Abstract

Solution-processing offers a pathway to fabricate complex chalcogenide structures for electronic, imaging and photonic applications. More importantly, it has benefits in flexibility and integration as compared to conventional methods. This paper reviews the fundamental physics and chemistry in the solution process, along with discussing recent examples of applying the solution method to fabricate high-quality optical and photonic components.

© 2013 OSA

Full Article  |  PDF Article

References

  • View by:
  • |
  • |
  • |

  1. B. J. Eggleton, “Chalcogenide photonics: fabrication, devices and applications Introduction,” Opt. Express18(25), 26632–26634 (2010).
    [CrossRef] [PubMed]
  2. C. Grillet, M. W. Lee, X. Gai, S. Tomljenovic-Hanic, C. Monat, E. Magi, D. J. Moss, B. J. Eggleton, S. Madden, D. Y. Choi, D. Bulla, and B. Luther-Davies, “Chalcogenide glass photonic crystals: progress and prospects,” Proc. SPIE7609, 760913, 760913-9 (2010).
    [CrossRef]
  3. B. J. Eggleton, B. Luther-Davies, and K. Richardson, “Chalcogenide photonics,” Nat. Photonics5, 141–148 (2011).
  4. A. Ganjoo, H. Jain, C. Yu, J. Irudayaraj, and C. G. Pantano, “Detection and fingerprinting of pathogens: Mid-IR biosensor using amorphous chalcogenide films,” J. Non-Cryst. Solids354(19-25), 2757–2762 (2008).
    [CrossRef]
  5. A. Kovalskiy, A. Vlcek, H. Jain, A. Fiserova, C. M. Waits, and M. Dubey, “Development of chalcogenide glass photoresists for gray scale lithography,” J. Non-Cryst. Solids352(6-7), 589–594 (2006).
    [CrossRef]
  6. J. J. Hu, V. Tarasov, A. Agarwal, L. Kimerling, N. Carlie, L. Petit, and K. Richardson, “Fabrication and testing of planar chalcogenide waveguide integrated microfluidic sensor,” Opt. Express15(5), 2307–2314 (2007).
    [CrossRef] [PubMed]
  7. V. Balan, C. Vigreux, and A. Pradel, “Chalcogenide thin films deposited by radio-frequency sputtering,” J. Optoelectron. Adv. Mater.6, 875–882 (2004).
  8. K. E. Youden, T. Grevatt, R. W. Eason, H. N. Rutt, R. S. Deol, and G. Wylangowski, “Pulsed-laser deposition of Ga-La-S chalcogenide glass thin-film optical wave-guides,” Appl. Phys. Lett.63(12), 1601–1603 (1993).
    [CrossRef]
  9. J. J. Hu, J. D. Musgraves, N. Carlie, B. Zdyrko, I. Luzinov, A. Agarwal, K. Richardson, and L. Kimerling, “Development of chipscale chalcogenide glass based infrared chemical sensors,” Quantum Sensing and Nanophotonic Devices7945,79452C (2011).
  10. K. Richardson, L. Petit, N. Carlie, B. Zdyrko, I. Luzinov, J. Hu, A. Agarwal, L. Kimerling, T. Anderson, and M. Richardson, “Progress on the fabrication of on-chip, integrated chalcogenide glass (Chg)-based sensors,” J Nonlinear Opt Phys19(01), 75–99 (2010).
    [CrossRef]
  11. V. Takats, P. Nemec, A. C. Miller, H. Jain, and S. Kokenyesi, “Surface patterning on amorphous chalcogenide nanomultilayers,” Opt. Mater.32(6), 677–679 (2010).
    [CrossRef]
  12. V. Takáts, F. C. Miller, H. Jain, C. Cserhati, I. A. Szabo, D. Beke, and S. Kokenyesi, “Surface pattern recording in amorphous chalcogenide layers,” J. Non-Cryst. Solids355(37-42), 1849–1852 (2009).
    [CrossRef]
  13. S. Song, J. Dua, and C. B. Arnold, “Influence of annealing conditions on the optical and structural properties of spin-coated As2S3 chalcogenide glass thin films,” Opt. Express18(6), 5472–5480 (2010).
    [CrossRef] [PubMed]
  14. G. C. Chern and I. Lauks, “Spin-coated amorphous-chalcogenide films,” J. Appl. Phys.53(10), 6979–6982 (1982).
    [CrossRef]
  15. G. C. Chern, I. Lauks, and A. R. McGhie, “Spin coated amorphous chalcogenide films: Thermal properties,” J. Appl. Phys.54(8), 4596 (1983).
    [CrossRef]
  16. G. C. Chern and I. Lauks, “Spin coated amorphous chalcogenide films: Structural characterization,” J. Appl. Phys.54(5), 2701 (1983).
    [CrossRef]
  17. G. C. Chern, “Spin-coated amorphous chalcogenide films,” PhD thesis (University of Pennsylvania, 1984).
  18. K. H. Norian, G. C. Chern, and I. Lauks, “Morphology and thermal properties of solvent-cast arsenic sulfide films,” J. Appl. Phys.55(10), 3795–3798 (1984).
    [CrossRef]
  19. G. C. Chern, I. Lauks, and K. H. Norian, “Spin-coated amorphous chalcogenide films: Photoinduced effects,” Thin Solid Films123(4), 289–296 (1985).
    [CrossRef]
  20. S. Mamedov, “On the macromolecular mechanism of dissolution of As2S3 films in organic solutions,” Thin Solid Films226(2), 215–218 (1993).
    [CrossRef]
  21. S. A. Zenkin, S. B. Mamedov, M. D. Mikhailov, E. Y. Turkina, and I. Y. Yusupov, “Mechanism for interaction of amine solutions with monolithic glasses and amorphous films in the As-S system,” Glass Phys. Chem.23, 393–399 (1997).
  22. J. Orava, T. Wagner, M. Krbal, T. Kohoutek, M. Vlcek, and M. Frumar, “Selective wet-etching of undoped and silver photodoped amorphous thin films of chalcogenide glasses in inorganic alkaline solutions,” J. Non-Cryst. Solids352(9-20), 1637–1640 (2006).
    [CrossRef]
  23. T. Kohoutek, T. Wagner, J. Orava, M. Krbal, A. Fejfar, T. Mates, S. O. Kasap, and M. Frumar, “Surface morphology of spin-coated As-S-Se chalcogenide thin films,” J. Non-Cryst. Solids353(13-15), 1437–1440 (2007).
    [CrossRef]
  24. T. A. Guiton and C. G. Pantano, “Sol-to-Gel and Gel-to-Glass Transitions in the As2S3-Amine system,” in Material Research Society Symposium Proceedings, (Materials Research Society, 1988), pp. 509–514.
    [CrossRef]
  25. T. A. Guiton and C. G. Pantano, “Solution/gelation of arseic trisulfide in amine solvents,” Chem. Mater.1(5), 558–563 (1989).
    [CrossRef]
  26. T. Kohoutek, T. Wagner, M. Frumar, A. Chrissanthopoulos, O. Kostadinova, and S. N. Yannopoulos, “Effect of cluster size of chalcogenide glass nanocolloidal solutions on the surface morphology of spin-coated amorphous films,” J. Appl. Phys.103(6), 063511 (2008).
    [CrossRef]
  27. M. D. Michailov, S. B. Mamedov, and S. V. Tsventarnyi, “Dissolution Kinetics of Glassy Arsenic Sulfide in Alkali and Amine Solutions,” J. Non-Cryst. Solids176(2-3), 258–262 (1994).
    [CrossRef]
  28. M. D. Mikhailov and N. A. Anikina, “On the influence of stirring conditions on the dissolution rate of chalcogenide glasses and films,” Glass Phys. Chem.37(1), 21–28 (2011).
    [CrossRef]
  29. Y. Zou, H. Lin, O. Ogbuu, L. Li, S. Danto, S. Novak, J. Novak, J. D. Musgraves, K. Richardson, and J. Hu, “Effect of annealing conditions on the physio-chemical properties of spin-coated As2Se3 chalcogenide glass films,” Opt. Mater. Express2(12), 1723–1732 (2012).
    [CrossRef]
  30. T. Kohoutek, T. Wagner, M. Vlcek, M. Vlcek, and M. Frumar, “Spin-coated As33S67-xSex thin films: the effect of annealing on structure and optical properties,” J. Non-Cryst. Solids352(9-20), 1563–1566 (2006).
    [CrossRef]
  31. M. Waldmann, J. D. Musgraves, K. Richardson, and C. B. Arnold, “Structural properties of solution processed Ge23Sb7S70 glass materials,” J. Mater. Chem.22(34), 17848 (2012).
    [CrossRef]
  32. S. Song, “Solvent-casting of chalcogenide glasses and their applications in mid-infrared optics,” PhD thesis (Princeton University, 2011).
  33. J. Orava, T. Wagner, A. Krbal, T. Kohoutek, M. Vlcek, and M. Frumar, “Selective wet-etching and characterization of chalcogenide thin films in inorganic alkaline solutions,” J. Non-Cryst. Solids353(13-15), 1441–1445 (2007).
    [CrossRef]
  34. J. Orava, T. Wagner, M. Krbal, T. Kohoutek, M. Vlcek, P. Klapetek, and M. Frumar, “Selective dissolution of Ag-x(As0.33S0.67-ySey)(100-x) chalcogenide thin films,” J. Non-Cryst. Solids354(2-9), 533–539 (2008).
    [CrossRef]
  35. T. Kohoutek, T. Wágner, M. Vlček, M. Vlček, and M. Frumar, “Physico-chemical properties of spin-coated Ag–As–Sb–S films,” J. Non-Cryst. Solids351(27-29), 2205–2209 (2005).
    [CrossRef]
  36. M. Krbal, T. Wagner, T. Kohoutek, P. Nemec, J. Orava, and M. Frumar, “The comparison of Ag-As33S67 films prepared by thermal evaporation (TE), spin-coating (SC) and a pulsed laser deposition (PLD),” J. Phys. Chem. Solids68(5-6), 953–957 (2007).
    [CrossRef]
  37. T. Kohoutek, T. Wagner, J. Orava, M. Frumar, V. Perina, A. Mackova, V. Hnatowitz, M. Vlcek, and S. Kasap, “Amorphous films of Ag-As-S system prepared by spin-coating technique, preparation techniques and films physico-chemical properties,” Vacuum76(2-3), 191–194 (2004).
    [CrossRef]
  38. J. J. Santiago, M. Sano, M. Hamman, and N. Chen, “Growth and optical characterization of spin-coated As2S3 multilayer thin-films,” Thin Solid Films147(3), 275–284 (1987).
    [CrossRef]
  39. S. Shtutina, M. Klebanov, V. Lyubin, S. Rosenwaks, and V. Volterra, “Photoinduced Phenomena in Spin-Coated Vitreous As2S3 and AsSe Films,” Thin Solid Films261(1-2), 263–265 (1995).
    [CrossRef]
  40. Y. Zha and C. B. Arnold, “Solution-processing of thick chalcogenide-chalcogenide and metal-chalcogenide structures by spin-coating and multilayer lamination,” Opt. Mater. Express3(2), 309–317 (2013).
    [CrossRef]
  41. J. Gutwirth, T. Wagner, T. Kohoutek, M. Vlcek, S. Schroeter, V. Kovanda, M. Vlcek, and M. Frumar, “Physical properties and structure of amorphous Ag-x(Sb0.33S0.67)(100-x) prepared by optically-induced diffusion and dissolution of silver into spin-coated amorphous Sb33S67 films and their application for optical recording,” J. Optoelectron. Adv. Mater.5, 1139–1146 (2003).
  42. T. Wágner, M. Krbal, T. Kohoutek, V. Peřina, M. Vlček, M. Vlček, and M. Frumar, “Kinetics of optically- and thermally-induced diffusion and dissolution of silver in spin-coated As33S67 amorphous films; their properties and structure,” J. Non-Cryst. Solids326–327, 233–237 (2003).
    [CrossRef]
  43. S. Song, N. Carlie, J. Boudies, L. Petit, K. Richardson, and C. B. Arnold, “Spin-coating of Ge23Sb7S70 chalcogenide glass thin films,” J. Non-Cryst. Solids355(45-47), 2272–2278 (2009).
    [CrossRef]
  44. N. Carlie, J. D. Musgraves, B. Zdyrko, I. Luzinov, J. J. Hu, V. Singh, A. Agarwal, L. C. Kimerling, A. Canciamilla, F. Morichetti, A. Melloni, and K. Richardson, “Integrated chalcogenide waveguide resonators for mid-IR sensing: leveraging material properties to meet fabrication challenges,” Opt. Express18(25), 26728–26743 (2010).
    [CrossRef] [PubMed]
  45. Y. Zha, S. Fingerman, S. J. Cantrell, and C. B. Arnold, “Pore formation and removal in solution-processed amorphous arsenic sulfide films,” J. Non-Cryst. Solids369, 11–16 (2013).
    [CrossRef]
  46. C. Tsay, E. Mujagić, C. K. Madsen, C. F. Gmachl, and C. B. Arnold, “Mid-infrared characterization of solution-processed As2S3 chalcogenide glass waveguides,” Opt. Express18(15), 15523–15530 (2010).
    [CrossRef] [PubMed]
  47. C. Tsay, F. Toor, C. F. Gmachl, and C. B. Arnold, “Chalcogenide glass waveguides integrated with quantum cascade lasers for on-chip mid-IR photonic circuits,” Opt. Lett.35(20), 3324–3326 (2010).
    [CrossRef] [PubMed]
  48. C. Tsay, Y. Zha, and C. B. Arnold, “Solution-processed chalcogenide glass for integrated single-mode mid-infrared waveguides,” Opt. Express18(25), 26744–26753 (2010).
    [CrossRef] [PubMed]
  49. E. A. Sanchez, M. Waldmann, and C. B. Arnold, “Chalcogenide glass microlenses by inkjet printing,” Appl. Opt.50(14), 1974–1978 (2011).
    [CrossRef] [PubMed]
  50. C. Markos, S. N. Yannopoulos, and K. Vlachos, “Chalcogenide glass layers in silica photonic crystal fibers,” Opt. Express20(14), 14814–14824 (2012).
    [CrossRef] [PubMed]
  51. T. Kohoutek, J. Orava, T. Sawada, and H. Fudouzi, “Inverse opal photonic crystal of chalcogenide glass by solution processing,” J. Colloid Interface Sci.353(2), 454–458 (2011).
    [CrossRef] [PubMed]

2013 (2)

Y. Zha, S. Fingerman, S. J. Cantrell, and C. B. Arnold, “Pore formation and removal in solution-processed amorphous arsenic sulfide films,” J. Non-Cryst. Solids369, 11–16 (2013).
[CrossRef]

Y. Zha and C. B. Arnold, “Solution-processing of thick chalcogenide-chalcogenide and metal-chalcogenide structures by spin-coating and multilayer lamination,” Opt. Mater. Express3(2), 309–317 (2013).
[CrossRef]

2012 (3)

2011 (5)

M. D. Mikhailov and N. A. Anikina, “On the influence of stirring conditions on the dissolution rate of chalcogenide glasses and films,” Glass Phys. Chem.37(1), 21–28 (2011).
[CrossRef]

B. J. Eggleton, B. Luther-Davies, and K. Richardson, “Chalcogenide photonics,” Nat. Photonics5, 141–148 (2011).

J. J. Hu, J. D. Musgraves, N. Carlie, B. Zdyrko, I. Luzinov, A. Agarwal, K. Richardson, and L. Kimerling, “Development of chipscale chalcogenide glass based infrared chemical sensors,” Quantum Sensing and Nanophotonic Devices7945,79452C (2011).

