan, R. D. Geil, J. J. Senkevich, J. D. Joannopoulos, E. N. Wang, M. Soljačić, and I. Celanovic, Adv. Energy Mater. 4, 1400334 (2014).
[Crossref]

V. Rinnerbauer, Y. X. Yeng, W. R. Chan, J. J. Senkevich, J. D. Joannopoulos, M. Soljačić, and I. Celanovic, Opt. Express 21, 11482 (2013).
[Crossref]

Y. X. Yeng, M. Ghebrebrhan, P. Bermel, W. R. Chan, J. D. Joannopoulos, M. Soljačić, and I. Celanovic, Prog. Natl. Acad. Sci. USA 109, 2280 (2012).
[Crossref]

Chou, S. Y.

S. Y. Chou, P. R. Krauss, and P. J. Renstrom, Appl. Phys. Lett. 67, 3114 (1995).
[Crossref]

Datas, A.

A. Datas and C. Algora, Prog. Photovolt. Res. Appl. 21, 1040 (2013).

A. Datas and C. Algora, Prog. Photovolt. Res. Appl. 21, 1099 (2012).

Denny, N. R.

P. Nagpal, D. P. Josephson, N. R. Denny, J. DeWilde, D. J. Norris, and A. Stein, J. Mater. Chem. 21, 10836 (2011).
[Crossref]

DeWilde, J.

P. Nagpal, D. P. Josephson, N. R. Denny, J. DeWilde, D. J. Norris, and A. Stein, J. Mater. Chem. 21, 10836 (2011).
[Crossref]

DeWitt, D. P.

Y. S. Touloukian and D. P. DeWitt, Thermophysical Properties of Matter (Plenum, 1970), Vol. 7.

El-Kady, I.

J. G. Fleming, S. Y. Lin, I. El-Kady, R. Biswas, and K. M. Ho, Nature 417, 52 (2002).
[Crossref]

Fan, S.

V. Liu and S. Fan, Comput. Phys. Commun. 183, 2233 (2012).
[Crossref]

E. Rephaeli and S. Fan, Opt. Express 17, 15145 (2009).
[Crossref]

E. Rephaeli and S. Fan, Appl. Phys. Lett. 92, 211107 (2008).
[Crossref]

Fleming, J. G.

J. G. Fleming, S. Y. Lin, I. El-Kady, R. Biswas, and K. M. Ho, Nature 417, 52 (2002).
[Crossref]

Geil, R. D.

V. Rinnerbauer, A. Lenert, D. M. Bierman, Y. X. Yeng, W. R. Chan, R. D. Geil, J. J. Senkevich, J. D. Joannopoulos, E. N. Wang, M. Soljačić, and I. Celanovic, Adv. Energy Mater. 4, 1400334 (2014).
[Crossref]

V. Stelmakh, V. Rinnerbauer, R. D. Geil, P. R. Aimone, J. J. Senkevich, J. D. Joannopoulos, M. Soljačić, and I. Celanovic, Appl. Phys. Lett. 103, 123903 (2013).
[Crossref]

V. Rinnerbauer, S. Ndao, Y. X. Yeng, R. D. Geil, J. J. Senkevich, K. F. Jensen, J. D. Joannopoulos, M. Soljačić, and I. Celanovic, J. Vac. Sci. Technol. B 31, 011802 (2013).
[Crossref]

Ghebrebrhan, M.

Y. X. Yeng, M. Ghebrebrhan, P. Bermel, W. R. Chan, J. D. Joannopoulos, M. Soljačić, and I. Celanovic, Prog. Natl. Acad. Sci. USA 109, 2280 (2012).
[Crossref]

P. Bermel, M. Ghebrebrhan, W. Chan, Y. X. Yeng, M. Araghchini, R. Hamam, C. H. Marton, K. F. Jensen, M. Soljačić, J. D. Joannopoulos, S. G. Johnson, and I. Celanovic, Opt. Express 18, A314 (2010).
[Crossref]

Gombert, A.

A. Heinzel, V. Boerner, A. Gombert, B. Bläsi, V. Wittwer, and J. Luther, J. Mod. Opt. 47, 2399 (2000).
[Crossref]

Gusenbauer, M.

I. Bergmair, M. Mühlberger, M. Gusenbauer, R. Schöftner, and K. Hingerl, Microelectron. Eng. 85, 822 (2008).
[Crossref]

Haisma, J.

