Large-scale silicon photonic switches with movable directional couplers

Sangyoon Han; Tae Joon Seok; Niels Quack; Byung-Wook Yoo; Ming C. Wu

doi:10.1364/OPTICA.2.000370

Large-scale silicon photonic switches with movable directional couplers

Sangyoon Han, Tae Joon Seok, Niels Quack, Byung-Wook Yoo, and Ming C. Wu

Optica
Vol. 2,
Issue 4,
pp. 370-375
(2015)
•https://doi.org/10.1364/OPTICA.2.000370

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Sangyoon Han, Tae Joon Seok, Niels Quack, Byung-Wook Yoo, and Ming C. Wu, "Large-scale silicon photonic switches with movable directional couplers," Optica 2, 370-375 (2015)

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Related Topics
Optics & Photonics Topics
?

The topics in this list come from the OSA Optics and Photonics Topics applied to this article.
Previously assigned OCIS codes
- Optical switching devices (130.4815)
- Photonic integrated circuits (250.5300)

About this Article
History
- Original Manuscript: February 4, 2015
- Revised Manuscript: March 19, 2015
- Manuscript Accepted: March 24, 2015
- Published: April 15, 2015

Accessible

Open Access

Abstract

Fast optical circuit switches (OCSs) with high port count offer reconfigurable bandwidth in optical networks and have the potential to significantly increase the performance and efficiency of modern datacenters. In this paper, we report on a new type of integrated OCS that combines silicon photonics with MEMS actuation. The switch is built on a $50 \times 50$ passive crossbar network with very low optical loss (0.04 dB/crossing). Efficient switching is achieved by a pair of directional couplers with moving waveguides and an actuation voltage of 14 V. 2500 MEMS-actuated directional coupler switches have been integrated with the crossbar network to form a strictly nonblocking $50 \times 50$ OCS on a $9 mm \times 9 mm$ chip. The measured switching time is 2.5 μs, and the extinction ratio is 26 dB. To our knowledge, this is the largest silicon photonic switch reported to date. The switch architecture is highly scalable because the light travels through only one active switching element, regardless of the size of the switch.

