Abstract

We demonstrated the quantum efficiency (QE) of silicon-on-insulator (SOI) photodiode was enhanced in visible wavelength region by using gold (Au) nanoparticles. The photons plasmonically scattered by Au nanoparticles couples with the waveguide mode in SOI, and are absorbed efficiently. Optimum size and density of Au nanoparticles have been investigated by 3-D FDTD simulations for sensitivity improvement. The highest enhancement factor of the absorption efficiency in 100-nm-thick SOI is obtained by periodically attaching Au nanoparticles of about 140 nm in diameter and 1.7 × 109 particles/cm2 in density. Two-fold enhancement in QE was experimentally achieved in visible by the SOI photodiode with randomly arranged Au nanoparticles of the size and density close to the optimized values.

© 2014 Optical Society of America

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2013 (4)

Y. Shi, X. Wang, W. Liu, T. Yang, R. Xu, and F. Yang, “Multilayer silver nanoparticles for light trapping in thin film solar cells,” J. Appl. Phys.113(17), 176101 (2013).
[CrossRef]

H. Satoh, A. Ono, and H. Inokawa, “Enhanced visible light sensitivity by gold line-and-space grating gate electrode in thin silicon-on-insulator p-n junction photodiode,” IEEE Trans. Electron. Dev.60(2), 812–818 (2013).
[CrossRef]

H. Satoh, K. Kawakubo, A. Ono, and H. Inokawa, “Material dependence of metal grating on SOI photodiode for enhanced quantum efficiency,” IEEE Photon. Technol. Lett.25(12), 1133–1136 (2013).
[CrossRef]

Y. Nishijima, J. B. Khurgin, L. Rosa, H. Fujiwara, and S. Juodkazis, “Randomization of gold nano-brick arrays: a tool for SERS enhancement,” Opt. Express21(11), 13502–13514 (2013).
[CrossRef] [PubMed]

2012 (1)

M. Gu, Z. Ouyang, B. Jia, N. Stokes, X. Chen, N. Fahim, X. Li, M. J. Ventura, and Z. Shi, “Nanoplasmonics: a frontier of photovoltaic solar cells,” Nanophotonics1(3-4), 235–248 (2012).
[CrossRef]

2011 (2)

A. Ono, Y. Matsuo, H. Satoh, and H. Inokawa, “Sensitivity improvement of silicon-on-insulator photodiode by gold nanoparticles with substrate bias control,” Appl. Phys. Lett.99(6), 062105 (2011).
[CrossRef]

M. W. Knight, H. Sobhani, P. Nordlander, and N. J. Halas, “Photodetection with Active Optical Antennas,” Science332(6030), 702–704 (2011).
[CrossRef] [PubMed]

2010 (2)

J. Jacak, J. Krasnyj, W. Jacak, R. Gonczarek, A. Chepok, and L. Jacak, “Surface and volume plasmons in metallic nanospheres in a semiclassical RPA-type approach: Near-field coupling of surface plasmons with the semiconductor substrate,” Phys. Rev. B82(3), 035418 (2010).
[CrossRef]

H. A. Atwater and A. Polman, “Plasmonics for improved photovoltaic devices,” Nat. Mater.9(3), 205–213 (2010).
[CrossRef] [PubMed]

2008 (2)

K. R. Catchpole and A. Polman, “Plasmonic solar cells,” Opt. Express16(26), 21793–21800 (2008).
[CrossRef] [PubMed]

S. P. Sundararajan, N. K. Grady, N. Mirin, and N. J. Halas, “Nanoparticle-induced enhancement and suppression of photocurrent in a silicon photodiode,” Nano Lett.8(2), 624–630 (2008).
[CrossRef] [PubMed]

2007 (2)

S. H. Lim, W. Mar, P. Matheu, D. Darkacs, and E. T. Yu, “Photocurrent spectroscopy of optical absorption enhancement in silicon photodiodes via scattering from surface plasmon polaritons in gold nanoparticles,” J. Appl. Phys.101(10), 104309 (2007).
[CrossRef]

S. Pillai, K. R. Catchpole, T. Trupke, and M. A. Green, “Surface plasmon enhanced silicon solar cells,” J. Appl. Phys.101(9), 093105 (2007).
[CrossRef]

2005 (1)

D. M. Schaadt, B. Feng, and E. T. Yu, “Enhanced semiconductor optical absorption via surface plasmon excitation in metal nanoparticles,” Appl. Phys. Lett.86(6), 063106 (2005).
[CrossRef]

2003 (2)

M. S. Sander and L.-S. Tan, “Nanoparticle arrays on surface fabricated using anodic alumina films as templates,” Adv. Funct. Mater.13(5), 393–397 (2003).
[CrossRef]

Y. Joseph, I. Besnard, M. Rosenberger, B. Guse, H.-G. Nothofer, J. M. Wessels, U. Wild, A. Knop-Gericke, D. Su, R. Schogl, A. Yasuda, and T. Vossmeyer, “Self-assembled gold nanoparticle/alkanedithiol films: preparation, electron microscopy, XPS-analysis, charge transport, and vapor-sensing properties,” J. Phys. Chem. B107(30), 7406–7413 (2003).
[CrossRef]