J. Haisma, M. Verheijen, K. van den Heuvel, and J. van den Berg, J. Vac. Sci. Technol. B 14, 4124 (1996).
[Crossref]

Hamam, R.

Harder, N.-P.

N.-P. Harder and P. Würfel, Semicond. Sci. Technol. 18, S151 (2003).
[Crossref]

Heinzel, A.

A. Heinzel, V. Boerner, A. Gombert, B. Bläsi, V. Wittwer, and J. Luther, J. Mod. Opt. 47, 2399 (2000).
[Crossref]

Hingerl, K.

I. Bergmair, M. Mühlberger, M. Gusenbauer, R. Schöftner, and K. Hingerl, Microelectron. Eng. 85, 822 (2008).
[Crossref]

Ho, K. M.

J. G. Fleming, S. Y. Lin, I. El-Kady, R. Biswas, and K. M. Ho, Nature 417, 52 (2002).
[Crossref]

Ibanescu, M.

A. F. Oskooi, D. Roundy, M. Ibanescu, P. Bermel, J. D. Joannopoulos, and S. G. Johnson, Comput. Phys. Commun. 181, 687 (2010).

Jensen, K. F.

V. Rinnerbauer, S. Ndao, Y. X. Yeng, R. D. Geil, J. J. Senkevich, K. F. Jensen, J. D. Joannopoulos, M. Soljačić, and I. Celanovic, J. Vac. Sci. Technol. B 31, 011802 (2013).
[Crossref]

P. Bermel, M. Ghebrebrhan, W. Chan, Y. X. Yeng, M. Araghchini, R. Hamam, C. H. Marton, K. F. Jensen, M. Soljačić, J. D. Joannopoulos, S. G. Johnson, and I. Celanovic, Opt. Express 18, A314 (2010).
[Crossref]

Joannopoulos, J.

Joannopoulos, J. D.

V. Rinnerbauer, A. Lenert, D. M. Bierman, Y. X. Yeng, W. R. Chan, R. D. Geil, J. J. Senkevich, J. D. Joannopoulos, E. N. Wang, M. Soljačić, and I. Celanovic, Adv. Energy Mater. 4, 1400334 (2014).
[Crossref]

V. Rinnerbauer, Y. X. Yeng, W. R. Chan, J. J. Senkevich, J. D. Joannopoulos, M. Soljačić, and I. Celanovic, Opt. Express 21, 11482 (2013).
[Crossref]

V. Rinnerbauer, S. Ndao, Y. X. Yeng, R. D. Geil, J. J. Senkevich, K. F. Jensen, J. D. Joannopoulos, M. Soljačić, and I. Celanovic, J. Vac. Sci. Technol. B 31, 011802 (2013).
[Crossref]

V. Stelmakh, V. Rinnerbauer, R. D. Geil, P. R. Aimone, J. J. Senkevich, J. D. Joannopoulos, M. Soljačić, and I. Celanovic, Appl. Phys. Lett. 103, 123903 (2013).
[Crossref]

Y. X. Yeng, M. Ghebrebrhan, P. Bermel, W. R. Chan, J. D. Joannopoulos, M. Soljačić, and I. Celanovic, Prog. Natl. Acad. Sci. USA 109, 2280 (2012).
[Crossref]

M. Araghchini, Y. X. Yeng, N. Jovanovic, P. Bermel, L. A. Kolodziejski, M. Soljačić, I. Celanovic, and J. D. Joannopoulos, J. Vac. Sci. Technol. B 29, 061402 (2011).
[Crossref]

P. Bermel, M. Ghebrebrhan, W. Chan, Y. X. Yeng, M. Araghchini, R. Hamam, C. H. Marton, K. F. Jensen, M. Soljačić, J. D. Joannopoulos, S. G. Johnson, and I. Celanovic, Opt. Express 18, A314 (2010).
[Crossref]

A. F. Oskooi, D. Roundy, M. Ibanescu, P. Bermel, J. D. Joannopoulos, and S. G. Johnson, Comput. Phys. Commun. 181, 687 (2010).

Johnson, S. G.

Josephson, D. P.

