Abstract

Fast optical switches have been proposed as a promising alternative to enable continual scaling of data centers with increasing size and data rates. Silicon photonics is a compelling platform for large-scale integrated photonic switches, leveraging advanced manufacturing foundries for electronic integrated circuits. In the past decade, the port counts of silicon photonic switches have increased steadily to 128×128. Further scaling of the switch is constrained by the maximum reticle size (2–3 cm) of lithography tools. Here, we propose to use wafer-scale integration to overcome the die size limit. As a proof of concept demonstration, we fabricated a 240×240 switch by lithographically stitching a 3×3 array of identical 80×80 switch blocks across reticle boundaries. Stitching loss is substantially reduced (0.004 dB) by tapering the waveguide width to 10 μm. The fabricated switch on a 4cm×4cm chip exhibits a maximum on-chip loss of 9.8 dB, an ON/OFF ratio of 70 dB, and switching times of less than 400 ns. To our knowledge, this is the largest integrated photonic switch ever reported. The loss-to-port count ratio (0.04 dB/port) is also the lowest.

© 2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

Full Article  |  PDF Article
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2019 (1)

2018 (6)

2017 (4)

W. D. Sacher, J. C. Mikkelsen, P. Dumais, J. Jiang, D. Goodwill, X. Luo, Y. Huang, Y. Yang, A. Bois, P. G.-Q. Lo, E. Bernier, and J. K. S. Poon, “Tri-layer silicon nitride-on-silicon photonic platform for ultra-low-loss crossings and interlayer transitions,” Opt. Express 25, 30862–30875 (2017).
[Crossref]

Y. Shen, N. C. Harris, S. Skirlo, M. Prabhu, T. Baehr-Jones, M. Hochberg, X. Sun, S. Zhao, H. Larochelle, D. Englund, and M. Soljačić, “Deep learning with coherent nanophotonic circuits,” Nat. Photonics 11, 441–446 (2017).
[Crossref]

N. C. Harris, G. R. Steinbrecher, M. Prabhu, Y. Lahini, J. Mower, D. Bunandar, C. Chen, F. N. C. Wong, T. Baehr-Jones, M. Hochberg, S. Lloyd, and D. Englund, “Quantum transport simulations in a programmable nanophotonic processor,” Nat. Photonics 11, 447–452 (2017).
[Crossref]

L. Qiao, W. Tang, and T. Chu, “32 × 32 silicon electro-optic switch with built-in monitors and balanced-status units,” Sci. Rep. 7, 42306 (2017).
[Crossref]

2016 (4)

2015 (4)

2013 (1)

J. Sun, E. Timurdogan, A. Yaacobi, E. S. Hosseini, and M. R. Watts, “Large-scale nanophotonic phased array,” Nature 493, 195–199 (2013).
[Crossref]

2012 (1)

Alsing, P. M.

Andersen, D. G.

G. Wang, D. G. Andersen, M. Kaminsky, K. Papagiannaki, T. S. E. Ng, M. Kozuch, and M. Ryan, “C-through: part-time optics in data centers,” in ACM SIGCOMM Conference (ACM, 2010), pp. 327–338.

Baehr-Jones, T.

N. C. Harris, J. Carolan, D. Bunandar, M. Prabhu, M. Hochberg, T. Baehr-Jones, M. L. Fanto, A. M. Smith, C. C. Tison, P. M. Alsing, and D. Englund, “Linear programmable nanophotonic processors,” Optica 5, 1623–1631 (2018).
[Crossref]

N. C. Harris, G. R. Steinbrecher, M. Prabhu, Y. Lahini, J. Mower, D. Bunandar, C. Chen, F. N. C. Wong, T. Baehr-Jones, M. Hochberg, S. Lloyd, and D. Englund, “Quantum transport simulations in a programmable nanophotonic processor,” Nat. Photonics 11, 447–452 (2017).
[Crossref]

Y. Shen, N. C. Harris, S. Skirlo, M. Prabhu, T. Baehr-Jones, M. Hochberg, X. Sun, S. Zhao, H. Larochelle, D. Englund, and M. Soljačić, “Deep learning with coherent nanophotonic circuits,” Nat. Photonics 11, 441–446 (2017).
[Crossref]

Bahadori, M.

Belt, M.

Bergman, K.

Bernier, E.

Bickford, J. R.

