CMOS compatible metal-insulator-metal (MIM) plasmonic resonators made of tungsten and silicon nitride for the mid-infrared range give rise to spectrally selective emission/absorption, and are of particular interest in the field of non-dispersive infrared (NDIR) gas spectroscopy. This figure illustrates a 200 mm silicon wafer with MIMs. See Lefebvre et al. Opt. Mater. Express 6, 2389-2396 (2016).