P. Nagpal, D. P. Josephson, N. R. Denny, J. DeWilde, D. J. Norris, and A. Stein, J. Mater. Chem. 21, 10836 (2011).
[Crossref]

Jovanovic, N.

M. Araghchini, Y. X. Yeng, N. Jovanovic, P. Bermel, L. A. Kolodziejski, M. Soljačić, I. Celanovic, and J. D. Joannopoulos, J. Vac. Sci. Technol. B 29, 061402 (2011).
[Crossref]

I. Celanovic, N. Jovanovic, and J. Kassakian, Appl. Phys. Lett. 92, 193101 (2008).
[Crossref]

Kanamori, Y.

H. Sai, Y. Kanamori, and H. Yugami, Appl. Phys. Lett. 82, 1685 (2003).
[Crossref]

Kassakian, J.

I. Celanovic, N. Jovanovic, and J. Kassakian, Appl. Phys. Lett. 92, 193101 (2008).
[Crossref]

Kolodziejski, L. A.

M. Araghchini, Y. X. Yeng, N. Jovanovic, P. Bermel, L. A. Kolodziejski, M. Soljačić, I. Celanovic, and J. D. Joannopoulos, J. Vac. Sci. Technol. B 29, 061402 (2011).
[Crossref]

Krauss, P. R.

S. Y. Chou, P. R. Krauss, and P. J. Renstrom, Appl. Phys. Lett. 67, 3114 (1995).
[Crossref]

Lenert, A.

V. Rinnerbauer, A. Lenert, D. M. Bierman, Y. X. Yeng, W. R. Chan, R. D. Geil, J. J. Senkevich, J. D. Joannopoulos, E. N. Wang, M. Soljačić, and I. Celanovic, Adv. Energy Mater. 4, 1400334 (2014).
[Crossref]

A. Lenert, D. M. Bierman, Y. Nam, W. R. Chan, I. Celanovic, M. Soljačić, and E. N. Wang, Nat. Nanotechnol. 9, 126 (2014).
[Crossref]

Lin, S. Y.

J. G. Fleming, S. Y. Lin, I. El-Kady, R. Biswas, and K. M. Ho, Nature 417, 52 (2002).
[Crossref]

Liu, V.

V. Liu and S. Fan, Comput. Phys. Commun. 183, 2233 (2012).
[Crossref]

Losego, M. D.

K. A. Arpin, M. D. Losego, and P. Braun, Chem. Mater. 23, 4783 (2011).
[Crossref]

Luther, J.

C. Schlemmer, J. Aschaber, V. Boerner, and J. Luther, AIP Conf. Proc. 653, 164 (2003).
[Crossref]

A. Heinzel, V. Boerner, A. Gombert, B. Bläsi, V. Wittwer, and J. Luther, J. Mod. Opt. 47, 2399 (2000).
[Crossref]

Marton, C. H.

Mühlberger, M.

I. Bergmair, M. Mühlberger, M. Gusenbauer, R. Schöftner, and K. Hingerl, Microelectron. Eng. 85, 822 (2008).
[Crossref]

Nagpal, P.

P. Nagpal, D. P. Josephson, N. R. Denny, J. DeWilde, D. J. Norris, and A. Stein, J. Mater. Chem. 21, 10836 (2011).
[Crossref]

Nam, Y.

A. Lenert, D. M. Bierman, Y. Nam, W. R. Chan, I. Celanovic, M. Soljačić, and E. N. Wang, Nat. Nanotechnol. 9, 126 (2014).
[Crossref]

Ndao, S.

V. Rinnerbauer, S. Ndao, Y. X. Yeng, R. D. Geil, J. J. Senkevich, K. F. Jensen, J. D. Joannopoulos, M. Soljačić, and I. Celanovic, J. Vac. Sci. Technol. B 31, 011802 (2013).
[Crossref]

Norris, D. J.

P. Nagpal, D. P. Josephson, N. R. Denny, J. DeWilde, D. J. Norris, and A. Stein, J. Mater. Chem. 21, 10836 (2011).
[Crossref]

Oskooi, A. F.

A. F. Oskooi, D. Roundy, M. Ibanescu, P. Bermel, J. D. Joannopoulos, and S. G. Johnson, Comput. Phys. Commun. 181, 687 (2010).

Renstrom, P. J.

S. Y. Chou, P. R. Krauss, and P. J. Renstrom, Appl. Phys. Lett. 67, 3114 (1995).
[Crossref]

Rephaeli, E.

