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Strain sensing using electrically conductive structures fabricated by femtosecond-laser-based modification of PDMS

Shuichiro Hayashi, Yasutaka Nakajima, and Mitsuhiro Terakawa

Open Access Open Access

Abstract

Strain sensing was demonstrated by utilizing electrically conductive silicon-carbide (β-SiC) fabricated by femtosecond-laser-based direct modification of polydimethylsiloxane (PDMS). Depending on the laser scanning direction used for the fabrication procedure, the fabricated structures showed different sensitivity to strain and this difference was discussed by observing the surface morphology at various bending radii using scanning electron microscopy (SEM). The change in electrical conductance at the flat state after repeated bending was also investigated. Furthermore, preliminary demonstration of human motion sensing was performed using the fabricated structures. The presented method will open doors to novel electronic device applications using PDMS.

© 2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

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Figures (6)
Fig. 1.
Fig. 1. Schematic of the two 8 mm x 3 mm structures fabricated with different laser scanning directions. (a) S1 was fabricated by scanning in the longitudinal direction (8 mm) and (b) S2 was fabricated by scanning in the transversal direction (3 mm). (c) Schematic of the fabricated structures with gold electrodes on both sides.

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Fig. 2.
Fig. 2. SEM, (a), and cross-sectional SEM, (b) and (c), images of the fabricated structures on a PDMS substrate. (b) Cross-section of the structures when cut perpendicular to the laser scanning direction, and (c) cross-section of the structures when cut parallel to the laser scanning direction. The green double-headed arrow in (a) indicates the laser scanning direction.

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Fig. 3.
Fig. 3. Electrical conductance measurements of the fabricated structures, S1 and S2. (a) I-V curve of the fabricated structures at the flat state. (b) ${\rm{R}}/{\rm{R}}_{0}$ of the fabricated structures for various bending radii.

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Fig. 4.
Fig. 4. SEM images of the surface morphology of the fabricated structures at various bending radii. S1: (a) 134 mm, (b) 83 mm, (c) 38 mm, and (d) 19 mm. S2: (f) 134 mm, (g) 83 mm, (h) 38 mm, and (i) 19 mm. (e)(j) SEM images of the surface when returned to the flat state for S1 and S2, respectively. Cracks can be observed on the surface in (c) and (d), indicated by the red arrows. The green double-headed arrows indicate the laser scanning direction.

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Fig. 5.
Fig. 5. Change in flat-state electrical resistance of the fabricated structures, S1 and S2, with repeated bending (10 cycles) to different bending radii (35 mm, 83 mm, 134 mm).

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Fig. 6.
Fig. 6. LED, connected to the fabricated structures, showing different brightness at various bending radii: (a) Flat state, (b) 159 mm, (c) 83 mm, (d) 38 mm, and (e) 11 mm. Prototype strain sensor using fabricated structures, (f), displaying changes in brightness with applied strain: (g) non-strained state and (h) strained state.

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