Abstract

Some infrared-active phonons in VO2 films suppress their modulation performance in the infrared region. Al-doped VO2 films, due to transforming VO2 crystal into the M2 phase, promptly eliminate absorption peaks in far-IR/THz bands and present widely modulating properties. Furthermore, we found high-frequency shifts of phonon vibration modes in Raman spectra by Al doping, indicating the stronger V-O bonds as the evidence of VO2 crystalline modification. However, although the high-frequency shifts and peak broadening were observed in V-O-V bending modes, mid-infrared spectra as the other phonon characterization show that its resonances are less involved, which is different from the remarkable variation of THz phonons. We attribute the difference to the distinct origins of phonon vibrations. As Al doped into films, the group-rotational peaks were rapidly erased with crystalline deformation whereas the high-frequency bending modes only slightly changed.

© 2016 Optical Society of America

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    [Crossref]
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    [Crossref]
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    [Crossref]
  4. M. Liu, H. Y. Hwang, H. Tao, A. C. Strikwerda, K. Fan, G. R. Keiser, A. J. Sternbach, K. G. West, S. Kittiwatanakul, J. Lu, S. A. Wolf, F. G. Omenetto, X. Zhang, K. A. Nelson, and R. D. Averitt, “Terahertz-field-induced insulator-to-metal transition in vanadium dioxide metamaterial,” Nature 487(7407), 345–348 (2012).
    [Crossref] [PubMed]
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    [Crossref]
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    [Crossref]
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    [Crossref]
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    [Crossref]
  16. T. D. Manning, I. P. Parkin, R. J. H. Clark, D. Sheel, M. E. Pemble, and D. Vernadou, “Intelligent window coatings: atmospheric pressure chemical vapour deposition of vanadium oxides,” J. Mater. Chem. 12(10), 2936–2939 (2002).
    [Crossref]
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    [Crossref] [PubMed]
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    [Crossref]
  19. J. M. Atkin, S. Berweger, E. K. Chavez, M. B. Raschke, J. Cao, W. Fan, and J. Wu, “Strain and temperature dependence of the insulating phases of VO2 near the metal-insulator transition,” Phys. Rev. B 85(2), 020101 (2012).
    [Crossref]
  20. Y. Ji, Y. Zhang, M. Gao, Z. Yuan, Y. Xia, C. Jin, B. Tao, C. Chen, Q. Jia, and Y. Lin, “Role of microstructures on the M1-M2 phase transition in epitaxial VO2 thin films,” Sci. Rep. 4, 4854 (2014).
    [Crossref] [PubMed]
  21. T. D. Manning, I. P. Parkin, M. E. Pemble, D. Sheel, and D. Vernardou, “Intelligent window coatings: Atmospheric pressure chemical vapor deposition of tungsten-doped vanadium dioxide,” Chem. Mater. 16(4), 744–749 (2004).
    [Crossref]
  22. C. Kübler, H. Ehrke, R. Huber, R. Lopez, A. Halabica, R. F. Haglund, and A. Leitenstorfer, “Coherent structural dynamics and electronic correlations during an ultrafast insulator-to-metal phase transition in VO2.,” Phys. Rev. Lett. 99(11), 116401 (2007).
    [Crossref] [PubMed]
  23. E. Strelcov, A. Tselev, I. Ivanov, J. D. Budai, J. Zhang, J. Z. Tischler, I. Kravchenko, S. V. Kalinin, and A. Kolmakov, “Doping-based stabilization of the M2 phase in free-standing VO2 nanostructures at room temperature,” Nano Lett. 12(12), 6198–6205 (2012).
    [Crossref] [PubMed]

2016 (2)

J. Rensberg, S. Zhang, Y. Zhou, A. S. McLeod, C. Schwarz, M. Goldflam, M. Liu, J. Kerbusch, R. Nawrodt, S. Ramanathan, D. N. Basov, F. Capasso, C. Ronning, and M. A. Kats, “Active optical metasurfaces based on defect-engineered phase-transition materials,” Nano Lett. 16(2), 1050–1055 (2016).
[Crossref] [PubMed]

X. Wu, Z. Wu, C. Ji, H. Zhang, Y. Su, Z. Huang, J. Gou, X. Wei, J. Wang, and Y. Jiang, “THz transmittance and electrical properties tuning across IMT in vanadium dioxide films by Al Doping,” ACS Appl. Mater. Interfaces 8(18), 11842–11850 (2016).
[Crossref] [PubMed]

2015 (1)

H. Zhang, Z. Wu, R. Niu, X. Wu, Q. he, and Y. Jiang, “Metal–insulator transition properties of sputtered silicon-doped and un-doped vanadium dioxide films at terahertz range,” Appl. Surf. Sci. 331, 92–97 (2015).
[Crossref]

2014 (1)

Y. Ji, Y. Zhang, M. Gao, Z. Yuan, Y. Xia, C. Jin, B. Tao, C. Chen, Q. Jia, and Y. Lin, “Role of microstructures on the M1-M2 phase transition in epitaxial VO2 thin films,” Sci. Rep. 4, 4854 (2014).
[Crossref] [PubMed]

2013 (1)

T. J. Huffman, P. Xu, M. M. Qazilbash, E. J. Walter, H. Krakauer, J. Wei, D. H. Cobden, H. A. Bechtel, M. C. Martin, G. L. Carr, and D. N. Basov, “Anisotropic infrared response of vanadium dioxide microcrystals,” Phys. Rev. B 87(11), 115121 (2013).
[Crossref]

2012 (5)

Y. Zhou and S. Ramanathan, “Heteroepitaxial VO2 thin films on GaN: Structure and metal-insulator transition characteristics,” J. Appl. Phys. 112(7), 074114 (2012).
[Crossref]

Y. Xu, W. Huang, Q. Shi, Y. Zhang, Y. Zhang, L. Song, and Y. Zhang, “Effects of porous nano-structure on the metal–insulator transition in VO2 films,” Appl. Surf. Sci. 259, 256–260 (2012).
[Crossref]

J. M. Atkin, S. Berweger, E. K. Chavez, M. B. Raschke, J. Cao, W. Fan, and J. Wu, “Strain and temperature dependence of the insulating phases of VO2 near the metal-insulator transition,” Phys. Rev. B 85(2), 020101 (2012).
[Crossref]

M. Liu, H. Y. Hwang, H. Tao, A. C. Strikwerda, K. Fan, G. R. Keiser, A. J. Sternbach, K. G. West, S. Kittiwatanakul, J. Lu, S. A. Wolf, F. G. Omenetto, X. Zhang, K. A. Nelson, and R. D. Averitt, “Terahertz-field-induced insulator-to-metal transition in vanadium dioxide metamaterial,” Nature 487(7407), 345–348 (2012).
[Crossref] [PubMed]

E. Strelcov, A. Tselev, I. Ivanov, J. D. Budai, J. Zhang, J. Z. Tischler, I. Kravchenko, S. V. Kalinin, and A. Kolmakov, “Doping-based stabilization of the M2 phase in free-standing VO2 nanostructures at room temperature,” Nano Lett. 12(12), 6198–6205 (2012).
[Crossref] [PubMed]

2010 (1)

L. T. Kang, Y. F. Gao, Z. T. Zhang, J. Du, C. X. Cao, Z. Chen, and H. J. Luo, “Effects of Annealing Parameters on Optical Properties of Thermochromic VO2 Films Prepared in Aqueous Solution,” J. Phys. Chem. C 114(4), 1901–1911 (2010).
[Crossref]

2009 (1)

2008 (2)

T. Driscoll, S. Palit, M. M. Qazilbash, M. Brehm, F. Keilmann, B.-G. Chae, S.-J. Yun, H.-T. Kim, S. Y. Cho, N. M. Jokerst, D. R. Smith, and D. N. Basov, “Dynamic tuning of an infrared hybrid-metamaterial resonance using vanadium dioxide,” Appl. Phys. Lett. 93(2), 024101 (2008).
[Crossref]

C. Chen, R. Wang, L. Shang, and C. Guo, “Gate-field-induced phase transitions in VO2: Monoclinic metal phase separation and switchable infrared reflections,” Appl. Phys. Lett. 93(17), 171101 (2008).
[Crossref]

2007 (1)

C. Kübler, H. Ehrke, R. Huber, R. Lopez, A. Halabica, R. F. Haglund, and A. Leitenstorfer, “Coherent structural dynamics and electronic correlations during an ultrafast insulator-to-metal phase transition in VO2.,” Phys. Rev. Lett. 99(11), 116401 (2007).
[Crossref] [PubMed]

2005 (1)

H.-T. Kim, B.-G. Chae, D.-H. Youn, G. Kim, K.-Y. Kang, S.-J. Lee, K. Kim, and Y.-S. Lim, “Raman study of electric-field-induced first-order metal-insulator transition in VO2-based devices,” Appl. Phys. Lett. 86(24), 242101 (2005).
[Crossref]

2004 (1)

T. D. Manning, I. P. Parkin, M. E. Pemble, D. Sheel, and D. Vernardou, “Intelligent window coatings: Atmospheric pressure chemical vapor deposition of tungsten-doped vanadium dioxide,” Chem. Mater. 16(4), 744–749 (2004).
[Crossref]

2002 (1)

T. D. Manning, I. P. Parkin, R. J. H. Clark, D. Sheel, M. E. Pemble, and D. Vernadou, “Intelligent window coatings: atmospheric pressure chemical vapour deposition of vanadium oxides,” J. Mater. Chem. 12(10), 2936–2939 (2002).
[Crossref]

1994 (1)

M. F. Becker, A. B. Buckman, R. M. Walser, T. Lépine, P. Georges, and A. Brun, “Femtosecond laser excitation of the semiconductor-metal phase transition in VO2,” Appl. Phys. Lett. 65(12), 1507 (1994).
[Crossref]

1990 (1)

J. C. Parker, “Raman scattering from VO2 single crystals: A study of the effects of surface oxidation,” Phys. Rev. B Condens. Matter 42(5), 3164–3166 (1990).
[Crossref] [PubMed]

1977 (1)

M. Ghedira, H. Vincent, M. Marezio, and J. C. Launay, “Structural aspects of the metal-insulator transitions in V0.985Al0.015O2,” J. Solid State Chem. 22(4), 423–438 (1977).
[Crossref]

1966 (1)

A. S. Barker, H. W. Verleur, and H. J. Guggenheim, “Infrared Optical properties of vanadium dioxide above and below the transition temperature,” Phys. Rev. Lett. 17(26), 1286–1289 (1966).
[Crossref]

1959 (1)

F. Morin, “Oxides which show a metal-to-insulator transition at the Neel temperature,” Phys. Rev. Lett. 3(1), 34–36 (1959).
[Crossref]

Atkin, J. M.