2002 (1)

R. R. Bhat, D. A. Fischer, and J. Ganzer, “Fabricating planar nanoparticle assemblies with number density gradients,” Langmuir18(15), 5640–5643 (2002).
[CrossRef]

2001 (1)

B. Kim, S. L. Tripp, and A. Wei, “Self-organization of large gold nanoparticle arrays,” J. Am. Chem. Soc.123(32), 7955–7956 (2001).
[CrossRef] [PubMed]

2000 (1)

1998 (2)

H. R. Stuart and D. G. Hall, “Island size effects in nanoparticle-enhanced photodetectors,” Appl. Phys. Lett.73(26), 3815–3817 (1998).
[CrossRef]

H. R. Stuart and D. G. Hall, “Enhanced dipole-dipole interaction between elementary radiators near a surface,” Phys. Rev. Lett.80(25), 5663–5666 (1998).
[CrossRef]

1996 (2)

H. R. Stuart and D. G. Hall, “Absorption enhancement in silicon-on-insulator waveguides using metal island films,” Appl. Phys. Lett.69(16), 2327–2329 (1996).
[CrossRef]

K. C. Grabar, P. C. Smith, M. D. Musick, J. A. Davis, D. G. Walter, M. A. Jackson, A. P. Guthrie, and M. J. Natan, “Kinetic control of interparticle spacing in Au colloid-based surfaces: rational nanometer-scale architecture,” J. Am. Chem. Soc.118(5), 1148–1153 (1996).
[CrossRef]

Atwater, H. A.

H. A. Atwater and A. Polman, “Plasmonics for improved photovoltaic devices,” Nat. Mater.9(3), 205–213 (2010).
[CrossRef] [PubMed]

Besnard, I.

Y. Joseph, I. Besnard, M. Rosenberger, B. Guse, H.-G. Nothofer, J. M. Wessels, U. Wild, A. Knop-Gericke, D. Su, R. Schogl, A. Yasuda, and T. Vossmeyer, “Self-assembled gold nanoparticle/alkanedithiol films: preparation, electron microscopy, XPS-analysis, charge transport, and vapor-sensing properties,” J. Phys. Chem. B107(30), 7406–7413 (2003).
[CrossRef]

Bhat, R. R.

R. R. Bhat, D. A. Fischer, and J. Ganzer, “Fabricating planar nanoparticle assemblies with number density gradients,” Langmuir18(15), 5640–5643 (2002).
[CrossRef]

Catchpole, K. R.

K. R. Catchpole and A. Polman, “Plasmonic solar cells,” Opt. Express16(26), 21793–21800 (2008).
[CrossRef] [PubMed]

S. Pillai, K. R. Catchpole, T. Trupke, and M. A. Green, “Surface plasmon enhanced silicon solar cells,” J. Appl. Phys.101(9), 093105 (2007).
[CrossRef]

Chen, X.

M. Gu, Z. Ouyang, B. Jia, N. Stokes, X. Chen, N. Fahim, X. Li, M. J. Ventura, and Z. Shi, “Nanoplasmonics: a frontier of photovoltaic solar cells,” Nanophotonics1(3-4), 235–248 (2012).
[CrossRef]

Chepok, A.

J. Jacak, J. Krasnyj, W. Jacak, R. Gonczarek, A. Chepok, and L. Jacak, “Surface and volume plasmons in metallic nanospheres in a semiclassical RPA-type approach: Near-field coupling of surface plasmons with the semiconductor substrate,” Phys. Rev. B82(3), 035418 (2010).
[CrossRef]

Darkacs, D.

S. H. Lim, W. Mar, P. Matheu, D. Darkacs, and E. T. Yu, “Photocurrent spectroscopy of optical absorption enhancement in silicon photodiodes via scattering from surface plasmon polaritons in gold nanoparticles,” J. Appl. Phys.101(10), 104309 (2007).
[CrossRef]

Davis, J. A.

K. C. Grabar, P. C. Smith, M. D. Musick, J. A. Davis, D. G. Walter, M. A. Jackson, A. P. Guthrie, and M. J. Natan, “Kinetic control of interparticle spacing in Au colloid-based surfaces: rational nanometer-scale architecture,” J. Am. Chem. Soc.118(5), 1148–1153 (1996).
[CrossRef]

Fahim, N.

M. Gu, Z. Ouyang, B. Jia, N. Stokes, X. Chen, N. Fahim, X. Li, M. J. Ventura, and Z. Shi, “Nanoplasmonics: a frontier of photovoltaic solar cells,” Nanophotonics1(3-4), 235–248 (2012).
[CrossRef]

Feng, B.

D. M. Schaadt, B. Feng, and E. T. Yu, “Enhanced semiconductor optical absorption via surface plasmon excitation in metal nanoparticles,” Appl. Phys. Lett.86(6), 063106 (2005).
[CrossRef]

Fischer, D. A.

R. R. Bhat, D. A. Fischer, and J. Ganzer, “Fabricating planar nanoparticle assemblies with number density gradients,” Langmuir18(15), 5640–5643 (2002).
[CrossRef]

Fujiwara, H.

Ganzer, J.