T. Kohoutek, J. Orava, T. Sawada, and H. Fudouzi, “Inverse opal photonic crystal of chalcogenide glass by solution processing,” J. Colloid Interface Sci.353(2), 454–458 (2011).
[CrossRef] [PubMed]

E. A. Sanchez, M. Waldmann, and C. B. Arnold, “Chalcogenide glass microlenses by inkjet printing,” Appl. Opt.50(14), 1974–1978 (2011).
[CrossRef] [PubMed]

2010 (9)

S. Song, J. Dua, and C. B. Arnold, “Influence of annealing conditions on the optical and structural properties of spin-coated As2S3 chalcogenide glass thin films,” Opt. Express18(6), 5472–5480 (2010).
[CrossRef] [PubMed]

C. Tsay, E. Mujagić, C. K. Madsen, C. F. Gmachl, and C. B. Arnold, “Mid-infrared characterization of solution-processed As2S3 chalcogenide glass waveguides,” Opt. Express18(15), 15523–15530 (2010).
[CrossRef] [PubMed]

C. Tsay, F. Toor, C. F. Gmachl, and C. B. Arnold, “Chalcogenide glass waveguides integrated with quantum cascade lasers for on-chip mid-IR photonic circuits,” Opt. Lett.35(20), 3324–3326 (2010).
[CrossRef] [PubMed]

B. J. Eggleton, “Chalcogenide photonics: fabrication, devices and applications Introduction,” Opt. Express18(25), 26632–26634 (2010).
[CrossRef] [PubMed]

N. Carlie, J. D. Musgraves, B. Zdyrko, I. Luzinov, J. J. Hu, V. Singh, A. Agarwal, L. C. Kimerling, A. Canciamilla, F. Morichetti, A. Melloni, and K. Richardson, “Integrated chalcogenide waveguide resonators for mid-IR sensing: leveraging material properties to meet fabrication challenges,” Opt. Express18(25), 26728–26743 (2010).
[CrossRef] [PubMed]

C. Tsay, Y. Zha, and C. B. Arnold, “Solution-processed chalcogenide glass for integrated single-mode mid-infrared waveguides,” Opt. Express18(25), 26744–26753 (2010).
[CrossRef] [PubMed]

K. Richardson, L. Petit, N. Carlie, B. Zdyrko, I. Luzinov, J. Hu, A. Agarwal, L. Kimerling, T. Anderson, and M. Richardson, “Progress on the fabrication of on-chip, integrated chalcogenide glass (Chg)-based sensors,” J Nonlinear Opt Phys19(01), 75–99 (2010).
[CrossRef]

V. Takats, P. Nemec, A. C. Miller, H. Jain, and S. Kokenyesi, “Surface patterning on amorphous chalcogenide nanomultilayers,” Opt. Mater.32(6), 677–679 (2010).
[CrossRef]

C. Grillet, M. W. Lee, X. Gai, S. Tomljenovic-Hanic, C. Monat, E. Magi, D. J. Moss, B. J. Eggleton, S. Madden, D. Y. Choi, D. Bulla, and B. Luther-Davies, “Chalcogenide glass photonic crystals: progress and prospects,” Proc. SPIE7609, 760913, 760913-9 (2010).
[CrossRef]

2009 (2)

V. Takáts, F. C. Miller, H. Jain, C. Cserhati, I. A. Szabo, D. Beke, and S. Kokenyesi, “Surface pattern recording in amorphous chalcogenide layers,” J. Non-Cryst. Solids355(37-42), 1849–1852 (2009).
[CrossRef]

S. Song, N. Carlie, J. Boudies, L. Petit, K. Richardson, and C. B. Arnold, “Spin-coating of Ge23Sb7S70 chalcogenide glass thin films,” J. Non-Cryst. Solids355(45-47), 2272–2278 (2009).
[CrossRef]

2008 (3)

J. Orava, T. Wagner, M. Krbal, T. Kohoutek, M. Vlcek, P. Klapetek, and M. Frumar, “Selective dissolution of Ag-x(As0.33S0.67-ySey)(100-x) chalcogenide thin films,” J. Non-Cryst. Solids354(2-9), 533–539 (2008).
[CrossRef]

T. Kohoutek, T. Wagner, M. Frumar, A. Chrissanthopoulos, O. Kostadinova, and S. N. Yannopoulos, “Effect of cluster size of chalcogenide glass nanocolloidal solutions on the surface morphology of spin-coated amorphous films,” J. Appl. Phys.103(6), 063511 (2008).
[CrossRef]

A. Ganjoo, H. Jain, C. Yu, J. Irudayaraj, and C. G. Pantano, “Detection and fingerprinting of pathogens: Mid-IR biosensor using amorphous chalcogenide films,” J. Non-Cryst. Solids354(19-25), 2757–2762 (2008).
[CrossRef]

2007 (4)

T. Kohoutek, T. Wagner, J. Orava, M. Krbal, A. Fejfar, T. Mates, S. O. Kasap, and M. Frumar, “Surface morphology of spin-coated As-S-Se chalcogenide thin films,” J. Non-Cryst. Solids353(13-15), 1437–1440 (2007).
[CrossRef]

J. Orava, T. Wagner, A. Krbal, T. Kohoutek, M. Vlcek, and M. Frumar, “Selective wet-etching and characterization of chalcogenide thin films in inorganic alkaline solutions,” J. Non-Cryst. Solids353(13-15), 1441–1445 (2007).
[CrossRef]

M. Krbal, T. Wagner, T. Kohoutek, P. Nemec, J. Orava, and M. Frumar, “The comparison of Ag-As33S67 films prepared by thermal evaporation (TE), spin-coating (SC) and a pulsed laser deposition (PLD),” J. Phys. Chem. Solids68(5-6), 953–957 (2007).
[CrossRef]

J. J. Hu, V. Tarasov, A. Agarwal, L. Kimerling, N. Carlie, L. Petit, and K. Richardson, “Fabrication and testing of planar chalcogenide waveguide integrated microfluidic sensor,” Opt. Express15(5), 2307–2314 (2007).
[CrossRef] [PubMed]

2006 (3)

T. Kohoutek, T. Wagner, M. Vlcek, M. Vlcek, and M. Frumar, “Spin-coated As33S67-xSex thin films: the effect of annealing on structure and optical properties,” J. Non-Cryst. Solids352(9-20), 1563–1566 (2006).
[CrossRef]

A. Kovalskiy, A. Vlcek, H. Jain, A. Fiserova, C. M. Waits, and M. Dubey, “Development of chalcogenide glass photoresists for gray scale lithography,” J. Non-Cryst. Solids352(6-7), 589–594 (2006).
[CrossRef]

J. Orava, T. Wagner, M. Krbal, T. Kohoutek, M. Vlcek, and M. Frumar, “Selective wet-etching of undoped and silver photodoped amorphous thin films of chalcogenide glasses in inorganic alkaline solutions,” J. Non-Cryst. Solids352(9-20), 1637–1640 (2006).
[CrossRef]

2005 (1)

T. Kohoutek, T. Wágner, M. Vlček, M. Vlček, and M. Frumar, “Physico-chemical properties of spin-coated Ag–As–Sb–S films,” J. Non-Cryst. Solids351(27-29), 2205–2209 (2005).
[CrossRef]

2004 (2)

T. Kohoutek, T. Wagner, J. Orava, M. Frumar, V. Perina, A. Mackova, V. Hnatowitz, M. Vlcek, and S. Kasap, “Amorphous films of Ag-As-S system prepared by spin-coating technique, preparation techniques and films physico-chemical properties,” Vacuum76(2-3), 191–194 (2004).
[CrossRef]

V. Balan, C. Vigreux, and A. Pradel, “Chalcogenide thin films deposited by radio-frequency sputtering,” J. Optoelectron. Adv. Mater.6, 875–882 (2004).

2003 (2)

J. Gutwirth, T. Wagner, T. Kohoutek, M. Vlcek, S. Schroeter, V. Kovanda, M. Vlcek, and M. Frumar, “Physical properties and structure of amorphous Ag-x(Sb0.33S0.67)(100-x) prepared by optically-induced diffusion and dissolution of silver into spin-coated amorphous Sb33S67 films and their application for optical recording,” J. Optoelectron. Adv. Mater.5, 1139–1146 (2003).

T. Wágner, M. Krbal, T. Kohoutek, V. Peřina, M. Vlček, M. Vlček, and M. Frumar, “Kinetics of optically- and thermally-induced diffusion and dissolution of silver in spin-coated As33S67 amorphous films; their properties and structure,” J. Non-Cryst. Solids326–327, 233–237 (2003).
[CrossRef]

1997 (1)

S. A. Zenkin, S. B. Mamedov, M. D. Mikhailov, E. Y. Turkina, and I. Y. Yusupov, “Mechanism for interaction of amine solutions with monolithic glasses and amorphous films in the As-S system,” Glass Phys. Chem.23, 393–399 (1997).

1995 (1)

S. Shtutina, M. Klebanov, V. Lyubin, S. Rosenwaks, and V. Volterra, “Photoinduced Phenomena in Spin-Coated Vitreous As2S3 and AsSe Films,” Thin Solid Films261(1-2), 263–265 (1995).
[CrossRef]

1994 (1)

M. D. Michailov, S. B. Mamedov, and S. V. Tsventarnyi, “Dissolution Kinetics of Glassy Arsenic Sulfide in Alkali and Amine Solutions,” J. Non-Cryst. Solids176(2-3), 258–262 (1994).
[CrossRef]

1993 (2)

S. Mamedov, “On the macromolecular mechanism of dissolution of As2S3 films in organic solutions,” Thin Solid Films226(2), 215–218 (1993).
[CrossRef]

K. E. Youden, T. Grevatt, R. W. Eason, H. N. Rutt, R. S. Deol, and G. Wylangowski, “Pulsed-laser deposition of Ga-La-S chalcogenide glass thin-film optical wave-guides,” Appl. Phys. Lett.63(12), 1601–1603 (1993).
[CrossRef]

1989 (1)

T. A. Guiton and C. G. Pantano, “Solution/gelation of arseic trisulfide in amine solvents,” Chem. Mater.1(5), 558–563 (1989).
[CrossRef]

1987 (1)

J. J. Santiago, M. Sano, M. Hamman, and N. Chen, “Growth and optical characterization of spin-coated As2S3 multilayer thin-films,” Thin Solid Films147(3), 275–284 (1987).
[CrossRef]

1985 (1)

G. C. Chern, I. Lauks, and K. H. Norian, “Spin-coated amorphous chalcogenide films: Photoinduced effects,” Thin Solid Films123(4), 289–296 (1985).
[CrossRef]

1984 (1)

K. H. Norian, G. C. Chern, and I. Lauks, “Morphology and thermal properties of solvent-cast arsenic sulfide films,” J. Appl. Phys.55(10), 3795–3798 (1984).
[CrossRef]

1983 (2)

G. C. Chern, I. Lauks, and A. R. McGhie, “Spin coated amorphous chalcogenide films: Thermal properties,” J. Appl. Phys.54(8), 4596 (1983).
[CrossRef]

G. C. Chern and I. Lauks, “Spin coated amorphous chalcogenide films: Structural characterization,” J. Appl. Phys.54(5), 2701 (1983).
[CrossRef]

1982 (1)

G. C. Chern and I. Lauks, “Spin-coated amorphous-chalcogenide films,” J. Appl. Phys.53(10), 6979–6982 (1982).
[CrossRef]

Agarwal, A.

J. J. Hu, J. D. Musgraves, N. Carlie, B. Zdyrko, I. Luzinov, A. Agarwal, K. Richardson, and L. Kimerling, “Development of chipscale chalcogenide glass based infrared chemical sensors,” Quantum Sensing and Nanophotonic Devices7945,79452C (2011).