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References

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Publication

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[Crossref]
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[Crossref]
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X. Zheng, V. Kaman, S. Yuan, Y. Xu, O. Jerphagnon, A. Keating, R. C. Anderson, H. N. Poulsen, B. Liu, J. R. Sechrist, C. Pusarla, R. Helkey, D. J. Blumenthal, J. E. Bowers, “Three-dimensional MEMS photonic cross-connect switch design and performance,” IEEE J. Sel. Top. Quantum Electron. 9, 571–578 (2003).
[Crossref]
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[Crossref]
G. Porter, R. Strong, N. Farrington, A. Forencich, P. Chen-Sun, T. Rosing, Y. Fainman, G. Papen, A. Vahdat, “Integrating microsecond circuit switching into the data center,” ACM SIGCOMM Comput. Commun. Rev. 43, 447–458 (2013).
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[Crossref]
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[Crossref]
K. Suzuki, K. Tanizawa, T. Matsukawa, G. Cong, S. H. Kim, S. Suda, M. Ohno, T. Chiba, H. Tadokoro, M. Yanagihara, Y. Igarashi, M. Masahara, S. Namiki, H. Kawashima, “Ultra-compact 8 × 8 strictly-non-blocking Si-wire PILOSS switch,” Opt. Express 22, 3887–3894 (2014).
[Crossref]
G. W. Cong, T. Matsukawa, T. Chiba, H. Tadokoro, M. Yanagihara, M. Ohno, H. Kawashima, H. Kuwatsuka, Y. Igarashi, M. Masahara, H. Ishikawa, “Large current MOSFET on photonic silicon-on-insulator wafers and its monolithic integration with a thermo-optic 2 × 2 Mach-Zehnder switch,” Opt. Express 21, 6889–6894 (2013).
[Crossref]
M. Yang, W. M. J. Green, S. Assefa, J. Van Campenhout, B. G. Lee, C. V. Jahnes, F. E. Doany, C. L. Schow, J. A. Kash, Y. A. Vlasov, “Non-blocking 4 × 4 electro-optic silicon switch for on-chip photonic networks,” Opt. Express 19, 47–54 (2011).
[Crossref]
J. Van Campenhout, W. M. J. Green, S. Assefa, Y. A. Vlasov, “Low-power, 2 × 2 silicon electro-optic switch with 110-nm bandwidth for broadband reconfigurable optical networks,” Opt. Express 17, 24020–24029 (2009).
[Crossref]
A. V. Rylyakov, C. L. Schow, B. G. Lee, W. M. J. Green, S. Assefa, F. E. Doany, M. Yang, J. Van Campenhout, C. V. Jahnes, J. A. Kash, Y. A. Vlasov, “Silicon photonic switches hybrid-integrated with CMOS drivers,” IEEE J. Solid-State Circuits 47, 345–354 (2012).
[Crossref]
B. G. Lee, A. V. Rylyakov, W. M. J. Green, S. Assefa, C. W. Baks, R. Rimolo-donadio, D. M. Kuchta, M. H. Khater, T. Barwicz, C. Reinholm, E. Kiewra, S. M. Shank, C. L. Schow, Y. A. Vlasov, “Monolithic silicon integration of scaled photonic switch fabrics, CMOS logic, and device driver circuits,” J. Lightwave Technol. 32, 743–751 (2014).
[Crossref]
E. Ollier, “Optical MEMS devices based on moving waveguides,” IEEE J. Sel. Top. Quantum Electron. 8, 155–162 (2002).
[Crossref]
T. Bakke, C. P. Tigges, J. J. Lean, C. T. Sullivan, O. B. Spahn, “Planar microoptomechanical waveguide switches,” IEEE J. Sel. Top. Quantum Electron. 8, 64–72 (2002).
[Crossref]
M. W. Pruessner, K. Amarnath, M. Datta, D. P. Kelly, S. Kanakaraju, P. Ho, R. Ghodssi, “InP-based optical waveguide MEMS switches with evanescent coupling mechanism,” J. Microelectromech. Syst. 14, 1070–1081 (2005).
[Crossref]
J. Yao, D. Leuenberger, M. C. M. Lee, M. C. Wu, “Silicon microtoroidal resonators with integrated MEMS tunable coupler,” IEEE J. Sel. Top. Quantum Electron. 13, 202–208 (2007).
[Crossref]
M. C. M. Lee, M. C. Wu, “Tunable coupling regimes of silicon microdisk resonators using MEMS actuators,” Opt. Express 14, 4703–4712 (2006).
[Crossref]
M. C. M. Lee, M. C. Wu, “MEMS-actuated microdisk resonators with variable power coupling ratios,” IEEE Photon. Technol. Lett. 17, 1034–1036 (2005).
[Crossref]
J. Yao, M. C. Wu, “Bandwidth-tunable add-drop filters based on micro-electro-mechanical-system actuated silicon microtoroidal resonators,” Opt. Lett. 34, 2557–2559 (2009).
[Crossref]
G. J. Veldhuis, T. Nauta, C. Gui, J. W. Berenschot, P. V. Lambeck, “Electrostatically actuated mechanooptical waveguide ON-OFF switch showing high extinction at a low actuation-voltage,” IEEE J. Sel. Top. Quantum Electron. 5, 60–66 (1999).
[Crossref]
F. Chollet, M. de Labachelerie, H. Fujita, “Compact evanescent optical switch and attenuator with electromechanical actuation,” IEEE J. Sel. Top. Quantum Electron. 5, 52–59 (1999).
[Crossref]
E. Bulgan, Y. Kanamori, K. Hane, “Submicron silicon waveguide optical switch driven by microelectromechanical actuator,” Appl. Phys. Lett. 92, 101110 (2008).
[Crossref]
S. Abe, K. Hane, “Variable-gap silicon photonic waveguide coupler switch with a nanolatch mechanism,” IEEE Photon. Technol. Lett. 25, 675–677 (2013).
[Crossref]
Y. Munemasa, K. Hane, “A compact 1 × 3 silicon shotonic waveguide switch based on precise investigation of coupling characteristics of variable-gap coupler,” Jpn. J. Appl. Phys. 52, 06GL15 (2013).
[Crossref]
Y. Akihama, K. Hane, “Single and multiple optical switches that use freestanding silicon nanowire waveguide couplers,” Light Sci. Appl. 1, e16 (2012).
[Crossref]
M. C. Wu, O. Solgaard, J. E. Ford, “Optical MEMS for lightwave communication,” J. Lightwave Technol. 24, 4433–4454 (2006).
[Crossref]
R. T. Chen, H. Nguyen, M. C. Wu, “A high-speed low-voltage stress-induced micromachined 2 × 2 optical switch,” IEEE Photon. Technol. Lett. 11, 1396–1398 (1999).
[Crossref]
W. Young, R. Budynas, A. Sadegh, Roark’s Formulas for Stress and Strain, 8th ed. (McGraw-Hill, 2011).
G. J. O. Brien, D. J. Monk, L. Lin, “MEMS cantilever beam electrostatic pull-in model,” Proc. SPIE 4593, 31–41 (2001).
[Crossref]
T. K. Chan, M. Megens, B. W. Yoo, J. Wyras, C. J. Chang-Hasnain, M. C. Wu, D. A. Horsley, “Optical beamsteering using an 8 × 8 MEMS phased array with closed-loop interferometric phase control,” Opt. Express 21, 2807–2815 (2013).
[Crossref]
S. T. S. Cheung, B. Guan, S. S. Djordjevic, K. Okamoto, S. J. B. Yoo, “Low-loss and high contrast silicon-on-insulator (SOI) arrayed waveguide grating,” in Conference on Lasers and Electro-Optics (Optical Society of America, 2012), paper CM4A.5.
S. K. Selvaraja, W. Bogaerts, D. Van Thourhout, “Loss reduction in silicon nanophotonic waveguide micro-bends through etch profile improvement,” Opt. Commun. 284, 2141–2144 (2011).
[Crossref]

