Abstract

In this work, microscale holes and intermediate self-organized structures were obtained on the surface of a thin 50-nm silver film in air and under a water layer using single tightly focused femtosecond laser pulses with variable energy. We study the differences in the relief of microholes using scanning electron microscopy. The comparison of the silver film ablation thresholds under irradiation in air and water is carried out. A non-monotonic change in the size of craters in a water medium at peak powers more than 1.5MW was found, which corresponds to the critical filamentation power of laser pulses in water.

© 2020 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

1. Introduction

Various kinds of nano- and microscale relief on the surface of thin metal films, formed during their direct femtosecond laser ablation, is the subject of numerous studies [1–15]. Ordered arrays of such structures (nano- and microholes, nanorings, nanocrowns, microcones, self-organized nanogratings [1–6]) have unique optical, nonlinear optical and spectral properties, and are now actively used in biosensorics, nanoplasmonics [7–10]. At the same time, the possibility to control the phase, amplitude, and polarization of light via subwavelength structures induced by laser radiation is actively used in holography [11,12].

Among the laser methods for the surface modification of thin films, the technique of direct laser recording by single ultrashort (femtosecond) tightly focused laser pulses is widely used [13–15]. This method is a universal tool for structuring various targets with the possibility of using it in combination with non-laser methods of exposure. However, the physical processes and dynamics of the matter redistribution during the formation of nano- and microrelief on thin metal films processed in air are not yet fully understood. Solidified nano- and microstructures [1–10], which are then studied by scanning (SEM) or transmission (TEM) electron microscopy, are indirect signs of the processes occurring during laser ablation of the surface.

To date, a systematic study of the dependence of the diameter and depth of micro- and nanoholes on focusing conditions, energy, wavelength and duration of laser pulses for thin films in air has been carried out [1–6,16–18]. On the other hand, much less attention is devoted to such studies in a liquid medium, mainly for the bulk targets [19,20]. Despite some enlightening, though rather narrow research on thin films [21], the correspondence between the topology of the surface relief and the mechanisms of its generation in air and water under the impact of tightly focused ultrashort laser pulses has not yet been experimentally established.

In this work, we report for the first time the results of a comparative analysis of the microholes formation in a thin silver film in air and under a layer of distilled water under the impact of single femtosecond (300 fs) sharply focused (NA = 0.25 and NA = 0.65) laser (515 nm) pulses of variable energy, thus broadly extending our previous studies and providing accurate, well-justified conclusions on the basic effects of wet fs-laser ablation of thin metallic films.

2. Experimental setup and materials

In our studies, the irradiation of the surface of a silver film with 50 ± 5 nm thickness in air and under a small (∼ 1 mm) layer of distilled water was carried out on a bench for precision laser structuring [16]. We used femtosecond second harmonic pulses of an ytterbium fiber laser: the second harmonic wavelength is 515 nm, the pulse duration is τ ≈ 300 fs, and the maximum energy in the pulse is 4 µJ (TEM00) in a single pulse mode.

Laser radiation was focused onto the surface of the samples through the objectives of an optical microscope (Levenhuk Bioview 630) with NA = 0.25 and 0.65 into a spot with radius R1/e ≈ 2.2 ± 0.1 µm and R1/e ≈ 1.6 ± 0.1 µm (on a dry surface), respectively (Fig. 1).

 

Fig. 1. Experimental setup scheme. RA – reflective attenuator; BS – beamsplitter; RM – reflective mirror; AC – autocorrelator; PM – power meter; OB – microscope objective for laser beam focusing; M – optical microscope; CCD – digital CCD camera; MS – motorized stage.

Download Full Size | PPT Slide | PDF

The sample was fixed on a three-coordinate motorized step translation platform with a minimum displacement step of 150 nm. A silver film used as a target was deposited onto the surface of a glass substrate (N-BK7) in an argon atmosphere by magnetron sputtering (SC7620, Quorum Technologies) of a foil obtained from a 99.99% silver ingot. The morphology of single craters on the target surface irradiated at different energies (0.024–1.32 μJ) of laser pulses was visualized using a JEOL7001F SEM.

3. Experimental results and discussion

Let us consider the morphology of craters obtained by ablation of a silver film by single laser pulses focused onto the surface by a microscope objective with a numerical aperture NA = 0.25. Impact of a single pulse with energy E = 0.024 μJ in air leads to the formation of a microcone with a submicron hole at the top as can be seen on Fig. 2(a). An increase in pulse energy to 0.1 μJ leads to the formation of a round crater with thin walls, along the edges of which regions of film peeling from the glass substrate are noticeable [Fig. 2(b)]. As the E increases from 0.48 μJ to 1.32 μJ, the hole size increases significantly as shown on Figs. 2(c), 2(d). It should be noted that there are no traces of melting along the periphery of the crater, and there is no melt ridge, which indicates a “cold” mechanism of silver separation from the substrate [22]. The swelling and slight rolling of the film at the edges of the holes, especially at the laser pulse energy close to the maximum, is apparently associated with the propagation of the shock wave [22,23].

 

Fig. 2. SEM images of microholes (at an angle of 30°) on the surface of a silver 50 nm film under single-pulse exposure with NA = 0.25 objective in: (a)-(d) air and (e)–(f) water medium.

Download Full Size | PPT Slide | PDF

Laser ablation of the silver film with single pulses under a small layer of water and similar energy and focusing parameters changes the morphology of microholes. At energies E = 0.024–0.1 μJ, a damaged microcone with a submicron hole is formed on the surface; the film is noticeably swollen from the center to the periphery [Figs. 2(e), 2(f)]. As the energy increases up to the maximum values of E = 1.32 μJ, the size of the holes increases, and the edges of the craters become thicker in comparison to ablation in air [Figs. 3(g), 3(h)]. In this case, traces of material melting appear – a smooth edge, nanojets along the perimeter, indicating the direction of expansion of the melt during the formation of the structure.

 

Fig. 3. SEM images of microholes (at an angle of 30°) on the surface of a silver 50 nm film under single-pulse exposure with NA = 0.65 objective in: (a)-(d) air and (e)–(f) water medium.

Download Full Size | PPT Slide | PDF

Now consider the case of tighter focusing using an objective with a numerical aperture NA = 0.65. Single laser pulses with energy E = 0.024 μJ in air form microcones on the film surface with a submicron hole [Fig. 3(a)], the film is swollen at the edges, crystallized nanojets are visible at the periphery, and the walls of the structures are thin. An increase in energy to 0.1–0.48 μJ [Figs. 3(b), 3(c)] leads to the formation of microholes; a crater is formed in the center on the glass substrate, which also increases in size as the energy rises to 1.32 μJ [Fig. 3(d)].

A distinctive feature of single-pulse laser ablation of a silver film when focusing with NA = 0.65 objective in water and E = 0.024 μJ is a significant and almost symmetric swelling of the film with the formation of a submicron-sized structure resembling a burst bubble in shape [Fig. 3(e]). An increase in the energy to 0.1 μJ leads to the appearance of a microhole with a thick smooth rim along the edges [Fig. 3(f)], while the dimensions of the structure are comparable with the holes obtained with similar parameters in the air. As the energy increases to E = 1.32 μJ, crystallized nanojets appear, indicating the melting of the film material and splashing of the melt [Figs. 3(g), 3(h)], but at the same time, there is no crater on the glass substrate in the center of the processing area. It is also worth noting that microholes size in the water medium exceed those created with similar parameters in air.

The analysis of the change in the size of craters was made using the dependence of the square of the radius on the logarithm of the laser pulse energy (R2 – lnE). Linear approximation of the dependences shown in Fig. 4, allows to determine the focus radius w (1/e2 level) and the threshold value Eth of the formation of structures at a given focusing. Thus, it is possible to estimate the value of the threshold energy density (fluence) of ablation Fth = 2Eth/πw2. The calculation results and approximations are shown in Table 1.

 

Fig. 4. Dependence of the square of the crater radius on the logarithm of the laser pulse energy during ablation in water and air and focusing with micro objectives NA = 0.25 and NA = 0.65.

Download Full Size | PPT Slide | PDF

Tables Icon

Table 1. Threshold energy density and calculation results.

View Table

The R2 – lnE dependences (Fig. 4) show the nonmonotonic character of the change in the crater size during single-pulse laser ablation under a layer of distilled water, which is obviously associated with the influence of the medium. The values of Fthr1 and w1 at low energies of laser pulses are practically identical (except for Fth1 in case of tighter focusing NA = 0.65).

However, as the energy increases, the nonlinear nature of fs-laser propagation in water unexpectedly begins to manifest itself on a microscale of the high-NA focal waist, which is still debatable effect, despite some pioneer works (see, e.g., [24]). In particular, in our work the break of the slope of the R2 – lnE curve in water occurs at critical powers Pcr ≈ 1.6 MW and 1.5 MW for the 0.25-NA and 0.65-NA strongly focusing objectives, respectively. Comparing these values with the critical self-focusing powers in water Pcr ≈ 1–1.8 MW, measured previously for collimated or weakly-focused laser beams in [21,25–27], one can still consistently conclude that the slope break in Fig. 4 is associated with the filamentation of laser pulses in water. Another strong argument for the filamentation-mediated fluence distribution in the waist in water at tighter (NA = 0.65) focusing is the absence of the craters in glass underneath the silver film [Figs. 3(c)–3(d), 3(g)–3(h)], indicating the strongly reduced peak fluence on the film surface immersed in water. Moreover, comparing to our previous, preliminary similar study for silver films [21], which exhibited similar break for a wet silver film on a glass surface, but not on a silicon substrate, here the intriguing microscale filamentation effect at the high-NA focusing in water was demonstrated much more consistently, systematically and broadly in terms of different focusing high-NA objectives.

4. Conclusion

In this work, we performed for the first time a comparative study of the microholes morphology and other self-organized structures on the surface of a 50-nm silver film on a glass substrate during its femtosecond single-pulse laser ablation with different sharp focusing parameters (NA = 0.25 and 0.65). SEM imaging shows differences in surface topology depending on the processing environment. A nonmonotonic change in the size of the obtained structures was observed upon ablation in water medium, which can be associated with the unusual microscale filamentation of the tightly focused ultrashort laser pulses at critical self-focusing powers Pcr > 1.5 MW.

Funding

Russian Science Foundation (16-12-10165); Ministry of Science and Higher Education of the Russian Federation (0705-2020-0041).

Acknowledgments

This work was supported by the Russian Science Foundation in part of laser nanofabrication and by the Ministry of Science and Higher Education of the Russian Federation in part of electron microscopy analysis.

Disclosures

The authors declare no conflicts of interest.

References

1. F. Korte, J. Serbin, J. Koch, A. Egbert, C. Fallnich, A. Ostendorf, and B. N. Chichkov, “Towards nanostructuring with femtosecond laser pulses,” Appl. Phys. A 77(2), 229–235 (2003). [CrossRef]  

2. Y. Nakata, N. Miyanaga, and T. Okada, “Effect of pulse width and fluence of femtosecond laser on the size of nanobump array,” Appl. Surf. Sci. 253(15), 6555–6557 (2007). [CrossRef]  

3. N. A. Inogamov, V. V. Zhakhovsky, V. A. Khokhlov, Y. V. Petrov, and K. P. Migdal, “Solitary Nanostructures Produced by Ultrashort Laser Pulse,” Nanoscale Res. Lett. 11(1), 177 (2016). [CrossRef]  

4. J. P. Moening, S. S. Thanawala, and D. G. Georgiev, “Formation of high-aspect-ratio protrusions on gold films by localized pulsed laser irradiation,” Appl. Phys. A 95(3), 635–638 (2009). [CrossRef]  

5. A. I. Kuznetsov, J. Koch, and B. N. Chichkov, “Laser-induced backward transfer of gold nanodroplets,” Opt. Express 17(21), 18820–18825 (2009). [CrossRef]  

6. V. I. Emel’yanov, D. A. Zayarniy, A. A. Ionin, I. V. Kiseleva, S. I. Kudryashov, S. V. Makarov, T. H. T. Nguyen, and A. A. Rudenko, “Nanoscale hydrodynamic instability in a molten thin gold film induced by femtosecond laser ablation,” JETP Lett. 99(9), 518–522 (2014). [CrossRef]  

7. A. Kuchmizhak, E. Pustovalov, S. Syubaev, O. Vitrik, Y. Kulchin, A. Porfirev, S. Khonina, S. Kudryashov, P. Danilov, and A. Ionin, “On-Fly Femtosecond-Laser Fabrication of Self-Organized Plasmonic Nanotextures for Chemo- and Biosensing Applications,” ACS Appl. Mater. Interfaces 8(37), 24946–24955 (2016). [CrossRef]  

8. A. Hakonen, F. Wang, P. O. Andersson, H. Wingfors, T. Rindzevicius, M. S. Schmidt, V. R. Soma, S. Xu, Y. Li, A. Boisen, and H. Wu, “Hand-Held Femtogram Detection of Hazardous Picric Acid with Hydrophobic Ag Nanopillar SERS Substrates and Mechanism of Elasto-Capillarity,” ACS Sens. 2(2), 198–202 (2017). [CrossRef]  

9. R. Gordon, A. G. Brolo, D. Sinton, and K. L. Kavanagh, “Resonant optical transmission through hole-arrays in metal films: physics and applications,” Laser Photonics Rev. 4(2), 311–335 (2010). [CrossRef]  

10. D. Pavlov, S. Syubaev, A. Cherepakhin, A. Sergeev, O. Vitrik, A. Zakharenko, P. Danilov, I. Saraeva, S. Kudryashov, A. Porfirev, and A. Kuchmizhak, “Ultrafast laser printing of self-organized bimetallic nanotextures for multi-wavelength biosensing,” Sci. Rep. 8(1), 1–10 (2018). [CrossRef]  