R. R. Bhat, D. A. Fischer, and J. Ganzer, “Fabricating planar nanoparticle assemblies with number density gradients,” Langmuir18(15), 5640–5643 (2002).
[CrossRef]

Gonczarek, R.

J. Jacak, J. Krasnyj, W. Jacak, R. Gonczarek, A. Chepok, and L. Jacak, “Surface and volume plasmons in metallic nanospheres in a semiclassical RPA-type approach: Near-field coupling of surface plasmons with the semiconductor substrate,” Phys. Rev. B82(3), 035418 (2010).
[CrossRef]

Grabar, K. C.

K. C. Grabar, P. C. Smith, M. D. Musick, J. A. Davis, D. G. Walter, M. A. Jackson, A. P. Guthrie, and M. J. Natan, “Kinetic control of interparticle spacing in Au colloid-based surfaces: rational nanometer-scale architecture,” J. Am. Chem. Soc.118(5), 1148–1153 (1996).
[CrossRef]

Grady, N. K.

S. P. Sundararajan, N. K. Grady, N. Mirin, and N. J. Halas, “Nanoparticle-induced enhancement and suppression of photocurrent in a silicon photodiode,” Nano Lett.8(2), 624–630 (2008).
[CrossRef] [PubMed]

Green, M. A.

S. Pillai, K. R. Catchpole, T. Trupke, and M. A. Green, “Surface plasmon enhanced silicon solar cells,” J. Appl. Phys.101(9), 093105 (2007).
[CrossRef]

Gu, M.

M. Gu, Z. Ouyang, B. Jia, N. Stokes, X. Chen, N. Fahim, X. Li, M. J. Ventura, and Z. Shi, “Nanoplasmonics: a frontier of photovoltaic solar cells,” Nanophotonics1(3-4), 235–248 (2012).
[CrossRef]

Guse, B.

Y. Joseph, I. Besnard, M. Rosenberger, B. Guse, H.-G. Nothofer, J. M. Wessels, U. Wild, A. Knop-Gericke, D. Su, R. Schogl, A. Yasuda, and T. Vossmeyer, “Self-assembled gold nanoparticle/alkanedithiol films: preparation, electron microscopy, XPS-analysis, charge transport, and vapor-sensing properties,” J. Phys. Chem. B107(30), 7406–7413 (2003).
[CrossRef]

Guthrie, A. P.

K. C. Grabar, P. C. Smith, M. D. Musick, J. A. Davis, D. G. Walter, M. A. Jackson, A. P. Guthrie, and M. J. Natan, “Kinetic control of interparticle spacing in Au colloid-based surfaces: rational nanometer-scale architecture,” J. Am. Chem. Soc.118(5), 1148–1153 (1996).
[CrossRef]

Halas, N. J.

M. W. Knight, H. Sobhani, P. Nordlander, and N. J. Halas, “Photodetection with Active Optical Antennas,” Science332(6030), 702–704 (2011).
[CrossRef] [PubMed]

S. P. Sundararajan, N. K. Grady, N. Mirin, and N. J. Halas, “Nanoparticle-induced enhancement and suppression of photocurrent in a silicon photodiode,” Nano Lett.8(2), 624–630 (2008).
[CrossRef] [PubMed]

Hall, D. G.

H. R. Stuart and D. G. Hall, “Enhanced dipole-dipole interaction between elementary radiators near a surface,” Phys. Rev. Lett.80(25), 5663–5666 (1998).
[CrossRef]

H. R. Stuart and D. G. Hall, “Island size effects in nanoparticle-enhanced photodetectors,” Appl. Phys. Lett.73(26), 3815–3817 (1998).
[CrossRef]

H. R. Stuart and D. G. Hall, “Absorption enhancement in silicon-on-insulator waveguides using metal island films,” Appl. Phys. Lett.69(16), 2327–2329 (1996).
[CrossRef]

Inokawa, H.

H. Satoh, A. Ono, and H. Inokawa, “Enhanced visible light sensitivity by gold line-and-space grating gate electrode in thin silicon-on-insulator p-n junction photodiode,” IEEE Trans. Electron. Dev.60(2), 812–818 (2013).
[CrossRef]

H. Satoh, K. Kawakubo, A. Ono, and H. Inokawa, “Material dependence of metal grating on SOI photodiode for enhanced quantum efficiency,” IEEE Photon. Technol. Lett.25(12), 1133–1136 (2013).
[CrossRef]

A. Ono, Y. Matsuo, H. Satoh, and H. Inokawa, “Sensitivity improvement of silicon-on-insulator photodiode by gold nanoparticles with substrate bias control,” Appl. Phys. Lett.99(6), 062105 (2011).
[CrossRef]

Jacak, J.

J. Jacak, J. Krasnyj, W. Jacak, R. Gonczarek, A. Chepok, and L. Jacak, “Surface and volume plasmons in metallic nanospheres in a semiclassical RPA-type approach: Near-field coupling of surface plasmons with the semiconductor substrate,” Phys. Rev. B82(3), 035418 (2010).
[CrossRef]

Jacak, L.

J. Jacak, J. Krasnyj, W. Jacak, R. Gonczarek, A. Chepok, and L. Jacak, “Surface and volume plasmons in metallic nanospheres in a semiclassical RPA-type approach: Near-field coupling of surface plasmons with the semiconductor substrate,” Phys. Rev. B82(3), 035418 (2010).
[CrossRef]

Jacak, W.

