Abstract

Fluorine-doped tin oxides (FTO) were investigated for infrared plasmonic applications. Nano-crystalline FTO thin films were grown by the SPEED chemical-spray deposition method. Complex permittivity spectra were measured from 1.6 to 12 μm wavelength. These spectra were used to calculate materials parameters, which compared well with values from transport measurements, and to predict characteristics of surface plasmon polaritons (SPP). Reflectivity spectra for lamellar FTO gratings revealed SPP coupling resonances in good agreement with predictions. The FTO film studied here is well suited for plasmonic applications in the important 3-5 μm wavelength range.

© 2015 Optical Society of America

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  1. A. S. Barker., “Optical measurements of surface plasmons in gold,” Phys. Rev. B 8(12), 5418–5426 (1973).
    [Crossref]
  2. H. Raether, “Dispersion relation of surface plasmons on gold and silver gratings,” Opt. Commun. 42(4), 217–222 (1982).
    [Crossref]
  3. Z. Schlesinger and A. Sievers, “IR surface plasmon attenuation coefficients for Ag and Au films,” Solid State Commun. 43(9), 671–673 (1982).
    [Crossref]
  4. J. W. Cleary, G. Medhi, M. Shahzad, I. Rezadad, D. Maukonen, R. E. Peale, G. D. Boreman, S. Wentzell, and W. R. Buchwald, “Infrared surface polaritons on antimony,” Opt. Express 20(3), 2693–2705 (2012).
    [Crossref] [PubMed]
  5. F. Khalilzadeh-Rezaie, C. W. Smith, J. Nath, N. Nader, M. Shahzad, J. W. Cleary, I. Avrutsky, and R. E. Peale, “Infrared surface polaritons on bismuth,” J. Nanophotonics 9(1), 093792 (2015).
    [Crossref]
  6. R. Soref, R. E. Peale, and W. Buchwald, “Longwave plasmonics on doped silicon and silicides,” Opt. Express 16(9), 6507–6514 (2008).
    [Crossref] [PubMed]
  7. J. Cleary, R. Peale, D. Shelton, G. Boreman, C. Smith, M. Ishigami, R. Soref, A. Drehman, and W. Buchwald, “IR permittivities for silicides and doped silicon,” JOSA B 27(4), 730–734 (2010).
    [Crossref]
  8. M. Shahzad, G. Medhi, R. E. Peale, W. R. Buchwald, J. W. Cleary, R. Soref, G. D. Boreman, and O. Edwards, “Infrared surface plasmons on heavily doped silicon,” J. Appl. Phys. 110(12), 123105 (2011).
    [Crossref]
  9. R. Soref, J. Hendrickson, and J. W. Cleary, “Mid- to long-wavelength infrared plasmonic-photonics using heavily doped n-Ge/Ge and n-GeSn/GeSn heterostructures,” Opt. Express 20(4), 3814–3824 (2012).
    [Crossref] [PubMed]
  10. G. V. Naik, J. Kim, and A. Boltasseva, “Oxides and nitrides as alternative plasmonic materials in the optical range [Invited],” Opt. Mater. Express 1(6), 1090–1099 (2011).
    [Crossref]
  11. A. Boltasseva, “Empowering plasmonics and metamaterials technology with new material platforms,” MRS Bull. 39(05), 461–468 (2014).
    [Crossref]
  12. P. R. West, S. Ishii, G. V. Naik, N. K. Emani, V. M. Shalaev, and A. Boltasseva, “Searching for better plasmonic materials,” Laser Photonics Rev. 4(6), 795–808 (2010).
    [Crossref]
  13. A. Boltasseva and H. A. Atwater, “Materials science. Low-loss plasmonic metamaterials,” Science 331(6015), 290–291 (2011).
    [Crossref] [PubMed]
  14. S. Law, D. C. Adams, A. M. Taylor, and D. Wasserman, “Mid-infrared designer metals,” Opt. Express 20(11), 12155–12165 (2012).
    [Crossref] [PubMed]
  15. S. Law, L. Yu, and D. Wasserman, “Epitaxial growth of engineered metals for mid-infrared plasmonics,” J. Vac. Sci. Technol. B 31(3), 03C121 (2013).
    [Crossref]
  16. E. Krivoy, A. Vasudev, H. P. Nair, V. D. Dasika, R. Synowicki, R. Salas, S. J. Maddox, M. Brongersma, and S. Bank, “Tunable, epitaxial, semimetallic films for plasmonics,” in CLEO 2013, OSA Technical Digest (Optical Society of America, 2013), paper QTu1B. 7.
  17. S. Law, V. Podolskiy, and D. Wasserman, “Towards nano-scale photonics with micro-scale photons: the opportunities and challenges of mid-infrared plasmonics,” Nanophotonics 2(2), 103–130 (2013).
    [Crossref]
  18. G. V. Naik, V. M. Shalaev, and A. Boltasseva, “Alternative plasmonic materials: beyond gold and silver,” Adv. Mater. 25(24), 3264–3294 (2013).
    [Crossref] [PubMed]
  19. M. Noginov, L. Gu, J. Livenere, G. Zhu, A. Pradhan, R. Mundle, M. Bahoura, Y. A. Barnakov, and V. Podolskiy, “Transparent conductive oxides: Plasmonic materials for telecom wavelengths,” Appl. Phys. Lett. 99(2), 021101 (2011).
    [Crossref]
  20. S. Franzen, C. Rhodes, M. Cerruti, R. W. Gerber, M. Losego, J.-P. Maria, and D. E. Aspnes, “Plasmonic phenomena in indium tin oxide and ITO-Au hybrid films,” Opt. Lett. 34(18), 2867–2869 (2009).
    [Crossref] [PubMed]
  21. G. V. Naik, J. Liu, A. V. Kildishev, V. M. Shalaev, and A. Boltasseva, “Demonstration of Al:ZnO as a plasmonic component for near-infrared metamaterials,” Proc. Natl. Acad. Sci. U.S.A. 109(23), 8834–8838 (2012).
    [Crossref] [PubMed]
  22. L. Dominici, F. Michelotti, T. M. Brown, A. Reale, and A. Di Carlo, “Plasmon polaritons in the near infrared on fluorine doped tin oxide films,” Opt. Express 17(12), 10155–10167 (2009).
    [Crossref] [PubMed]
  23. H. L. Hartnagel, A. Dawar, A. Jain, and C. Jagadish, Semiconducting Transparent Thin Films (Institute of Physics Pub. Bristol, , 1995).
  24. S. Franzen, “Surface plasmon polaritons and screened plasma absorption in indium tin oxide compared to silver and gold,” J. Phys. Chem. C 112(15), 6027–6032 (2008).
    [Crossref]
  25. C. Rhodes, M. Cerruti, A. Efremenko, M. Losego, D. Aspnes, J.-P. Maria, and S. Franzen, “Dependence of plasmon polaritons on the thickness of indium tin oxide thin films,” J. Appl. Phys. 103(9), 093108 (2008).
    [Crossref]
  26. M. Abb, P. Albella, J. Aizpurua, and O. L. Muskens, “All-optical control of a single plasmonic nanoantenna-ITO hybrid,” Nano Lett. 11(6), 2457–2463 (2011).
    [Crossref] [PubMed]
  27. S. H. Brewer and S. Franzen, “Optical properties of indium tin oxide and fluorine-doped tin oxide surfaces: correlation of reflectivity, skin depth, and plasmon frequency with conductivity,” J. Alloys Compd. 338(1-2), 73–79 (2002).
    [Crossref]
  28. F. Khalilzadeh-Rezaie, I. O. Oladeji, G. T. Yusuf, J. Nath, N. Nader, S. Vangala, J. W. Cleary, W. V. Schoenfeld, and R. E. Peale, “Optical and electrical properties of tin oxide-based thin films prepared by streaming process for electrodeless electrochemical deposition,” in MRS Proceedings (Cambridge Univ Press, 2015), Vol 1805, pp. mrss15–2136423.
    [Crossref]
  29. I. O. Oladeji, “Film growth system and method,” (U.S. Patent No. 7,793,611 2010).
  30. F. Wooten, Optical Properties of Solids (Academic Press, 1972).
  31. L. D. Landau, E. M. Lifshitz, and L. P. Pitaevskii, Electrodynamics of Continuous Media 2nd edition (Elsevier Butterworth Heinemann, 1984), section 77.
  32. R. Heintz, Surface Plasmons on Smooth and Rough Surfaces and on Gratings, (Springer, 1986).
  33. P. Patnaik, Handbook of inorganic chemicals (McGraw-Hill New York, 2003).
  34. A. Rakhshani, Y. Makdisi, and H. Ramazaniyan, “Electronic and optical properties of fluorine-doped tin oxide films,” J. Appl. Phys. 83(2), 1049–1057 (1998).
    [Crossref]
  35. J. W. Cleary, G. Medhi, R. E. Peale, and W. R. Buchwald, “Long-wave infrared surface plasmon grating coupler,” Appl. Opt. 49(16), 3102–3110 (2010).
    [Crossref] [PubMed]
  36. J. W. Cleary, W. H. Streyer, N. Nader, S. Vangala, I. Avrutsky, B. Claflin, J. Hendrickson, D. Wasserman, R. E. Peale, W. Buchwald, and R. Soref, “Platinum germanides for mid- and long-wave infrared plasmonics,” Opt. Express 23(3), 3316–3326 (2015).
    [Crossref] [PubMed]