11. J. Lin, P. Genevet, M. A. Kats, N. Antoniou, and F. Capasso, “Nanostructured Holograms for Broadband Manipulation of Vector Beams,” Nano Lett. 13(9), 4269–4274 (2013). [CrossRef]  

12. S. Choudhury, U. Guler, A. Shaltout, V. M. Shalaev, A. V. Kildishev, and A. Boltasseva, “Pancharatnam–Berry Phase Manipulating Metasurface for Visible Color Hologram Based on Low Loss Silver Thin Film,” Adv. Opt. Mater. 5(10), 1700196 (2017). [CrossRef]  

13. P. P. Pronko, S. K. Dutta, J. Squier J, V. Rudd, D. Du, and G. Mourou, “Machining of sub-micron holes using a femtosecond laser at 800 nm,” Opt. Commun. 114(1-2), 106–110 (1995). [CrossRef]  

14. Z. Guo, J. Feng, K. Zhou, Y. Xiao, S. Qu, and J. H. Lee, “The formation of different structures in the interaction between a single femtosecond laser pulse and a thin Au film,” Appl. Phys. A 108(3), 639–644 (2012). [CrossRef]  

15. Y. N. Kulchin, O. B. Vitrik, A. A. Kuchmizhak, A. V. Nepomnyashchii, A. G. Savchuk, A. A. Ionin, S. I. Kudryashov, and S. V. Makarov, “Through nanohole formation in thin metallic film by single nanosecond laser pulses using optical dielectric apertureless probe,” Opt. Lett. 38(9), 1452–1454 (2013). [CrossRef]  

16. P. A. Danilov, D. A. Zayarny, A. A. Ionin, S. I. Kudryashov, T. T. H. Nguyen, A. A. Rudenko, I. N. Saraeva, A. A. Kuchmizhak, O. B. Vitrik, and Y. N. Kulchin, “Structure and laser-fabrication mechanisms of microcones on silver films of variable thickness,” JETP Lett. 103(8), 549–552 (2016). [CrossRef]  

17. A. I. Kuznetsov, J. Koch, and B. N. Chichkov, “Nanostructuring of thin gold films by femtosecond lasers,” Appl. Phys. A 94(2), 221–230 (2009). [CrossRef]  

18. A. G. Kovačević, S. Petrović, B. Bokić, B. Gaković, M. T. Bokorov, B. Vasić, R. Gajić, M. Trtica, and B. M. Jelenković, “Surface nanopatterning of Al/Ti multilayer thin films and Al single layer by a low-fluence UV femtosecond laser beam,” Appl. Surf. Sci. 326, 91–98 (2015). [CrossRef]  

19. S. Zhu, Y. F. Lu, M. H. Hong, and X. Y. Chen, “Laser ablation of solid substrates in water and ambient air,” J. Appl. Phys. 89(4), 2400–2403 (2001). [CrossRef]  

20. H. Liu, F. Chen, X. Wang, Q. Yang, H. Bian, J. Si, and X. Hou, “Influence of liquid environments on femtosecond laser ablation of silicon,” Thin Solid Films 518(18), 5188–5194 (2010). [CrossRef]  

21. N. A. Smirnov, S. I. Kudryashov, P. A. Danilov, A. A. Nastulyavichus, A. A. Rudenko, A. A. Ionin, A. A. Kuchmizhak, and O. B. Vitrik, “Femtosecond laser ablation of a thin silver film in air and water,” Opt. Quantum Electron. 52(2), 71 (2020). [CrossRef]  

22. A. Danilov, D. A. Zayarnyi, A. A. Ionin, S. I. Kudryashov, S. V. Makarov, A. A. Rudenko, V. I. Yurovskikh, Y. N. Kulchin, O. B. Vitrik, A. A. Kuchmizhak, E. A. Drozdova, and S. B. Odinokov, “Mechanisms of formation of sub- and micrometre-scale holes in thin metal films by single nano- and femtosecond laser pulses,” Quantum Electron. 44(6), 540–546 (2014). [CrossRef]  

23. V. V. Shepelev, N. A. Inogamov, and S. V. Fortova, “Thermal and dynamic effects of laser irradiation of thin metal films,” Opt. Quantum Electron. 52(2), 88 (2020). [CrossRef]  

24. A. Couairon, L. Sudrie, M. Franco, B. Prade, and A. Mysyrowicz, “Filamentation and damage in fused silica induced by tightly focused femtosecond laser pulses,” Phys. Rev. B 71(12), 125435 (2005). [CrossRef]  

25. M. H. Helle, T. G. Jones, J. R. Peñano, D. Kaganovich, and A. Ting, “Formation and propagation of meter-scale laser filaments in water,” Appl. Phys. Lett. 103(12), 121101 (2013). [CrossRef]  

26. M. Götze, A. M. Farhan, T. Kürbitz, O. Krimig, S. Henning, A. Heilmann, and G. Hillrichs, “Laser Processing of Dry, Wet and Immersed Polyamide Nanofiber Nonwovens with Different Laser Sources,” J. Laser Micro Nanoeng. 12(3), 286–295 (2017).

27. A. Dubietis, A. Couairon, E. Kučinskas, G. Tamošauskas, E. Gaižauskas, D. Faccio, and P. Di Trapani, “Measurement and calculation of nonlinear absorption associated with femtosecond filaments in water,” Appl. Phys. B 84(3), 439–446 (2006). [CrossRef]  

References

  • View by:
  • Article Order
  • |
  • Year
  • |
  • Author
  • |
  • Publication
  1. F. Korte, J. Serbin, J. Koch, A. Egbert, C. Fallnich, A. Ostendorf, and B. N. Chichkov, “Towards nanostructuring with femtosecond laser pulses,” Appl. Phys. A 77(2), 229–235 (2003).
    [Crossref]
  2. Y. Nakata, N. Miyanaga, and T. Okada, “Effect of pulse width and fluence of femtosecond laser on the size of nanobump array,” Appl. Surf. Sci. 253(15), 6555–6557 (2007).
    [Crossref]
  3. N. A. Inogamov, V. V. Zhakhovsky, V. A. Khokhlov, Y. V. Petrov, and K. P. Migdal, “Solitary Nanostructures Produced by Ultrashort Laser Pulse,” Nanoscale Res. Lett. 11(1), 177 (2016).
    [Crossref]
  4. J. P. Moening, S. S. Thanawala, and D. G. Georgiev, “Formation of high-aspect-ratio protrusions on gold films by localized pulsed laser irradiation,” Appl. Phys. A 95(3), 635–638 (2009).
    [Crossref]
  5. A. I. Kuznetsov, J. Koch, and B. N. Chichkov, “Laser-induced backward transfer of gold nanodroplets,” Opt. Express 17(21), 18820–18825 (2009).
    [Crossref]
  6. V. I. Emel’yanov, D. A. Zayarniy, A. A. Ionin, I. V. Kiseleva, S. I. Kudryashov, S. V. Makarov, T. H. T. Nguyen, and A. A. Rudenko, “Nanoscale hydrodynamic instability in a molten thin gold film induced by femtosecond laser ablation,” JETP Lett. 99(9), 518–522 (2014).
    [Crossref]
  7. A. Kuchmizhak, E. Pustovalov, S. Syubaev, O. Vitrik, Y. Kulchin, A. Porfirev, S. Khonina, S. Kudryashov, P. Danilov, and A. Ionin, “On-Fly Femtosecond-Laser Fabrication of Self-Organized Plasmonic Nanotextures for Chemo- and Biosensing Applications,” ACS Appl. Mater. Interfaces 8(37), 24946–24955 (2016).
    [Crossref]
  8. A. Hakonen, F. Wang, P. O. Andersson, H. Wingfors, T. Rindzevicius, M. S. Schmidt, V. R. Soma, S. Xu, Y. Li, A. Boisen, and H. Wu, “Hand-Held Femtogram Detection of Hazardous Picric Acid with Hydrophobic Ag Nanopillar SERS Substrates and Mechanism of Elasto-Capillarity,” ACS Sens. 2(2), 198–202 (2017).
    [Crossref]
  9. R. Gordon, A. G. Brolo, D. Sinton, and K. L. Kavanagh, “Resonant optical transmission through hole-arrays in metal films: physics and applications,” Laser Photonics Rev. 4(2), 311–335 (2010).
    [Crossref]
  10. D. Pavlov, S. Syubaev, A. Cherepakhin, A. Sergeev, O. Vitrik, A. Zakharenko, P. Danilov, I. Saraeva, S. Kudryashov, A. Porfirev, and A. Kuchmizhak, “Ultrafast laser printing of self-organized bimetallic nanotextures for multi-wavelength biosensing,” Sci. Rep. 8(1), 1–10 (2018).
    [Crossref]
  11. J. Lin, P. Genevet, M. A. Kats, N. Antoniou, and F. Capasso, “Nanostructured Holograms for Broadband Manipulation of Vector Beams,” Nano Lett. 13(9), 4269–4274 (2013).
    [Crossref]
  12. S. Choudhury, U. Guler, A. Shaltout, V. M. Shalaev, A. V. Kildishev, and A. Boltasseva, “Pancharatnam–Berry Phase Manipulating Metasurface for Visible Color Hologram Based on Low Loss Silver Thin Film,” Adv. Opt. Mater. 5(10), 1700196 (2017).
    [Crossref]
  13. P. P. Pronko, S. K. Dutta, J. Squier J, V. Rudd, D. Du, and G. Mourou, “Machining of sub-micron holes using a femtosecond laser at 800 nm,” Opt. Commun. 114(1-2), 106–110 (1995).
    [Crossref]
  14. Z. Guo, J. Feng, K. Zhou, Y. Xiao, S. Qu, and J. H. Lee, “The formation of different structures in the interaction between a single femtosecond laser pulse and a thin Au film,” Appl. Phys. A 108(3), 639–644 (2012).
    [Crossref]
  15. Y. N. Kulchin, O. B. Vitrik, A. A. Kuchmizhak, A. V. Nepomnyashchii, A. G. Savchuk, A. A. Ionin, S. I. Kudryashov, and S. V. Makarov, “Through nanohole formation in thin metallic film by single nanosecond laser pulses using optical dielectric apertureless probe,” Opt. Lett. 38(9), 1452–1454 (2013).
    [Crossref]
  16. P. A. Danilov, D. A. Zayarny, A. A. Ionin, S. I. Kudryashov, T. T. H. Nguyen, A. A. Rudenko, I. N. Saraeva, A. A. Kuchmizhak, O. B. Vitrik, and Y. N. Kulchin, “Structure and laser-fabrication mechanisms of microcones on silver films of variable thickness,” JETP Lett. 103(8), 549–552 (2016).
    [Crossref]
  17. A. I. Kuznetsov, J. Koch, and B. N. Chichkov, “Nanostructuring of thin gold films by femtosecond lasers,” Appl. Phys. A 94(2), 221–230 (2009).
    [Crossref]
  18. A. G. Kovačević, S. Petrović, B. Bokić, B. Gaković, M. T. Bokorov, B. Vasić, R. Gajić, M. Trtica, and B. M. Jelenković, “Surface nanopatterning of Al/Ti multilayer thin films and Al single layer by a low-fluence UV femtosecond laser beam,” Appl. Surf. Sci. 326, 91–98 (2015).
    [Crossref]
  19. S. Zhu, Y. F. Lu, M. H. Hong, and X. Y. Chen, “Laser ablation of solid substrates in water and ambient air,” J. Appl. Phys. 89(4), 2400–2403 (2001).
    [Crossref]
  20. H. Liu, F. Chen, X. Wang, Q. Yang, H. Bian, J. Si, and X. Hou, “Influence of liquid environments on femtosecond laser ablation of silicon,” Thin Solid Films 518(18), 5188–5194 (2010).
    [Crossref]
  21. N. A. Smirnov, S. I. Kudryashov, P. A. Danilov, A. A. Nastulyavichus, A. A. Rudenko, A. A. Ionin, A. A. Kuchmizhak, and O. B. Vitrik, “Femtosecond laser ablation of a thin silver film in air and water,” Opt. Quantum Electron. 52(2), 71 (2020).
    [Crossref]
  22. A. Danilov, D. A. Zayarnyi, A. A. Ionin, S. I. Kudryashov, S. V. Makarov, A. A. Rudenko, V. I. Yurovskikh, Y. N. Kulchin, O. B. Vitrik, A. A. Kuchmizhak, E. A. Drozdova, and S. B. Odinokov, “Mechanisms of formation of sub- and micrometre-scale holes in thin metal films by single nano- and femtosecond laser pulses,” Quantum Electron. 44(6), 540–546 (2014).
    [Crossref]
  23. V. V. Shepelev, N. A. Inogamov, and S. V. Fortova, “Thermal and dynamic effects of laser irradiation of thin metal films,” Opt. Quantum Electron. 52(2), 88 (2020).
    [Crossref]
  24. A. Couairon, L. Sudrie, M. Franco, B. Prade, and A. Mysyrowicz, “Filamentation and damage in fused silica induced by tightly focused femtosecond laser pulses,” Phys. Rev. B 71(12), 125435 (2005).
    [Crossref]
  25. M. H. Helle, T. G. Jones, J. R. Peñano, D. Kaganovich, and A. Ting, “Formation and propagation of meter-scale laser filaments in water,” Appl. Phys. Lett. 103(12), 121101 (2013).
    [Crossref]
  26. M. Götze, A. M. Farhan, T. Kürbitz, O. Krimig, S. Henning, A. Heilmann, and G. Hillrichs, “Laser Processing of Dry, Wet and Immersed Polyamide Nanofiber Nonwovens with Different Laser Sources,” J. Laser Micro Nanoeng. 12(3), 286–295 (2017).
  27. A. Dubietis, A. Couairon, E. Kučinskas, G. Tamošauskas, E. Gaižauskas, D. Faccio, and P. Di Trapani, “Measurement and calculation of nonlinear absorption associated with femtosecond filaments in water,” Appl. Phys. B 84(3), 439–446 (2006).
    [Crossref]