K. Richardson, L. Petit, N. Carlie, B. Zdyrko, I. Luzinov, J. Hu, A. Agarwal, L. Kimerling, T. Anderson, and M. Richardson, “Progress on the fabrication of on-chip, integrated chalcogenide glass (Chg)-based sensors,” J Nonlinear Opt Phys19(01), 75–99 (2010).
[CrossRef]

N. Carlie, J. D. Musgraves, B. Zdyrko, I. Luzinov, J. J. Hu, V. Singh, A. Agarwal, L. C. Kimerling, A. Canciamilla, F. Morichetti, A. Melloni, and K. Richardson, “Integrated chalcogenide waveguide resonators for mid-IR sensing: leveraging material properties to meet fabrication challenges,” Opt. Express18(25), 26728–26743 (2010).
[CrossRef] [PubMed]

J. J. Hu, V. Tarasov, A. Agarwal, L. Kimerling, N. Carlie, L. Petit, and K. Richardson, “Fabrication and testing of planar chalcogenide waveguide integrated microfluidic sensor,” Opt. Express15(5), 2307–2314 (2007).
[CrossRef] [PubMed]

Anderson, T.

K. Richardson, L. Petit, N. Carlie, B. Zdyrko, I. Luzinov, J. Hu, A. Agarwal, L. Kimerling, T. Anderson, and M. Richardson, “Progress on the fabrication of on-chip, integrated chalcogenide glass (Chg)-based sensors,” J Nonlinear Opt Phys19(01), 75–99 (2010).
[CrossRef]

Anikina, N. A.

M. D. Mikhailov and N. A. Anikina, “On the influence of stirring conditions on the dissolution rate of chalcogenide glasses and films,” Glass Phys. Chem.37(1), 21–28 (2011).
[CrossRef]

Arnold, C. B.

Y. Zha, S. Fingerman, S. J. Cantrell, and C. B. Arnold, “Pore formation and removal in solution-processed amorphous arsenic sulfide films,” J. Non-Cryst. Solids369, 11–16 (2013).
[CrossRef]

Y. Zha and C. B. Arnold, “Solution-processing of thick chalcogenide-chalcogenide and metal-chalcogenide structures by spin-coating and multilayer lamination,” Opt. Mater. Express3(2), 309–317 (2013).
[CrossRef]

M. Waldmann, J. D. Musgraves, K. Richardson, and C. B. Arnold, “Structural properties of solution processed Ge23Sb7S70 glass materials,” J. Mater. Chem.22(34), 17848 (2012).
[CrossRef]

E. A. Sanchez, M. Waldmann, and C. B. Arnold, “Chalcogenide glass microlenses by inkjet printing,” Appl. Opt.50(14), 1974–1978 (2011).
[CrossRef] [PubMed]

C. Tsay, Y. Zha, and C. B. Arnold, “Solution-processed chalcogenide glass for integrated single-mode mid-infrared waveguides,” Opt. Express18(25), 26744–26753 (2010).
[CrossRef] [PubMed]

S. Song, J. Dua, and C. B. Arnold, “Influence of annealing conditions on the optical and structural properties of spin-coated As2S3 chalcogenide glass thin films,” Opt. Express18(6), 5472–5480 (2010).
[CrossRef] [PubMed]

C. Tsay, E. Mujagić, C. K. Madsen, C. F. Gmachl, and C. B. Arnold, “Mid-infrared characterization of solution-processed As2S3 chalcogenide glass waveguides,” Opt. Express18(15), 15523–15530 (2010).
[CrossRef] [PubMed]

C. Tsay, F. Toor, C. F. Gmachl, and C. B. Arnold, “Chalcogenide glass waveguides integrated with quantum cascade lasers for on-chip mid-IR photonic circuits,” Opt. Lett.35(20), 3324–3326 (2010).
[CrossRef] [PubMed]

S. Song, N. Carlie, J. Boudies, L. Petit, K. Richardson, and C. B. Arnold, “Spin-coating of Ge23Sb7S70 chalcogenide glass thin films,” J. Non-Cryst. Solids355(45-47), 2272–2278 (2009).
[CrossRef]

Balan, V.

V. Balan, C. Vigreux, and A. Pradel, “Chalcogenide thin films deposited by radio-frequency sputtering,” J. Optoelectron. Adv. Mater.6, 875–882 (2004).

Beke, D.

V. Takáts, F. C. Miller, H. Jain, C. Cserhati, I. A. Szabo, D. Beke, and S. Kokenyesi, “Surface pattern recording in amorphous chalcogenide layers,” J. Non-Cryst. Solids355(37-42), 1849–1852 (2009).
[CrossRef]

Boudies, J.

S. Song, N. Carlie, J. Boudies, L. Petit, K. Richardson, and C. B. Arnold, “Spin-coating of Ge23Sb7S70 chalcogenide glass thin films,” J. Non-Cryst. Solids355(45-47), 2272–2278 (2009).
[CrossRef]

Bulla, D.

C. Grillet, M. W. Lee, X. Gai, S. Tomljenovic-Hanic, C. Monat, E. Magi, D. J. Moss, B. J. Eggleton, S. Madden, D. Y. Choi, D. Bulla, and B. Luther-Davies, “Chalcogenide glass photonic crystals: progress and prospects,” Proc. SPIE7609, 760913, 760913-9 (2010).
[CrossRef]

Canciamilla, A.

Cantrell, S. J.

Y. Zha, S. Fingerman, S. J. Cantrell, and C. B. Arnold, “Pore formation and removal in solution-processed amorphous arsenic sulfide films,” J. Non-Cryst. Solids369, 11–16 (2013).
[CrossRef]

Carlie, N.

J. J. Hu, J. D. Musgraves, N. Carlie, B. Zdyrko, I. Luzinov, A. Agarwal, K. Richardson, and L. Kimerling, “Development of chipscale chalcogenide glass based infrared chemical sensors,” Quantum Sensing and Nanophotonic Devices7945,79452C (2011).

K. Richardson, L. Petit, N. Carlie, B. Zdyrko, I. Luzinov, J. Hu, A. Agarwal, L. Kimerling, T. Anderson, and M. Richardson, “Progress on the fabrication of on-chip, integrated chalcogenide glass (Chg)-based sensors,” J Nonlinear Opt Phys19(01), 75–99 (2010).
[CrossRef]

N. Carlie, J. D. Musgraves, B. Zdyrko, I. Luzinov, J. J. Hu, V. Singh, A. Agarwal, L. C. Kimerling, A. Canciamilla, F. Morichetti, A. Melloni, and K. Richardson, “Integrated chalcogenide waveguide resonators for mid-IR sensing: leveraging material properties to meet fabrication challenges,” Opt. Express18(25), 26728–26743 (2010).
[CrossRef] [PubMed]

S. Song, N. Carlie, J. Boudies, L. Petit, K. Richardson, and C. B. Arnold, “Spin-coating of Ge23Sb7S70 chalcogenide glass thin films,” J. Non-Cryst. Solids355(45-47), 2272–2278 (2009).
[CrossRef]

J. J. Hu, V. Tarasov, A. Agarwal, L. Kimerling, N. Carlie, L. Petit, and K. Richardson, “Fabrication and testing of planar chalcogenide waveguide integrated microfluidic sensor,” Opt. Express15(5), 2307–2314 (2007).
[CrossRef] [PubMed]

Chen, N.

J. J. Santiago, M. Sano, M. Hamman, and N. Chen, “Growth and optical characterization of spin-coated As2S3 multilayer thin-films,” Thin Solid Films147(3), 275–284 (1987).
[CrossRef]

Chern, G. C.

G. C. Chern, I. Lauks, and K. H. Norian, “Spin-coated amorphous chalcogenide films: Photoinduced effects,” Thin Solid Films123(4), 289–296 (1985).
[CrossRef]

K. H. Norian, G. C. Chern, and I. Lauks, “Morphology and thermal properties of solvent-cast arsenic sulfide films,” J. Appl. Phys.55(10), 3795–3798 (1984).
[CrossRef]

G. C. Chern and I. Lauks, “Spin coated amorphous chalcogenide films: Structural characterization,” J. Appl. Phys.54(5), 2701 (1983).
[CrossRef]

G. C. Chern, I. Lauks, and A. R. McGhie, “Spin coated amorphous chalcogenide films: Thermal properties,” J. Appl. Phys.54(8), 4596 (1983).
[CrossRef]

G. C. Chern and I. Lauks, “Spin-coated amorphous-chalcogenide films,” J. Appl. Phys.53(10), 6979–6982 (1982).
[CrossRef]

Choi, D. Y.

C. Grillet, M. W. Lee, X. Gai, S. Tomljenovic-Hanic, C. Monat, E. Magi, D. J. Moss, B. J. Eggleton, S. Madden, D. Y. Choi, D. Bulla, and B. Luther-Davies, “Chalcogenide glass photonic crystals: progress and prospects,” Proc. SPIE7609, 760913, 760913-9 (2010).
[CrossRef]

Chrissanthopoulos, A.

T. Kohoutek, T. Wagner, M. Frumar, A. Chrissanthopoulos, O. Kostadinova, and S. N. Yannopoulos, “Effect of cluster size of chalcogenide glass nanocolloidal solutions on the surface morphology of spin-coated amorphous films,” J. Appl. Phys.103(6), 063511 (2008).
[CrossRef]

Cserhati, C.

V. Takáts, F. C. Miller, H. Jain, C. Cserhati, I. A. Szabo, D. Beke, and S. Kokenyesi, “Surface pattern recording in amorphous chalcogenide layers,” J. Non-Cryst. Solids355(37-42), 1849–1852 (2009).
[CrossRef]

Danto, S.

Deol, R. S.

K. E. Youden, T. Grevatt, R. W. Eason, H. N. Rutt, R. S. Deol, and G. Wylangowski, “Pulsed-laser deposition of Ga-La-S chalcogenide glass thin-film optical wave-guides,” Appl. Phys. Lett.63(12), 1601–1603 (1993).
[CrossRef]

Dua, J.

Dubey, M.

A. Kovalskiy, A. Vlcek, H. Jain, A. Fiserova, C. M. Waits, and M. Dubey, “Development of chalcogenide glass photoresists for gray scale lithography,” J. Non-Cryst. Solids352(6-7), 589–594 (2006).
[CrossRef]

Eason, R. W.

K. E. Youden, T. Grevatt, R. W. Eason, H. N. Rutt, R. S. Deol, and G. Wylangowski, “Pulsed-laser deposition of Ga-La-S chalcogenide glass thin-film optical wave-guides,” Appl. Phys. Lett.63(12), 1601–1603 (1993).
[CrossRef]

Eggleton, B. J.

B. J. Eggleton, B. Luther-Davies, and K. Richardson, “Chalcogenide photonics,” Nat. Photonics5, 141–148 (2011).

C. Grillet, M. W. Lee, X. Gai, S. Tomljenovic-Hanic, C. Monat, E. Magi, D. J. Moss, B. J. Eggleton, S. Madden, D. Y. Choi, D. Bulla, and B. Luther-Davies, “Chalcogenide glass photonic crystals: progress and prospects,” Proc. SPIE7609, 760913, 760913-9 (2010).
[CrossRef]

B. J. Eggleton, “Chalcogenide photonics: fabrication, devices and applications Introduction,” Opt. Express18(25), 26632–26634 (2010).
[CrossRef] [PubMed]

Fejfar, A.

T. Kohoutek, T. Wagner, J. Orava, M. Krbal, A. Fejfar, T. Mates, S. O. Kasap, and M. Frumar, “Surface morphology of spin-coated As-S-Se chalcogenide thin films,” J. Non-Cryst. Solids353(13-15), 1437–1440 (2007).
[CrossRef]

Fingerman, S.

Y. Zha, S. Fingerman, S. J. Cantrell, and C. B. Arnold, “Pore formation and removal in solution-processed amorphous arsenic sulfide films,” J. Non-Cryst. Solids369, 11–16 (2013).
[CrossRef]

Fiserova, A.

A. Kovalskiy, A. Vlcek, H. Jain, A. Fiserova, C. M. Waits, and M. Dubey, “Development of chalcogenide glass photoresists for gray scale lithography,” J. Non-Cryst. Solids352(6-7), 589–594 (2006).
[CrossRef]

Frumar, M.

T. Kohoutek, T. Wagner, M. Frumar, A. Chrissanthopoulos, O. Kostadinova, and S. N. Yannopoulos, “Effect of cluster size of chalcogenide glass nanocolloidal solutions on the surface morphology of spin-coated amorphous films,” J. Appl. Phys.103(6), 063511 (2008).
[CrossRef]

J. Orava, T. Wagner, M. Krbal, T. Kohoutek, M. Vlcek, P. Klapetek, and M. Frumar, “Selective dissolution of Ag-x(As0.33S0.67-ySey)(100-x) chalcogenide thin films,” J. Non-Cryst. Solids354(2-9), 533–539 (2008).
[CrossRef]

J. Orava, T. Wagner, A. Krbal, T. Kohoutek, M. Vlcek, and M. Frumar, “Selective wet-etching and characterization of chalcogenide thin films in inorganic alkaline solutions,” J. Non-Cryst. Solids353(13-15), 1441–1445 (2007).
[CrossRef]

M. Krbal, T. Wagner, T. Kohoutek, P. Nemec, J. Orava, and M. Frumar, “The comparison of Ag-As33S67 films prepared by thermal evaporation (TE), spin-coating (SC) and a pulsed laser deposition (PLD),” J. Phys. Chem. Solids68(5-6), 953–957 (2007).
[CrossRef]

T. Kohoutek, T. Wagner, J. Orava, M. Krbal, A. Fejfar, T. Mates, S. O. Kasap, and M. Frumar, “Surface morphology of spin-coated As-S-Se chalcogenide thin films,” J. Non-Cryst. Solids353(13-15), 1437–1440 (2007).
[CrossRef]

J. Orava, T. Wagner, M. Krbal, T. Kohoutek, M. Vlcek, and M. Frumar, “Selective wet-etching of undoped and silver photodoped amorphous thin films of chalcogenide glasses in inorganic alkaline solutions,” J. Non-Cryst. Solids352(9-20), 1637–1640 (2006).
[CrossRef]

T. Kohoutek, T. Wagner, M. Vlcek, M. Vlcek, and M. Frumar, “Spin-coated As33S67-xSex thin films: the effect of annealing on structure and optical properties,” J. Non-Cryst. Solids352(9-20), 1563–1566 (2006).
[CrossRef]

T. Kohoutek, T. Wágner, M. Vlček, M. Vlček, and M. Frumar, “Physico-chemical properties of spin-coated Ag–As–Sb–S films,” J. Non-Cryst. Solids351(27-29), 2205–2209 (2005).
[CrossRef]

T. Kohoutek, T. Wagner, J. Orava, M. Frumar, V. Perina, A. Mackova, V. Hnatowitz, M. Vlcek, and S. Kasap, “Amorphous films of Ag-As-S system prepared by spin-coating technique, preparation techniques and films physico-chemical properties,” Vacuum76(2-3), 191–194 (2004).
[CrossRef]

J. Gutwirth, T. Wagner, T. Kohoutek, M. Vlcek, S. Schroeter, V. Kovanda, M. Vlcek, and M. Frumar, “Physical properties and structure of amorphous Ag-x(Sb0.33S0.67)(100-x) prepared by optically-induced diffusion and dissolution of silver into spin-coated amorphous Sb33S67 films and their application for optical recording,” J. Optoelectron. Adv. Mater.5, 1139–1146 (2003).