J. Jacak, J. Krasnyj, W. Jacak, R. Gonczarek, A. Chepok, and L. Jacak, “Surface and volume plasmons in metallic nanospheres in a semiclassical RPA-type approach: Near-field coupling of surface plasmons with the semiconductor substrate,” Phys. Rev. B82(3), 035418 (2010).
[CrossRef]

Jackson, M. A.

K. C. Grabar, P. C. Smith, M. D. Musick, J. A. Davis, D. G. Walter, M. A. Jackson, A. P. Guthrie, and M. J. Natan, “Kinetic control of interparticle spacing in Au colloid-based surfaces: rational nanometer-scale architecture,” J. Am. Chem. Soc.118(5), 1148–1153 (1996).
[CrossRef]

Jia, B.

M. Gu, Z. Ouyang, B. Jia, N. Stokes, X. Chen, N. Fahim, X. Li, M. J. Ventura, and Z. Shi, “Nanoplasmonics: a frontier of photovoltaic solar cells,” Nanophotonics1(3-4), 235–248 (2012).
[CrossRef]

Joseph, Y.

Y. Joseph, I. Besnard, M. Rosenberger, B. Guse, H.-G. Nothofer, J. M. Wessels, U. Wild, A. Knop-Gericke, D. Su, R. Schogl, A. Yasuda, and T. Vossmeyer, “Self-assembled gold nanoparticle/alkanedithiol films: preparation, electron microscopy, XPS-analysis, charge transport, and vapor-sensing properties,” J. Phys. Chem. B107(30), 7406–7413 (2003).
[CrossRef]

Juodkazis, S.

Kawakubo, K.

H. Satoh, K. Kawakubo, A. Ono, and H. Inokawa, “Material dependence of metal grating on SOI photodiode for enhanced quantum efficiency,” IEEE Photon. Technol. Lett.25(12), 1133–1136 (2013).
[CrossRef]

Khurgin, J. B.

Kim, B.

B. Kim, S. L. Tripp, and A. Wei, “Self-organization of large gold nanoparticle arrays,” J. Am. Chem. Soc.123(32), 7955–7956 (2001).
[CrossRef] [PubMed]

Knight, M. W.

M. W. Knight, H. Sobhani, P. Nordlander, and N. J. Halas, “Photodetection with Active Optical Antennas,” Science332(6030), 702–704 (2011).
[CrossRef] [PubMed]

Knop-Gericke, A.

Y. Joseph, I. Besnard, M. Rosenberger, B. Guse, H.-G. Nothofer, J. M. Wessels, U. Wild, A. Knop-Gericke, D. Su, R. Schogl, A. Yasuda, and T. Vossmeyer, “Self-assembled gold nanoparticle/alkanedithiol films: preparation, electron microscopy, XPS-analysis, charge transport, and vapor-sensing properties,” J. Phys. Chem. B107(30), 7406–7413 (2003).
[CrossRef]

Kobayashi, T.

Krasnyj, J.

J. Jacak, J. Krasnyj, W. Jacak, R. Gonczarek, A. Chepok, and L. Jacak, “Surface and volume plasmons in metallic nanospheres in a semiclassical RPA-type approach: Near-field coupling of surface plasmons with the semiconductor substrate,” Phys. Rev. B82(3), 035418 (2010).
[CrossRef]

Li, X.

M. Gu, Z. Ouyang, B. Jia, N. Stokes, X. Chen, N. Fahim, X. Li, M. J. Ventura, and Z. Shi, “Nanoplasmonics: a frontier of photovoltaic solar cells,” Nanophotonics1(3-4), 235–248 (2012).
[CrossRef]

Lim, S. H.

S. H. Lim, W. Mar, P. Matheu, D. Darkacs, and E. T. Yu, “Photocurrent spectroscopy of optical absorption enhancement in silicon photodiodes via scattering from surface plasmon polaritons in gold nanoparticles,” J. Appl. Phys.101(10), 104309 (2007).
[CrossRef]

Liu, W.

Y. Shi, X. Wang, W. Liu, T. Yang, R. Xu, and F. Yang, “Multilayer silver nanoparticles for light trapping in thin film solar cells,” J. Appl. Phys.113(17), 176101 (2013).
[CrossRef]

Mar, W.

S. H. Lim, W. Mar, P. Matheu, D. Darkacs, and E. T. Yu, “Photocurrent spectroscopy of optical absorption enhancement in silicon photodiodes via scattering from surface plasmon polaritons in gold nanoparticles,” J. Appl. Phys.101(10), 104309 (2007).
[CrossRef]

Matheu, P.

S. H. Lim, W. Mar, P. Matheu, D. Darkacs, and E. T. Yu, “Photocurrent spectroscopy of optical absorption enhancement in silicon photodiodes via scattering from surface plasmon polaritons in gold nanoparticles,” J. Appl. Phys.101(10), 104309 (2007).
[CrossRef]

Matsuo, Y.