E. Rephaeli and S. Fan, Opt. Express 17, 15145 (2009).
[Crossref]

E. Rephaeli and S. Fan, Appl. Phys. Lett. 92, 211107 (2008).
[Crossref]

Rinnerbauer, V.

V. Rinnerbauer, Y. Shen, J. Joannopoulos, M. Soljačić, F. Schäffler, and I. Celanovic, Opt. Express 22, A1895 (2014).
[Crossref]

V. Rinnerbauer, A. Lenert, D. M. Bierman, Y. X. Yeng, W. R. Chan, R. D. Geil, J. J. Senkevich, J. D. Joannopoulos, E. N. Wang, M. Soljačić, and I. Celanovic, Adv. Energy Mater. 4, 1400334 (2014).
[Crossref]

V. Rinnerbauer, Y. X. Yeng, W. R. Chan, J. J. Senkevich, J. D. Joannopoulos, M. Soljačić, and I. Celanovic, Opt. Express 21, 11482 (2013).
[Crossref]

V. Stelmakh, V. Rinnerbauer, R. D. Geil, P. R. Aimone, J. J. Senkevich, J. D. Joannopoulos, M. Soljačić, and I. Celanovic, Appl. Phys. Lett. 103, 123903 (2013).
[Crossref]

V. Rinnerbauer, S. Ndao, Y. X. Yeng, R. D. Geil, J. J. Senkevich, K. F. Jensen, J. D. Joannopoulos, M. Soljačić, and I. Celanovic, J. Vac. Sci. Technol. B 31, 011802 (2013).
[Crossref]

Roundy, D.

A. F. Oskooi, D. Roundy, M. Ibanescu, P. Bermel, J. D. Joannopoulos, and S. G. Johnson, Comput. Phys. Commun. 181, 687 (2010).

Sai, H.

H. Sai, Y. Kanamori, and H. Yugami, Appl. Phys. Lett. 82, 1685 (2003).
[Crossref]

Schäffler, F.

Schift, H.

H. Schift, J. Vac. Sci. Technol. B 26, 458 (2008).
[Crossref]

Schlemmer, C.

C. Schlemmer, J. Aschaber, V. Boerner, and J. Luther, AIP Conf. Proc. 653, 164 (2003).
[Crossref]

Schöftner, R.

I. Bergmair, M. Mühlberger, M. Gusenbauer, R. Schöftner, and K. Hingerl, Microelectron. Eng. 85, 822 (2008).
[Crossref]

Senkevich, J. J.

V. Rinnerbauer, A. Lenert, D. M. Bierman, Y. X. Yeng, W. R. Chan, R. D. Geil, J. J. Senkevich, J. D. Joannopoulos, E. N. Wang, M. Soljačić, and I. Celanovic, Adv. Energy Mater. 4, 1400334 (2014).
[Crossref]

V. Rinnerbauer, Y. X. Yeng, W. R. Chan, J. J. Senkevich, J. D. Joannopoulos, M. Soljačić, and I. Celanovic, Opt. Express 21, 11482 (2013).
[Crossref]

V. Rinnerbauer, S. Ndao, Y. X. Yeng, R. D. Geil, J. J. Senkevich, K. F. Jensen, J. D. Joannopoulos, M. Soljačić, and I. Celanovic, J. Vac. Sci. Technol. B 31, 011802 (2013).
[Crossref]

V. Stelmakh, V. Rinnerbauer, R. D. Geil, P. R. Aimone, J. J. Senkevich, J. D. Joannopoulos, M. Soljačić, and I. Celanovic, Appl. Phys. Lett. 103, 123903 (2013).
[Crossref]

Shen, Y.

Soljacic, M.