2015 (2)

F. Khalilzadeh-Rezaie, C. W. Smith, J. Nath, N. Nader, M. Shahzad, J. W. Cleary, I. Avrutsky, and R. E. Peale, “Infrared surface polaritons on bismuth,” J. Nanophotonics 9(1), 093792 (2015).
[Crossref]

J. W. Cleary, W. H. Streyer, N. Nader, S. Vangala, I. Avrutsky, B. Claflin, J. Hendrickson, D. Wasserman, R. E. Peale, W. Buchwald, and R. Soref, “Platinum germanides for mid- and long-wave infrared plasmonics,” Opt. Express 23(3), 3316–3326 (2015).
[Crossref] [PubMed]

2014 (1)

A. Boltasseva, “Empowering plasmonics and metamaterials technology with new material platforms,” MRS Bull. 39(05), 461–468 (2014).
[Crossref]

2013 (3)

S. Law, L. Yu, and D. Wasserman, “Epitaxial growth of engineered metals for mid-infrared plasmonics,” J. Vac. Sci. Technol. B 31(3), 03C121 (2013).
[Crossref]

S. Law, V. Podolskiy, and D. Wasserman, “Towards nano-scale photonics with micro-scale photons: the opportunities and challenges of mid-infrared plasmonics,” Nanophotonics 2(2), 103–130 (2013).
[Crossref]

G. V. Naik, V. M. Shalaev, and A. Boltasseva, “Alternative plasmonic materials: beyond gold and silver,” Adv. Mater. 25(24), 3264–3294 (2013).
[Crossref] [PubMed]

2012 (4)

2011 (5)

A. Boltasseva and H. A. Atwater, “Materials science. Low-loss plasmonic metamaterials,” Science 331(6015), 290–291 (2011).
[Crossref] [PubMed]

M. Abb, P. Albella, J. Aizpurua, and O. L. Muskens, “All-optical control of a single plasmonic nanoantenna-ITO hybrid,” Nano Lett. 11(6), 2457–2463 (2011).
[Crossref] [PubMed]

M. Shahzad, G. Medhi, R. E. Peale, W. R. Buchwald, J. W. Cleary, R. Soref, G. D. Boreman, and O. Edwards, “Infrared surface plasmons on heavily doped silicon,” J. Appl. Phys. 110(12), 123105 (2011).
[Crossref]

G. V. Naik, J. Kim, and A. Boltasseva, “Oxides and nitrides as alternative plasmonic materials in the optical range [Invited],” Opt. Mater. Express 1(6), 1090–1099 (2011).
[Crossref]