2014 (2)

B. G. Lee, A. V. Rylyakov, W. M. J. Green, S. Assefa, C. W. Baks, R. Rimolo-donadio, D. M. Kuchta, M. H. Khater, T. Barwicz, C. Reinholm, E. Kiewra, S. M. Shank, C. L. Schow, Y. A. Vlasov, “Monolithic silicon integration of scaled photonic switch fabrics, CMOS logic, and device driver circuits,” J. Lightwave Technol. 32, 743–751 (2014).
[Crossref]

K. Suzuki, K. Tanizawa, T. Matsukawa, G. Cong, S. H. Kim, S. Suda, M. Ohno, T. Chiba, H. Tadokoro, M. Yanagihara, Y. Igarashi, M. Masahara, S. Namiki, H. Kawashima, “Ultra-compact 8 × 8 strictly-non-blocking Si-wire PILOSS switch,” Opt. Express 22, 3887–3894 (2014).
[Crossref]

2013 (5)

T. K. Chan, M. Megens, B. W. Yoo, J. Wyras, C. J. Chang-Hasnain, M. C. Wu, D. A. Horsley, “Optical beamsteering using an 8 × 8 MEMS phased array with closed-loop interferometric phase control,” Opt. Express 21, 2807–2815 (2013).
[Crossref]

G. W. Cong, T. Matsukawa, T. Chiba, H. Tadokoro, M. Yanagihara, M. Ohno, H. Kawashima, H. Kuwatsuka, Y. Igarashi, M. Masahara, H. Ishikawa, “Large current MOSFET on photonic silicon-on-insulator wafers and its monolithic integration with a thermo-optic 2 × 2 Mach-Zehnder switch,” Opt. Express 21, 6889–6894 (2013).
[Crossref]

G. Porter, R. Strong, N. Farrington, A. Forencich, P. Chen-Sun, T. Rosing, Y. Fainman, G. Papen, A. Vahdat, “Integrating microsecond circuit switching into the data center,” ACM SIGCOMM Comput. Commun. Rev. 43, 447–458 (2013).