2020 (2)

N. A. Smirnov, S. I. Kudryashov, P. A. Danilov, A. A. Nastulyavichus, A. A. Rudenko, A. A. Ionin, A. A. Kuchmizhak, and O. B. Vitrik, “Femtosecond laser ablation of a thin silver film in air and water,” Opt. Quantum Electron. 52(2), 71 (2020).
[Crossref]

V. V. Shepelev, N. A. Inogamov, and S. V. Fortova, “Thermal and dynamic effects of laser irradiation of thin metal films,” Opt. Quantum Electron. 52(2), 88 (2020).
[Crossref]

2018 (1)

D. Pavlov, S. Syubaev, A. Cherepakhin, A. Sergeev, O. Vitrik, A. Zakharenko, P. Danilov, I. Saraeva, S. Kudryashov, A. Porfirev, and A. Kuchmizhak, “Ultrafast laser printing of self-organized bimetallic nanotextures for multi-wavelength biosensing,” Sci. Rep. 8(1), 1–10 (2018).
[Crossref]

2017 (3)

S. Choudhury, U. Guler, A. Shaltout, V. M. Shalaev, A. V. Kildishev, and A. Boltasseva, “Pancharatnam–Berry Phase Manipulating Metasurface for Visible Color Hologram Based on Low Loss Silver Thin Film,” Adv. Opt. Mater. 5(10), 1700196 (2017).
[Crossref]

A. Hakonen, F. Wang, P. O. Andersson, H. Wingfors, T. Rindzevicius, M. S. Schmidt, V. R. Soma, S. Xu, Y. Li, A. Boisen, and H. Wu, “Hand-Held Femtogram Detection of Hazardous Picric Acid with Hydrophobic Ag Nanopillar SERS Substrates and Mechanism of Elasto-Capillarity,” ACS Sens. 2(2), 198–202 (2017).
[Crossref]

M. Götze, A. M. Farhan, T. Kürbitz, O. Krimig, S. Henning, A. Heilmann, and G. Hillrichs, “Laser Processing of Dry, Wet and Immersed Polyamide Nanofiber Nonwovens with Different Laser Sources,” J. Laser Micro Nanoeng. 12(3), 286–295 (2017).

2016 (3)

A. Kuchmizhak, E. Pustovalov, S. Syubaev, O. Vitrik, Y. Kulchin, A. Porfirev, S. Khonina, S. Kudryashov, P. Danilov, and A. Ionin, “On-Fly Femtosecond-Laser Fabrication of Self-Organized Plasmonic Nanotextures for Chemo- and Biosensing Applications,” ACS Appl. Mater. Interfaces 8(37), 24946–24955 (2016).
[Crossref]

N. A. Inogamov, V. V. Zhakhovsky, V. A. Khokhlov, Y. V. Petrov, and K. P. Migdal, “Solitary Nanostructures Produced by Ultrashort Laser Pulse,” Nanoscale Res. Lett. 11(1), 177 (2016).
[Crossref]

P. A. Danilov, D. A. Zayarny, A. A. Ionin, S. I. Kudryashov, T. T. H. Nguyen, A. A. Rudenko, I. N. Saraeva, A. A. Kuchmizhak, O. B. Vitrik, and Y. N. Kulchin, “Structure and laser-fabrication mechanisms of microcones on silver films of variable thickness,” JETP Lett. 103(8), 549–552 (2016).
[Crossref]

2015 (1)

A. G. Kovačević, S. Petrović, B. Bokić, B. Gaković, M. T. Bokorov, B. Vasić, R. Gajić, M. Trtica, and B. M. Jelenković, “Surface nanopatterning of Al/Ti multilayer thin films and Al single layer by a low-fluence UV femtosecond laser beam,” Appl. Surf. Sci. 326, 91–98 (2015).
[Crossref]

2014 (2)

A. Danilov, D. A. Zayarnyi, A. A. Ionin, S. I. Kudryashov, S. V. Makarov, A. A. Rudenko, V. I. Yurovskikh, Y. N. Kulchin, O. B. Vitrik, A. A. Kuchmizhak, E. A. Drozdova, and S. B. Odinokov, “Mechanisms of formation of sub- and micrometre-scale holes in thin metal films by single nano- and femtosecond laser pulses,” Quantum Electron. 44(6), 540–546 (2014).
[Crossref]

V. I. Emel’yanov, D. A. Zayarniy, A. A. Ionin, I. V. Kiseleva, S. I. Kudryashov, S. V. Makarov, T. H. T. Nguyen, and A. A. Rudenko, “Nanoscale hydrodynamic instability in a molten thin gold film induced by femtosecond laser ablation,” JETP Lett. 99(9), 518–522 (2014).
[Crossref]

2013 (3)

Y. N. Kulchin, O. B. Vitrik, A. A. Kuchmizhak, A. V. Nepomnyashchii, A. G. Savchuk, A. A. Ionin, S. I. Kudryashov, and S. V. Makarov, “Through nanohole formation in thin metallic film by single nanosecond laser pulses using optical dielectric apertureless probe,” Opt. Lett. 38(9), 1452–1454 (2013).
[Crossref]

J. Lin, P. Genevet, M. A. Kats, N. Antoniou, and F. Capasso, “Nanostructured Holograms for Broadband Manipulation of Vector Beams,” Nano Lett. 13(9), 4269–4274 (2013).
[Crossref]

M. H. Helle, T. G. Jones, J. R. Peñano, D. Kaganovich, and A. Ting, “Formation and propagation of meter-scale laser filaments in water,” Appl. Phys. Lett. 103(12), 121101 (2013).
[Crossref]

2012 (1)

Z. Guo, J. Feng, K. Zhou, Y. Xiao, S. Qu, and J. H. Lee, “The formation of different structures in the interaction between a single femtosecond laser pulse and a thin Au film,” Appl. Phys. A 108(3), 639–644 (2012).
[Crossref]

2010 (2)

R. Gordon, A. G. Brolo, D. Sinton, and K. L. Kavanagh, “Resonant optical transmission through hole-arrays in metal films: physics and applications,” Laser Photonics Rev. 4(2), 311–335 (2010).
[Crossref]

H. Liu, F. Chen, X. Wang, Q. Yang, H. Bian, J. Si, and X. Hou, “Influence of liquid environments on femtosecond laser ablation of silicon,” Thin Solid Films 518(18), 5188–5194 (2010).
[Crossref]

2009 (3)

J. P. Moening, S. S. Thanawala, and D. G. Georgiev, “Formation of high-aspect-ratio protrusions on gold films by localized pulsed laser irradiation,” Appl. Phys. A 95(3), 635–638 (2009).
[Crossref]

A. I. Kuznetsov, J. Koch, and B. N. Chichkov, “Laser-induced backward transfer of gold nanodroplets,” Opt. Express 17(21), 18820–18825 (2009).
[Crossref]

A. I. Kuznetsov, J. Koch, and B. N. Chichkov, “Nanostructuring of thin gold films by femtosecond lasers,” Appl. Phys. A 94(2), 221–230 (2009).
[Crossref]

2007 (1)

Y. Nakata, N. Miyanaga, and T. Okada, “Effect of pulse width and fluence of femtosecond laser on the size of nanobump array,” Appl. Surf. Sci. 253(15), 6555–6557 (2007).
[Crossref]

2006 (1)

A. Dubietis, A. Couairon, E. Kučinskas, G. Tamošauskas, E. Gaižauskas, D. Faccio, and P. Di Trapani, “Measurement and calculation of nonlinear absorption associated with femtosecond filaments in water,” Appl. Phys. B 84(3), 439–446 (2006).
[Crossref]

2005 (1)

A. Couairon, L. Sudrie, M. Franco, B. Prade, and A. Mysyrowicz, “Filamentation and damage in fused silica induced by tightly focused femtosecond laser pulses,” Phys. Rev. B 71(12), 125435 (2005).
[Crossref]

2003 (1)

F. Korte, J. Serbin, J. Koch, A. Egbert, C. Fallnich, A. Ostendorf, and B. N. Chichkov, “Towards nanostructuring with femtosecond laser pulses,” Appl. Phys. A 77(2), 229–235 (2003).
[Crossref]

2001 (1)

S. Zhu, Y. F. Lu, M. H. Hong, and X. Y. Chen, “Laser ablation of solid substrates in water and ambient air,” J. Appl. Phys. 89(4), 2400–2403 (2001).
[Crossref]

1995 (1)

P. P. Pronko, S. K. Dutta, J. Squier J, V. Rudd, D. Du, and G. Mourou, “Machining of sub-micron holes using a femtosecond laser at 800 nm,” Opt. Commun. 114(1-2), 106–110 (1995).
[Crossref]

Andersson, P. O.

A. Hakonen, F. Wang, P. O. Andersson, H. Wingfors, T. Rindzevicius, M. S. Schmidt, V. R. Soma, S. Xu, Y. Li, A. Boisen, and H. Wu, “Hand-Held Femtogram Detection of Hazardous Picric Acid with Hydrophobic Ag Nanopillar SERS Substrates and Mechanism of Elasto-Capillarity,” ACS Sens. 2(2), 198–202 (2017).
[Crossref]

Antoniou, N.

J. Lin, P. Genevet, M. A. Kats, N. Antoniou, and F. Capasso, “Nanostructured Holograms for Broadband Manipulation of Vector Beams,” Nano Lett. 13(9), 4269–4274 (2013).
[Crossref]

Bian, H.

H. Liu, F. Chen, X. Wang, Q. Yang, H. Bian, J. Si, and X. Hou, “Influence of liquid environments on femtosecond laser ablation of silicon,” Thin Solid Films 518(18), 5188–5194 (2010).
[Crossref]

Boisen, A.

A. Hakonen, F. Wang, P. O. Andersson, H. Wingfors, T. Rindzevicius, M. S. Schmidt, V. R. Soma, S. Xu, Y. Li, A. Boisen, and H. Wu, “Hand-Held Femtogram Detection of Hazardous Picric Acid with Hydrophobic Ag Nanopillar SERS Substrates and Mechanism of Elasto-Capillarity,” ACS Sens. 2(2), 198–202 (2017).
[Crossref]

Bokic, B.

A. G. Kovačević, S. Petrović, B. Bokić, B. Gaković, M. T. Bokorov, B. Vasić, R. Gajić, M. Trtica, and B. M. Jelenković, “Surface nanopatterning of Al/Ti multilayer thin films and Al single layer by a low-fluence UV femtosecond laser beam,” Appl. Surf. Sci. 326, 91–98 (2015).
[Crossref]

Bokorov, M. T.

A. G. Kovačević, S. Petrović, B. Bokić, B. Gaković, M. T. Bokorov, B. Vasić, R. Gajić, M. Trtica, and B. M. Jelenković, “Surface nanopatterning of Al/Ti multilayer thin films and Al single layer by a low-fluence UV femtosecond laser beam,” Appl. Surf. Sci. 326, 91–98 (2015).
[Crossref]

Boltasseva, A.

S. Choudhury, U. Guler, A. Shaltout, V. M. Shalaev, A. V. Kildishev, and A. Boltasseva, “Pancharatnam–Berry Phase Manipulating Metasurface for Visible Color Hologram Based on Low Loss Silver Thin Film,” Adv. Opt. Mater. 5(10), 1700196 (2017).
[Crossref]

Brolo, A. G.

R. Gordon, A. G. Brolo, D. Sinton, and K. L. Kavanagh, “Resonant optical transmission through hole-arrays in metal films: physics and applications,” Laser Photonics Rev. 4(2), 311–335 (2010).
[Crossref]

Capasso, F.

J. Lin, P. Genevet, M. A. Kats, N. Antoniou, and F. Capasso, “Nanostructured Holograms for Broadband Manipulation of Vector Beams,” Nano Lett. 13(9), 4269–4274 (2013).
[Crossref]

Chen, F.

H. Liu, F. Chen, X. Wang, Q. Yang, H. Bian, J. Si, and X. Hou, “Influence of liquid environments on femtosecond laser ablation of silicon,” Thin Solid Films 518(18), 5188–5194 (2010).
[Crossref]

Chen, X. Y.

S. Zhu, Y. F. Lu, M. H. Hong, and X. Y. Chen, “Laser ablation of solid substrates in water and ambient air,” J. Appl. Phys. 89(4), 2400–2403 (2001).
[Crossref]

Cherepakhin, A.

D. Pavlov, S. Syubaev, A. Cherepakhin, A. Sergeev, O. Vitrik, A. Zakharenko, P. Danilov, I. Saraeva, S. Kudryashov, A. Porfirev, and A. Kuchmizhak, “Ultrafast laser printing of self-organized bimetallic nanotextures for multi-wavelength biosensing,” Sci. Rep. 8(1), 1–10 (2018).
[Crossref]

Chichkov, B. N.

