Abstract

Highly dense arrays of diamond nanopillars have been fabricated using nanocrystalline diamond films (NCD) as the starting material. The fabrication process consisted of electron beam lithography (EBL), aluminum mask deposition and inductively coupled O2 plasma reactive ion etching. The EBL pattern fidelity was enhanced by proximity corrections and dose variations. Optical characterizations of the arrays indicated the incorporation of silicon-vacancy centers during NCD growth as well as enhanced fluorescence and photoluminescence intensities in the well-developed pillar arrays. Transferring this fabrication method to monocrystalline diamond, such dense arrays of diamond nanopillars could be applied in quantum photonics as emitter arrays or photonic crystals upon integration of color centers.

© 2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

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2019 (2)

J. Heupel, N. Felgen, R. Merz, M. Kopnarski, J. P. Reithmaier, and C. Popov, “Development of a Planarization Process for the Fabrication of Nanocrystalline Diamond Based Photonic Structures,” Phys. Status Solidi A 2019, 1900314 (2019).
[Crossref]

A. E. Rugar, C. Dory, S. Sun, and J. Vuckovic, “Characterization of optical and spin properties of single tin-vacancy centers in diamond nanopillars,” Phys. Rev. B 99(20), 205417 (2019).
[Crossref]

2018 (2)

N. H. Wan, S. Mouradian, and D. Englund, “Two-dimensional photonic crystal slab nanocavities on bulk single-crystal diamond,” Appl. Phys. Lett. 112(14), 141102 (2018).
[Crossref]

J. L. Zhang, S. Sun, M. J. Burek, C. Dory, Y.-K. Tzeng, K. A. Fischer, Y. Kelaita, K. G. Lagoudakis, M. Radulaski, Z.-X. Shen, N. A. Melosh, S. Chu, M. Loncar, and J. Vuckovic, “Strongly Cavity-Enhanced Spontaneous Emission from Silicon-Vacancy Centers in Diamond,” Nano Lett. 18(2), 1360–1365 (2018).
[Crossref]

2017 (5)

L. Ondic, M. Varga, K. Hruska, J. Fait, and P. Kapusta, “Enhanced Extraction of Silicon-Vacancy Centers Light Emission Using Bottom-Up Engineered Polycrystalline Diamond Photonic Crystal Slabs,” ACS Nano 11(3), 2972–2981 (2017).
[Crossref]

J. L. Pacheco, M. Singh, D. L. Perry, J. R. Wendt, G. Ten Eyck, R. P. Manginell, T. Pluym, D. R. Luhman, M. P. Lilly, M. S. Carroll, and E. Bielejec, “Ion implantation for deterministic single atom devices,” Rev. Sci. Instrum. 88(12), 123301 (2017).
[Crossref]

J. M. Binder, A. Stark, N. Tomek, J. Scheuer, F. Frank, K. D. Jahnke, C. Müller, S. Schmitt, M. H. Metsch, T. Unden, T. Gehring, A. Huck, U. L. Andersen, L. J. Rogers, and F. Jelezko, “Qudi: A modular python suite for experiment control and data processing,” SoftwareX  6, 85–90 (2017).
[Crossref]

T. Schröder, M. Walsh, J. Zheng, S. Mouradian, L. Li, G. Malladi, H. Bakhru, M. Lu, A. Stein, M. Heuck, and D. Englund, “Scalable fabrication of coupled NV center - photonic crystal cavity systems by self-aligned N ion implantation,” Opt. Mater. Express 7(5), 1514–1524 (2017).
[Crossref]

J. L. Zhang, K. G. Lagoudakis, Y.-K. Tzeng, C. Dory, M. Radulaski, Y. Kelaita, K. A. Fischer, S. Sun, Z.-X. Shen, N. A. Melosh, S. Chu, and J. Vuckovic, “Complete coherent control of silicon vacancies in diamond nanopillars containing single defect centers,” Optica 4(11), 1317–1321 (2017).
[Crossref]

2016 (2)

N. Felgen, B. Naydenov, S. Turner, F. Jelezko, J. P. Reithmaier, and C. Popov, “Incorporation and study of SiV centers in diamond nanopillars,” Diamond Relat. Mater. 64, 64–69 (2016).
[Crossref]