A. Ono, Y. Matsuo, H. Satoh, and H. Inokawa, “Sensitivity improvement of silicon-on-insulator photodiode by gold nanoparticles with substrate bias control,” Appl. Phys. Lett.99(6), 062105 (2011).
[CrossRef]

Mirin, N.

S. P. Sundararajan, N. K. Grady, N. Mirin, and N. J. Halas, “Nanoparticle-induced enhancement and suppression of photocurrent in a silicon photodiode,” Nano Lett.8(2), 624–630 (2008).
[CrossRef] [PubMed]

Musick, M. D.

K. C. Grabar, P. C. Smith, M. D. Musick, J. A. Davis, D. G. Walter, M. A. Jackson, A. P. Guthrie, and M. J. Natan, “Kinetic control of interparticle spacing in Au colloid-based surfaces: rational nanometer-scale architecture,” J. Am. Chem. Soc.118(5), 1148–1153 (1996).
[CrossRef]

Natan, M. J.

K. C. Grabar, P. C. Smith, M. D. Musick, J. A. Davis, D. G. Walter, M. A. Jackson, A. P. Guthrie, and M. J. Natan, “Kinetic control of interparticle spacing in Au colloid-based surfaces: rational nanometer-scale architecture,” J. Am. Chem. Soc.118(5), 1148–1153 (1996).
[CrossRef]

Nishijima, Y.

Nordlander, P.

M. W. Knight, H. Sobhani, P. Nordlander, and N. J. Halas, “Photodetection with Active Optical Antennas,” Science332(6030), 702–704 (2011).
[CrossRef] [PubMed]

Nothofer, H.-G.

Y. Joseph, I. Besnard, M. Rosenberger, B. Guse, H.-G. Nothofer, J. M. Wessels, U. Wild, A. Knop-Gericke, D. Su, R. Schogl, A. Yasuda, and T. Vossmeyer, “Self-assembled gold nanoparticle/alkanedithiol films: preparation, electron microscopy, XPS-analysis, charge transport, and vapor-sensing properties,” J. Phys. Chem. B107(30), 7406–7413 (2003).
[CrossRef]

Okamoto, T.

Ono, A.

H. Satoh, A. Ono, and H. Inokawa, “Enhanced visible light sensitivity by gold line-and-space grating gate electrode in thin silicon-on-insulator p-n junction photodiode,” IEEE Trans. Electron. Dev.60(2), 812–818 (2013).
[CrossRef]

H. Satoh, K. Kawakubo, A. Ono, and H. Inokawa, “Material dependence of metal grating on SOI photodiode for enhanced quantum efficiency,” IEEE Photon. Technol. Lett.25(12), 1133–1136 (2013).
[CrossRef]

A. Ono, Y. Matsuo, H. Satoh, and H. Inokawa, “Sensitivity improvement of silicon-on-insulator photodiode by gold nanoparticles with substrate bias control,” Appl. Phys. Lett.99(6), 062105 (2011).
[CrossRef]

Ouyang, Z.

M. Gu, Z. Ouyang, B. Jia, N. Stokes, X. Chen, N. Fahim, X. Li, M. J. Ventura, and Z. Shi, “Nanoplasmonics: a frontier of photovoltaic solar cells,” Nanophotonics1(3-4), 235–248 (2012).
[CrossRef]

Pillai, S.

S. Pillai, K. R. Catchpole, T. Trupke, and M. A. Green, “Surface plasmon enhanced silicon solar cells,” J. Appl. Phys.101(9), 093105 (2007).
[CrossRef]

Polman, A.

H. A. Atwater and A. Polman, “Plasmonics for improved photovoltaic devices,” Nat. Mater.9(3), 205–213 (2010).
[CrossRef] [PubMed]

K. R. Catchpole and A. Polman, “Plasmonic solar cells,” Opt. Express16(26), 21793–21800 (2008).
[CrossRef] [PubMed]

Rosa, L.

Rosenberger, M.

Y. Joseph, I. Besnard, M. Rosenberger, B. Guse, H.-G. Nothofer, J. M. Wessels, U. Wild, A. Knop-Gericke, D. Su, R. Schogl, A. Yasuda, and T. Vossmeyer, “Self-assembled gold nanoparticle/alkanedithiol films: preparation, electron microscopy, XPS-analysis, charge transport, and vapor-sensing properties,” J. Phys. Chem. B107(30), 7406–7413 (2003).
[CrossRef]

Sander, M. S.

M. S. Sander and L.-S. Tan, “Nanoparticle arrays on surface fabricated using anodic alumina films as templates,” Adv. Funct. Mater.13(5), 393–397 (2003).
[CrossRef]

Satoh, H.

H. Satoh, K. Kawakubo, A. Ono, and H. Inokawa, “Material dependence of metal grating on SOI photodiode for enhanced quantum efficiency,” IEEE Photon. Technol. Lett.25(12), 1133–1136 (2013).
[CrossRef]

H. Satoh, A. Ono, and H. Inokawa, “Enhanced visible light sensitivity by gold line-and-space grating gate electrode in thin silicon-on-insulator p-n junction photodiode,” IEEE Trans. Electron. Dev.60(2), 812–818 (2013).
[CrossRef]

A. Ono, Y. Matsuo, H. Satoh, and H. Inokawa, “Sensitivity improvement of silicon-on-insulator photodiode by gold nanoparticles with substrate bias control,” Appl. Phys. Lett.99(6), 062105 (2011).
[CrossRef]

Schaadt, D. M.