A. I. Kuznetsov, J. Koch, and B. N. Chichkov, “Laser-induced backward transfer of gold nanodroplets,” Opt. Express 17(21), 18820–18825 (2009).
[Crossref]

A. I. Kuznetsov, J. Koch, and B. N. Chichkov, “Nanostructuring of thin gold films by femtosecond lasers,” Appl. Phys. A 94(2), 221–230 (2009).
[Crossref]

F. Korte, J. Serbin, J. Koch, A. Egbert, C. Fallnich, A. Ostendorf, and B. N. Chichkov, “Towards nanostructuring with femtosecond laser pulses,” Appl. Phys. A 77(2), 229–235 (2003).
[Crossref]

Choudhury, S.

S. Choudhury, U. Guler, A. Shaltout, V. M. Shalaev, A. V. Kildishev, and A. Boltasseva, “Pancharatnam–Berry Phase Manipulating Metasurface for Visible Color Hologram Based on Low Loss Silver Thin Film,” Adv. Opt. Mater. 5(10), 1700196 (2017).
[Crossref]

Couairon, A.

A. Dubietis, A. Couairon, E. Kučinskas, G. Tamošauskas, E. Gaižauskas, D. Faccio, and P. Di Trapani, “Measurement and calculation of nonlinear absorption associated with femtosecond filaments in water,” Appl. Phys. B 84(3), 439–446 (2006).
[Crossref]

A. Couairon, L. Sudrie, M. Franco, B. Prade, and A. Mysyrowicz, “Filamentation and damage in fused silica induced by tightly focused femtosecond laser pulses,” Phys. Rev. B 71(12), 125435 (2005).
[Crossref]

Danilov, A.

A. Danilov, D. A. Zayarnyi, A. A. Ionin, S. I. Kudryashov, S. V. Makarov, A. A. Rudenko, V. I. Yurovskikh, Y. N. Kulchin, O. B. Vitrik, A. A. Kuchmizhak, E. A. Drozdova, and S. B. Odinokov, “Mechanisms of formation of sub- and micrometre-scale holes in thin metal films by single nano- and femtosecond laser pulses,” Quantum Electron. 44(6), 540–546 (2014).
[Crossref]

Danilov, P.

D. Pavlov, S. Syubaev, A. Cherepakhin, A. Sergeev, O. Vitrik, A. Zakharenko, P. Danilov, I. Saraeva, S. Kudryashov, A. Porfirev, and A. Kuchmizhak, “Ultrafast laser printing of self-organized bimetallic nanotextures for multi-wavelength biosensing,” Sci. Rep. 8(1), 1–10 (2018).
[Crossref]

A. Kuchmizhak, E. Pustovalov, S. Syubaev, O. Vitrik, Y. Kulchin, A. Porfirev, S. Khonina, S. Kudryashov, P. Danilov, and A. Ionin, “On-Fly Femtosecond-Laser Fabrication of Self-Organized Plasmonic Nanotextures for Chemo- and Biosensing Applications,” ACS Appl. Mater. Interfaces 8(37), 24946–24955 (2016).
[Crossref]

Danilov, P. A.

N. A. Smirnov, S. I. Kudryashov, P. A. Danilov, A. A. Nastulyavichus, A. A. Rudenko, A. A. Ionin, A. A. Kuchmizhak, and O. B. Vitrik, “Femtosecond laser ablation of a thin silver film in air and water,” Opt. Quantum Electron. 52(2), 71 (2020).
[Crossref]

P. A. Danilov, D. A. Zayarny, A. A. Ionin, S. I. Kudryashov, T. T. H. Nguyen, A. A. Rudenko, I. N. Saraeva, A. A. Kuchmizhak, O. B. Vitrik, and Y. N. Kulchin, “Structure and laser-fabrication mechanisms of microcones on silver films of variable thickness,” JETP Lett. 103(8), 549–552 (2016).
[Crossref]

Di Trapani, P.

A. Dubietis, A. Couairon, E. Kučinskas, G. Tamošauskas, E. Gaižauskas, D. Faccio, and P. Di Trapani, “Measurement and calculation of nonlinear absorption associated with femtosecond filaments in water,” Appl. Phys. B 84(3), 439–446 (2006).
[Crossref]

Drozdova, E. A.

A. Danilov, D. A. Zayarnyi, A. A. Ionin, S. I. Kudryashov, S. V. Makarov, A. A. Rudenko, V. I. Yurovskikh, Y. N. Kulchin, O. B. Vitrik, A. A. Kuchmizhak, E. A. Drozdova, and S. B. Odinokov, “Mechanisms of formation of sub- and micrometre-scale holes in thin metal films by single nano- and femtosecond laser pulses,” Quantum Electron. 44(6), 540–546 (2014).
[Crossref]

Du, D.

P. P. Pronko, S. K. Dutta, J. Squier J, V. Rudd, D. Du, and G. Mourou, “Machining of sub-micron holes using a femtosecond laser at 800 nm,” Opt. Commun. 114(1-2), 106–110 (1995).
[Crossref]

Dubietis, A.

A. Dubietis, A. Couairon, E. Kučinskas, G. Tamošauskas, E. Gaižauskas, D. Faccio, and P. Di Trapani, “Measurement and calculation of nonlinear absorption associated with femtosecond filaments in water,” Appl. Phys. B 84(3), 439–446 (2006).
[Crossref]

Dutta, S. K.

P. P. Pronko, S. K. Dutta, J. Squier J, V. Rudd, D. Du, and G. Mourou, “Machining of sub-micron holes using a femtosecond laser at 800 nm,” Opt. Commun. 114(1-2), 106–110 (1995).
[Crossref]

Egbert, A.

F. Korte, J. Serbin, J. Koch, A. Egbert, C. Fallnich, A. Ostendorf, and B. N. Chichkov, “Towards nanostructuring with femtosecond laser pulses,” Appl. Phys. A 77(2), 229–235 (2003).
[Crossref]

Emel’yanov, V. I.

V. I. Emel’yanov, D. A. Zayarniy, A. A. Ionin, I. V. Kiseleva, S. I. Kudryashov, S. V. Makarov, T. H. T. Nguyen, and A. A. Rudenko, “Nanoscale hydrodynamic instability in a molten thin gold film induced by femtosecond laser ablation,” JETP Lett. 99(9), 518–522 (2014).
[Crossref]

Faccio, D.

A. Dubietis, A. Couairon, E. Kučinskas, G. Tamošauskas, E. Gaižauskas, D. Faccio, and P. Di Trapani, “Measurement and calculation of nonlinear absorption associated with femtosecond filaments in water,” Appl. Phys. B 84(3), 439–446 (2006).
[Crossref]

Fallnich, C.

F. Korte, J. Serbin, J. Koch, A. Egbert, C. Fallnich, A. Ostendorf, and B. N. Chichkov, “Towards nanostructuring with femtosecond laser pulses,” Appl. Phys. A 77(2), 229–235 (2003).
[Crossref]

Farhan, A. M.

M. Götze, A. M. Farhan, T. Kürbitz, O. Krimig, S. Henning, A. Heilmann, and G. Hillrichs, “Laser Processing of Dry, Wet and Immersed Polyamide Nanofiber Nonwovens with Different Laser Sources,” J. Laser Micro Nanoeng. 12(3), 286–295 (2017).

Feng, J.

Z. Guo, J. Feng, K. Zhou, Y. Xiao, S. Qu, and J. H. Lee, “The formation of different structures in the interaction between a single femtosecond laser pulse and a thin Au film,” Appl. Phys. A 108(3), 639–644 (2012).
[Crossref]

Fortova, S. V.

V. V. Shepelev, N. A. Inogamov, and S. V. Fortova, “Thermal and dynamic effects of laser irradiation of thin metal films,” Opt. Quantum Electron. 52(2), 88 (2020).
[Crossref]

Franco, M.

A. Couairon, L. Sudrie, M. Franco, B. Prade, and A. Mysyrowicz, “Filamentation and damage in fused silica induced by tightly focused femtosecond laser pulses,” Phys. Rev. B 71(12), 125435 (2005).
[Crossref]

Gaižauskas, E.

A. Dubietis, A. Couairon, E. Kučinskas, G. Tamošauskas, E. Gaižauskas, D. Faccio, and P. Di Trapani, “Measurement and calculation of nonlinear absorption associated with femtosecond filaments in water,” Appl. Phys. B 84(3), 439–446 (2006).
[Crossref]

Gajic, R.

A. G. Kovačević, S. Petrović, B. Bokić, B. Gaković, M. T. Bokorov, B. Vasić, R. Gajić, M. Trtica, and B. M. Jelenković, “Surface nanopatterning of Al/Ti multilayer thin films and Al single layer by a low-fluence UV femtosecond laser beam,” Appl. Surf. Sci. 326, 91–98 (2015).
[Crossref]

Gakovic, B.

A. G. Kovačević, S. Petrović, B. Bokić, B. Gaković, M. T. Bokorov, B. Vasić, R. Gajić, M. Trtica, and B. M. Jelenković, “Surface nanopatterning of Al/Ti multilayer thin films and Al single layer by a low-fluence UV femtosecond laser beam,” Appl. Surf. Sci. 326, 91–98 (2015).
[Crossref]

Genevet, P.

J. Lin, P. Genevet, M. A. Kats, N. Antoniou, and F. Capasso, “Nanostructured Holograms for Broadband Manipulation of Vector Beams,” Nano Lett. 13(9), 4269–4274 (2013).
[Crossref]

Georgiev, D. G.

J. P. Moening, S. S. Thanawala, and D. G. Georgiev, “Formation of high-aspect-ratio protrusions on gold films by localized pulsed laser irradiation,” Appl. Phys. A 95(3), 635–638 (2009).
[Crossref]

Gordon, R.

R. Gordon, A. G. Brolo, D. Sinton, and K. L. Kavanagh, “Resonant optical transmission through hole-arrays in metal films: physics and applications,” Laser Photonics Rev. 4(2), 311–335 (2010).
[Crossref]

Götze, M.

M. Götze, A. M. Farhan, T. Kürbitz, O. Krimig, S. Henning, A. Heilmann, and G. Hillrichs, “Laser Processing of Dry, Wet and Immersed Polyamide Nanofiber Nonwovens with Different Laser Sources,” J. Laser Micro Nanoeng. 12(3), 286–295 (2017).

Guler, U.

S. Choudhury, U. Guler, A. Shaltout, V. M. Shalaev, A. V. Kildishev, and A. Boltasseva, “Pancharatnam–Berry Phase Manipulating Metasurface for Visible Color Hologram Based on Low Loss Silver Thin Film,” Adv. Opt. Mater. 5(10), 1700196 (2017).
[Crossref]

Guo, Z.

Z. Guo, J. Feng, K. Zhou, Y. Xiao, S. Qu, and J. H. Lee, “The formation of different structures in the interaction between a single femtosecond laser pulse and a thin Au film,” Appl. Phys. A 108(3), 639–644 (2012).
[Crossref]

Hakonen, A.

A. Hakonen, F. Wang, P. O. Andersson, H. Wingfors, T. Rindzevicius, M. S. Schmidt, V. R. Soma, S. Xu, Y. Li, A. Boisen, and H. Wu, “Hand-Held Femtogram Detection of Hazardous Picric Acid with Hydrophobic Ag Nanopillar SERS Substrates and Mechanism of Elasto-Capillarity,” ACS Sens. 2(2), 198–202 (2017).
[Crossref]

Heilmann, A.

M. Götze, A. M. Farhan, T. Kürbitz, O. Krimig, S. Henning, A. Heilmann, and G. Hillrichs, “Laser Processing of Dry, Wet and Immersed Polyamide Nanofiber Nonwovens with Different Laser Sources,” J. Laser Micro Nanoeng. 12(3), 286–295 (2017).

Helle, M. H.

M. H. Helle, T. G. Jones, J. R. Peñano, D. Kaganovich, and A. Ting, “Formation and propagation of meter-scale laser filaments in water,” Appl. Phys. Lett. 103(12), 121101 (2013).
[Crossref]

Henning, S.

M. Götze, A. M. Farhan, T. Kürbitz, O. Krimig, S. Henning, A. Heilmann, and G. Hillrichs, “Laser Processing of Dry, Wet and Immersed Polyamide Nanofiber Nonwovens with Different Laser Sources,” J. Laser Micro Nanoeng. 12(3), 286–295 (2017).

Hillrichs, G.

M. Götze, A. M. Farhan, T. Kürbitz, O. Krimig, S. Henning, A. Heilmann, and G. Hillrichs, “Laser Processing of Dry, Wet and Immersed Polyamide Nanofiber Nonwovens with Different Laser Sources,” J. Laser Micro Nanoeng. 12(3), 286–295 (2017).

Hong, M. H.

S. Zhu, Y. F. Lu, M. H. Hong, and X. Y. Chen, “Laser ablation of solid substrates in water and ambient air,” J. Appl. Phys. 89(4), 2400–2403 (2001).
[Crossref]

Hou, X.

H. Liu, F. Chen, X. Wang, Q. Yang, H. Bian, J. Si, and X. Hou, “Influence of liquid environments on femtosecond laser ablation of silicon,” Thin Solid Films 518(18), 5188–5194 (2010).
[Crossref]

Inogamov, N. A.

V. V. Shepelev, N. A. Inogamov, and S. V. Fortova, “Thermal and dynamic effects of laser irradiation of thin metal films,” Opt. Quantum Electron. 52(2), 88 (2020).
[Crossref]

N. A. Inogamov, V. V. Zhakhovsky, V. A. Khokhlov, Y. V. Petrov, and K. P. Migdal, “Solitary Nanostructures Produced by Ultrashort Laser Pulse,” Nanoscale Res. Lett. 11(1), 177 (2016).
[Crossref]

Ionin, A.

