Abstract

Fast optical circuit switches (OCSs) with high port count offer reconfigurable bandwidth in optical networks and have the potential to significantly increase the performance and efficiency of modern datacenters. In this paper, we report on a new type of integrated OCS that combines silicon photonics with MEMS actuation. The switch is built on a 50×50 passive crossbar network with very low optical loss (0.04 dB/crossing). Efficient switching is achieved by a pair of directional couplers with moving waveguides and an actuation voltage of 14 V. 2500 MEMS-actuated directional coupler switches have been integrated with the crossbar network to form a strictly nonblocking 50×50 OCS on a 9mm×9mm chip. The measured switching time is 2.5 μs, and the extinction ratio is 26 dB. To our knowledge, this is the largest silicon photonic switch reported to date. The switch architecture is highly scalable because the light travels through only one active switching element, regardless of the size of the switch.

© 2015 Optical Society of America

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2013 (5)

T. K. Chan, M. Megens, B. W. Yoo, J. Wyras, C. J. Chang-Hasnain, M. C. Wu, D. A. Horsley, “Optical beamsteering using an 8 × 8 MEMS phased array with closed-loop interferometric phase control,” Opt. Express 21, 2807–2815 (2013).
[Crossref]

G. W. Cong, T. Matsukawa, T. Chiba, H. Tadokoro, M. Yanagihara, M. Ohno, H. Kawashima, H. Kuwatsuka, Y. Igarashi, M. Masahara, H. Ishikawa, “Large current MOSFET on photonic silicon-on-insulator wafers and its monolithic integration with a thermo-optic 2 × 2 Mach-Zehnder switch,” Opt. Express 21, 6889–6894 (2013).
[Crossref]

G. Porter, R. Strong, N. Farrington, A. Forencich, P. Chen-Sun, T. Rosing, Y. Fainman, G. Papen, A. Vahdat, “Integrating microsecond circuit switching into the data center,” ACM SIGCOMM Comput. Commun. Rev. 43, 447–458 (2013).

S. Abe, K. Hane, “Variable-gap silicon photonic waveguide coupler switch with a nanolatch mechanism,” IEEE Photon. Technol. Lett. 25, 675–677 (2013).
[Crossref]

Y. Munemasa, K. Hane, “A compact 1 × 3 silicon shotonic waveguide switch based on precise investigation of coupling characteristics of variable-gap coupler,” Jpn. J. Appl. Phys. 52, 06GL15 (2013).
[Crossref]

2012 (3)

Y. Akihama, K. Hane, “Single and multiple optical switches that use freestanding silicon nanowire waveguide couplers,” Light Sci. Appl. 1, e16 (2012).
[Crossref]

A. V. Rylyakov, C. L. Schow, B. G. Lee, W. M. J. Green, S. Assefa, F. E. Doany, M. Yang, J. Van Campenhout, C. V. Jahnes, J. A. Kash, Y. A. Vlasov, “Silicon photonic switches hybrid-integrated with CMOS drivers,” IEEE J. Solid-State Circuits 47, 345–354 (2012).
[Crossref]

L. Chen, Y. Chen, “Compact, low-loss and low-power 8 × 8 broadband silicon optical switch,” Opt. Express 20, 18977–18985 (2012).
[Crossref]

2011 (2)

S. K. Selvaraja, W. Bogaerts, D. Van Thourhout, “Loss reduction in silicon nanophotonic waveguide micro-bends through etch profile improvement,” Opt. Commun. 284, 2141–2144 (2011).
[Crossref]

M. Yang, W. M. J. Green, S. Assefa, J. Van Campenhout, B. G. Lee, C. V. Jahnes, F. E. Doany, C. L. Schow, J. A. Kash, Y. A. Vlasov, “Non-blocking 4 × 4 electro-optic silicon switch for on-chip photonic networks,” Opt. Express 19, 47–54 (2011).
[Crossref]

2010 (1)

2009 (2)

2008 (1)

E. Bulgan, Y. Kanamori, K. Hane, “Submicron silicon waveguide optical switch driven by microelectromechanical actuator,” Appl. Phys. Lett. 92, 101110 (2008).
[Crossref]

2007 (1)

J. Yao, D. Leuenberger, M. C. M. Lee, M. C. Wu, “Silicon microtoroidal resonators with integrated MEMS tunable coupler,” IEEE J. Sel. Top. Quantum Electron. 13, 202–208 (2007).
[Crossref]

2006 (2)

2005 (2)

M. W. Pruessner, K. Amarnath, M. Datta, D. P. Kelly, S. Kanakaraju, P. Ho, R. Ghodssi, “InP-based optical waveguide MEMS switches with evanescent coupling mechanism,” J. Microelectromech. Syst. 14, 1070–1081 (2005).
[Crossref]

M. C. M. Lee, M. C. Wu, “MEMS-actuated microdisk resonators with variable power coupling ratios,” IEEE Photon. Technol. Lett. 17, 1034–1036 (2005).
[Crossref]

2003 (2)

X. Zheng, V. Kaman, S. Yuan, Y. Xu, O. Jerphagnon, A. Keating, R. C. Anderson, H. N. Poulsen, B. Liu, J. R. Sechrist, C. Pusarla, R. Helkey, D. J. Blumenthal, J. E. Bowers, “Three-dimensional MEMS photonic cross-connect switch design and performance,” IEEE J. Sel. Top. Quantum Electron. 9, 571–578 (2003).
[Crossref]

T. Yamamoto, J. Yamaguchi, N. Takeuchi, A. Shimizu, E. Higurashi, R. Sawada, Y. Uenishi, “A three-dimensional MEMS optical switching module having 100 input and 100 output ports,” IEEE Photon. Technol. Lett. 15, 1360–1362 (2003).
[Crossref]

2002 (3)

P. De Dobbelaere, K. Falta, L. Fan, S. Gloeckner, S. Patra, “Digital MEMS for optical switching,” IEEE Commun. Mag. 40(3), 88–95 (2002).
[Crossref]

E. Ollier, “Optical MEMS devices based on moving waveguides,” IEEE J. Sel. Top. Quantum Electron. 8, 155–162 (2002).
[Crossref]

T. Bakke, C. P. Tigges, J. J. Lean, C. T. Sullivan, O. B. Spahn, “Planar microoptomechanical waveguide switches,” IEEE J. Sel. Top. Quantum Electron. 8, 64–72 (2002).
[Crossref]

2001 (1)

G. J. O. Brien, D. J. Monk, L. Lin, “MEMS cantilever beam electrostatic pull-in model,” Proc. SPIE 4593, 31–41 (2001).
[Crossref]

1999 (3)

G. J. Veldhuis, T. Nauta, C. Gui, J. W. Berenschot, P. V. Lambeck, “Electrostatically actuated mechanooptical waveguide ON-OFF switch showing high extinction at a low actuation-voltage,” IEEE J. Sel. Top. Quantum Electron. 5, 60–66 (1999).
[Crossref]

F. Chollet, M. de Labachelerie, H. Fujita, “Compact evanescent optical switch and attenuator with electromechanical actuation,” IEEE J. Sel. Top. Quantum Electron. 5, 52–59 (1999).
[Crossref]

R. T. Chen, H. Nguyen, M. C. Wu, “A high-speed low-voltage stress-induced micromachined 2 × 2 optical switch,” IEEE Photon. Technol. Lett. 11, 1396–1398 (1999).
[Crossref]

1996 (1)

H. Toshiyoshi, H. Fujita, “Electrostatic micro torsion mirrors for an optical switch matrix,” J. Microelectromech. Syst. 5, 231–237 (1996).
[Crossref]

Abe, S.

S. Abe, K. Hane, “Variable-gap silicon photonic waveguide coupler switch with a nanolatch mechanism,” IEEE Photon. Technol. Lett. 25, 675–677 (2013).
[Crossref]

Akihama, Y.

Y. Akihama, K. Hane, “Single and multiple optical switches that use freestanding silicon nanowire waveguide couplers,” Light Sci. Appl. 1, e16 (2012).
[Crossref]

Aksyuk, V.

R. Ryf, J. Kim, P. J. Hickey, A. Gnauck, D. Carr, F. Pardo, R. Bolle, C. Frahm, N. Basavanhally, C. Yoh, D. Ramsey, R. Boie, R. George, J. Kraus, C. Lichtenwalner, R. Papazian, J. Gates, R. H. Shea, A. Gasparyan, V. Muratov, E. J. Griffith, A. J. Prybyla, S. Goyal, D. C. White, T. M. Lin, R. Ruel, C. Nijander, S. Arney, T. D. Neilson, J. D. Bishop, P. Kolodner, S. Pau, C. Nuzman, A. Weis, B. Kumar, D. Lieuwen, V. Aksyuk, S. D. Greywall, C. T. Lee, T. H. Soh, M. W. Mansfield, S. Jin, Y. W. Lai, A. H. Huggins, L. D. Barr, A. R. Cirelli, R. G. Bogart, K. Teffeau, R. Vella, H. Mavoori, A. Ramirez, A. N. Ciampa, P. F. Klemens, D. M. Morris, T. Boone, Q. J. Liu, M. J. Rosamilia, R. C. Giles, “1296-port MEMS transparent optical crossconnect with 2.07  petabit/s switch capacity,” in Optical Fiber Communication Conference (Optical Society of America, 2001), postdeadline paper.

Aksyuk, V. A.

D. T. Neilson, V. A. Aksyuk, S. Arney, N. R. Basavanhally, K. S. Bhalla, D. J. Bishop, B. A. Boie, C. A. Bolle, J. V. Gates, A. M. Gottlieb, J. P. Hickey, N. A. Jackman, P. R. Kolodner, S. K. Korotky, B. Mikkelsen, F. Pardo, G. Raybon, R. Ruel, R. E. Scotti, T. W. Van Blarcum, L. Zhang, C. R. Giles, “Fully provisioned 112 × 112 micro-mechanical optical crossconnect with 35.8  Tb/s demonstrated capacity,” in Optical Fiber Communication Conference (Optical Society of America, 2000), postdeadline paper.

Amarnath, K.

M. W. Pruessner, K. Amarnath, M. Datta, D. P. Kelly, S. Kanakaraju, P. Ho, R. Ghodssi, “InP-based optical waveguide MEMS switches with evanescent coupling mechanism,” J. Microelectromech. Syst. 14, 1070–1081 (2005).
[Crossref]

Anderson, R. C.

X. Zheng, V. Kaman, S. Yuan, Y. Xu, O. Jerphagnon, A. Keating, R. C. Anderson, H. N. Poulsen, B. Liu, J. R. Sechrist, C. Pusarla, R. Helkey, D. J. Blumenthal, J. E. Bowers, “Three-dimensional MEMS photonic cross-connect switch design and performance,” IEEE J. Sel. Top. Quantum Electron. 9, 571–578 (2003).
[Crossref]

Arney, S.

D. T. Neilson, V. A. Aksyuk, S. Arney, N. R. Basavanhally, K. S. Bhalla, D. J. Bishop, B. A. Boie, C. A. Bolle, J. V. Gates, A. M. Gottlieb, J. P. Hickey, N. A. Jackman, P. R. Kolodner, S. K. Korotky, B. Mikkelsen, F. Pardo, G. Raybon, R. Ruel, R. E. Scotti, T. W. Van Blarcum, L. Zhang, C. R. Giles, “Fully provisioned 112 × 112 micro-mechanical optical crossconnect with 35.8  Tb/s demonstrated capacity,” in Optical Fiber Communication Conference (Optical Society of America, 2000), postdeadline paper.

R. Ryf, J. Kim, P. J. Hickey, A. Gnauck, D. Carr, F. Pardo, R. Bolle, C. Frahm, N. Basavanhally, C. Yoh, D. Ramsey, R. Boie, R. George, J. Kraus, C. Lichtenwalner, R. Papazian, J. Gates, R. H. Shea, A. Gasparyan, V. Muratov, E. J. Griffith, A. J. Prybyla, S. Goyal, D. C. White, T. M. Lin, R. Ruel, C. Nijander, S. Arney, T. D. Neilson, J. D. Bishop, P. Kolodner, S. Pau, C. Nuzman, A. Weis, B. Kumar, D. Lieuwen, V. Aksyuk, S. D. Greywall, C. T. Lee, T. H. Soh, M. W. Mansfield, S. Jin, Y. W. Lai, A. H. Huggins, L. D. Barr, A. R. Cirelli, R. G. Bogart, K. Teffeau, R. Vella, H. Mavoori, A. Ramirez, A. N. Ciampa, P. F. Klemens, D. M. Morris, T. Boone, Q. J. Liu, M. J. Rosamilia, R. C. Giles, “1296-port MEMS transparent optical crossconnect with 2.07  petabit/s switch capacity,” in Optical Fiber Communication Conference (Optical Society of America, 2001), postdeadline paper.

Assefa, S.

Bakke, T.

T. Bakke, C. P. Tigges, J. J. Lean, C. T. Sullivan, O. B. Spahn, “Planar microoptomechanical waveguide switches,” IEEE J. Sel. Top. Quantum Electron. 8, 64–72 (2002).
[Crossref]

Baks, C. W.

Barr, L. D.