S. Abe, K. Hane, “Variable-gap silicon photonic waveguide coupler switch with a nanolatch mechanism,” IEEE Photon. Technol. Lett. 25, 675–677 (2013).
[Crossref]

Y. Munemasa, K. Hane, “A compact 1 × 3 silicon shotonic waveguide switch based on precise investigation of coupling characteristics of variable-gap coupler,” Jpn. J. Appl. Phys. 52, 06GL15 (2013).
[Crossref]

2012 (3)

Y. Akihama, K. Hane, “Single and multiple optical switches that use freestanding silicon nanowire waveguide couplers,” Light Sci. Appl. 1, e16 (2012).
[Crossref]

A. V. Rylyakov, C. L. Schow, B. G. Lee, W. M. J. Green, S. Assefa, F. E. Doany, M. Yang, J. Van Campenhout, C. V. Jahnes, J. A. Kash, Y. A. Vlasov, “Silicon photonic switches hybrid-integrated with CMOS drivers,” IEEE J. Solid-State Circuits 47, 345–354 (2012).
[Crossref]

L. Chen, Y. Chen, “Compact, low-loss and low-power 8 × 8 broadband silicon optical switch,” Opt. Express 20, 18977–18985 (2012).
[Crossref]

2011 (2)

S. K. Selvaraja, W. Bogaerts, D. Van Thourhout, “Loss reduction in silicon nanophotonic waveguide micro-bends through etch profile improvement,” Opt. Commun. 284, 2141–2144 (2011).
[Crossref]

M. Yang, W. M. J. Green, S. Assefa, J. Van Campenhout, B. G. Lee, C. V. Jahnes, F. E. Doany, C. L. Schow, J. A. Kash, Y. A. Vlasov, “Non-blocking 4 × 4 electro-optic silicon switch for on-chip photonic networks,” Opt. Express 19, 47–54 (2011).
[Crossref]

2010 (1)

Y. Shoji, K. Kintaka, S. Suda, H. Kawashima, T. Hasama, H. Ishikawa, “Low-crosstalk 2 × 2 thermo-optic switch with silicon wire waveguides,” Opt. Express 18, 9071–9075 (2010).
[Crossref]

2009 (2)

J. Yao, M. C. Wu, “Bandwidth-tunable add-drop filters based on micro-electro-mechanical-system actuated silicon microtoroidal resonators,” Opt. Lett. 34, 2557–2559 (2009).
[Crossref]

J. Van Campenhout, W. M. J. Green, S. Assefa, Y. A. Vlasov, “Low-power, 2 × 2 silicon electro-optic switch with 110-nm bandwidth for broadband reconfigurable optical networks,” Opt. Express 17, 24020–24029 (2009).
[Crossref]

2008 (1)

E. Bulgan, Y. Kanamori, K. Hane, “Submicron silicon waveguide optical switch driven by microelectromechanical actuator,” Appl. Phys. Lett. 92, 101110 (2008).
[Crossref]

2007 (1)

J. Yao, D. Leuenberger, M. C. M. Lee, M. C. Wu, “Silicon microtoroidal resonators with integrated MEMS tunable coupler,” IEEE J. Sel. Top. Quantum Electron. 13, 202–208 (2007).
[Crossref]

2006 (2)

M. C. M. Lee, M. C. Wu, “Tunable coupling regimes of silicon microdisk resonators using MEMS actuators,” Opt. Express 14, 4703–4712 (2006).
[Crossref]

M. C. Wu, O. Solgaard, J. E. Ford, “Optical MEMS for lightwave communication,” J. Lightwave Technol. 24, 4433–4454 (2006).
[Crossref]

2005 (2)

M. W. Pruessner, K. Amarnath, M. Datta, D. P. Kelly, S. Kanakaraju, P. Ho, R. Ghodssi, “InP-based optical waveguide MEMS switches with evanescent coupling mechanism,” J. Microelectromech. Syst. 14, 1070–1081 (2005).
[Crossref]

M. C. M. Lee, M. C. Wu, “MEMS-actuated microdisk resonators with variable power coupling ratios,” IEEE Photon. Technol. Lett. 17, 1034–1036 (2005).
[Crossref]

2003 (2)