R. E. Evans, A. Sipahigil, D. D. Sukachev, A. S. Zibrov, and M. D. Lukin, “Narrow-Linewidth Homogeneous Optical Emitters in Diamond Nanostructures via Silicon Ion Implantation,” Phys. Rev. Appl. 5(4), 044010 (2016).
[Crossref]

2015 (4)

V. Sedov, V. Ralchenko, A. A. Khomich, I. Vlasov, A. Vul, S. Savin, A. Goryachev, and V. Konov, “Si-doped nano- and microcrystalline diamond films with controlled bright photoluminescence of silicon-vacancy color centers,” Diamond Relat. Mater. 56, 23–28 (2015).
[Crossref]

B. Khanaliloo, M. Mitchell, A. C. Hryciw, and P. E. Barclay, “High-Q/V Monolithic Diamond Microdisks Fabricated with Quasi-isotropic Etching,” Nano Lett. 15(8), 5131–5136 (2015).
[Crossref]

S. Cui, X. Zhang, T. Liu, J. Lee, D. Bracher, K. Ohno, D. Awschalom, and E. L. Hu, “Hybrid Plasmonic Photonic Crystal Cavity for Enhancing Emission from near-Surface Nitrogen Vacancy Centers in Diamond,” ACS Photonics 2(4), 465–469 (2015).
[Crossref]

C. J. Widmann, C. Giese, M. Wolfer, D. Brink, N. Heidrich, and C. E. Nebel, “Fabrication and characterization of single crystalline diamond nanopillars with NV-centers,” Diamond Relat. Mater. 54, 2–8 (2015).
[Crossref]

2013 (3)

J. Evtimova, W. Kulisch, C. Petkov, E. Petkov, F. Schnabel, J. P. Reithmaier, and C. Popov, “Reactive ion etching of nanocrystalline diamond for the fabrication of one-dimensional nanopillars,” Diamond Relat. Mater. 36, 58–63 (2013).
[Crossref]

V. Acosta and P. Hemmer, “Nitrogen-vacancy centers: Physics and applications,” MRS Bull. 38(2), 127–130 (2013).
[Crossref]

E. Petkov, T. Rendler, C. Petkov, F. Schnabel, J. P. Reithmaier, J. Wrachtrup, C. Popov, and W. Kulisch, “Investigation of NV centers in nano- and ultrananocrystalline diamond pillars,” Phys. Status Solidi A 210(10), 2066–2073 (2013).
[Crossref]

2012 (5)

K. Ohno, F. J. Heremans, L. C. Bassett, B. A. Myers, D. M. Toyli, A. C. Bleszynski Jayich, C. J. Palmstrom, and D. D. Awschalom, “Engineering shallow spins in diamond with nitrogen delta-doping,” Appl. Phys. Lett. 101(8), 082413 (2012).
[Crossref]

X. Checoury, D. Néel, P. Boucaud, C. Gesset, H. Girard, S. Saada, and P. Bergonzo, “Nanocrystalline diamond photonics platform with high quality factor photonic crystal cavities,” Appl. Phys. Lett. 101(17), 171115 (2012).
[Crossref]

W. Kulisch, C. Petkov, E. Petkov, C. Popov, P. N. Gibson, M. Veres, R. Merz, B. Merz, and J. P. Reithmaier, “Low temperature growth of nanocrystalline and ultrananocrystalline diamond films: A comparison,” Phys. Status Solidi A 209(9), 1664–1674 (2012).
[Crossref]

A. Faraon, C. Santori, Z. Huang, V. M. Acosta, and R. G. Beausoleil, “Coupling of Nitrogen-Vacancy Centers to Photonic Crystal Cavities in Monocrystalline Diamond,” Phys. Rev. Lett. 109(3), 033604 (2012).
[Crossref]

J. Riedrich-Möller, L. Kipfstuhl, C. Hepp, E. Neu, C. Pauly, F. Mücklich, A. Baur, M. Wandt, S. Wolff, M. Fischer, S. Gsell, M. Schreck, and C. Becher, “One- and two-dimensional photonic crystal microcavities in single crystal diamond,” Nat. Nanotechnol. 7(1), 69–74 (2012).
[Crossref]

2011 (4)

I. Aharonovich, S. Castelletto, D. A. Simpson, C.-H. Su, A. D. Greentree, and S. Prawer, “Diamond-based single-photon emitters,” Rep. Prog. Phys. 74(7), 076501 (2011).
[Crossref]