A. Kuchmizhak, E. Pustovalov, S. Syubaev, O. Vitrik, Y. Kulchin, A. Porfirev, S. Khonina, S. Kudryashov, P. Danilov, and A. Ionin, “On-Fly Femtosecond-Laser Fabrication of Self-Organized Plasmonic Nanotextures for Chemo- and Biosensing Applications,” ACS Appl. Mater. Interfaces 8(37), 24946–24955 (2016).
[Crossref]

Ionin, A. A.

N. A. Smirnov, S. I. Kudryashov, P. A. Danilov, A. A. Nastulyavichus, A. A. Rudenko, A. A. Ionin, A. A. Kuchmizhak, and O. B. Vitrik, “Femtosecond laser ablation of a thin silver film in air and water,” Opt. Quantum Electron. 52(2), 71 (2020).
[Crossref]

P. A. Danilov, D. A. Zayarny, A. A. Ionin, S. I. Kudryashov, T. T. H. Nguyen, A. A. Rudenko, I. N. Saraeva, A. A. Kuchmizhak, O. B. Vitrik, and Y. N. Kulchin, “Structure and laser-fabrication mechanisms of microcones on silver films of variable thickness,” JETP Lett. 103(8), 549–552 (2016).
[Crossref]

A. Danilov, D. A. Zayarnyi, A. A. Ionin, S. I. Kudryashov, S. V. Makarov, A. A. Rudenko, V. I. Yurovskikh, Y. N. Kulchin, O. B. Vitrik, A. A. Kuchmizhak, E. A. Drozdova, and S. B. Odinokov, “Mechanisms of formation of sub- and micrometre-scale holes in thin metal films by single nano- and femtosecond laser pulses,” Quantum Electron. 44(6), 540–546 (2014).
[Crossref]

V. I. Emel’yanov, D. A. Zayarniy, A. A. Ionin, I. V. Kiseleva, S. I. Kudryashov, S. V. Makarov, T. H. T. Nguyen, and A. A. Rudenko, “Nanoscale hydrodynamic instability in a molten thin gold film induced by femtosecond laser ablation,” JETP Lett. 99(9), 518–522 (2014).
[Crossref]

Y. N. Kulchin, O. B. Vitrik, A. A. Kuchmizhak, A. V. Nepomnyashchii, A. G. Savchuk, A. A. Ionin, S. I. Kudryashov, and S. V. Makarov, “Through nanohole formation in thin metallic film by single nanosecond laser pulses using optical dielectric apertureless probe,” Opt. Lett. 38(9), 1452–1454 (2013).
[Crossref]

Jelenkovic, B. M.

A. G. Kovačević, S. Petrović, B. Bokić, B. Gaković, M. T. Bokorov, B. Vasić, R. Gajić, M. Trtica, and B. M. Jelenković, “Surface nanopatterning of Al/Ti multilayer thin films and Al single layer by a low-fluence UV femtosecond laser beam,” Appl. Surf. Sci. 326, 91–98 (2015).
[Crossref]

Jones, T. G.

M. H. Helle, T. G. Jones, J. R. Peñano, D. Kaganovich, and A. Ting, “Formation and propagation of meter-scale laser filaments in water,” Appl. Phys. Lett. 103(12), 121101 (2013).
[Crossref]

Kaganovich, D.

M. H. Helle, T. G. Jones, J. R. Peñano, D. Kaganovich, and A. Ting, “Formation and propagation of meter-scale laser filaments in water,” Appl. Phys. Lett. 103(12), 121101 (2013).
[Crossref]

Kats, M. A.

J. Lin, P. Genevet, M. A. Kats, N. Antoniou, and F. Capasso, “Nanostructured Holograms for Broadband Manipulation of Vector Beams,” Nano Lett. 13(9), 4269–4274 (2013).
[Crossref]

Kavanagh, K. L.

R. Gordon, A. G. Brolo, D. Sinton, and K. L. Kavanagh, “Resonant optical transmission through hole-arrays in metal films: physics and applications,” Laser Photonics Rev. 4(2), 311–335 (2010).
[Crossref]

Khokhlov, V. A.

N. A. Inogamov, V. V. Zhakhovsky, V. A. Khokhlov, Y. V. Petrov, and K. P. Migdal, “Solitary Nanostructures Produced by Ultrashort Laser Pulse,” Nanoscale Res. Lett. 11(1), 177 (2016).
[Crossref]

Khonina, S.

A. Kuchmizhak, E. Pustovalov, S. Syubaev, O. Vitrik, Y. Kulchin, A. Porfirev, S. Khonina, S. Kudryashov, P. Danilov, and A. Ionin, “On-Fly Femtosecond-Laser Fabrication of Self-Organized Plasmonic Nanotextures for Chemo- and Biosensing Applications,” ACS Appl. Mater. Interfaces 8(37), 24946–24955 (2016).
[Crossref]

Kildishev, A. V.

S. Choudhury, U. Guler, A. Shaltout, V. M. Shalaev, A. V. Kildishev, and A. Boltasseva, “Pancharatnam–Berry Phase Manipulating Metasurface for Visible Color Hologram Based on Low Loss Silver Thin Film,” Adv. Opt. Mater. 5(10), 1700196 (2017).
[Crossref]

Kiseleva, I. V.

V. I. Emel’yanov, D. A. Zayarniy, A. A. Ionin, I. V. Kiseleva, S. I. Kudryashov, S. V. Makarov, T. H. T. Nguyen, and A. A. Rudenko, “Nanoscale hydrodynamic instability in a molten thin gold film induced by femtosecond laser ablation,” JETP Lett. 99(9), 518–522 (2014).
[Crossref]

Koch, J.

A. I. Kuznetsov, J. Koch, and B. N. Chichkov, “Laser-induced backward transfer of gold nanodroplets,” Opt. Express 17(21), 18820–18825 (2009).
[Crossref]

A. I. Kuznetsov, J. Koch, and B. N. Chichkov, “Nanostructuring of thin gold films by femtosecond lasers,” Appl. Phys. A 94(2), 221–230 (2009).
[Crossref]

F. Korte, J. Serbin, J. Koch, A. Egbert, C. Fallnich, A. Ostendorf, and B. N. Chichkov, “Towards nanostructuring with femtosecond laser pulses,” Appl. Phys. A 77(2), 229–235 (2003).
[Crossref]

Korte, F.

F. Korte, J. Serbin, J. Koch, A. Egbert, C. Fallnich, A. Ostendorf, and B. N. Chichkov, “Towards nanostructuring with femtosecond laser pulses,” Appl. Phys. A 77(2), 229–235 (2003).
[Crossref]

Kovacevic, A. G.

A. G. Kovačević, S. Petrović, B. Bokić, B. Gaković, M. T. Bokorov, B. Vasić, R. Gajić, M. Trtica, and B. M. Jelenković, “Surface nanopatterning of Al/Ti multilayer thin films and Al single layer by a low-fluence UV femtosecond laser beam,” Appl. Surf. Sci. 326, 91–98 (2015).
[Crossref]

Krimig, O.

M. Götze, A. M. Farhan, T. Kürbitz, O. Krimig, S. Henning, A. Heilmann, and G. Hillrichs, “Laser Processing of Dry, Wet and Immersed Polyamide Nanofiber Nonwovens with Different Laser Sources,” J. Laser Micro Nanoeng. 12(3), 286–295 (2017).

Kuchmizhak, A.

D. Pavlov, S. Syubaev, A. Cherepakhin, A. Sergeev, O. Vitrik, A. Zakharenko, P. Danilov, I. Saraeva, S. Kudryashov, A. Porfirev, and A. Kuchmizhak, “Ultrafast laser printing of self-organized bimetallic nanotextures for multi-wavelength biosensing,” Sci. Rep. 8(1), 1–10 (2018).
[Crossref]

A. Kuchmizhak, E. Pustovalov, S. Syubaev, O. Vitrik, Y. Kulchin, A. Porfirev, S. Khonina, S. Kudryashov, P. Danilov, and A. Ionin, “On-Fly Femtosecond-Laser Fabrication of Self-Organized Plasmonic Nanotextures for Chemo- and Biosensing Applications,” ACS Appl. Mater. Interfaces 8(37), 24946–24955 (2016).
[Crossref]

Kuchmizhak, A. A.

N. A. Smirnov, S. I. Kudryashov, P. A. Danilov, A. A. Nastulyavichus, A. A. Rudenko, A. A. Ionin, A. A. Kuchmizhak, and O. B. Vitrik, “Femtosecond laser ablation of a thin silver film in air and water,” Opt. Quantum Electron. 52(2), 71 (2020).
[Crossref]

P. A. Danilov, D. A. Zayarny, A. A. Ionin, S. I. Kudryashov, T. T. H. Nguyen, A. A. Rudenko, I. N. Saraeva, A. A. Kuchmizhak, O. B. Vitrik, and Y. N. Kulchin, “Structure and laser-fabrication mechanisms of microcones on silver films of variable thickness,” JETP Lett. 103(8), 549–552 (2016).
[Crossref]

A. Danilov, D. A. Zayarnyi, A. A. Ionin, S. I. Kudryashov, S. V. Makarov, A. A. Rudenko, V. I. Yurovskikh, Y. N. Kulchin, O. B. Vitrik, A. A. Kuchmizhak, E. A. Drozdova, and S. B. Odinokov, “Mechanisms of formation of sub- and micrometre-scale holes in thin metal films by single nano- and femtosecond laser pulses,” Quantum Electron. 44(6), 540–546 (2014).
[Crossref]

Y. N. Kulchin, O. B. Vitrik, A. A. Kuchmizhak, A. V. Nepomnyashchii, A. G. Savchuk, A. A. Ionin, S. I. Kudryashov, and S. V. Makarov, “Through nanohole formation in thin metallic film by single nanosecond laser pulses using optical dielectric apertureless probe,” Opt. Lett. 38(9), 1452–1454 (2013).
[Crossref]

Kucinskas, E.

A. Dubietis, A. Couairon, E. Kučinskas, G. Tamošauskas, E. Gaižauskas, D. Faccio, and P. Di Trapani, “Measurement and calculation of nonlinear absorption associated with femtosecond filaments in water,” Appl. Phys. B 84(3), 439–446 (2006).
[Crossref]

Kudryashov, S.

D. Pavlov, S. Syubaev, A. Cherepakhin, A. Sergeev, O. Vitrik, A. Zakharenko, P. Danilov, I. Saraeva, S. Kudryashov, A. Porfirev, and A. Kuchmizhak, “Ultrafast laser printing of self-organized bimetallic nanotextures for multi-wavelength biosensing,” Sci. Rep. 8(1), 1–10 (2018).
[Crossref]

A. Kuchmizhak, E. Pustovalov, S. Syubaev, O. Vitrik, Y. Kulchin, A. Porfirev, S. Khonina, S. Kudryashov, P. Danilov, and A. Ionin, “On-Fly Femtosecond-Laser Fabrication of Self-Organized Plasmonic Nanotextures for Chemo- and Biosensing Applications,” ACS Appl. Mater. Interfaces 8(37), 24946–24955 (2016).
[Crossref]

Kudryashov, S. I.

N. A. Smirnov, S. I. Kudryashov, P. A. Danilov, A. A. Nastulyavichus, A. A. Rudenko, A. A. Ionin, A. A. Kuchmizhak, and O. B. Vitrik, “Femtosecond laser ablation of a thin silver film in air and water,” Opt. Quantum Electron. 52(2), 71 (2020).
[Crossref]

P. A. Danilov, D. A. Zayarny, A. A. Ionin, S. I. Kudryashov, T. T. H. Nguyen, A. A. Rudenko, I. N. Saraeva, A. A. Kuchmizhak, O. B. Vitrik, and Y. N. Kulchin, “Structure and laser-fabrication mechanisms of microcones on silver films of variable thickness,” JETP Lett. 103(8), 549–552 (2016).
[Crossref]

A. Danilov, D. A. Zayarnyi, A. A. Ionin, S. I. Kudryashov, S. V. Makarov, A. A. Rudenko, V. I. Yurovskikh, Y. N. Kulchin, O. B. Vitrik, A. A. Kuchmizhak, E. A. Drozdova, and S. B. Odinokov, “Mechanisms of formation of sub- and micrometre-scale holes in thin metal films by single nano- and femtosecond laser pulses,” Quantum Electron. 44(6), 540–546 (2014).
[Crossref]

V. I. Emel’yanov, D. A. Zayarniy, A. A. Ionin, I. V. Kiseleva, S. I. Kudryashov, S. V. Makarov, T. H. T. Nguyen, and A. A. Rudenko, “Nanoscale hydrodynamic instability in a molten thin gold film induced by femtosecond laser ablation,” JETP Lett. 99(9), 518–522 (2014).
[Crossref]

Y. N. Kulchin, O. B. Vitrik, A. A. Kuchmizhak, A. V. Nepomnyashchii, A. G. Savchuk, A. A. Ionin, S. I. Kudryashov, and S. V. Makarov, “Through nanohole formation in thin metallic film by single nanosecond laser pulses using optical dielectric apertureless probe,” Opt. Lett. 38(9), 1452–1454 (2013).
[Crossref]

Kulchin, Y.

A. Kuchmizhak, E. Pustovalov, S. Syubaev, O. Vitrik, Y. Kulchin, A. Porfirev, S. Khonina, S. Kudryashov, P. Danilov, and A. Ionin, “On-Fly Femtosecond-Laser Fabrication of Self-Organized Plasmonic Nanotextures for Chemo- and Biosensing Applications,” ACS Appl. Mater. Interfaces 8(37), 24946–24955 (2016).
[Crossref]

Kulchin, Y. N.