T. Wágner, M. Krbal, T. Kohoutek, V. Peřina, M. Vlček, M. Vlček, and M. Frumar, “Kinetics of optically- and thermally-induced diffusion and dissolution of silver in spin-coated As33S67 amorphous films; their properties and structure,” J. Non-Cryst. Solids326–327, 233–237 (2003).
[CrossRef]

Fudouzi, H.

T. Kohoutek, J. Orava, T. Sawada, and H. Fudouzi, “Inverse opal photonic crystal of chalcogenide glass by solution processing,” J. Colloid Interface Sci.353(2), 454–458 (2011).
[CrossRef] [PubMed]

Gai, X.

C. Grillet, M. W. Lee, X. Gai, S. Tomljenovic-Hanic, C. Monat, E. Magi, D. J. Moss, B. J. Eggleton, S. Madden, D. Y. Choi, D. Bulla, and B. Luther-Davies, “Chalcogenide glass photonic crystals: progress and prospects,” Proc. SPIE7609, 760913, 760913-9 (2010).
[CrossRef]

Ganjoo, A.

A. Ganjoo, H. Jain, C. Yu, J. Irudayaraj, and C. G. Pantano, “Detection and fingerprinting of pathogens: Mid-IR biosensor using amorphous chalcogenide films,” J. Non-Cryst. Solids354(19-25), 2757–2762 (2008).
[CrossRef]

Gmachl, C. F.

Grevatt, T.

K. E. Youden, T. Grevatt, R. W. Eason, H. N. Rutt, R. S. Deol, and G. Wylangowski, “Pulsed-laser deposition of Ga-La-S chalcogenide glass thin-film optical wave-guides,” Appl. Phys. Lett.63(12), 1601–1603 (1993).
[CrossRef]

Grillet, C.

C. Grillet, M. W. Lee, X. Gai, S. Tomljenovic-Hanic, C. Monat, E. Magi, D. J. Moss, B. J. Eggleton, S. Madden, D. Y. Choi, D. Bulla, and B. Luther-Davies, “Chalcogenide glass photonic crystals: progress and prospects,” Proc. SPIE7609, 760913, 760913-9 (2010).
[CrossRef]

Guiton, T. A.

T. A. Guiton and C. G. Pantano, “Solution/gelation of arseic trisulfide in amine solvents,” Chem. Mater.1(5), 558–563 (1989).
[CrossRef]

Gutwirth, J.

J. Gutwirth, T. Wagner, T. Kohoutek, M. Vlcek, S. Schroeter, V. Kovanda, M. Vlcek, and M. Frumar, “Physical properties and structure of amorphous Ag-x(Sb0.33S0.67)(100-x) prepared by optically-induced diffusion and dissolution of silver into spin-coated amorphous Sb33S67 films and their application for optical recording,” J. Optoelectron. Adv. Mater.5, 1139–1146 (2003).

Hamman, M.

J. J. Santiago, M. Sano, M. Hamman, and N. Chen, “Growth and optical characterization of spin-coated As2S3 multilayer thin-films,” Thin Solid Films147(3), 275–284 (1987).
[CrossRef]

Hnatowitz, V.

T. Kohoutek, T. Wagner, J. Orava, M. Frumar, V. Perina, A. Mackova, V. Hnatowitz, M. Vlcek, and S. Kasap, “Amorphous films of Ag-As-S system prepared by spin-coating technique, preparation techniques and films physico-chemical properties,” Vacuum76(2-3), 191–194 (2004).
[CrossRef]

Hu, J.

Y. Zou, H. Lin, O. Ogbuu, L. Li, S. Danto, S. Novak, J. Novak, J. D. Musgraves, K. Richardson, and J. Hu, “Effect of annealing conditions on the physio-chemical properties of spin-coated As2Se3 chalcogenide glass films,” Opt. Mater. Express2(12), 1723–1732 (2012).
[CrossRef]

K. Richardson, L. Petit, N. Carlie, B. Zdyrko, I. Luzinov, J. Hu, A. Agarwal, L. Kimerling, T. Anderson, and M. Richardson, “Progress on the fabrication of on-chip, integrated chalcogenide glass (Chg)-based sensors,” J Nonlinear Opt Phys19(01), 75–99 (2010).
[CrossRef]

Hu, J. J.

Irudayaraj, J.

A. Ganjoo, H. Jain, C. Yu, J. Irudayaraj, and C. G. Pantano, “Detection and fingerprinting of pathogens: Mid-IR biosensor using amorphous chalcogenide films,” J. Non-Cryst. Solids354(19-25), 2757–2762 (2008).
[CrossRef]

Jain, H.

V. Takats, P. Nemec, A. C. Miller, H. Jain, and S. Kokenyesi, “Surface patterning on amorphous chalcogenide nanomultilayers,” Opt. Mater.32(6), 677–679 (2010).
[CrossRef]

V. Takáts, F. C. Miller, H. Jain, C. Cserhati, I. A. Szabo, D. Beke, and S. Kokenyesi, “Surface pattern recording in amorphous chalcogenide layers,” J. Non-Cryst. Solids355(37-42), 1849–1852 (2009).
[CrossRef]

A. Ganjoo, H. Jain, C. Yu, J. Irudayaraj, and C. G. Pantano, “Detection and fingerprinting of pathogens: Mid-IR biosensor using amorphous chalcogenide films,” J. Non-Cryst. Solids354(19-25), 2757–2762 (2008).
[CrossRef]

A. Kovalskiy, A. Vlcek, H. Jain, A. Fiserova, C. M. Waits, and M. Dubey, “Development of chalcogenide glass photoresists for gray scale lithography,” J. Non-Cryst. Solids352(6-7), 589–594 (2006).
[CrossRef]

Kasap, S.

T. Kohoutek, T. Wagner, J. Orava, M. Frumar, V. Perina, A. Mackova, V. Hnatowitz, M. Vlcek, and S. Kasap, “Amorphous films of Ag-As-S system prepared by spin-coating technique, preparation techniques and films physico-chemical properties,” Vacuum76(2-3), 191–194 (2004).
[CrossRef]

Kasap, S. O.

T. Kohoutek, T. Wagner, J. Orava, M. Krbal, A. Fejfar, T. Mates, S. O. Kasap, and M. Frumar, “Surface morphology of spin-coated As-S-Se chalcogenide thin films,” J. Non-Cryst. Solids353(13-15), 1437–1440 (2007).
[CrossRef]

Kimerling, L.

J. J. Hu, J. D. Musgraves, N. Carlie, B. Zdyrko, I. Luzinov, A. Agarwal, K. Richardson, and L. Kimerling, “Development of chipscale chalcogenide glass based infrared chemical sensors,” Quantum Sensing and Nanophotonic Devices7945,79452C (2011).

K. Richardson, L. Petit, N. Carlie, B. Zdyrko, I. Luzinov, J. Hu, A. Agarwal, L. Kimerling, T. Anderson, and M. Richardson, “Progress on the fabrication of on-chip, integrated chalcogenide glass (Chg)-based sensors,” J Nonlinear Opt Phys19(01), 75–99 (2010).
[CrossRef]

J. J. Hu, V. Tarasov, A. Agarwal, L. Kimerling, N. Carlie, L. Petit, and K. Richardson, “Fabrication and testing of planar chalcogenide waveguide integrated microfluidic sensor,” Opt. Express15(5), 2307–2314 (2007).
[CrossRef] [PubMed]

Kimerling, L. C.

Klapetek, P.

J. Orava, T. Wagner, M. Krbal, T. Kohoutek, M. Vlcek, P. Klapetek, and M. Frumar, “Selective dissolution of Ag-x(As0.33S0.67-ySey)(100-x) chalcogenide thin films,” J. Non-Cryst. Solids354(2-9), 533–539 (2008).
[CrossRef]

Klebanov, M.

S. Shtutina, M. Klebanov, V. Lyubin, S. Rosenwaks, and V. Volterra, “Photoinduced Phenomena in Spin-Coated Vitreous As2S3 and AsSe Films,” Thin Solid Films261(1-2), 263–265 (1995).
[CrossRef]

Kohoutek, T.

T. Kohoutek, J. Orava, T. Sawada, and H. Fudouzi, “Inverse opal photonic crystal of chalcogenide glass by solution processing,” J. Colloid Interface Sci.353(2), 454–458 (2011).
[CrossRef] [PubMed]

T. Kohoutek, T. Wagner, M. Frumar, A. Chrissanthopoulos, O. Kostadinova, and S. N. Yannopoulos, “Effect of cluster size of chalcogenide glass nanocolloidal solutions on the surface morphology of spin-coated amorphous films,” J. Appl. Phys.103(6), 063511 (2008).
[CrossRef]

J. Orava, T. Wagner, M. Krbal, T. Kohoutek, M. Vlcek, P. Klapetek, and M. Frumar, “Selective dissolution of Ag-x(As0.33S0.67-ySey)(100-x) chalcogenide thin films,” J. Non-Cryst. Solids354(2-9), 533–539 (2008).
[CrossRef]

M. Krbal, T. Wagner, T. Kohoutek, P. Nemec, J. Orava, and M. Frumar, “The comparison of Ag-As33S67 films prepared by thermal evaporation (TE), spin-coating (SC) and a pulsed laser deposition (PLD),” J. Phys. Chem. Solids68(5-6), 953–957 (2007).
[CrossRef]

J. Orava, T. Wagner, A. Krbal, T. Kohoutek, M. Vlcek, and M. Frumar, “Selective wet-etching and characterization of chalcogenide thin films in inorganic alkaline solutions,” J. Non-Cryst. Solids353(13-15), 1441–1445 (2007).
[CrossRef]

T. Kohoutek, T. Wagner, J. Orava, M. Krbal, A. Fejfar, T. Mates, S. O. Kasap, and M. Frumar, “Surface morphology of spin-coated As-S-Se chalcogenide thin films,” J. Non-Cryst. Solids353(13-15), 1437–1440 (2007).
[CrossRef]

J. Orava, T. Wagner, M. Krbal, T. Kohoutek, M. Vlcek, and M. Frumar, “Selective wet-etching of undoped and silver photodoped amorphous thin films of chalcogenide glasses in inorganic alkaline solutions,” J. Non-Cryst. Solids352(9-20), 1637–1640 (2006).
[CrossRef]

T. Kohoutek, T. Wagner, M. Vlcek, M. Vlcek, and M. Frumar, “Spin-coated As33S67-xSex thin films: the effect of annealing on structure and optical properties,” J. Non-Cryst. Solids352(9-20), 1563–1566 (2006).
[CrossRef]

T. Kohoutek, T. Wágner, M. Vlček, M. Vlček, and M. Frumar, “Physico-chemical properties of spin-coated Ag–As–Sb–S films,” J. Non-Cryst. Solids351(27-29), 2205–2209 (2005).
[CrossRef]

T. Kohoutek, T. Wagner, J. Orava, M. Frumar, V. Perina, A. Mackova, V. Hnatowitz, M. Vlcek, and S. Kasap, “Amorphous films of Ag-As-S system prepared by spin-coating technique, preparation techniques and films physico-chemical properties,” Vacuum76(2-3), 191–194 (2004).
[CrossRef]

J. Gutwirth, T. Wagner, T. Kohoutek, M. Vlcek, S. Schroeter, V. Kovanda, M. Vlcek, and M. Frumar, “Physical properties and structure of amorphous Ag-x(Sb0.33S0.67)(100-x) prepared by optically-induced diffusion and dissolution of silver into spin-coated amorphous Sb33S67 films and their application for optical recording,” J. Optoelectron. Adv. Mater.5, 1139–1146 (2003).

T. Wágner, M. Krbal, T. Kohoutek, V. Peřina, M. Vlček, M. Vlček, and M. Frumar, “Kinetics of optically- and thermally-induced diffusion and dissolution of silver in spin-coated As33S67 amorphous films; their properties and structure,” J. Non-Cryst. Solids326–327, 233–237 (2003).
[CrossRef]

Kokenyesi, S.

V. Takats, P. Nemec, A. C. Miller, H. Jain, and S. Kokenyesi, “Surface patterning on amorphous chalcogenide nanomultilayers,” Opt. Mater.32(6), 677–679 (2010).
[CrossRef]

V. Takáts, F. C. Miller, H. Jain, C. Cserhati, I. A. Szabo, D. Beke, and S. Kokenyesi, “Surface pattern recording in amorphous chalcogenide layers,” J. Non-Cryst. Solids355(37-42), 1849–1852 (2009).
[CrossRef]

Kostadinova, O.