Blumenthal, D. J.

Boeuf, F.

D. Thomson, A. Zilkie, J. E. Bowers, T. Komljenovic, G. T. Reed, L. Vivien, D. Marris-Morini, E. Cassan, L. Virot, J.-M. Fédéli, J.-M. Hartmann, J. H. Schmid, D.-X. Xu, F. Boeuf, P. O’Brien, G. Z. Mashanovich, and M. Nedeljkovic, “Roadmap on silicon photonics,” J. Opt. 18, 073003 (2016).
[Crossref]

Bois, A.

Bowers, J. E.

S. Gundavarapu, M. Belt, T. A. Huffman, M. A. Tran, T. Komljenovic, J. E. Bowers, and D. J. Blumenthal, “Interferometric optical gyroscope based on an integrated Si3N4 low-loss waveguide coil,” J. Lightwave Technol. 36, 1185–1191 (2018).
[Crossref]

D. Thomson, A. Zilkie, J. E. Bowers, T. Komljenovic, G. T. Reed, L. Vivien, D. Marris-Morini, E. Cassan, L. Virot, J.-M. Fédéli, J.-M. Hartmann, J. H. Schmid, D.-X. Xu, F. Boeuf, P. O’Brien, G. Z. Mashanovich, and M. Nedeljkovic, “Roadmap on silicon photonics,” J. Opt. 18, 073003 (2016).
[Crossref]

Budd, R.

Bunandar, D.

N. C. Harris, J. Carolan, D. Bunandar, M. Prabhu, M. Hochberg, T. Baehr-Jones, M. L. Fanto, A. M. Smith, C. C. Tison, P. M. Alsing, and D. Englund, “Linear programmable nanophotonic processors,” Optica 5, 1623–1631 (2018).
[Crossref]

N. C. Harris, G. R. Steinbrecher, M. Prabhu, Y. Lahini, J. Mower, D. Bunandar, C. Chen, F. N. C. Wong, T. Baehr-Jones, M. Hochberg, S. Lloyd, and D. Englund, “Quantum transport simulations in a programmable nanophotonic processor,” Nat. Photonics 11, 447–452 (2017).
[Crossref]

Carolan, J.

Cassan, E.

D. Thomson, A. Zilkie, J. E. Bowers, T. Komljenovic, G. T. Reed, L. Vivien, D. Marris-Morini, E. Cassan, L. Virot, J.-M. Fédéli, J.-M. Hartmann, J. H. Schmid, D.-X. Xu, F. Boeuf, P. O’Brien, G. Z. Mashanovich, and M. Nedeljkovic, “Roadmap on silicon photonics,” J. Opt. 18, 073003 (2016).
[Crossref]

Celo, D.

Chen, C.

N. C. Harris, G. R. Steinbrecher, M. Prabhu, Y. Lahini, J. Mower, D. Bunandar, C. Chen, F. N. C. Wong, T. Baehr-Jones, M. Hochberg, S. Lloyd, and D. Englund, “Quantum transport simulations in a programmable nanophotonic processor,” Nat. Photonics 11, 447–452 (2017).
[Crossref]

Chen, K.

Chen, L.

Chen, R. T.

Cheng, Q.

Chu, T.

L. Qiao, W. Tang, and T. Chu, “32 × 32 silicon electro-optic switch with built-in monitors and balanced-status units,” Sci. Rep. 7, 42306 (2017).
[Crossref]

Cong, G.

Covey, J.

Doylend, J. K.

Dumais, P.

Dupuis, N.

Englund, D.

N. C. Harris, J. Carolan, D. Bunandar, M. Prabhu, M. Hochberg, T. Baehr-Jones, M. L. Fanto, A. M. Smith, C. C. Tison, P. M. Alsing, and D. Englund, “Linear programmable nanophotonic processors,” Optica 5, 1623–1631 (2018).
[Crossref]

Y. Shen, N. C. Harris, S. Skirlo, M. Prabhu, T. Baehr-Jones, M. Hochberg, X. Sun, S. Zhao, H. Larochelle, D. Englund, and M. Soljačić, “Deep learning with coherent nanophotonic circuits,” Nat. Photonics 11, 441–446 (2017).
[Crossref]

N. C. Harris, G. R. Steinbrecher, M. Prabhu, Y. Lahini, J. Mower, D. Bunandar, C. Chen, F. N. C. Wong, T. Baehr-Jones, M. Hochberg, S. Lloyd, and D. Englund, “Quantum transport simulations in a programmable nanophotonic processor,” Nat. Photonics 11, 447–452 (2017).
[Crossref]

Fanto, M. L.