D. M. Schaadt, B. Feng, and E. T. Yu, “Enhanced semiconductor optical absorption via surface plasmon excitation in metal nanoparticles,” Appl. Phys. Lett.86(6), 063106 (2005).
[CrossRef]

Schogl, R.

Y. Joseph, I. Besnard, M. Rosenberger, B. Guse, H.-G. Nothofer, J. M. Wessels, U. Wild, A. Knop-Gericke, D. Su, R. Schogl, A. Yasuda, and T. Vossmeyer, “Self-assembled gold nanoparticle/alkanedithiol films: preparation, electron microscopy, XPS-analysis, charge transport, and vapor-sensing properties,” J. Phys. Chem. B107(30), 7406–7413 (2003).
[CrossRef]

Shi, Y.

Y. Shi, X. Wang, W. Liu, T. Yang, R. Xu, and F. Yang, “Multilayer silver nanoparticles for light trapping in thin film solar cells,” J. Appl. Phys.113(17), 176101 (2013).
[CrossRef]

Shi, Z.

M. Gu, Z. Ouyang, B. Jia, N. Stokes, X. Chen, N. Fahim, X. Li, M. J. Ventura, and Z. Shi, “Nanoplasmonics: a frontier of photovoltaic solar cells,” Nanophotonics1(3-4), 235–248 (2012).
[CrossRef]

Smith, P. C.

K. C. Grabar, P. C. Smith, M. D. Musick, J. A. Davis, D. G. Walter, M. A. Jackson, A. P. Guthrie, and M. J. Natan, “Kinetic control of interparticle spacing in Au colloid-based surfaces: rational nanometer-scale architecture,” J. Am. Chem. Soc.118(5), 1148–1153 (1996).
[CrossRef]

Sobhani, H.

M. W. Knight, H. Sobhani, P. Nordlander, and N. J. Halas, “Photodetection with Active Optical Antennas,” Science332(6030), 702–704 (2011).
[CrossRef] [PubMed]

Stokes, N.

M. Gu, Z. Ouyang, B. Jia, N. Stokes, X. Chen, N. Fahim, X. Li, M. J. Ventura, and Z. Shi, “Nanoplasmonics: a frontier of photovoltaic solar cells,” Nanophotonics1(3-4), 235–248 (2012).
[CrossRef]

Stuart, H. R.

H. R. Stuart and D. G. Hall, “Island size effects in nanoparticle-enhanced photodetectors,” Appl. Phys. Lett.73(26), 3815–3817 (1998).
[CrossRef]

H. R. Stuart and D. G. Hall, “Enhanced dipole-dipole interaction between elementary radiators near a surface,” Phys. Rev. Lett.80(25), 5663–5666 (1998).
[CrossRef]

H. R. Stuart and D. G. Hall, “Absorption enhancement in silicon-on-insulator waveguides using metal island films,” Appl. Phys. Lett.69(16), 2327–2329 (1996).
[CrossRef]

Su, D.

Y. Joseph, I. Besnard, M. Rosenberger, B. Guse, H.-G. Nothofer, J. M. Wessels, U. Wild, A. Knop-Gericke, D. Su, R. Schogl, A. Yasuda, and T. Vossmeyer, “Self-assembled gold nanoparticle/alkanedithiol films: preparation, electron microscopy, XPS-analysis, charge transport, and vapor-sensing properties,” J. Phys. Chem. B107(30), 7406–7413 (2003).
[CrossRef]

Sundararajan, S. P.

S. P. Sundararajan, N. K. Grady, N. Mirin, and N. J. Halas, “Nanoparticle-induced enhancement and suppression of photocurrent in a silicon photodiode,” Nano Lett.8(2), 624–630 (2008).
[CrossRef] [PubMed]

Tan, L.-S.

M. S. Sander and L.-S. Tan, “Nanoparticle arrays on surface fabricated using anodic alumina films as templates,” Adv. Funct. Mater.13(5), 393–397 (2003).
[CrossRef]

Tripp, S. L.

B. Kim, S. L. Tripp, and A. Wei, “Self-organization of large gold nanoparticle arrays,” J. Am. Chem. Soc.123(32), 7955–7956 (2001).
[CrossRef] [PubMed]

Trupke, T.

S. Pillai, K. R. Catchpole, T. Trupke, and M. A. Green, “Surface plasmon enhanced silicon solar cells,” J. Appl. Phys.101(9), 093105 (2007).
[CrossRef]

Ventura, M. J.

M. Gu, Z. Ouyang, B. Jia, N. Stokes, X. Chen, N. Fahim, X. Li, M. J. Ventura, and Z. Shi, “Nanoplasmonics: a frontier of photovoltaic solar cells,” Nanophotonics1(3-4), 235–248 (2012).
[CrossRef]

Vossmeyer, T.