V. Rinnerbauer, Y. Shen, J. Joannopoulos, M. Soljačić, F. Schäffler, and I. Celanovic, Opt. Express 22, A1895 (2014).
[Crossref]

A. Lenert, D. M. Bierman, Y. Nam, W. R. Chan, I. Celanovic, M. Soljačić, and E. N. Wang, Nat. Nanotechnol. 9, 126 (2014).
[Crossref]

V. Rinnerbauer, A. Lenert, D. M. Bierman, Y. X. Yeng, W. R. Chan, R. D. Geil, J. J. Senkevich, J. D. Joannopoulos, E. N. Wang, M. Soljačić, and I. Celanovic, Adv. Energy Mater. 4, 1400334 (2014).
[Crossref]

V. Rinnerbauer, Y. X. Yeng, W. R. Chan, J. J. Senkevich, J. D. Joannopoulos, M. Soljačić, and I. Celanovic, Opt. Express 21, 11482 (2013).
[Crossref]

V. Stelmakh, V. Rinnerbauer, R. D. Geil, P. R. Aimone, J. J. Senkevich, J. D. Joannopoulos, M. Soljačić, and I. Celanovic, Appl. Phys. Lett. 103, 123903 (2013).
[Crossref]

V. Rinnerbauer, S. Ndao, Y. X. Yeng, R. D. Geil, J. J. Senkevich, K. F. Jensen, J. D. Joannopoulos, M. Soljačić, and I. Celanovic, J. Vac. Sci. Technol. B 31, 011802 (2013).
[Crossref]

Y. X. Yeng, M. Ghebrebrhan, P. Bermel, W. R. Chan, J. D. Joannopoulos, M. Soljačić, and I. Celanovic, Prog. Natl. Acad. Sci. USA 109, 2280 (2012).
[Crossref]

M. Araghchini, Y. X. Yeng, N. Jovanovic, P. Bermel, L. A. Kolodziejski, M. Soljačić, I. Celanovic, and J. D. Joannopoulos, J. Vac. Sci. Technol. B 29, 061402 (2011).
[Crossref]

P. Bermel, M. Ghebrebrhan, W. Chan, Y. X. Yeng, M. Araghchini, R. Hamam, C. H. Marton, K. F. Jensen, M. Soljačić, J. D. Joannopoulos, S. G. Johnson, and I. Celanovic, Opt. Express 18, A314 (2010).
[Crossref]

Stein, A.

P. Nagpal, D. P. Josephson, N. R. Denny, J. DeWilde, D. J. Norris, and A. Stein, J. Mater. Chem. 21, 10836 (2011).
[Crossref]

Stelmakh, V.

V. Stelmakh, V. Rinnerbauer, R. D. Geil, P. R. Aimone, J. J. Senkevich, J. D. Joannopoulos, M. Soljačić, and I. Celanovic, Appl. Phys. Lett. 103, 123903 (2013).
[Crossref]

Swanson, R. M.

R. M. Swanson, Proc. IEEE 67, 446 (1979).

Touloukian, Y. S.

Y. S. Touloukian and D. P. DeWitt, Thermophysical Properties of Matter (Plenum, 1970), Vol. 7.

van den Berg, J.

J. Haisma, M. Verheijen, K. van den Heuvel, and J. van den Berg, J. Vac. Sci. Technol. B 14, 4124 (1996).
[Crossref]

van den Heuvel, K.

J. Haisma, M. Verheijen, K. van den Heuvel, and J. van den Berg, J. Vac. Sci. Technol. B 14, 4124 (1996).
[Crossref]

Verheijen, M.

J. Haisma, M. Verheijen, K. van den Heuvel, and J. van den Berg, J. Vac. Sci. Technol. B 14, 4124 (1996).
[Crossref]

Wang, E. N.

V. Rinnerbauer, A. Lenert, D. M. Bierman, Y. X. Yeng, W. R. Chan, R. D. Geil, J. J. Senkevich, J. D. Joannopoulos, E. N. Wang, M. Soljačić, and I. Celanovic, Adv. Energy Mater. 4, 1400334 (2014).
[Crossref]

A. Lenert, D. M. Bierman, Y. Nam, W. R. Chan, I. Celanovic, M. Soljačić, and E. N. Wang, Nat. Nanotechnol. 9, 126 (2014).
[Crossref]

Wittwer, V.

A. Heinzel, V. Boerner, A. Gombert, B. Bläsi, V. Wittwer, and J. Luther, J. Mod. Opt. 47, 2399 (2000).
[Crossref]

Würfel, P.

N.-P. Harder and P. Würfel, Semicond. Sci. Technol. 18, S151 (2003).
[Crossref]

Yeng, Y. X.