P. A. Danilov, D. A. Zayarny, A. A. Ionin, S. I. Kudryashov, T. T. H. Nguyen, A. A. Rudenko, I. N. Saraeva, A. A. Kuchmizhak, O. B. Vitrik, and Y. N. Kulchin, “Structure and laser-fabrication mechanisms of microcones on silver films of variable thickness,” JETP Lett. 103(8), 549–552 (2016).
[Crossref]

A. Danilov, D. A. Zayarnyi, A. A. Ionin, S. I. Kudryashov, S. V. Makarov, A. A. Rudenko, V. I. Yurovskikh, Y. N. Kulchin, O. B. Vitrik, A. A. Kuchmizhak, E. A. Drozdova, and S. B. Odinokov, “Mechanisms of formation of sub- and micrometre-scale holes in thin metal films by single nano- and femtosecond laser pulses,” Quantum Electron. 44(6), 540–546 (2014).
[Crossref]

Y. N. Kulchin, O. B. Vitrik, A. A. Kuchmizhak, A. V. Nepomnyashchii, A. G. Savchuk, A. A. Ionin, S. I. Kudryashov, and S. V. Makarov, “Through nanohole formation in thin metallic film by single nanosecond laser pulses using optical dielectric apertureless probe,” Opt. Lett. 38(9), 1452–1454 (2013).
[Crossref]

Kürbitz, T.

M. Götze, A. M. Farhan, T. Kürbitz, O. Krimig, S. Henning, A. Heilmann, and G. Hillrichs, “Laser Processing of Dry, Wet and Immersed Polyamide Nanofiber Nonwovens with Different Laser Sources,” J. Laser Micro Nanoeng. 12(3), 286–295 (2017).

Kuznetsov, A. I.

A. I. Kuznetsov, J. Koch, and B. N. Chichkov, “Nanostructuring of thin gold films by femtosecond lasers,” Appl. Phys. A 94(2), 221–230 (2009).
[Crossref]

A. I. Kuznetsov, J. Koch, and B. N. Chichkov, “Laser-induced backward transfer of gold nanodroplets,” Opt. Express 17(21), 18820–18825 (2009).
[Crossref]

Lee, J. H.

Z. Guo, J. Feng, K. Zhou, Y. Xiao, S. Qu, and J. H. Lee, “The formation of different structures in the interaction between a single femtosecond laser pulse and a thin Au film,” Appl. Phys. A 108(3), 639–644 (2012).
[Crossref]

Li, Y.

A. Hakonen, F. Wang, P. O. Andersson, H. Wingfors, T. Rindzevicius, M. S. Schmidt, V. R. Soma, S. Xu, Y. Li, A. Boisen, and H. Wu, “Hand-Held Femtogram Detection of Hazardous Picric Acid with Hydrophobic Ag Nanopillar SERS Substrates and Mechanism of Elasto-Capillarity,” ACS Sens. 2(2), 198–202 (2017).
[Crossref]

Lin, J.

J. Lin, P. Genevet, M. A. Kats, N. Antoniou, and F. Capasso, “Nanostructured Holograms for Broadband Manipulation of Vector Beams,” Nano Lett. 13(9), 4269–4274 (2013).
[Crossref]

Liu, H.

H. Liu, F. Chen, X. Wang, Q. Yang, H. Bian, J. Si, and X. Hou, “Influence of liquid environments on femtosecond laser ablation of silicon,” Thin Solid Films 518(18), 5188–5194 (2010).
[Crossref]

Lu, Y. F.

S. Zhu, Y. F. Lu, M. H. Hong, and X. Y. Chen, “Laser ablation of solid substrates in water and ambient air,” J. Appl. Phys. 89(4), 2400–2403 (2001).
[Crossref]

Makarov, S. V.

A. Danilov, D. A. Zayarnyi, A. A. Ionin, S. I. Kudryashov, S. V. Makarov, A. A. Rudenko, V. I. Yurovskikh, Y. N. Kulchin, O. B. Vitrik, A. A. Kuchmizhak, E. A. Drozdova, and S. B. Odinokov, “Mechanisms of formation of sub- and micrometre-scale holes in thin metal films by single nano- and femtosecond laser pulses,” Quantum Electron. 44(6), 540–546 (2014).
[Crossref]

V. I. Emel’yanov, D. A. Zayarniy, A. A. Ionin, I. V. Kiseleva, S. I. Kudryashov, S. V. Makarov, T. H. T. Nguyen, and A. A. Rudenko, “Nanoscale hydrodynamic instability in a molten thin gold film induced by femtosecond laser ablation,” JETP Lett. 99(9), 518–522 (2014).
[Crossref]

Y. N. Kulchin, O. B. Vitrik, A. A. Kuchmizhak, A. V. Nepomnyashchii, A. G. Savchuk, A. A. Ionin, S. I. Kudryashov, and S. V. Makarov, “Through nanohole formation in thin metallic film by single nanosecond laser pulses using optical dielectric apertureless probe,” Opt. Lett. 38(9), 1452–1454 (2013).
[Crossref]

Migdal, K. P.

N. A. Inogamov, V. V. Zhakhovsky, V. A. Khokhlov, Y. V. Petrov, and K. P. Migdal, “Solitary Nanostructures Produced by Ultrashort Laser Pulse,” Nanoscale Res. Lett. 11(1), 177 (2016).
[Crossref]

Miyanaga, N.

Y. Nakata, N. Miyanaga, and T. Okada, “Effect of pulse width and fluence of femtosecond laser on the size of nanobump array,” Appl. Surf. Sci. 253(15), 6555–6557 (2007).
[Crossref]

Moening, J. P.

J. P. Moening, S. S. Thanawala, and D. G. Georgiev, “Formation of high-aspect-ratio protrusions on gold films by localized pulsed laser irradiation,” Appl. Phys. A 95(3), 635–638 (2009).
[Crossref]

Mourou, G.

P. P. Pronko, S. K. Dutta, J. Squier J, V. Rudd, D. Du, and G. Mourou, “Machining of sub-micron holes using a femtosecond laser at 800 nm,” Opt. Commun. 114(1-2), 106–110 (1995).
[Crossref]

Mysyrowicz, A.

A. Couairon, L. Sudrie, M. Franco, B. Prade, and A. Mysyrowicz, “Filamentation and damage in fused silica induced by tightly focused femtosecond laser pulses,” Phys. Rev. B 71(12), 125435 (2005).
[Crossref]

Nakata, Y.

Y. Nakata, N. Miyanaga, and T. Okada, “Effect of pulse width and fluence of femtosecond laser on the size of nanobump array,” Appl. Surf. Sci. 253(15), 6555–6557 (2007).
[Crossref]

Nastulyavichus, A. A.

N. A. Smirnov, S. I. Kudryashov, P. A. Danilov, A. A. Nastulyavichus, A. A. Rudenko, A. A. Ionin, A. A. Kuchmizhak, and O. B. Vitrik, “Femtosecond laser ablation of a thin silver film in air and water,” Opt. Quantum Electron. 52(2), 71 (2020).
[Crossref]

Nepomnyashchii, A. V.

Nguyen, T. H. T.

V. I. Emel’yanov, D. A. Zayarniy, A. A. Ionin, I. V. Kiseleva, S. I. Kudryashov, S. V. Makarov, T. H. T. Nguyen, and A. A. Rudenko, “Nanoscale hydrodynamic instability in a molten thin gold film induced by femtosecond laser ablation,” JETP Lett. 99(9), 518–522 (2014).
[Crossref]

Nguyen, T. T. H.

P. A. Danilov, D. A. Zayarny, A. A. Ionin, S. I. Kudryashov, T. T. H. Nguyen, A. A. Rudenko, I. N. Saraeva, A. A. Kuchmizhak, O. B. Vitrik, and Y. N. Kulchin, “Structure and laser-fabrication mechanisms of microcones on silver films of variable thickness,” JETP Lett. 103(8), 549–552 (2016).
[Crossref]

Odinokov, S. B.

A. Danilov, D. A. Zayarnyi, A. A. Ionin, S. I. Kudryashov, S. V. Makarov, A. A. Rudenko, V. I. Yurovskikh, Y. N. Kulchin, O. B. Vitrik, A. A. Kuchmizhak, E. A. Drozdova, and S. B. Odinokov, “Mechanisms of formation of sub- and micrometre-scale holes in thin metal films by single nano- and femtosecond laser pulses,” Quantum Electron. 44(6), 540–546 (2014).
[Crossref]

Okada, T.

Y. Nakata, N. Miyanaga, and T. Okada, “Effect of pulse width and fluence of femtosecond laser on the size of nanobump array,” Appl. Surf. Sci. 253(15), 6555–6557 (2007).
[Crossref]

Ostendorf, A.

F. Korte, J. Serbin, J. Koch, A. Egbert, C. Fallnich, A. Ostendorf, and B. N. Chichkov, “Towards nanostructuring with femtosecond laser pulses,” Appl. Phys. A 77(2), 229–235 (2003).
[Crossref]

Pavlov, D.

D. Pavlov, S. Syubaev, A. Cherepakhin, A. Sergeev, O. Vitrik, A. Zakharenko, P. Danilov, I. Saraeva, S. Kudryashov, A. Porfirev, and A. Kuchmizhak, “Ultrafast laser printing of self-organized bimetallic nanotextures for multi-wavelength biosensing,” Sci. Rep. 8(1), 1–10 (2018).
[Crossref]

Peñano, J. R.

M. H. Helle, T. G. Jones, J. R. Peñano, D. Kaganovich, and A. Ting, “Formation and propagation of meter-scale laser filaments in water,” Appl. Phys. Lett. 103(12), 121101 (2013).
[Crossref]

Petrov, Y. V.

N. A. Inogamov, V. V. Zhakhovsky, V. A. Khokhlov, Y. V. Petrov, and K. P. Migdal, “Solitary Nanostructures Produced by Ultrashort Laser Pulse,” Nanoscale Res. Lett. 11(1), 177 (2016).
[Crossref]

Petrovic, S.

A. G. Kovačević, S. Petrović, B. Bokić, B. Gaković, M. T. Bokorov, B. Vasić, R. Gajić, M. Trtica, and B. M. Jelenković, “Surface nanopatterning of Al/Ti multilayer thin films and Al single layer by a low-fluence UV femtosecond laser beam,” Appl. Surf. Sci. 326, 91–98 (2015).
[Crossref]

Porfirev, A.

D. Pavlov, S. Syubaev, A. Cherepakhin, A. Sergeev, O. Vitrik, A. Zakharenko, P. Danilov, I. Saraeva, S. Kudryashov, A. Porfirev, and A. Kuchmizhak, “Ultrafast laser printing of self-organized bimetallic nanotextures for multi-wavelength biosensing,” Sci. Rep. 8(1), 1–10 (2018).
[Crossref]

A. Kuchmizhak, E. Pustovalov, S. Syubaev, O. Vitrik, Y. Kulchin, A. Porfirev, S. Khonina, S. Kudryashov, P. Danilov, and A. Ionin, “On-Fly Femtosecond-Laser Fabrication of Self-Organized Plasmonic Nanotextures for Chemo- and Biosensing Applications,” ACS Appl. Mater. Interfaces 8(37), 24946–24955 (2016).
[Crossref]

Prade, B.

A. Couairon, L. Sudrie, M. Franco, B. Prade, and A. Mysyrowicz, “Filamentation and damage in fused silica induced by tightly focused femtosecond laser pulses,” Phys. Rev. B 71(12), 125435 (2005).
[Crossref]

Pronko, P. P.

P. P. Pronko, S. K. Dutta, J. Squier J, V. Rudd, D. Du, and G. Mourou, “Machining of sub-micron holes using a femtosecond laser at 800 nm,” Opt. Commun. 114(1-2), 106–110 (1995).
[Crossref]

Pustovalov, E.

A. Kuchmizhak, E. Pustovalov, S. Syubaev, O. Vitrik, Y. Kulchin, A. Porfirev, S. Khonina, S. Kudryashov, P. Danilov, and A. Ionin, “On-Fly Femtosecond-Laser Fabrication of Self-Organized Plasmonic Nanotextures for Chemo- and Biosensing Applications,” ACS Appl. Mater. Interfaces 8(37), 24946–24955 (2016).
[Crossref]

Qu, S.

Z. Guo, J. Feng, K. Zhou, Y. Xiao, S. Qu, and J. H. Lee, “The formation of different structures in the interaction between a single femtosecond laser pulse and a thin Au film,” Appl. Phys. A 108(3), 639–644 (2012).
[Crossref]

Rindzevicius, T.

A. Hakonen, F. Wang, P. O. Andersson, H. Wingfors, T. Rindzevicius, M. S. Schmidt, V. R. Soma, S. Xu, Y. Li, A. Boisen, and H. Wu, “Hand-Held Femtogram Detection of Hazardous Picric Acid with Hydrophobic Ag Nanopillar SERS Substrates and Mechanism of Elasto-Capillarity,” ACS Sens. 2(2), 198–202 (2017).
[Crossref]

Rudd, V.

P. P. Pronko, S. K. Dutta, J. Squier J, V. Rudd, D. Du, and G. Mourou, “Machining of sub-micron holes using a femtosecond laser at 800 nm,” Opt. Commun. 114(1-2), 106–110 (1995).
[Crossref]

Rudenko, A. A.