M. Noginov, L. Gu, J. Livenere, G. Zhu, A. Pradhan, R. Mundle, M. Bahoura, Y. A. Barnakov, and V. Podolskiy, “Transparent conductive oxides: Plasmonic materials for telecom wavelengths,” Appl. Phys. Lett. 99(2), 021101 (2011).
[Crossref]

2010 (3)

P. R. West, S. Ishii, G. V. Naik, N. K. Emani, V. M. Shalaev, and A. Boltasseva, “Searching for better plasmonic materials,” Laser Photonics Rev. 4(6), 795–808 (2010).
[Crossref]

J. Cleary, R. Peale, D. Shelton, G. Boreman, C. Smith, M. Ishigami, R. Soref, A. Drehman, and W. Buchwald, “IR permittivities for silicides and doped silicon,” JOSA B 27(4), 730–734 (2010).
[Crossref]

J. W. Cleary, G. Medhi, R. E. Peale, and W. R. Buchwald, “Long-wave infrared surface plasmon grating coupler,” Appl. Opt. 49(16), 3102–3110 (2010).
[Crossref] [PubMed]

2009 (2)

2008 (3)

R. Soref, R. E. Peale, and W. Buchwald, “Longwave plasmonics on doped silicon and silicides,” Opt. Express 16(9), 6507–6514 (2008).
[Crossref] [PubMed]

S. Franzen, “Surface plasmon polaritons and screened plasma absorption in indium tin oxide compared to silver and gold,” J. Phys. Chem. C 112(15), 6027–6032 (2008).
[Crossref]

C. Rhodes, M. Cerruti, A. Efremenko, M. Losego, D. Aspnes, J.-P. Maria, and S. Franzen, “Dependence of plasmon polaritons on the thickness of indium tin oxide thin films,” J. Appl. Phys. 103(9), 093108 (2008).
[Crossref]

2002 (1)

S. H. Brewer and S. Franzen, “Optical properties of indium tin oxide and fluorine-doped tin oxide surfaces: correlation of reflectivity, skin depth, and plasmon frequency with conductivity,” J. Alloys Compd. 338(1-2), 73–79 (2002).
[Crossref]

1998 (1)

A. Rakhshani, Y. Makdisi, and H. Ramazaniyan, “Electronic and optical properties of fluorine-doped tin oxide films,” J. Appl. Phys. 83(2), 1049–1057 (1998).
[Crossref]

1982 (2)

H. Raether, “Dispersion relation of surface plasmons on gold and silver gratings,” Opt. Commun. 42(4), 217–222 (1982).
[Crossref]

Z. Schlesinger and A. Sievers, “IR surface plasmon attenuation coefficients for Ag and Au films,” Solid State Commun. 43(9), 671–673 (1982).
[Crossref]

1973 (1)

A. S. Barker., “Optical measurements of surface plasmons in gold,” Phys. Rev. B 8(12), 5418–5426 (1973).
[Crossref]

Abb, M.

M. Abb, P. Albella, J. Aizpurua, and O. L. Muskens, “All-optical control of a single plasmonic nanoantenna-ITO hybrid,” Nano Lett. 11(6), 2457–2463 (2011).
[Crossref] [PubMed]

Adams, D. C.

Aizpurua, J.

M. Abb, P. Albella, J. Aizpurua, and O. L. Muskens, “All-optical control of a single plasmonic nanoantenna-ITO hybrid,” Nano Lett. 11(6), 2457–2463 (2011).
[Crossref] [PubMed]

Albella, P.

M. Abb, P. Albella, J. Aizpurua, and O. L. Muskens, “All-optical control of a single plasmonic nanoantenna-ITO hybrid,” Nano Lett. 11(6), 2457–2463 (2011).
[Crossref] [PubMed]

Aspnes, D.

C. Rhodes, M. Cerruti, A. Efremenko, M. Losego, D. Aspnes, J.-P. Maria, and S. Franzen, “Dependence of plasmon polaritons on the thickness of indium tin oxide thin films,” J. Appl. Phys. 103(9), 093108 (2008).
[Crossref]

Aspnes, D. E.

Atwater, H. A.

A. Boltasseva and H. A. Atwater, “Materials science. Low-loss plasmonic metamaterials,” Science 331(6015), 290–291 (2011).
[Crossref] [PubMed]

Avrutsky, I.

F. Khalilzadeh-Rezaie, C. W. Smith, J. Nath, N. Nader, M. Shahzad, J. W. Cleary, I. Avrutsky, and R. E. Peale, “Infrared surface polaritons on bismuth,” J. Nanophotonics 9(1), 093792 (2015).
[Crossref]

J. W. Cleary, W. H. Streyer, N. Nader, S. Vangala, I. Avrutsky, B. Claflin, J. Hendrickson, D. Wasserman, R. E. Peale, W. Buchwald, and R. Soref, “Platinum germanides for mid- and long-wave infrared plasmonics,” Opt. Express 23(3), 3316–3326 (2015).
[Crossref] [PubMed]

Bahoura, M.

M. Noginov, L. Gu, J. Livenere, G. Zhu, A. Pradhan, R. Mundle, M. Bahoura, Y. A. Barnakov, and V. Podolskiy, “Transparent conductive oxides: Plasmonic materials for telecom wavelengths,” Appl. Phys. Lett. 99(2), 021101 (2011).
[Crossref]

Barker, A. S.

A. S. Barker., “Optical measurements of surface plasmons in gold,” Phys. Rev. B 8(12), 5418–5426 (1973).
[Crossref]

Barnakov, Y. A.

M. Noginov, L. Gu, J. Livenere, G. Zhu, A. Pradhan, R. Mundle, M. Bahoura, Y. A. Barnakov, and V. Podolskiy, “Transparent conductive oxides: Plasmonic materials for telecom wavelengths,” Appl. Phys. Lett. 99(2), 021101 (2011).
[Crossref]

Boltasseva, A.