R. Ryf, J. Kim, P. J. Hickey, A. Gnauck, D. Carr, F. Pardo, R. Bolle, C. Frahm, N. Basavanhally, C. Yoh, D. Ramsey, R. Boie, R. George, J. Kraus, C. Lichtenwalner, R. Papazian, J. Gates, R. H. Shea, A. Gasparyan, V. Muratov, E. J. Griffith, A. J. Prybyla, S. Goyal, D. C. White, T. M. Lin, R. Ruel, C. Nijander, S. Arney, T. D. Neilson, J. D. Bishop, P. Kolodner, S. Pau, C. Nuzman, A. Weis, B. Kumar, D. Lieuwen, V. Aksyuk, S. D. Greywall, C. T. Lee, T. H. Soh, M. W. Mansfield, S. Jin, Y. W. Lai, A. H. Huggins, L. D. Barr, A. R. Cirelli, R. G. Bogart, K. Teffeau, R. Vella, H. Mavoori, A. Ramirez, A. N. Ciampa, P. F. Klemens, D. M. Morris, T. Boone, Q. J. Liu, M. J. Rosamilia, R. C. Giles, “1296-port MEMS transparent optical crossconnect with 2.07  petabit/s switch capacity,” in Optical Fiber Communication Conference (Optical Society of America, 2001), postdeadline paper.

Barwicz, T.

Basavanhally, N.

R. Ryf, J. Kim, P. J. Hickey, A. Gnauck, D. Carr, F. Pardo, R. Bolle, C. Frahm, N. Basavanhally, C. Yoh, D. Ramsey, R. Boie, R. George, J. Kraus, C. Lichtenwalner, R. Papazian, J. Gates, R. H. Shea, A. Gasparyan, V. Muratov, E. J. Griffith, A. J. Prybyla, S. Goyal, D. C. White, T. M. Lin, R. Ruel, C. Nijander, S. Arney, T. D. Neilson, J. D. Bishop, P. Kolodner, S. Pau, C. Nuzman, A. Weis, B. Kumar, D. Lieuwen, V. Aksyuk, S. D. Greywall, C. T. Lee, T. H. Soh, M. W. Mansfield, S. Jin, Y. W. Lai, A. H. Huggins, L. D. Barr, A. R. Cirelli, R. G. Bogart, K. Teffeau, R. Vella, H. Mavoori, A. Ramirez, A. N. Ciampa, P. F. Klemens, D. M. Morris, T. Boone, Q. J. Liu, M. J. Rosamilia, R. C. Giles, “1296-port MEMS transparent optical crossconnect with 2.07  petabit/s switch capacity,” in Optical Fiber Communication Conference (Optical Society of America, 2001), postdeadline paper.

Basavanhally, N. R.

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D. T. Neilson, V. A. Aksyuk, S. Arney, N. R. Basavanhally, K. S. Bhalla, D. J. Bishop, B. A. Boie, C. A. Bolle, J. V. Gates, A. M. Gottlieb, J. P. Hickey, N. A. Jackman, P. R. Kolodner, S. K. Korotky, B. Mikkelsen, F. Pardo, G. Raybon, R. Ruel, R. E. Scotti, T. W. Van Blarcum, L. Zhang, C. R. Giles, “Fully provisioned 112 × 112 micro-mechanical optical crossconnect with 35.8  Tb/s demonstrated capacity,” in Optical Fiber Communication Conference (Optical Society of America, 2000), postdeadline paper.

Bishop, J. D.

R. Ryf, J. Kim, P. J. Hickey, A. Gnauck, D. Carr, F. Pardo, R. Bolle, C. Frahm, N. Basavanhally, C. Yoh, D. Ramsey, R. Boie, R. George, J. Kraus, C. Lichtenwalner, R. Papazian, J. Gates, R. H. Shea, A. Gasparyan, V. Muratov, E. J. Griffith, A. J. Prybyla, S. Goyal, D. C. White, T. M. Lin, R. Ruel, C. Nijander, S. Arney, T. D. Neilson, J. D. Bishop, P. Kolodner, S. Pau, C. Nuzman, A. Weis, B. Kumar, D. Lieuwen, V. Aksyuk, S. D. Greywall, C. T. Lee, T. H. Soh, M. W. Mansfield, S. Jin, Y. W. Lai, A. H. Huggins, L. D. Barr, A. R. Cirelli, R. G. Bogart, K. Teffeau, R. Vella, H. Mavoori, A. Ramirez, A. N. Ciampa, P. F. Klemens, D. M. Morris, T. Boone, Q. J. Liu, M. J. Rosamilia, R. C. Giles, “1296-port MEMS transparent optical crossconnect with 2.07  petabit/s switch capacity,” in Optical Fiber Communication Conference (Optical Society of America, 2001), postdeadline paper.

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D. T. Neilson, V. A. Aksyuk, S. Arney, N. R. Basavanhally, K. S. Bhalla, D. J. Bishop, B. A. Boie, C. A. Bolle, J. V. Gates, A. M. Gottlieb, J. P. Hickey, N. A. Jackman, P. R. Kolodner, S. K. Korotky, B. Mikkelsen, F. Pardo, G. Raybon, R. Ruel, R. E. Scotti, T. W. Van Blarcum, L. Zhang, C. R. Giles, “Fully provisioned 112 × 112 micro-mechanical optical crossconnect with 35.8  Tb/s demonstrated capacity,” in Optical Fiber Communication Conference (Optical Society of America, 2000), postdeadline paper.

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R. Ryf, J. Kim, P. J. Hickey, A. Gnauck, D. Carr, F. Pardo, R. Bolle, C. Frahm, N. Basavanhally, C. Yoh, D. Ramsey, R. Boie, R. George, J. Kraus, C. Lichtenwalner, R. Papazian, J. Gates, R. H. Shea, A. Gasparyan, V. Muratov, E. J. Griffith, A. J. Prybyla, S. Goyal, D. C. White, T. M. Lin, R. Ruel, C. Nijander, S. Arney, T. D. Neilson, J. D. Bishop, P. Kolodner, S. Pau, C. Nuzman, A. Weis, B. Kumar, D. Lieuwen, V. Aksyuk, S. D. Greywall, C. T. Lee, T. H. Soh, M. W. Mansfield, S. Jin, Y. W. Lai, A. H. Huggins, L. D. Barr, A. R. Cirelli, R. G. Bogart, K. Teffeau, R. Vella, H. Mavoori, A. Ramirez, A. N. Ciampa, P. F. Klemens, D. M. Morris, T. Boone, Q. J. Liu, M. J. Rosamilia, R. C. Giles, “1296-port MEMS transparent optical crossconnect with 2.07  petabit/s switch capacity,” in Optical Fiber Communication Conference (Optical Society of America, 2001), postdeadline paper.

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Bolle, R.

R. Ryf, J. Kim, P. J. Hickey, A. Gnauck, D. Carr, F. Pardo, R. Bolle, C. Frahm, N. Basavanhally, C. Yoh, D. Ramsey, R. Boie, R. George, J. Kraus, C. Lichtenwalner, R. Papazian, J. Gates, R. H. Shea, A. Gasparyan, V. Muratov, E. J. Griffith, A. J. Prybyla, S. Goyal, D. C. White, T. M. Lin, R. Ruel, C. Nijander, S. Arney, T. D. Neilson, J. D. Bishop, P. Kolodner, S. Pau, C. Nuzman, A. Weis, B. Kumar, D. Lieuwen, V. Aksyuk, S. D. Greywall, C. T. Lee, T. H. Soh, M. W. Mansfield, S. Jin, Y. W. Lai, A. H. Huggins, L. D. Barr, A. R. Cirelli, R. G. Bogart, K. Teffeau, R. Vella, H. Mavoori, A. Ramirez, A. N. Ciampa, P. F. Klemens, D. M. Morris, T. Boone, Q. J. Liu, M. J. Rosamilia, R. C. Giles, “1296-port MEMS transparent optical crossconnect with 2.07  petabit/s switch capacity,” in Optical Fiber Communication Conference (Optical Society of America, 2001), postdeadline paper.

Boone, T.

R. Ryf, J. Kim, P. J. Hickey, A. Gnauck, D. Carr, F. Pardo, R. Bolle, C. Frahm, N. Basavanhally, C. Yoh, D. Ramsey, R. Boie, R. George, J. Kraus, C. Lichtenwalner, R. Papazian, J. Gates, R. H. Shea, A. Gasparyan, V. Muratov, E. J. Griffith, A. J. Prybyla, S. Goyal, D. C. White, T. M. Lin, R. Ruel, C. Nijander, S. Arney, T. D. Neilson, J. D. Bishop, P. Kolodner, S. Pau, C. Nuzman, A. Weis, B. Kumar, D. Lieuwen, V. Aksyuk, S. D. Greywall, C. T. Lee, T. H. Soh, M. W. Mansfield, S. Jin, Y. W. Lai, A. H. Huggins, L. D. Barr, A. R. Cirelli, R. G. Bogart, K. Teffeau, R. Vella, H. Mavoori, A. Ramirez, A. N. Ciampa, P. F. Klemens, D. M. Morris, T. Boone, Q. J. Liu, M. J. Rosamilia, R. C. Giles, “1296-port MEMS transparent optical crossconnect with 2.07  petabit/s switch capacity,” in Optical Fiber Communication Conference (Optical Society of America, 2001), postdeadline paper.

Bowers, J. E.

X. Zheng, V. Kaman, S. Yuan, Y. Xu, O. Jerphagnon, A. Keating, R. C. Anderson, H. N. Poulsen, B. Liu, J. R. Sechrist, C. Pusarla, R. Helkey, D. J. Blumenthal, J. E. Bowers, “Three-dimensional MEMS photonic cross-connect switch design and performance,” IEEE J. Sel. Top. Quantum Electron. 9, 571–578 (2003).
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R. Ryf, J. Kim, P. J. Hickey, A. Gnauck, D. Carr, F. Pardo, R. Bolle, C. Frahm, N. Basavanhally, C. Yoh, D. Ramsey, R. Boie, R. George, J. Kraus, C. Lichtenwalner, R. Papazian, J. Gates, R. H. Shea, A. Gasparyan, V. Muratov, E. J. Griffith, A. J. Prybyla, S. Goyal, D. C. White, T. M. Lin, R. Ruel, C. Nijander, S. Arney, T. D. Neilson, J. D. Bishop, P. Kolodner, S. Pau, C. Nuzman, A. Weis, B. Kumar, D. Lieuwen, V. Aksyuk, S. D. Greywall, C. T. Lee, T. H. Soh, M. W. Mansfield, S. Jin, Y. W. Lai, A. H. Huggins, L. D. Barr, A. R. Cirelli, R. G. Bogart, K. Teffeau, R. Vella, H. Mavoori, A. Ramirez, A. N. Ciampa, P. F. Klemens, D. M. Morris, T. Boone, Q. J. Liu, M. J. Rosamilia, R. C. Giles, “1296-port MEMS transparent optical crossconnect with 2.07  petabit/s switch capacity,” in Optical Fiber Communication Conference (Optical Society of America, 2001), postdeadline paper.

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R. Ryf, J. Kim, P. J. Hickey, A. Gnauck, D. Carr, F. Pardo, R. Bolle, C. Frahm, N. Basavanhally, C. Yoh, D. Ramsey, R. Boie, R. George, J. Kraus, C. Lichtenwalner, R. Papazian, J. Gates, R. H. Shea, A. Gasparyan, V. Muratov, E. J. Griffith, A. J. Prybyla, S. Goyal, D. C. White, T. M. Lin, R. Ruel, C. Nijander, S. Arney, T. D. Neilson, J. D. Bishop, P. Kolodner, S. Pau, C. Nuzman, A. Weis, B. Kumar, D. Lieuwen, V. Aksyuk, S. D. Greywall, C. T. Lee, T. H. Soh, M. W. Mansfield, S. Jin, Y. W. Lai, A. H. Huggins, L. D. Barr, A. R. Cirelli, R. G. Bogart, K. Teffeau, R. Vella, H. Mavoori, A. Ramirez, A. N. Ciampa, P. F. Klemens, D. M. Morris, T. Boone, Q. J. Liu, M. J. Rosamilia, R. C. Giles, “1296-port MEMS transparent optical crossconnect with 2.07  petabit/s switch capacity,” in Optical Fiber Communication Conference (Optical Society of America, 2001), postdeadline paper.

Gates, J. V.

D. T. Neilson, V. A. Aksyuk, S. Arney, N. R. Basavanhally, K. S. Bhalla, D. J. Bishop, B. A. Boie, C. A. Bolle, J. V. Gates, A. M. Gottlieb, J. P. Hickey, N. A. Jackman, P. R. Kolodner, S. K. Korotky, B. Mikkelsen, F. Pardo, G. Raybon, R. Ruel, R. E. Scotti, T. W. Van Blarcum, L. Zhang, C. R. Giles, “Fully provisioned 112 × 112 micro-mechanical optical crossconnect with 35.8  Tb/s demonstrated capacity,” in Optical Fiber Communication Conference (Optical Society of America, 2000), postdeadline paper.

George, R.

R. Ryf, J. Kim, P. J. Hickey, A. Gnauck, D. Carr, F. Pardo, R. Bolle, C. Frahm, N. Basavanhally, C. Yoh, D. Ramsey, R. Boie, R. George, J. Kraus, C. Lichtenwalner, R. Papazian, J. Gates, R. H. Shea, A. Gasparyan, V. Muratov, E. J. Griffith, A. J. Prybyla, S. Goyal, D. C. White, T. M. Lin, R. Ruel, C. Nijander, S. Arney, T. D. Neilson, J. D. Bishop, P. Kolodner, S. Pau, C. Nuzman, A. Weis, B. Kumar, D. Lieuwen, V. Aksyuk, S. D. Greywall, C. T. Lee, T. H. Soh, M. W. Mansfield, S. Jin, Y. W. Lai, A. H. Huggins, L. D. Barr, A. R. Cirelli, R. G. Bogart, K. Teffeau, R. Vella, H. Mavoori, A. Ramirez, A. N. Ciampa, P. F. Klemens, D. M. Morris, T. Boone, Q. J. Liu, M. J. Rosamilia, R. C. Giles, “1296-port MEMS transparent optical crossconnect with 2.07  petabit/s switch capacity,” in Optical Fiber Communication Conference (Optical Society of America, 2001), postdeadline paper.