X. Zheng, V. Kaman, S. Yuan, Y. Xu, O. Jerphagnon, A. Keating, R. C. Anderson, H. N. Poulsen, B. Liu, J. R. Sechrist, C. Pusarla, R. Helkey, D. J. Blumenthal, J. E. Bowers, “Three-dimensional MEMS photonic cross-connect switch design and performance,” IEEE J. Sel. Top. Quantum Electron. 9, 571–578 (2003).
[Crossref]

T. Yamamoto, J. Yamaguchi, N. Takeuchi, A. Shimizu, E. Higurashi, R. Sawada, Y. Uenishi, “A three-dimensional MEMS optical switching module having 100 input and 100 output ports,” IEEE Photon. Technol. Lett. 15, 1360–1362 (2003).
[Crossref]

2002 (3)

P. De Dobbelaere, K. Falta, L. Fan, S. Gloeckner, S. Patra, “Digital MEMS for optical switching,” IEEE Commun. Mag. 40(3), 88–95 (2002).
[Crossref]

E. Ollier, “Optical MEMS devices based on moving waveguides,” IEEE J. Sel. Top. Quantum Electron. 8, 155–162 (2002).
[Crossref]

T. Bakke, C. P. Tigges, J. J. Lean, C. T. Sullivan, O. B. Spahn, “Planar microoptomechanical waveguide switches,” IEEE J. Sel. Top. Quantum Electron. 8, 64–72 (2002).
[Crossref]

2001 (1)

G. J. O. Brien, D. J. Monk, L. Lin, “MEMS cantilever beam electrostatic pull-in model,” Proc. SPIE 4593, 31–41 (2001).
[Crossref]

1999 (3)

G. J. Veldhuis, T. Nauta, C. Gui, J. W. Berenschot, P. V. Lambeck, “Electrostatically actuated mechanooptical waveguide ON-OFF switch showing high extinction at a low actuation-voltage,” IEEE J. Sel. Top. Quantum Electron. 5, 60–66 (1999).
[Crossref]

F. Chollet, M. de Labachelerie, H. Fujita, “Compact evanescent optical switch and attenuator with electromechanical actuation,” IEEE J. Sel. Top. Quantum Electron. 5, 52–59 (1999).
[Crossref]

R. T. Chen, H. Nguyen, M. C. Wu, “A high-speed low-voltage stress-induced micromachined 2 × 2 optical switch,” IEEE Photon. Technol. Lett. 11, 1396–1398 (1999).
[Crossref]

1996 (1)

H. Toshiyoshi, H. Fujita, “Electrostatic micro torsion mirrors for an optical switch matrix,” J. Microelectromech. Syst. 5, 231–237 (1996).
[Crossref]

Abe, S.

S. Abe, K. Hane, “Variable-gap silicon photonic waveguide coupler switch with a nanolatch mechanism,” IEEE Photon. Technol. Lett. 25, 675–677 (2013).
[Crossref]

Akihama, Y.

Y. Akihama, K. Hane, “Single and multiple optical switches that use freestanding silicon nanowire waveguide couplers,” Light Sci. Appl. 1, e16 (2012).
[Crossref]

Aksyuk, V.

R. Ryf, J. Kim, P. J. Hickey, A. Gnauck, D. Carr, F. Pardo, R. Bolle, C. Frahm, N. Basavanhally, C. Yoh, D. Ramsey, R. Boie, R. George, J. Kraus, C. Lichtenwalner, R. Papazian, J. Gates, R. H. Shea, A. Gasparyan, V. Muratov, E. J. Griffith, A. J. Prybyla, S. Goyal, D. C. White, T. M. Lin, R. Ruel, C. Nijander, S. Arney, T. D. Neilson, J. D. Bishop, P. Kolodner, S. Pau, C. Nuzman, A. Weis, B. Kumar, D. Lieuwen, V. Aksyuk, S. D. Greywall, C. T. Lee, T. H. Soh, M. W. Mansfield, S. Jin, Y. W. Lai, A. H. Huggins, L. D. Barr, A. R. Cirelli, R. G. Bogart, K. Teffeau, R. Vella, H. Mavoori, A. Ramirez, A. N. Ciampa, P. F. Klemens, D. M. Morris, T. Boone, Q. J. Liu, M. J. Rosamilia, R. C. Giles, “1296-port MEMS transparent optical crossconnect with 2.07 petabit/s switch capacity,” in Optical Fiber Communication Conference (Optical Society of America, 2001), postdeadline paper.