J. M. Atkin, S. Berweger, E. K. Chavez, M. B. Raschke, J. Cao, W. Fan, and J. Wu, “Strain and temperature dependence of the insulating phases of VO2 near the metal-insulator transition,” Phys. Rev. B 85(2), 020101 (2012).
[Crossref]

Atwater, H. A.

Averitt, R. D.

M. Liu, H. Y. Hwang, H. Tao, A. C. Strikwerda, K. Fan, G. R. Keiser, A. J. Sternbach, K. G. West, S. Kittiwatanakul, J. Lu, S. A. Wolf, F. G. Omenetto, X. Zhang, K. A. Nelson, and R. D. Averitt, “Terahertz-field-induced insulator-to-metal transition in vanadium dioxide metamaterial,” Nature 487(7407), 345–348 (2012).
[Crossref] [PubMed]

Aydin, K.

Barker, A. S.

A. S. Barker, H. W. Verleur, and H. J. Guggenheim, “Infrared Optical properties of vanadium dioxide above and below the transition temperature,” Phys. Rev. Lett. 17(26), 1286–1289 (1966).
[Crossref]

Basov, D. N.

J. Rensberg, S. Zhang, Y. Zhou, A. S. McLeod, C. Schwarz, M. Goldflam, M. Liu, J. Kerbusch, R. Nawrodt, S. Ramanathan, D. N. Basov, F. Capasso, C. Ronning, and M. A. Kats, “Active optical metasurfaces based on defect-engineered phase-transition materials,” Nano Lett. 16(2), 1050–1055 (2016).
[Crossref] [PubMed]

T. J. Huffman, P. Xu, M. M. Qazilbash, E. J. Walter, H. Krakauer, J. Wei, D. H. Cobden, H. A. Bechtel, M. C. Martin, G. L. Carr, and D. N. Basov, “Anisotropic infrared response of vanadium dioxide microcrystals,” Phys. Rev. B 87(11), 115121 (2013).
[Crossref]

T. Driscoll, S. Palit, M. M. Qazilbash, M. Brehm, F. Keilmann, B.-G. Chae, S.-J. Yun, H.-T. Kim, S. Y. Cho, N. M. Jokerst, D. R. Smith, and D. N. Basov, “Dynamic tuning of an infrared hybrid-metamaterial resonance using vanadium dioxide,” Appl. Phys. Lett. 93(2), 024101 (2008).
[Crossref]

Bechtel, H. A.

T. J. Huffman, P. Xu, M. M. Qazilbash, E. J. Walter, H. Krakauer, J. Wei, D. H. Cobden, H. A. Bechtel, M. C. Martin, G. L. Carr, and D. N. Basov, “Anisotropic infrared response of vanadium dioxide microcrystals,” Phys. Rev. B 87(11), 115121 (2013).
[Crossref]

Becker, M. F.

M. F. Becker, A. B. Buckman, R. M. Walser, T. Lépine, P. Georges, and A. Brun, “Femtosecond laser excitation of the semiconductor-metal phase transition in VO2,” Appl. Phys. Lett. 65(12), 1507 (1994).
[Crossref]

Berweger, S.

J. M. Atkin, S. Berweger, E. K. Chavez, M. B. Raschke, J. Cao, W. Fan, and J. Wu, “Strain and temperature dependence of the insulating phases of VO2 near the metal-insulator transition,” Phys. Rev. B 85(2), 020101 (2012).
[Crossref]

Boyd, E. M.

Brehm, M.

T. Driscoll, S. Palit, M. M. Qazilbash, M. Brehm, F. Keilmann, B.-G. Chae, S.-J. Yun, H.-T. Kim, S. Y. Cho, N. M. Jokerst, D. R. Smith, and D. N. Basov, “Dynamic tuning of an infrared hybrid-metamaterial resonance using vanadium dioxide,” Appl. Phys. Lett. 93(2), 024101 (2008).
[Crossref]

Brun, A.

M. F. Becker, A. B. Buckman, R. M. Walser, T. Lépine, P. Georges, and A. Brun, “Femtosecond laser excitation of the semiconductor-metal phase transition in VO2,” Appl. Phys. Lett. 65(12), 1507 (1994).
[Crossref]

Buckman, A. B.

M. F. Becker, A. B. Buckman, R. M. Walser, T. Lépine, P. Georges, and A. Brun, “Femtosecond laser excitation of the semiconductor-metal phase transition in VO2,” Appl. Phys. Lett. 65(12), 1507 (1994).
[Crossref]

Budai, J. D.

E. Strelcov, A. Tselev, I. Ivanov, J. D. Budai, J. Zhang, J. Z. Tischler, I. Kravchenko, S. V. Kalinin, and A. Kolmakov, “Doping-based stabilization of the M2 phase in free-standing VO2 nanostructures at room temperature,” Nano Lett. 12(12), 6198–6205 (2012).
[Crossref] [PubMed]

Cao, C. X.

L. T. Kang, Y. F. Gao, Z. T. Zhang, J. Du, C. X. Cao, Z. Chen, and H. J. Luo, “Effects of Annealing Parameters on Optical Properties of Thermochromic VO2 Films Prepared in Aqueous Solution,” J. Phys. Chem. C 114(4), 1901–1911 (2010).
[Crossref]

Cao, J.

J. M. Atkin, S. Berweger, E. K. Chavez, M. B. Raschke, J. Cao, W. Fan, and J. Wu, “Strain and temperature dependence of the insulating phases of VO2 near the metal-insulator transition,” Phys. Rev. B 85(2), 020101 (2012).
[Crossref]

Capasso, F.

J. Rensberg, S. Zhang, Y. Zhou, A. S. McLeod, C. Schwarz, M. Goldflam, M. Liu, J. Kerbusch, R. Nawrodt, S. Ramanathan, D. N. Basov, F. Capasso, C. Ronning, and M. A. Kats, “Active optical metasurfaces based on defect-engineered phase-transition materials,” Nano Lett. 16(2), 1050–1055 (2016).
[Crossref] [PubMed]

Carr, G. L.

T. J. Huffman, P. Xu, M. M. Qazilbash, E. J. Walter, H. Krakauer, J. Wei, D. H. Cobden, H. A. Bechtel, M. C. Martin, G. L. Carr, and D. N. Basov, “Anisotropic infrared response of vanadium dioxide microcrystals,” Phys. Rev. B 87(11), 115121 (2013).
[Crossref]

Chae, B.-G.

T. Driscoll, S. Palit, M. M. Qazilbash, M. Brehm, F. Keilmann, B.-G. Chae, S.-J. Yun, H.-T. Kim, S. Y. Cho, N. M. Jokerst, D. R. Smith, and D. N. Basov, “Dynamic tuning of an infrared hybrid-metamaterial resonance using vanadium dioxide,” Appl. Phys. Lett. 93(2), 024101 (2008).
[Crossref]

H.-T. Kim, B.-G. Chae, D.-H. Youn, G. Kim, K.-Y. Kang, S.-J. Lee, K. Kim, and Y.-S. Lim, “Raman study of electric-field-induced first-order metal-insulator transition in VO2-based devices,” Appl. Phys. Lett. 86(24), 242101 (2005).
[Crossref]

Chavez, E. K.

J. M. Atkin, S. Berweger, E. K. Chavez, M. B. Raschke, J. Cao, W. Fan, and J. Wu, “Strain and temperature dependence of the insulating phases of VO2 near the metal-insulator transition,” Phys. Rev. B 85(2), 020101 (2012).
[Crossref]

Chen, C.

Y. Ji, Y. Zhang, M. Gao, Z. Yuan, Y. Xia, C. Jin, B. Tao, C. Chen, Q. Jia, and Y. Lin, “Role of microstructures on the M1-M2 phase transition in epitaxial VO2 thin films,” Sci. Rep. 4, 4854 (2014).
[Crossref] [PubMed]

C. Chen, R. Wang, L. Shang, and C. Guo, “Gate-field-induced phase transitions in VO2: Monoclinic metal phase separation and switchable infrared reflections,” Appl. Phys. Lett. 93(17), 171101 (2008).
[Crossref]

Chen, Z.