Ghodssi, R.

M. W. Pruessner, K. Amarnath, M. Datta, D. P. Kelly, S. Kanakaraju, P. Ho, R. Ghodssi, “InP-based optical waveguide MEMS switches with evanescent coupling mechanism,” J. Microelectromech. Syst. 14, 1070–1081 (2005).
[Crossref]

Giles, C. R.

D. T. Neilson, V. A. Aksyuk, S. Arney, N. R. Basavanhally, K. S. Bhalla, D. J. Bishop, B. A. Boie, C. A. Bolle, J. V. Gates, A. M. Gottlieb, J. P. Hickey, N. A. Jackman, P. R. Kolodner, S. K. Korotky, B. Mikkelsen, F. Pardo, G. Raybon, R. Ruel, R. E. Scotti, T. W. Van Blarcum, L. Zhang, C. R. Giles, “Fully provisioned 112 × 112 micro-mechanical optical crossconnect with 35.8  Tb/s demonstrated capacity,” in Optical Fiber Communication Conference (Optical Society of America, 2000), postdeadline paper.

Giles, R. C.

R. Ryf, J. Kim, P. J. Hickey, A. Gnauck, D. Carr, F. Pardo, R. Bolle, C. Frahm, N. Basavanhally, C. Yoh, D. Ramsey, R. Boie, R. George, J. Kraus, C. Lichtenwalner, R. Papazian, J. Gates, R. H. Shea, A. Gasparyan, V. Muratov, E. J. Griffith, A. J. Prybyla, S. Goyal, D. C. White, T. M. Lin, R. Ruel, C. Nijander, S. Arney, T. D. Neilson, J. D. Bishop, P. Kolodner, S. Pau, C. Nuzman, A. Weis, B. Kumar, D. Lieuwen, V. Aksyuk, S. D. Greywall, C. T. Lee, T. H. Soh, M. W. Mansfield, S. Jin, Y. W. Lai, A. H. Huggins, L. D. Barr, A. R. Cirelli, R. G. Bogart, K. Teffeau, R. Vella, H. Mavoori, A. Ramirez, A. N. Ciampa, P. F. Klemens, D. M. Morris, T. Boone, Q. J. Liu, M. J. Rosamilia, R. C. Giles, “1296-port MEMS transparent optical crossconnect with 2.07  petabit/s switch capacity,” in Optical Fiber Communication Conference (Optical Society of America, 2001), postdeadline paper.

Gloeckner, S.

P. De Dobbelaere, K. Falta, L. Fan, S. Gloeckner, S. Patra, “Digital MEMS for optical switching,” IEEE Commun. Mag. 40(3), 88–95 (2002).
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Gnauck, A.

R. Ryf, J. Kim, P. J. Hickey, A. Gnauck, D. Carr, F. Pardo, R. Bolle, C. Frahm, N. Basavanhally, C. Yoh, D. Ramsey, R. Boie, R. George, J. Kraus, C. Lichtenwalner, R. Papazian, J. Gates, R. H. Shea, A. Gasparyan, V. Muratov, E. J. Griffith, A. J. Prybyla, S. Goyal, D. C. White, T. M. Lin, R. Ruel, C. Nijander, S. Arney, T. D. Neilson, J. D. Bishop, P. Kolodner, S. Pau, C. Nuzman, A. Weis, B. Kumar, D. Lieuwen, V. Aksyuk, S. D. Greywall, C. T. Lee, T. H. Soh, M. W. Mansfield, S. Jin, Y. W. Lai, A. H. Huggins, L. D. Barr, A. R. Cirelli, R. G. Bogart, K. Teffeau, R. Vella, H. Mavoori, A. Ramirez, A. N. Ciampa, P. F. Klemens, D. M. Morris, T. Boone, Q. J. Liu, M. J. Rosamilia, R. C. Giles, “1296-port MEMS transparent optical crossconnect with 2.07  petabit/s switch capacity,” in Optical Fiber Communication Conference (Optical Society of America, 2001), postdeadline paper.

Gottlieb, A. M.

D. T. Neilson, V. A. Aksyuk, S. Arney, N. R. Basavanhally, K. S. Bhalla, D. J. Bishop, B. A. Boie, C. A. Bolle, J. V. Gates, A. M. Gottlieb, J. P. Hickey, N. A. Jackman, P. R. Kolodner, S. K. Korotky, B. Mikkelsen, F. Pardo, G. Raybon, R. Ruel, R. E. Scotti, T. W. Van Blarcum, L. Zhang, C. R. Giles, “Fully provisioned 112 × 112 micro-mechanical optical crossconnect with 35.8  Tb/s demonstrated capacity,” in Optical Fiber Communication Conference (Optical Society of America, 2000), postdeadline paper.

Goyal, S.

R. Ryf, J. Kim, P. J. Hickey, A. Gnauck, D. Carr, F. Pardo, R. Bolle, C. Frahm, N. Basavanhally, C. Yoh, D. Ramsey, R. Boie, R. George, J. Kraus, C. Lichtenwalner, R. Papazian, J. Gates, R. H. Shea, A. Gasparyan, V. Muratov, E. J. Griffith, A. J. Prybyla, S. Goyal, D. C. White, T. M. Lin, R. Ruel, C. Nijander, S. Arney, T. D. Neilson, J. D. Bishop, P. Kolodner, S. Pau, C. Nuzman, A. Weis, B. Kumar, D. Lieuwen, V. Aksyuk, S. D. Greywall, C. T. Lee, T. H. Soh, M. W. Mansfield, S. Jin, Y. W. Lai, A. H. Huggins, L. D. Barr, A. R. Cirelli, R. G. Bogart, K. Teffeau, R. Vella, H. Mavoori, A. Ramirez, A. N. Ciampa, P. F. Klemens, D. M. Morris, T. Boone, Q. J. Liu, M. J. Rosamilia, R. C. Giles, “1296-port MEMS transparent optical crossconnect with 2.07  petabit/s switch capacity,” in Optical Fiber Communication Conference (Optical Society of America, 2001), postdeadline paper.

Green, W. M. J.

Greywall, S. D.

R. Ryf, J. Kim, P. J. Hickey, A. Gnauck, D. Carr, F. Pardo, R. Bolle, C. Frahm, N. Basavanhally, C. Yoh, D. Ramsey, R. Boie, R. George, J. Kraus, C. Lichtenwalner, R. Papazian, J. Gates, R. H. Shea, A. Gasparyan, V. Muratov, E. J. Griffith, A. J. Prybyla, S. Goyal, D. C. White, T. M. Lin, R. Ruel, C. Nijander, S. Arney, T. D. Neilson, J. D. Bishop, P. Kolodner, S. Pau, C. Nuzman, A. Weis, B. Kumar, D. Lieuwen, V. Aksyuk, S. D. Greywall, C. T. Lee, T. H. Soh, M. W. Mansfield, S. Jin, Y. W. Lai, A. H. Huggins, L. D. Barr, A. R. Cirelli, R. G. Bogart, K. Teffeau, R. Vella, H. Mavoori, A. Ramirez, A. N. Ciampa, P. F. Klemens, D. M. Morris, T. Boone, Q. J. Liu, M. J. Rosamilia, R. C. Giles, “1296-port MEMS transparent optical crossconnect with 2.07  petabit/s switch capacity,” in Optical Fiber Communication Conference (Optical Society of America, 2001), postdeadline paper.

Griffith, E. J.

R. Ryf, J. Kim, P. J. Hickey, A. Gnauck, D. Carr, F. Pardo, R. Bolle, C. Frahm, N. Basavanhally, C. Yoh, D. Ramsey, R. Boie, R. George, J. Kraus, C. Lichtenwalner, R. Papazian, J. Gates, R. H. Shea, A. Gasparyan, V. Muratov, E. J. Griffith, A. J. Prybyla, S. Goyal, D. C. White, T. M. Lin, R. Ruel, C. Nijander, S. Arney, T. D. Neilson, J. D. Bishop, P. Kolodner, S. Pau, C. Nuzman, A. Weis, B. Kumar, D. Lieuwen, V. Aksyuk, S. D. Greywall, C. T. Lee, T. H. Soh, M. W. Mansfield, S. Jin, Y. W. Lai, A. H. Huggins, L. D. Barr, A. R. Cirelli, R. G. Bogart, K. Teffeau, R. Vella, H. Mavoori, A. Ramirez, A. N. Ciampa, P. F. Klemens, D. M. Morris, T. Boone, Q. J. Liu, M. J. Rosamilia, R. C. Giles, “1296-port MEMS transparent optical crossconnect with 2.07  petabit/s switch capacity,” in Optical Fiber Communication Conference (Optical Society of America, 2001), postdeadline paper.

Guan, B.

S. T. S. Cheung, B. Guan, S. S. Djordjevic, K. Okamoto, S. J. B. Yoo, “Low-loss and high contrast silicon-on-insulator (SOI) arrayed waveguide grating,” in Conference on Lasers and Electro-Optics (Optical Society of America, 2012), paper CM4A.5.

Gui, C.

G. J. Veldhuis, T. Nauta, C. Gui, J. W. Berenschot, P. V. Lambeck, “Electrostatically actuated mechanooptical waveguide ON-OFF switch showing high extinction at a low actuation-voltage,” IEEE J. Sel. Top. Quantum Electron. 5, 60–66 (1999).
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Hane, K.

S. Abe, K. Hane, “Variable-gap silicon photonic waveguide coupler switch with a nanolatch mechanism,” IEEE Photon. Technol. Lett. 25, 675–677 (2013).
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Y. Munemasa, K. Hane, “A compact 1 × 3 silicon shotonic waveguide switch based on precise investigation of coupling characteristics of variable-gap coupler,” Jpn. J. Appl. Phys. 52, 06GL15 (2013).
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Y. Akihama, K. Hane, “Single and multiple optical switches that use freestanding silicon nanowire waveguide couplers,” Light Sci. Appl. 1, e16 (2012).
[Crossref]

E. Bulgan, Y. Kanamori, K. Hane, “Submicron silicon waveguide optical switch driven by microelectromechanical actuator,” Appl. Phys. Lett. 92, 101110 (2008).
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Hasama, T.

Helkey, R.

X. Zheng, V. Kaman, S. Yuan, Y. Xu, O. Jerphagnon, A. Keating, R. C. Anderson, H. N. Poulsen, B. Liu, J. R. Sechrist, C. Pusarla, R. Helkey, D. J. Blumenthal, J. E. Bowers, “Three-dimensional MEMS photonic cross-connect switch design and performance,” IEEE J. Sel. Top. Quantum Electron. 9, 571–578 (2003).
[Crossref]

Hickey, J. P.

D. T. Neilson, V. A. Aksyuk, S. Arney, N. R. Basavanhally, K. S. Bhalla, D. J. Bishop, B. A. Boie, C. A. Bolle, J. V. Gates, A. M. Gottlieb, J. P. Hickey, N. A. Jackman, P. R. Kolodner, S. K. Korotky, B. Mikkelsen, F. Pardo, G. Raybon, R. Ruel, R. E. Scotti, T. W. Van Blarcum, L. Zhang, C. R. Giles, “Fully provisioned 112 × 112 micro-mechanical optical crossconnect with 35.8  Tb/s demonstrated capacity,” in Optical Fiber Communication Conference (Optical Society of America, 2000), postdeadline paper.

Hickey, P. J.

R. Ryf, J. Kim, P. J. Hickey, A. Gnauck, D. Carr, F. Pardo, R. Bolle, C. Frahm, N. Basavanhally, C. Yoh, D. Ramsey, R. Boie, R. George, J. Kraus, C. Lichtenwalner, R. Papazian, J. Gates, R. H. Shea, A. Gasparyan, V. Muratov, E. J. Griffith, A. J. Prybyla, S. Goyal, D. C. White, T. M. Lin, R. Ruel, C. Nijander, S. Arney, T. D. Neilson, J. D. Bishop, P. Kolodner, S. Pau, C. Nuzman, A. Weis, B. Kumar, D. Lieuwen, V. Aksyuk, S. D. Greywall, C. T. Lee, T. H. Soh, M. W. Mansfield, S. Jin, Y. W. Lai, A. H. Huggins, L. D. Barr, A. R. Cirelli, R. G. Bogart, K. Teffeau, R. Vella, H. Mavoori, A. Ramirez, A. N. Ciampa, P. F. Klemens, D. M. Morris, T. Boone, Q. J. Liu, M. J. Rosamilia, R. C. Giles, “1296-port MEMS transparent optical crossconnect with 2.07  petabit/s switch capacity,” in Optical Fiber Communication Conference (Optical Society of America, 2001), postdeadline paper.

Higurashi, E.

T. Yamamoto, J. Yamaguchi, N. Takeuchi, A. Shimizu, E. Higurashi, R. Sawada, Y. Uenishi, “A three-dimensional MEMS optical switching module having 100 input and 100 output ports,” IEEE Photon. Technol. Lett. 15, 1360–1362 (2003).
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Ho, P.

M. W. Pruessner, K. Amarnath, M. Datta, D. P. Kelly, S. Kanakaraju, P. Ho, R. Ghodssi, “InP-based optical waveguide MEMS switches with evanescent coupling mechanism,” J. Microelectromech. Syst. 14, 1070–1081 (2005).
[Crossref]

Horsley, D. A.

Huggins, A. H.