N. A. Smirnov, S. I. Kudryashov, P. A. Danilov, A. A. Nastulyavichus, A. A. Rudenko, A. A. Ionin, A. A. Kuchmizhak, and O. B. Vitrik, “Femtosecond laser ablation of a thin silver film in air and water,” Opt. Quantum Electron. 52(2), 71 (2020).
[Crossref]

P. A. Danilov, D. A. Zayarny, A. A. Ionin, S. I. Kudryashov, T. T. H. Nguyen, A. A. Rudenko, I. N. Saraeva, A. A. Kuchmizhak, O. B. Vitrik, and Y. N. Kulchin, “Structure and laser-fabrication mechanisms of microcones on silver films of variable thickness,” JETP Lett. 103(8), 549–552 (2016).
[Crossref]

A. Danilov, D. A. Zayarnyi, A. A. Ionin, S. I. Kudryashov, S. V. Makarov, A. A. Rudenko, V. I. Yurovskikh, Y. N. Kulchin, O. B. Vitrik, A. A. Kuchmizhak, E. A. Drozdova, and S. B. Odinokov, “Mechanisms of formation of sub- and micrometre-scale holes in thin metal films by single nano- and femtosecond laser pulses,” Quantum Electron. 44(6), 540–546 (2014).
[Crossref]

V. I. Emel’yanov, D. A. Zayarniy, A. A. Ionin, I. V. Kiseleva, S. I. Kudryashov, S. V. Makarov, T. H. T. Nguyen, and A. A. Rudenko, “Nanoscale hydrodynamic instability in a molten thin gold film induced by femtosecond laser ablation,” JETP Lett. 99(9), 518–522 (2014).
[Crossref]

Saraeva, I.

D. Pavlov, S. Syubaev, A. Cherepakhin, A. Sergeev, O. Vitrik, A. Zakharenko, P. Danilov, I. Saraeva, S. Kudryashov, A. Porfirev, and A. Kuchmizhak, “Ultrafast laser printing of self-organized bimetallic nanotextures for multi-wavelength biosensing,” Sci. Rep. 8(1), 1–10 (2018).
[Crossref]

Saraeva, I. N.

P. A. Danilov, D. A. Zayarny, A. A. Ionin, S. I. Kudryashov, T. T. H. Nguyen, A. A. Rudenko, I. N. Saraeva, A. A. Kuchmizhak, O. B. Vitrik, and Y. N. Kulchin, “Structure and laser-fabrication mechanisms of microcones on silver films of variable thickness,” JETP Lett. 103(8), 549–552 (2016).
[Crossref]

Savchuk, A. G.

Schmidt, M. S.

A. Hakonen, F. Wang, P. O. Andersson, H. Wingfors, T. Rindzevicius, M. S. Schmidt, V. R. Soma, S. Xu, Y. Li, A. Boisen, and H. Wu, “Hand-Held Femtogram Detection of Hazardous Picric Acid with Hydrophobic Ag Nanopillar SERS Substrates and Mechanism of Elasto-Capillarity,” ACS Sens. 2(2), 198–202 (2017).
[Crossref]

Serbin, J.

F. Korte, J. Serbin, J. Koch, A. Egbert, C. Fallnich, A. Ostendorf, and B. N. Chichkov, “Towards nanostructuring with femtosecond laser pulses,” Appl. Phys. A 77(2), 229–235 (2003).
[Crossref]

Sergeev, A.

D. Pavlov, S. Syubaev, A. Cherepakhin, A. Sergeev, O. Vitrik, A. Zakharenko, P. Danilov, I. Saraeva, S. Kudryashov, A. Porfirev, and A. Kuchmizhak, “Ultrafast laser printing of self-organized bimetallic nanotextures for multi-wavelength biosensing,” Sci. Rep. 8(1), 1–10 (2018).
[Crossref]

Shalaev, V. M.

S. Choudhury, U. Guler, A. Shaltout, V. M. Shalaev, A. V. Kildishev, and A. Boltasseva, “Pancharatnam–Berry Phase Manipulating Metasurface for Visible Color Hologram Based on Low Loss Silver Thin Film,” Adv. Opt. Mater. 5(10), 1700196 (2017).
[Crossref]

Shaltout, A.

S. Choudhury, U. Guler, A. Shaltout, V. M. Shalaev, A. V. Kildishev, and A. Boltasseva, “Pancharatnam–Berry Phase Manipulating Metasurface for Visible Color Hologram Based on Low Loss Silver Thin Film,” Adv. Opt. Mater. 5(10), 1700196 (2017).
[Crossref]

Shepelev, V. V.

V. V. Shepelev, N. A. Inogamov, and S. V. Fortova, “Thermal and dynamic effects of laser irradiation of thin metal films,” Opt. Quantum Electron. 52(2), 88 (2020).
[Crossref]

Si, J.

H. Liu, F. Chen, X. Wang, Q. Yang, H. Bian, J. Si, and X. Hou, “Influence of liquid environments on femtosecond laser ablation of silicon,” Thin Solid Films 518(18), 5188–5194 (2010).
[Crossref]

Sinton, D.

R. Gordon, A. G. Brolo, D. Sinton, and K. L. Kavanagh, “Resonant optical transmission through hole-arrays in metal films: physics and applications,” Laser Photonics Rev. 4(2), 311–335 (2010).
[Crossref]

Smirnov, N. A.

N. A. Smirnov, S. I. Kudryashov, P. A. Danilov, A. A. Nastulyavichus, A. A. Rudenko, A. A. Ionin, A. A. Kuchmizhak, and O. B. Vitrik, “Femtosecond laser ablation of a thin silver film in air and water,” Opt. Quantum Electron. 52(2), 71 (2020).
[Crossref]

Soma, V. R.

A. Hakonen, F. Wang, P. O. Andersson, H. Wingfors, T. Rindzevicius, M. S. Schmidt, V. R. Soma, S. Xu, Y. Li, A. Boisen, and H. Wu, “Hand-Held Femtogram Detection of Hazardous Picric Acid with Hydrophobic Ag Nanopillar SERS Substrates and Mechanism of Elasto-Capillarity,” ACS Sens. 2(2), 198–202 (2017).
[Crossref]

Squier J, J.

P. P. Pronko, S. K. Dutta, J. Squier J, V. Rudd, D. Du, and G. Mourou, “Machining of sub-micron holes using a femtosecond laser at 800 nm,” Opt. Commun. 114(1-2), 106–110 (1995).
[Crossref]

Sudrie, L.

A. Couairon, L. Sudrie, M. Franco, B. Prade, and A. Mysyrowicz, “Filamentation and damage in fused silica induced by tightly focused femtosecond laser pulses,” Phys. Rev. B 71(12), 125435 (2005).
[Crossref]

Syubaev, S.

D. Pavlov, S. Syubaev, A. Cherepakhin, A. Sergeev, O. Vitrik, A. Zakharenko, P. Danilov, I. Saraeva, S. Kudryashov, A. Porfirev, and A. Kuchmizhak, “Ultrafast laser printing of self-organized bimetallic nanotextures for multi-wavelength biosensing,” Sci. Rep. 8(1), 1–10 (2018).
[Crossref]

A. Kuchmizhak, E. Pustovalov, S. Syubaev, O. Vitrik, Y. Kulchin, A. Porfirev, S. Khonina, S. Kudryashov, P. Danilov, and A. Ionin, “On-Fly Femtosecond-Laser Fabrication of Self-Organized Plasmonic Nanotextures for Chemo- and Biosensing Applications,” ACS Appl. Mater. Interfaces 8(37), 24946–24955 (2016).
[Crossref]

Tamošauskas, G.

A. Dubietis, A. Couairon, E. Kučinskas, G. Tamošauskas, E. Gaižauskas, D. Faccio, and P. Di Trapani, “Measurement and calculation of nonlinear absorption associated with femtosecond filaments in water,” Appl. Phys. B 84(3), 439–446 (2006).
[Crossref]

Thanawala, S. S.

J. P. Moening, S. S. Thanawala, and D. G. Georgiev, “Formation of high-aspect-ratio protrusions on gold films by localized pulsed laser irradiation,” Appl. Phys. A 95(3), 635–638 (2009).
[Crossref]

Ting, A.

M. H. Helle, T. G. Jones, J. R. Peñano, D. Kaganovich, and A. Ting, “Formation and propagation of meter-scale laser filaments in water,” Appl. Phys. Lett. 103(12), 121101 (2013).
[Crossref]

Trtica, M.

A. G. Kovačević, S. Petrović, B. Bokić, B. Gaković, M. T. Bokorov, B. Vasić, R. Gajić, M. Trtica, and B. M. Jelenković, “Surface nanopatterning of Al/Ti multilayer thin films and Al single layer by a low-fluence UV femtosecond laser beam,” Appl. Surf. Sci. 326, 91–98 (2015).
[Crossref]

Vasic, B.

A. G. Kovačević, S. Petrović, B. Bokić, B. Gaković, M. T. Bokorov, B. Vasić, R. Gajić, M. Trtica, and B. M. Jelenković, “Surface nanopatterning of Al/Ti multilayer thin films and Al single layer by a low-fluence UV femtosecond laser beam,” Appl. Surf. Sci. 326, 91–98 (2015).
[Crossref]

Vitrik, O.

D. Pavlov, S. Syubaev, A. Cherepakhin, A. Sergeev, O. Vitrik, A. Zakharenko, P. Danilov, I. Saraeva, S. Kudryashov, A. Porfirev, and A. Kuchmizhak, “Ultrafast laser printing of self-organized bimetallic nanotextures for multi-wavelength biosensing,” Sci. Rep. 8(1), 1–10 (2018).
[Crossref]

A. Kuchmizhak, E. Pustovalov, S. Syubaev, O. Vitrik, Y. Kulchin, A. Porfirev, S. Khonina, S. Kudryashov, P. Danilov, and A. Ionin, “On-Fly Femtosecond-Laser Fabrication of Self-Organized Plasmonic Nanotextures for Chemo- and Biosensing Applications,” ACS Appl. Mater. Interfaces 8(37), 24946–24955 (2016).
[Crossref]

Vitrik, O. B.

N. A. Smirnov, S. I. Kudryashov, P. A. Danilov, A. A. Nastulyavichus, A. A. Rudenko, A. A. Ionin, A. A. Kuchmizhak, and O. B. Vitrik, “Femtosecond laser ablation of a thin silver film in air and water,” Opt. Quantum Electron. 52(2), 71 (2020).
[Crossref]

P. A. Danilov, D. A. Zayarny, A. A. Ionin, S. I. Kudryashov, T. T. H. Nguyen, A. A. Rudenko, I. N. Saraeva, A. A. Kuchmizhak, O. B. Vitrik, and Y. N. Kulchin, “Structure and laser-fabrication mechanisms of microcones on silver films of variable thickness,” JETP Lett. 103(8), 549–552 (2016).
[Crossref]

A. Danilov, D. A. Zayarnyi, A. A. Ionin, S. I. Kudryashov, S. V. Makarov, A. A. Rudenko, V. I. Yurovskikh, Y. N. Kulchin, O. B. Vitrik, A. A. Kuchmizhak, E. A. Drozdova, and S. B. Odinokov, “Mechanisms of formation of sub- and micrometre-scale holes in thin metal films by single nano- and femtosecond laser pulses,” Quantum Electron. 44(6), 540–546 (2014).
[Crossref]

Y. N. Kulchin, O. B. Vitrik, A. A. Kuchmizhak, A. V. Nepomnyashchii, A. G. Savchuk, A. A. Ionin, S. I. Kudryashov, and S. V. Makarov, “Through nanohole formation in thin metallic film by single nanosecond laser pulses using optical dielectric apertureless probe,” Opt. Lett. 38(9), 1452–1454 (2013).
[Crossref]

Wang, F.

A. Hakonen, F. Wang, P. O. Andersson, H. Wingfors, T. Rindzevicius, M. S. Schmidt, V. R. Soma, S. Xu, Y. Li, A. Boisen, and H. Wu, “Hand-Held Femtogram Detection of Hazardous Picric Acid with Hydrophobic Ag Nanopillar SERS Substrates and Mechanism of Elasto-Capillarity,” ACS Sens. 2(2), 198–202 (2017).
[Crossref]

Wang, X.

H. Liu, F. Chen, X. Wang, Q. Yang, H. Bian, J. Si, and X. Hou, “Influence of liquid environments on femtosecond laser ablation of silicon,” Thin Solid Films 518(18), 5188–5194 (2010).
[Crossref]

Wingfors, H.

A. Hakonen, F. Wang, P. O. Andersson, H. Wingfors, T. Rindzevicius, M. S. Schmidt, V. R. Soma, S. Xu, Y. Li, A. Boisen, and H. Wu, “Hand-Held Femtogram Detection of Hazardous Picric Acid with Hydrophobic Ag Nanopillar SERS Substrates and Mechanism of Elasto-Capillarity,” ACS Sens. 2(2), 198–202 (2017).
[Crossref]

Wu, H.

A. Hakonen, F. Wang, P. O. Andersson, H. Wingfors, T. Rindzevicius, M. S. Schmidt, V. R. Soma, S. Xu, Y. Li, A. Boisen, and H. Wu, “Hand-Held Femtogram Detection of Hazardous Picric Acid with Hydrophobic Ag Nanopillar SERS Substrates and Mechanism of Elasto-Capillarity,” ACS Sens. 2(2), 198–202 (2017).
[Crossref]

Xiao, Y.

Z. Guo, J. Feng, K. Zhou, Y. Xiao, S. Qu, and J. H. Lee, “The formation of different structures in the interaction between a single femtosecond laser pulse and a thin Au film,” Appl. Phys. A 108(3), 639–644 (2012).
[Crossref]

Xu, S.