W. Kulisch, C. Popov, T. Sasaki, L. Sirghi, H. Rauscher, F. Rossi, and J. P. Reithmaier, “On the development of the morphology of ultrananocrystalline diamond films,” Phys. Status Solidi A 208(1), 70–80 (2011).
[Crossref]

A. Faraon, P. E. Barclay, C. Santori, K. M. C. Fu, and R. G. Beausoleil, “Resonant enhancement of the zero-phonon emission from a colour centre in a diamond cavity,” Nat. Photonics 5(5), 301–305 (2011).
[Crossref]

I. Bayn, B. Meyler, A. Lahav, J. Salzman, R. Kalish, B. A. Fairchild, S. Prawer, M. Barth, O. Benson, T. Wolf, P. Siyushev, F. Jelezko, and J. Wrachtrup, “Processing of photonic crystal nanocavity for quantum information in diamond,” Diamond Relat. Mater. 20(7), 937–943 (2011).
[Crossref]

2010 (3)

B. Naydenov, V. Richter, J. Beck, M. Steiner, P. Neumann, G. Balasubramanian, J. Achard, F. Jelezko, J. Wrachtrup, and R. Kalish, “Enhanced generation of single optically active spins in diamond by ion implantation,” Appl. Phys. Lett. 96(16), 163108 (2010).
[Crossref]

M. Rabarot, J. Widiez, S. Saada, J.-P. Mazellier, C. Lecouvey, J.-C. Roussin, J. Dechamp, P. Bergonzo, F. Andrieu, O. Faynot, S. Deleonibus, L. Clavelier, and J. P. Roger, “Silicon-On-Diamond layer integration by wafer bonding technology,” Diamond Relat. Mater. 19(7-9), 796–805 (2010).
[Crossref]

B. J. M. Hausmann, M. Khan, Y. Zhang, T. M. Babinec, K. Martinick, M. McCutcheon, P. R. Hemmer, and M. Loncar, “Fabrication of diamond nanowires for quantum information processing applications,” Diamond Relat. Mater. 19(5-6), 621–629 (2010).
[Crossref]

2009 (3)

G. Balasubramanian, P. Neumann, D. Twitchen, M. Markham, R. Kolesov, N. Mizuochi, J. Isoya, J. Achard, J. Beck, J. Tissler, V. Jacques, P. R. Hemmer, F. Jelezko, and J. Wrachtrup, “Ultralong spin coherence time in isotopically engineered diamond,” Nat. Mater. 8(5), 383–387 (2009).
[Crossref]

C.-H. Su, A. D. Greentree, and L. C. L. Hollenberg, “High-performance diamond-based single-photon sources for quantum communication,” Phys. Rev. A 80(5), 052308 (2009).
[Crossref]

I. Aharonovich, C. Santori, B. A. Fairchild, J. Orwa, K. Ganesan, K.-M. C. Fu, R. G. Beausoleil, A. D. Greentree, and S. Prawer, “Producing optimized ensembles of nitrogen-vacancy color centers for quantum information applications,” J. Appl. Phys. 106(12), 124904 (2009).
[Crossref]

2007 (4)

J. R. Rabeau, A. Stacey, A. Rabeau, S. Prawer, F. Jelezko, I. Mirza, and J. Wrachtrup, “Single nitrogen vacancy centers in chemical vapor deposited diamond nanocrystals,” Nano Lett. 7(11), 3433–3437 (2007).
[Crossref]

A. A. Bukach and S. Y. Kilin, “Quantum repeater based on NV + 13C color centers in diamond,” Opt. Spectrosc. 103(2), 202–209 (2007).
[Crossref]

M. V. Dutt, L. Childress, L. Jiang, E. Togan, J. Maze, F. Jelezko, A. S. Zibrov, P. R. Hemmer, and M. D. Lukin, “Quantum Register Based on Individual Electronic and Nuclear Spin Qubits in Diamond,” Science 316(5829), 1312–1316 (2007).
[Crossref]

C. F. Wang, R. Hanson, D. D. Awschalom, E. L. Hu, T. Feygelson, J. Yang, and J. E. Butler, “Fabrication and characterization of two-dimensional photonic crystal microcavities in nanocrystalline diamond,” Appl. Phys. Lett. 91(20), 201112 (2007).
[Crossref]

2006 (1)