R. Ryf, J. Kim, P. J. Hickey, A. Gnauck, D. Carr, F. Pardo, R. Bolle, C. Frahm, N. Basavanhally, C. Yoh, D. Ramsey, R. Boie, R. George, J. Kraus, C. Lichtenwalner, R. Papazian, J. Gates, R. H. Shea, A. Gasparyan, V. Muratov, E. J. Griffith, A. J. Prybyla, S. Goyal, D. C. White, T. M. Lin, R. Ruel, C. Nijander, S. Arney, T. D. Neilson, J. D. Bishop, P. Kolodner, S. Pau, C. Nuzman, A. Weis, B. Kumar, D. Lieuwen, V. Aksyuk, S. D. Greywall, C. T. Lee, T. H. Soh, M. W. Mansfield, S. Jin, Y. W. Lai, A. H. Huggins, L. D. Barr, A. R. Cirelli, R. G. Bogart, K. Teffeau, R. Vella, H. Mavoori, A. Ramirez, A. N. Ciampa, P. F. Klemens, D. M. Morris, T. Boone, Q. J. Liu, M. J. Rosamilia, R. C. Giles, “1296-port MEMS transparent optical crossconnect with 2.07  petabit/s switch capacity,” in Optical Fiber Communication Conference (Optical Society of America, 2001), postdeadline paper.

Igarashi, Y.

Ishikawa, H.

Jackman, N. A.

D. T. Neilson, V. A. Aksyuk, S. Arney, N. R. Basavanhally, K. S. Bhalla, D. J. Bishop, B. A. Boie, C. A. Bolle, J. V. Gates, A. M. Gottlieb, J. P. Hickey, N. A. Jackman, P. R. Kolodner, S. K. Korotky, B. Mikkelsen, F. Pardo, G. Raybon, R. Ruel, R. E. Scotti, T. W. Van Blarcum, L. Zhang, C. R. Giles, “Fully provisioned 112 × 112 micro-mechanical optical crossconnect with 35.8  Tb/s demonstrated capacity,” in Optical Fiber Communication Conference (Optical Society of America, 2000), postdeadline paper.

Jahnes, C. V.

A. V. Rylyakov, C. L. Schow, B. G. Lee, W. M. J. Green, S. Assefa, F. E. Doany, M. Yang, J. Van Campenhout, C. V. Jahnes, J. A. Kash, Y. A. Vlasov, “Silicon photonic switches hybrid-integrated with CMOS drivers,” IEEE J. Solid-State Circuits 47, 345–354 (2012).
[Crossref]

M. Yang, W. M. J. Green, S. Assefa, J. Van Campenhout, B. G. Lee, C. V. Jahnes, F. E. Doany, C. L. Schow, J. A. Kash, Y. A. Vlasov, “Non-blocking 4 × 4 electro-optic silicon switch for on-chip photonic networks,” Opt. Express 19, 47–54 (2011).
[Crossref]

Jerphagnon, O.

X. Zheng, V. Kaman, S. Yuan, Y. Xu, O. Jerphagnon, A. Keating, R. C. Anderson, H. N. Poulsen, B. Liu, J. R. Sechrist, C. Pusarla, R. Helkey, D. J. Blumenthal, J. E. Bowers, “Three-dimensional MEMS photonic cross-connect switch design and performance,” IEEE J. Sel. Top. Quantum Electron. 9, 571–578 (2003).
[Crossref]

Jin, S.

R. Ryf, J. Kim, P. J. Hickey, A. Gnauck, D. Carr, F. Pardo, R. Bolle, C. Frahm, N. Basavanhally, C. Yoh, D. Ramsey, R. Boie, R. George, J. Kraus, C. Lichtenwalner, R. Papazian, J. Gates, R. H. Shea, A. Gasparyan, V. Muratov, E. J. Griffith, A. J. Prybyla, S. Goyal, D. C. White, T. M. Lin, R. Ruel, C. Nijander, S. Arney, T. D. Neilson, J. D. Bishop, P. Kolodner, S. Pau, C. Nuzman, A. Weis, B. Kumar, D. Lieuwen, V. Aksyuk, S. D. Greywall, C. T. Lee, T. H. Soh, M. W. Mansfield, S. Jin, Y. W. Lai, A. H. Huggins, L. D. Barr, A. R. Cirelli, R. G. Bogart, K. Teffeau, R. Vella, H. Mavoori, A. Ramirez, A. N. Ciampa, P. F. Klemens, D. M. Morris, T. Boone, Q. J. Liu, M. J. Rosamilia, R. C. Giles, “1296-port MEMS transparent optical crossconnect with 2.07  petabit/s switch capacity,” in Optical Fiber Communication Conference (Optical Society of America, 2001), postdeadline paper.

Kaman, V.

X. Zheng, V. Kaman, S. Yuan, Y. Xu, O. Jerphagnon, A. Keating, R. C. Anderson, H. N. Poulsen, B. Liu, J. R. Sechrist, C. Pusarla, R. Helkey, D. J. Blumenthal, J. E. Bowers, “Three-dimensional MEMS photonic cross-connect switch design and performance,” IEEE J. Sel. Top. Quantum Electron. 9, 571–578 (2003).
[Crossref]

Kanakaraju, S.

M. W. Pruessner, K. Amarnath, M. Datta, D. P. Kelly, S. Kanakaraju, P. Ho, R. Ghodssi, “InP-based optical waveguide MEMS switches with evanescent coupling mechanism,” J. Microelectromech. Syst. 14, 1070–1081 (2005).
[Crossref]

Kanamori, Y.

E. Bulgan, Y. Kanamori, K. Hane, “Submicron silicon waveguide optical switch driven by microelectromechanical actuator,” Appl. Phys. Lett. 92, 101110 (2008).
[Crossref]

Kash, J. A.

A. V. Rylyakov, C. L. Schow, B. G. Lee, W. M. J. Green, S. Assefa, F. E. Doany, M. Yang, J. Van Campenhout, C. V. Jahnes, J. A. Kash, Y. A. Vlasov, “Silicon photonic switches hybrid-integrated with CMOS drivers,” IEEE J. Solid-State Circuits 47, 345–354 (2012).
[Crossref]

M. Yang, W. M. J. Green, S. Assefa, J. Van Campenhout, B. G. Lee, C. V. Jahnes, F. E. Doany, C. L. Schow, J. A. Kash, Y. A. Vlasov, “Non-blocking 4 × 4 electro-optic silicon switch for on-chip photonic networks,” Opt. Express 19, 47–54 (2011).
[Crossref]

Kawashima, H.

Keating, A.

X. Zheng, V. Kaman, S. Yuan, Y. Xu, O. Jerphagnon, A. Keating, R. C. Anderson, H. N. Poulsen, B. Liu, J. R. Sechrist, C. Pusarla, R. Helkey, D. J. Blumenthal, J. E. Bowers, “Three-dimensional MEMS photonic cross-connect switch design and performance,” IEEE J. Sel. Top. Quantum Electron. 9, 571–578 (2003).
[Crossref]

Kelly, D. P.

M. W. Pruessner, K. Amarnath, M. Datta, D. P. Kelly, S. Kanakaraju, P. Ho, R. Ghodssi, “InP-based optical waveguide MEMS switches with evanescent coupling mechanism,” J. Microelectromech. Syst. 14, 1070–1081 (2005).
[Crossref]

Khater, M. H.

Kiewra, E.

Kim, J.

R. Ryf, J. Kim, P. J. Hickey, A. Gnauck, D. Carr, F. Pardo, R. Bolle, C. Frahm, N. Basavanhally, C. Yoh, D. Ramsey, R. Boie, R. George, J. Kraus, C. Lichtenwalner, R. Papazian, J. Gates, R. H. Shea, A. Gasparyan, V. Muratov, E. J. Griffith, A. J. Prybyla, S. Goyal, D. C. White, T. M. Lin, R. Ruel, C. Nijander, S. Arney, T. D. Neilson, J. D. Bishop, P. Kolodner, S. Pau, C. Nuzman, A. Weis, B. Kumar, D. Lieuwen, V. Aksyuk, S. D. Greywall, C. T. Lee, T. H. Soh, M. W. Mansfield, S. Jin, Y. W. Lai, A. H. Huggins, L. D. Barr, A. R. Cirelli, R. G. Bogart, K. Teffeau, R. Vella, H. Mavoori, A. Ramirez, A. N. Ciampa, P. F. Klemens, D. M. Morris, T. Boone, Q. J. Liu, M. J. Rosamilia, R. C. Giles, “1296-port MEMS transparent optical crossconnect with 2.07  petabit/s switch capacity,” in Optical Fiber Communication Conference (Optical Society of America, 2001), postdeadline paper.

Kim, S. H.

Kintaka, K.

Klemens, P. F.

R. Ryf, J. Kim, P. J. Hickey, A. Gnauck, D. Carr, F. Pardo, R. Bolle, C. Frahm, N. Basavanhally, C. Yoh, D. Ramsey, R. Boie, R. George, J. Kraus, C. Lichtenwalner, R. Papazian, J. Gates, R. H. Shea, A. Gasparyan, V. Muratov, E. J. Griffith, A. J. Prybyla, S. Goyal, D. C. White, T. M. Lin, R. Ruel, C. Nijander, S. Arney, T. D. Neilson, J. D. Bishop, P. Kolodner, S. Pau, C. Nuzman, A. Weis, B. Kumar, D. Lieuwen, V. Aksyuk, S. D. Greywall, C. T. Lee, T. H. Soh, M. W. Mansfield, S. Jin, Y. W. Lai, A. H. Huggins, L. D. Barr, A. R. Cirelli, R. G. Bogart, K. Teffeau, R. Vella, H. Mavoori, A. Ramirez, A. N. Ciampa, P. F. Klemens, D. M. Morris, T. Boone, Q. J. Liu, M. J. Rosamilia, R. C. Giles, “1296-port MEMS transparent optical crossconnect with 2.07  petabit/s switch capacity,” in Optical Fiber Communication Conference (Optical Society of America, 2001), postdeadline paper.

Kolodner, P.

R. Ryf, J. Kim, P. J. Hickey, A. Gnauck, D. Carr, F. Pardo, R. Bolle, C. Frahm, N. Basavanhally, C. Yoh, D. Ramsey, R. Boie, R. George, J. Kraus, C. Lichtenwalner, R. Papazian, J. Gates, R. H. Shea, A. Gasparyan, V. Muratov, E. J. Griffith, A. J. Prybyla, S. Goyal, D. C. White, T. M. Lin, R. Ruel, C. Nijander, S. Arney, T. D. Neilson, J. D. Bishop, P. Kolodner, S. Pau, C. Nuzman, A. Weis, B. Kumar, D. Lieuwen, V. Aksyuk, S. D. Greywall, C. T. Lee, T. H. Soh, M. W. Mansfield, S. Jin, Y. W. Lai, A. H. Huggins, L. D. Barr, A. R. Cirelli, R. G. Bogart, K. Teffeau, R. Vella, H. Mavoori, A. Ramirez, A. N. Ciampa, P. F. Klemens, D. M. Morris, T. Boone, Q. J. Liu, M. J. Rosamilia, R. C. Giles, “1296-port MEMS transparent optical crossconnect with 2.07  petabit/s switch capacity,” in Optical Fiber Communication Conference (Optical Society of America, 2001), postdeadline paper.

Kolodner, P. R.

D. T. Neilson, V. A. Aksyuk, S. Arney, N. R. Basavanhally, K. S. Bhalla, D. J. Bishop, B. A. Boie, C. A. Bolle, J. V. Gates, A. M. Gottlieb, J. P. Hickey, N. A. Jackman, P. R. Kolodner, S. K. Korotky, B. Mikkelsen, F. Pardo, G. Raybon, R. Ruel, R. E. Scotti, T. W. Van Blarcum, L. Zhang, C. R. Giles, “Fully provisioned 112 × 112 micro-mechanical optical crossconnect with 35.8  Tb/s demonstrated capacity,” in Optical Fiber Communication Conference (Optical Society of America, 2000), postdeadline paper.

Korotky, S. K.

D. T. Neilson, V. A. Aksyuk, S. Arney, N. R. Basavanhally, K. S. Bhalla, D. J. Bishop, B. A. Boie, C. A. Bolle, J. V. Gates, A. M. Gottlieb, J. P. Hickey, N. A. Jackman, P. R. Kolodner, S. K. Korotky, B. Mikkelsen, F. Pardo, G. Raybon, R. Ruel, R. E. Scotti, T. W. Van Blarcum, L. Zhang, C. R. Giles, “Fully provisioned 112 × 112 micro-mechanical optical crossconnect with 35.8  Tb/s demonstrated capacity,” in Optical Fiber Communication Conference (Optical Society of America, 2000), postdeadline paper.

Kraus, J.

R. Ryf, J. Kim, P. J. Hickey, A. Gnauck, D. Carr, F. Pardo, R. Bolle, C. Frahm, N. Basavanhally, C. Yoh, D. Ramsey, R. Boie, R. George, J. Kraus, C. Lichtenwalner, R. Papazian, J. Gates, R. H. Shea, A. Gasparyan, V. Muratov, E. J. Griffith, A. J. Prybyla, S. Goyal, D. C. White, T. M. Lin, R. Ruel, C. Nijander, S. Arney, T. D. Neilson, J. D. Bishop, P. Kolodner, S. Pau, C. Nuzman, A. Weis, B. Kumar, D. Lieuwen, V. Aksyuk, S. D. Greywall, C. T. Lee, T. H. Soh, M. W. Mansfield, S. Jin, Y. W. Lai, A. H. Huggins, L. D. Barr, A. R. Cirelli, R. G. Bogart, K. Teffeau, R. Vella, H. Mavoori, A. Ramirez, A. N. Ciampa, P. F. Klemens, D. M. Morris, T. Boone, Q. J. Liu, M. J. Rosamilia, R. C. Giles, “1296-port MEMS transparent optical crossconnect with 2.07  petabit/s switch capacity,” in Optical Fiber Communication Conference (Optical Society of America, 2001), postdeadline paper.