A. Boltasseva, “Empowering plasmonics and metamaterials technology with new material platforms,” MRS Bull. 39(05), 461–468 (2014).
[Crossref]

G. V. Naik, V. M. Shalaev, and A. Boltasseva, “Alternative plasmonic materials: beyond gold and silver,” Adv. Mater. 25(24), 3264–3294 (2013).
[Crossref] [PubMed]

G. V. Naik, J. Liu, A. V. Kildishev, V. M. Shalaev, and A. Boltasseva, “Demonstration of Al:ZnO as a plasmonic component for near-infrared metamaterials,” Proc. Natl. Acad. Sci. U.S.A. 109(23), 8834–8838 (2012).
[Crossref] [PubMed]

A. Boltasseva and H. A. Atwater, “Materials science. Low-loss plasmonic metamaterials,” Science 331(6015), 290–291 (2011).
[Crossref] [PubMed]

G. V. Naik, J. Kim, and A. Boltasseva, “Oxides and nitrides as alternative plasmonic materials in the optical range [Invited],” Opt. Mater. Express 1(6), 1090–1099 (2011).
[Crossref]

P. R. West, S. Ishii, G. V. Naik, N. K. Emani, V. M. Shalaev, and A. Boltasseva, “Searching for better plasmonic materials,” Laser Photonics Rev. 4(6), 795–808 (2010).
[Crossref]

Boreman, G.

J. Cleary, R. Peale, D. Shelton, G. Boreman, C. Smith, M. Ishigami, R. Soref, A. Drehman, and W. Buchwald, “IR permittivities for silicides and doped silicon,” JOSA B 27(4), 730–734 (2010).
[Crossref]

Boreman, G. D.

J. W. Cleary, G. Medhi, M. Shahzad, I. Rezadad, D. Maukonen, R. E. Peale, G. D. Boreman, S. Wentzell, and W. R. Buchwald, “Infrared surface polaritons on antimony,” Opt. Express 20(3), 2693–2705 (2012).
[Crossref] [PubMed]

M. Shahzad, G. Medhi, R. E. Peale, W. R. Buchwald, J. W. Cleary, R. Soref, G. D. Boreman, and O. Edwards, “Infrared surface plasmons on heavily doped silicon,” J. Appl. Phys. 110(12), 123105 (2011).
[Crossref]

Brewer, S. H.

S. H. Brewer and S. Franzen, “Optical properties of indium tin oxide and fluorine-doped tin oxide surfaces: correlation of reflectivity, skin depth, and plasmon frequency with conductivity,” J. Alloys Compd. 338(1-2), 73–79 (2002).
[Crossref]

Brown, T. M.

Buchwald, W.

Buchwald, W. R.

Cerruti, M.

S. Franzen, C. Rhodes, M. Cerruti, R. W. Gerber, M. Losego, J.-P. Maria, and D. E. Aspnes, “Plasmonic phenomena in indium tin oxide and ITO-Au hybrid films,” Opt. Lett. 34(18), 2867–2869 (2009).
[Crossref] [PubMed]

C. Rhodes, M. Cerruti, A. Efremenko, M. Losego, D. Aspnes, J.-P. Maria, and S. Franzen, “Dependence of plasmon polaritons on the thickness of indium tin oxide thin films,” J. Appl. Phys. 103(9), 093108 (2008).
[Crossref]

Claflin, B.

Cleary, J.

J. Cleary, R. Peale, D. Shelton, G. Boreman, C. Smith, M. Ishigami, R. Soref, A. Drehman, and W. Buchwald, “IR permittivities for silicides and doped silicon,” JOSA B 27(4), 730–734 (2010).
[Crossref]

Cleary, J. W.

Di Carlo, A.

Dominici, L.

Drehman, A.

J. Cleary, R. Peale, D. Shelton, G. Boreman, C. Smith, M. Ishigami, R. Soref, A. Drehman, and W. Buchwald, “IR permittivities for silicides and doped silicon,” JOSA B 27(4), 730–734 (2010).
[Crossref]

Edwards, O.

M. Shahzad, G. Medhi, R. E. Peale, W. R. Buchwald, J. W. Cleary, R. Soref, G. D. Boreman, and O. Edwards, “Infrared surface plasmons on heavily doped silicon,” J. Appl. Phys. 110(12), 123105 (2011).
[Crossref]

Efremenko, A.

C. Rhodes, M. Cerruti, A. Efremenko, M. Losego, D. Aspnes, J.-P. Maria, and S. Franzen, “Dependence of plasmon polaritons on the thickness of indium tin oxide thin films,” J. Appl. Phys. 103(9), 093108 (2008).
[Crossref]

Emani, N. K.

P. R. West, S. Ishii, G. V. Naik, N. K. Emani, V. M. Shalaev, and A. Boltasseva, “Searching for better plasmonic materials,” Laser Photonics Rev. 4(6), 795–808 (2010).
[Crossref]

Franzen, S.

S. Franzen, C. Rhodes, M. Cerruti, R. W. Gerber, M. Losego, J.-P. Maria, and D. E. Aspnes, “Plasmonic phenomena in indium tin oxide and ITO-Au hybrid films,” Opt. Lett. 34(18), 2867–2869 (2009).
[Crossref] [PubMed]

C. Rhodes, M. Cerruti, A. Efremenko, M. Losego, D. Aspnes, J.-P. Maria, and S. Franzen, “Dependence of plasmon polaritons on the thickness of indium tin oxide thin films,” J. Appl. Phys. 103(9), 093108 (2008).
[Crossref]

S. Franzen, “Surface plasmon polaritons and screened plasma absorption in indium tin oxide compared to silver and gold,” J. Phys. Chem. C 112(15), 6027–6032 (2008).
[Crossref]

S. H. Brewer and S. Franzen, “Optical properties of indium tin oxide and fluorine-doped tin oxide surfaces: correlation of reflectivity, skin depth, and plasmon frequency with conductivity,” J. Alloys Compd. 338(1-2), 73–79 (2002).
[Crossref]

Gerber, R. W.

Gu, L.