Aksyuk, V. A.

D. T. Neilson, V. A. Aksyuk, S. Arney, N. R. Basavanhally, K. S. Bhalla, D. J. Bishop, B. A. Boie, C. A. Bolle, J. V. Gates, A. M. Gottlieb, J. P. Hickey, N. A. Jackman, P. R. Kolodner, S. K. Korotky, B. Mikkelsen, F. Pardo, G. Raybon, R. Ruel, R. E. Scotti, T. W. Van Blarcum, L. Zhang, C. R. Giles, “Fully provisioned 112 × 112 micro-mechanical optical crossconnect with 35.8 Tb/s demonstrated capacity,” in Optical Fiber Communication Conference (Optical Society of America, 2000), postdeadline paper.

Amarnath, K.

Anderson, R. C.

Arney, S.

Assefa, S.

Bakke, T.

T. Bakke, C. P. Tigges, J. J. Lean, C. T. Sullivan, O. B. Spahn, “Planar microoptomechanical waveguide switches,” IEEE J. Sel. Top. Quantum Electron. 8, 64–72 (2002).
[Crossref]

Baks, C. W.

Barr, L. D.

Barwicz, T.

Basavanhally, N.

Basavanhally, N. R.

Berenschot, J. W.

Bhalla, K. S.

Bishop, D. J.

Bishop, J. D.

Blumenthal, D. J.

Bogaerts, W.

S. K. Selvaraja, W. Bogaerts, D. Van Thourhout, “Loss reduction in silicon nanophotonic waveguide micro-bends through etch profile improvement,” Opt. Commun. 284, 2141–2144 (2011).
[Crossref]

Bogart, R. G.

Boie, B. A.

Boie, R.

Bolle, C. A.

Bolle, R.

Boone, T.

Bowers, J. E.

Brien, G. J. O.

G. J. O. Brien, D. J. Monk, L. Lin, “MEMS cantilever beam electrostatic pull-in model,” Proc. SPIE 4593, 31–41 (2001).
[Crossref]

Budynas, R.

W. Young, R. Budynas, A. Sadegh, Roark’s Formulas for Stress and Strain, 8th ed. (McGraw-Hill, 2011).

Bulgan, E.

E. Bulgan, Y. Kanamori, K. Hane, “Submicron silicon waveguide optical switch driven by microelectromechanical actuator,” Appl. Phys. Lett. 92, 101110 (2008).
[Crossref]

Carr, D.

Chan, T. K.

Chang-Hasnain, C. J.

Chen, L.

L. Chen, Y. Chen, “Compact, low-loss and low-power 8 × 8 broadband silicon optical switch,” Opt. Express 20, 18977–18985 (2012).
[Crossref]

Chen, R. T.

R. T. Chen, H. Nguyen, M. C. Wu, “A high-speed low-voltage stress-induced micromachined 2 × 2 optical switch,” IEEE Photon. Technol. Lett. 11, 1396–1398 (1999).
[Crossref]

Chen, Y.

L. Chen, Y. Chen, “Compact, low-loss and low-power 8 × 8 broadband silicon optical switch,” Opt. Express 20, 18977–18985 (2012).
[Crossref]

Chen-Sun, P.

Cheung, S. T. S.

S. T. S. Cheung, B. Guan, S. S. Djordjevic, K. Okamoto, S. J. B. Yoo, “Low-loss and high contrast silicon-on-insulator (SOI) arrayed waveguide grating,” in Conference on Lasers and Electro-Optics (Optical Society of America, 2012), paper CM4A.5.

Chiba, T.

Chollet, F.

F. Chollet, M. de Labachelerie, H. Fujita, “Compact evanescent optical switch and attenuator with electromechanical actuation,” IEEE J. Sel. Top. Quantum Electron. 5, 52–59 (1999).
[Crossref]

Ciampa, A. N.

Cirelli, A. R.

Cong, G.

Cong, G. W.

Datta, M.

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IEEE Commun. Mag. (1)

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Light Sci. Appl. (1)

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Opt. Commun. (1)

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