Kuchta, D. M.

Kumar, B.

R. Ryf, J. Kim, P. J. Hickey, A. Gnauck, D. Carr, F. Pardo, R. Bolle, C. Frahm, N. Basavanhally, C. Yoh, D. Ramsey, R. Boie, R. George, J. Kraus, C. Lichtenwalner, R. Papazian, J. Gates, R. H. Shea, A. Gasparyan, V. Muratov, E. J. Griffith, A. J. Prybyla, S. Goyal, D. C. White, T. M. Lin, R. Ruel, C. Nijander, S. Arney, T. D. Neilson, J. D. Bishop, P. Kolodner, S. Pau, C. Nuzman, A. Weis, B. Kumar, D. Lieuwen, V. Aksyuk, S. D. Greywall, C. T. Lee, T. H. Soh, M. W. Mansfield, S. Jin, Y. W. Lai, A. H. Huggins, L. D. Barr, A. R. Cirelli, R. G. Bogart, K. Teffeau, R. Vella, H. Mavoori, A. Ramirez, A. N. Ciampa, P. F. Klemens, D. M. Morris, T. Boone, Q. J. Liu, M. J. Rosamilia, R. C. Giles, “1296-port MEMS transparent optical crossconnect with 2.07  petabit/s switch capacity,” in Optical Fiber Communication Conference (Optical Society of America, 2001), postdeadline paper.

Kuwatsuka, H.

Lai, Y. W.

R. Ryf, J. Kim, P. J. Hickey, A. Gnauck, D. Carr, F. Pardo, R. Bolle, C. Frahm, N. Basavanhally, C. Yoh, D. Ramsey, R. Boie, R. George, J. Kraus, C. Lichtenwalner, R. Papazian, J. Gates, R. H. Shea, A. Gasparyan, V. Muratov, E. J. Griffith, A. J. Prybyla, S. Goyal, D. C. White, T. M. Lin, R. Ruel, C. Nijander, S. Arney, T. D. Neilson, J. D. Bishop, P. Kolodner, S. Pau, C. Nuzman, A. Weis, B. Kumar, D. Lieuwen, V. Aksyuk, S. D. Greywall, C. T. Lee, T. H. Soh, M. W. Mansfield, S. Jin, Y. W. Lai, A. H. Huggins, L. D. Barr, A. R. Cirelli, R. G. Bogart, K. Teffeau, R. Vella, H. Mavoori, A. Ramirez, A. N. Ciampa, P. F. Klemens, D. M. Morris, T. Boone, Q. J. Liu, M. J. Rosamilia, R. C. Giles, “1296-port MEMS transparent optical crossconnect with 2.07  petabit/s switch capacity,” in Optical Fiber Communication Conference (Optical Society of America, 2001), postdeadline paper.

Lambeck, P. V.

G. J. Veldhuis, T. Nauta, C. Gui, J. W. Berenschot, P. V. Lambeck, “Electrostatically actuated mechanooptical waveguide ON-OFF switch showing high extinction at a low actuation-voltage,” IEEE J. Sel. Top. Quantum Electron. 5, 60–66 (1999).
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Lean, J. J.

T. Bakke, C. P. Tigges, J. J. Lean, C. T. Sullivan, O. B. Spahn, “Planar microoptomechanical waveguide switches,” IEEE J. Sel. Top. Quantum Electron. 8, 64–72 (2002).
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Lee, B. G.

Lee, C. T.

R. Ryf, J. Kim, P. J. Hickey, A. Gnauck, D. Carr, F. Pardo, R. Bolle, C. Frahm, N. Basavanhally, C. Yoh, D. Ramsey, R. Boie, R. George, J. Kraus, C. Lichtenwalner, R. Papazian, J. Gates, R. H. Shea, A. Gasparyan, V. Muratov, E. J. Griffith, A. J. Prybyla, S. Goyal, D. C. White, T. M. Lin, R. Ruel, C. Nijander, S. Arney, T. D. Neilson, J. D. Bishop, P. Kolodner, S. Pau, C. Nuzman, A. Weis, B. Kumar, D. Lieuwen, V. Aksyuk, S. D. Greywall, C. T. Lee, T. H. Soh, M. W. Mansfield, S. Jin, Y. W. Lai, A. H. Huggins, L. D. Barr, A. R. Cirelli, R. G. Bogart, K. Teffeau, R. Vella, H. Mavoori, A. Ramirez, A. N. Ciampa, P. F. Klemens, D. M. Morris, T. Boone, Q. J. Liu, M. J. Rosamilia, R. C. Giles, “1296-port MEMS transparent optical crossconnect with 2.07  petabit/s switch capacity,” in Optical Fiber Communication Conference (Optical Society of America, 2001), postdeadline paper.

Lee, M. C. M.

J. Yao, D. Leuenberger, M. C. M. Lee, M. C. Wu, “Silicon microtoroidal resonators with integrated MEMS tunable coupler,” IEEE J. Sel. Top. Quantum Electron. 13, 202–208 (2007).
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M. C. M. Lee, M. C. Wu, “Tunable coupling regimes of silicon microdisk resonators using MEMS actuators,” Opt. Express 14, 4703–4712 (2006).
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M. C. M. Lee, M. C. Wu, “MEMS-actuated microdisk resonators with variable power coupling ratios,” IEEE Photon. Technol. Lett. 17, 1034–1036 (2005).
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Leuenberger, D.

J. Yao, D. Leuenberger, M. C. M. Lee, M. C. Wu, “Silicon microtoroidal resonators with integrated MEMS tunable coupler,” IEEE J. Sel. Top. Quantum Electron. 13, 202–208 (2007).
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Lichtenwalner, C.

R. Ryf, J. Kim, P. J. Hickey, A. Gnauck, D. Carr, F. Pardo, R. Bolle, C. Frahm, N. Basavanhally, C. Yoh, D. Ramsey, R. Boie, R. George, J. Kraus, C. Lichtenwalner, R. Papazian, J. Gates, R. H. Shea, A. Gasparyan, V. Muratov, E. J. Griffith, A. J. Prybyla, S. Goyal, D. C. White, T. M. Lin, R. Ruel, C. Nijander, S. Arney, T. D. Neilson, J. D. Bishop, P. Kolodner, S. Pau, C. Nuzman, A. Weis, B. Kumar, D. Lieuwen, V. Aksyuk, S. D. Greywall, C. T. Lee, T. H. Soh, M. W. Mansfield, S. Jin, Y. W. Lai, A. H. Huggins, L. D. Barr, A. R. Cirelli, R. G. Bogart, K. Teffeau, R. Vella, H. Mavoori, A. Ramirez, A. N. Ciampa, P. F. Klemens, D. M. Morris, T. Boone, Q. J. Liu, M. J. Rosamilia, R. C. Giles, “1296-port MEMS transparent optical crossconnect with 2.07  petabit/s switch capacity,” in Optical Fiber Communication Conference (Optical Society of America, 2001), postdeadline paper.

Lieuwen, D.

R. Ryf, J. Kim, P. J. Hickey, A. Gnauck, D. Carr, F. Pardo, R. Bolle, C. Frahm, N. Basavanhally, C. Yoh, D. Ramsey, R. Boie, R. George, J. Kraus, C. Lichtenwalner, R. Papazian, J. Gates, R. H. Shea, A. Gasparyan, V. Muratov, E. J. Griffith, A. J. Prybyla, S. Goyal, D. C. White, T. M. Lin, R. Ruel, C. Nijander, S. Arney, T. D. Neilson, J. D. Bishop, P. Kolodner, S. Pau, C. Nuzman, A. Weis, B. Kumar, D. Lieuwen, V. Aksyuk, S. D. Greywall, C. T. Lee, T. H. Soh, M. W. Mansfield, S. Jin, Y. W. Lai, A. H. Huggins, L. D. Barr, A. R. Cirelli, R. G. Bogart, K. Teffeau, R. Vella, H. Mavoori, A. Ramirez, A. N. Ciampa, P. F. Klemens, D. M. Morris, T. Boone, Q. J. Liu, M. J. Rosamilia, R. C. Giles, “1296-port MEMS transparent optical crossconnect with 2.07  petabit/s switch capacity,” in Optical Fiber Communication Conference (Optical Society of America, 2001), postdeadline paper.

Lin, L.

G. J. O. Brien, D. J. Monk, L. Lin, “MEMS cantilever beam electrostatic pull-in model,” Proc. SPIE 4593, 31–41 (2001).
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Lin, T. M.

R. Ryf, J. Kim, P. J. Hickey, A. Gnauck, D. Carr, F. Pardo, R. Bolle, C. Frahm, N. Basavanhally, C. Yoh, D. Ramsey, R. Boie, R. George, J. Kraus, C. Lichtenwalner, R. Papazian, J. Gates, R. H. Shea, A. Gasparyan, V. Muratov, E. J. Griffith, A. J. Prybyla, S. Goyal, D. C. White, T. M. Lin, R. Ruel, C. Nijander, S. Arney, T. D. Neilson, J. D. Bishop, P. Kolodner, S. Pau, C. Nuzman, A. Weis, B. Kumar, D. Lieuwen, V. Aksyuk, S. D. Greywall, C. T. Lee, T. H. Soh, M. W. Mansfield, S. Jin, Y. W. Lai, A. H. Huggins, L. D. Barr, A. R. Cirelli, R. G. Bogart, K. Teffeau, R. Vella, H. Mavoori, A. Ramirez, A. N. Ciampa, P. F. Klemens, D. M. Morris, T. Boone, Q. J. Liu, M. J. Rosamilia, R. C. Giles, “1296-port MEMS transparent optical crossconnect with 2.07  petabit/s switch capacity,” in Optical Fiber Communication Conference (Optical Society of America, 2001), postdeadline paper.

Liu, B.

X. Zheng, V. Kaman, S. Yuan, Y. Xu, O. Jerphagnon, A. Keating, R. C. Anderson, H. N. Poulsen, B. Liu, J. R. Sechrist, C. Pusarla, R. Helkey, D. J. Blumenthal, J. E. Bowers, “Three-dimensional MEMS photonic cross-connect switch design and performance,” IEEE J. Sel. Top. Quantum Electron. 9, 571–578 (2003).
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Liu, Q. J.

R. Ryf, J. Kim, P. J. Hickey, A. Gnauck, D. Carr, F. Pardo, R. Bolle, C. Frahm, N. Basavanhally, C. Yoh, D. Ramsey, R. Boie, R. George, J. Kraus, C. Lichtenwalner, R. Papazian, J. Gates, R. H. Shea, A. Gasparyan, V. Muratov, E. J. Griffith, A. J. Prybyla, S. Goyal, D. C. White, T. M. Lin, R. Ruel, C. Nijander, S. Arney, T. D. Neilson, J. D. Bishop, P. Kolodner, S. Pau, C. Nuzman, A. Weis, B. Kumar, D. Lieuwen, V. Aksyuk, S. D. Greywall, C. T. Lee, T. H. Soh, M. W. Mansfield, S. Jin, Y. W. Lai, A. H. Huggins, L. D. Barr, A. R. Cirelli, R. G. Bogart, K. Teffeau, R. Vella, H. Mavoori, A. Ramirez, A. N. Ciampa, P. F. Klemens, D. M. Morris, T. Boone, Q. J. Liu, M. J. Rosamilia, R. C. Giles, “1296-port MEMS transparent optical crossconnect with 2.07  petabit/s switch capacity,” in Optical Fiber Communication Conference (Optical Society of America, 2001), postdeadline paper.

Mansfield, M. W.

R. Ryf, J. Kim, P. J. Hickey, A. Gnauck, D. Carr, F. Pardo, R. Bolle, C. Frahm, N. Basavanhally, C. Yoh, D. Ramsey, R. Boie, R. George, J. Kraus, C. Lichtenwalner, R. Papazian, J. Gates, R. H. Shea, A. Gasparyan, V. Muratov, E. J. Griffith, A. J. Prybyla, S. Goyal, D. C. White, T. M. Lin, R. Ruel, C. Nijander, S. Arney, T. D. Neilson, J. D. Bishop, P. Kolodner, S. Pau, C. Nuzman, A. Weis, B. Kumar, D. Lieuwen, V. Aksyuk, S. D. Greywall, C. T. Lee, T. H. Soh, M. W. Mansfield, S. Jin, Y. W. Lai, A. H. Huggins, L. D. Barr, A. R. Cirelli, R. G. Bogart, K. Teffeau, R. Vella, H. Mavoori, A. Ramirez, A. N. Ciampa, P. F. Klemens, D. M. Morris, T. Boone, Q. J. Liu, M. J. Rosamilia, R. C. Giles, “1296-port MEMS transparent optical crossconnect with 2.07  petabit/s switch capacity,” in Optical Fiber Communication Conference (Optical Society of America, 2001), postdeadline paper.

Masahara, M.

Matsukawa, T.

Mavoori, H.

R. Ryf, J. Kim, P. J. Hickey, A. Gnauck, D. Carr, F. Pardo, R. Bolle, C. Frahm, N. Basavanhally, C. Yoh, D. Ramsey, R. Boie, R. George, J. Kraus, C. Lichtenwalner, R. Papazian, J. Gates, R. H. Shea, A. Gasparyan, V. Muratov, E. J. Griffith, A. J. Prybyla, S. Goyal, D. C. White, T. M. Lin, R. Ruel, C. Nijander, S. Arney, T. D. Neilson, J. D. Bishop, P. Kolodner, S. Pau, C. Nuzman, A. Weis, B. Kumar, D. Lieuwen, V. Aksyuk, S. D. Greywall, C. T. Lee, T. H. Soh, M. W. Mansfield, S. Jin, Y. W. Lai, A. H. Huggins, L. D. Barr, A. R. Cirelli, R. G. Bogart, K. Teffeau, R. Vella, H. Mavoori, A. Ramirez, A. N. Ciampa, P. F. Klemens, D. M. Morris, T. Boone, Q. J. Liu, M. J. Rosamilia, R. C. Giles, “1296-port MEMS transparent optical crossconnect with 2.07  petabit/s switch capacity,” in Optical Fiber Communication Conference (Optical Society of America, 2001), postdeadline paper.