M. Noginov, L. Gu, J. Livenere, G. Zhu, A. Pradhan, R. Mundle, M. Bahoura, Y. A. Barnakov, and V. Podolskiy, “Transparent conductive oxides: Plasmonic materials for telecom wavelengths,” Appl. Phys. Lett. 99(2), 021101 (2011).
[Crossref]

Hendrickson, J.

Ishigami, M.

J. Cleary, R. Peale, D. Shelton, G. Boreman, C. Smith, M. Ishigami, R. Soref, A. Drehman, and W. Buchwald, “IR permittivities for silicides and doped silicon,” JOSA B 27(4), 730–734 (2010).
[Crossref]

Ishii, S.

P. R. West, S. Ishii, G. V. Naik, N. K. Emani, V. M. Shalaev, and A. Boltasseva, “Searching for better plasmonic materials,” Laser Photonics Rev. 4(6), 795–808 (2010).
[Crossref]

Khalilzadeh-Rezaie, F.

F. Khalilzadeh-Rezaie, C. W. Smith, J. Nath, N. Nader, M. Shahzad, J. W. Cleary, I. Avrutsky, and R. E. Peale, “Infrared surface polaritons on bismuth,” J. Nanophotonics 9(1), 093792 (2015).
[Crossref]

Kildishev, A. V.

G. V. Naik, J. Liu, A. V. Kildishev, V. M. Shalaev, and A. Boltasseva, “Demonstration of Al:ZnO as a plasmonic component for near-infrared metamaterials,” Proc. Natl. Acad. Sci. U.S.A. 109(23), 8834–8838 (2012).
[Crossref] [PubMed]

Kim, J.

Law, S.

S. Law, L. Yu, and D. Wasserman, “Epitaxial growth of engineered metals for mid-infrared plasmonics,” J. Vac. Sci. Technol. B 31(3), 03C121 (2013).
[Crossref]

S. Law, V. Podolskiy, and D. Wasserman, “Towards nano-scale photonics with micro-scale photons: the opportunities and challenges of mid-infrared plasmonics,” Nanophotonics 2(2), 103–130 (2013).
[Crossref]

S. Law, D. C. Adams, A. M. Taylor, and D. Wasserman, “Mid-infrared designer metals,” Opt. Express 20(11), 12155–12165 (2012).
[Crossref] [PubMed]

Liu, J.

G. V. Naik, J. Liu, A. V. Kildishev, V. M. Shalaev, and A. Boltasseva, “Demonstration of Al:ZnO as a plasmonic component for near-infrared metamaterials,” Proc. Natl. Acad. Sci. U.S.A. 109(23), 8834–8838 (2012).
[Crossref] [PubMed]

Livenere, J.

M. Noginov, L. Gu, J. Livenere, G. Zhu, A. Pradhan, R. Mundle, M. Bahoura, Y. A. Barnakov, and V. Podolskiy, “Transparent conductive oxides: Plasmonic materials for telecom wavelengths,” Appl. Phys. Lett. 99(2), 021101 (2011).
[Crossref]

Losego, M.

S. Franzen, C. Rhodes, M. Cerruti, R. W. Gerber, M. Losego, J.-P. Maria, and D. E. Aspnes, “Plasmonic phenomena in indium tin oxide and ITO-Au hybrid films,” Opt. Lett. 34(18), 2867–2869 (2009).
[Crossref] [PubMed]

C. Rhodes, M. Cerruti, A. Efremenko, M. Losego, D. Aspnes, J.-P. Maria, and S. Franzen, “Dependence of plasmon polaritons on the thickness of indium tin oxide thin films,” J. Appl. Phys. 103(9), 093108 (2008).
[Crossref]

Makdisi, Y.

A. Rakhshani, Y. Makdisi, and H. Ramazaniyan, “Electronic and optical properties of fluorine-doped tin oxide films,” J. Appl. Phys. 83(2), 1049–1057 (1998).
[Crossref]

Maria, J.-P.

S. Franzen, C. Rhodes, M. Cerruti, R. W. Gerber, M. Losego, J.-P. Maria, and D. E. Aspnes, “Plasmonic phenomena in indium tin oxide and ITO-Au hybrid films,” Opt. Lett. 34(18), 2867–2869 (2009).
[Crossref] [PubMed]

C. Rhodes, M. Cerruti, A. Efremenko, M. Losego, D. Aspnes, J.-P. Maria, and S. Franzen, “Dependence of plasmon polaritons on the thickness of indium tin oxide thin films,” J. Appl. Phys. 103(9), 093108 (2008).
[Crossref]

Maukonen, D.

Medhi, G.

Michelotti, F.

Mundle, R.

M. Noginov, L. Gu, J. Livenere, G. Zhu, A. Pradhan, R. Mundle, M. Bahoura, Y. A. Barnakov, and V. Podolskiy, “Transparent conductive oxides: Plasmonic materials for telecom wavelengths,” Appl. Phys. Lett. 99(2), 021101 (2011).
[Crossref]

Muskens, O. L.

M. Abb, P. Albella, J. Aizpurua, and O. L. Muskens, “All-optical control of a single plasmonic nanoantenna-ITO hybrid,” Nano Lett. 11(6), 2457–2463 (2011).
[Crossref] [PubMed]

Nader, N.

J. W. Cleary, W. H. Streyer, N. Nader, S. Vangala, I. Avrutsky, B. Claflin, J. Hendrickson, D. Wasserman, R. E. Peale, W. Buchwald, and R. Soref, “Platinum germanides for mid- and long-wave infrared plasmonics,” Opt. Express 23(3), 3316–3326 (2015).
[Crossref] [PubMed]

F. Khalilzadeh-Rezaie, C. W. Smith, J. Nath, N. Nader, M. Shahzad, J. W. Cleary, I. Avrutsky, and R. E. Peale, “Infrared surface polaritons on bismuth,” J. Nanophotonics 9(1), 093792 (2015).
[Crossref]

Naik, G. V.