A. Hakonen, F. Wang, P. O. Andersson, H. Wingfors, T. Rindzevicius, M. S. Schmidt, V. R. Soma, S. Xu, Y. Li, A. Boisen, and H. Wu, “Hand-Held Femtogram Detection of Hazardous Picric Acid with Hydrophobic Ag Nanopillar SERS Substrates and Mechanism of Elasto-Capillarity,” ACS Sens. 2(2), 198–202 (2017).
[Crossref]

Yang, Q.

H. Liu, F. Chen, X. Wang, Q. Yang, H. Bian, J. Si, and X. Hou, “Influence of liquid environments on femtosecond laser ablation of silicon,” Thin Solid Films 518(18), 5188–5194 (2010).
[Crossref]

Yurovskikh, V. I.

A. Danilov, D. A. Zayarnyi, A. A. Ionin, S. I. Kudryashov, S. V. Makarov, A. A. Rudenko, V. I. Yurovskikh, Y. N. Kulchin, O. B. Vitrik, A. A. Kuchmizhak, E. A. Drozdova, and S. B. Odinokov, “Mechanisms of formation of sub- and micrometre-scale holes in thin metal films by single nano- and femtosecond laser pulses,” Quantum Electron. 44(6), 540–546 (2014).
[Crossref]

Zakharenko, A.

D. Pavlov, S. Syubaev, A. Cherepakhin, A. Sergeev, O. Vitrik, A. Zakharenko, P. Danilov, I. Saraeva, S. Kudryashov, A. Porfirev, and A. Kuchmizhak, “Ultrafast laser printing of self-organized bimetallic nanotextures for multi-wavelength biosensing,” Sci. Rep. 8(1), 1–10 (2018).
[Crossref]

Zayarniy, D. A.

V. I. Emel’yanov, D. A. Zayarniy, A. A. Ionin, I. V. Kiseleva, S. I. Kudryashov, S. V. Makarov, T. H. T. Nguyen, and A. A. Rudenko, “Nanoscale hydrodynamic instability in a molten thin gold film induced by femtosecond laser ablation,” JETP Lett. 99(9), 518–522 (2014).
[Crossref]

Zayarny, D. A.

P. A. Danilov, D. A. Zayarny, A. A. Ionin, S. I. Kudryashov, T. T. H. Nguyen, A. A. Rudenko, I. N. Saraeva, A. A. Kuchmizhak, O. B. Vitrik, and Y. N. Kulchin, “Structure and laser-fabrication mechanisms of microcones on silver films of variable thickness,” JETP Lett. 103(8), 549–552 (2016).
[Crossref]

Zayarnyi, D. A.

A. Danilov, D. A. Zayarnyi, A. A. Ionin, S. I. Kudryashov, S. V. Makarov, A. A. Rudenko, V. I. Yurovskikh, Y. N. Kulchin, O. B. Vitrik, A. A. Kuchmizhak, E. A. Drozdova, and S. B. Odinokov, “Mechanisms of formation of sub- and micrometre-scale holes in thin metal films by single nano- and femtosecond laser pulses,” Quantum Electron. 44(6), 540–546 (2014).
[Crossref]

Zhakhovsky, V. V.

N. A. Inogamov, V. V. Zhakhovsky, V. A. Khokhlov, Y. V. Petrov, and K. P. Migdal, “Solitary Nanostructures Produced by Ultrashort Laser Pulse,” Nanoscale Res. Lett. 11(1), 177 (2016).
[Crossref]

Zhou, K.

Z. Guo, J. Feng, K. Zhou, Y. Xiao, S. Qu, and J. H. Lee, “The formation of different structures in the interaction between a single femtosecond laser pulse and a thin Au film,” Appl. Phys. A 108(3), 639–644 (2012).
[Crossref]

Zhu, S.

S. Zhu, Y. F. Lu, M. H. Hong, and X. Y. Chen, “Laser ablation of solid substrates in water and ambient air,” J. Appl. Phys. 89(4), 2400–2403 (2001).
[Crossref]

ACS Appl. Mater. Interfaces (1)

A. Kuchmizhak, E. Pustovalov, S. Syubaev, O. Vitrik, Y. Kulchin, A. Porfirev, S. Khonina, S. Kudryashov, P. Danilov, and A. Ionin, “On-Fly Femtosecond-Laser Fabrication of Self-Organized Plasmonic Nanotextures for Chemo- and Biosensing Applications,” ACS Appl. Mater. Interfaces 8(37), 24946–24955 (2016).
[Crossref]

ACS Sens. (1)

A. Hakonen, F. Wang, P. O. Andersson, H. Wingfors, T. Rindzevicius, M. S. Schmidt, V. R. Soma, S. Xu, Y. Li, A. Boisen, and H. Wu, “Hand-Held Femtogram Detection of Hazardous Picric Acid with Hydrophobic Ag Nanopillar SERS Substrates and Mechanism of Elasto-Capillarity,” ACS Sens. 2(2), 198–202 (2017).
[Crossref]

Adv. Opt. Mater. (1)

S. Choudhury, U. Guler, A. Shaltout, V. M. Shalaev, A. V. Kildishev, and A. Boltasseva, “Pancharatnam–Berry Phase Manipulating Metasurface for Visible Color Hologram Based on Low Loss Silver Thin Film,” Adv. Opt. Mater. 5(10), 1700196 (2017).
[Crossref]

Appl. Phys. A (4)

A. I. Kuznetsov, J. Koch, and B. N. Chichkov, “Nanostructuring of thin gold films by femtosecond lasers,” Appl. Phys. A 94(2), 221–230 (2009).
[Crossref]

F. Korte, J. Serbin, J. Koch, A. Egbert, C. Fallnich, A. Ostendorf, and B. N. Chichkov, “Towards nanostructuring with femtosecond laser pulses,” Appl. Phys. A 77(2), 229–235 (2003).
[Crossref]

J. P. Moening, S. S. Thanawala, and D. G. Georgiev, “Formation of high-aspect-ratio protrusions on gold films by localized pulsed laser irradiation,” Appl. Phys. A 95(3), 635–638 (2009).
[Crossref]

Z. Guo, J. Feng, K. Zhou, Y. Xiao, S. Qu, and J. H. Lee, “The formation of different structures in the interaction between a single femtosecond laser pulse and a thin Au film,” Appl. Phys. A 108(3), 639–644 (2012).
[Crossref]

Appl. Phys. B (1)

A. Dubietis, A. Couairon, E. Kučinskas, G. Tamošauskas, E. Gaižauskas, D. Faccio, and P. Di Trapani, “Measurement and calculation of nonlinear absorption associated with femtosecond filaments in water,” Appl. Phys. B 84(3), 439–446 (2006).
[Crossref]

Appl. Phys. Lett. (1)

M. H. Helle, T. G. Jones, J. R. Peñano, D. Kaganovich, and A. Ting, “Formation and propagation of meter-scale laser filaments in water,” Appl. Phys. Lett. 103(12), 121101 (2013).
[Crossref]

Appl. Surf. Sci. (2)

Y. Nakata, N. Miyanaga, and T. Okada, “Effect of pulse width and fluence of femtosecond laser on the size of nanobump array,” Appl. Surf. Sci. 253(15), 6555–6557 (2007).
[Crossref]

A. G. Kovačević, S. Petrović, B. Bokić, B. Gaković, M. T. Bokorov, B. Vasić, R. Gajić, M. Trtica, and B. M. Jelenković, “Surface nanopatterning of Al/Ti multilayer thin films and Al single layer by a low-fluence UV femtosecond laser beam,” Appl. Surf. Sci. 326, 91–98 (2015).
[Crossref]

J. Appl. Phys. (1)

S. Zhu, Y. F. Lu, M. H. Hong, and X. Y. Chen, “Laser ablation of solid substrates in water and ambient air,” J. Appl. Phys. 89(4), 2400–2403 (2001).
[Crossref]

J. Laser Micro Nanoeng. (1)

M. Götze, A. M. Farhan, T. Kürbitz, O. Krimig, S. Henning, A. Heilmann, and G. Hillrichs, “Laser Processing of Dry, Wet and Immersed Polyamide Nanofiber Nonwovens with Different Laser Sources,” J. Laser Micro Nanoeng. 12(3), 286–295 (2017).

JETP Lett. (2)

P. A. Danilov, D. A. Zayarny, A. A. Ionin, S. I. Kudryashov, T. T. H. Nguyen, A. A. Rudenko, I. N. Saraeva, A. A. Kuchmizhak, O. B. Vitrik, and Y. N. Kulchin, “Structure and laser-fabrication mechanisms of microcones on silver films of variable thickness,” JETP Lett. 103(8), 549–552 (2016).
[Crossref]

V. I. Emel’yanov, D. A. Zayarniy, A. A. Ionin, I. V. Kiseleva, S. I. Kudryashov, S. V. Makarov, T. H. T. Nguyen, and A. A. Rudenko, “Nanoscale hydrodynamic instability in a molten thin gold film induced by femtosecond laser ablation,” JETP Lett. 99(9), 518–522 (2014).
[Crossref]

Laser Photonics Rev. (1)

R. Gordon, A. G. Brolo, D. Sinton, and K. L. Kavanagh, “Resonant optical transmission through hole-arrays in metal films: physics and applications,” Laser Photonics Rev. 4(2), 311–335 (2010).
[Crossref]

Nano Lett. (1)

J. Lin, P. Genevet, M. A. Kats, N. Antoniou, and F. Capasso, “Nanostructured Holograms for Broadband Manipulation of Vector Beams,” Nano Lett. 13(9), 4269–4274 (2013).
[Crossref]

Nanoscale Res. Lett. (1)

N. A. Inogamov, V. V. Zhakhovsky, V. A. Khokhlov, Y. V. Petrov, and K. P. Migdal, “Solitary Nanostructures Produced by Ultrashort Laser Pulse,” Nanoscale Res. Lett. 11(1), 177 (2016).
[Crossref]

Opt. Commun. (1)

P. P. Pronko, S. K. Dutta, J. Squier J, V. Rudd, D. Du, and G. Mourou, “Machining of sub-micron holes using a femtosecond laser at 800 nm,” Opt. Commun. 114(1-2), 106–110 (1995).
[Crossref]

Opt. Express (1)

Opt. Lett. (1)

Opt. Quantum Electron. (2)

N. A. Smirnov, S. I. Kudryashov, P. A. Danilov, A. A. Nastulyavichus, A. A. Rudenko, A. A. Ionin, A. A. Kuchmizhak, and O. B. Vitrik, “Femtosecond laser ablation of a thin silver film in air and water,” Opt. Quantum Electron. 52(2), 71 (2020).
[Crossref]

V. V. Shepelev, N. A. Inogamov, and S. V. Fortova, “Thermal and dynamic effects of laser irradiation of thin metal films,” Opt. Quantum Electron. 52(2), 88 (2020).
[Crossref]

Phys. Rev. B (1)

A. Couairon, L. Sudrie, M. Franco, B. Prade, and A. Mysyrowicz, “Filamentation and damage in fused silica induced by tightly focused femtosecond laser pulses,” Phys. Rev. B 71(12), 125435 (2005).
[Crossref]

Quantum Electron. (1)

A. Danilov, D. A. Zayarnyi, A. A. Ionin, S. I. Kudryashov, S. V. Makarov, A. A. Rudenko, V. I. Yurovskikh, Y. N. Kulchin, O. B. Vitrik, A. A. Kuchmizhak, E. A. Drozdova, and S. B. Odinokov, “Mechanisms of formation of sub- and micrometre-scale holes in thin metal films by single nano- and femtosecond laser pulses,” Quantum Electron. 44(6), 540–546 (2014).
[Crossref]

Sci. Rep. (1)

D. Pavlov, S. Syubaev, A. Cherepakhin, A. Sergeev, O. Vitrik, A. Zakharenko, P. Danilov, I. Saraeva, S. Kudryashov, A. Porfirev, and A. Kuchmizhak, “Ultrafast laser printing of self-organized bimetallic nanotextures for multi-wavelength biosensing,” Sci. Rep. 8(1), 1–10 (2018).
[Crossref]

Thin Solid Films (1)

H. Liu, F. Chen, X. Wang, Q. Yang, H. Bian, J. Si, and X. Hou, “Influence of liquid environments on femtosecond laser ablation of silicon,” Thin Solid Films 518(18), 5188–5194 (2010).
[Crossref]

Cited By

OSA participates in Crossref's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Figures (4)

Fig. 1.
Fig. 1. Experimental setup scheme. RA – reflective attenuator; BS – beamsplitter; RM – reflective mirror; AC – autocorrelator; PM – power meter; OB – microscope objective for laser beam focusing; M – optical microscope; CCD – digital CCD camera; MS – motorized stage.

View in Article | Download Full Size | PPT Slide | PDF

Fig. 2.
Fig. 2. SEM images of microholes (at an angle of 30°) on the surface of a silver 50 nm film under single-pulse exposure with NA = 0.25 objective in: (a)-(d) air and (e)–(f) water medium.

View in Article | Download Full Size | PPT Slide | PDF

Fig. 3.
Fig. 3. SEM images of microholes (at an angle of 30°) on the surface of a silver 50 nm film under single-pulse exposure with NA = 0.65 objective in: (a)-(d) air and (e)–(f) water medium.

View in Article | Download Full Size | PPT Slide | PDF

Fig. 4.
Fig. 4. Dependence of the square of the crater radius on the logarithm of the laser pulse energy during ablation in water and air and focusing with micro objectives NA = 0.25 and NA = 0.65.

View in Article | Download Full Size | PPT Slide | PDF

Tables (1)

Tables Icon

Table 1. Threshold energy density and calculation results.

View Table

Metrics