L. T. Kang, Y. F. Gao, Z. T. Zhang, J. Du, C. X. Cao, Z. Chen, and H. J. Luo, “Effects of Annealing Parameters on Optical Properties of Thermochromic VO2 Films Prepared in Aqueous Solution,” J. Phys. Chem. C 114(4), 1901–1911 (2010).
[Crossref]

Cho, S. Y.

T. Driscoll, S. Palit, M. M. Qazilbash, M. Brehm, F. Keilmann, B.-G. Chae, S.-J. Yun, H.-T. Kim, S. Y. Cho, N. M. Jokerst, D. R. Smith, and D. N. Basov, “Dynamic tuning of an infrared hybrid-metamaterial resonance using vanadium dioxide,” Appl. Phys. Lett. 93(2), 024101 (2008).
[Crossref]

Clark, R. J. H.

T. D. Manning, I. P. Parkin, R. J. H. Clark, D. Sheel, M. E. Pemble, and D. Vernadou, “Intelligent window coatings: atmospheric pressure chemical vapour deposition of vanadium oxides,” J. Mater. Chem. 12(10), 2936–2939 (2002).
[Crossref]

Cobden, D. H.

T. J. Huffman, P. Xu, M. M. Qazilbash, E. J. Walter, H. Krakauer, J. Wei, D. H. Cobden, H. A. Bechtel, M. C. Martin, G. L. Carr, and D. N. Basov, “Anisotropic infrared response of vanadium dioxide microcrystals,” Phys. Rev. B 87(11), 115121 (2013).
[Crossref]

Dicken, M. J.

Driscoll, T.

T. Driscoll, S. Palit, M. M. Qazilbash, M. Brehm, F. Keilmann, B.-G. Chae, S.-J. Yun, H.-T. Kim, S. Y. Cho, N. M. Jokerst, D. R. Smith, and D. N. Basov, “Dynamic tuning of an infrared hybrid-metamaterial resonance using vanadium dioxide,” Appl. Phys. Lett. 93(2), 024101 (2008).
[Crossref]

Du, J.

L. T. Kang, Y. F. Gao, Z. T. Zhang, J. Du, C. X. Cao, Z. Chen, and H. J. Luo, “Effects of Annealing Parameters on Optical Properties of Thermochromic VO2 Films Prepared in Aqueous Solution,” J. Phys. Chem. C 114(4), 1901–1911 (2010).
[Crossref]

Ehrke, H.

C. Kübler, H. Ehrke, R. Huber, R. Lopez, A. Halabica, R. F. Haglund, and A. Leitenstorfer, “Coherent structural dynamics and electronic correlations during an ultrafast insulator-to-metal phase transition in VO2.,” Phys. Rev. Lett. 99(11), 116401 (2007).
[Crossref] [PubMed]

Fan, K.

M. Liu, H. Y. Hwang, H. Tao, A. C. Strikwerda, K. Fan, G. R. Keiser, A. J. Sternbach, K. G. West, S. Kittiwatanakul, J. Lu, S. A. Wolf, F. G. Omenetto, X. Zhang, K. A. Nelson, and R. D. Averitt, “Terahertz-field-induced insulator-to-metal transition in vanadium dioxide metamaterial,” Nature 487(7407), 345–348 (2012).
[Crossref] [PubMed]

Fan, W.

J. M. Atkin, S. Berweger, E. K. Chavez, M. B. Raschke, J. Cao, W. Fan, and J. Wu, “Strain and temperature dependence of the insulating phases of VO2 near the metal-insulator transition,” Phys. Rev. B 85(2), 020101 (2012).
[Crossref]

Gao, M.

Y. Ji, Y. Zhang, M. Gao, Z. Yuan, Y. Xia, C. Jin, B. Tao, C. Chen, Q. Jia, and Y. Lin, “Role of microstructures on the M1-M2 phase transition in epitaxial VO2 thin films,” Sci. Rep. 4, 4854 (2014).
[Crossref] [PubMed]

Gao, Y. F.

L. T. Kang, Y. F. Gao, Z. T. Zhang, J. Du, C. X. Cao, Z. Chen, and H. J. Luo, “Effects of Annealing Parameters on Optical Properties of Thermochromic VO2 Films Prepared in Aqueous Solution,” J. Phys. Chem. C 114(4), 1901–1911 (2010).
[Crossref]

Georges, P.

M. F. Becker, A. B. Buckman, R. M. Walser, T. Lépine, P. Georges, and A. Brun, “Femtosecond laser excitation of the semiconductor-metal phase transition in VO2,” Appl. Phys. Lett. 65(12), 1507 (1994).
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Ghedira, M.

M. Ghedira, H. Vincent, M. Marezio, and J. C. Launay, “Structural aspects of the metal-insulator transitions in V0.985Al0.015O2,” J. Solid State Chem. 22(4), 423–438 (1977).
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Goldflam, M.

J. Rensberg, S. Zhang, Y. Zhou, A. S. McLeod, C. Schwarz, M. Goldflam, M. Liu, J. Kerbusch, R. Nawrodt, S. Ramanathan, D. N. Basov, F. Capasso, C. Ronning, and M. A. Kats, “Active optical metasurfaces based on defect-engineered phase-transition materials,” Nano Lett. 16(2), 1050–1055 (2016).
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X. Wu, Z. Wu, C. Ji, H. Zhang, Y. Su, Z. Huang, J. Gou, X. Wei, J. Wang, and Y. Jiang, “THz transmittance and electrical properties tuning across IMT in vanadium dioxide films by Al Doping,” ACS Appl. Mater. Interfaces 8(18), 11842–11850 (2016).
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A. S. Barker, H. W. Verleur, and H. J. Guggenheim, “Infrared Optical properties of vanadium dioxide above and below the transition temperature,” Phys. Rev. Lett. 17(26), 1286–1289 (1966).
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C. Chen, R. Wang, L. Shang, and C. Guo, “Gate-field-induced phase transitions in VO2: Monoclinic metal phase separation and switchable infrared reflections,” Appl. Phys. Lett. 93(17), 171101 (2008).
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Haglund, R. F.

C. Kübler, H. Ehrke, R. Huber, R. Lopez, A. Halabica, R. F. Haglund, and A. Leitenstorfer, “Coherent structural dynamics and electronic correlations during an ultrafast insulator-to-metal phase transition in VO2.,” Phys. Rev. Lett. 99(11), 116401 (2007).
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Halabica, A.

C. Kübler, H. Ehrke, R. Huber, R. Lopez, A. Halabica, R. F. Haglund, and A. Leitenstorfer, “Coherent structural dynamics and electronic correlations during an ultrafast insulator-to-metal phase transition in VO2.,” Phys. Rev. Lett. 99(11), 116401 (2007).
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H. Zhang, Z. Wu, R. Niu, X. Wu, Q. he, and Y. Jiang, “Metal–insulator transition properties of sputtered silicon-doped and un-doped vanadium dioxide films at terahertz range,” Appl. Surf. Sci. 331, 92–97 (2015).
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Y. Xu, W. Huang, Q. Shi, Y. Zhang, Y. Zhang, L. Song, and Y. Zhang, “Effects of porous nano-structure on the metal–insulator transition in VO2 films,” Appl. Surf. Sci. 259, 256–260 (2012).
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X. Wu, Z. Wu, C. Ji, H. Zhang, Y. Su, Z. Huang, J. Gou, X. Wei, J. Wang, and Y. Jiang, “THz transmittance and electrical properties tuning across IMT in vanadium dioxide films by Al Doping,” ACS Appl. Mater. Interfaces 8(18), 11842–11850 (2016).
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Huber, R.

C. Kübler, H. Ehrke, R. Huber, R. Lopez, A. Halabica, R. F. Haglund, and A. Leitenstorfer, “Coherent structural dynamics and electronic correlations during an ultrafast insulator-to-metal phase transition in VO2.,” Phys. Rev. Lett. 99(11), 116401 (2007).
[Crossref] [PubMed]

Huffman, T. J.

T. J. Huffman, P. Xu, M. M. Qazilbash, E. J. Walter, H. Krakauer, J. Wei, D. H. Cobden, H. A. Bechtel, M. C. Martin, G. L. Carr, and D. N. Basov, “Anisotropic infrared response of vanadium dioxide microcrystals,” Phys. Rev. B 87(11), 115121 (2013).
[Crossref]

Hwang, H. Y.

M. Liu, H. Y. Hwang, H. Tao, A. C. Strikwerda, K. Fan, G. R. Keiser, A. J. Sternbach, K. G. West, S. Kittiwatanakul, J. Lu, S. A. Wolf, F. G. Omenetto, X. Zhang, K. A. Nelson, and R. D. Averitt, “Terahertz-field-induced insulator-to-metal transition in vanadium dioxide metamaterial,” Nature 487(7407), 345–348 (2012).
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E. Strelcov, A. Tselev, I. Ivanov, J. D. Budai, J. Zhang, J. Z. Tischler, I. Kravchenko, S. V. Kalinin, and A. Kolmakov, “Doping-based stabilization of the M2 phase in free-standing VO2 nanostructures at room temperature,” Nano Lett. 12(12), 6198–6205 (2012).
[Crossref] [PubMed]

Ji, C.

X. Wu, Z. Wu, C. Ji, H. Zhang, Y. Su, Z. Huang, J. Gou, X. Wei, J. Wang, and Y. Jiang, “THz transmittance and electrical properties tuning across IMT in vanadium dioxide films by Al Doping,” ACS Appl. Mater. Interfaces 8(18), 11842–11850 (2016).
[Crossref] [PubMed]

Ji, Y.