G. V. Naik, V. M. Shalaev, and A. Boltasseva, “Alternative plasmonic materials: beyond gold and silver,” Adv. Mater. 25(24), 3264–3294 (2013).
[Crossref] [PubMed]

G. V. Naik, J. Liu, A. V. Kildishev, V. M. Shalaev, and A. Boltasseva, “Demonstration of Al:ZnO as a plasmonic component for near-infrared metamaterials,” Proc. Natl. Acad. Sci. U.S.A. 109(23), 8834–8838 (2012).
[Crossref] [PubMed]

G. V. Naik, J. Kim, and A. Boltasseva, “Oxides and nitrides as alternative plasmonic materials in the optical range [Invited],” Opt. Mater. Express 1(6), 1090–1099 (2011).
[Crossref]

P. R. West, S. Ishii, G. V. Naik, N. K. Emani, V. M. Shalaev, and A. Boltasseva, “Searching for better plasmonic materials,” Laser Photonics Rev. 4(6), 795–808 (2010).
[Crossref]

Nath, J.

F. Khalilzadeh-Rezaie, C. W. Smith, J. Nath, N. Nader, M. Shahzad, J. W. Cleary, I. Avrutsky, and R. E. Peale, “Infrared surface polaritons on bismuth,” J. Nanophotonics 9(1), 093792 (2015).
[Crossref]

Noginov, M.

M. Noginov, L. Gu, J. Livenere, G. Zhu, A. Pradhan, R. Mundle, M. Bahoura, Y. A. Barnakov, and V. Podolskiy, “Transparent conductive oxides: Plasmonic materials for telecom wavelengths,” Appl. Phys. Lett. 99(2), 021101 (2011).
[Crossref]

Peale, R.

J. Cleary, R. Peale, D. Shelton, G. Boreman, C. Smith, M. Ishigami, R. Soref, A. Drehman, and W. Buchwald, “IR permittivities for silicides and doped silicon,” JOSA B 27(4), 730–734 (2010).
[Crossref]

Peale, R. E.

Podolskiy, V.

S. Law, V. Podolskiy, and D. Wasserman, “Towards nano-scale photonics with micro-scale photons: the opportunities and challenges of mid-infrared plasmonics,” Nanophotonics 2(2), 103–130 (2013).
[Crossref]

M. Noginov, L. Gu, J. Livenere, G. Zhu, A. Pradhan, R. Mundle, M. Bahoura, Y. A. Barnakov, and V. Podolskiy, “Transparent conductive oxides: Plasmonic materials for telecom wavelengths,” Appl. Phys. Lett. 99(2), 021101 (2011).
[Crossref]

Pradhan, A.

M. Noginov, L. Gu, J. Livenere, G. Zhu, A. Pradhan, R. Mundle, M. Bahoura, Y. A. Barnakov, and V. Podolskiy, “Transparent conductive oxides: Plasmonic materials for telecom wavelengths,” Appl. Phys. Lett. 99(2), 021101 (2011).
[Crossref]

Raether, H.

H. Raether, “Dispersion relation of surface plasmons on gold and silver gratings,” Opt. Commun. 42(4), 217–222 (1982).
[Crossref]

Rakhshani, A.

A. Rakhshani, Y. Makdisi, and H. Ramazaniyan, “Electronic and optical properties of fluorine-doped tin oxide films,” J. Appl. Phys. 83(2), 1049–1057 (1998).
[Crossref]

Ramazaniyan, H.

A. Rakhshani, Y. Makdisi, and H. Ramazaniyan, “Electronic and optical properties of fluorine-doped tin oxide films,” J. Appl. Phys. 83(2), 1049–1057 (1998).
[Crossref]

Reale, A.

Rezadad, I.

Rhodes, C.

S. Franzen, C. Rhodes, M. Cerruti, R. W. Gerber, M. Losego, J.-P. Maria, and D. E. Aspnes, “Plasmonic phenomena in indium tin oxide and ITO-Au hybrid films,” Opt. Lett. 34(18), 2867–2869 (2009).
[Crossref] [PubMed]

C. Rhodes, M. Cerruti, A. Efremenko, M. Losego, D. Aspnes, J.-P. Maria, and S. Franzen, “Dependence of plasmon polaritons on the thickness of indium tin oxide thin films,” J. Appl. Phys. 103(9), 093108 (2008).
[Crossref]

Schlesinger, Z.

Z. Schlesinger and A. Sievers, “IR surface plasmon attenuation coefficients for Ag and Au films,” Solid State Commun. 43(9), 671–673 (1982).
[Crossref]

Shahzad, M.

F. Khalilzadeh-Rezaie, C. W. Smith, J. Nath, N. Nader, M. Shahzad, J. W. Cleary, I. Avrutsky, and R. E. Peale, “Infrared surface polaritons on bismuth,” J. Nanophotonics 9(1), 093792 (2015).
[Crossref]

J. W. Cleary, G. Medhi, M. Shahzad, I. Rezadad, D. Maukonen, R. E. Peale, G. D. Boreman, S. Wentzell, and W. R. Buchwald, “Infrared surface polaritons on antimony,” Opt. Express 20(3), 2693–2705 (2012).
[Crossref] [PubMed]

M. Shahzad, G. Medhi, R. E. Peale, W. R. Buchwald, J. W. Cleary, R. Soref, G. D. Boreman, and O. Edwards, “Infrared surface plasmons on heavily doped silicon,” J. Appl. Phys. 110(12), 123105 (2011).
[Crossref]

Shalaev, V. M.

G. V. Naik, V. M. Shalaev, and A. Boltasseva, “Alternative plasmonic materials: beyond gold and silver,” Adv. Mater. 25(24), 3264–3294 (2013).
[Crossref] [PubMed]

G. V. Naik, J. Liu, A. V. Kildishev, V. M. Shalaev, and A. Boltasseva, “Demonstration of Al:ZnO as a plasmonic component for near-infrared metamaterials,” Proc. Natl. Acad. Sci. U.S.A. 109(23), 8834–8838 (2012).
[Crossref] [PubMed]

P. R. West, S. Ishii, G. V. Naik, N. K. Emani, V. M. Shalaev, and A. Boltasseva, “Searching for better plasmonic materials,” Laser Photonics Rev. 4(6), 795–808 (2010).
[Crossref]

Shelton, D.