J. Meijer, T. Vogel, B. Burchard, I. W. Rangelow, L. Bischoff, J. Wrachtrup, M. Domhan, F. Jelezko, W. Schnitzler, S. A. Schulz, K. Singer, and F. Schmidt-Kaler, “Concept of deterministic single ion doping with sub-nm spatial resolution,” Appl. Phys. A 83(2), 321–327 (2006).
[Crossref]

1994 (1)

H. Sternschulte, K. Thonke, R. Sauer, P. C. Münzinger, and P. Michler, “1.681-eV luminescence center in chemical-vapor-deposited homoepitaxial diamond films,” Phys. Rev. B 50(19), 14554–14560 (1994).
[Crossref]

Achard, J.

B. Naydenov, V. Richter, J. Beck, M. Steiner, P. Neumann, G. Balasubramanian, J. Achard, F. Jelezko, J. Wrachtrup, and R. Kalish, “Enhanced generation of single optically active spins in diamond by ion implantation,” Appl. Phys. Lett. 96(16), 163108 (2010).
[Crossref]

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V. Sedov, V. Ralchenko, A. A. Khomich, I. Vlasov, A. Vul, S. Savin, A. Goryachev, and V. Konov, “Si-doped nano- and microcrystalline diamond films with controlled bright photoluminescence of silicon-vacancy color centers,” Diamond Relat. Mater. 56, 23–28 (2015).
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E. Petkov, T. Rendler, C. Petkov, F. Schnabel, J. P. Reithmaier, J. Wrachtrup, C. Popov, and W. Kulisch, “Investigation of NV centers in nano- and ultrananocrystalline diamond pillars,” Phys. Status Solidi A 210(10), 2066–2073 (2013).
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J. L. Zhang, S. Sun, M. J. Burek, C. Dory, Y.-K. Tzeng, K. A. Fischer, Y. Kelaita, K. G. Lagoudakis, M. Radulaski, Z.-X. Shen, N. A. Melosh, S. Chu, M. Loncar, and J. Vuckovic, “Strongly Cavity-Enhanced Spontaneous Emission from Silicon-Vacancy Centers in Diamond,” Nano Lett. 18(2), 1360–1365 (2018).
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Manginell, R. P.

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G. Balasubramanian, P. Neumann, D. Twitchen, M. Markham, R. Kolesov, N. Mizuochi, J. Isoya, J. Achard, J. Beck, J. Tissler, V. Jacques, P. R. Hemmer, F. Jelezko, and J. Wrachtrup, “Ultralong spin coherence time in isotopically engineered diamond,” Nat. Mater. 8(5), 383–387 (2009).
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B. J. M. Hausmann, M. Khan, Y. Zhang, T. M. Babinec, K. Martinick, M. McCutcheon, P. R. Hemmer, and M. Loncar, “Fabrication of diamond nanowires for quantum information processing applications,” Diamond Relat. Mater. 19(5-6), 621–629 (2010).
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Maze, J.

M. V. Dutt, L. Childress, L. Jiang, E. Togan, J. Maze, F. Jelezko, A. S. Zibrov, P. R. Hemmer, and M. D. Lukin, “Quantum Register Based on Individual Electronic and Nuclear Spin Qubits in Diamond,” Science 316(5829), 1312–1316 (2007).
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W. Kulisch, C. Popov, T. Sasaki, L. Sirghi, H. Rauscher, F. Rossi, and J. P. Reithmaier, “On the development of the morphology of ultrananocrystalline diamond films,” Phys. Status Solidi A 208(1), 70–80 (2011).
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J. Heupel, N. Felgen, R. Merz, M. Kopnarski, J. P. Reithmaier, and C. Popov, “Development of a Planarization Process for the Fabrication of Nanocrystalline Diamond Based Photonic Structures,” Phys. Status Solidi A 2019, 1900314 (2019).
[Crossref]

N. Felgen, B. Naydenov, S. Turner, F. Jelezko, J. P. Reithmaier, and C. Popov, “Incorporation and study of SiV centers in diamond nanopillars,” Diamond Relat. Mater. 64, 64–69 (2016).
[Crossref]

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[Crossref]

J. Evtimova, W. Kulisch, C. Petkov, E. Petkov, F. Schnabel, J. P. Reithmaier, and C. Popov, “Reactive ion etching of nanocrystalline diamond for the fabrication of one-dimensional nanopillars,” Diamond Relat. Mater. 36, 58–63 (2013).
[Crossref]