Y. Ji, Y. Zhang, M. Gao, Z. Yuan, Y. Xia, C. Jin, B. Tao, C. Chen, Q. Jia, and Y. Lin, “Role of microstructures on the M1-M2 phase transition in epitaxial VO2 thin films,” Sci. Rep. 4, 4854 (2014).
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Jia, Q.

Y. Ji, Y. Zhang, M. Gao, Z. Yuan, Y. Xia, C. Jin, B. Tao, C. Chen, Q. Jia, and Y. Lin, “Role of microstructures on the M1-M2 phase transition in epitaxial VO2 thin films,” Sci. Rep. 4, 4854 (2014).
[Crossref] [PubMed]

Jiang, Y.

X. Wu, Z. Wu, C. Ji, H. Zhang, Y. Su, Z. Huang, J. Gou, X. Wei, J. Wang, and Y. Jiang, “THz transmittance and electrical properties tuning across IMT in vanadium dioxide films by Al Doping,” ACS Appl. Mater. Interfaces 8(18), 11842–11850 (2016).
[Crossref] [PubMed]

H. Zhang, Z. Wu, R. Niu, X. Wu, Q. he, and Y. Jiang, “Metal–insulator transition properties of sputtered silicon-doped and un-doped vanadium dioxide films at terahertz range,” Appl. Surf. Sci. 331, 92–97 (2015).
[Crossref]

Jin, C.

Y. Ji, Y. Zhang, M. Gao, Z. Yuan, Y. Xia, C. Jin, B. Tao, C. Chen, Q. Jia, and Y. Lin, “Role of microstructures on the M1-M2 phase transition in epitaxial VO2 thin films,” Sci. Rep. 4, 4854 (2014).
[Crossref] [PubMed]

Jokerst, N. M.

T. Driscoll, S. Palit, M. M. Qazilbash, M. Brehm, F. Keilmann, B.-G. Chae, S.-J. Yun, H.-T. Kim, S. Y. Cho, N. M. Jokerst, D. R. Smith, and D. N. Basov, “Dynamic tuning of an infrared hybrid-metamaterial resonance using vanadium dioxide,” Appl. Phys. Lett. 93(2), 024101 (2008).
[Crossref]

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E. Strelcov, A. Tselev, I. Ivanov, J. D. Budai, J. Zhang, J. Z. Tischler, I. Kravchenko, S. V. Kalinin, and A. Kolmakov, “Doping-based stabilization of the M2 phase in free-standing VO2 nanostructures at room temperature,” Nano Lett. 12(12), 6198–6205 (2012).
[Crossref] [PubMed]

Kang, K.-Y.

H.-T. Kim, B.-G. Chae, D.-H. Youn, G. Kim, K.-Y. Kang, S.-J. Lee, K. Kim, and Y.-S. Lim, “Raman study of electric-field-induced first-order metal-insulator transition in VO2-based devices,” Appl. Phys. Lett. 86(24), 242101 (2005).
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Kang, L. T.

L. T. Kang, Y. F. Gao, Z. T. Zhang, J. Du, C. X. Cao, Z. Chen, and H. J. Luo, “Effects of Annealing Parameters on Optical Properties of Thermochromic VO2 Films Prepared in Aqueous Solution,” J. Phys. Chem. C 114(4), 1901–1911 (2010).
[Crossref]

Kats, M. A.

J. Rensberg, S. Zhang, Y. Zhou, A. S. McLeod, C. Schwarz, M. Goldflam, M. Liu, J. Kerbusch, R. Nawrodt, S. Ramanathan, D. N. Basov, F. Capasso, C. Ronning, and M. A. Kats, “Active optical metasurfaces based on defect-engineered phase-transition materials,” Nano Lett. 16(2), 1050–1055 (2016).
[Crossref] [PubMed]

Keilmann, F.

T. Driscoll, S. Palit, M. M. Qazilbash, M. Brehm, F. Keilmann, B.-G. Chae, S.-J. Yun, H.-T. Kim, S. Y. Cho, N. M. Jokerst, D. R. Smith, and D. N. Basov, “Dynamic tuning of an infrared hybrid-metamaterial resonance using vanadium dioxide,” Appl. Phys. Lett. 93(2), 024101 (2008).
[Crossref]

Keiser, G. R.

M. Liu, H. Y. Hwang, H. Tao, A. C. Strikwerda, K. Fan, G. R. Keiser, A. J. Sternbach, K. G. West, S. Kittiwatanakul, J. Lu, S. A. Wolf, F. G. Omenetto, X. Zhang, K. A. Nelson, and R. D. Averitt, “Terahertz-field-induced insulator-to-metal transition in vanadium dioxide metamaterial,” Nature 487(7407), 345–348 (2012).
[Crossref] [PubMed]

Kerbusch, J.

J. Rensberg, S. Zhang, Y. Zhou, A. S. McLeod, C. Schwarz, M. Goldflam, M. Liu, J. Kerbusch, R. Nawrodt, S. Ramanathan, D. N. Basov, F. Capasso, C. Ronning, and M. A. Kats, “Active optical metasurfaces based on defect-engineered phase-transition materials,” Nano Lett. 16(2), 1050–1055 (2016).
[Crossref] [PubMed]

Kim, G.

H.-T. Kim, B.-G. Chae, D.-H. Youn, G. Kim, K.-Y. Kang, S.-J. Lee, K. Kim, and Y.-S. Lim, “Raman study of electric-field-induced first-order metal-insulator transition in VO2-based devices,” Appl. Phys. Lett. 86(24), 242101 (2005).
[Crossref]

Kim, H.-T.

T. Driscoll, S. Palit, M. M. Qazilbash, M. Brehm, F. Keilmann, B.-G. Chae, S.-J. Yun, H.-T. Kim, S. Y. Cho, N. M. Jokerst, D. R. Smith, and D. N. Basov, “Dynamic tuning of an infrared hybrid-metamaterial resonance using vanadium dioxide,” Appl. Phys. Lett. 93(2), 024101 (2008).
[Crossref]

H.-T. Kim, B.-G. Chae, D.-H. Youn, G. Kim, K.-Y. Kang, S.-J. Lee, K. Kim, and Y.-S. Lim, “Raman study of electric-field-induced first-order metal-insulator transition in VO2-based devices,” Appl. Phys. Lett. 86(24), 242101 (2005).
[Crossref]

Kim, K.

H.-T. Kim, B.-G. Chae, D.-H. Youn, G. Kim, K.-Y. Kang, S.-J. Lee, K. Kim, and Y.-S. Lim, “Raman study of electric-field-induced first-order metal-insulator transition in VO2-based devices,” Appl. Phys. Lett. 86(24), 242101 (2005).
[Crossref]

Kittiwatanakul, S.

M. Liu, H. Y. Hwang, H. Tao, A. C. Strikwerda, K. Fan, G. R. Keiser, A. J. Sternbach, K. G. West, S. Kittiwatanakul, J. Lu, S. A. Wolf, F. G. Omenetto, X. Zhang, K. A. Nelson, and R. D. Averitt, “Terahertz-field-induced insulator-to-metal transition in vanadium dioxide metamaterial,” Nature 487(7407), 345–348 (2012).
[Crossref] [PubMed]

Kolmakov, A.

E. Strelcov, A. Tselev, I. Ivanov, J. D. Budai, J. Zhang, J. Z. Tischler, I. Kravchenko, S. V. Kalinin, and A. Kolmakov, “Doping-based stabilization of the M2 phase in free-standing VO2 nanostructures at room temperature,” Nano Lett. 12(12), 6198–6205 (2012).
[Crossref] [PubMed]

Krakauer, H.

T. J. Huffman, P. Xu, M. M. Qazilbash, E. J. Walter, H. Krakauer, J. Wei, D. H. Cobden, H. A. Bechtel, M. C. Martin, G. L. Carr, and D. N. Basov, “Anisotropic infrared response of vanadium dioxide microcrystals,” Phys. Rev. B 87(11), 115121 (2013).
[Crossref]

Kravchenko, I.

E. Strelcov, A. Tselev, I. Ivanov, J. D. Budai, J. Zhang, J. Z. Tischler, I. Kravchenko, S. V. Kalinin, and A. Kolmakov, “Doping-based stabilization of the M2 phase in free-standing VO2 nanostructures at room temperature,” Nano Lett. 12(12), 6198–6205 (2012).
[Crossref] [PubMed]

Kübler, C.

C. Kübler, H. Ehrke, R. Huber, R. Lopez, A. Halabica, R. F. Haglund, and A. Leitenstorfer, “Coherent structural dynamics and electronic correlations during an ultrafast insulator-to-metal phase transition in VO2.,” Phys. Rev. Lett. 99(11), 116401 (2007).
[Crossref] [PubMed]

Launay, J. C.

M. Ghedira, H. Vincent, M. Marezio, and J. C. Launay, “Structural aspects of the metal-insulator transitions in V0.985Al0.015O2,” J. Solid State Chem. 22(4), 423–438 (1977).
[Crossref]

Lee, S.-J.

H.-T. Kim, B.-G. Chae, D.-H. Youn, G. Kim, K.-Y. Kang, S.-J. Lee, K. Kim, and Y.-S. Lim, “Raman study of electric-field-induced first-order metal-insulator transition in VO2-based devices,” Appl. Phys. Lett. 86(24), 242101 (2005).
[Crossref]

Leitenstorfer, A.