T. Kohoutek, T. Wagner, M. Frumar, A. Chrissanthopoulos, O. Kostadinova, and S. N. Yannopoulos, “Effect of cluster size of chalcogenide glass nanocolloidal solutions on the surface morphology of spin-coated amorphous films,” J. Appl. Phys.103(6), 063511 (2008).
[CrossRef]

Kovalskiy, A.

A. Kovalskiy, A. Vlcek, H. Jain, A. Fiserova, C. M. Waits, and M. Dubey, “Development of chalcogenide glass photoresists for gray scale lithography,” J. Non-Cryst. Solids352(6-7), 589–594 (2006).
[CrossRef]

Kovanda, V.

J. Gutwirth, T. Wagner, T. Kohoutek, M. Vlcek, S. Schroeter, V. Kovanda, M. Vlcek, and M. Frumar, “Physical properties and structure of amorphous Ag-x(Sb0.33S0.67)(100-x) prepared by optically-induced diffusion and dissolution of silver into spin-coated amorphous Sb33S67 films and their application for optical recording,” J. Optoelectron. Adv. Mater.5, 1139–1146 (2003).

Krbal, A.

J. Orava, T. Wagner, A. Krbal, T. Kohoutek, M. Vlcek, and M. Frumar, “Selective wet-etching and characterization of chalcogenide thin films in inorganic alkaline solutions,” J. Non-Cryst. Solids353(13-15), 1441–1445 (2007).
[CrossRef]

Krbal, M.

J. Orava, T. Wagner, M. Krbal, T. Kohoutek, M. Vlcek, P. Klapetek, and M. Frumar, “Selective dissolution of Ag-x(As0.33S0.67-ySey)(100-x) chalcogenide thin films,” J. Non-Cryst. Solids354(2-9), 533–539 (2008).
[CrossRef]

M. Krbal, T. Wagner, T. Kohoutek, P. Nemec, J. Orava, and M. Frumar, “The comparison of Ag-As33S67 films prepared by thermal evaporation (TE), spin-coating (SC) and a pulsed laser deposition (PLD),” J. Phys. Chem. Solids68(5-6), 953–957 (2007).
[CrossRef]

T. Kohoutek, T. Wagner, J. Orava, M. Krbal, A. Fejfar, T. Mates, S. O. Kasap, and M. Frumar, “Surface morphology of spin-coated As-S-Se chalcogenide thin films,” J. Non-Cryst. Solids353(13-15), 1437–1440 (2007).
[CrossRef]

J. Orava, T. Wagner, M. Krbal, T. Kohoutek, M. Vlcek, and M. Frumar, “Selective wet-etching of undoped and silver photodoped amorphous thin films of chalcogenide glasses in inorganic alkaline solutions,” J. Non-Cryst. Solids352(9-20), 1637–1640 (2006).
[CrossRef]

T. Wágner, M. Krbal, T. Kohoutek, V. Peřina, M. Vlček, M. Vlček, and M. Frumar, “Kinetics of optically- and thermally-induced diffusion and dissolution of silver in spin-coated As33S67 amorphous films; their properties and structure,” J. Non-Cryst. Solids326–327, 233–237 (2003).
[CrossRef]

Lauks, I.

G. C. Chern, I. Lauks, and K. H. Norian, “Spin-coated amorphous chalcogenide films: Photoinduced effects,” Thin Solid Films123(4), 289–296 (1985).
[CrossRef]

K. H. Norian, G. C. Chern, and I. Lauks, “Morphology and thermal properties of solvent-cast arsenic sulfide films,” J. Appl. Phys.55(10), 3795–3798 (1984).
[CrossRef]

G. C. Chern and I. Lauks, “Spin coated amorphous chalcogenide films: Structural characterization,” J. Appl. Phys.54(5), 2701 (1983).
[CrossRef]

G. C. Chern, I. Lauks, and A. R. McGhie, “Spin coated amorphous chalcogenide films: Thermal properties,” J. Appl. Phys.54(8), 4596 (1983).
[CrossRef]

G. C. Chern and I. Lauks, “Spin-coated amorphous-chalcogenide films,” J. Appl. Phys.53(10), 6979–6982 (1982).
[CrossRef]

Lee, M. W.

C. Grillet, M. W. Lee, X. Gai, S. Tomljenovic-Hanic, C. Monat, E. Magi, D. J. Moss, B. J. Eggleton, S. Madden, D. Y. Choi, D. Bulla, and B. Luther-Davies, “Chalcogenide glass photonic crystals: progress and prospects,” Proc. SPIE7609, 760913, 760913-9 (2010).
[CrossRef]

Li, L.

Lin, H.

Luther-Davies, B.

B. J. Eggleton, B. Luther-Davies, and K. Richardson, “Chalcogenide photonics,” Nat. Photonics5, 141–148 (2011).

C. Grillet, M. W. Lee, X. Gai, S. Tomljenovic-Hanic, C. Monat, E. Magi, D. J. Moss, B. J. Eggleton, S. Madden, D. Y. Choi, D. Bulla, and B. Luther-Davies, “Chalcogenide glass photonic crystals: progress and prospects,” Proc. SPIE7609, 760913, 760913-9 (2010).
[CrossRef]

Luzinov, I.

J. J. Hu, J. D. Musgraves, N. Carlie, B. Zdyrko, I. Luzinov, A. Agarwal, K. Richardson, and L. Kimerling, “Development of chipscale chalcogenide glass based infrared chemical sensors,” Quantum Sensing and Nanophotonic Devices7945,79452C (2011).

K. Richardson, L. Petit, N. Carlie, B. Zdyrko, I. Luzinov, J. Hu, A. Agarwal, L. Kimerling, T. Anderson, and M. Richardson, “Progress on the fabrication of on-chip, integrated chalcogenide glass (Chg)-based sensors,” J Nonlinear Opt Phys19(01), 75–99 (2010).
[CrossRef]

N. Carlie, J. D. Musgraves, B. Zdyrko, I. Luzinov, J. J. Hu, V. Singh, A. Agarwal, L. C. Kimerling, A. Canciamilla, F. Morichetti, A. Melloni, and K. Richardson, “Integrated chalcogenide waveguide resonators for mid-IR sensing: leveraging material properties to meet fabrication challenges,” Opt. Express18(25), 26728–26743 (2010).
[CrossRef] [PubMed]

Lyubin, V.

S. Shtutina, M. Klebanov, V. Lyubin, S. Rosenwaks, and V. Volterra, “Photoinduced Phenomena in Spin-Coated Vitreous As2S3 and AsSe Films,” Thin Solid Films261(1-2), 263–265 (1995).
[CrossRef]

Mackova, A.

T. Kohoutek, T. Wagner, J. Orava, M. Frumar, V. Perina, A. Mackova, V. Hnatowitz, M. Vlcek, and S. Kasap, “Amorphous films of Ag-As-S system prepared by spin-coating technique, preparation techniques and films physico-chemical properties,” Vacuum76(2-3), 191–194 (2004).
[CrossRef]

Madden, S.

C. Grillet, M. W. Lee, X. Gai, S. Tomljenovic-Hanic, C. Monat, E. Magi, D. J. Moss, B. J. Eggleton, S. Madden, D. Y. Choi, D. Bulla, and B. Luther-Davies, “Chalcogenide glass photonic crystals: progress and prospects,” Proc. SPIE7609, 760913, 760913-9 (2010).
[CrossRef]

Madsen, C. K.

Magi, E.

C. Grillet, M. W. Lee, X. Gai, S. Tomljenovic-Hanic, C. Monat, E. Magi, D. J. Moss, B. J. Eggleton, S. Madden, D. Y. Choi, D. Bulla, and B. Luther-Davies, “Chalcogenide glass photonic crystals: progress and prospects,” Proc. SPIE7609, 760913, 760913-9 (2010).
[CrossRef]

Mamedov, S.

S. Mamedov, “On the macromolecular mechanism of dissolution of As2S3 films in organic solutions,” Thin Solid Films226(2), 215–218 (1993).
[CrossRef]

Mamedov, S. B.

S. A. Zenkin, S. B. Mamedov, M. D. Mikhailov, E. Y. Turkina, and I. Y. Yusupov, “Mechanism for interaction of amine solutions with monolithic glasses and amorphous films in the As-S system,” Glass Phys. Chem.23, 393–399 (1997).

M. D. Michailov, S. B. Mamedov, and S. V. Tsventarnyi, “Dissolution Kinetics of Glassy Arsenic Sulfide in Alkali and Amine Solutions,” J. Non-Cryst. Solids176(2-3), 258–262 (1994).
[CrossRef]

Markos, C.

Mates, T.

T. Kohoutek, T. Wagner, J. Orava, M. Krbal, A. Fejfar, T. Mates, S. O. Kasap, and M. Frumar, “Surface morphology of spin-coated As-S-Se chalcogenide thin films,” J. Non-Cryst. Solids353(13-15), 1437–1440 (2007).
[CrossRef]

McGhie, A. R.

G. C. Chern, I. Lauks, and A. R. McGhie, “Spin coated amorphous chalcogenide films: Thermal properties,” J. Appl. Phys.54(8), 4596 (1983).
[CrossRef]

Melloni, A.

Michailov, M. D.

M. D. Michailov, S. B. Mamedov, and S. V. Tsventarnyi, “Dissolution Kinetics of Glassy Arsenic Sulfide in Alkali and Amine Solutions,” J. Non-Cryst. Solids176(2-3), 258–262 (1994).
[CrossRef]

Mikhailov, M. D.

M. D. Mikhailov and N. A. Anikina, “On the influence of stirring conditions on the dissolution rate of chalcogenide glasses and films,” Glass Phys. Chem.37(1), 21–28 (2011).
[CrossRef]

S. A. Zenkin, S. B. Mamedov, M. D. Mikhailov, E. Y. Turkina, and I. Y. Yusupov, “Mechanism for interaction of amine solutions with monolithic glasses and amorphous films in the As-S system,” Glass Phys. Chem.23, 393–399 (1997).

Miller, A. C.

V. Takats, P. Nemec, A. C. Miller, H. Jain, and S. Kokenyesi, “Surface patterning on amorphous chalcogenide nanomultilayers,” Opt. Mater.32(6), 677–679 (2010).
[CrossRef]

Miller, F. C.

V. Takáts, F. C. Miller, H. Jain, C. Cserhati, I. A. Szabo, D. Beke, and S. Kokenyesi, “Surface pattern recording in amorphous chalcogenide layers,” J. Non-Cryst. Solids355(37-42), 1849–1852 (2009).
[CrossRef]

Monat, C.

C. Grillet, M. W. Lee, X. Gai, S. Tomljenovic-Hanic, C. Monat, E. Magi, D. J. Moss, B. J. Eggleton, S. Madden, D. Y. Choi, D. Bulla, and B. Luther-Davies, “Chalcogenide glass photonic crystals: progress and prospects,” Proc. SPIE7609, 760913, 760913-9 (2010).
[CrossRef]

Morichetti, F.

Moss, D. J.

C. Grillet, M. W. Lee, X. Gai, S. Tomljenovic-Hanic, C. Monat, E. Magi, D. J. Moss, B. J. Eggleton, S. Madden, D. Y. Choi, D. Bulla, and B. Luther-Davies, “Chalcogenide glass photonic crystals: progress and prospects,” Proc. SPIE7609, 760913, 760913-9 (2010).
[CrossRef]

Mujagic, E.

Musgraves, J. D.

Nemec, P.

V. Takats, P. Nemec, A. C. Miller, H. Jain, and S. Kokenyesi, “Surface patterning on amorphous chalcogenide nanomultilayers,” Opt. Mater.32(6), 677–679 (2010).
[CrossRef]

M. Krbal, T. Wagner, T. Kohoutek, P. Nemec, J. Orava, and M. Frumar, “The comparison of Ag-As33S67 films prepared by thermal evaporation (TE), spin-coating (SC) and a pulsed laser deposition (PLD),” J. Phys. Chem. Solids68(5-6), 953–957 (2007).
[CrossRef]

Norian, K. H.

G. C. Chern, I. Lauks, and K. H. Norian, “Spin-coated amorphous chalcogenide films: Photoinduced effects,” Thin Solid Films123(4), 289–296 (1985).
[CrossRef]

K. H. Norian, G. C. Chern, and I. Lauks, “Morphology and thermal properties of solvent-cast arsenic sulfide films,” J. Appl. Phys.55(10), 3795–3798 (1984).
[CrossRef]

Novak, J.

Novak, S.

Ogbuu, O.

Orava, J.

T. Kohoutek, J. Orava, T. Sawada, and H. Fudouzi, “Inverse opal photonic crystal of chalcogenide glass by solution processing,” J. Colloid Interface Sci.353(2), 454–458 (2011).
[CrossRef] [PubMed]

J. Orava, T. Wagner, M. Krbal, T. Kohoutek, M. Vlcek, P. Klapetek, and M. Frumar, “Selective dissolution of Ag-x(As0.33S0.67-ySey)(100-x) chalcogenide thin films,” J. Non-Cryst. Solids354(2-9), 533–539 (2008).
[CrossRef]

M. Krbal, T. Wagner, T. Kohoutek, P. Nemec, J. Orava, and M. Frumar, “The comparison of Ag-As33S67 films prepared by thermal evaporation (TE), spin-coating (SC) and a pulsed laser deposition (PLD),” J. Phys. Chem. Solids68(5-6), 953–957 (2007).
[CrossRef]

J. Orava, T. Wagner, A. Krbal, T. Kohoutek, M. Vlcek, and M. Frumar, “Selective wet-etching and characterization of chalcogenide thin films in inorganic alkaline solutions,” J. Non-Cryst. Solids353(13-15), 1441–1445 (2007).
[CrossRef]

T. Kohoutek, T. Wagner, J. Orava, M. Krbal, A. Fejfar, T. Mates, S. O. Kasap, and M. Frumar, “Surface morphology of spin-coated As-S-Se chalcogenide thin films,” J. Non-Cryst. Solids353(13-15), 1437–1440 (2007).
[CrossRef]

J. Orava, T. Wagner, M. Krbal, T. Kohoutek, M. Vlcek, and M. Frumar, “Selective wet-etching of undoped and silver photodoped amorphous thin films of chalcogenide glasses in inorganic alkaline solutions,” J. Non-Cryst. Solids352(9-20), 1637–1640 (2006).
[CrossRef]

T. Kohoutek, T. Wagner, J. Orava, M. Frumar, V. Perina, A. Mackova, V. Hnatowitz, M. Vlcek, and S. Kasap, “Amorphous films of Ag-As-S system prepared by spin-coating technique, preparation techniques and films physico-chemical properties,” Vacuum76(2-3), 191–194 (2004).
[CrossRef]

Pantano, C. G.