Y. Joseph, I. Besnard, M. Rosenberger, B. Guse, H.-G. Nothofer, J. M. Wessels, U. Wild, A. Knop-Gericke, D. Su, R. Schogl, A. Yasuda, and T. Vossmeyer, “Self-assembled gold nanoparticle/alkanedithiol films: preparation, electron microscopy, XPS-analysis, charge transport, and vapor-sensing properties,” J. Phys. Chem. B107(30), 7406–7413 (2003).
[CrossRef]

Walter, D. G.

K. C. Grabar, P. C. Smith, M. D. Musick, J. A. Davis, D. G. Walter, M. A. Jackson, A. P. Guthrie, and M. J. Natan, “Kinetic control of interparticle spacing in Au colloid-based surfaces: rational nanometer-scale architecture,” J. Am. Chem. Soc.118(5), 1148–1153 (1996).
[CrossRef]

Wang, X.

Y. Shi, X. Wang, W. Liu, T. Yang, R. Xu, and F. Yang, “Multilayer silver nanoparticles for light trapping in thin film solar cells,” J. Appl. Phys.113(17), 176101 (2013).
[CrossRef]

Wei, A.

B. Kim, S. L. Tripp, and A. Wei, “Self-organization of large gold nanoparticle arrays,” J. Am. Chem. Soc.123(32), 7955–7956 (2001).
[CrossRef] [PubMed]

Wessels, J. M.

Y. Joseph, I. Besnard, M. Rosenberger, B. Guse, H.-G. Nothofer, J. M. Wessels, U. Wild, A. Knop-Gericke, D. Su, R. Schogl, A. Yasuda, and T. Vossmeyer, “Self-assembled gold nanoparticle/alkanedithiol films: preparation, electron microscopy, XPS-analysis, charge transport, and vapor-sensing properties,” J. Phys. Chem. B107(30), 7406–7413 (2003).
[CrossRef]

Wild, U.

Y. Joseph, I. Besnard, M. Rosenberger, B. Guse, H.-G. Nothofer, J. M. Wessels, U. Wild, A. Knop-Gericke, D. Su, R. Schogl, A. Yasuda, and T. Vossmeyer, “Self-assembled gold nanoparticle/alkanedithiol films: preparation, electron microscopy, XPS-analysis, charge transport, and vapor-sensing properties,” J. Phys. Chem. B107(30), 7406–7413 (2003).
[CrossRef]

Xu, R.

Y. Shi, X. Wang, W. Liu, T. Yang, R. Xu, and F. Yang, “Multilayer silver nanoparticles for light trapping in thin film solar cells,” J. Appl. Phys.113(17), 176101 (2013).
[CrossRef]

Yamaguchi, I.

Yang, F.

Y. Shi, X. Wang, W. Liu, T. Yang, R. Xu, and F. Yang, “Multilayer silver nanoparticles for light trapping in thin film solar cells,” J. Appl. Phys.113(17), 176101 (2013).
[CrossRef]

Yang, T.

Y. Shi, X. Wang, W. Liu, T. Yang, R. Xu, and F. Yang, “Multilayer silver nanoparticles for light trapping in thin film solar cells,” J. Appl. Phys.113(17), 176101 (2013).
[CrossRef]

Yasuda, A.

Y. Joseph, I. Besnard, M. Rosenberger, B. Guse, H.-G. Nothofer, J. M. Wessels, U. Wild, A. Knop-Gericke, D. Su, R. Schogl, A. Yasuda, and T. Vossmeyer, “Self-assembled gold nanoparticle/alkanedithiol films: preparation, electron microscopy, XPS-analysis, charge transport, and vapor-sensing properties,” J. Phys. Chem. B107(30), 7406–7413 (2003).
[CrossRef]

Yu, E. T.

S. H. Lim, W. Mar, P. Matheu, D. Darkacs, and E. T. Yu, “Photocurrent spectroscopy of optical absorption enhancement in silicon photodiodes via scattering from surface plasmon polaritons in gold nanoparticles,” J. Appl. Phys.101(10), 104309 (2007).
[CrossRef]

D. M. Schaadt, B. Feng, and E. T. Yu, “Enhanced semiconductor optical absorption via surface plasmon excitation in metal nanoparticles,” Appl. Phys. Lett.86(6), 063106 (2005).
[CrossRef]

Adv. Funct. Mater. (1)

M. S. Sander and L.-S. Tan, “Nanoparticle arrays on surface fabricated using anodic alumina films as templates,” Adv. Funct. Mater.13(5), 393–397 (2003).
[CrossRef]

Appl. Phys. Lett. (4)

A. Ono, Y. Matsuo, H. Satoh, and H. Inokawa, “Sensitivity improvement of silicon-on-insulator photodiode by gold nanoparticles with substrate bias control,” Appl. Phys. Lett.99(6), 062105 (2011).
[CrossRef]

D. M. Schaadt, B. Feng, and E. T. Yu, “Enhanced semiconductor optical absorption via surface plasmon excitation in metal nanoparticles,” Appl. Phys. Lett.86(6), 063106 (2005).
[CrossRef]

H. R. Stuart and D. G. Hall, “Absorption enhancement in silicon-on-insulator waveguides using metal island films,” Appl. Phys. Lett.69(16), 2327–2329 (1996).
[CrossRef]

