Abstract

Laser beam shaping, the art of controlling the irradiance and phase profile of a laser's output, is an enabling technology used in industrial applications including semiconductor lithography, circuit component trimming and laser printing.

[Optical Society of America ]

PDF Article

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.