A. Ganjoo, H. Jain, C. Yu, J. Irudayaraj, and C. G. Pantano, “Detection and fingerprinting of pathogens: Mid-IR biosensor using amorphous chalcogenide films,” J. Non-Cryst. Solids354(19-25), 2757–2762 (2008).
[CrossRef]

T. A. Guiton and C. G. Pantano, “Solution/gelation of arseic trisulfide in amine solvents,” Chem. Mater.1(5), 558–563 (1989).
[CrossRef]

Perina, V.

T. Kohoutek, T. Wagner, J. Orava, M. Frumar, V. Perina, A. Mackova, V. Hnatowitz, M. Vlcek, and S. Kasap, “Amorphous films of Ag-As-S system prepared by spin-coating technique, preparation techniques and films physico-chemical properties,” Vacuum76(2-3), 191–194 (2004).
[CrossRef]

T. Wágner, M. Krbal, T. Kohoutek, V. Peřina, M. Vlček, M. Vlček, and M. Frumar, “Kinetics of optically- and thermally-induced diffusion and dissolution of silver in spin-coated As33S67 amorphous films; their properties and structure,” J. Non-Cryst. Solids326–327, 233–237 (2003).
[CrossRef]

Petit, L.

K. Richardson, L. Petit, N. Carlie, B. Zdyrko, I. Luzinov, J. Hu, A. Agarwal, L. Kimerling, T. Anderson, and M. Richardson, “Progress on the fabrication of on-chip, integrated chalcogenide glass (Chg)-based sensors,” J Nonlinear Opt Phys19(01), 75–99 (2010).
[CrossRef]

S. Song, N. Carlie, J. Boudies, L. Petit, K. Richardson, and C. B. Arnold, “Spin-coating of Ge23Sb7S70 chalcogenide glass thin films,” J. Non-Cryst. Solids355(45-47), 2272–2278 (2009).
[CrossRef]

J. J. Hu, V. Tarasov, A. Agarwal, L. Kimerling, N. Carlie, L. Petit, and K. Richardson, “Fabrication and testing of planar chalcogenide waveguide integrated microfluidic sensor,” Opt. Express15(5), 2307–2314 (2007).
[CrossRef] [PubMed]

Pradel, A.

V. Balan, C. Vigreux, and A. Pradel, “Chalcogenide thin films deposited by radio-frequency sputtering,” J. Optoelectron. Adv. Mater.6, 875–882 (2004).

Richardson, K.

M. Waldmann, J. D. Musgraves, K. Richardson, and C. B. Arnold, “Structural properties of solution processed Ge23Sb7S70 glass materials,” J. Mater. Chem.22(34), 17848 (2012).
[CrossRef]

Y. Zou, H. Lin, O. Ogbuu, L. Li, S. Danto, S. Novak, J. Novak, J. D. Musgraves, K. Richardson, and J. Hu, “Effect of annealing conditions on the physio-chemical properties of spin-coated As2Se3 chalcogenide glass films,” Opt. Mater. Express2(12), 1723–1732 (2012).
[CrossRef]

B. J. Eggleton, B. Luther-Davies, and K. Richardson, “Chalcogenide photonics,” Nat. Photonics5, 141–148 (2011).

J. J. Hu, J. D. Musgraves, N. Carlie, B. Zdyrko, I. Luzinov, A. Agarwal, K. Richardson, and L. Kimerling, “Development of chipscale chalcogenide glass based infrared chemical sensors,” Quantum Sensing and Nanophotonic Devices7945,79452C (2011).

K. Richardson, L. Petit, N. Carlie, B. Zdyrko, I. Luzinov, J. Hu, A. Agarwal, L. Kimerling, T. Anderson, and M. Richardson, “Progress on the fabrication of on-chip, integrated chalcogenide glass (Chg)-based sensors,” J Nonlinear Opt Phys19(01), 75–99 (2010).
[CrossRef]

N. Carlie, J. D. Musgraves, B. Zdyrko, I. Luzinov, J. J. Hu, V. Singh, A. Agarwal, L. C. Kimerling, A. Canciamilla, F. Morichetti, A. Melloni, and K. Richardson, “Integrated chalcogenide waveguide resonators for mid-IR sensing: leveraging material properties to meet fabrication challenges,” Opt. Express18(25), 26728–26743 (2010).
[CrossRef] [PubMed]

S. Song, N. Carlie, J. Boudies, L. Petit, K. Richardson, and C. B. Arnold, “Spin-coating of Ge23Sb7S70 chalcogenide glass thin films,” J. Non-Cryst. Solids355(45-47), 2272–2278 (2009).
[CrossRef]

J. J. Hu, V. Tarasov, A. Agarwal, L. Kimerling, N. Carlie, L. Petit, and K. Richardson, “Fabrication and testing of planar chalcogenide waveguide integrated microfluidic sensor,” Opt. Express15(5), 2307–2314 (2007).
[CrossRef] [PubMed]

Richardson, M.

K. Richardson, L. Petit, N. Carlie, B. Zdyrko, I. Luzinov, J. Hu, A. Agarwal, L. Kimerling, T. Anderson, and M. Richardson, “Progress on the fabrication of on-chip, integrated chalcogenide glass (Chg)-based sensors,” J Nonlinear Opt Phys19(01), 75–99 (2010).
[CrossRef]

Rosenwaks, S.

S. Shtutina, M. Klebanov, V. Lyubin, S. Rosenwaks, and V. Volterra, “Photoinduced Phenomena in Spin-Coated Vitreous As2S3 and AsSe Films,” Thin Solid Films261(1-2), 263–265 (1995).
[CrossRef]

Rutt, H. N.

K. E. Youden, T. Grevatt, R. W. Eason, H. N. Rutt, R. S. Deol, and G. Wylangowski, “Pulsed-laser deposition of Ga-La-S chalcogenide glass thin-film optical wave-guides,” Appl. Phys. Lett.63(12), 1601–1603 (1993).
[CrossRef]

Sanchez, E. A.

Sano, M.

J. J. Santiago, M. Sano, M. Hamman, and N. Chen, “Growth and optical characterization of spin-coated As2S3 multilayer thin-films,” Thin Solid Films147(3), 275–284 (1987).
[CrossRef]

Santiago, J. J.

J. J. Santiago, M. Sano, M. Hamman, and N. Chen, “Growth and optical characterization of spin-coated As2S3 multilayer thin-films,” Thin Solid Films147(3), 275–284 (1987).
[CrossRef]

Sawada, T.

T. Kohoutek, J. Orava, T. Sawada, and H. Fudouzi, “Inverse opal photonic crystal of chalcogenide glass by solution processing,” J. Colloid Interface Sci.353(2), 454–458 (2011).
[CrossRef] [PubMed]

Schroeter, S.

J. Gutwirth, T. Wagner, T. Kohoutek, M. Vlcek, S. Schroeter, V. Kovanda, M. Vlcek, and M. Frumar, “Physical properties and structure of amorphous Ag-x(Sb0.33S0.67)(100-x) prepared by optically-induced diffusion and dissolution of silver into spin-coated amorphous Sb33S67 films and their application for optical recording,” J. Optoelectron. Adv. Mater.5, 1139–1146 (2003).

Shtutina, S.

S. Shtutina, M. Klebanov, V. Lyubin, S. Rosenwaks, and V. Volterra, “Photoinduced Phenomena in Spin-Coated Vitreous As2S3 and AsSe Films,” Thin Solid Films261(1-2), 263–265 (1995).
[CrossRef]

Singh, V.

Song, S.

S. Song, J. Dua, and C. B. Arnold, “Influence of annealing conditions on the optical and structural properties of spin-coated As2S3 chalcogenide glass thin films,” Opt. Express18(6), 5472–5480 (2010).
[CrossRef] [PubMed]

S. Song, N. Carlie, J. Boudies, L. Petit, K. Richardson, and C. B. Arnold, “Spin-coating of Ge23Sb7S70 chalcogenide glass thin films,” J. Non-Cryst. Solids355(45-47), 2272–2278 (2009).
[CrossRef]

Szabo, I. A.

V. Takáts, F. C. Miller, H. Jain, C. Cserhati, I. A. Szabo, D. Beke, and S. Kokenyesi, “Surface pattern recording in amorphous chalcogenide layers,” J. Non-Cryst. Solids355(37-42), 1849–1852 (2009).
[CrossRef]

Takats, V.

V. Takats, P. Nemec, A. C. Miller, H. Jain, and S. Kokenyesi, “Surface patterning on amorphous chalcogenide nanomultilayers,” Opt. Mater.32(6), 677–679 (2010).
[CrossRef]

Takáts, V.

V. Takáts, F. C. Miller, H. Jain, C. Cserhati, I. A. Szabo, D. Beke, and S. Kokenyesi, “Surface pattern recording in amorphous chalcogenide layers,” J. Non-Cryst. Solids355(37-42), 1849–1852 (2009).
[CrossRef]

Tarasov, V.

Tomljenovic-Hanic, S.

C. Grillet, M. W. Lee, X. Gai, S. Tomljenovic-Hanic, C. Monat, E. Magi, D. J. Moss, B. J. Eggleton, S. Madden, D. Y. Choi, D. Bulla, and B. Luther-Davies, “Chalcogenide glass photonic crystals: progress and prospects,” Proc. SPIE7609, 760913, 760913-9 (2010).
[CrossRef]

Toor, F.

Tsay, C.

Tsventarnyi, S. V.

M. D. Michailov, S. B. Mamedov, and S. V. Tsventarnyi, “Dissolution Kinetics of Glassy Arsenic Sulfide in Alkali and Amine Solutions,” J. Non-Cryst. Solids176(2-3), 258–262 (1994).
[CrossRef]

Turkina, E. Y.

S. A. Zenkin, S. B. Mamedov, M. D. Mikhailov, E. Y. Turkina, and I. Y. Yusupov, “Mechanism for interaction of amine solutions with monolithic glasses and amorphous films in the As-S system,” Glass Phys. Chem.23, 393–399 (1997).

Vigreux, C.

V. Balan, C. Vigreux, and A. Pradel, “Chalcogenide thin films deposited by radio-frequency sputtering,” J. Optoelectron. Adv. Mater.6, 875–882 (2004).

Vlachos, K.

Vlcek, A.

A. Kovalskiy, A. Vlcek, H. Jain, A. Fiserova, C. M. Waits, and M. Dubey, “Development of chalcogenide glass photoresists for gray scale lithography,” J. Non-Cryst. Solids352(6-7), 589–594 (2006).
[CrossRef]

Vlcek, M.

J. Orava, T. Wagner, M. Krbal, T. Kohoutek, M. Vlcek, P. Klapetek, and M. Frumar, “Selective dissolution of Ag-x(As0.33S0.67-ySey)(100-x) chalcogenide thin films,” J. Non-Cryst. Solids354(2-9), 533–539 (2008).
[CrossRef]

J. Orava, T. Wagner, A. Krbal, T. Kohoutek, M. Vlcek, and M. Frumar, “Selective wet-etching and characterization of chalcogenide thin films in inorganic alkaline solutions,” J. Non-Cryst. Solids353(13-15), 1441–1445 (2007).
[CrossRef]

T. Kohoutek, T. Wagner, M. Vlcek, M. Vlcek, and M. Frumar, “Spin-coated As33S67-xSex thin films: the effect of annealing on structure and optical properties,” J. Non-Cryst. Solids352(9-20), 1563–1566 (2006).
[CrossRef]

T. Kohoutek, T. Wagner, M. Vlcek, M. Vlcek, and M. Frumar, “Spin-coated As33S67-xSex thin films: the effect of annealing on structure and optical properties,” J. Non-Cryst. Solids352(9-20), 1563–1566 (2006).
[CrossRef]

J. Orava, T. Wagner, M. Krbal, T. Kohoutek, M. Vlcek, and M. Frumar, “Selective wet-etching of undoped and silver photodoped amorphous thin films of chalcogenide glasses in inorganic alkaline solutions,” J. Non-Cryst. Solids352(9-20), 1637–1640 (2006).
[CrossRef]

T. Kohoutek, T. Wágner, M. Vlček, M. Vlček, and M. Frumar, “Physico-chemical properties of spin-coated Ag–As–Sb–S films,” J. Non-Cryst. Solids351(27-29), 2205–2209 (2005).
[CrossRef]

T. Kohoutek, T. Wágner, M. Vlček, M. Vlček, and M. Frumar, “Physico-chemical properties of spin-coated Ag–As–Sb–S films,” J. Non-Cryst. Solids351(27-29), 2205–2209 (2005).
[CrossRef]

T. Kohoutek, T. Wagner, J. Orava, M. Frumar, V. Perina, A. Mackova, V. Hnatowitz, M. Vlcek, and S. Kasap, “Amorphous films of Ag-As-S system prepared by spin-coating technique, preparation techniques and films physico-chemical properties,” Vacuum76(2-3), 191–194 (2004).
[CrossRef]

T. Wágner, M. Krbal, T. Kohoutek, V. Peřina, M. Vlček, M. Vlček, and M. Frumar, “Kinetics of optically- and thermally-induced diffusion and dissolution of silver in spin-coated As33S67 amorphous films; their properties and structure,” J. Non-Cryst. Solids326–327, 233–237 (2003).
[CrossRef]

T. Wágner, M. Krbal, T. Kohoutek, V. Peřina, M. Vlček, M. Vlček, and M. Frumar, “Kinetics of optically- and thermally-induced diffusion and dissolution of silver in spin-coated As33S67 amorphous films; their properties and structure,” J. Non-Cryst. Solids326–327, 233–237 (2003).
[CrossRef]

J. Gutwirth, T. Wagner, T. Kohoutek, M. Vlcek, S. Schroeter, V. Kovanda, M. Vlcek, and M. Frumar, “Physical properties and structure of amorphous Ag-x(Sb0.33S0.67)(100-x) prepared by optically-induced diffusion and dissolution of silver into spin-coated amorphous Sb33S67 films and their application for optical recording,” J. Optoelectron. Adv. Mater.5, 1139–1146 (2003).