Megens, M.

Mikkelsen, B.

D. T. Neilson, V. A. Aksyuk, S. Arney, N. R. Basavanhally, K. S. Bhalla, D. J. Bishop, B. A. Boie, C. A. Bolle, J. V. Gates, A. M. Gottlieb, J. P. Hickey, N. A. Jackman, P. R. Kolodner, S. K. Korotky, B. Mikkelsen, F. Pardo, G. Raybon, R. Ruel, R. E. Scotti, T. W. Van Blarcum, L. Zhang, C. R. Giles, “Fully provisioned 112 × 112 micro-mechanical optical crossconnect with 35.8  Tb/s demonstrated capacity,” in Optical Fiber Communication Conference (Optical Society of America, 2000), postdeadline paper.

Monk, D. J.

G. J. O. Brien, D. J. Monk, L. Lin, “MEMS cantilever beam electrostatic pull-in model,” Proc. SPIE 4593, 31–41 (2001).
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Morris, D. M.

R. Ryf, J. Kim, P. J. Hickey, A. Gnauck, D. Carr, F. Pardo, R. Bolle, C. Frahm, N. Basavanhally, C. Yoh, D. Ramsey, R. Boie, R. George, J. Kraus, C. Lichtenwalner, R. Papazian, J. Gates, R. H. Shea, A. Gasparyan, V. Muratov, E. J. Griffith, A. J. Prybyla, S. Goyal, D. C. White, T. M. Lin, R. Ruel, C. Nijander, S. Arney, T. D. Neilson, J. D. Bishop, P. Kolodner, S. Pau, C. Nuzman, A. Weis, B. Kumar, D. Lieuwen, V. Aksyuk, S. D. Greywall, C. T. Lee, T. H. Soh, M. W. Mansfield, S. Jin, Y. W. Lai, A. H. Huggins, L. D. Barr, A. R. Cirelli, R. G. Bogart, K. Teffeau, R. Vella, H. Mavoori, A. Ramirez, A. N. Ciampa, P. F. Klemens, D. M. Morris, T. Boone, Q. J. Liu, M. J. Rosamilia, R. C. Giles, “1296-port MEMS transparent optical crossconnect with 2.07  petabit/s switch capacity,” in Optical Fiber Communication Conference (Optical Society of America, 2001), postdeadline paper.

Munemasa, Y.

Y. Munemasa, K. Hane, “A compact 1 × 3 silicon shotonic waveguide switch based on precise investigation of coupling characteristics of variable-gap coupler,” Jpn. J. Appl. Phys. 52, 06GL15 (2013).
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Muratov, V.

R. Ryf, J. Kim, P. J. Hickey, A. Gnauck, D. Carr, F. Pardo, R. Bolle, C. Frahm, N. Basavanhally, C. Yoh, D. Ramsey, R. Boie, R. George, J. Kraus, C. Lichtenwalner, R. Papazian, J. Gates, R. H. Shea, A. Gasparyan, V. Muratov, E. J. Griffith, A. J. Prybyla, S. Goyal, D. C. White, T. M. Lin, R. Ruel, C. Nijander, S. Arney, T. D. Neilson, J. D. Bishop, P. Kolodner, S. Pau, C. Nuzman, A. Weis, B. Kumar, D. Lieuwen, V. Aksyuk, S. D. Greywall, C. T. Lee, T. H. Soh, M. W. Mansfield, S. Jin, Y. W. Lai, A. H. Huggins, L. D. Barr, A. R. Cirelli, R. G. Bogart, K. Teffeau, R. Vella, H. Mavoori, A. Ramirez, A. N. Ciampa, P. F. Klemens, D. M. Morris, T. Boone, Q. J. Liu, M. J. Rosamilia, R. C. Giles, “1296-port MEMS transparent optical crossconnect with 2.07  petabit/s switch capacity,” in Optical Fiber Communication Conference (Optical Society of America, 2001), postdeadline paper.

Namiki, S.

Nauta, T.

G. J. Veldhuis, T. Nauta, C. Gui, J. W. Berenschot, P. V. Lambeck, “Electrostatically actuated mechanooptical waveguide ON-OFF switch showing high extinction at a low actuation-voltage,” IEEE J. Sel. Top. Quantum Electron. 5, 60–66 (1999).
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Neilson, D. T.

D. T. Neilson, V. A. Aksyuk, S. Arney, N. R. Basavanhally, K. S. Bhalla, D. J. Bishop, B. A. Boie, C. A. Bolle, J. V. Gates, A. M. Gottlieb, J. P. Hickey, N. A. Jackman, P. R. Kolodner, S. K. Korotky, B. Mikkelsen, F. Pardo, G. Raybon, R. Ruel, R. E. Scotti, T. W. Van Blarcum, L. Zhang, C. R. Giles, “Fully provisioned 112 × 112 micro-mechanical optical crossconnect with 35.8  Tb/s demonstrated capacity,” in Optical Fiber Communication Conference (Optical Society of America, 2000), postdeadline paper.

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R. Ryf, J. Kim, P. J. Hickey, A. Gnauck, D. Carr, F. Pardo, R. Bolle, C. Frahm, N. Basavanhally, C. Yoh, D. Ramsey, R. Boie, R. George, J. Kraus, C. Lichtenwalner, R. Papazian, J. Gates, R. H. Shea, A. Gasparyan, V. Muratov, E. J. Griffith, A. J. Prybyla, S. Goyal, D. C. White, T. M. Lin, R. Ruel, C. Nijander, S. Arney, T. D. Neilson, J. D. Bishop, P. Kolodner, S. Pau, C. Nuzman, A. Weis, B. Kumar, D. Lieuwen, V. Aksyuk, S. D. Greywall, C. T. Lee, T. H. Soh, M. W. Mansfield, S. Jin, Y. W. Lai, A. H. Huggins, L. D. Barr, A. R. Cirelli, R. G. Bogart, K. Teffeau, R. Vella, H. Mavoori, A. Ramirez, A. N. Ciampa, P. F. Klemens, D. M. Morris, T. Boone, Q. J. Liu, M. J. Rosamilia, R. C. Giles, “1296-port MEMS transparent optical crossconnect with 2.07  petabit/s switch capacity,” in Optical Fiber Communication Conference (Optical Society of America, 2001), postdeadline paper.

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Nuzman, C.

R. Ryf, J. Kim, P. J. Hickey, A. Gnauck, D. Carr, F. Pardo, R. Bolle, C. Frahm, N. Basavanhally, C. Yoh, D. Ramsey, R. Boie, R. George, J. Kraus, C. Lichtenwalner, R. Papazian, J. Gates, R. H. Shea, A. Gasparyan, V. Muratov, E. J. Griffith, A. J. Prybyla, S. Goyal, D. C. White, T. M. Lin, R. Ruel, C. Nijander, S. Arney, T. D. Neilson, J. D. Bishop, P. Kolodner, S. Pau, C. Nuzman, A. Weis, B. Kumar, D. Lieuwen, V. Aksyuk, S. D. Greywall, C. T. Lee, T. H. Soh, M. W. Mansfield, S. Jin, Y. W. Lai, A. H. Huggins, L. D. Barr, A. R. Cirelli, R. G. Bogart, K. Teffeau, R. Vella, H. Mavoori, A. Ramirez, A. N. Ciampa, P. F. Klemens, D. M. Morris, T. Boone, Q. J. Liu, M. J. Rosamilia, R. C. Giles, “1296-port MEMS transparent optical crossconnect with 2.07  petabit/s switch capacity,” in Optical Fiber Communication Conference (Optical Society of America, 2001), postdeadline paper.

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Papen, G.

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Pardo, F.

R. Ryf, J. Kim, P. J. Hickey, A. Gnauck, D. Carr, F. Pardo, R. Bolle, C. Frahm, N. Basavanhally, C. Yoh, D. Ramsey, R. Boie, R. George, J. Kraus, C. Lichtenwalner, R. Papazian, J. Gates, R. H. Shea, A. Gasparyan, V. Muratov, E. J. Griffith, A. J. Prybyla, S. Goyal, D. C. White, T. M. Lin, R. Ruel, C. Nijander, S. Arney, T. D. Neilson, J. D. Bishop, P. Kolodner, S. Pau, C. Nuzman, A. Weis, B. Kumar, D. Lieuwen, V. Aksyuk, S. D. Greywall, C. T. Lee, T. H. Soh, M. W. Mansfield, S. Jin, Y. W. Lai, A. H. Huggins, L. D. Barr, A. R. Cirelli, R. G. Bogart, K. Teffeau, R. Vella, H. Mavoori, A. Ramirez, A. N. Ciampa, P. F. Klemens, D. M. Morris, T. Boone, Q. J. Liu, M. J. Rosamilia, R. C. Giles, “1296-port MEMS transparent optical crossconnect with 2.07  petabit/s switch capacity,” in Optical Fiber Communication Conference (Optical Society of America, 2001), postdeadline paper.

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Porter, G.

G. Porter, R. Strong, N. Farrington, A. Forencich, P. Chen-Sun, T. Rosing, Y. Fainman, G. Papen, A. Vahdat, “Integrating microsecond circuit switching into the data center,” ACM SIGCOMM Comput. Commun. Rev. 43, 447–458 (2013).

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Poulsen, H. N.

X. Zheng, V. Kaman, S. Yuan, Y. Xu, O. Jerphagnon, A. Keating, R. C. Anderson, H. N. Poulsen, B. Liu, J. R. Sechrist, C. Pusarla, R. Helkey, D. J. Blumenthal, J. E. Bowers, “Three-dimensional MEMS photonic cross-connect switch design and performance,” IEEE J. Sel. Top. Quantum Electron. 9, 571–578 (2003).
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Pruessner, M. W.

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Pusarla, C.

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Raybon, G.

D. T. Neilson, V. A. Aksyuk, S. Arney, N. R. Basavanhally, K. S. Bhalla, D. J. Bishop, B. A. Boie, C. A. Bolle, J. V. Gates, A. M. Gottlieb, J. P. Hickey, N. A. Jackman, P. R. Kolodner, S. K. Korotky, B. Mikkelsen, F. Pardo, G. Raybon, R. Ruel, R. E. Scotti, T. W. Van Blarcum, L. Zhang, C. R. Giles, “Fully provisioned 112 × 112 micro-mechanical optical crossconnect with 35.8  Tb/s demonstrated capacity,” in Optical Fiber Communication Conference (Optical Society of America, 2000), postdeadline paper.

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Rosamilia, M. J.

R. Ryf, J. Kim, P. J. Hickey, A. Gnauck, D. Carr, F. Pardo, R. Bolle, C. Frahm, N. Basavanhally, C. Yoh, D. Ramsey, R. Boie, R. George, J. Kraus, C. Lichtenwalner, R. Papazian, J. Gates, R. H. Shea, A. Gasparyan, V. Muratov, E. J. Griffith, A. J. Prybyla, S. Goyal, D. C. White, T. M. Lin, R. Ruel, C. Nijander, S. Arney, T. D. Neilson, J. D. Bishop, P. Kolodner, S. Pau, C. Nuzman, A. Weis, B. Kumar, D. Lieuwen, V. Aksyuk, S. D. Greywall, C. T. Lee, T. H. Soh, M. W. Mansfield, S. Jin, Y. W. Lai, A. H. Huggins, L. D. Barr, A. R. Cirelli, R. G. Bogart, K. Teffeau, R. Vella, H. Mavoori, A. Ramirez, A. N. Ciampa, P. F. Klemens, D. M. Morris, T. Boone, Q. J. Liu, M. J. Rosamilia, R. C. Giles, “1296-port MEMS transparent optical crossconnect with 2.07  petabit/s switch capacity,” in Optical Fiber Communication Conference (Optical Society of America, 2001), postdeadline paper.

Rosing, T.

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Ruel, R.

D. T. Neilson, V. A. Aksyuk, S. Arney, N. R. Basavanhally, K. S. Bhalla, D. J. Bishop, B. A. Boie, C. A. Bolle, J. V. Gates, A. M. Gottlieb, J. P. Hickey, N. A. Jackman, P. R. Kolodner, S. K. Korotky, B. Mikkelsen, F. Pardo, G. Raybon, R. Ruel, R. E. Scotti, T. W. Van Blarcum, L. Zhang, C. R. Giles, “Fully provisioned 112 × 112 micro-mechanical optical crossconnect with 35.8  Tb/s demonstrated capacity,” in Optical Fiber Communication Conference (Optical Society of America, 2000), postdeadline paper.

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Schow, C. L.

Scotti, R. E.

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X. Zheng, V. Kaman, S. Yuan, Y. Xu, O. Jerphagnon, A. Keating, R. C. Anderson, H. N. Poulsen, B. Liu, J. R. Sechrist, C. Pusarla, R. Helkey, D. J. Blumenthal, J. E. Bowers, “Three-dimensional MEMS photonic cross-connect switch design and performance,” IEEE J. Sel. Top. Quantum Electron. 9, 571–578 (2003).
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Tanizawa, K.

Teffeau, K.