C. Kübler, H. Ehrke, R. Huber, R. Lopez, A. Halabica, R. F. Haglund, and A. Leitenstorfer, “Coherent structural dynamics and electronic correlations during an ultrafast insulator-to-metal phase transition in VO2.,” Phys. Rev. Lett. 99(11), 116401 (2007).
[Crossref] [PubMed]

Lépine, T.

M. F. Becker, A. B. Buckman, R. M. Walser, T. Lépine, P. Georges, and A. Brun, “Femtosecond laser excitation of the semiconductor-metal phase transition in VO2,” Appl. Phys. Lett. 65(12), 1507 (1994).
[Crossref]

Lim, Y.-S.

H.-T. Kim, B.-G. Chae, D.-H. Youn, G. Kim, K.-Y. Kang, S.-J. Lee, K. Kim, and Y.-S. Lim, “Raman study of electric-field-induced first-order metal-insulator transition in VO2-based devices,” Appl. Phys. Lett. 86(24), 242101 (2005).
[Crossref]

Lin, Y.

Y. Ji, Y. Zhang, M. Gao, Z. Yuan, Y. Xia, C. Jin, B. Tao, C. Chen, Q. Jia, and Y. Lin, “Role of microstructures on the M1-M2 phase transition in epitaxial VO2 thin films,” Sci. Rep. 4, 4854 (2014).
[Crossref] [PubMed]

Liu, M.

J. Rensberg, S. Zhang, Y. Zhou, A. S. McLeod, C. Schwarz, M. Goldflam, M. Liu, J. Kerbusch, R. Nawrodt, S. Ramanathan, D. N. Basov, F. Capasso, C. Ronning, and M. A. Kats, “Active optical metasurfaces based on defect-engineered phase-transition materials,” Nano Lett. 16(2), 1050–1055 (2016).
[Crossref] [PubMed]

M. Liu, H. Y. Hwang, H. Tao, A. C. Strikwerda, K. Fan, G. R. Keiser, A. J. Sternbach, K. G. West, S. Kittiwatanakul, J. Lu, S. A. Wolf, F. G. Omenetto, X. Zhang, K. A. Nelson, and R. D. Averitt, “Terahertz-field-induced insulator-to-metal transition in vanadium dioxide metamaterial,” Nature 487(7407), 345–348 (2012).
[Crossref] [PubMed]

Lopez, R.

C. Kübler, H. Ehrke, R. Huber, R. Lopez, A. Halabica, R. F. Haglund, and A. Leitenstorfer, “Coherent structural dynamics and electronic correlations during an ultrafast insulator-to-metal phase transition in VO2.,” Phys. Rev. Lett. 99(11), 116401 (2007).
[Crossref] [PubMed]

Lu, J.

M. Liu, H. Y. Hwang, H. Tao, A. C. Strikwerda, K. Fan, G. R. Keiser, A. J. Sternbach, K. G. West, S. Kittiwatanakul, J. Lu, S. A. Wolf, F. G. Omenetto, X. Zhang, K. A. Nelson, and R. D. Averitt, “Terahertz-field-induced insulator-to-metal transition in vanadium dioxide metamaterial,” Nature 487(7407), 345–348 (2012).
[Crossref] [PubMed]

Luo, H. J.

L. T. Kang, Y. F. Gao, Z. T. Zhang, J. Du, C. X. Cao, Z. Chen, and H. J. Luo, “Effects of Annealing Parameters on Optical Properties of Thermochromic VO2 Films Prepared in Aqueous Solution,” J. Phys. Chem. C 114(4), 1901–1911 (2010).
[Crossref]

Ma, J.

Manning, T. D.

T. D. Manning, I. P. Parkin, M. E. Pemble, D. Sheel, and D. Vernardou, “Intelligent window coatings: Atmospheric pressure chemical vapor deposition of tungsten-doped vanadium dioxide,” Chem. Mater. 16(4), 744–749 (2004).
[Crossref]

T. D. Manning, I. P. Parkin, R. J. H. Clark, D. Sheel, M. E. Pemble, and D. Vernadou, “Intelligent window coatings: atmospheric pressure chemical vapour deposition of vanadium oxides,” J. Mater. Chem. 12(10), 2936–2939 (2002).
[Crossref]

Marezio, M.

M. Ghedira, H. Vincent, M. Marezio, and J. C. Launay, “Structural aspects of the metal-insulator transitions in V0.985Al0.015O2,” J. Solid State Chem. 22(4), 423–438 (1977).
[Crossref]

Martin, M. C.

T. J. Huffman, P. Xu, M. M. Qazilbash, E. J. Walter, H. Krakauer, J. Wei, D. H. Cobden, H. A. Bechtel, M. C. Martin, G. L. Carr, and D. N. Basov, “Anisotropic infrared response of vanadium dioxide microcrystals,” Phys. Rev. B 87(11), 115121 (2013).
[Crossref]

McLeod, A. S.

J. Rensberg, S. Zhang, Y. Zhou, A. S. McLeod, C. Schwarz, M. Goldflam, M. Liu, J. Kerbusch, R. Nawrodt, S. Ramanathan, D. N. Basov, F. Capasso, C. Ronning, and M. A. Kats, “Active optical metasurfaces based on defect-engineered phase-transition materials,” Nano Lett. 16(2), 1050–1055 (2016).
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Morin, F.

F. Morin, “Oxides which show a metal-to-insulator transition at the Neel temperature,” Phys. Rev. Lett. 3(1), 34–36 (1959).
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Nawrodt, R.

J. Rensberg, S. Zhang, Y. Zhou, A. S. McLeod, C. Schwarz, M. Goldflam, M. Liu, J. Kerbusch, R. Nawrodt, S. Ramanathan, D. N. Basov, F. Capasso, C. Ronning, and M. A. Kats, “Active optical metasurfaces based on defect-engineered phase-transition materials,” Nano Lett. 16(2), 1050–1055 (2016).
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Nelson, K. A.

M. Liu, H. Y. Hwang, H. Tao, A. C. Strikwerda, K. Fan, G. R. Keiser, A. J. Sternbach, K. G. West, S. Kittiwatanakul, J. Lu, S. A. Wolf, F. G. Omenetto, X. Zhang, K. A. Nelson, and R. D. Averitt, “Terahertz-field-induced insulator-to-metal transition in vanadium dioxide metamaterial,” Nature 487(7407), 345–348 (2012).
[Crossref] [PubMed]

Niu, R.

H. Zhang, Z. Wu, R. Niu, X. Wu, Q. he, and Y. Jiang, “Metal–insulator transition properties of sputtered silicon-doped and un-doped vanadium dioxide films at terahertz range,” Appl. Surf. Sci. 331, 92–97 (2015).
[Crossref]

Omenetto, F. G.

M. Liu, H. Y. Hwang, H. Tao, A. C. Strikwerda, K. Fan, G. R. Keiser, A. J. Sternbach, K. G. West, S. Kittiwatanakul, J. Lu, S. A. Wolf, F. G. Omenetto, X. Zhang, K. A. Nelson, and R. D. Averitt, “Terahertz-field-induced insulator-to-metal transition in vanadium dioxide metamaterial,” Nature 487(7407), 345–348 (2012).
[Crossref] [PubMed]

Palit, S.

T. Driscoll, S. Palit, M. M. Qazilbash, M. Brehm, F. Keilmann, B.-G. Chae, S.-J. Yun, H.-T. Kim, S. Y. Cho, N. M. Jokerst, D. R. Smith, and D. N. Basov, “Dynamic tuning of an infrared hybrid-metamaterial resonance using vanadium dioxide,” Appl. Phys. Lett. 93(2), 024101 (2008).
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Parker, J. C.

J. C. Parker, “Raman scattering from VO2 single crystals: A study of the effects of surface oxidation,” Phys. Rev. B Condens. Matter 42(5), 3164–3166 (1990).
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Parkin, I. P.

T. D. Manning, I. P. Parkin, M. E. Pemble, D. Sheel, and D. Vernardou, “Intelligent window coatings: Atmospheric pressure chemical vapor deposition of tungsten-doped vanadium dioxide,” Chem. Mater. 16(4), 744–749 (2004).
[Crossref]

T. D. Manning, I. P. Parkin, R. J. H. Clark, D. Sheel, M. E. Pemble, and D. Vernadou, “Intelligent window coatings: atmospheric pressure chemical vapour deposition of vanadium oxides,” J. Mater. Chem. 12(10), 2936–2939 (2002).
[Crossref]

Pemble, M. E.

T. D. Manning, I. P. Parkin, M. E. Pemble, D. Sheel, and D. Vernardou, “Intelligent window coatings: Atmospheric pressure chemical vapor deposition of tungsten-doped vanadium dioxide,” Chem. Mater. 16(4), 744–749 (2004).
[Crossref]

T. D. Manning, I. P. Parkin, R. J. H. Clark, D. Sheel, M. E. Pemble, and D. Vernadou, “Intelligent window coatings: atmospheric pressure chemical vapour deposition of vanadium oxides,” J. Mater. Chem. 12(10), 2936–2939 (2002).
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Pryce, I. M.

Qazilbash, M. M.

T. J. Huffman, P. Xu, M. M. Qazilbash, E. J. Walter, H. Krakauer, J. Wei, D. H. Cobden, H. A. Bechtel, M. C. Martin, G. L. Carr, and D. N. Basov, “Anisotropic infrared response of vanadium dioxide microcrystals,” Phys. Rev. B 87(11), 115121 (2013).
[Crossref]

T. Driscoll, S. Palit, M. M. Qazilbash, M. Brehm, F. Keilmann, B.-G. Chae, S.-J. Yun, H.-T. Kim, S. Y. Cho, N. M. Jokerst, D. R. Smith, and D. N. Basov, “Dynamic tuning of an infrared hybrid-metamaterial resonance using vanadium dioxide,” Appl. Phys. Lett. 93(2), 024101 (2008).
[Crossref]

Ramanathan, S.