J. Gutwirth, T. Wagner, T. Kohoutek, M. Vlcek, S. Schroeter, V. Kovanda, M. Vlcek, and M. Frumar, “Physical properties and structure of amorphous Ag-x(Sb0.33S0.67)(100-x) prepared by optically-induced diffusion and dissolution of silver into spin-coated amorphous Sb33S67 films and their application for optical recording,” J. Optoelectron. Adv. Mater.5, 1139–1146 (2003).

Volterra, V.

S. Shtutina, M. Klebanov, V. Lyubin, S. Rosenwaks, and V. Volterra, “Photoinduced Phenomena in Spin-Coated Vitreous As2S3 and AsSe Films,” Thin Solid Films261(1-2), 263–265 (1995).
[CrossRef]

Wagner, T.

J. Orava, T. Wagner, M. Krbal, T. Kohoutek, M. Vlcek, P. Klapetek, and M. Frumar, “Selective dissolution of Ag-x(As0.33S0.67-ySey)(100-x) chalcogenide thin films,” J. Non-Cryst. Solids354(2-9), 533–539 (2008).
[CrossRef]

T. Kohoutek, T. Wagner, M. Frumar, A. Chrissanthopoulos, O. Kostadinova, and S. N. Yannopoulos, “Effect of cluster size of chalcogenide glass nanocolloidal solutions on the surface morphology of spin-coated amorphous films,” J. Appl. Phys.103(6), 063511 (2008).
[CrossRef]

T. Kohoutek, T. Wagner, J. Orava, M. Krbal, A. Fejfar, T. Mates, S. O. Kasap, and M. Frumar, “Surface morphology of spin-coated As-S-Se chalcogenide thin films,” J. Non-Cryst. Solids353(13-15), 1437–1440 (2007).
[CrossRef]

M. Krbal, T. Wagner, T. Kohoutek, P. Nemec, J. Orava, and M. Frumar, “The comparison of Ag-As33S67 films prepared by thermal evaporation (TE), spin-coating (SC) and a pulsed laser deposition (PLD),” J. Phys. Chem. Solids68(5-6), 953–957 (2007).
[CrossRef]

J. Orava, T. Wagner, A. Krbal, T. Kohoutek, M. Vlcek, and M. Frumar, “Selective wet-etching and characterization of chalcogenide thin films in inorganic alkaline solutions,” J. Non-Cryst. Solids353(13-15), 1441–1445 (2007).
[CrossRef]

T. Kohoutek, T. Wagner, M. Vlcek, M. Vlcek, and M. Frumar, “Spin-coated As33S67-xSex thin films: the effect of annealing on structure and optical properties,” J. Non-Cryst. Solids352(9-20), 1563–1566 (2006).
[CrossRef]

J. Orava, T. Wagner, M. Krbal, T. Kohoutek, M. Vlcek, and M. Frumar, “Selective wet-etching of undoped and silver photodoped amorphous thin films of chalcogenide glasses in inorganic alkaline solutions,” J. Non-Cryst. Solids352(9-20), 1637–1640 (2006).
[CrossRef]

T. Kohoutek, T. Wagner, J. Orava, M. Frumar, V. Perina, A. Mackova, V. Hnatowitz, M. Vlcek, and S. Kasap, “Amorphous films of Ag-As-S system prepared by spin-coating technique, preparation techniques and films physico-chemical properties,” Vacuum76(2-3), 191–194 (2004).
[CrossRef]

J. Gutwirth, T. Wagner, T. Kohoutek, M. Vlcek, S. Schroeter, V. Kovanda, M. Vlcek, and M. Frumar, “Physical properties and structure of amorphous Ag-x(Sb0.33S0.67)(100-x) prepared by optically-induced diffusion and dissolution of silver into spin-coated amorphous Sb33S67 films and their application for optical recording,” J. Optoelectron. Adv. Mater.5, 1139–1146 (2003).

Wágner, T.

T. Kohoutek, T. Wágner, M. Vlček, M. Vlček, and M. Frumar, “Physico-chemical properties of spin-coated Ag–As–Sb–S films,” J. Non-Cryst. Solids351(27-29), 2205–2209 (2005).
[CrossRef]

T. Wágner, M. Krbal, T. Kohoutek, V. Peřina, M. Vlček, M. Vlček, and M. Frumar, “Kinetics of optically- and thermally-induced diffusion and dissolution of silver in spin-coated As33S67 amorphous films; their properties and structure,” J. Non-Cryst. Solids326–327, 233–237 (2003).
[CrossRef]

Waits, C. M.

A. Kovalskiy, A. Vlcek, H. Jain, A. Fiserova, C. M. Waits, and M. Dubey, “Development of chalcogenide glass photoresists for gray scale lithography,” J. Non-Cryst. Solids352(6-7), 589–594 (2006).
[CrossRef]

Waldmann, M.

M. Waldmann, J. D. Musgraves, K. Richardson, and C. B. Arnold, “Structural properties of solution processed Ge23Sb7S70 glass materials,” J. Mater. Chem.22(34), 17848 (2012).
[CrossRef]

E. A. Sanchez, M. Waldmann, and C. B. Arnold, “Chalcogenide glass microlenses by inkjet printing,” Appl. Opt.50(14), 1974–1978 (2011).
[CrossRef] [PubMed]

Wylangowski, G.

K. E. Youden, T. Grevatt, R. W. Eason, H. N. Rutt, R. S. Deol, and G. Wylangowski, “Pulsed-laser deposition of Ga-La-S chalcogenide glass thin-film optical wave-guides,” Appl. Phys. Lett.63(12), 1601–1603 (1993).
[CrossRef]

Yannopoulos, S. N.

C. Markos, S. N. Yannopoulos, and K. Vlachos, “Chalcogenide glass layers in silica photonic crystal fibers,” Opt. Express20(14), 14814–14824 (2012).
[CrossRef] [PubMed]

T. Kohoutek, T. Wagner, M. Frumar, A. Chrissanthopoulos, O. Kostadinova, and S. N. Yannopoulos, “Effect of cluster size of chalcogenide glass nanocolloidal solutions on the surface morphology of spin-coated amorphous films,” J. Appl. Phys.103(6), 063511 (2008).
[CrossRef]

Youden, K. E.

K. E. Youden, T. Grevatt, R. W. Eason, H. N. Rutt, R. S. Deol, and G. Wylangowski, “Pulsed-laser deposition of Ga-La-S chalcogenide glass thin-film optical wave-guides,” Appl. Phys. Lett.63(12), 1601–1603 (1993).
[CrossRef]

Yu, C.

A. Ganjoo, H. Jain, C. Yu, J. Irudayaraj, and C. G. Pantano, “Detection and fingerprinting of pathogens: Mid-IR biosensor using amorphous chalcogenide films,” J. Non-Cryst. Solids354(19-25), 2757–2762 (2008).
[CrossRef]

Yusupov, I. Y.

S. A. Zenkin, S. B. Mamedov, M. D. Mikhailov, E. Y. Turkina, and I. Y. Yusupov, “Mechanism for interaction of amine solutions with monolithic glasses and amorphous films in the As-S system,” Glass Phys. Chem.23, 393–399 (1997).

Zdyrko, B.

J. J. Hu, J. D. Musgraves, N. Carlie, B. Zdyrko, I. Luzinov, A. Agarwal, K. Richardson, and L. Kimerling, “Development of chipscale chalcogenide glass based infrared chemical sensors,” Quantum Sensing and Nanophotonic Devices7945,79452C (2011).

K. Richardson, L. Petit, N. Carlie, B. Zdyrko, I. Luzinov, J. Hu, A. Agarwal, L. Kimerling, T. Anderson, and M. Richardson, “Progress on the fabrication of on-chip, integrated chalcogenide glass (Chg)-based sensors,” J Nonlinear Opt Phys19(01), 75–99 (2010).
[CrossRef]

N. Carlie, J. D. Musgraves, B. Zdyrko, I. Luzinov, J. J. Hu, V. Singh, A. Agarwal, L. C. Kimerling, A. Canciamilla, F. Morichetti, A. Melloni, and K. Richardson, “Integrated chalcogenide waveguide resonators for mid-IR sensing: leveraging material properties to meet fabrication challenges,” Opt. Express18(25), 26728–26743 (2010).
[CrossRef] [PubMed]

Zenkin, S. A.

S. A. Zenkin, S. B. Mamedov, M. D. Mikhailov, E. Y. Turkina, and I. Y. Yusupov, “Mechanism for interaction of amine solutions with monolithic glasses and amorphous films in the As-S system,” Glass Phys. Chem.23, 393–399 (1997).

Zha, Y.

Zou, Y.

Appl. Opt. (1)

Appl. Phys. Lett. (1)

K. E. Youden, T. Grevatt, R. W. Eason, H. N. Rutt, R. S. Deol, and G. Wylangowski, “Pulsed-laser deposition of Ga-La-S chalcogenide glass thin-film optical wave-guides,” Appl. Phys. Lett.63(12), 1601–1603 (1993).
[CrossRef]

Chem. Mater. (1)

T. A. Guiton and C. G. Pantano, “Solution/gelation of arseic trisulfide in amine solvents,” Chem. Mater.1(5), 558–563 (1989).
[CrossRef]

Development of chipscale chalcogenide glass based infrared chemical sensors (1)

J. J. Hu, J. D. Musgraves, N. Carlie, B. Zdyrko, I. Luzinov, A. Agarwal, K. Richardson, and L. Kimerling, “Development of chipscale chalcogenide glass based infrared chemical sensors,” Quantum Sensing and Nanophotonic Devices7945,79452C (2011).

Glass Phys. Chem. (2)

M. D. Mikhailov and N. A. Anikina, “On the influence of stirring conditions on the dissolution rate of chalcogenide glasses and films,” Glass Phys. Chem.37(1), 21–28 (2011).
[CrossRef]

S. A. Zenkin, S. B. Mamedov, M. D. Mikhailov, E. Y. Turkina, and I. Y. Yusupov, “Mechanism for interaction of amine solutions with monolithic glasses and amorphous films in the As-S system,” Glass Phys. Chem.23, 393–399 (1997).

J Nonlinear Opt Phys (1)

K. Richardson, L. Petit, N. Carlie, B. Zdyrko, I. Luzinov, J. Hu, A. Agarwal, L. Kimerling, T. Anderson, and M. Richardson, “Progress on the fabrication of on-chip, integrated chalcogenide glass (Chg)-based sensors,” J Nonlinear Opt Phys19(01), 75–99 (2010).
[CrossRef]

J. Appl. Phys. (5)

G. C. Chern and I. Lauks, “Spin-coated amorphous-chalcogenide films,” J. Appl. Phys.53(10), 6979–6982 (1982).
[CrossRef]

G. C. Chern, I. Lauks, and A. R. McGhie, “Spin coated amorphous chalcogenide films: Thermal properties,” J. Appl. Phys.54(8), 4596 (1983).
[CrossRef]

G. C. Chern and I. Lauks, “Spin coated amorphous chalcogenide films: Structural characterization,” J. Appl. Phys.54(5), 2701 (1983).
[CrossRef]

T. Kohoutek, T. Wagner, M. Frumar, A. Chrissanthopoulos, O. Kostadinova, and S. N. Yannopoulos, “Effect of cluster size of chalcogenide glass nanocolloidal solutions on the surface morphology of spin-coated amorphous films,” J. Appl. Phys.103(6), 063511 (2008).
[CrossRef]

K. H. Norian, G. C. Chern, and I. Lauks, “Morphology and thermal properties of solvent-cast arsenic sulfide films,” J. Appl. Phys.55(10), 3795–3798 (1984).
[CrossRef]

J. Colloid Interface Sci. (1)

T. Kohoutek, J. Orava, T. Sawada, and H. Fudouzi, “Inverse opal photonic crystal of chalcogenide glass by solution processing,” J. Colloid Interface Sci.353(2), 454–458 (2011).
[CrossRef] [PubMed]

J. Mater. Chem. (1)

M. Waldmann, J. D. Musgraves, K. Richardson, and C. B. Arnold, “Structural properties of solution processed Ge23Sb7S70 glass materials,” J. Mater. Chem.22(34), 17848 (2012).
[CrossRef]

J. Non-Cryst. Solids (13)

V. Takáts, F. C. Miller, H. Jain, C. Cserhati, I. A. Szabo, D. Beke, and S. Kokenyesi, “Surface pattern recording in amorphous chalcogenide layers,” J. Non-Cryst. Solids355(37-42), 1849–1852 (2009).
[CrossRef]

T. Kohoutek, T. Wagner, M. Vlcek, M. Vlcek, and M. Frumar, “Spin-coated As33S67-xSex thin films: the effect of annealing on structure and optical properties,” J. Non-Cryst. Solids352(9-20), 1563–1566 (2006).
[CrossRef]