Fédéli, J.-M.

D. Thomson, A. Zilkie, J. E. Bowers, T. Komljenovic, G. T. Reed, L. Vivien, D. Marris-Morini, E. Cassan, L. Virot, J.-M. Fédéli, J.-M. Hartmann, J. H. Schmid, D.-X. Xu, F. Boeuf, P. O’Brien, G. Z. Mashanovich, and M. Nedeljkovic, “Roadmap on silicon photonics,” J. Opt. 18, 073003 (2016).
[Crossref]

Feshali, A.

Geng, D.

Glick, M.

Goodwill, D.

Goodwill, D. J.

Gundavarapu, S.

Han, S.

Harris, N. C.

N. C. Harris, J. Carolan, D. Bunandar, M. Prabhu, M. Hochberg, T. Baehr-Jones, M. L. Fanto, A. M. Smith, C. C. Tison, P. M. Alsing, and D. Englund, “Linear programmable nanophotonic processors,” Optica 5, 1623–1631 (2018).
[Crossref]

N. C. Harris, G. R. Steinbrecher, M. Prabhu, Y. Lahini, J. Mower, D. Bunandar, C. Chen, F. N. C. Wong, T. Baehr-Jones, M. Hochberg, S. Lloyd, and D. Englund, “Quantum transport simulations in a programmable nanophotonic processor,” Nat. Photonics 11, 447–452 (2017).
[Crossref]

Y. Shen, N. C. Harris, S. Skirlo, M. Prabhu, T. Baehr-Jones, M. Hochberg, X. Sun, S. Zhao, H. Larochelle, D. Englund, and M. Soljačić, “Deep learning with coherent nanophotonic circuits,” Nat. Photonics 11, 441–446 (2017).
[Crossref]

Hartmann, J.-M.

D. Thomson, A. Zilkie, J. E. Bowers, T. Komljenovic, G. T. Reed, L. Vivien, D. Marris-Morini, E. Cassan, L. Virot, J.-M. Fédéli, J.-M. Hartmann, J. H. Schmid, D.-X. Xu, F. Boeuf, P. O’Brien, G. Z. Mashanovich, and M. Nedeljkovic, “Roadmap on silicon photonics,” J. Opt. 18, 073003 (2016).
[Crossref]

Hasegawa, J.

He, J.

Heck, J.

Henriksson, J.

K. Kwon, T. J. Seok, T. J. Seok, J. Henriksson, J. Luo, L. Ochikubo, J. Jacobs, R. S. Muller, and M. C. Wu, “128 × 128 silicon photonic MEMS switch with scalable row/column addressing,” in Conference on Lasers and Electro-Optics (Optical Society of America, 2018), paper SF1A.4.

Hochberg, M.

N. C. Harris, J. Carolan, D. Bunandar, M. Prabhu, M. Hochberg, T. Baehr-Jones, M. L. Fanto, A. M. Smith, C. C. Tison, P. M. Alsing, and D. Englund, “Linear programmable nanophotonic processors,” Optica 5, 1623–1631 (2018).
[Crossref]

N. C. Harris, G. R. Steinbrecher, M. Prabhu, Y. Lahini, J. Mower, D. Bunandar, C. Chen, F. N. C. Wong, T. Baehr-Jones, M. Hochberg, S. Lloyd, and D. Englund, “Quantum transport simulations in a programmable nanophotonic processor,” Nat. Photonics 11, 447–452 (2017).
[Crossref]

Y. Shen, N. C. Harris, S. Skirlo, M. Prabhu, T. Baehr-Jones, M. Hochberg, X. Sun, S. Zhao, H. Larochelle, D. Englund, and M. Soljačić, “Deep learning with coherent nanophotonic circuits,” Nat. Photonics 11, 441–446 (2017).
[Crossref]

Hosseini, A.

Hosseini, E. S.

J. Sun, E. Timurdogan, A. Yaacobi, E. S. Hosseini, and M. R. Watts, “Large-scale nanophotonic phased array,” Nature 493, 195–199 (2013).
[Crossref]

Huang, Y.