W. Kulisch, C. Petkov, E. Petkov, C. Popov, P. N. Gibson, M. Veres, R. Merz, B. Merz, and J. P. Reithmaier, “Low temperature growth of nanocrystalline and ultrananocrystalline diamond films: A comparison,” Phys. Status Solidi A 209(9), 1664–1674 (2012).
[Crossref]

W. Kulisch, C. Popov, T. Sasaki, L. Sirghi, H. Rauscher, F. Rossi, and J. P. Reithmaier, “On the development of the morphology of ultrananocrystalline diamond films,” Phys. Status Solidi A 208(1), 70–80 (2011).
[Crossref]

A. Schmidt, J. Bernardoff, K. Singer, J. P. Reithmaier, and C. Popov, “Fabrication of Nanopillars on Nanocrystalline Diamond Membranes for the Incorporation of Color Centers,” Phys. Status Solidi A1900233 (2019).
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E. Petkov, T. Rendler, C. Petkov, F. Schnabel, J. P. Reithmaier, J. Wrachtrup, C. Popov, and W. Kulisch, “Investigation of NV centers in nano- and ultrananocrystalline diamond pillars,” Phys. Status Solidi A 210(10), 2066–2073 (2013).
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B. Naydenov, V. Richter, J. Beck, M. Steiner, P. Neumann, G. Balasubramanian, J. Achard, F. Jelezko, J. Wrachtrup, and R. Kalish, “Enhanced generation of single optically active spins in diamond by ion implantation,” Appl. Phys. Lett. 96(16), 163108 (2010).
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M. Rabarot, J. Widiez, S. Saada, J.-P. Mazellier, C. Lecouvey, J.-C. Roussin, J. Dechamp, P. Bergonzo, F. Andrieu, O. Faynot, S. Deleonibus, L. Clavelier, and J. P. Roger, “Silicon-On-Diamond layer integration by wafer bonding technology,” Diamond Relat. Mater. 19(7-9), 796–805 (2010).
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J. M. Binder, A. Stark, N. Tomek, J. Scheuer, F. Frank, K. D. Jahnke, C. Müller, S. Schmitt, M. H. Metsch, T. Unden, T. Gehring, A. Huck, U. L. Andersen, L. J. Rogers, and F. Jelezko, “Qudi: A modular python suite for experiment control and data processing,” SoftwareX  6, 85–90 (2017).
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W. Kulisch, C. Popov, T. Sasaki, L. Sirghi, H. Rauscher, F. Rossi, and J. P. Reithmaier, “On the development of the morphology of ultrananocrystalline diamond films,” Phys. Status Solidi A 208(1), 70–80 (2011).
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M. Rabarot, J. Widiez, S. Saada, J.-P. Mazellier, C. Lecouvey, J.-C. Roussin, J. Dechamp, P. Bergonzo, F. Andrieu, O. Faynot, S. Deleonibus, L. Clavelier, and J. P. Roger, “Silicon-On-Diamond layer integration by wafer bonding technology,” Diamond Relat. Mater. 19(7-9), 796–805 (2010).
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M. Rabarot, J. Widiez, S. Saada, J.-P. Mazellier, C. Lecouvey, J.-C. Roussin, J. Dechamp, P. Bergonzo, F. Andrieu, O. Faynot, S. Deleonibus, L. Clavelier, and J. P. Roger, “Silicon-On-Diamond layer integration by wafer bonding technology,” Diamond Relat. Mater. 19(7-9), 796–805 (2010).
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G. Jacob, K. Groot-Berning, S. Wolf, S. Ulm, L. Couturier, U. G. Poschinger, F. Schmidt-Kaler, and K. Singer, “Single particle microscopy with nanometer resolution,” arXiv:1405.6480 [physics.atom-ph] (2014).