J. Rensberg, S. Zhang, Y. Zhou, A. S. McLeod, C. Schwarz, M. Goldflam, M. Liu, J. Kerbusch, R. Nawrodt, S. Ramanathan, D. N. Basov, F. Capasso, C. Ronning, and M. A. Kats, “Active optical metasurfaces based on defect-engineered phase-transition materials,” Nano Lett. 16(2), 1050–1055 (2016).
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Y. Zhou and S. Ramanathan, “Heteroepitaxial VO2 thin films on GaN: Structure and metal-insulator transition characteristics,” J. Appl. Phys. 112(7), 074114 (2012).
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J. M. Atkin, S. Berweger, E. K. Chavez, M. B. Raschke, J. Cao, W. Fan, and J. Wu, “Strain and temperature dependence of the insulating phases of VO2 near the metal-insulator transition,” Phys. Rev. B 85(2), 020101 (2012).
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Rensberg, J.

J. Rensberg, S. Zhang, Y. Zhou, A. S. McLeod, C. Schwarz, M. Goldflam, M. Liu, J. Kerbusch, R. Nawrodt, S. Ramanathan, D. N. Basov, F. Capasso, C. Ronning, and M. A. Kats, “Active optical metasurfaces based on defect-engineered phase-transition materials,” Nano Lett. 16(2), 1050–1055 (2016).
[Crossref] [PubMed]

Ronning, C.

J. Rensberg, S. Zhang, Y. Zhou, A. S. McLeod, C. Schwarz, M. Goldflam, M. Liu, J. Kerbusch, R. Nawrodt, S. Ramanathan, D. N. Basov, F. Capasso, C. Ronning, and M. A. Kats, “Active optical metasurfaces based on defect-engineered phase-transition materials,” Nano Lett. 16(2), 1050–1055 (2016).
[Crossref] [PubMed]

Schwarz, C.

J. Rensberg, S. Zhang, Y. Zhou, A. S. McLeod, C. Schwarz, M. Goldflam, M. Liu, J. Kerbusch, R. Nawrodt, S. Ramanathan, D. N. Basov, F. Capasso, C. Ronning, and M. A. Kats, “Active optical metasurfaces based on defect-engineered phase-transition materials,” Nano Lett. 16(2), 1050–1055 (2016).
[Crossref] [PubMed]

Shang, L.

C. Chen, R. Wang, L. Shang, and C. Guo, “Gate-field-induced phase transitions in VO2: Monoclinic metal phase separation and switchable infrared reflections,” Appl. Phys. Lett. 93(17), 171101 (2008).
[Crossref]

Sheel, D.

T. D. Manning, I. P. Parkin, M. E. Pemble, D. Sheel, and D. Vernardou, “Intelligent window coatings: Atmospheric pressure chemical vapor deposition of tungsten-doped vanadium dioxide,” Chem. Mater. 16(4), 744–749 (2004).
[Crossref]

T. D. Manning, I. P. Parkin, R. J. H. Clark, D. Sheel, M. E. Pemble, and D. Vernadou, “Intelligent window coatings: atmospheric pressure chemical vapour deposition of vanadium oxides,” J. Mater. Chem. 12(10), 2936–2939 (2002).
[Crossref]

Shi, Q.

Y. Xu, W. Huang, Q. Shi, Y. Zhang, Y. Zhang, L. Song, and Y. Zhang, “Effects of porous nano-structure on the metal–insulator transition in VO2 films,” Appl. Surf. Sci. 259, 256–260 (2012).
[Crossref]

Smith, D. R.

T. Driscoll, S. Palit, M. M. Qazilbash, M. Brehm, F. Keilmann, B.-G. Chae, S.-J. Yun, H.-T. Kim, S. Y. Cho, N. M. Jokerst, D. R. Smith, and D. N. Basov, “Dynamic tuning of an infrared hybrid-metamaterial resonance using vanadium dioxide,” Appl. Phys. Lett. 93(2), 024101 (2008).
[Crossref]

Song, L.

Y. Xu, W. Huang, Q. Shi, Y. Zhang, Y. Zhang, L. Song, and Y. Zhang, “Effects of porous nano-structure on the metal–insulator transition in VO2 films,” Appl. Surf. Sci. 259, 256–260 (2012).
[Crossref]

Sternbach, A. J.

M. Liu, H. Y. Hwang, H. Tao, A. C. Strikwerda, K. Fan, G. R. Keiser, A. J. Sternbach, K. G. West, S. Kittiwatanakul, J. Lu, S. A. Wolf, F. G. Omenetto, X. Zhang, K. A. Nelson, and R. D. Averitt, “Terahertz-field-induced insulator-to-metal transition in vanadium dioxide metamaterial,” Nature 487(7407), 345–348 (2012).
[Crossref] [PubMed]

Strelcov, E.

E. Strelcov, A. Tselev, I. Ivanov, J. D. Budai, J. Zhang, J. Z. Tischler, I. Kravchenko, S. V. Kalinin, and A. Kolmakov, “Doping-based stabilization of the M2 phase in free-standing VO2 nanostructures at room temperature,” Nano Lett. 12(12), 6198–6205 (2012).
[Crossref] [PubMed]

Strikwerda, A. C.

M. Liu, H. Y. Hwang, H. Tao, A. C. Strikwerda, K. Fan, G. R. Keiser, A. J. Sternbach, K. G. West, S. Kittiwatanakul, J. Lu, S. A. Wolf, F. G. Omenetto, X. Zhang, K. A. Nelson, and R. D. Averitt, “Terahertz-field-induced insulator-to-metal transition in vanadium dioxide metamaterial,” Nature 487(7407), 345–348 (2012).
[Crossref] [PubMed]

Su, Y.

X. Wu, Z. Wu, C. Ji, H. Zhang, Y. Su, Z. Huang, J. Gou, X. Wei, J. Wang, and Y. Jiang, “THz transmittance and electrical properties tuning across IMT in vanadium dioxide films by Al Doping,” ACS Appl. Mater. Interfaces 8(18), 11842–11850 (2016).
[Crossref] [PubMed]

Sweatlock, L. A.

Tao, B.

Y. Ji, Y. Zhang, M. Gao, Z. Yuan, Y. Xia, C. Jin, B. Tao, C. Chen, Q. Jia, and Y. Lin, “Role of microstructures on the M1-M2 phase transition in epitaxial VO2 thin films,” Sci. Rep. 4, 4854 (2014).
[Crossref] [PubMed]

Tao, H.

M. Liu, H. Y. Hwang, H. Tao, A. C. Strikwerda, K. Fan, G. R. Keiser, A. J. Sternbach, K. G. West, S. Kittiwatanakul, J. Lu, S. A. Wolf, F. G. Omenetto, X. Zhang, K. A. Nelson, and R. D. Averitt, “Terahertz-field-induced insulator-to-metal transition in vanadium dioxide metamaterial,” Nature 487(7407), 345–348 (2012).
[Crossref] [PubMed]

Tischler, J. Z.

E. Strelcov, A. Tselev, I. Ivanov, J. D. Budai, J. Zhang, J. Z. Tischler, I. Kravchenko, S. V. Kalinin, and A. Kolmakov, “Doping-based stabilization of the M2 phase in free-standing VO2 nanostructures at room temperature,” Nano Lett. 12(12), 6198–6205 (2012).
[Crossref] [PubMed]

Tselev, A.

E. Strelcov, A. Tselev, I. Ivanov, J. D. Budai, J. Zhang, J. Z. Tischler, I. Kravchenko, S. V. Kalinin, and A. Kolmakov, “Doping-based stabilization of the M2 phase in free-standing VO2 nanostructures at room temperature,” Nano Lett. 12(12), 6198–6205 (2012).
[Crossref] [PubMed]

Verleur, H. W.

A. S. Barker, H. W. Verleur, and H. J. Guggenheim, “Infrared Optical properties of vanadium dioxide above and below the transition temperature,” Phys. Rev. Lett. 17(26), 1286–1289 (1966).
[Crossref]

Vernadou, D.

T. D. Manning, I. P. Parkin, R. J. H. Clark, D. Sheel, M. E. Pemble, and D. Vernadou, “Intelligent window coatings: atmospheric pressure chemical vapour deposition of vanadium oxides,” J. Mater. Chem. 12(10), 2936–2939 (2002).
[Crossref]

Vernardou, D.

T. D. Manning, I. P. Parkin, M. E. Pemble, D. Sheel, and D. Vernardou, “Intelligent window coatings: Atmospheric pressure chemical vapor deposition of tungsten-doped vanadium dioxide,” Chem. Mater. 16(4), 744–749 (2004).
[Crossref]

Vincent, H.

M. Ghedira, H. Vincent, M. Marezio, and J. C. Launay, “Structural aspects of the metal-insulator transitions in V0.985Al0.015O2,” J. Solid State Chem. 22(4), 423–438 (1977).
[Crossref]

Walavalkar, S.

Walser, R. M.

M. F. Becker, A. B. Buckman, R. M. Walser, T. Lépine, P. Georges, and A. Brun, “Femtosecond laser excitation of the semiconductor-metal phase transition in VO2,” Appl. Phys. Lett. 65(12), 1507 (1994).
[Crossref]

Walter, E. J.

