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A Roadmap for Optical Lithography

Mordechai Rothschild

Open Access Open Access

Abstract

The International Technology Roadmap for Semiconductors is the go-to standard for predicting future technology requirements and driving global research and development in the semiconductor industry. This article serves as your roadmap to what it all means for optical lithography over the next 10 to 15 years.

© 2010 Optical Society of America

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