Huffman, T. A.

Hutchison, D. N.

Ikeda, K.

Jacobs, J.

K. Kwon, T. J. Seok, T. J. Seok, J. Henriksson, J. Luo, L. Ochikubo, J. Jacobs, R. S. Muller, and M. C. Wu, “128 × 128 silicon photonic MEMS switch with scalable row/column addressing,” in Conference on Lasers and Electro-Optics (Optical Society of America, 2018), paper SF1A.4.

Jiang, J.

Kaminsky, M.

G. Wang, D. G. Andersen, M. Kaminsky, K. Papagiannaki, T. S. E. Ng, M. Kozuch, and M. Ryan, “C-through: part-time optics in data centers,” in ACM SIGCOMM Conference (ACM, 2010), pp. 327–338.

Kawashima, H.

Kim, W.

Kimura, T.

Komljenovic, T.

S. Gundavarapu, M. Belt, T. A. Huffman, M. A. Tran, T. Komljenovic, J. E. Bowers, and D. J. Blumenthal, “Interferometric optical gyroscope based on an integrated Si3N4 low-loss waveguide coil,” J. Lightwave Technol. 36, 1185–1191 (2018).
[Crossref]

D. Thomson, A. Zilkie, J. E. Bowers, T. Komljenovic, G. T. Reed, L. Vivien, D. Marris-Morini, E. Cassan, L. Virot, J.-M. Fédéli, J.-M. Hartmann, J. H. Schmid, D.-X. Xu, F. Boeuf, P. O’Brien, G. Z. Mashanovich, and M. Nedeljkovic, “Roadmap on silicon photonics,” J. Opt. 18, 073003 (2016).
[Crossref]

Konoike, R.

Koshino, K.

Kozuch, M.

G. Wang, D. G. Andersen, M. Kaminsky, K. Papagiannaki, T. S. E. Ng, M. Kozuch, and M. Ryan, “C-through: part-time optics in data centers,” in ACM SIGCOMM Conference (ACM, 2010), pp. 327–338.

Kumar, R.

Kwon, K.

K. Kwon, T. J. Seok, T. J. Seok, J. Henriksson, J. Luo, L. Ochikubo, J. Jacobs, R. S. Muller, and M. C. Wu, “128 × 128 silicon photonic MEMS switch with scalable row/column addressing,” in Conference on Lasers and Electro-Optics (Optical Society of America, 2018), paper SF1A.4.

Kwong, D.

Lahini, Y.

N. C. Harris, G. R. Steinbrecher, M. Prabhu, Y. Lahini, J. Mower, D. Bunandar, C. Chen, F. N. C. Wong, T. Baehr-Jones, M. Hochberg, S. Lloyd, and D. Englund, “Quantum transport simulations in a programmable nanophotonic processor,” Nat. Photonics 11, 447–452 (2017).
[Crossref]

Larochelle, H.

Y. Shen, N. C. Harris, S. Skirlo, M. Prabhu, T. Baehr-Jones, M. Hochberg, X. Sun, S. Zhao, H. Larochelle, D. Englund, and M. Soljačić, “Deep learning with coherent nanophotonic circuits,” Nat. Photonics 11, 441–446 (2017).
[Crossref]

Lee, B. G.

Li, M.

Liu, W.

Lloyd, S.

N. C. Harris, G. R. Steinbrecher, M. Prabhu, Y. Lahini, J. Mower, D. Bunandar, C. Chen, F. N. C. Wong, T. Baehr-Jones, M. Hochberg, S. Lloyd, and D. Englund, “Quantum transport simulations in a programmable nanophotonic processor,” Nat. Photonics 11, 447–452 (2017).
[Crossref]

Lo, P. G.-Q.

Luo, J.

K. Kwon, T. J. Seok, T. J. Seok, J. Henriksson, J. Luo, L. Ochikubo, J. Jacobs, R. S. Muller, and M. C. Wu, “128 × 128 silicon photonic MEMS switch with scalable row/column addressing,” in Conference on Lasers and Electro-Optics (Optical Society of America, 2018), paper SF1A.4.

Luo, X.

Marris-Morini, D.