J. Cleary, R. Peale, D. Shelton, G. Boreman, C. Smith, M. Ishigami, R. Soref, A. Drehman, and W. Buchwald, “IR permittivities for silicides and doped silicon,” JOSA B 27(4), 730–734 (2010).
[Crossref]

Sievers, A.

Z. Schlesinger and A. Sievers, “IR surface plasmon attenuation coefficients for Ag and Au films,” Solid State Commun. 43(9), 671–673 (1982).
[Crossref]

Smith, C.

J. Cleary, R. Peale, D. Shelton, G. Boreman, C. Smith, M. Ishigami, R. Soref, A. Drehman, and W. Buchwald, “IR permittivities for silicides and doped silicon,” JOSA B 27(4), 730–734 (2010).
[Crossref]

Smith, C. W.

F. Khalilzadeh-Rezaie, C. W. Smith, J. Nath, N. Nader, M. Shahzad, J. W. Cleary, I. Avrutsky, and R. E. Peale, “Infrared surface polaritons on bismuth,” J. Nanophotonics 9(1), 093792 (2015).
[Crossref]

Soref, R.

Streyer, W. H.

Taylor, A. M.

Vangala, S.

Wasserman, D.

J. W. Cleary, W. H. Streyer, N. Nader, S. Vangala, I. Avrutsky, B. Claflin, J. Hendrickson, D. Wasserman, R. E. Peale, W. Buchwald, and R. Soref, “Platinum germanides for mid- and long-wave infrared plasmonics,” Opt. Express 23(3), 3316–3326 (2015).
[Crossref] [PubMed]

S. Law, V. Podolskiy, and D. Wasserman, “Towards nano-scale photonics with micro-scale photons: the opportunities and challenges of mid-infrared plasmonics,” Nanophotonics 2(2), 103–130 (2013).
[Crossref]

S. Law, L. Yu, and D. Wasserman, “Epitaxial growth of engineered metals for mid-infrared plasmonics,” J. Vac. Sci. Technol. B 31(3), 03C121 (2013).
[Crossref]

S. Law, D. C. Adams, A. M. Taylor, and D. Wasserman, “Mid-infrared designer metals,” Opt. Express 20(11), 12155–12165 (2012).
[Crossref] [PubMed]

Wentzell, S.

West, P. R.

P. R. West, S. Ishii, G. V. Naik, N. K. Emani, V. M. Shalaev, and A. Boltasseva, “Searching for better plasmonic materials,” Laser Photonics Rev. 4(6), 795–808 (2010).
[Crossref]

Yu, L.

S. Law, L. Yu, and D. Wasserman, “Epitaxial growth of engineered metals for mid-infrared plasmonics,” J. Vac. Sci. Technol. B 31(3), 03C121 (2013).
[Crossref]

Zhu, G.

M. Noginov, L. Gu, J. Livenere, G. Zhu, A. Pradhan, R. Mundle, M. Bahoura, Y. A. Barnakov, and V. Podolskiy, “Transparent conductive oxides: Plasmonic materials for telecom wavelengths,” Appl. Phys. Lett. 99(2), 021101 (2011).
[Crossref]

Adv. Mater. (1)

G. V. Naik, V. M. Shalaev, and A. Boltasseva, “Alternative plasmonic materials: beyond gold and silver,” Adv. Mater. 25(24), 3264–3294 (2013).
[Crossref] [PubMed]

Appl. Opt. (1)

Appl. Phys. Lett. (1)

M. Noginov, L. Gu, J. Livenere, G. Zhu, A. Pradhan, R. Mundle, M. Bahoura, Y. A. Barnakov, and V. Podolskiy, “Transparent conductive oxides: Plasmonic materials for telecom wavelengths,” Appl. Phys. Lett. 99(2), 021101 (2011).
[Crossref]

J. Alloys Compd. (1)

S. H. Brewer and S. Franzen, “Optical properties of indium tin oxide and fluorine-doped tin oxide surfaces: correlation of reflectivity, skin depth, and plasmon frequency with conductivity,” J. Alloys Compd. 338(1-2), 73–79 (2002).
[Crossref]

J. Appl. Phys. (3)

A. Rakhshani, Y. Makdisi, and H. Ramazaniyan, “Electronic and optical properties of fluorine-doped tin oxide films,” J. Appl. Phys. 83(2), 1049–1057 (1998).
[Crossref]

C. Rhodes, M. Cerruti, A. Efremenko, M. Losego, D. Aspnes, J.-P. Maria, and S. Franzen, “Dependence of plasmon polaritons on the thickness of indium tin oxide thin films,” J. Appl. Phys. 103(9), 093108 (2008).
[Crossref]

M. Shahzad, G. Medhi, R. E. Peale, W. R. Buchwald, J. W. Cleary, R. Soref, G. D. Boreman, and O. Edwards, “Infrared surface plasmons on heavily doped silicon,” J. Appl. Phys. 110(12), 123105 (2011).
[Crossref]

J. Nanophotonics (1)

F. Khalilzadeh-Rezaie, C. W. Smith, J. Nath, N. Nader, M. Shahzad, J. W. Cleary, I. Avrutsky, and R. E. Peale, “Infrared surface polaritons on bismuth,” J. Nanophotonics 9(1), 093792 (2015).
[Crossref]

J. Phys. Chem. C (1)

S. Franzen, “Surface plasmon polaritons and screened plasma absorption in indium tin oxide compared to silver and gold,” J. Phys. Chem. C 112(15), 6027–6032 (2008).
[Crossref]

J. Vac. Sci. Technol. B (1)

S. Law, L. Yu, and D. Wasserman, “Epitaxial growth of engineered metals for mid-infrared plasmonics,” J. Vac. Sci. Technol. B 31(3), 03C121 (2013).
[Crossref]

JOSA B (1)