T. J. Huffman, P. Xu, M. M. Qazilbash, E. J. Walter, H. Krakauer, J. Wei, D. H. Cobden, H. A. Bechtel, M. C. Martin, G. L. Carr, and D. N. Basov, “Anisotropic infrared response of vanadium dioxide microcrystals,” Phys. Rev. B 87(11), 115121 (2013).
[Crossref]

Wang, J.

X. Wu, Z. Wu, C. Ji, H. Zhang, Y. Su, Z. Huang, J. Gou, X. Wei, J. Wang, and Y. Jiang, “THz transmittance and electrical properties tuning across IMT in vanadium dioxide films by Al Doping,” ACS Appl. Mater. Interfaces 8(18), 11842–11850 (2016).
[Crossref] [PubMed]

Wang, R.

C. Chen, R. Wang, L. Shang, and C. Guo, “Gate-field-induced phase transitions in VO2: Monoclinic metal phase separation and switchable infrared reflections,” Appl. Phys. Lett. 93(17), 171101 (2008).
[Crossref]

Wei, J.

T. J. Huffman, P. Xu, M. M. Qazilbash, E. J. Walter, H. Krakauer, J. Wei, D. H. Cobden, H. A. Bechtel, M. C. Martin, G. L. Carr, and D. N. Basov, “Anisotropic infrared response of vanadium dioxide microcrystals,” Phys. Rev. B 87(11), 115121 (2013).
[Crossref]

Wei, X.

X. Wu, Z. Wu, C. Ji, H. Zhang, Y. Su, Z. Huang, J. Gou, X. Wei, J. Wang, and Y. Jiang, “THz transmittance and electrical properties tuning across IMT in vanadium dioxide films by Al Doping,” ACS Appl. Mater. Interfaces 8(18), 11842–11850 (2016).
[Crossref] [PubMed]

West, K. G.

M. Liu, H. Y. Hwang, H. Tao, A. C. Strikwerda, K. Fan, G. R. Keiser, A. J. Sternbach, K. G. West, S. Kittiwatanakul, J. Lu, S. A. Wolf, F. G. Omenetto, X. Zhang, K. A. Nelson, and R. D. Averitt, “Terahertz-field-induced insulator-to-metal transition in vanadium dioxide metamaterial,” Nature 487(7407), 345–348 (2012).
[Crossref] [PubMed]

Wolf, S. A.

M. Liu, H. Y. Hwang, H. Tao, A. C. Strikwerda, K. Fan, G. R. Keiser, A. J. Sternbach, K. G. West, S. Kittiwatanakul, J. Lu, S. A. Wolf, F. G. Omenetto, X. Zhang, K. A. Nelson, and R. D. Averitt, “Terahertz-field-induced insulator-to-metal transition in vanadium dioxide metamaterial,” Nature 487(7407), 345–348 (2012).
[Crossref] [PubMed]

Wu, J.

J. M. Atkin, S. Berweger, E. K. Chavez, M. B. Raschke, J. Cao, W. Fan, and J. Wu, “Strain and temperature dependence of the insulating phases of VO2 near the metal-insulator transition,” Phys. Rev. B 85(2), 020101 (2012).
[Crossref]

Wu, X.

X. Wu, Z. Wu, C. Ji, H. Zhang, Y. Su, Z. Huang, J. Gou, X. Wei, J. Wang, and Y. Jiang, “THz transmittance and electrical properties tuning across IMT in vanadium dioxide films by Al Doping,” ACS Appl. Mater. Interfaces 8(18), 11842–11850 (2016).
[Crossref] [PubMed]

H. Zhang, Z. Wu, R. Niu, X. Wu, Q. he, and Y. Jiang, “Metal–insulator transition properties of sputtered silicon-doped and un-doped vanadium dioxide films at terahertz range,” Appl. Surf. Sci. 331, 92–97 (2015).
[Crossref]

Wu, Z.

X. Wu, Z. Wu, C. Ji, H. Zhang, Y. Su, Z. Huang, J. Gou, X. Wei, J. Wang, and Y. Jiang, “THz transmittance and electrical properties tuning across IMT in vanadium dioxide films by Al Doping,” ACS Appl. Mater. Interfaces 8(18), 11842–11850 (2016).
[Crossref] [PubMed]

H. Zhang, Z. Wu, R. Niu, X. Wu, Q. he, and Y. Jiang, “Metal–insulator transition properties of sputtered silicon-doped and un-doped vanadium dioxide films at terahertz range,” Appl. Surf. Sci. 331, 92–97 (2015).
[Crossref]

Xia, Y.

Y. Ji, Y. Zhang, M. Gao, Z. Yuan, Y. Xia, C. Jin, B. Tao, C. Chen, Q. Jia, and Y. Lin, “Role of microstructures on the M1-M2 phase transition in epitaxial VO2 thin films,” Sci. Rep. 4, 4854 (2014).
[Crossref] [PubMed]

Xu, P.

T. J. Huffman, P. Xu, M. M. Qazilbash, E. J. Walter, H. Krakauer, J. Wei, D. H. Cobden, H. A. Bechtel, M. C. Martin, G. L. Carr, and D. N. Basov, “Anisotropic infrared response of vanadium dioxide microcrystals,” Phys. Rev. B 87(11), 115121 (2013).
[Crossref]

Xu, Y.

Y. Xu, W. Huang, Q. Shi, Y. Zhang, Y. Zhang, L. Song, and Y. Zhang, “Effects of porous nano-structure on the metal–insulator transition in VO2 films,” Appl. Surf. Sci. 259, 256–260 (2012).
[Crossref]

Youn, D.-H.

H.-T. Kim, B.-G. Chae, D.-H. Youn, G. Kim, K.-Y. Kang, S.-J. Lee, K. Kim, and Y.-S. Lim, “Raman study of electric-field-induced first-order metal-insulator transition in VO2-based devices,” Appl. Phys. Lett. 86(24), 242101 (2005).
[Crossref]

Yuan, Z.

Y. Ji, Y. Zhang, M. Gao, Z. Yuan, Y. Xia, C. Jin, B. Tao, C. Chen, Q. Jia, and Y. Lin, “Role of microstructures on the M1-M2 phase transition in epitaxial VO2 thin films,” Sci. Rep. 4, 4854 (2014).
[Crossref] [PubMed]

Yun, S.-J.

T. Driscoll, S. Palit, M. M. Qazilbash, M. Brehm, F. Keilmann, B.-G. Chae, S.-J. Yun, H.-T. Kim, S. Y. Cho, N. M. Jokerst, D. R. Smith, and D. N. Basov, “Dynamic tuning of an infrared hybrid-metamaterial resonance using vanadium dioxide,” Appl. Phys. Lett. 93(2), 024101 (2008).
[Crossref]

Zhang, H.

X. Wu, Z. Wu, C. Ji, H. Zhang, Y. Su, Z. Huang, J. Gou, X. Wei, J. Wang, and Y. Jiang, “THz transmittance and electrical properties tuning across IMT in vanadium dioxide films by Al Doping,” ACS Appl. Mater. Interfaces 8(18), 11842–11850 (2016).
[Crossref] [PubMed]

H. Zhang, Z. Wu, R. Niu, X. Wu, Q. he, and Y. Jiang, “Metal–insulator transition properties of sputtered silicon-doped and un-doped vanadium dioxide films at terahertz range,” Appl. Surf. Sci. 331, 92–97 (2015).
[Crossref]

Zhang, J.

E. Strelcov, A. Tselev, I. Ivanov, J. D. Budai, J. Zhang, J. Z. Tischler, I. Kravchenko, S. V. Kalinin, and A. Kolmakov, “Doping-based stabilization of the M2 phase in free-standing VO2 nanostructures at room temperature,” Nano Lett. 12(12), 6198–6205 (2012).
[Crossref] [PubMed]

Zhang, S.

J. Rensberg, S. Zhang, Y. Zhou, A. S. McLeod, C. Schwarz, M. Goldflam, M. Liu, J. Kerbusch, R. Nawrodt, S. Ramanathan, D. N. Basov, F. Capasso, C. Ronning, and M. A. Kats, “Active optical metasurfaces based on defect-engineered phase-transition materials,” Nano Lett. 16(2), 1050–1055 (2016).
[Crossref] [PubMed]

Zhang, X.

M. Liu, H. Y. Hwang, H. Tao, A. C. Strikwerda, K. Fan, G. R. Keiser, A. J. Sternbach, K. G. West, S. Kittiwatanakul, J. Lu, S. A. Wolf, F. G. Omenetto, X. Zhang, K. A. Nelson, and R. D. Averitt, “Terahertz-field-induced insulator-to-metal transition in vanadium dioxide metamaterial,” Nature 487(7407), 345–348 (2012).
[Crossref] [PubMed]

Zhang, Y.