D. Thomson, A. Zilkie, J. E. Bowers, T. Komljenovic, G. T. Reed, L. Vivien, D. Marris-Morini, E. Cassan, L. Virot, J.-M. Fédéli, J.-M. Hartmann, J. H. Schmid, D.-X. Xu, F. Boeuf, P. O’Brien, G. Z. Mashanovich, and M. Nedeljkovic, “Roadmap on silicon photonics,” J. Opt. 18, 073003 (2016).
[Crossref]

Mashanovich, G. Z.

D. Thomson, A. Zilkie, J. E. Bowers, T. Komljenovic, G. T. Reed, L. Vivien, D. Marris-Morini, E. Cassan, L. Virot, J.-M. Fédéli, J.-M. Hartmann, J. H. Schmid, D.-X. Xu, F. Boeuf, P. O’Brien, G. Z. Mashanovich, and M. Nedeljkovic, “Roadmap on silicon photonics,” J. Opt. 18, 073003 (2016).
[Crossref]

Matsumaro, K.

Matsuura, H.

Mehrvar, H.

Mikkelsen, J. C.

Mower, J.

N. C. Harris, G. R. Steinbrecher, M. Prabhu, Y. Lahini, J. Mower, D. Bunandar, C. Chen, F. N. C. Wong, T. Baehr-Jones, M. Hochberg, S. Lloyd, and D. Englund, “Quantum transport simulations in a programmable nanophotonic processor,” Nat. Photonics 11, 447–452 (2017).
[Crossref]

Muller, R. S.

Namiki, S.

Nedeljkovic, M.

D. Thomson, A. Zilkie, J. E. Bowers, T. Komljenovic, G. T. Reed, L. Vivien, D. Marris-Morini, E. Cassan, L. Virot, J.-M. Fédéli, J.-M. Hartmann, J. H. Schmid, D.-X. Xu, F. Boeuf, P. O’Brien, G. Z. Mashanovich, and M. Nedeljkovic, “Roadmap on silicon photonics,” J. Opt. 18, 073003 (2016).
[Crossref]

Ng, T. S. E.

G. Wang, D. G. Andersen, M. Kaminsky, K. Papagiannaki, T. S. E. Ng, M. Kozuch, and M. Ryan, “C-through: part-time optics in data centers,” in ACM SIGCOMM Conference (ACM, 2010), pp. 327–338.

O’Brien, P.

D. Thomson, A. Zilkie, J. E. Bowers, T. Komljenovic, G. T. Reed, L. Vivien, D. Marris-Morini, E. Cassan, L. Virot, J.-M. Fédéli, J.-M. Hartmann, J. H. Schmid, D.-X. Xu, F. Boeuf, P. O’Brien, G. Z. Mashanovich, and M. Nedeljkovic, “Roadmap on silicon photonics,” J. Opt. 18, 073003 (2016).
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Schmid, J. H.

D. Thomson, A. Zilkie, J. E. Bowers, T. Komljenovic, G. T. Reed, L. Vivien, D. Marris-Morini, E. Cassan, L. Virot, J.-M. Fédéli, J.-M. Hartmann, J. H. Schmid, D.-X. Xu, F. Boeuf, P. O’Brien, G. Z. Mashanovich, and M. Nedeljkovic, “Roadmap on silicon photonics,” J. Opt. 18, 073003 (2016).
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K. Kwon, T. J. Seok, T. J. Seok, J. Henriksson, J. Luo, L. Ochikubo, J. Jacobs, R. S. Muller, and M. C. Wu, “128 × 128 silicon photonic MEMS switch with scalable row/column addressing,” in Conference on Lasers and Electro-Optics (Optical Society of America, 2018), paper SF1A.4.

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Y. Shen, N. C. Harris, S. Skirlo, M. Prabhu, T. Baehr-Jones, M. Hochberg, X. Sun, S. Zhao, H. Larochelle, D. Englund, and M. Soljačić, “Deep learning with coherent nanophotonic circuits,” Nat. Photonics 11, 441–446 (2017).
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Zhu, Z.