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J. Meijer, T. Vogel, B. Burchard, I. W. Rangelow, L. Bischoff, J. Wrachtrup, M. Domhan, F. Jelezko, W. Schnitzler, S. A. Schulz, K. Singer, and F. Schmidt-Kaler, “Concept of deterministic single ion doping with sub-nm spatial resolution,” Appl. Phys. A 83(2), 321–327 (2006).
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V. Sedov, V. Ralchenko, A. A. Khomich, I. Vlasov, A. Vul, S. Savin, A. Goryachev, and V. Konov, “Si-doped nano- and microcrystalline diamond films with controlled bright photoluminescence of silicon-vacancy color centers,” Diamond Relat. Mater. 56, 23–28 (2015).
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G. Jacob, K. Groot-Berning, S. Wolf, S. Ulm, L. Couturier, U. G. Poschinger, F. Schmidt-Kaler, and K. Singer, “Single particle microscopy with nanometer resolution,” arXiv:1405.6480 [physics.atom-ph] (2014).

K. Groot-Berning, T. Kornher, G. Jacob, F. Stopp, S. T. Dawkins, R. Kolesov, J. Wrachtrup, K. Singer, and F. Schmidt-Kaler, “Deterministic single ion implantation of rare-earth ions for nanometer resolution colour center generation,” arXiv:1902.05308 [quant-ph] (2019).

A. Schmidt, J. Bernardoff, K. Singer, J. P. Reithmaier, and C. Popov, “Fabrication of Nanopillars on Nanocrystalline Diamond Membranes for the Incorporation of Color Centers,” Phys. Status Solidi A1900233 (2019).
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I. Aharonovich, S. Castelletto, D. A. Simpson, C.-H. Su, A. D. Greentree, and S. Prawer, “Diamond-based single-photon emitters,” Rep. Prog. Phys. 74(7), 076501 (2011).
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G. Jacob, K. Groot-Berning, S. Wolf, S. Ulm, L. Couturier, U. G. Poschinger, F. Schmidt-Kaler, and K. Singer, “Single particle microscopy with nanometer resolution,” arXiv:1405.6480 [physics.atom-ph] (2014).

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J. M. Binder, A. Stark, N. Tomek, J. Scheuer, F. Frank, K. D. Jahnke, C. Müller, S. Schmitt, M. H. Metsch, T. Unden, T. Gehring, A. Huck, U. L. Andersen, L. J. Rogers, and F. Jelezko, “Qudi: A modular python suite for experiment control and data processing,” SoftwareX  6, 85–90 (2017).
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J. Meijer, T. Vogel, B. Burchard, I. W. Rangelow, L. Bischoff, J. Wrachtrup, M. Domhan, F. Jelezko, W. Schnitzler, S. A. Schulz, K. Singer, and F. Schmidt-Kaler, “Concept of deterministic single ion doping with sub-nm spatial resolution,” Appl. Phys. A 83(2), 321–327 (2006).
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A. E. Rugar, C. Dory, S. Sun, and J. Vuckovic, “Characterization of optical and spin properties of single tin-vacancy centers in diamond nanopillars,” Phys. Rev. B 99(20), 205417 (2019).
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J. L. Zhang, K. G. Lagoudakis, Y.-K. Tzeng, C. Dory, M. Radulaski, Y. Kelaita, K. A. Fischer, S. Sun, Z.-X. Shen, N. A. Melosh, S. Chu, and J. Vuckovic, “Complete coherent control of silicon vacancies in diamond nanopillars containing single defect centers,” Optica 4(11), 1317–1321 (2017).
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V. Sedov, V. Ralchenko, A. A. Khomich, I. Vlasov, A. Vul, S. Savin, A. Goryachev, and V. Konov, “Si-doped nano- and microcrystalline diamond films with controlled bright photoluminescence of silicon-vacancy color centers,” Diamond Relat. Mater. 56, 23–28 (2015).
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Wolf, T.