V. Rinnerbauer, A. Lenert, D. M. Bierman, Y. X. Yeng, W. R. Chan, R. D. Geil, J. J. Senkevich, J. D. Joannopoulos, E. N. Wang, M. Soljačić, and I. Celanovic, Adv. Energy Mater. 4, 1400334 (2014).
[Crossref]

V. Rinnerbauer, Y. X. Yeng, W. R. Chan, J. J. Senkevich, J. D. Joannopoulos, M. Soljačić, and I. Celanovic, Opt. Express 21, 11482 (2013).
[Crossref]

V. Rinnerbauer, S. Ndao, Y. X. Yeng, R. D. Geil, J. J. Senkevich, K. F. Jensen, J. D. Joannopoulos, M. Soljačić, and I. Celanovic, J. Vac. Sci. Technol. B 31, 011802 (2013).
[Crossref]

Y. X. Yeng, M. Ghebrebrhan, P. Bermel, W. R. Chan, J. D. Joannopoulos, M. Soljačić, and I. Celanovic, Prog. Natl. Acad. Sci. USA 109, 2280 (2012).
[Crossref]

M. Araghchini, Y. X. Yeng, N. Jovanovic, P. Bermel, L. A. Kolodziejski, M. Soljačić, I. Celanovic, and J. D. Joannopoulos, J. Vac. Sci. Technol. B 29, 061402 (2011).
[Crossref]

P. Bermel, M. Ghebrebrhan, W. Chan, Y. X. Yeng, M. Araghchini, R. Hamam, C. H. Marton, K. F. Jensen, M. Soljačić, J. D. Joannopoulos, S. G. Johnson, and I. Celanovic, Opt. Express 18, A314 (2010).
[Crossref]

Yugami, H.

H. Sai, Y. Kanamori, and H. Yugami, Appl. Phys. Lett. 82, 1685 (2003).
[Crossref]

Adv. Energy Mater. (1)

V. Rinnerbauer, A. Lenert, D. M. Bierman, Y. X. Yeng, W. R. Chan, R. D. Geil, J. J. Senkevich, J. D. Joannopoulos, E. N. Wang, M. Soljačić, and I. Celanovic, Adv. Energy Mater. 4, 1400334 (2014).
[Crossref]

AIP Conf. Proc. (1)

C. Schlemmer, J. Aschaber, V. Boerner, and J. Luther, AIP Conf. Proc. 653, 164 (2003).
[Crossref]

Appl. Phys. Lett. (5)

H. Sai, Y. Kanamori, and H. Yugami, Appl. Phys. Lett. 82, 1685 (2003).
[Crossref]

I. Celanovic, N. Jovanovic, and J. Kassakian, Appl. Phys. Lett. 92, 193101 (2008).
[Crossref]

E. Rephaeli and S. Fan, Appl. Phys. Lett. 92, 211107 (2008).
[Crossref]

V. Stelmakh, V. Rinnerbauer, R. D. Geil, P. R. Aimone, J. J. Senkevich, J. D. Joannopoulos, M. Soljačić, and I. Celanovic, Appl. Phys. Lett. 103, 123903 (2013).
[Crossref]

S. Y. Chou, P. R. Krauss, and P. J. Renstrom, Appl. Phys. Lett. 67, 3114 (1995).
[Crossref]

Chem. Mater. (1)

K. A. Arpin, M. D. Losego, and P. Braun, Chem. Mater. 23, 4783 (2011).
[Crossref]

Comput. Phys. Commun. (2)

V. Liu and S. Fan, Comput. Phys. Commun. 183, 2233 (2012).
[Crossref]

A. F. Oskooi, D. Roundy, M. Ibanescu, P. Bermel, J. D. Joannopoulos, and S. G. Johnson, Comput. Phys. Commun. 181, 687 (2010).