R. Ryf, J. Kim, P. J. Hickey, A. Gnauck, D. Carr, F. Pardo, R. Bolle, C. Frahm, N. Basavanhally, C. Yoh, D. Ramsey, R. Boie, R. George, J. Kraus, C. Lichtenwalner, R. Papazian, J. Gates, R. H. Shea, A. Gasparyan, V. Muratov, E. J. Griffith, A. J. Prybyla, S. Goyal, D. C. White, T. M. Lin, R. Ruel, C. Nijander, S. Arney, T. D. Neilson, J. D. Bishop, P. Kolodner, S. Pau, C. Nuzman, A. Weis, B. Kumar, D. Lieuwen, V. Aksyuk, S. D. Greywall, C. T. Lee, T. H. Soh, M. W. Mansfield, S. Jin, Y. W. Lai, A. H. Huggins, L. D. Barr, A. R. Cirelli, R. G. Bogart, K. Teffeau, R. Vella, H. Mavoori, A. Ramirez, A. N. Ciampa, P. F. Klemens, D. M. Morris, T. Boone, Q. J. Liu, M. J. Rosamilia, R. C. Giles, “1296-port MEMS transparent optical crossconnect with 2.07  petabit/s switch capacity,” in Optical Fiber Communication Conference (Optical Society of America, 2001), postdeadline paper.

Tigges, C. P.

T. Bakke, C. P. Tigges, J. J. Lean, C. T. Sullivan, O. B. Spahn, “Planar microoptomechanical waveguide switches,” IEEE J. Sel. Top. Quantum Electron. 8, 64–72 (2002).
[Crossref]

Toshiyoshi, H.

H. Toshiyoshi, H. Fujita, “Electrostatic micro torsion mirrors for an optical switch matrix,” J. Microelectromech. Syst. 5, 231–237 (1996).
[Crossref]

Uenishi, Y.

T. Yamamoto, J. Yamaguchi, N. Takeuchi, A. Shimizu, E. Higurashi, R. Sawada, Y. Uenishi, “A three-dimensional MEMS optical switching module having 100 input and 100 output ports,” IEEE Photon. Technol. Lett. 15, 1360–1362 (2003).
[Crossref]

Vahdat, A.

G. Porter, R. Strong, N. Farrington, A. Forencich, P. Chen-Sun, T. Rosing, Y. Fainman, G. Papen, A. Vahdat, “Integrating microsecond circuit switching into the data center,” ACM SIGCOMM Comput. Commun. Rev. 43, 447–458 (2013).

N. Farrington, G. Porter, Y. Fainman, G. Papen, A. Vahdat, “Hunting mice with microsecond circuit switches,” in Proceedings of the 11th ACM Workshop on Hot Topics in Networks (ACM, 2012), pp. 115–120.

Van Blarcum, T. W.

D. T. Neilson, V. A. Aksyuk, S. Arney, N. R. Basavanhally, K. S. Bhalla, D. J. Bishop, B. A. Boie, C. A. Bolle, J. V. Gates, A. M. Gottlieb, J. P. Hickey, N. A. Jackman, P. R. Kolodner, S. K. Korotky, B. Mikkelsen, F. Pardo, G. Raybon, R. Ruel, R. E. Scotti, T. W. Van Blarcum, L. Zhang, C. R. Giles, “Fully provisioned 112 × 112 micro-mechanical optical crossconnect with 35.8  Tb/s demonstrated capacity,” in Optical Fiber Communication Conference (Optical Society of America, 2000), postdeadline paper.

Van Campenhout, J.

Van Thourhout, D.

S. K. Selvaraja, W. Bogaerts, D. Van Thourhout, “Loss reduction in silicon nanophotonic waveguide micro-bends through etch profile improvement,” Opt. Commun. 284, 2141–2144 (2011).
[Crossref]

Veldhuis, G. J.

G. J. Veldhuis, T. Nauta, C. Gui, J. W. Berenschot, P. V. Lambeck, “Electrostatically actuated mechanooptical waveguide ON-OFF switch showing high extinction at a low actuation-voltage,” IEEE J. Sel. Top. Quantum Electron. 5, 60–66 (1999).
[Crossref]

Vella, R.

R. Ryf, J. Kim, P. J. Hickey, A. Gnauck, D. Carr, F. Pardo, R. Bolle, C. Frahm, N. Basavanhally, C. Yoh, D. Ramsey, R. Boie, R. George, J. Kraus, C. Lichtenwalner, R. Papazian, J. Gates, R. H. Shea, A. Gasparyan, V. Muratov, E. J. Griffith, A. J. Prybyla, S. Goyal, D. C. White, T. M. Lin, R. Ruel, C. Nijander, S. Arney, T. D. Neilson, J. D. Bishop, P. Kolodner, S. Pau, C. Nuzman, A. Weis, B. Kumar, D. Lieuwen, V. Aksyuk, S. D. Greywall, C. T. Lee, T. H. Soh, M. W. Mansfield, S. Jin, Y. W. Lai, A. H. Huggins, L. D. Barr, A. R. Cirelli, R. G. Bogart, K. Teffeau, R. Vella, H. Mavoori, A. Ramirez, A. N. Ciampa, P. F. Klemens, D. M. Morris, T. Boone, Q. J. Liu, M. J. Rosamilia, R. C. Giles, “1296-port MEMS transparent optical crossconnect with 2.07  petabit/s switch capacity,” in Optical Fiber Communication Conference (Optical Society of America, 2001), postdeadline paper.

Vlasov, Y. A.

Weis, A.

R. Ryf, J. Kim, P. J. Hickey, A. Gnauck, D. Carr, F. Pardo, R. Bolle, C. Frahm, N. Basavanhally, C. Yoh, D. Ramsey, R. Boie, R. George, J. Kraus, C. Lichtenwalner, R. Papazian, J. Gates, R. H. Shea, A. Gasparyan, V. Muratov, E. J. Griffith, A. J. Prybyla, S. Goyal, D. C. White, T. M. Lin, R. Ruel, C. Nijander, S. Arney, T. D. Neilson, J. D. Bishop, P. Kolodner, S. Pau, C. Nuzman, A. Weis, B. Kumar, D. Lieuwen, V. Aksyuk, S. D. Greywall, C. T. Lee, T. H. Soh, M. W. Mansfield, S. Jin, Y. W. Lai, A. H. Huggins, L. D. Barr, A. R. Cirelli, R. G. Bogart, K. Teffeau, R. Vella, H. Mavoori, A. Ramirez, A. N. Ciampa, P. F. Klemens, D. M. Morris, T. Boone, Q. J. Liu, M. J. Rosamilia, R. C. Giles, “1296-port MEMS transparent optical crossconnect with 2.07  petabit/s switch capacity,” in Optical Fiber Communication Conference (Optical Society of America, 2001), postdeadline paper.

White, D. C.

R. Ryf, J. Kim, P. J. Hickey, A. Gnauck, D. Carr, F. Pardo, R. Bolle, C. Frahm, N. Basavanhally, C. Yoh, D. Ramsey, R. Boie, R. George, J. Kraus, C. Lichtenwalner, R. Papazian, J. Gates, R. H. Shea, A. Gasparyan, V. Muratov, E. J. Griffith, A. J. Prybyla, S. Goyal, D. C. White, T. M. Lin, R. Ruel, C. Nijander, S. Arney, T. D. Neilson, J. D. Bishop, P. Kolodner, S. Pau, C. Nuzman, A. Weis, B. Kumar, D. Lieuwen, V. Aksyuk, S. D. Greywall, C. T. Lee, T. H. Soh, M. W. Mansfield, S. Jin, Y. W. Lai, A. H. Huggins, L. D. Barr, A. R. Cirelli, R. G. Bogart, K. Teffeau, R. Vella, H. Mavoori, A. Ramirez, A. N. Ciampa, P. F. Klemens, D. M. Morris, T. Boone, Q. J. Liu, M. J. Rosamilia, R. C. Giles, “1296-port MEMS transparent optical crossconnect with 2.07  petabit/s switch capacity,” in Optical Fiber Communication Conference (Optical Society of America, 2001), postdeadline paper.

Wu, M. C.

T. K. Chan, M. Megens, B. W. Yoo, J. Wyras, C. J. Chang-Hasnain, M. C. Wu, D. A. Horsley, “Optical beamsteering using an 8 × 8 MEMS phased array with closed-loop interferometric phase control,” Opt. Express 21, 2807–2815 (2013).
[Crossref]

J. Yao, M. C. Wu, “Bandwidth-tunable add-drop filters based on micro-electro-mechanical-system actuated silicon microtoroidal resonators,” Opt. Lett. 34, 2557–2559 (2009).
[Crossref]

J. Yao, D. Leuenberger, M. C. M. Lee, M. C. Wu, “Silicon microtoroidal resonators with integrated MEMS tunable coupler,” IEEE J. Sel. Top. Quantum Electron. 13, 202–208 (2007).
[Crossref]

M. C. M. Lee, M. C. Wu, “Tunable coupling regimes of silicon microdisk resonators using MEMS actuators,” Opt. Express 14, 4703–4712 (2006).
[Crossref]

M. C. Wu, O. Solgaard, J. E. Ford, “Optical MEMS for lightwave communication,” J. Lightwave Technol. 24, 4433–4454 (2006).
[Crossref]

M. C. M. Lee, M. C. Wu, “MEMS-actuated microdisk resonators with variable power coupling ratios,” IEEE Photon. Technol. Lett. 17, 1034–1036 (2005).
[Crossref]

R. T. Chen, H. Nguyen, M. C. Wu, “A high-speed low-voltage stress-induced micromachined 2 × 2 optical switch,” IEEE Photon. Technol. Lett. 11, 1396–1398 (1999).
[Crossref]

Wyras, J.

Xu, Y.

X. Zheng, V. Kaman, S. Yuan, Y. Xu, O. Jerphagnon, A. Keating, R. C. Anderson, H. N. Poulsen, B. Liu, J. R. Sechrist, C. Pusarla, R. Helkey, D. J. Blumenthal, J. E. Bowers, “Three-dimensional MEMS photonic cross-connect switch design and performance,” IEEE J. Sel. Top. Quantum Electron. 9, 571–578 (2003).
[Crossref]

Yamaguchi, J.

T. Yamamoto, J. Yamaguchi, N. Takeuchi, A. Shimizu, E. Higurashi, R. Sawada, Y. Uenishi, “A three-dimensional MEMS optical switching module having 100 input and 100 output ports,” IEEE Photon. Technol. Lett. 15, 1360–1362 (2003).
[Crossref]

Yamamoto, T.

T. Yamamoto, J. Yamaguchi, N. Takeuchi, A. Shimizu, E. Higurashi, R. Sawada, Y. Uenishi, “A three-dimensional MEMS optical switching module having 100 input and 100 output ports,” IEEE Photon. Technol. Lett. 15, 1360–1362 (2003).
[Crossref]

Yanagihara, M.

Yang, M.

A. V. Rylyakov, C. L. Schow, B. G. Lee, W. M. J. Green, S. Assefa, F. E. Doany, M. Yang, J. Van Campenhout, C. V. Jahnes, J. A. Kash, Y. A. Vlasov, “Silicon photonic switches hybrid-integrated with CMOS drivers,” IEEE J. Solid-State Circuits 47, 345–354 (2012).
[Crossref]

M. Yang, W. M. J. Green, S. Assefa, J. Van Campenhout, B. G. Lee, C. V. Jahnes, F. E. Doany, C. L. Schow, J. A. Kash, Y. A. Vlasov, “Non-blocking 4 × 4 electro-optic silicon switch for on-chip photonic networks,” Opt. Express 19, 47–54 (2011).
[Crossref]

Yao, J.

J. Yao, M. C. Wu, “Bandwidth-tunable add-drop filters based on micro-electro-mechanical-system actuated silicon microtoroidal resonators,” Opt. Lett. 34, 2557–2559 (2009).
[Crossref]

J. Yao, D. Leuenberger, M. C. M. Lee, M. C. Wu, “Silicon microtoroidal resonators with integrated MEMS tunable coupler,” IEEE J. Sel. Top. Quantum Electron. 13, 202–208 (2007).
[Crossref]

Yoh, C.

R. Ryf, J. Kim, P. J. Hickey, A. Gnauck, D. Carr, F. Pardo, R. Bolle, C. Frahm, N. Basavanhally, C. Yoh, D. Ramsey, R. Boie, R. George, J. Kraus, C. Lichtenwalner, R. Papazian, J. Gates, R. H. Shea, A. Gasparyan, V. Muratov, E. J. Griffith, A. J. Prybyla, S. Goyal, D. C. White, T. M. Lin, R. Ruel, C. Nijander, S. Arney, T. D. Neilson, J. D. Bishop, P. Kolodner, S. Pau, C. Nuzman, A. Weis, B. Kumar, D. Lieuwen, V. Aksyuk, S. D. Greywall, C. T. Lee, T. H. Soh, M. W. Mansfield, S. Jin, Y. W. Lai, A. H. Huggins, L. D. Barr, A. R. Cirelli, R. G. Bogart, K. Teffeau, R. Vella, H. Mavoori, A. Ramirez, A. N. Ciampa, P. F. Klemens, D. M. Morris, T. Boone, Q. J. Liu, M. J. Rosamilia, R. C. Giles, “1296-port MEMS transparent optical crossconnect with 2.07  petabit/s switch capacity,” in Optical Fiber Communication Conference (Optical Society of America, 2001), postdeadline paper.

Yoo, B. W.

Yoo, S. J. B.

S. T. S. Cheung, B. Guan, S. S. Djordjevic, K. Okamoto, S. J. B. Yoo, “Low-loss and high contrast silicon-on-insulator (SOI) arrayed waveguide grating,” in Conference on Lasers and Electro-Optics (Optical Society of America, 2012), paper CM4A.5.

Young, W.

W. Young, R. Budynas, A. Sadegh, Roark’s Formulas for Stress and Strain, 8th ed. (McGraw-Hill, 2011).

Yuan, S.