I. Bayn, B. Meyler, A. Lahav, J. Salzman, R. Kalish, B. A. Fairchild, S. Prawer, M. Barth, O. Benson, T. Wolf, P. Siyushev, F. Jelezko, and J. Wrachtrup, “Processing of photonic crystal nanocavity for quantum information in diamond,” Diamond Relat. Mater. 20(7), 937–943 (2011).
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J. Riedrich-Möller, L. Kipfstuhl, C. Hepp, E. Neu, C. Pauly, F. Mücklich, A. Baur, M. Wandt, S. Wolff, M. Fischer, S. Gsell, M. Schreck, and C. Becher, “One- and two-dimensional photonic crystal microcavities in single crystal diamond,” Nat. Nanotechnol. 7(1), 69–74 (2012).
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E. Petkov, T. Rendler, C. Petkov, F. Schnabel, J. P. Reithmaier, J. Wrachtrup, C. Popov, and W. Kulisch, “Investigation of NV centers in nano- and ultrananocrystalline diamond pillars,” Phys. Status Solidi A 210(10), 2066–2073 (2013).
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I. Bayn, B. Meyler, A. Lahav, J. Salzman, R. Kalish, B. A. Fairchild, S. Prawer, M. Barth, O. Benson, T. Wolf, P. Siyushev, F. Jelezko, and J. Wrachtrup, “Processing of photonic crystal nanocavity for quantum information in diamond,” Diamond Relat. Mater. 20(7), 937–943 (2011).
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B. Naydenov, V. Richter, J. Beck, M. Steiner, P. Neumann, G. Balasubramanian, J. Achard, F. Jelezko, J. Wrachtrup, and R. Kalish, “Enhanced generation of single optically active spins in diamond by ion implantation,” Appl. Phys. Lett. 96(16), 163108 (2010).
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G. Balasubramanian, P. Neumann, D. Twitchen, M. Markham, R. Kolesov, N. Mizuochi, J. Isoya, J. Achard, J. Beck, J. Tissler, V. Jacques, P. R. Hemmer, F. Jelezko, and J. Wrachtrup, “Ultralong spin coherence time in isotopically engineered diamond,” Nat. Mater. 8(5), 383–387 (2009).
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J. R. Rabeau, A. Stacey, A. Rabeau, S. Prawer, F. Jelezko, I. Mirza, and J. Wrachtrup, “Single nitrogen vacancy centers in chemical vapor deposited diamond nanocrystals,” Nano Lett. 7(11), 3433–3437 (2007).
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J. Meijer, T. Vogel, B. Burchard, I. W. Rangelow, L. Bischoff, J. Wrachtrup, M. Domhan, F. Jelezko, W. Schnitzler, S. A. Schulz, K. Singer, and F. Schmidt-Kaler, “Concept of deterministic single ion doping with sub-nm spatial resolution,” Appl. Phys. A 83(2), 321–327 (2006).
[Crossref]

K. Groot-Berning, T. Kornher, G. Jacob, F. Stopp, S. T. Dawkins, R. Kolesov, J. Wrachtrup, K. Singer, and F. Schmidt-Kaler, “Deterministic single ion implantation of rare-earth ions for nanometer resolution colour center generation,” arXiv:1902.05308 [quant-ph] (2019).

Yang, J.

C. F. Wang, R. Hanson, D. D. Awschalom, E. L. Hu, T. Feygelson, J. Yang, and J. E. Butler, “Fabrication and characterization of two-dimensional photonic crystal microcavities in nanocrystalline diamond,” Appl. Phys. Lett. 91(20), 201112 (2007).
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Figures (5)

Fig. 1.
Fig. 1. Characterization of the as-grown NCD films: (a) SEM image, (b) XRD pattern, (c) Raman spectrum, (d) XPS C 1s spectrum and (e) SIMS depth profile.
Fig. 2.
Fig. 2. SEM images of NCD pillar arrays with nominal diameters of 50 nm (a, b) and 100 nm (c) with a period of 150 nm (a), 250 nm (b) and 200 nm (c). The first row (a-c) shows an overview of the whole array from a 65° angle, whereas the second row (d-f) shows a magnification of the center of the array from a topview.
Fig. 3.
Fig. 3. Typical SEM micrographs depicting the merge of the nanopillars in the center of the array without proximity corrections (a) and with corrective means (b). Exemplary overview of the relative electron dose distribution within the array from the proximity correction software (c). Scale bars indicate 1 µm. For colors please see online version.
Fig. 4.
Fig. 4. Exemplary SEM micrographs of typical hard mask shapes before reactive ion etching: (a) an array for pillars with nominal diameters of 50 nm and a period of 200 nm, (b) an array for pillars with nominal diameters of 50 nm and a period of 250 nm. Scale bars indicate 500 nm.
Fig. 5.
Fig. 5. Confocal images showing the fluorescence of an array of 200 nm pillars and a period of 400 nm with completely resolved diamond nanopillars after proximity correction (a) and with unstructured center without proximity correction (b), and the corresponding room temperature PL spectra (c) of the arrays of diamond nanopillars.

Tables (1)

Tables Icon

Table 1. Overview of the nominal written and measured dimensions of the NCD nanopillar arrays.