J. Cleary, R. Peale, D. Shelton, G. Boreman, C. Smith, M. Ishigami, R. Soref, A. Drehman, and W. Buchwald, “IR permittivities for silicides and doped silicon,” JOSA B 27(4), 730–734 (2010).
[Crossref]

Laser Photonics Rev. (1)

P. R. West, S. Ishii, G. V. Naik, N. K. Emani, V. M. Shalaev, and A. Boltasseva, “Searching for better plasmonic materials,” Laser Photonics Rev. 4(6), 795–808 (2010).
[Crossref]

MRS Bull. (1)

A. Boltasseva, “Empowering plasmonics and metamaterials technology with new material platforms,” MRS Bull. 39(05), 461–468 (2014).
[Crossref]

Nano Lett. (1)

M. Abb, P. Albella, J. Aizpurua, and O. L. Muskens, “All-optical control of a single plasmonic nanoantenna-ITO hybrid,” Nano Lett. 11(6), 2457–2463 (2011).
[Crossref] [PubMed]

Nanophotonics (1)

S. Law, V. Podolskiy, and D. Wasserman, “Towards nano-scale photonics with micro-scale photons: the opportunities and challenges of mid-infrared plasmonics,” Nanophotonics 2(2), 103–130 (2013).
[Crossref]

Opt. Commun. (1)

H. Raether, “Dispersion relation of surface plasmons on gold and silver gratings,” Opt. Commun. 42(4), 217–222 (1982).
[Crossref]

Opt. Express (6)

Opt. Lett. (1)

Opt. Mater. Express (1)

Phys. Rev. B (1)

A. S. Barker., “Optical measurements of surface plasmons in gold,” Phys. Rev. B 8(12), 5418–5426 (1973).
[Crossref]

Proc. Natl. Acad. Sci. U.S.A. (1)

G. V. Naik, J. Liu, A. V. Kildishev, V. M. Shalaev, and A. Boltasseva, “Demonstration of Al:ZnO as a plasmonic component for near-infrared metamaterials,” Proc. Natl. Acad. Sci. U.S.A. 109(23), 8834–8838 (2012).
[Crossref] [PubMed]

Science (1)

A. Boltasseva and H. A. Atwater, “Materials science. Low-loss plasmonic metamaterials,” Science 331(6015), 290–291 (2011).
[Crossref] [PubMed]

Solid State Commun. (1)

Z. Schlesinger and A. Sievers, “IR surface plasmon attenuation coefficients for Ag and Au films,” Solid State Commun. 43(9), 671–673 (1982).
[Crossref]

Other (8)

E. Krivoy, A. Vasudev, H. P. Nair, V. D. Dasika, R. Synowicki, R. Salas, S. J. Maddox, M. Brongersma, and S. Bank, “Tunable, epitaxial, semimetallic films for plasmonics,” in CLEO 2013, OSA Technical Digest (Optical Society of America, 2013), paper QTu1B. 7.

H. L. Hartnagel, A. Dawar, A. Jain, and C. Jagadish, Semiconducting Transparent Thin Films (Institute of Physics Pub. Bristol, , 1995).

F. Khalilzadeh-Rezaie, I. O. Oladeji, G. T. Yusuf, J. Nath, N. Nader, S. Vangala, J. W. Cleary, W. V. Schoenfeld, and R. E. Peale, “Optical and electrical properties of tin oxide-based thin films prepared by streaming process for electrodeless electrochemical deposition,” in MRS Proceedings (Cambridge Univ Press, 2015), Vol 1805, pp. mrss15–2136423.
[Crossref]

I. O. Oladeji, “Film growth system and method,” (U.S. Patent No. 7,793,611 2010).

F. Wooten, Optical Properties of Solids (Academic Press, 1972).

L. D. Landau, E. M. Lifshitz, and L. P. Pitaevskii, Electrodynamics of Continuous Media 2nd edition (Elsevier Butterworth Heinemann, 1984), section 77.

R. Heintz, Surface Plasmons on Smooth and Rough Surfaces and on Gratings, (Springer, 1986).

P. Patnaik, Handbook of inorganic chemicals (McGraw-Hill New York, 2003).

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Figures (5)

Fig. 1
Fig. 1

SEM image of SPEED-grown FTO film.

Fig. 2
Fig. 2

(a) Infrared complex permittivity spectrum of SPEED-grown FTO film. The Drude fit is the dashed line. (b) Characteristic length spectra in FTO: SPP penetration depths into dielectric (Ld), conductor (Lc), IR skin depth (δ) and SPP intensity propagation length (Lx).

Fig. 3
Fig. 3

Scanning electron microscope images of FTO-coated silicon lamellar grating. (a) Top view. (b) Side view. (The granular medium above the grating is the mounting epoxy used in polishing.)

Fig. 4
Fig. 4

Normal incidence reflectivity spectra for TM and TE polarizations normally incident on an FTO grating with (a) p = 10 µm (b) p = 7.5 µm. The Rcal curve in plot (a) gives the Fresnel reflectance calculated for unstructured FTO from the measured permittivity spectrum.

Fig. 5
Fig. 5

Angular reflectance spectra for different wavelengths of TM-polarized incident beam.

Tables (1)

Tables Icon

Table 1 Drude parameters for FTO films.

Equations (10)

Equations on this page are rendered with MathJax. Learn more.

ε= ε ( ω p /ω ) 2 1+i/ ωτ , ω p 2 = n e 2 m ε 0 ,
ε ' = ε ( ω p /ω ) 2 1+ (ωτ) 2
ε " = ( ω p /ω ) 2 ωτ 1+ (ωτ) 2
ε"= σ ε 0 ω
σ= ε 0 ω p 2 τ
L d,c = [ 2π λ Re( ε d,c 2 ε d + ε c ) ] 1
L x = [ 2Im( k SPP ) ] 1
k SPP = 2π λ ε d ε c ε d + ε c
δ= ( 2π λ Im( ε ) ) 1
±Re( k SPP )= 2π λ [ sin(θ)+ mλ p ]

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