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D. Thomson, A. Zilkie, J. E. Bowers, T. Komljenovic, G. T. Reed, L. Vivien, D. Marris-Morini, E. Cassan, L. Virot, J.-M. Fédéli, J.-M. Hartmann, J. H. Schmid, D.-X. Xu, F. Boeuf, P. O’Brien, G. Z. Mashanovich, and M. Nedeljkovic, “Roadmap on silicon photonics,” J. Opt. 18, 073003 (2016).
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J. Lightwave Technol. (6)

J. Opt. (1)

D. Thomson, A. Zilkie, J. E. Bowers, T. Komljenovic, G. T. Reed, L. Vivien, D. Marris-Morini, E. Cassan, L. Virot, J.-M. Fédéli, J.-M. Hartmann, J. H. Schmid, D.-X. Xu, F. Boeuf, P. O’Brien, G. Z. Mashanovich, and M. Nedeljkovic, “Roadmap on silicon photonics,” J. Opt. 18, 073003 (2016).
[Crossref]

Nat. Photonics (2)

N. C. Harris, G. R. Steinbrecher, M. Prabhu, Y. Lahini, J. Mower, D. Bunandar, C. Chen, F. N. C. Wong, T. Baehr-Jones, M. Hochberg, S. Lloyd, and D. Englund, “Quantum transport simulations in a programmable nanophotonic processor,” Nat. Photonics 11, 447–452 (2017).
[Crossref]

Y. Shen, N. C. Harris, S. Skirlo, M. Prabhu, T. Baehr-Jones, M. Hochberg, X. Sun, S. Zhao, H. Larochelle, D. Englund, and M. Soljačić, “Deep learning with coherent nanophotonic circuits,” Nat. Photonics 11, 441–446 (2017).
[Crossref]

Nature (1)

J. Sun, E. Timurdogan, A. Yaacobi, E. S. Hosseini, and M. R. Watts, “Large-scale nanophotonic phased array,” Nature 493, 195–199 (2013).
[Crossref]

Opt. Express (5)

Optica (5)

Sci. Rep. (1)

L. Qiao, W. Tang, and T. Chu, “32 × 32 silicon electro-optic switch with built-in monitors and balanced-status units,” Sci. Rep. 7, 42306 (2017).
[Crossref]

Other (2)

K. Kwon, T. J. Seok, T. J. Seok, J. Henriksson, J. Luo, L. Ochikubo, J. Jacobs, R. S. Muller, and M. C. Wu, “128 × 128 silicon photonic MEMS switch with scalable row/column addressing,” in Conference on Lasers and Electro-Optics (Optical Society of America, 2018), paper SF1A.4.

G. Wang, D. G. Andersen, M. Kaminsky, K. Papagiannaki, T. S. E. Ng, M. Kozuch, and M. Ryan, “C-through: part-time optics in data centers,” in ACM SIGCOMM Conference (ACM, 2010), pp. 327–338.

Supplementary Material (1)

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Figures (7)

Fig. 1.
Fig. 1. (a) Schematic of ultra-large-scale silicon photonic switches. The switch consists of the three basic building blocks: an N × N switch, an N × 1 input coupler, and a 1 × N output coupler. (b) Schematic of the N × N switch block. The waveguides are tapered to a wider width to reduce stitching loss. (c) Unit cell of the silicon photonic MEMS switch consisting of a pair of adiabatic couplers on orthogonal bus waveguides with MMI crossing.
Fig. 2.
Fig. 2. Numerical simulation of the scattering loss caused by 100 nm misalignment at the stitching interface. The inset shows the schematic of the simulated structure. Silicon rib waveguides are designed to have 220 nm thickness and 60 nm partial etch depth.
Fig. 3.
Fig. 3. (a) Fabricated 240 × 240 silicon photonic switch on a 4 cm × 4 cm die. (b) Optical micrograph of the unit cell in the silicon photonic MEMS switch. Unit cell size: 110 μm × 110 μm . (c) Tapered waveguides at the stitching interface. Inset: close-up SEM image of the waveguide joint showing 70 nm offset. (d), (e) SEM images of the fabricated silicon photonic MEMS switches.
Fig. 4.
Fig. 4. Experimental setup with the 240 × 240 silicon photonic switch.
Fig. 5.
Fig. 5. (a) Measured switching characteristics showing digital switching behavior with an extremely high extinction ratio of 70 dB. (b) Measured switching spectrum confirming broadband operation.
Fig. 6.
Fig. 6. Measured switching speed of a switching cell.
Fig. 7.
Fig. 7. On-chip insertion loss versus the number of cells in the light path for 200 randomly selected switch configurations for the 240 × 240 switch. The loss-per-cell and the switching loss are extracted to be 0.019 dB/cell and 0.7 dB, respectively, from the linear fitting.