H. R. Stuart and D. G. Hall, “Island size effects in nanoparticle-enhanced photodetectors,” Appl. Phys. Lett.73(26), 3815–3817 (1998).
[CrossRef]

IEEE Photon. Technol. Lett. (1)

H. Satoh, K. Kawakubo, A. Ono, and H. Inokawa, “Material dependence of metal grating on SOI photodiode for enhanced quantum efficiency,” IEEE Photon. Technol. Lett.25(12), 1133–1136 (2013).
[CrossRef]

IEEE Trans. Electron. Dev. (1)

H. Satoh, A. Ono, and H. Inokawa, “Enhanced visible light sensitivity by gold line-and-space grating gate electrode in thin silicon-on-insulator p-n junction photodiode,” IEEE Trans. Electron. Dev.60(2), 812–818 (2013).
[CrossRef]

J. Am. Chem. Soc. (2)

K. C. Grabar, P. C. Smith, M. D. Musick, J. A. Davis, D. G. Walter, M. A. Jackson, A. P. Guthrie, and M. J. Natan, “Kinetic control of interparticle spacing in Au colloid-based surfaces: rational nanometer-scale architecture,” J. Am. Chem. Soc.118(5), 1148–1153 (1996).
[CrossRef]

B. Kim, S. L. Tripp, and A. Wei, “Self-organization of large gold nanoparticle arrays,” J. Am. Chem. Soc.123(32), 7955–7956 (2001).
[CrossRef] [PubMed]

J. Appl. Phys. (3)

S. Pillai, K. R. Catchpole, T. Trupke, and M. A. Green, “Surface plasmon enhanced silicon solar cells,” J. Appl. Phys.101(9), 093105 (2007).
[CrossRef]

Y. Shi, X. Wang, W. Liu, T. Yang, R. Xu, and F. Yang, “Multilayer silver nanoparticles for light trapping in thin film solar cells,” J. Appl. Phys.113(17), 176101 (2013).
[CrossRef]

S. H. Lim, W. Mar, P. Matheu, D. Darkacs, and E. T. Yu, “Photocurrent spectroscopy of optical absorption enhancement in silicon photodiodes via scattering from surface plasmon polaritons in gold nanoparticles,” J. Appl. Phys.101(10), 104309 (2007).
[CrossRef]

J. Phys. Chem. B (1)

Y. Joseph, I. Besnard, M. Rosenberger, B. Guse, H.-G. Nothofer, J. M. Wessels, U. Wild, A. Knop-Gericke, D. Su, R. Schogl, A. Yasuda, and T. Vossmeyer, “Self-assembled gold nanoparticle/alkanedithiol films: preparation, electron microscopy, XPS-analysis, charge transport, and vapor-sensing properties,” J. Phys. Chem. B107(30), 7406–7413 (2003).
[CrossRef]

Langmuir (1)

R. R. Bhat, D. A. Fischer, and J. Ganzer, “Fabricating planar nanoparticle assemblies with number density gradients,” Langmuir18(15), 5640–5643 (2002).
[CrossRef]

Nano Lett. (1)

S. P. Sundararajan, N. K. Grady, N. Mirin, and N. J. Halas, “Nanoparticle-induced enhancement and suppression of photocurrent in a silicon photodiode,” Nano Lett.8(2), 624–630 (2008).
[CrossRef] [PubMed]

Nanophotonics (1)

M. Gu, Z. Ouyang, B. Jia, N. Stokes, X. Chen, N. Fahim, X. Li, M. J. Ventura, and Z. Shi, “Nanoplasmonics: a frontier of photovoltaic solar cells,” Nanophotonics1(3-4), 235–248 (2012).
[CrossRef]

Nat. Mater. (1)

H. A. Atwater and A. Polman, “Plasmonics for improved photovoltaic devices,” Nat. Mater.9(3), 205–213 (2010).
[CrossRef] [PubMed]

Opt. Express (2)

Opt. Lett. (1)

Phys. Rev. B (1)

J. Jacak, J. Krasnyj, W. Jacak, R. Gonczarek, A. Chepok, and L. Jacak, “Surface and volume plasmons in metallic nanospheres in a semiclassical RPA-type approach: Near-field coupling of surface plasmons with the semiconductor substrate,” Phys. Rev. B82(3), 035418 (2010).
[CrossRef]

Phys. Rev. Lett. (1)

H. R. Stuart and D. G. Hall, “Enhanced dipole-dipole interaction between elementary radiators near a surface,” Phys. Rev. Lett.80(25), 5663–5666 (1998).
[CrossRef]

Science (1)

M. W. Knight, H. Sobhani, P. Nordlander, and N. J. Halas, “Photodetection with Active Optical Antennas,” Science332(6030), 702–704 (2011).
[CrossRef] [PubMed]

Other (3)

Y. Nishijima, Y. Hashimoto, L. Rosa, J. B. Khurgin, and S. Juodkazis, “Scaling rules of SERS intensity,” Adv. Optical Mater. (2014).

J.-P. Colinge, Silicon-On-Insulator Technology: Materials to VLSI, 2nd ed. (Kluwer Academic, 1997).

S. Cristoloveanu and S. S. Li, Electrical Characterization of Silicon-On-Insulator Materials and Devices (Kluwer Academic, 1995).

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