J. Mater. Chem. (1)

P. Nagpal, D. P. Josephson, N. R. Denny, J. DeWilde, D. J. Norris, and A. Stein, J. Mater. Chem. 21, 10836 (2011).
[Crossref]

J. Mod. Opt. (1)

A. Heinzel, V. Boerner, A. Gombert, B. Bläsi, V. Wittwer, and J. Luther, J. Mod. Opt. 47, 2399 (2000).
[Crossref]

J. Vac. Sci. Technol. B (4)

M. Araghchini, Y. X. Yeng, N. Jovanovic, P. Bermel, L. A. Kolodziejski, M. Soljačić, I. Celanovic, and J. D. Joannopoulos, J. Vac. Sci. Technol. B 29, 061402 (2011).
[Crossref]

V. Rinnerbauer, S. Ndao, Y. X. Yeng, R. D. Geil, J. J. Senkevich, K. F. Jensen, J. D. Joannopoulos, M. Soljačić, and I. Celanovic, J. Vac. Sci. Technol. B 31, 011802 (2013).
[Crossref]

J. Haisma, M. Verheijen, K. van den Heuvel, and J. van den Berg, J. Vac. Sci. Technol. B 14, 4124 (1996).
[Crossref]

H. Schift, J. Vac. Sci. Technol. B 26, 458 (2008).
[Crossref]

Microelectron. Eng. (1)

I. Bergmair, M. Mühlberger, M. Gusenbauer, R. Schöftner, and K. Hingerl, Microelectron. Eng. 85, 822 (2008).
[Crossref]

Nat. Nanotechnol. (1)

A. Lenert, D. M. Bierman, Y. Nam, W. R. Chan, I. Celanovic, M. Soljačić, and E. N. Wang, Nat. Nanotechnol. 9, 126 (2014).
[Crossref]

Nature (1)

J. G. Fleming, S. Y. Lin, I. El-Kady, R. Biswas, and K. M. Ho, Nature 417, 52 (2002).
[Crossref]

Opt. Express (4)

Proc. IEEE (1)

R. M. Swanson, Proc. IEEE 67, 446 (1979).

Prog. Natl. Acad. Sci. USA (1)

Y. X. Yeng, M. Ghebrebrhan, P. Bermel, W. R. Chan, J. D. Joannopoulos, M. Soljačić, and I. Celanovic, Prog. Natl. Acad. Sci. USA 109, 2280 (2012).
[Crossref]

Prog. Photovolt. Res. Appl. (2)

A. Datas and C. Algora, Prog. Photovolt. Res. Appl. 21, 1040 (2013).

A. Datas and C. Algora, Prog. Photovolt. Res. Appl. 21, 1099 (2012).

Semicond. Sci. Technol. (1)

N.-P. Harder and P. Würfel, Semicond. Sci. Technol. 18, S151 (2003).
[Crossref]

Other (1)

Y. S. Touloukian and D. P. DeWitt, Thermophysical Properties of Matter (Plenum, 1970), Vol. 7.

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Figures (4)

Fig. 1.
Fig. 1.

(a) Layout of the superlattice PhC with period a = 1 μm , octagon width w 1 = 0.905 μm , and square side length w 2 = 0.34 μm . (b) Schematic view of the UV-NIL process with a flexible stamp (not to scale). (c) Scanning electron micrograph of the Si template. (d) Flexible stamp: Ormostamp on a 150 μm thin glass slide. (e) and (f) PhC imprinted into the resist layer, with residual resist layer. (g) and (h) PhC etched into the SiO 2 mask layer, with remaining resist on top. Cross-sections were taken from Si test samples.

Fig. 2.
Fig. 2.

Scanning electron micrograph of the fabricated superlattice PhC etched 2.2 μm deep into the Ta substrate.

Fig. 3.
Fig. 3.

Simulated spectral normal absorptance of the optimized superlattice PhC (blue, dashed line) as compared to the solar spectrum (AM1.5D, normalized, green solid line) and the spectral hemispherical emission at 1500 K of the superlattice PhC (red, dashed–dotted) compared to blackbody emission at 1500 K (black, dotted, normalized).

Fig. 4.
Fig. 4.

Absorptance spectra derived from the reflectance measured at room temperature (blue solid line) compared to simulation for a PhC with period a = 1.0 μm , widths w 1 = 0.905 μm and w 2 = 0.34 μm , etching depth d = 2.2 μm , and d ( HfO 2 ) = 40 nm (red dashed line) and flat Ta (light blue dotted line).

Equations (3)

Equations on this page are rendered with MathJax. Learn more.

η T = α ¯ ε ¯ · σ T 4 H s ,
α ¯ = 1 H s 0 d λ ε ( λ ) S s ( λ ) ,
ε ¯ = 0 d λ ε ( λ ) / { λ 5 ( e h c λ k T 1 ) } 0 d λ / { λ 5 ( e h c λ k T 1 ) } ,

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