J. Orava, T. Wagner, A. Krbal, T. Kohoutek, M. Vlcek, and M. Frumar, “Selective wet-etching and characterization of chalcogenide thin films in inorganic alkaline solutions,” J. Non-Cryst. Solids353(13-15), 1441–1445 (2007).
[CrossRef]

J. Orava, T. Wagner, M. Krbal, T. Kohoutek, M. Vlcek, P. Klapetek, and M. Frumar, “Selective dissolution of Ag-x(As0.33S0.67-ySey)(100-x) chalcogenide thin films,” J. Non-Cryst. Solids354(2-9), 533–539 (2008).
[CrossRef]

T. Kohoutek, T. Wágner, M. Vlček, M. Vlček, and M. Frumar, “Physico-chemical properties of spin-coated Ag–As–Sb–S films,” J. Non-Cryst. Solids351(27-29), 2205–2209 (2005).
[CrossRef]

M. D. Michailov, S. B. Mamedov, and S. V. Tsventarnyi, “Dissolution Kinetics of Glassy Arsenic Sulfide in Alkali and Amine Solutions,” J. Non-Cryst. Solids176(2-3), 258–262 (1994).
[CrossRef]

A. Ganjoo, H. Jain, C. Yu, J. Irudayaraj, and C. G. Pantano, “Detection and fingerprinting of pathogens: Mid-IR biosensor using amorphous chalcogenide films,” J. Non-Cryst. Solids354(19-25), 2757–2762 (2008).
[CrossRef]

A. Kovalskiy, A. Vlcek, H. Jain, A. Fiserova, C. M. Waits, and M. Dubey, “Development of chalcogenide glass photoresists for gray scale lithography,” J. Non-Cryst. Solids352(6-7), 589–594 (2006).
[CrossRef]

J. Orava, T. Wagner, M. Krbal, T. Kohoutek, M. Vlcek, and M. Frumar, “Selective wet-etching of undoped and silver photodoped amorphous thin films of chalcogenide glasses in inorganic alkaline solutions,” J. Non-Cryst. Solids352(9-20), 1637–1640 (2006).
[CrossRef]

T. Kohoutek, T. Wagner, J. Orava, M. Krbal, A. Fejfar, T. Mates, S. O. Kasap, and M. Frumar, “Surface morphology of spin-coated As-S-Se chalcogenide thin films,” J. Non-Cryst. Solids353(13-15), 1437–1440 (2007).
[CrossRef]

T. Wágner, M. Krbal, T. Kohoutek, V. Peřina, M. Vlček, M. Vlček, and M. Frumar, “Kinetics of optically- and thermally-induced diffusion and dissolution of silver in spin-coated As33S67 amorphous films; their properties and structure,” J. Non-Cryst. Solids326–327, 233–237 (2003).
[CrossRef]

S. Song, N. Carlie, J. Boudies, L. Petit, K. Richardson, and C. B. Arnold, “Spin-coating of Ge23Sb7S70 chalcogenide glass thin films,” J. Non-Cryst. Solids355(45-47), 2272–2278 (2009).
[CrossRef]

Y. Zha, S. Fingerman, S. J. Cantrell, and C. B. Arnold, “Pore formation and removal in solution-processed amorphous arsenic sulfide films,” J. Non-Cryst. Solids369, 11–16 (2013).
[CrossRef]

J. Optoelectron. Adv. Mater. (2)

V. Balan, C. Vigreux, and A. Pradel, “Chalcogenide thin films deposited by radio-frequency sputtering,” J. Optoelectron. Adv. Mater.6, 875–882 (2004).

J. Gutwirth, T. Wagner, T. Kohoutek, M. Vlcek, S. Schroeter, V. Kovanda, M. Vlcek, and M. Frumar, “Physical properties and structure of amorphous Ag-x(Sb0.33S0.67)(100-x) prepared by optically-induced diffusion and dissolution of silver into spin-coated amorphous Sb33S67 films and their application for optical recording,” J. Optoelectron. Adv. Mater.5, 1139–1146 (2003).

J. Phys. Chem. Solids (1)

M. Krbal, T. Wagner, T. Kohoutek, P. Nemec, J. Orava, and M. Frumar, “The comparison of Ag-As33S67 films prepared by thermal evaporation (TE), spin-coating (SC) and a pulsed laser deposition (PLD),” J. Phys. Chem. Solids68(5-6), 953–957 (2007).
[CrossRef]

Nat. Photonics (1)

B. J. Eggleton, B. Luther-Davies, and K. Richardson, “Chalcogenide photonics,” Nat. Photonics5, 141–148 (2011).

Opt. Express (7)

B. J. Eggleton, “Chalcogenide photonics: fabrication, devices and applications Introduction,” Opt. Express18(25), 26632–26634 (2010).
[CrossRef] [PubMed]

N. Carlie, J. D. Musgraves, B. Zdyrko, I. Luzinov, J. J. Hu, V. Singh, A. Agarwal, L. C. Kimerling, A. Canciamilla, F. Morichetti, A. Melloni, and K. Richardson, “Integrated chalcogenide waveguide resonators for mid-IR sensing: leveraging material properties to meet fabrication challenges,” Opt. Express18(25), 26728–26743 (2010).
[CrossRef] [PubMed]

C. Tsay, Y. Zha, and C. B. Arnold, “Solution-processed chalcogenide glass for integrated single-mode mid-infrared waveguides,” Opt. Express18(25), 26744–26753 (2010).
[CrossRef] [PubMed]

J. J. Hu, V. Tarasov, A. Agarwal, L. Kimerling, N. Carlie, L. Petit, and K. Richardson, “Fabrication and testing of planar chalcogenide waveguide integrated microfluidic sensor,” Opt. Express15(5), 2307–2314 (2007).
[CrossRef] [PubMed]

S. Song, J. Dua, and C. B. Arnold, “Influence of annealing conditions on the optical and structural properties of spin-coated As2S3 chalcogenide glass thin films,” Opt. Express18(6), 5472–5480 (2010).
[CrossRef] [PubMed]

C. Tsay, E. Mujagić, C. K. Madsen, C. F. Gmachl, and C. B. Arnold, “Mid-infrared characterization of solution-processed As2S3 chalcogenide glass waveguides,” Opt. Express18(15), 15523–15530 (2010).
[CrossRef] [PubMed]

C. Markos, S. N. Yannopoulos, and K. Vlachos, “Chalcogenide glass layers in silica photonic crystal fibers,” Opt. Express20(14), 14814–14824 (2012).
[CrossRef] [PubMed]

Opt. Lett. (1)

Opt. Mater. (1)

V. Takats, P. Nemec, A. C. Miller, H. Jain, and S. Kokenyesi, “Surface patterning on amorphous chalcogenide nanomultilayers,” Opt. Mater.32(6), 677–679 (2010).
[CrossRef]

Opt. Mater. Express (2)

Proc. SPIE (1)

C. Grillet, M. W. Lee, X. Gai, S. Tomljenovic-Hanic, C. Monat, E. Magi, D. J. Moss, B. J. Eggleton, S. Madden, D. Y. Choi, D. Bulla, and B. Luther-Davies, “Chalcogenide glass photonic crystals: progress and prospects,” Proc. SPIE7609, 760913, 760913-9 (2010).
[CrossRef]

Thin Solid Films (4)

G. C. Chern, I. Lauks, and K. H. Norian, “Spin-coated amorphous chalcogenide films: Photoinduced effects,” Thin Solid Films123(4), 289–296 (1985).
[CrossRef]

S. Mamedov, “On the macromolecular mechanism of dissolution of As2S3 films in organic solutions,” Thin Solid Films226(2), 215–218 (1993).
[CrossRef]

J. J. Santiago, M. Sano, M. Hamman, and N. Chen, “Growth and optical characterization of spin-coated As2S3 multilayer thin-films,” Thin Solid Films147(3), 275–284 (1987).
[CrossRef]

S. Shtutina, M. Klebanov, V. Lyubin, S. Rosenwaks, and V. Volterra, “Photoinduced Phenomena in Spin-Coated Vitreous As2S3 and AsSe Films,” Thin Solid Films261(1-2), 263–265 (1995).
[CrossRef]

Vacuum (1)

T. Kohoutek, T. Wagner, J. Orava, M. Frumar, V. Perina, A. Mackova, V. Hnatowitz, M. Vlcek, and S. Kasap, “Amorphous films of Ag-As-S system prepared by spin-coating technique, preparation techniques and films physico-chemical properties,” Vacuum76(2-3), 191–194 (2004).
[CrossRef]

Other (3)

S. Song, “Solvent-casting of chalcogenide glasses and their applications in mid-infrared optics,” PhD thesis (Princeton University, 2011).

T. A. Guiton and C. G. Pantano, “Sol-to-Gel and Gel-to-Glass Transitions in the As2S3-Amine system,” in Material Research Society Symposium Proceedings, (Materials Research Society, 1988), pp. 509–514.
[CrossRef]

G. C. Chern, “Spin-coated amorphous chalcogenide films,” PhD thesis (University of Pennsylvania, 1984).

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Figures (10)

Fig. 1
Fig. 1

Chemical equations and cluster image. (Left) Electrophilic substitution reaction proposed for the arsenic sulfide dissolution process. (Right) Proposed schematic structure of As2S3 + n-propylamine. Reprinted with permission from J. Appl. Phy. 54, 2701(1983). Copyright 1983 American Institute of Physics.

Fig. 2
Fig. 2

Proposed As2S3/EDA solution species and gel-to-glass transition. (1) Lewis acid-base chelation model (2) Branched chains (3)(A) solution species; (B) amine loss; (C) elimination of As-S-S-As; (D) amorphous network. Reprinted with permission from Chem. Mater. 1(5), 558-563(1989). Copyright 1989 American Chemical Society.

Fig. 3
Fig. 3

Diminishing pore density shown in cross-sectional view of 3 scanning electron microscope(SEM) pictures positioned vertically. Films are processed with propylamine mixed with different amounts of EDA and baked at 180 °C for 6 h. Homogeneous films are obtained with 10% EDA added. Reprinted with permission from J. Non-Cryst. Solids. 369, 11-16(2013). Copyright 2013 Elsevier B.V.

Fig. 4
Fig. 4

Cross-sectional SEM pictures of Ge-Sb-S waveguides (a) before and (b) after solution cladding. Reprinted with permission from Opt. Exp. 18, 26728-26743 (2010). Copyright 2010 The Optical Society.

Fig. 5
Fig. 5

Two-layer arsenic sulfide structure by lamination. Left: Films with no annealing shows an interface in the middle; Right: Interface removed with annealing at 200°C. Reprinted with permission from Opt. Mater. Exp. 3, 309-317 (2013). Copyright 2013 The Optical Society.

Fig. 6
Fig. 6

Solution casting and molding method. (a) Generating the PDMS mold. (L-R) Master mold patterned by photolithography using SU-8 photoresist. PDMS precursor cast on master mold. Cured PDMS mold peeled away. (b) Forming As2S3 structures by capillarity. (L-R) PDMS mold placed on substrate, forming channels. Droplets of As2S3 solution pipette to inlets. Channels fill by capillary action. Sample is baked in vacuum oven to solidify structures. PDMS mold is removed. Reprinted with permission from Opt. Exp. 18, 15523-15530 (2010). Copyright 2010 The Optical Society.

Fig. 7
Fig. 7

SEM image of integrated As2S3 waveguide and QCL. The waveguide is aligned to the right-most laser ridge. The waveguide bend has r = 1mm, and a total length of 7mm. Reprinted with permission from Opt. Lett. 35, 3324-3326 (2010). Copyright 2010 The Optical Society.

Fig. 8
Fig. 8

Waveguides by µTM. (a) A PDMS mold with relief-pattern is attached to a microscope cover slip, which serves as a rigid backing. (b) As2S3 solution is spun-coat onto the mold surface. (c) A LiNbO3 substrate, 0.5mm thick, is pressed down onto the As2S3 film. It adheres by capillary forces. The sample is baked to solidify the As2S3 structures. (d) The PDMS mold is removed. The As2S3 film stays adhered to the LiNbO3 substrate. Reprinted with permission from Opt. Exp. 18, 26744-26753 (2010). Copyright 2010 The Optical Society.

Fig. 9
Fig. 9

(a) Cross-section of the core of a photonic crystal fiber deposited with As2S3 layers (b) Single hole with As2S3 layer. Reprinted with permission from Opt. Exp. 20, 14814-14824 (2012). Copyright 2012 The Optical Society.

Fig. 10
Fig. 10

(A) Optical microscope image of the inverse opal As–S structure (orange stripe) obtained on the edge of silica/As–S opal film by removing silica beads in HF solution (B) SEM image shows the cleaved silica/As–S opal film (C) The inverse opal As–S structure obtained by rinsing the samples edge in HF acid solution. Reprinted with permission from J. Colloid. Interf. Sci. 353, 454-458 (2011). Copyright 2011 Elsevier B.V.

Equations (6)

Equations on this page are rendered with MathJax. Learn more.

As 2 S 3 + 6 C 3 H 7 NH 2 > ( C 3 H 7 NH 3 ) 3 AsS 3 + ( C 3 H 7 NH ) 3 As
OH + AsS 3/2 <> OH ··· AsS 3/2                  ( fast )
OH ··· AsS 3/2 > OHAsS 2/2 + S 1/2    ( slow )
( C 2 H 5 ) 2 NH + S n > ( C 2 H 5 ) 2 NH + S n
( C 2 H 5 ) 2 NH + S n + As 2 S 4/2 + ( C 2 H 5 ) 2 NH> ( C 2 H 5 ) 2 NH 2 + S AsS 2/2 + S n1 + ( C 2 H 5 ) 2 NAsS 2/2 
2 S 2/2 AsSH > S 2/2 AsSAs S 2/2 + H 2 S. 

Metrics