X. Zheng, V. Kaman, S. Yuan, Y. Xu, O. Jerphagnon, A. Keating, R. C. Anderson, H. N. Poulsen, B. Liu, J. R. Sechrist, C. Pusarla, R. Helkey, D. J. Blumenthal, J. E. Bowers, “Three-dimensional MEMS photonic cross-connect switch design and performance,” IEEE J. Sel. Top. Quantum Electron. 9, 571–578 (2003).
[Crossref]

Zhang, L.

D. T. Neilson, V. A. Aksyuk, S. Arney, N. R. Basavanhally, K. S. Bhalla, D. J. Bishop, B. A. Boie, C. A. Bolle, J. V. Gates, A. M. Gottlieb, J. P. Hickey, N. A. Jackman, P. R. Kolodner, S. K. Korotky, B. Mikkelsen, F. Pardo, G. Raybon, R. Ruel, R. E. Scotti, T. W. Van Blarcum, L. Zhang, C. R. Giles, “Fully provisioned 112 × 112 micro-mechanical optical crossconnect with 35.8  Tb/s demonstrated capacity,” in Optical Fiber Communication Conference (Optical Society of America, 2000), postdeadline paper.

Zheng, X.

X. Zheng, V. Kaman, S. Yuan, Y. Xu, O. Jerphagnon, A. Keating, R. C. Anderson, H. N. Poulsen, B. Liu, J. R. Sechrist, C. Pusarla, R. Helkey, D. J. Blumenthal, J. E. Bowers, “Three-dimensional MEMS photonic cross-connect switch design and performance,” IEEE J. Sel. Top. Quantum Electron. 9, 571–578 (2003).
[Crossref]

ACM SIGCOMM Comput. Commun. Rev. (1)

G. Porter, R. Strong, N. Farrington, A. Forencich, P. Chen-Sun, T. Rosing, Y. Fainman, G. Papen, A. Vahdat, “Integrating microsecond circuit switching into the data center,” ACM SIGCOMM Comput. Commun. Rev. 43, 447–458 (2013).

Appl. Phys. Lett. (1)

E. Bulgan, Y. Kanamori, K. Hane, “Submicron silicon waveguide optical switch driven by microelectromechanical actuator,” Appl. Phys. Lett. 92, 101110 (2008).
[Crossref]

IEEE Commun. Mag. (1)

P. De Dobbelaere, K. Falta, L. Fan, S. Gloeckner, S. Patra, “Digital MEMS for optical switching,” IEEE Commun. Mag. 40(3), 88–95 (2002).
[Crossref]

IEEE J. Sel. Top. Quantum Electron. (6)

X. Zheng, V. Kaman, S. Yuan, Y. Xu, O. Jerphagnon, A. Keating, R. C. Anderson, H. N. Poulsen, B. Liu, J. R. Sechrist, C. Pusarla, R. Helkey, D. J. Blumenthal, J. E. Bowers, “Three-dimensional MEMS photonic cross-connect switch design and performance,” IEEE J. Sel. Top. Quantum Electron. 9, 571–578 (2003).
[Crossref]

E. Ollier, “Optical MEMS devices based on moving waveguides,” IEEE J. Sel. Top. Quantum Electron. 8, 155–162 (2002).
[Crossref]

T. Bakke, C. P. Tigges, J. J. Lean, C. T. Sullivan, O. B. Spahn, “Planar microoptomechanical waveguide switches,” IEEE J. Sel. Top. Quantum Electron. 8, 64–72 (2002).
[Crossref]

J. Yao, D. Leuenberger, M. C. M. Lee, M. C. Wu, “Silicon microtoroidal resonators with integrated MEMS tunable coupler,” IEEE J. Sel. Top. Quantum Electron. 13, 202–208 (2007).
[Crossref]

G. J. Veldhuis, T. Nauta, C. Gui, J. W. Berenschot, P. V. Lambeck, “Electrostatically actuated mechanooptical waveguide ON-OFF switch showing high extinction at a low actuation-voltage,” IEEE J. Sel. Top. Quantum Electron. 5, 60–66 (1999).
[Crossref]

F. Chollet, M. de Labachelerie, H. Fujita, “Compact evanescent optical switch and attenuator with electromechanical actuation,” IEEE J. Sel. Top. Quantum Electron. 5, 52–59 (1999).
[Crossref]

IEEE J. Solid-State Circuits (1)

A. V. Rylyakov, C. L. Schow, B. G. Lee, W. M. J. Green, S. Assefa, F. E. Doany, M. Yang, J. Van Campenhout, C. V. Jahnes, J. A. Kash, Y. A. Vlasov, “Silicon photonic switches hybrid-integrated with CMOS drivers,” IEEE J. Solid-State Circuits 47, 345–354 (2012).
[Crossref]

IEEE Photon. Technol. Lett. (4)

T. Yamamoto, J. Yamaguchi, N. Takeuchi, A. Shimizu, E. Higurashi, R. Sawada, Y. Uenishi, “A three-dimensional MEMS optical switching module having 100 input and 100 output ports,” IEEE Photon. Technol. Lett. 15, 1360–1362 (2003).
[Crossref]

R. T. Chen, H. Nguyen, M. C. Wu, “A high-speed low-voltage stress-induced micromachined 2 × 2 optical switch,” IEEE Photon. Technol. Lett. 11, 1396–1398 (1999).
[Crossref]

M. C. M. Lee, M. C. Wu, “MEMS-actuated microdisk resonators with variable power coupling ratios,” IEEE Photon. Technol. Lett. 17, 1034–1036 (2005).
[Crossref]

S. Abe, K. Hane, “Variable-gap silicon photonic waveguide coupler switch with a nanolatch mechanism,” IEEE Photon. Technol. Lett. 25, 675–677 (2013).
[Crossref]

J. Lightwave Technol. (2)

J. Microelectromech. Syst. (2)

M. W. Pruessner, K. Amarnath, M. Datta, D. P. Kelly, S. Kanakaraju, P. Ho, R. Ghodssi, “InP-based optical waveguide MEMS switches with evanescent coupling mechanism,” J. Microelectromech. Syst. 14, 1070–1081 (2005).
[Crossref]

H. Toshiyoshi, H. Fujita, “Electrostatic micro torsion mirrors for an optical switch matrix,” J. Microelectromech. Syst. 5, 231–237 (1996).
[Crossref]

Jpn. J. Appl. Phys. (1)

Y. Munemasa, K. Hane, “A compact 1 × 3 silicon shotonic waveguide switch based on precise investigation of coupling characteristics of variable-gap coupler,” Jpn. J. Appl. Phys. 52, 06GL15 (2013).
[Crossref]

Light Sci. Appl. (1)

Y. Akihama, K. Hane, “Single and multiple optical switches that use freestanding silicon nanowire waveguide couplers,” Light Sci. Appl. 1, e16 (2012).
[Crossref]

Opt. Commun. (1)

S. K. Selvaraja, W. Bogaerts, D. Van Thourhout, “Loss reduction in silicon nanophotonic waveguide micro-bends through etch profile improvement,” Opt. Commun. 284, 2141–2144 (2011).
[Crossref]

Opt. Express (8)

M. C. M. Lee, M. C. Wu, “Tunable coupling regimes of silicon microdisk resonators using MEMS actuators,” Opt. Express 14, 4703–4712 (2006).
[Crossref]

T. K. Chan, M. Megens, B. W. Yoo, J. Wyras, C. J. Chang-Hasnain, M. C. Wu, D. A. Horsley, “Optical beamsteering using an 8 × 8 MEMS phased array with closed-loop interferometric phase control,” Opt. Express 21, 2807–2815 (2013).
[Crossref]

L. Chen, Y. Chen, “Compact, low-loss and low-power 8 × 8 broadband silicon optical switch,” Opt. Express 20, 18977–18985 (2012).
[Crossref]

Y. Shoji, K. Kintaka, S. Suda, H. Kawashima, T. Hasama, H. Ishikawa, “Low-crosstalk 2 × 2 thermo-optic switch with silicon wire waveguides,” Opt. Express 18, 9071–9075 (2010).
[Crossref]

K. Suzuki, K. Tanizawa, T. Matsukawa, G. Cong, S. H. Kim, S. Suda, M. Ohno, T. Chiba, H. Tadokoro, M. Yanagihara, Y. Igarashi, M. Masahara, S. Namiki, H. Kawashima, “Ultra-compact 8 × 8 strictly-non-blocking Si-wire PILOSS switch,” Opt. Express 22, 3887–3894 (2014).
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G. W. Cong, T. Matsukawa, T. Chiba, H. Tadokoro, M. Yanagihara, M. Ohno, H. Kawashima, H. Kuwatsuka, Y. Igarashi, M. Masahara, H. Ishikawa, “Large current MOSFET on photonic silicon-on-insulator wafers and its monolithic integration with a thermo-optic 2 × 2 Mach-Zehnder switch,” Opt. Express 21, 6889–6894 (2013).
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M. Yang, W. M. J. Green, S. Assefa, J. Van Campenhout, B. G. Lee, C. V. Jahnes, F. E. Doany, C. L. Schow, J. A. Kash, Y. A. Vlasov, “Non-blocking 4 × 4 electro-optic silicon switch for on-chip photonic networks,” Opt. Express 19, 47–54 (2011).
[Crossref]

J. Van Campenhout, W. M. J. Green, S. Assefa, Y. A. Vlasov, “Low-power, 2 × 2 silicon electro-optic switch with 110-nm bandwidth for broadband reconfigurable optical networks,” Opt. Express 17, 24020–24029 (2009).
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Opt. Lett. (1)

Proc. SPIE (1)

G. J. O. Brien, D. J. Monk, L. Lin, “MEMS cantilever beam electrostatic pull-in model,” Proc. SPIE 4593, 31–41 (2001).
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Other (6)

S. T. S. Cheung, B. Guan, S. S. Djordjevic, K. Okamoto, S. J. B. Yoo, “Low-loss and high contrast silicon-on-insulator (SOI) arrayed waveguide grating,” in Conference on Lasers and Electro-Optics (Optical Society of America, 2012), paper CM4A.5.

W. Young, R. Budynas, A. Sadegh, Roark’s Formulas for Stress and Strain, 8th ed. (McGraw-Hill, 2011).

N. Farrington, G. Porter, Y. Fainman, G. Papen, A. Vahdat, “Hunting mice with microsecond circuit switches,” in Proceedings of the 11th ACM Workshop on Hot Topics in Networks (ACM, 2012), pp. 115–120.

J. E. Fouquet, “Compact optical cross-connect switch based on total internal reflection in a fluid-containing planar lightwave circuit,” in Optical Fiber Communication Conference (Optical Society of America, 2000), paper TuM1.

D. T. Neilson, V. A. Aksyuk, S. Arney, N. R. Basavanhally, K. S. Bhalla, D. J. Bishop, B. A. Boie, C. A. Bolle, J. V. Gates, A. M. Gottlieb, J. P. Hickey, N. A. Jackman, P. R. Kolodner, S. K. Korotky, B. Mikkelsen, F. Pardo, G. Raybon, R. Ruel, R. E. Scotti, T. W. Van Blarcum, L. Zhang, C. R. Giles, “Fully provisioned 112 × 112 micro-mechanical optical crossconnect with 35.8  Tb/s demonstrated capacity,” in Optical Fiber Communication Conference (Optical Society of America, 2000), postdeadline paper.

R. Ryf, J. Kim, P. J. Hickey, A. Gnauck, D. Carr, F. Pardo, R. Bolle, C. Frahm, N. Basavanhally, C. Yoh, D. Ramsey, R. Boie, R. George, J. Kraus, C. Lichtenwalner, R. Papazian, J. Gates, R. H. Shea, A. Gasparyan, V. Muratov, E. J. Griffith, A. J. Prybyla, S. Goyal, D. C. White, T. M. Lin, R. Ruel, C. Nijander, S. Arney, T. D. Neilson, J. D. Bishop, P. Kolodner, S. Pau, C. Nuzman, A. Weis, B. Kumar, D. Lieuwen, V. Aksyuk, S. D. Greywall, C. T. Lee, T. H. Soh, M. W. Mansfield, S. Jin, Y. W. Lai, A. H. Huggins, L. D. Barr, A. R. Cirelli, R. G. Bogart, K. Teffeau, R. Vella, H. Mavoori, A. Ramirez, A. N. Ciampa, P. F. Klemens, D. M. Morris, T. Boone, Q. J. Liu, M. J. Rosamilia, R. C. Giles, “1296-port MEMS transparent optical crossconnect with 2.07  petabit/s switch capacity,” in Optical Fiber Communication Conference (Optical Society of America, 2001), postdeadline paper.

Supplementary Material (1)

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Figures (7)

Fig. 1.
Fig. 1. (a) Switch architecture overview. (b) Switch unit cell with MEMS actuator and movable directional coupler. (c) Cross-section view through A A line in (b).
Fig. 2.
Fig. 2. (a)  H y field plot at vertical offset = 0 nm . (b)  H y field plot at vertical offset = 1000 nm . (c) Transmission versus vertical offset.
Fig. 3.
Fig. 3. Parameter sweep with MMI length in waveguide crossing (taper length fixed at 3.5 μm); the inset shows H y field plot of MMI length at 13.5 μm.
Fig. 4.
Fig. 4. SEM images of fabricated switch chip.
Fig. 5.
Fig. 5. Measured voltage transfer curve of switch unit cell.
Fig. 6.
Fig. 6. Switch unit cell spectral response (at drop state).
Fig. 7.
Fig. 7. Measured time response of switch unit cell.

Equations (2)

Equations on this page are rendered with MathJax. Learn more.

f res = 3.52 2 π E t 2 12 ρ t 4 ,
V pull - in = 3 E t 3 z 0 3 10 ε 0 l 4 ,

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