Y. Ji, Y. Zhang, M. Gao, Z. Yuan, Y. Xia, C. Jin, B. Tao, C. Chen, Q. Jia, and Y. Lin, “Role of microstructures on the M1-M2 phase transition in epitaxial VO2 thin films,” Sci. Rep. 4, 4854 (2014).
[Crossref] [PubMed]

Y. Xu, W. Huang, Q. Shi, Y. Zhang, Y. Zhang, L. Song, and Y. Zhang, “Effects of porous nano-structure on the metal–insulator transition in VO2 films,” Appl. Surf. Sci. 259, 256–260 (2012).
[Crossref]

Y. Xu, W. Huang, Q. Shi, Y. Zhang, Y. Zhang, L. Song, and Y. Zhang, “Effects of porous nano-structure on the metal–insulator transition in VO2 films,” Appl. Surf. Sci. 259, 256–260 (2012).
[Crossref]

Y. Xu, W. Huang, Q. Shi, Y. Zhang, Y. Zhang, L. Song, and Y. Zhang, “Effects of porous nano-structure on the metal–insulator transition in VO2 films,” Appl. Surf. Sci. 259, 256–260 (2012).
[Crossref]

Zhang, Z. T.

L. T. Kang, Y. F. Gao, Z. T. Zhang, J. Du, C. X. Cao, Z. Chen, and H. J. Luo, “Effects of Annealing Parameters on Optical Properties of Thermochromic VO2 Films Prepared in Aqueous Solution,” J. Phys. Chem. C 114(4), 1901–1911 (2010).
[Crossref]

Zhou, Y.

J. Rensberg, S. Zhang, Y. Zhou, A. S. McLeod, C. Schwarz, M. Goldflam, M. Liu, J. Kerbusch, R. Nawrodt, S. Ramanathan, D. N. Basov, F. Capasso, C. Ronning, and M. A. Kats, “Active optical metasurfaces based on defect-engineered phase-transition materials,” Nano Lett. 16(2), 1050–1055 (2016).
[Crossref] [PubMed]

Y. Zhou and S. Ramanathan, “Heteroepitaxial VO2 thin films on GaN: Structure and metal-insulator transition characteristics,” J. Appl. Phys. 112(7), 074114 (2012).
[Crossref]

ACS Appl. Mater. Interfaces (1)

X. Wu, Z. Wu, C. Ji, H. Zhang, Y. Su, Z. Huang, J. Gou, X. Wei, J. Wang, and Y. Jiang, “THz transmittance and electrical properties tuning across IMT in vanadium dioxide films by Al Doping,” ACS Appl. Mater. Interfaces 8(18), 11842–11850 (2016).
[Crossref] [PubMed]

Appl. Phys. Lett. (4)

T. Driscoll, S. Palit, M. M. Qazilbash, M. Brehm, F. Keilmann, B.-G. Chae, S.-J. Yun, H.-T. Kim, S. Y. Cho, N. M. Jokerst, D. R. Smith, and D. N. Basov, “Dynamic tuning of an infrared hybrid-metamaterial resonance using vanadium dioxide,” Appl. Phys. Lett. 93(2), 024101 (2008).
[Crossref]

H.-T. Kim, B.-G. Chae, D.-H. Youn, G. Kim, K.-Y. Kang, S.-J. Lee, K. Kim, and Y.-S. Lim, “Raman study of electric-field-induced first-order metal-insulator transition in VO2-based devices,” Appl. Phys. Lett. 86(24), 242101 (2005).
[Crossref]

C. Chen, R. Wang, L. Shang, and C. Guo, “Gate-field-induced phase transitions in VO2: Monoclinic metal phase separation and switchable infrared reflections,” Appl. Phys. Lett. 93(17), 171101 (2008).
[Crossref]

M. F. Becker, A. B. Buckman, R. M. Walser, T. Lépine, P. Georges, and A. Brun, “Femtosecond laser excitation of the semiconductor-metal phase transition in VO2,” Appl. Phys. Lett. 65(12), 1507 (1994).
[Crossref]

Appl. Surf. Sci. (2)

Y. Xu, W. Huang, Q. Shi, Y. Zhang, Y. Zhang, L. Song, and Y. Zhang, “Effects of porous nano-structure on the metal–insulator transition in VO2 films,” Appl. Surf. Sci. 259, 256–260 (2012).
[Crossref]

H. Zhang, Z. Wu, R. Niu, X. Wu, Q. he, and Y. Jiang, “Metal–insulator transition properties of sputtered silicon-doped and un-doped vanadium dioxide films at terahertz range,” Appl. Surf. Sci. 331, 92–97 (2015).
[Crossref]

Chem. Mater. (1)

T. D. Manning, I. P. Parkin, M. E. Pemble, D. Sheel, and D. Vernardou, “Intelligent window coatings: Atmospheric pressure chemical vapor deposition of tungsten-doped vanadium dioxide,” Chem. Mater. 16(4), 744–749 (2004).
[Crossref]

J. Appl. Phys. (1)

Y. Zhou and S. Ramanathan, “Heteroepitaxial VO2 thin films on GaN: Structure and metal-insulator transition characteristics,” J. Appl. Phys. 112(7), 074114 (2012).
[Crossref]

J. Mater. Chem. (1)

T. D. Manning, I. P. Parkin, R. J. H. Clark, D. Sheel, M. E. Pemble, and D. Vernadou, “Intelligent window coatings: atmospheric pressure chemical vapour deposition of vanadium oxides,” J. Mater. Chem. 12(10), 2936–2939 (2002).
[Crossref]

J. Phys. Chem. C (1)

L. T. Kang, Y. F. Gao, Z. T. Zhang, J. Du, C. X. Cao, Z. Chen, and H. J. Luo, “Effects of Annealing Parameters on Optical Properties of Thermochromic VO2 Films Prepared in Aqueous Solution,” J. Phys. Chem. C 114(4), 1901–1911 (2010).
[Crossref]

J. Solid State Chem. (1)

M. Ghedira, H. Vincent, M. Marezio, and J. C. Launay, “Structural aspects of the metal-insulator transitions in V0.985Al0.015O2,” J. Solid State Chem. 22(4), 423–438 (1977).
[Crossref]

Nano Lett. (2)

J. Rensberg, S. Zhang, Y. Zhou, A. S. McLeod, C. Schwarz, M. Goldflam, M. Liu, J. Kerbusch, R. Nawrodt, S. Ramanathan, D. N. Basov, F. Capasso, C. Ronning, and M. A. Kats, “Active optical metasurfaces based on defect-engineered phase-transition materials,” Nano Lett. 16(2), 1050–1055 (2016).
[Crossref] [PubMed]

E. Strelcov, A. Tselev, I. Ivanov, J. D. Budai, J. Zhang, J. Z. Tischler, I. Kravchenko, S. V. Kalinin, and A. Kolmakov, “Doping-based stabilization of the M2 phase in free-standing VO2 nanostructures at room temperature,” Nano Lett. 12(12), 6198–6205 (2012).
[Crossref] [PubMed]

Nature (1)

M. Liu, H. Y. Hwang, H. Tao, A. C. Strikwerda, K. Fan, G. R. Keiser, A. J. Sternbach, K. G. West, S. Kittiwatanakul, J. Lu, S. A. Wolf, F. G. Omenetto, X. Zhang, K. A. Nelson, and R. D. Averitt, “Terahertz-field-induced insulator-to-metal transition in vanadium dioxide metamaterial,” Nature 487(7407), 345–348 (2012).
[Crossref] [PubMed]

Opt. Express (1)

Phys. Rev. B (2)

J. M. Atkin, S. Berweger, E. K. Chavez, M. B. Raschke, J. Cao, W. Fan, and J. Wu, “Strain and temperature dependence of the insulating phases of VO2 near the metal-insulator transition,” Phys. Rev. B 85(2), 020101 (2012).
[Crossref]

T. J. Huffman, P. Xu, M. M. Qazilbash, E. J. Walter, H. Krakauer, J. Wei, D. H. Cobden, H. A. Bechtel, M. C. Martin, G. L. Carr, and D. N. Basov, “Anisotropic infrared response of vanadium dioxide microcrystals,” Phys. Rev. B 87(11), 115121 (2013).
[Crossref]

Phys. Rev. B Condens. Matter (1)

J. C. Parker, “Raman scattering from VO2 single crystals: A study of the effects of surface oxidation,” Phys. Rev. B Condens. Matter 42(5), 3164–3166 (1990).
[Crossref] [PubMed]

Phys. Rev. Lett. (3)

A. S. Barker, H. W. Verleur, and H. J. Guggenheim, “Infrared Optical properties of vanadium dioxide above and below the transition temperature,” Phys. Rev. Lett. 17(26), 1286–1289 (1966).
[Crossref]

C. Kübler, H. Ehrke, R. Huber, R. Lopez, A. Halabica, R. F. Haglund, and A. Leitenstorfer, “Coherent structural dynamics and electronic correlations during an ultrafast insulator-to-metal phase transition in VO2.,” Phys. Rev. Lett. 99(11), 116401 (2007).
[Crossref] [PubMed]

F. Morin, “Oxides which show a metal-to-insulator transition at the Neel temperature,” Phys. Rev. Lett. 3(1), 34–36 (1959).
[Crossref]

Sci. Rep. (1)

Y. Ji, Y. Zhang, M. Gao, Z. Yuan, Y. Xia, C. Jin, B. Tao, C. Chen, Q. Jia, and Y. Lin, “Role of microstructures on the M1-M2 phase transition in epitaxial VO2 thin films,” Sci. Rep. 4, 4854 (2014).
[Crossref] [PubMed]

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Figures (4)

Fig. 1
Fig. 1 XPS spectrum (left) and surface morphology (right) of VO2 films.
Fig. 2
Fig. 2 The electrical IMT properties (a) and far-IR/THz transmittance (b) of VO2 films.
Fig. 3
Fig. 3 Raman spectra of undoped and Al-doped VO2 films.
Fig. 4
Fig. 4 The Mid-IR spectra of VO2 films at room temperature.

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